JPH10141959A - Gyro apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a gyro apparatus in which the electrostatic support force of a capacitor, the sensitivity of a change in a capacitance with reference to the displacement in the radial direction of a gyro motor and a restraint force or a restoring force can be improved by a method wherein an electric field at the end part of the capacitor which is constituted of the electrode part and of the electrostatic support electrode of a gyro case is suppressed. SOLUTION: An auxiliary electrode 323 is maintained at a potential which is identical to that of the electrode part of a corresponding gyro rotor. The potential of the electrode part of the rotor is held at zero, and, consequently, the potential of the electrode 323 is held at zero. The terminal part 323R' of the electrode 323 is grounded, and it is grounded via a through hole which is formed in an upper-side bottom material 22. In this manner, when the potential of the electrode 323 is made identical to the potential of the electrode part of the gyro rotor, an electric field which is generated at the end part of a capacitor which is constituted of the electrostatic support electrode 323 installed at a tyro case and of the electrode part of the rotor is suppressed, and an electrostatic support force by the capacitor and the sensitivity of a change in a capacitance with reference to the potential in the radial direction of the rotor are improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration detecting gyro device suitable for use in a moving body such as an automobile, a ship, an aircraft, etc., for detecting an angular velocity or an angular change and an acceleration with respect to an inertial space. More specifically, the present invention relates to an extremely small acceleration detecting gyro device of a type in which a gyro rotor is floatingly supported by an electrostatic supporting force.

[0002]

2. Description of the Related Art An example of a conventional gyro apparatus will be described with reference to FIGS. This gyro apparatus is disclosed in Japanese Patent Application No. 7-125358 (T9500037) filed on May 24, 1995 by the same applicant as the present applicant, and for details, refer to the same application. .

First, a description will be given with reference to FIG. The gyro device includes a thin disk-shaped gyro rotor 20 and a gyro case 21 for accommodating the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown in the figure. The Z-axis is taken upward along the central axis of the gyro device, and the X-axis and Y-axis are taken perpendicular to it. The spin axis of the gyro rotor 20 is arranged along the Z axis.

[0005] As shown in FIG.
Has an upper bottom member 22, a lower bottom member 24, and a spacer 23 connecting the both, and the spacer 23 has an annular inner wall 23A.
Having. Thus, the upper bottom member 22 and the lower bottom member 2
4 and the inner wall 23 </ b> A of the spacer 23, a disk-shaped closed cavity 26 for accommodating the gyro rotor 20 is formed inside the gyro case 21. Such a cavity 26 is evacuated by a suitable method.

A recess 23B is formed outside the annular inner wall 23A of the spacer 23, and the recess 23B is connected to the cavity 26 by a passage 23C. The height of such a passage 23C may be several to several tens of μm. A getter member 33 is disposed in such a concave portion 23B. Thereby, the cavity 26 can be maintained at a high degree of vacuum for a long time.

[0007] The gyro rotor 20 is formed of a conductive material. For example, single-crystal silicon (silicon) may be used as such a conductive material. By using a single crystal material, it is possible to provide a high-accuracy gyro rotor that is less affected by thermal distortion and aging. The upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are formed of a non-conductive material, for example, glass. The spacer 23 may be formed of the same material as the gyro rotor 20.

As shown on the right side of FIGS. 6A and 6B, a plurality of annular electrode portions 200A, 200B, 200C, 20
0D and 200A ', 200B', 200C'200
D 'is formed. That is, a plurality of annular grooves 200a, 200b, 200c, 20 are concentrically formed on the upper surface and the lower surface.
0d and 200a ', 200b', 200c ', 200
d 'is formed, and the annular groove forms a projecting annular electrode portion.

On the upper and lower surfaces of the gyro rotor 20, annular electrode portions 200A, 200B, 200C, 20
0D and 200A ', 200B', 200C ', 200
Driving electrode portions 200E and 200E 'are formed inside D'. Such drive electrode units 200E, 200
E ′ is configured as a plurality of sector-shaped protrusions formed between two concentric annular grooves 200d, 200e and 200d ′, 200e ′, and may be arranged in a ring along the circumference in a line. .

The annular electrode portions 200A, 200B formed as protrusions on the upper and lower surfaces of the gyro rotor 20 are provided.
200C, 200D and 200A ', 200B', 20
0C ′, 200D ′ and drive electrode units 200E, 200
E 'may be formed coplanar.

On the other hand, as shown on the left side of FIGS. 6A and 6B, at least three pairs of electrostatic support electrodes, in this example, First, second, third and fourth pairs of electrostatic support electrodes 2
21, 231, 222, 232, 223, 233 and 2
24 and 234 are arranged. The four pairs of electrostatic support electrodes are arranged at an angular interval of 90 ° from each other along the circumferential direction. For example, first and third pairs of electrostatic support electrodes 22
1, 231 and 223 and 233 are arranged along the X-axis, and the second and fourth pairs of electrostatic support electrodes 222, 232 and 224 and 234 are arranged along the Y-axis.

Each electrostatic support electrode comprises a pair of combs.
For example, on the left side of FIG. 6B, a third pair of electrostatic support electrodes 22
3 and 233, an electrostatic support electrode 223 formed on the inner surface of the upper bottom member 22 is shown. This electrostatic support electrode 223 is composed of two comb-shaped portions 223-1 and 22-1 separated from each other.
23-2, wherein the two combs are spaced apart from each other.

One of the comb portions 223-1 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223A and 223C extending in the circumferential direction. Similarly, the other comb-shaped portion 223-2 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223B and 223D extending in the circumferential direction. Circumferential part 223 of each comb-shaped part 223-1, 223-2
A, 223C and 223B, 223D are alternately arranged so as to sandwich the other. Each comb 223-1, 22
Terminal portions 2 are provided at the ends of the radius portions 223R and 223R of 3-2.
23R 'and 223R' are formed respectively.

On the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, four pairs of electrostatic support electrodes 221 are provided.
231, 222, 232, 223, 233 and 224;
Driving electrodes 225 and 235 are formed inside 234, respectively. The driving electrodes 225 and 235 may be formed in a plurality of sectors arranged in a line along the circumference in a line.

The annular electrode section 200 of the gyro rotor 20
A, 200B, 200C, 200D and 200A ', 2
00B ', 200C', 200D 'and gyro case 2
1 of the upper support member 22 and the lower support member 24 of the electrostatic support electrodes 221, 222, 223, 224 and 231, 232;
The dimensions of 233 and 234 will be described.

The outer diameter D of the gyro rotor 20 may be 5 mm or less, the thickness t may be 0.3 mm or less,
The mass may be less than 10 milligrams. In FIG.
Book-shaped annular electrode portions 200A, 200B, 200C, 20
0D and 200A ', 200B', 200C ', 200
Although D 'is shown, a large number of annular electrode portions are actually formed. For example, the radial width L of each electrode portion
Is about 20 μm and is formed at regular intervals at a pitch of about 40 μm, and about 50 annular electrode portions are formed in an annular region having a width of about 2 mm in the radial direction. It is preferable that the width L and the pitch p of each electrode portion in the radial direction are as small as possible as long as the manufacturing method allows.

The electrostatic support electrodes 221, 222, 22 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21.
3, 224 and 231, 232, 233, and 234 have the dimensions of the annular electrode portions 200A, 200B, 200C, and 200.
D and 200A ', 200B', 200C ', 200
It may be formed corresponding to the dimension of D ′. For example, in FIG. 6, each comb-shaped part 223-1 of the third electrostatic support electrode 223,
223-2 circumferential portions 223A, 223C and 223B,
223D is shown as including a total of four,
Actually, a large number of circumferential portions are formed. For example, the radial width L of each circumference is about 20 μm, and about 40 μm
In this case, about 50 circumferential portions are formed in an annular region having a width of about 2 mm in the radial direction.

Next, referring to FIG. 7, the gyro rotor 20
Annular electrode portions 200A, 200B, 200C, 200
D and 200A ', 200B', 200C ', 200
D ′ and the electrostatic support electrodes 221, 222, 223, 22 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21
4 and 231, 232, 233, 234 will be described. For example, gyro rotor 2
The electrode pairs 200A, 200B, 200C, 200D and 200A ', 200B', 200C ', 200D' and the third pair of electrostatic support electrodes 223, 233 will be described.

As shown, the first gyro rotor 20
Of the third pair of electrostatic support electrodes 223, 233 with respect to the electrode portions 200A, 200A 'of the first pair.
3A respectively correspond to the second electrode units 200B, 200B.
The second circumferential portions 223B and 233B of the third pair of electrostatic support electrodes 223 correspond to B ′. Although not shown below, similarly, the third and fourth electrode units 200C,
Third and fourth circumferential portions 223C, 233C and 223D, 233 for 200C 'and 200D, 200D'.
D corresponds.

The annular electrode section 200 of the gyro rotor 20
A, 200B, 200C, 200D and 200A ', 2
00B ', 200C' and 200D 'in the radial direction are L
₁ , the pitch in the radial direction is p _1, and the circumferential portions 223A, 223 of the corresponding arc-shaped electrostatic support electrodes 223, 233
B, 223C, 223D and 233A, 233B, 23
The radial width of 3C, 233D is L ₂ , and the radial pitch is p ₂ . Both pitches p ₁ and p ₂ in the radial direction are equal to each other. Both radial widths L ₁ , L ₂ are also preferably equal to each other.

[0021]

L ₁ = L ₂ = L p ₁ = p ₂ = p

The annular electrode section 200 of the gyro rotor 20
A, 200B, 200C, 200D and 200A ', 2
00B ', 200C', 200D 'average radius, ie
The distance from the Z axis to the center position of the width of the ring is r ₁ , and the circumferential portion 223 of the corresponding arc-shaped electrostatic support electrodes 223 and 233
A, 233A, 223B, 233B, 223C, 233
C and 223D, the average radius of 233D, i.e., the distance from the Z axis to the center position of the arc width is r _2. As shown, these average radii r ₁ , r ₂ are not equal to each other, ie one is larger or smaller.

The annular electrode section 200 of the gyro rotor 20
A, 200B, 200C, 200D and 200A ', 2
00B ', 200C', the average radius r ₁ and an arc-shaped circumferential portion 223A of 200D ', 233A, 223B, 233B
And 223C, 233C, 223D, 233D, the difference Δr = r ₂ −r ₁ of the average radius r ₂ may be half the radial width L, L / 2, as shown, and the radial pitch p
Of p / 4.

[0024]

## EQU2 ## Δr = r ₂ −r ₁ = p / 4 = L / 2

Next, the annular electrode portions 200A, 200B, 200C, 200D and 200 of the gyro rotor 20 are formed.
A ′, 200B ′, 200C ′, 200D ′ and the electrostatic support electrodes 221, 222, 223, 224 and 231 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21;
The relative positional relationship between 232, 233, and 234 will be described.

When the gyro rotor 20 is at the reference position, that is, when the gyro rotor 20 rotating at a high speed is XY
Consider a case where the spin axis is parallel to a plane and the spin axis is on the Z axis.

At this time, the gap δ between the upper electrode portions 200A, 200B, 200C, 200D of the gyro rotor 20 and the corresponding electrostatic support electrodes 221, 222, 223, 224 of the upper bottom member 22 of the gyro case 21 is set.
And the lower electrode portion 200A ′ of the gyro rotor 20;
00B ′, 200C ′, 200D ′ and the corresponding electrostatic support electrodes 23 of the lower bottom member 24 of the gyro case 21
The gaps δ between 1,232,233,234 are equal. Such a gap δ may be several μm, for example δ = 2-5 μm.

First electrode section 200 of gyro rotor 20
A, 200A 'are the corresponding electrostatic support electrodes 223, 233
Are deflected radially inward from the first circumferential portions 223A and 233A. Similarly, the second of the gyro rotor 20,
Third and fourth electrode units 200B, 200B ', 200
C, 200C 'and 200D, 200D' are the second, third and fourth circumferential portions 223A, 233A, 223B, 233B, 223 of the corresponding electrostatic support electrodes 223, 233.
C, 233C and 223D, 233D are deflected radially inward.

The electrode portion of the gyro rotor 20 and the first and second
And a fourth pair of electrostatic support electrodes 221, 231, 222,
232, 224, and 234. Further, the electrode portions 200A, 200B, 2
00C, 200D, 200A ', 200B', 200
The same applies when the average radius r ₁ of C ′ and 200D ′ is larger than the average radius r ₂ of the corresponding circumferential portion of the electrostatic support electrode.

Here, the reason why this electrostatic supporting electrode is constituted so as to include a pair of comb-shaped portions which are arranged so as to sandwich the other electrode alternately will be described. With this configuration, the capacitance between each pair of comb portions and the corresponding electrode portion of the gyro rotor 20 is equal on the upper side and the lower side of the gyro rotor 20. For example, in the first electrostatic support electrodes 221 of the first pair of electrostatic support electrodes 221 and 231, the first comb-shaped portions 221-1 (221A and 221C) and the first and second gyro rotors 20 corresponding to the first comb-shaped portions 221-1 and 221C are formed. The capacitance between the third electrode portions 200A and 200C is the second comb-shaped portion 221-2 (221B and 221D) and the corresponding second and third electrode portions 200C and 200C of the gyro rotor 20.
Equal to the capacitance between the 00D are both C _1A.

Therefore, the first comb portions 221-1 (221)
A, 221C) and the control DC voltage applied to the second comb portions 221-2 (221B, 221D) are equal in magnitude and opposite in polarity, for example, ± V _1A . Thus, the potential of the gyro rotor 20 can be made zero. This will be discussed later in FIG.
Will be described again with reference to FIG.

As described above, since the potential of the gyro rotor 20 which is floatingly supported by the electrostatic supporting force is always zero, the static force acting between the electrode portion of the gyro rotor 20 and the electrostatic supporting electrode of the gyro case 21. It is possible to freely control the electric support force to a desired value.

The same applies to the second electrostatic support electrode 231 of the first pair of electrostatic support electrodes 221 and 231. Also, the second, third and fourth electrostatic support electrodes 222, 232, 2
The same applies to 23, 233, 224, and 234.

The driving electrode section 2 of the gyro rotor 20
The drive electrodes 225 and 235 of the gyro case 21 corresponding to 00E and 200E 'may be arranged in the same shape and at the same position in the radial direction.

On the upper and lower surfaces of the gyro rotor 20,
Protrusions 200F and 200F 'are formed at the center,
A recess 2 is provided at the center of each of the protrusions 200F and 200F '.
00f and 200f 'are formed. On the other hand, the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are respectively provided at the center thereof with the discharge stoppers 127 and 12 respectively.
8 are provided. Such stoppers 127, 128
Are arranged corresponding to the concave portions 200f and 200f 'formed at the center of the upper surface and the lower surface of the gyro rotor 20.

The discharge and stoppers 127 and 128 limit the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction, and prevent the gyro rotor 20 from contacting the inner surface of the gyro case 21. It is provided for discharging static electricity accumulated in the gyro rotor 20.

When the gyro rotor 20 is displaced in the Z-axis direction and approaches the inner surface of the gyro case 21, before the electrodes of the gyro rotor 20 come into contact with the electrodes of the gyro case 21, the discharge / stop stoppers 127 and 128 are turned on. 20 abuts the bottoms of the recesses 200f, 200f '. Further, when the gyro rotor 20 is displaced in the X-axis or Y-axis direction, before the gyro rotor 20 comes into contact with the circumferential inner wall 23A of the gyro case 21, the discharge and stopper 127, 1
28 are recesses 200f, 200f 'of the gyro rotor 20.
Abuts the inner circumferential wall of

Accordingly, the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction is restricted, and the gyro rotor 20 is prevented from contacting the inner surface of the gyro case 21. In addition, when the gyro rotor 20 stops and lands, the discharge stoppers 127 and 128 abut against the recesses 200f and 200f 'of the gyro rotor 20, so that the static electricity accumulated in the gyro rotor 20 passes through the discharge stoppers 127 and 128. Is discharged to the outside.

Electrostatic support electrodes 221 and 23 formed on the upper bottom member 22 or the lower bottom member 24 of the gyro case 21
1, 222, 232, 223, 233, 224, 234
The drive electrodes 225 and 235 may be electrically connected to an external power supply or an external circuit by through-hole connection. For example, as shown, the upper bottom member 22 or the lower bottom member 24 has a small hole, that is, a through hole 22B,
4A is provided, and a metal film is formed on the inner surface of the through hole. By such a metal film, the electrostatic supporting electrode is connected to the external mechanism control circuits 123 and 131.

Next, a rotor drive system in the conventional gyro apparatus will be described. This rotor drive system is a gyro rotor 2
0 and the driving electrodes 225 and 23 formed on the upper bottom member 22 or the lower bottom member 24 of the gyro case 21.
5 is included. As described above, the driving electrode portion 200E and the driving electrode 225 and the driving electrode portion 200E 'and the driving electrode 235 are arranged in a single row on the circumference of the same radius, and each of the driving electrode portions 200E and the driving electrodes 225 has a plurality of sector-shaped sectors. Department.

The drive electrode portions 200E and 200E 'and the drive electrodes 225 and 235 constitute a three-phase electrode. The driving electrode portion 200E on the upper side of the gyro rotor 20 includes four fan-shaped portions separated from each other by a central angle of 90 degrees,
The lower drive electrode portion 200E 'includes four fan-shaped portions separated from each other by a central angle of 90 degrees.

Correspondingly, the driving electrode 225 on the upper side of the gyro case 21 includes twelve fan-shaped portions spaced at the same central angle, and the driving electrode 235 on the lower side at the same central angle. Includes twelve spaced sectors. Each of the twelve driving electrodes 225 or 235 includes four sets of sectors, each set having three sectors, a first phase, a second phase.
It consists of a phase and a third phase sector.

The sectors of the corresponding phase of each set of drive electrodes 225 or 235 are electrically connected to one another. For example, four driving electrodes 225 or 235 of the first phase are connected to each other, and four driving electrodes 225 or 23 of the second phase are connected.
5 are connected to each other, and the four driving electrodes 225 or 235 of the third phase are connected to each other.

A three-phase driving voltage is applied to the three-phase common terminal. The driving voltage may be a step voltage or a pulse voltage. Such drive voltages are sequentially switched to four adjacent sectors of the next phase. The switching of the driving voltage is performed in synchronization with the rotation of the gyro rotor 20. Thereby, the gyro rotor 20 rotates at high speed. Since the gap 26 of the gyro case 21 is maintained in a vacuum, the driving voltage may be cut off when the rotation speed of the gyro rotor 20 increases, but the driving voltage may be constantly applied. .

The driving electrode section 20 constituting the three-phase electrode
OE and 200E 'and drive electrodes 225, 235 may be configured to include more sectors. For example,
Each of the driving electrode portions 200E and 200E 'may include five sectors, and correspondingly, each of the driving electrodes 225 and 235 may include five sets (15) of sectors. .

FIG. 8 shows a control loop of a conventional gyro apparatus.
Show. This control loop includes four pairs of electrostatic support electrodes 221-2.
24, a mechanism control circuit 121 connected to 231 to 234
To 124, 131 to 134 and each mechanism control circuit 121 to 1
Output voltage P from 34_1A~ P _4A, P_1B~ P_4BEnter
DC voltage for control V_1A~ V_4A, V_1B~ V_4BControl to generate
And an operation unit 140. Generated by the control operation unit 140
Controlled DC voltage V_1A~ V_4A, V_1B~ V_4BIs each machine
It is supplied to the structure control circuits 121 to 134. Control of each mechanism
The paths 121 to 134 are controlled DC voltage ± V_1A~ ± V_4A, ±
V_1B~ ± V_4BAnd AC voltage for displacement detection₀Superimposed and static
To the supporting electrodes 221 to 224 and 231 to 234
You.

The gyro apparatus has a control operation unit 14
Gyro acceleration output calculator 14 for inputting an output signal of 0
5, which will be described later.

Electrostatic support electrodes 221-224, 231-2
DC voltage for control ± V_1A~ ± V _4A, ± V_1B~ ± V_4B
Gyro rotor 20 is applied to
Floatingly supported and restrained in the sub-position. Mechanism control circuit 1
21 to 124 and 131 to 134 are four pairs of electrostatic support electrodes 2
21 to 224, 231 to 234,
4 pairs of electrostatic support electrodes 221-224, 231-234
The voltage applied to is detected. Electrostatic support electrodes 221-2
24, 231-234, AC voltage AC for displacement detection₀Mark
In addition, the mechanism control circuits 121 to 124, 1
31 to 134 are electrostatic support electrodes 221 to 224, 231 to
234 output voltage signal P_1A~ P_4A, P_1B~
P_4BIs detected.

The voltage signals P _{1A to} P _4A and P _{1B to} P _4B include all linear displacements and rotational displacements of the gyro rotor 20. Such voltage signals P _{1A to} P _4A and P _{1B to} P _4B are supplied to the control operation unit 140. The control operation unit 140 causes the gyro rotor 20 to have a displacement ± DZ in the Z-axis direction, a displacement ± DX in the X-axis direction and a displacement ± DY in the Y-axis direction, and rotational displacements Dφ and Dθ around the X-axis and the Y-axis (see FIG. 9). The direction of the arrow shown at the upper right is positive.) Is detected. Further, control DC voltages ± V _1A to ± V _4A and ± V _1B to ± V _4B to be applied to the electrostatic support electrodes 221 to 224 and 231 to 234 are calculated from the displacement. Thus, the control DC voltage ± V _1A to ± V _4A ,
± V _1B to ± V _4B change, and the gyro rotor 20 is returned to the original reference position so that the amount of deviation becomes zero.

This restraint control system is of an active type in that the amount of deviation of the gyro rotor 20 is actually measured and the electrostatic force is positively changed so that the amount of deviation becomes zero. ing.

With reference to FIG. 9, a description will be given of a constrained control system of a conventional gyro apparatus. This constraining control system is configured to support the gyro rotor 20 at a reference position in a floating manner, and to prevent the gyro rotor 20 from contacting the inner surface of the gyro case 21 in the Z-axis direction, the X-axis direction, and the Y-axis direction. to bound. Further, around the X axis of the gyro rotor 20 and Y
Constrain the rotational displacement around the axis.

The gyro rotor 20 actually rotates at a high speed, but the first, second, and
Four portions in a position corresponding to the third and fourth electrostatic supporting electrode pair of the P _1, P _2, P ₃ and P _4, respectively.

FIG. 9 shows a cross section of the gyro device cut along the XZ plane. The first and third portions P ₁ , P ₂ of the gyro rotor 20 arranged along the X axis are shown in FIG.
P ₃ , first and third pairs of electrostatic support electrodes 221, 231 and 223, 233 arranged corresponding thereto, and first and third pairs of mechanism control circuits 12 connected thereto.
1, 131 and 123, 133 are shown. Although not shown, the second and fourth portions P ₂ and P ₄ of the gyro rotor 20 and the corresponding second and fourth pairs of electrostatic support electrodes and mechanism control circuits arranged along the Y axis are not shown. ,
They are arranged along a direction perpendicular to the plane of the paper.

Circumferential portion 2 of first pair of electrostatic support electrodes 221
21A, 221B, 221C and 221D are electrode portions 200A, 200B, 200C on the upper surface of the gyro rotor 20;
200D, a first pair of electrostatic support electrodes 23
1 are provided on the lower surface of the gyro rotor 20 with the electrode portions 200A ', 200A', 231B, 221C, 221D.
B ′, 200C ′, and 200D ′, corresponding to the circumferential portions 223A, 223B,
223C and 223D correspond to the electrode portions 200A, 200B, 200C and 200D on the upper surface of the gyro rotor 20, and the circumferential portion 233 of the third pair of electrostatic support electrodes 233.
A, 233B, 233C and 233D are gyro rotors 2
0 electrode portions 200A ′, 200B ′, 200
C 'and 200D'.

Next, referring to FIG.
The configuration example and the principle of displacement detection will be described. This mechanism control
The circuit 121 includes a first pair of electrostatic support electrodes 221 and 231.
Connected to the first electrostatic support electrode 221 but other
Mechanism control circuits 122, 123, 124, 131, 13
2, 133, and 134 may have a similar configuration. Illustrated
As described above, the mechanism control circuit 121 controls the control DC voltage V_1AAnd strange
AC voltage for position detection ₀Adder 12 for inputting and adding
1-1, sign inverter 121-2 and two capacitors 12
1-3A and 121-3B and a subtractor 121-4.

In FIG. 10, the first electrostatic support electrode 22
1 first and second comb-shaped portions 221-1 (221A, 221).
1C) and 221-2 (221B, 221D) and the corresponding electrode portions 200A, 200 of the gyro rotor 20.
C and 200B, 200D have been replaced by first and second capacitors, respectively. As described above, in the first electrostatic support electrode 221, the first comb-shaped portion 221-1
And the capacitance between the first and third electrode portions 200A and 200C and the capacitance between the second comb portion 221-2 and the second and fourth electrode portions 200B and 200D are equal to each other at _C1A . is there. Therefore, the capacitances of these two capacitors are both C
_1A .

The mechanism control circuit 121 controls the control DC voltage ± V
Output _1A . The control DC voltage + V _1A is applied to the first comb-shaped portion 221-1 (221A, 221C) of the first electrostatic support electrode 221, and the second comb-shaped portion 221-2 (221)
B, 221D), a control DC voltage −V _1A having the same magnitude and opposite polarity is applied. Therefore, control DC voltages ± V _1A having the same magnitude and opposite polarities are applied to the first and second capacitors. Potential at the midpoint to Q ₁ whereby two pairs of capacitors is zero. According to this example,
Since control DC voltages of the same magnitude and opposite polarities are applied to the comb-shaped portions of each pair of the electrostatic support electrodes, the potential of the gyro rotor 20 is always zero.

As described above, since the potential of the gyro rotor 20 which is floatingly supported by the electrostatic supporting force is always zero, the control DC voltage V _1A to be applied to the electrostatic supporting electrode.
By controlling V _4A , V _{1B to} V _4B , the electrostatic supporting force acting between the electrode portion of the gyro rotor 20 and the electrostatic supporting electrode of the gyro case 21 can be controlled freely and to a desired value. It becomes possible.

[0059] Further, the mechanism control circuit 121 is superimposed on the control DC voltage ± V _1A outputs a displacement detection AC voltage AC _0, such displacement detection AC voltage AC to the two capacitors
₀ is applied. Displacement detection AC voltage AC ₀ is expressed as follows, for example.

[0060]

AC ₀ = E ₀ cos (ω ₀ t + ξ)

Similarly, a third pair of electrostatic support electrodes 223,
233, the first comb-shaped part 223-1 and the first and third electrode parts 200A and 200A.
Capacitance between 0C and second comb-shaped portion 223-2 and the second and fourth electrode portions 200B, the capacitance between the 200D is equally C _3A, in the second electrostatic supporting electrode 233 ,
First comb portion 233-1 and first and third electrode portions 200
The capacitance between A ′ and 200C ′ and the second comb portion 233
-2 and the second and fourth electrode portions 200B ', 200D' capacitance between the equally C _3B.

The capacitance C of these capacitors_1A,
C_1B, C_2A, C_2B, C_3A, C_3B, C_4A, C_4BIs Jai
At the relative position between the rotor 20 and the gyro case 21.
Therefore, it changes. That is, the capacitance C of the capacitor_1A, C
_1B, C_2A, C_2B, C_3A, C_3B, C _4A, C_4BThe gyro
Expressed as a function of linear and rotational displacement of rotor 20
You. Here, the capacitance C of the capacitor_1A, C_1B,
C_2A, C_2B, C_3A, C_3B, C_4A, C_4BGyro rotor
Expressed by the dimensionless amount of linear displacement and rotational displacement of 20
Think about it.

Referring to FIG. 11, the dimensionlessness of the linear displacement and the rotational displacement of the gyro rotor 20 will be described. The electrode portion 200A of the gyro rotor 20 and the corresponding circumferential portion 223A of the electrostatic support electrode of the gyro case 21 form an arc-shaped capacitor (in FIG. 11, it is drawn in a rectangular shape, but is actually in a ring shape or an arc shape). It is formed. When the gyro rotor 20 is at the reference position, that is, when the displacement of the gyro rotor 20 is zero, the circumferential portion 223 of the electrostatic support electrode
A is a distance p / 4 outward in the radial direction with respect to the electrode portion 200A.
And the portion where the two overlap is the capacitor.

It is assumed that the condenser is disposed at a position of a radius r from the Z axis, has a width in the radial direction of L ₀ , and has a gap of δ. It is assumed that the gyro rotor 20 has deviated from the reference position. The displacement of the gyro rotor 20 in the X-axis direction, the displacement in the Y-axis direction, and the displacement in the Z-axis direction are DX, DY, and D, respectively.
Z, and the rotational displacement of the gyro rotor 20 around the Y axis and the rotational displacement around the X axis are Dθ and Dφ. The linear displacement and the rotational displacement are made dimensionless by the following equation.

[0065]

ΔX = DX / L ₀ ΔY = DY / L ₀ ΔZ = DZ / δ Δθ = Dθ / (δ / r) Δφ = Dφ / (δ / r)

Here, ΔX, ΔY, ΔZ and Δθ, Δφ
Are dimensionless linear displacement and dimensionless rotational displacement of the gyro rotor 20. Capacitor capacitances C _1A , C _1B , C _2A ,
C _2B , C _3A , C _3B , C _4A , and C _4B are represented by dimensionless linear displacement and dimensionless rotational displacement of the gyro rotor 20.
For example, it is assumed that the gyro rotor 20 is linearly displaced by DX in the X-axis direction, is rotationally displaced around the Y-axis by the rotation angle Dθ, and is linearly displaced by DZ in the Z-axis direction. Assuming that such displacement is sufficiently small, the capacitance of each capacitor is expressed as follows.

[0067]

C _1A ≒ C ₀ (1 + ΔX + ΔZ + Δθ) C _1B ≒ C ₀ (1 + ΔX-ΔZ-Δθ) C _3A ≒ C ₀ (1-ΔX + ΔZ-Δθ) C _3B ≒ C ₀ (1-ΔX-ΔZ + Δθ)

Here, C ₀ is the capacitance of each capacitor when all displacements are zero, and is expressed as C ₀ = εS / δ using the dielectric constant ε and the area S of the capacitor. Conversely, from this equation, the dimensionless displacements ΔX, ΔZ, Δθ can be represented by the capacitance of each capacitor.

[0069]

ΔX _P = (1 / 4C ₀ ) (C _1A + C _1B −C _3A −C _3B ) Δθ _P = (1 / 4C ₀ ) (C _1A −C _1B −C _3A + C _3B ) ΔZ _P = ( _{1 / 4C 0) (C 1A} -C 1B + C 3A -C 3B)

Here, the suffix P of the dimensionless displacement indicates that it is a detection value obtained by calculation from the change in the capacitance of the capacitor. A cross section of the gyro device cut along the YZ plane is not shown, but second and fourth pairs of electrostatic support electrodes 222, 232, and 224 arranged along the Y axis.
234 similar discussion holds true with respect to the second and fourth portions P ₂ and P ₄ of the gyro rotor 20 corresponding thereto.

For example, the gyro rotor 20 is linearly displaced by the dimensionless displacement ΔY in the Y-axis direction, linearly displaced by the dimensionless displacement ΔZ in the Z-axis direction, and rotationally displaced by the dimensionless rotation angle Δφ around the X-axis. I do. The capacitance of each capacitor is expressed as follows according to the equation of Expression 5.

[0072]

C _2A ≒ C ₀ (1 + ΔY + ΔZ + Δφ) C _2B ≒ C ₀ (1 + ΔY-ΔZ-Δφ) C _4A ≒ C ₀ (1-ΔY + ΔZ-Δφ) C _4B ≒ C ₀ (1-ΔY-ΔZ + Δφ)

In addition, the dimensionless displacement Δ
When X _P , ΔY _P , and Δφ _P are represented by the capacitance of a capacitor, the following is obtained.

[0074]

ΔY _P = (1 / 4C ₀ ) (C _2A + C _2B −C _4A −C _4B ) Δφ _P = (1 / 4C ₀ ) (C _2A −C _2B −C _4A + C _4B ) ΔZ _P = ( _{1 / 4C 0) (C 2A} -C 2B + C 4A -C 4B)

Each mechanism control circuit 121, 122, 123,
The output voltage signals P _1A , P _1B , P _2A , P _2B , P _3A , P _3B , P _4A , and P _4B of 124, 131, 132, 133, and 134 are represented by the following equations.

[0076]

P _1A = K _V C _1A E ₀ cos (ω ₀ t + ξ) P _1B = K _V C _1B E ₀ cos (ω ₀ t + ξ) P _2A = K _V C _2A E ₀ cos (ω ₀ t + ξ) P _{2B = K V C 2B E 0} cos (ω 0 t + ξ) P 3A = K V C 3A E 0 cos (ω 0 t + ξ) P 3B = K V C 3B E 0 cos (ω 0 t + ξ) P 4A = K V C _4A E ₀ cos (ω ₀ t + ξ) P _4B = K _V C _4B E ₀ cos (ω ₀ t + ξ)

Here, K _V is a constant determined by the shape of the capacitor and the like. From this equation, the capacitance C of the capacitor
_1A , C _1B , C _2A , C _2B , C _3A , C _3B , C _4A , C _4B are represented as follows.

[0078]

Equation 10] C _1A = P _{1A [1 / {K V E 0 cos} (ω 0 t + ξ)} ] C _1B = P _{1B [1 / {K V E 0 cos} (ω 0 t + ξ)} ] C _2A = P _{2A [1 / {K V E 0 cos} (ω 0 t + ξ)} ] C _2B = P _{2B [1 / {K V E 0 cos} (ω 0 t + ξ)} ] C _3A = P _3A [1 / {K _V E ₀ cos (ω ₀ t + ξ)｝] C _3B = P _3B [1 / {K _V E ₀ cos (ω ₀ t + ξ)}] C _4A = P _4A [1 / {K _V E ₀ cos (ω ₀ t + ξ)} ] C _4B = P _{4B [1 / {K V E 0 cos} (ω 0 t + ξ)} ]

By substituting this equation into the equations (6) and (8), the dimensionless linear displacement and the rotational displacement of the gyro rotor 20 are obtained.

[0080]

ΔP _P = Kx (P _1A + P _1B -P _3A -P _3B ) ΔY _P = Ky (P _2A + P _2B -P _4A -P _4B ) ΔZ _P = Kz (P _1A + P _2A + P _3A + P _4A- P _1B -P _2B-
P _3B -P _4B ) Δθ _P = Kθ (P _1A -P _1B -P _3A + P _3B ) Δφ _P = Kφ (P _2A -P _2B -P _4A + P _4B )

Kx, Ky, Kz, Kθ, Kφ are proportional constants
It is. It should be noted that such a proportionality constant is apparent from the equation (10).
Thus, the vibration component 1 / cos (ω₀t + ξ). Book
According to the example, the output voltage P of the four pairs of mechanism control circuits_1A~ P_4B
All linear and rotational displacements of the gyro rotor 20
Is obtained. For example, linear displacement ΔX_P, ΔY_P, ΔZ _P
And rotational displacement Δθ_P, Δφ_PWhen two or more
Also, each dimensionless displacement can be obtained from the equation (11).

This restraint control system is different from the passive restraint system in that the amount of deviation of the gyro rotor 20 is actually measured and the electrostatic force is positively changed so that the amount of deviation becomes zero. Are active and different.

FIG. 12 shows a control operation section of a conventional gyro device.
140 shows the configuration of the gyro acceleration output calculation unit 145.
You. The control operation unit 140 of the present example includes the mechanism control circuits 121
Output voltage P of ~ 124, 131-134_1A, P_1B,
P_2A, P_2B, P_3A, P_3B, P_4A, P_4BEnter
Position DX_P, DY_P, DZ_PAnd rotational displacement Dθ_P, Dφ_P
Of the gyro rotor 20 and the displacement calculator 141 for calculating
Should be applied to the gyro rotor 20 to make the position zero
Forces fx, fy, fz and rotational moments fθ, fφ
PID calculation unit 142 to calculate and the change amount Δ of the control DC voltage
V_1A, ΔV_1B, ΔV _2A, ΔV_2B, ΔV_3A, ΔV_3B, ΔV
_4A, ΔV_4BThe control voltage calculation unit 143 for calculating the
Current voltage V_1A, V_1B, V_2A, V_2B, V_3A, V_3B, V_4A, V
_4BAnd a control voltage generator 144 for generating

The gyro apparatus has a gyro acceleration output calculation section 145, and the gyro acceleration output calculation section 145 has the force f supplied by the PID calculation section 142.
The gyro outputs dθ / dt, dφ / dt and the accelerations α _X , α _Y , α _Z are calculated by inputting x, fy, fz and rotational moments fθ, fφ.

Referring to FIG. 13, configuration of displacement calculating section 141
And the operation will be described. The displacement calculator 141 calculates the frequency ω₀
Voltage signal P_1A, P_1B, P_2A, P_2B,
P_3A, P_3B, P_4A, P_4B1 to 8
Period detectors 141-1 to 141-8, and each synchronous detector 14
The output waveforms of 1-1 to 141-8 are rectified into DC waveforms.
Filters 141-9 to 141-16 and displacement calculator 1
41-17 and frequency ω ₀Signal generation to generate the reference signal of
141-18.

The displacement calculator 141-17 calculates the linear displacements DX _P , DY _P , DZ _P and the rotational displacements Dθ _P by the following equations.
To calculate the Dφ _P. This equation corresponds to the equation (11). Instead of the dimensionless displacements ΔX _P , ΔY _P , ΔZ _P and Δθ _P , Δφ _P , the dimensional linear displacements DX _P , DY _P , DZ _P and the rotational displacements Dθ _P , Dφ Calculate _P. This displacement signal is PID
It is supplied to the calculation unit 142 and the control voltage calculation unit 143.
The suffix P indicates that it is an operation value.

[0087]

Equation 12] _{DX P = L 0 · Kx (} P 1A + P 1B -P 3A -P 3B) DY P = L 0 · Ky (P 2A + P 2B -P 4A -P 4B) DZ P = L 0 · Kz ( _{P 1A + P 2A + P 3A} + P 4A -P 1B -
_{P 2B -P 3B -P 4B) Dθ} P = (δ / r) · Kθ (P 1A -P 1B -P 3A + P 3B) Dφ P = (δ / r) · Kφ (P 2A -P 2B -P 4A + _P4B )

Referring to FIG. 14, PID calculation unit 14 of the present embodiment
2 will be described. PID calculation unit 14 of this example
2 denotes five PID calculators 142-1, 142-2, and 14
2-3, 142-4, and 142-5. Each PID calculator inputs linear displacements DX _P , DY _P , DZ _P and rotational displacements Dθ _P , Dφ _P to input forces fx, fy, fz, and rotation. The moments fθ and fφ are calculated.

FIG. 14 shows the structure of the first PID calculator 142-1. The first PID operator 142-1, linear displacement DX integrator 142-1C and that their operation by inputting proportional portion 142-1B and integration calculation for proportional operation and differential section 142-1A for differential operation of the _P Adder 14 that adds
2-1D. The output signal of the adder 142-1D is the output signal of the PID calculator 142-1. Incidentally, in FIG. 7, S is a Laplace operator, K _P is a proportional constant, T _D and T _I is the derivative time constant and integral time constant.

The other three PID calculators included in the PID calculator 142 of the present example, namely, the second, third, fourth and fifth PID calculators
The configuration of the PID calculator 142-1 may be similar to the configuration of the first PID calculator 142-1 shown in FIG.

The output signals fx, f of the PID operation unit 142
y, fz, fθ, and fφ are supplied to the control voltage calculation unit 143 and the gyro acceleration output calculation unit 145. Note that the gyro acceleration output calculation unit 145 includes the addition units 142-1D to 142-1D.
142-5D output signals fx, fy, fz, fθ, fφ
Instead, the output signals of the integrators 142-1C to 142-5C may be supplied.

The operation of the control voltage calculator 143 will be described with reference to FIGS. The control voltage calculation unit 143 calculates the control DC voltage variations ΔV _{1 to} ΔV ₈ so that the displacement of the gyro rotor 20 becomes zero. By applying the forces fx, fy, fz and the rotational moments fθ, fφ acting on the gyro rotor 20 output from the PID calculation section 142 to the gyro rotor 20 in the opposite directions, the displacement of the gyro rotor 20 becomes zero. Therefore, this force f
What is necessary is just to calculate the change amounts ΔV _{1 to} ΔV ₈ of the control DC voltage corresponding to x, fy, fz and the rotational moments fθ, fφ.

As shown in FIG. 15, first, the PID operation unit 1
Forces Fx, Fy, Fz rendered dimensionless from the forces fx, fy, fz and rotational moments fθ, fφ output from 42
And the rotational moments Tθ and Tφ. This is done by the following equation:

[0094]

Equation 13] _{Fx = fx (C 0 V 0} 2 / L 0) -1 Fy = fy (C 0 V 0 2 / L 0) -1 Fz = fz (C 0 V 0 2 / δ) -1 -8ΔZ _P Tθ = fθ (rC ₀ V ₀ ² / δ) ^-1 Tφ = fφ (rC ₀ V ₀ ² / δ) ^-1

C ₀ and V ₀ are respectively the gyro rotor 2
When the displacement of 0 is zero, that is, when the gyro rotor 20 is at the reference position, it is the capacitance of the capacitor and the control DC voltage. These dimensionless forces Fx, Fy, Fz
Then, the amounts of change ΔV _{1A to} ΔV _4B of the control DC voltage are calculated based on the torques Tθ and Tφ.

FIG. 16 shows an example of such an arithmetic expression. Such an arithmetic expression is represented by a matrix, which is referred to as an actuator correction matrix (ACTUATER COMPENSE).
ATING MATRIX) ACM.

[0097]

ΔV _1A = V ₀ (A ₁₁ · Fx + A ₁₂ · Fz / 2
+ A ₁₃ · Tθ) ΔV _1B = V ₀ (A ₂₁ · Fx + A ₂₂ · Fz / 2 + A ₂₃ · T
θ) ΔV _3A = V ₀ (A ₃₁ · Fx + A ₃₂ · Fz / 2 + A ₃₃ · T
θ) ΔV _3B = V ₀ (A ₄₁ · Fx + A ₄₂ · Fz / 2 + A ₄₃ · T
_{θ) ΔV 2A = V 0 (} B 11 · Fy + B 12 · Fz / 2 + B 13 · T
_{φ) ΔV 2B = V 0 (} B 21 · Fy + B 22 · Fz / 2 + B 23 · T
_{φ) ΔV 4A = V 0 (} B 31 · Fy + B 32 · Fz / 2 + B 33 · T
φ) ΔV _4B = V ₀ (B ₄₁ · Fy + B ₄₂ · Fz / 2 + B ₄₃ · T
φ)

Dimensionless forces Fx and F on the right side of this equation
The coefficients of y, Fz and torques Tθ, Tφ are elements of the actuator correction matrix.

[0099]

A ₁₁ = (1/4) (1-2ΔZ _P −2Δ)
θ _P ) A ₁₂ = (1/4) (1−ΔX _P −Δθ _P ) A ₁₃ = (1/4) (1−ΔX _P −ΔZ _P ) A ₂₁ = (1/4) (1 + 2ΔZ _P + 2Δθ _{P) ) A 22 = (- 1/4)} (1-ΔX P + Δθ P) A 23 = (- 1/4) (1-ΔX P + ΔZ P) A 31 = (- 1/4) (1-2ΔZ P + 2Δθ _P ) A ₃₂ = (1/4) (1 + ΔX _P + Δθ _P ) A ₃₃ = (− ／) (1 + ΔX _P −ΔZ _P ) A ₄₁ = (− 1/4) (1 + 2ΔZ _P −2Δθ _P ) A ₄₂ = (-／) (1 + ΔX _P −Δθ _P ) A ₄₃ = (1/4) (1 + ΔX _P + ΔZ _P )

[0100]

B ₁₁ = (1/4) (1-2ΔZ _P −2Δφ _P ) B ₁₂ = (1/4) (1−ΔY _P −Δφ _P ) B ₁₃ = (1/4) (1−ΔY _P −ΔZ _P ) B ₂₁ = (1/4) (1 + 2ΔZ _P + 2Δφ _P ) B ₂₂ = (− ／) (1−ΔY _P + Δφ _P ) B ₂₃ = (− ／) (1−ΔY _P ) + ΔZ _P ) B ₃₁ = (− 1/4) (1-2ΔZ _P + 2Δφ _P ) B ₃₂ = (1/4) (1 + ΔY _P + Δφ _P ) B ₃₃ = (− 1/4) (1 + ΔY _P −ΔZ _P ) B ₄₁ = (− 1/4) (1 + 2ΔZ _P −2Δφ _P ) B ₄₂ = (− 1/4) (1 + ΔY _P −Δφ _P ) B ₄₃ = (1/4) (1 + ΔY _P + ΔZ _P )

Here, ΔX _P , ΔY _P , and ΔZ _P are linear displacements of the gyro rotor 20 made dimensionless, Δθ _P , Δφ _P
Is the rotational displacement of the gyro rotor 20 which has been made dimensionless, and is obtained by the equation of Expression 11. The suffix P indicates an operation value.

Here, the first and third electrostatic electrodes 221,
Control DC voltage ± V _1A , ± V _1B and ±
V _3A , ± V _3B change amount ΔV _1A , ΔV _1B and ΔV _3A , ΔV
Think about _3B . Four variations ΔV _1A , ΔV _1B and Δ
V _3A and ΔV _3B are three dimensionless forces Fx and Fx, respectively.
z and the torque Tθ. Similarly,
Consider the control DC voltages ± V _2A , ± V _2B and ± V _4A applied to the second and fourth electrostatic electrodes 222 and 224, and the variations ΔV _2A , ΔV _2B and ΔV _4A and ΔV _4B of the ± V _4B. . 4
Each of the two variations ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B can be represented by three dimensionless forces Fy, Fz and torque Tφ.

Therefore, the four change amounts ΔV _1A , ΔV _1B and Δ
Another condition is provided for obtaining V _3A , ΔV _3B and ΔV _2A , ΔV _2B and ΔV _4A and ΔV _4B .

[0104]

ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0

This first equation is based on the XZ of the gyro rotor 20.
A portion along a plane, ie, first and third portions P₁, P
_ThreeThat the sum of the control DC voltage changes is 0
And the second equation is along the YZ plane of the gyro rotor 20.
Part, ie, the second and fourth parts P_Two, P_FourSmell
That the sum of the changes of the control DC voltage is 0
Represents. By setting such conditions,
Unnecessary charges are prevented from flowing into the rotor 20.
At the same time, the change amount ΔV of the eight control DC voltages _1A~ Δ
V_4BCan be uniquely determined.

The control voltage generator 144 includes four pairs of electrostatic support electrodes 221, 231, 222, 232, 223, 233,
, Control DC voltages V _1A , V _1B ,
_V2A , _V2B , _V3A , _V3B , _V4A and _V4B are generated. Such a control DC voltage is represented by the following equation.

[0107]

V _1A = V ₀ + ΔV _1A V _1B = V ₀ + ΔV _1B V _2A = V ₀ + ΔV _2A V _2B = V ₀ + ΔV _2B V _3A = V ₀ + ΔV _3A V _3B = V ₀ + ΔV _3B V _4A = V ₀ + ΔV _4A V _4B = V ₀ + ΔV _4B

V ₀ is a reference voltage, and the gyro rotor 2
0 is the value of the control DC voltage when at the reference position.
V _1A and V _1B are the first pair of electrostatic support electrodes 221 and 231
Control DC voltage applied to, V _2A and V _2B are control DC voltage applied to the electrostatic supporting electrodes 222 and 232 of the second pair, V _3A and V _3B third pair of electrostatic supporting electrode 223 , 2
Control DC voltages V _4A and V _4B applied to 33 are control DC voltages applied to the fourth pair of electrostatic support electrodes 224 and 234.

Next, the force actually acting on the gyro rotor 20 is determined. Four parts P ₁ , P of the gyro rotor 20
₂ , P ₃ , and P ₄ have four corresponding pairs of electrostatic support electrodes 221, 231, 222, 232,
The control DC voltages V _1A , V _1B , V _2A , V _2B , V _3A , V _3B , V _4A , V applied to the 223, 233, 224, 234
_It is proportional to the difference of _4B .

[0110]

Equation 19] _{fz1 = K Z (V 1A -V} 1B) fz2 = K Z (V 2A -V 2B) fz3 = K Z (V 3A -V 3B) fz4 = K Z (V 4A -V 4B)

K _Z is a constant determined by the shape of the capacitor formed by the electrostatic support electrode of the gyro case 21 and the electrode section of the gyro rotor 20. The resultant of the electrostatic supporting forces acting on the gyro rotor 20 is four parts P ₁ ,
This is the sum of the electrostatic supporting forces acting on P ₂ , P ₃ , and P ₄ .

[0112]

Equation 20] _{fz = K Z (V 1A -V} 1B + V 2A -V 2B + V 3A
−V _3B + V _4A −V _4B )

As described above, the electrostatic support electrode of the gyro case 21 is deviated radially outward or inward from the electrode portion of the gyro rotor 20, whereby the gyro rotor 20 is moved in the X-axis direction and the Y-axis direction. Receiving power. The X-axis direction force acting on the first and third parts P ₁ and P ₃ of the gyro rotor 20 is expressed as follows.

[0114]

Fx1 = K _X (V _1A + V _1B ) fx2 = K _X (V _3A + V _3B )

The force acting on the gyro rotor 20 in the X-axis direction is the difference between the forces acting on the first and third portions P ₁ and P ₃ .

[0116]

Equation 22] _{fx = fx1-fx2 = K X} (V 1A + V 1B -
V _3A -V _3B )

Similarly, Y acting on the gyro rotor 20
The axial force is the second and fourth parts P _Two, P_FourAct on
The difference in power.

[0118]

Fy = fy1-fy2 = K _Y (V _2A + V _2B −
V _4A -V _4B )

The above discussion is based on the case where the electrostatic support forces fz1 and fz3 acting in the same direction on the first and third portions P ₁ and P ₃ of the gyro rotor 20 and on the second and fourth portions P ₂ and P ₂ , electrostatic supporting force of the same direction to P ₄ fz2, fz
This is the case when 4 works. When the electrostatic support forces fz1 and fz3 in opposite directions act on the first and third portions P ₁ and P ₃ of the gyro rotor 20, the gyro rotor 20
Is generated around the Y axis. Similarly, the second and fourth portions P ₂ , P ₂ of the gyro rotor 20
_When the electrostatic supporting forces fz2 and fz4 in the opposite directions act on 4, a torque fφ for rotating the gyro rotor 20 around the X axis is generated. Such torques fθ and fφ are represented by the following equations.

[0120]

Fθ = (fz3-fz1) r fφ = (fz4-fz2) r

The configuration and operation of the gyro acceleration output calculation section 145 will be described with reference to FIG. The gyro acceleration output calculation unit 145 of this example includes the forces fx, fy, f to be applied to the gyro rotor 20 and output from the PID calculation unit 142.
External force acceleration α _X , α _Y , α from z and torque fθ, fφ
_Z and angular velocities dθ / dt and dφ / dt are obtained. External force acceleration and angular velocity are expressed as follows.

[0122]

Α _x = fx / mg α _Y = fy / mg α _Z = fz / mg dθ / dt = fφ / H dφ / dt = fθ / H

M is the mass of the gyro rotor 20, g is the gravitational acceleration, and H is the spin angular momentum of the gyro rotor 20. Such an operation is performed by multipliers 145-1 to 145-5. The right side of this equation is a force or a torque to be applied to the gyro rotor 20 so that the displacement of the gyro rotor 20 becomes zero, and is expressed by Equations 20 to 24. The left side of this equation is the external force acceleration or angular velocity actually applied to the gyro device.

An external force angular velocity dθ around the Y axis is applied to the gyro device.
When / dt acts, the gyro case 21 is rotationally displaced around the Y axis. The gyro rotor 20 is torqued around the X axis by the torque fφ. The gyro rotor 20 is rotationally displaced around the Y axis by the precession motion, and the rotational displacement around the Y axis with respect to the gyro case 21 becomes zero. When the external force angular velocity dφ / dt around the X axis acts on the gyro device, the gyro rotor 20 torques around the Y axis by the torque fθ. Gyro rotor 20
Is rotated around the X axis by the precession motion, and the rotational displacement of the gyro rotor 20 around the X axis with respect to the gyro case 21 becomes zero.

[0125]

As described with reference to FIGS. 7 and 11, a capacitor is formed by the annular electrode portion of the gyro rotor 20 and the corresponding arc-shaped electrostatic support electrode of the gyro case 21. Is done. The restraining or restoring force of the gyro rotor 20 is based on the electrostatic supporting force generated by the capacitor. In order to generate the binding force or the restoring force of the gyro rotor 20, that is, the electrostatic supporting force most efficiently, it is considered that the expressions of Expression 1 and Expression 2 need to be satisfied as described above. I was

Accordingly, the size and shape of the annular electrode portion of the gyro rotor 20 and the corresponding arc-shaped electrostatic support electrode of the gyro case 21 are designed so that the formulas 1 and 2 are satisfied. .

However, it has been found that even with such a design, no electrostatic supporting force corresponding to the calculated value is actually generated. This is because in the above discussion, as shown in FIG. 11, the overlapping portion of the annular electrode portion of the gyro rotor 20 and the corresponding arc-shaped electrostatic support electrode of the gyro case 21 (dimension L _{0 in} FIG. 11). ) Constitute a capacitor, and it is assumed that a uniform electric field is generated only in this overlapping portion.

Actually, a uniform electric field is destroyed at the end of the overlapped portion, and the effect of the electric field generated at this end appears on the capacitor. The action of the electric field at the end of the capacitor reduces the electrostatic supporting force of the capacitor, reduces the sensitivity of the capacitance change to the radial displacement of the gyro rotor 20, and reduces the binding force or restoring force on the gyro rotor 20. Work to reduce.

In view of the above, the present invention relates to a gyro apparatus of a type in which a gyro rotor is supported in a floating manner by an electrostatic supporting force, wherein a capacitor constituted by an electrode portion of the gyro rotor and an electrostatic supporting electrode of a gyro case is provided. The purpose of the present invention is to suppress the electric field at the end of the gyro and improve the electrostatic supporting force of the capacitor and the sensitivity of the change in the capacitance to the radial displacement of the gyro rotor.

In view of the above, the present invention relates to a gyro apparatus of a type in which a gyro rotor is supported in a floating manner by an electrostatic supporting force, and a capacitor constituted by an electrode section of the gyro rotor and an electrostatic supporting electrode of a gyro case. To improve the electrostatic support force of the capacitor and the sensitivity of the change in capacitance to the radial displacement of the gyro rotor, and to improve the binding force or restoring force of the gyro rotor 20. Aim.

[0131]

According to the present invention, there is provided a gyro case having a Z-axis along a central axis direction, and an X-axis and a Y-axis orthogonal to the Z-axis. Disk-shaped gyro rotor having a spin axis in the direction of the central axis, and electrode portions formed on both surfaces of the gyro rotor, and corresponding to and respectively corresponding to the electrode portions on both surfaces of the gyro rotor. At least three pairs of electrostatic support electrodes spaced apart from each other and disposed on the inner wall of the gyro case and spaced at equal central angles in the circumferential direction, and the gyro rotor is rotated at high speed around the spin axis. A rotor drive system for causing
In the gyro device of the acceleration detection type having: the electrode portion of the gyro rotor includes a plurality of annular portions concentrically arranged at a predetermined pitch in the radial direction and having the same radial width, and Each of the electrodes includes a pair of spaced apart combs, each of which extends circumferentially and is radially arranged concentrically at the same pitch as the predetermined pitch. Having a plurality of circumferential portions having the same width and a connecting portion for connecting the circumferential portions, and the circumferential portions of the pair of comb portions are alternately arranged so as to sandwich the other. The radial width of each circumferential portion of the comb portion of the electrostatic support electrode is equal to the radial width of each annular portion of the electrode portion of the gyro rotor, and the circle of the comb portion of the electrostatic support electrode. The radius of each arc of the perimeter is determined by the corresponding gyro rotor Greater or smaller than the radius of each ring of the annular portion of the portion, and a control DC voltage for generating the electrostatic support force and a displacement detection AC voltage for detecting the displacement of the gyro rotor. A displacement instruction that is superimposed and applied to the at least three pairs of electrostatic support electrodes to indicate linear displacements of the gyro rotor in the X-axis direction, Y-axis direction, and Z-axis direction, and rotation displacements around the Y-axis and the X-axis. A mechanism control circuit for outputting a signal, and a linear displacement ΔX _P , ΔY _P , ΔZ _P and a rotational displacement Δθ _P , Δ of the gyro rotor by inputting the displacement instruction signal output from the mechanism control circuit.
calculates the phi _P, the straight line displacement ΔX _P, ΔY _P, ΔZ _P and rotational displacement [Delta] [theta] _P, [Delta] [phi _P is to calculate the correction amount of the control DC voltage to be zero, it to the mechanism control circuit A control arithmetic unit for feeding back, a gyro acceleration output arithmetic unit for calculating a gyro output by inputting an output signal of the control arithmetic unit, and a circle of the electrode portion of the gyro rotor and a comb-shaped portion of the electrostatic support electrode corresponding thereto. And an electric field compensating mechanism for controlling an electric field generated in the capacitor constituted by the peripheral portion. The electric field compensating mechanism is configured to improve an electrostatic supporting force generated by the capacitor.

According to the present invention, in the gyro device,
The electric field compensation mechanism includes an auxiliary electrode disposed between two comb-shaped portions of the electrostatic support electrode, and the auxiliary electrode is maintained at the same potential as the electrode portion of the gyro rotor. The electric field compensation mechanism includes a groove formed between the two comb-shaped portions of the electrostatic support electrode. Further, the electric field compensation mechanism reduces the radial width of the electrode portion of the gyro rotor to less than half of the radial pitch, and reduces the radial width of the circumferential portion of the electrostatic support electrode in the radial direction. It is configured to be smaller than half the pitch.

[0133]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of a gyro device according to the present invention will be described below with reference to FIGS. The gyro device of the present invention is provided with an electric field compensating mechanism for suppressing an electric field generated at an end of a capacitor formed by the electrode portion of the gyro rotor 20 and the corresponding electrostatic support electrode of the gyro case 21. . An example will be described below.

A first example of the gyro device according to the present invention will be described with reference to FIGS. FIG. 1 shows the left half of the inner surface of the upper bottom member 22 of the gyro case 21 of the gyro device of the present embodiment, and shows a third electrostatic support electrode 223 among four electrostatic support electrodes as shown. . Note that the second and fourth
, Only the left half is shown. Further, a driving electrode 225 is formed inside the electrostatic support electrode. The driving electrodes 225 are formed in a plurality of fan shapes, and are arranged in a ring along the circumference in a line. At the center, a protruding discharge / stopper 127 is provided.

Next, the third electrostatic support electrode 223 will be described. The electrostatic support electrode 223 includes two comb-shaped portions 223-1 and 223-2 separated from each other, and the two comb-shaped portions are separated from each other. One comb-shaped part 223-1 has a radial part 223R extending in the radial direction and a plurality of circumferential parts 223A and 223C extending in the circumferential direction. Similarly, the other comb-shaped portion 223-2 includes a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223 extending in the circumferential direction.
B, 223D. Each comb 223-1, 223
-2 circumferential portions 223A, 223C and 223B, 223
D is alternately arranged so as to sandwich the other. Radius portions 223R, 223R of each comb-shaped portion 223-1, 223-2
Are formed with terminal portions 223R 'and 223R', respectively.

According to the gyro device of the present embodiment, as shown, the two comb-shaped portions 223 forming the electrostatic support electrode 223 are formed.
-1, 223-2 and spaced apart therefrom. The auxiliary electrode 323 includes circumferential portions 323A, 323B, 323C extending in the circumferential direction,
323D, 323E, and 323F, a radial portion 323R extending in the radial direction, and an outer terminal portion 323R '.

The gyro device of this example is different from the above-mentioned conventional gyro device in that an auxiliary electrode 323 is provided, and the other configuration may be the same. Therefore, the description of the configuration and operation of parts other than the auxiliary electrode 323 will be omitted.

The description will be made with reference to FIG. FIG. 2 shows the relationship between the third electrostatic support electrode 223 and the auxiliary electrode 323 provided on the upper bottom member 22 of the gyro case and the corresponding upper electrode section 200 of the gyro rotor 20. In this example, the circumferential portion 223A of the comb-shaped portion of the electrostatic support electrode 223,
223B, 223C, 223D and the corresponding electrode portions 200A, 200B, 200C of the gyro rotor 20;
The dimension of 200D is designed so as to satisfy the relationship of the equations (1) and (2).

Therefore, the electrode section 20 of the gyro rotor 20
The radial dimension L ₁ of 0A, 200B, 200C, 200D is equal to the distance L ₁ ′ between the two electrode portions 200A, 200B, and is equal to half the radial pitch p / 2. Further, the circumferential portions 223A and 223 of the electrostatic support electrode 223
3B, 223C, circumferential portion 223A of the radial dimension of the 223D L ₂ are two electrostatic supporting electrode 223 is equal to the distance L ₂ 'between 223B, half the pitch of the radial p / 2
be equivalent to.

[0140]

L ₁ = L ₁ '= L = p / 2 L ₂ = L ₂ ' = L = p / 2

The annular electrode section 200 of the gyro rotor 20
A, 200B, 200C, the average radius of 200D, that is,
The distance from the Z axis to the center position of the width of the ring is r ₁ , and the corresponding circumferential portions 223A and 223 of the arc-shaped electrostatic support electrode 223
B, 223C, and 223D mean radius, i.e., the distance from the Z axis to the center position of the width of the arc and r _2. The annular electrode portions 200A, 200 of the gyro rotor 20 are viewed from the Z axis.
The distance to the outer edge of B, 200C, 200D is represented by r ₁ ′, Z
A circumferential portion 223A of the electrostatic support electrode 223 in an arc shape from the axis;
Let the distances to the outer edges of 223B, 223C and 223D be r
₂ '. As shown, these average radii r ₁ , r
The difference Δr of _{2 and} the difference Δr ′ between the outer edge radii r ₁ ′ and r ₂ ′ are expressed as follows.

[0142]

[Equation 27] Δr = r ₂ −r ₁ = r ₂ '−r ₁ ' = p / 4
= L / 2

The radial dimension M ₂ of the auxiliary electrodes 323A, 323B, 323C is the same as that of the two adjacent electrostatic support electrodes 2
23A, a gap L ₂ '= L is smaller than between 223B.

[0144]

[Equation 28] M ₂ <L ₂ '

The auxiliary electrode 323 is made of a conductive material, and may be made of the same material as the electrostatic support electrode 223. Further, the auxiliary electrode 323 may be manufactured simultaneously with the electrostatic support electrode 223 by the same method. Well-known metal thin film manufacturing technology may be used for the electrostatic support electrode and the auxiliary electrode. Metal thin film manufacturing techniques include vapor deposition, ion plating, photofabrication, and the like.

The operation of the auxiliary electrode 323 will be described.
The auxiliary electrode 323 is maintained at the same potential as the corresponding electrode section 200 of the gyro rotor 20. As described with reference to FIG. 10, the potential of the electrode section 200 of the gyro rotor 20 is maintained at zero. Therefore, the potential of the auxiliary electrode 323 is kept at zero. The terminal portion 323R 'of the auxiliary electrode 323 is grounded. The terminal portion 323R 'is grounded via a through hole provided in the upper bottom member 22.

By setting the potential of the auxiliary electrode 323 to be the same as the potential of the electrode section 200 of the gyro rotor 20, the electrostatic support electrode 323 provided on the gyro case 21 and the electrode section 200 of the gyro rotor 20 are constituted. The electric field generated at the end of the formed capacitor is suppressed, and the electrostatic supporting force by the capacitor and the sensitivity of the capacitance change to the radial (X-axis) displacement of the gyro rotor 20 are improved.

A second example of the gyro device according to the present invention will be described with reference to FIG. FIG. 3 shows a third embodiment of the gyro device according to the present invention, similar to FIG.
And a corresponding electrode section 200 of the gyro rotor 20 are shown. According to this example, the circumferential portions 223A, 223 of the electrostatic support electrode 223 of the upper bottom member 22.
B, 223C and 223D, and grooves 423A and 42
3B, 423C and 423D are provided.

The gyro device of this embodiment is different from the above-mentioned conventional gyro device in that the grooves 423A, 423B and 423 are provided.
C and 423D are provided, and the other configuration may be the same. Also, as compared with the first example of the gyro device according to the present invention shown in FIGS. 1 and 2, the grooves 423A, 423B, 423 are used instead of the auxiliary electrodes 323.
C and 423D are provided, and the other configuration may be the same. Therefore, the grooves 423A, 423
Description of the configuration and operation of the parts other than B, 423C, and 423D will be omitted.

The grooves 423A, 423B, 423C, 423
The depth t of D is the electrode portion 200A of the gyro rotor 20,
It may be sufficiently smaller than the depth of the groove between 200B. Groove 42
The depth of 3, for example, when the electrode portion 200A, the pitch p in the radial direction of the 200B is 40μm width L ₁ in the radial direction is about 20 [mu] m, few mu, for example, be 2-6 [mu] m.

Grooves 423A, 423B, 423C, 423
The operation of D will be described. Grooves 423A, 423B, 4
By forming the electrodes 23C and 423D, the electric field generated at the end of the capacitor constituted by the electrostatic support electrode 323 provided on the gyro case 21 and the electrode section 200 of the gyro rotor 20 is suppressed, and the static electricity generated by this capacitor is reduced. And the radial direction of the gyro rotor 20 (X
The sensitivity of the change in capacitance to axial displacement) is improved.

A third example of the gyro device according to the present invention will be described with reference to FIG. FIG. 4 shows the third electrostatic support electrode 223 mounted on the upper bottom member 22 and the corresponding electrode section 200 of the gyro rotor 20 in the gyro device of the present example, as in FIGS. 2 and 3. According to this example, the equation of Equation 1 holds, but the relational equation of Equation 2 does not hold.
That is, the equation of Equation 26 does not hold.

According to this example, the radial dimension L ₁ of the electrode sections 200A, 200B, 200C, 200D of the gyro rotor 20 is smaller than half the radial pitch p, that is, p / 2, and therefore, the two electrode sections 200A, 200A, 200B interval L ₁ 'is smaller than between. Further, the circumferential portion 223A of the electrostatic support electrode 223, 223B, 223C, the radial dimension L ₂ of the 223D is less than half p / 2 of the pitch p in the radial direction, thus the circle of two electrostatic supporting electrode 223 Peripheral part 223
The distance between A and 223B is smaller than L ₂ ′.

[0154]

[Number 29] _{L 1 <p / 2 <L} 1 'L 2 <p / 2 <L 2' L 1 + L 1 '= p L 2 + L 2' = p L 1 = L 2

The gyro device of the present embodiment is different from the above-mentioned conventional gyro device in that the electrode section 20 of the gyro rotor 20 is provided.
0A, 200B, 200C, radial dimension L ₁ is smaller of 200D, circumferential portion 223 of the electrostatic support electrode 223
A, L in the radial direction of 223B, 223C, 223D
₂ is smaller, and other configurations may be the same. Therefore, description of the configuration and operation of the other parts is omitted.

Thus, the electrode section 2 of the gyro rotor 20
00A, 200B, 200C, circumferential portion of the radial dimension of the 200D L ₁ and electrostatic supporting electrodes 223 223A, 22
3B, 223C, and smaller radial dimension L ₂ of 223D, two adjacent electrode parts 200A of the gyro rotor 20, adjacent two circumferential dimension L ₁ 'and the electrostatic supporting electrode 223 between 200B By reducing the dimension L ₂ ′ between the portions 223A and 223B, the electrostatic supporting force of the capacitor formed by the two and the change of the capacitance with respect to the radial displacement (X-axis direction) of the gyro rotor 20 can be reduced. The sensitivity is improved, and the binding or restoring force on the gyro rotor 20 is improved.

The first to third examples of the gyro device according to the present invention have been described above with reference to FIGS. In particular, in these figures, the third electrostatic support electrode 223 mounted on the upper bottom member 22 and the corresponding electrode portion 2 of the gyro rotor 20 are shown.
00, the other parts of the gyro device have the same configuration. That is, the relationship between the first, second, and fourth electrostatic support electrodes 221, 222, and 224 mounted on the upper bottom member 22 and the corresponding electrode section 200 of the gyro rotor 20, The same applies to the relationship between the first, second, third, and fourth electrostatic support electrodes 231, 232, 233, and 234 and the corresponding electrode section 200 'of the gyro rotor 20.

The above three examples of the present invention can be combined with each other. For example, a compensating electrode can be added to the second example or the third example of the present invention. It is also possible to combine the second example and the third example. Of course, the three examples may be combined.

Finally, the effect of each example of the gyro device according to the present invention will be described with reference to FIG. FIG. 5 is a graph showing the amount of change in the capacitance of the capacitor. When the gyro rotor 20 is displaced in the x-axis direction, the electrostatic support electrode 22
3 and the corresponding electrode section 200 of the gyro rotor 20
Is calculated by calculating the rate of change of the capacitance of the capacitor constituted by.

The graph of FIG. 5F shows the case where the electric field generated by the capacitor is ideal, that is, the electrode portion of the gyro rotor 20 and the electrostatic support electrode of the gyro case 21 as described with reference to FIG. Overlapping parts (Length L
₀ ), a uniform electric field is generated, and the change rate of the capacitance of the capacitor when the electric field generated at the end of the capacitor is neglected is represented. FIG. 5A shows the rate of change of the capacitance of the capacitor in the case of the conventional gyro device described with reference to FIGS. 6 to 17, and is approximately 0.4.

FIG. 5B shows a case of the third example of the present invention.
FIG. 5D shows the case of the second example of the present invention, FIG. 5D shows the case of the first example of the present invention, and FIG. 5E shows the capacitance of the capacitor when the first and third examples of the present invention are combined. Indicates the rate of change. According to the invention, it has been found that the first of the three examples gives the best results. It can be seen that a better result can be obtained by combining the first example with other examples.

Although the embodiments of the present invention have been described in detail above, it is easy for those skilled in the art that the present invention is not limited to the above-described embodiments and can adopt various other configurations without departing from the gist of the present invention. Will be understood.

[0163]

According to the present invention, in a gyro apparatus in which a gyro rotor is floatingly supported by an electrostatic supporting force, the sensitivity and the electrostatic supporting force of a change in capacitance with respect to a radial displacement of the gyro rotor are improved. There are advantages that can be improved.

According to the present invention, in a gyro apparatus in which a gyro rotor is floatingly supported by an electrostatic supporting force, the sensitivity of the change in capacitance to the radial displacement of the gyro rotor and the electrostatic supporting force are improved. Therefore, there is an advantage that the binding force or the restoring force on the gyro rotor can be increased.

According to the present invention, in a gyro apparatus in which a gyro rotor is floatingly supported by an electrostatic supporting force, the sensitivity of the change in capacitance with respect to the radial displacement of the gyro rotor and the electrostatic capacity can be improved by a simple configuration. There is an advantage that the supporting force can be improved, and the binding force or restoring force on the gyro rotor can be improved.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a part of an electrostatic support electrode of a first example of a gyro device of the present invention.

FIG. 2 is a partial sectional view of a first example of the gyro device of the present invention.

FIG. 3 is a partial sectional view of a second example of the gyro device of the present invention.

FIG. 4 is a partial sectional view of a third example of the gyro device of the present invention.

FIG. 5 is an explanatory diagram comparing the effects of three examples of the gyro device of the present invention.

FIG. 6 is a diagram illustrating an example of a conventional gyro device.

FIG. 7 is a diagram showing a relative positional relationship between an electrode portion of a gyro rotor of a conventional gyro device and an electrostatic support electrode of a gyro case.

FIG. 8 is a diagram illustrating a configuration example of a control loop of a conventional gyro device.

FIG. 9 is an explanatory diagram for explaining a constraint control system of a conventional gyro device.

FIG. 10 is a diagram illustrating a configuration example of a mechanism control circuit of a conventional gyro device.

FIG. 11 is an explanatory diagram for explaining a positional relationship of capacitors.

FIG. 12 is a diagram illustrating a configuration example of a control calculation unit and a gyro acceleration output calculation unit of a conventional gyro device.

FIG. 13 is a diagram illustrating a configuration example of a displacement calculation unit of a conventional gyro device.

FIG. 14 is a diagram illustrating a configuration example of a PID calculation unit of a conventional gyro device.

FIG. 15 is a diagram for explaining an operation of a control voltage calculation unit of a conventional gyro device.

FIG. 16 is a diagram for explaining an example of an ACM (actuator correction matrix) used in a control voltage calculation unit of a conventional gyro device.

FIG. 17 is a diagram for explaining an operation of a gyro acceleration output calculation unit of a conventional gyro device.

[Explanation of symbols]

Reference Signs List 20 gyro rotor 21 gyro case 22 upper bottom member 22B, 24A through hole 23 spacer 23A inner wall 23B recess 23C passage 24 lower bottom member 26 cavity 33 getter member 121, 122, 123, 124 mechanism control circuit 127, 128 discharge / stopper 131, 132, 133, 134 Mechanism control circuit 140 Control operation unit 141 Displacement operation unit 142 PID operation unit 143 Control voltage operation unit 144 Control voltage generation unit 145 Gyro acceleration output operation unit 146 Displacement correction operation unit 200A, 200B, 200C, 200D , 200E,
200A ', 200B', 200C ', 200D', 2
00E 'electrode section 200a, 200b, 200c, 200d, 200e,
200f, 200g, 200a ', 200b', 200
c ', 200d', 200e ', 200f', 200g
Grooves 221, 222, 223, 224, 225 Electrodes 231, 232, 233, 234, 235 Electrodes 323A, 323B, 323C Auxiliary electrodes 423A, 423B, 423C, 423D Grooves

Claims (4)

[Claims] 1. A gyro case having a Z axis along a center axis direction and an X axis and a Y axis orthogonal thereto, and a gyro case which is supported inside the gyro case in a non-contact manner by electrostatic supporting force and is provided in the center axis direction. A disk-shaped gyro rotor having a spin axis; electrode portions formed on both surfaces of the gyro rotor; and inner walls of the gyro case corresponding to and separated from the electrode portions on both surfaces of the gyro rotor, respectively. And at least three pairs of electrostatic support electrodes spaced apart from each other at equal central angles in the circumferential direction, and a rotor drive system for rotating the gyro rotor at high speed around the spin axis. In the gyro device of the acceleration detection type, the electrode portions of the gyro rotor are arranged concentrically at a predetermined pitch in the radial direction and have a plurality of annular portions having the same radial width. Each of said electrostatic support electrodes includes a pair of spaced apart combs, each of said combs extending in a circumferential direction and having a pitch equal to said predetermined pitch in a radial direction. And a plurality of circumferential portions having the same radial width and a connecting portion connecting the circumferential portions, and the circumferential portions of the pair of comb portions are alternately arranged with each other. Being arranged so as to sandwich it, the radial width of each circumferential portion of the comb-shaped portion of the electrostatic support electrode is equal to the radial width of each annular portion of the electrode portion of the gyro rotor, and The radius of each arc of the circumference of the comb-shaped portion of the electrostatic supporting electrode is larger or smaller than the radius of each ring of the annular portion of the electrode portion of the gyro rotor corresponding thereto, and To detect the control DC voltage to be generated and the displacement of the gyro rotor A displacement detection AC voltage is superimposed and applied to the at least three pairs of electrostatic support electrodes, and linear displacements of the gyro rotor in the X-axis direction, the Y-axis direction and the Z-axis direction, around the Y-axis and around the X-axis. A mechanism control circuit for outputting a displacement instruction signal for instructing a rotational displacement; and a linear displacement ΔX _P , ΔY _{P for} the gyro rotor by inputting the displacement instruction signal output from the mechanism control circuit.
Calculate ΔZ _P and rotational displacements Δθ _P , Δφ _P and calculate the linear displacements ΔX _P , ΔY _P , ΔZ _P and rotational displacements Δθ _P , Δφ _P.
Calculating a correction amount of the control DC voltage so as to be zero, and feeding back the correction amount to the mechanism control circuit; and a gyro acceleration for inputting an output signal of the control calculation unit and calculating a gyro output. An output operation unit, and an electric field compensation mechanism for controlling an electric field generated in a capacitor formed by the electrode part of the gyro rotor and the circumference of the comb-shaped part of the electrostatic support electrode corresponding to the electrode part, A gyro device configured to improve an electrostatic supporting force generated by the capacitor by an electric field compensation mechanism. 2. The gyro device according to claim 1, wherein the electric field compensation mechanism includes an auxiliary electrode disposed between two comb-shaped portions of the electrostatic support electrode, wherein the auxiliary electrode is an electrode of the gyro rotor. A gyro device, wherein the gyro device is maintained at the same potential as that of the gyro. 3. The gyro device according to claim 1, wherein the electric field compensation mechanism includes a groove formed between two comb-shaped portions of the electrostatic support electrode. 4. The gyro apparatus according to claim 1, wherein the electric field compensation mechanism makes a radial width of an electrode portion of the gyro rotor smaller than half of a pitch in the radial direction, and sets the electrostatic capacity of the gyro rotor to be smaller than a half of the radial pitch. A gyro device comprising a configuration in which a radial width of a circumferential portion of a support electrode is smaller than half of the radial pitch.