JPH10128976A - Inkjet printer head - Google Patents
Inkjet printer headInfo
- Publication number
- JPH10128976A JPH10128976A JP29090796A JP29090796A JPH10128976A JP H10128976 A JPH10128976 A JP H10128976A JP 29090796 A JP29090796 A JP 29090796A JP 29090796 A JP29090796 A JP 29090796A JP H10128976 A JPH10128976 A JP H10128976A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- ink
- thickness
- head substrate
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
(57)【要約】
【課題】圧電素子３の変形によりインク室１内に溜めら
れたインクを噴射させるようにしたインクジェットプリ
ンタヘッドにおいて、圧電素子３とヘッド基板２の熱膨
張係数の差を小さくして、製造工程中の熱応力による圧
電素子３の破損等を防止する。
【解決手段】複数のインク室１を形成するヘッド基板２
を、圧電素子３の材質と同系のセラミックスで形成す
る。
(57) Abstract: In an ink jet printer head configured to eject ink stored in an ink chamber 1 by deformation of a piezoelectric element 3, a difference in thermal expansion coefficient between the piezoelectric element 3 and a head substrate 2 is reduced. Thus, breakage or the like of the piezoelectric element 3 due to thermal stress during the manufacturing process is prevented. A head substrate for forming a plurality of ink chambers is provided.
Is formed of the same type of ceramics as the material of the piezoelectric element 3.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、インク室内のイン
クを噴射させて印字を行うインクジェットプリンタに用
いるヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a head used in an ink jet printer which performs printing by ejecting ink in an ink chamber.
【０００２】[0002]
【従来の技術】インクジェットプリンターは、騒音が小
さく、高速印字が可能であることから近年広く使用され
ている。2. Description of the Related Art Ink jet printers have been widely used in recent years because of their low noise and high-speed printing.
【０００３】このインクジェットのヘッドの構造は、図
１に示すように、複数のインク室１とこれに連通するイ
ンク流路（不図示）及びノズル６を備えたヘッド基板２
に対し、各インク室１に対応する振動板２１上に圧電素
子３を配置して構成される。そして、電極４ａ、４ｂに
より圧電素子３に電圧を印加し、変形させることにより
インク室１に圧力を印加し、インク室１内の圧力を上昇
させてインクをノズル６より噴射させている。[0003] As shown in FIG. 1, the structure of this ink jet head is a head substrate 2 provided with a plurality of ink chambers 1, ink flow paths (not shown) communicating with the ink chambers 1, and nozzles 6.
On the other hand, the piezoelectric element 3 is arranged on the vibration plate 21 corresponding to each ink chamber 1. Then, a voltage is applied to the piezoelectric element 3 by the electrodes 4a and 4b, and the piezoelectric element 3 is deformed, thereby applying pressure to the ink chamber 1 and increasing the pressure in the ink chamber 1 to eject ink from the nozzles 6.
【０００４】従来のインクジェットヘッドの材質として
は、例えば、酸化アルミニウム（Ａｌ2 Ｏ3 ）、酸化マ
グネシウム（ＭｇＯ）、酸化ジルコニウム（ＺｒＯ2 ）
のうちのいずれか一種類を主成分とするセラミックスに
よりヘッド基板２を形成し、チタン酸ジルコン酸鉛（Ｐ
ＺＴ）などの圧電セラミックスからなる圧電素子３を電
極４ａ、４ｂにより挟持して熱接合したものが知られて
いる（特開平４−１２６７８号、特開平５−９７４３７
号公報等参照）。このようなインクジェットヘッドは、
長期使用における信頼性も高く、基板への力の伝達が効
率よく行われるなどの特徴を有している。[0004] Conventional ink-jet head materials include, for example, aluminum oxide (Al 2 O 3 ), magnesium oxide (MgO), and zirconium oxide (ZrO 2 ).
The head substrate 2 is formed of ceramics containing any one of the above as a main component, and lead zirconate titanate (P
It is known that a piezoelectric element 3 made of piezoelectric ceramics such as ZT) is sandwiched between electrodes 4a and 4b and thermally bonded (Japanese Patent Laid-Open Nos. 4-126878 and 5-97437).
Reference). Such an inkjet head is
It has features such as high reliability in long-term use and efficient transmission of force to the substrate.
【０００５】また、上記ヘッド基板２の製造方法は、例
えばＡｌ2 Ｏ3 、ＭｇＯ、ＺｒＯ2の一種以上を主成分
としたグリーンシート上に、インク室１及びインク流路
となる部位を金型で打ち抜いた後、振動板２１となる別
のグリーンシートを積層し、熱圧着後、セラミックスの
焼成温度である約１４００℃の温度で焼成するようにな
っている。[0005] The method of manufacturing the head substrate 2 includes, for example, a method in which an ink chamber 1 and a portion serving as an ink flow path are formed on a green sheet mainly containing at least one of Al 2 O 3 , MgO and ZrO 2 by a mold. After that, another green sheet serving as the vibration plate 21 is laminated, and after thermocompression bonding, the ceramic is fired at a temperature of about 1400 ° C., which is the firing temperature of ceramics.
【０００６】その後、インク室１に対応した振動板２１
上に、下部の電極４ａとなるサーメットをスクリーン印
刷後、その上部に圧電素子３となる圧電材料として、例
えばＰＺＴ系材料を厚膜形成法により形成後、約１２０
０℃で焼成し、その上部に上部の電極４ｂを形成してい
る。Thereafter, the diaphragm 21 corresponding to the ink chamber 1
After a cermet serving as the lower electrode 4a is screen-printed thereon, a PZT-based material such as a PZT-based material is formed as a piezoelectric material serving as the piezoelectric element 3 thereon by a thick film forming method.
It is baked at 0 ° C., and the upper electrode 4b is formed thereon.
【０００７】[0007]
【発明が解決しようとする課題】ところが、従来のイン
クジェットヘッドでは、ヘッド基板２と圧電素子３の熱
膨張係数が異なることから、製造工程中で焼成時の熱応
力により圧電素子３の剥離や破損が生じやすく、製造歩
留まりが悪いという問題があった。However, in the conventional ink jet head, since the thermal expansion coefficients of the head substrate 2 and the piezoelectric element 3 are different, peeling or breakage of the piezoelectric element 3 due to thermal stress during firing in the manufacturing process. And the production yield is poor.
【０００８】また、圧電素子３としては鉛（Ｐｂ）成分
を含む材料が用いられるが、焼成時にこの鉛成分が飛散
したり、あるいはヘッド基板２内へ拡散しやすく、その
結果圧電素子３及びヘッド基板２の特性が変化してしま
うという問題もあった。Further, a material containing a lead (Pb) component is used for the piezoelectric element 3, but this lead component is easily scattered or easily diffused into the head substrate 2 at the time of firing, so that the piezoelectric element 3 and the head There is also a problem that the characteristics of the substrate 2 change.
【０００９】本発明は、これらの問題点を解消し、製造
歩留まりを向上させたインクジェットプリンタヘッドを
提供することを目的とする。It is an object of the present invention to provide an ink jet printer head which solves these problems and improves the production yield.
【００１０】[0010]
【課題を解決するための手段】本発明のインクジェット
プリンタヘッドは、圧電素子の変形によりインク室内に
溜められたインクを噴射させるようにしたインクジェッ
トプリンタヘッドにおいて、複数のインク室を形成する
ヘッド基板が、上記圧電素子の材質と同系のセラミック
スからなることを特徴とする。According to the present invention, there is provided an ink jet printer head for ejecting ink stored in an ink chamber by deformation of a piezoelectric element, wherein a head substrate for forming a plurality of ink chambers is provided. It is characterized in that the piezoelectric element is made of ceramics similar to the material of the piezoelectric element.
【００１１】[0011]
【作用】本発明によれば、ヘッド基板が圧電素子と同種
材料を主成分とするため、両者の熱膨張係数の差が小さ
くなり、焼成時の熱応力による圧電素子の破損や剥離を
防ぐことができる。According to the present invention, since the head substrate is made of the same material as the piezoelectric element as a main component, the difference in thermal expansion coefficient between the two is reduced, and the piezoelectric element is prevented from being damaged or peeled due to thermal stress during firing. Can be.
【００１２】また、ヘッド基板を圧電素子と同種材料で
形成することにより、鉛成分を含む圧電素子の焼成時
に、焼成雰囲気中の鉛成分がヘッド基板からも供給され
ることにより、圧電素子からの鉛成分の飛散を抑制する
ことができる。さらに、ヘッド基板中に圧電素子と同程
度の鉛成分が含まれることにより、圧電素子の焼成時に
おける、ヘッド基板への鉛成分の拡散を抑制することが
できる。Further, by forming the head substrate from the same material as the piezoelectric element, the lead component in the firing atmosphere is also supplied from the head substrate when the piezoelectric element containing the lead component is fired, whereby Scattering of the lead component can be suppressed. Further, since the head substrate contains the same lead component as the piezoelectric element, it is possible to suppress the diffusion of the lead component into the head substrate during firing of the piezoelectric element.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施形態を図によ
って説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.
【００１４】本発明のインクジェットヘッドは、図１に
示すように、ノズル６を形成したノズル板２３と隔壁２
２と振動板２１を積層して一体化することによって、複
数のインク室１とこれに連通するインク流路（不図示）
及びノズル６を備えたヘッド基板２を形成する。このヘ
ッド基板２に対し、各インク室１に対応する振動板２１
上に圧電素子３およびその上下に電極４ａ、４ｂを配置
してインクジェットヘッドを構成する。As shown in FIG. 1, the ink jet head of the present invention comprises a nozzle plate 23 in which the nozzles 6 are formed and a partition wall 2.
A plurality of ink chambers 1 and ink flow paths (not shown) communicating with the plurality of ink chambers 1 are formed by laminating and integrating the vibration plates 2 and the vibration plate 21.
And the head substrate 2 provided with the nozzle 6. A diaphragm 21 corresponding to each ink chamber 1 is provided for the head substrate 2.
An ink jet head is formed by arranging the piezoelectric element 3 above and the electrodes 4a and 4b above and below the piezoelectric element 3.
【００１５】そして、電極４ａ、４ｂにより圧電素子３
に電圧を印加し、変形させることによりインク室１に圧
力を印加し、インク室１内の圧力を上昇させてインクを
ノズル６より噴射させることができる。The piezoelectric elements 3 are formed by the electrodes 4a and 4b.
A pressure is applied to the ink chamber 1 by applying a voltage to the ink chamber 1 and deforming the ink, and the pressure in the ink chamber 1 is increased, so that the ink can be ejected from the nozzle 6.
【００１６】上記圧電素子３は、電極４ａ、４ｂにより
電圧を印加すると変形する材質からなり、例えばチタン
酸ジルコン酸鉛（ＰＺＴ系）、マグネシウムニオブ酸鉛
（ＰＭＮ系）、ニッケルニオブ酸鉛（ＰＮＮ系）、マン
ガンニオブ酸鉛、チタン酸鉛などの一種以上を主成分と
する圧電セラミックスから成る。The piezoelectric element 3 is made of a material which is deformed when a voltage is applied to the electrodes 4a and 4b. ), A piezoelectric ceramic mainly containing one or more of lead manganese niobate, lead titanate and the like.
【００１７】一方、ヘッド基板２は、上記圧電素子３の
材質と同系のセラミックスにより形成される。ここで同
系のセラミックスとは、圧電素子３と同種の材質からな
るセラミックス、または圧電素子３と同種の材質を主成
分とし、添加剤を加えたセラミックスのことである。On the other hand, the head substrate 2 is formed of ceramics similar to the material of the piezoelectric element 3. Here, the same type of ceramics refers to ceramics made of the same material as the piezoelectric element 3 or ceramics containing the same material as the piezoelectric element 3 as a main component and an additive.
【００１８】例えば、圧電素子３がチタン酸ジルコン酸
鉛（ＰＺＴ系）からなる場合は、ヘッド基板２としてチ
タン酸ジルコン酸鉛からなるセラミックス、又はこれに
後述する添加成分を加えてなるセラミックスを用いる。
あるいは、圧電素子３が上述した複数材料の複合材から
なる場合は、上記複数材料のうち一種以上を主成分とす
るセラミックスによりヘッド基板２を形成すれば良い。For example, when the piezoelectric element 3 is made of lead zirconate titanate (PZT type), the head substrate 2 is made of ceramics made of lead zirconate titanate or ceramics to which an additive component described later is added. .
Alternatively, when the piezoelectric element 3 is made of a composite material of a plurality of materials described above, the head substrate 2 may be formed of ceramics containing at least one of the plurality of materials as a main component.
【００１９】また、ヘッド基板２を成すセラミックスと
して、圧電素子３と同種材料に加えて、Ａｌ2 Ｏ3 、Ｚ
ｒＯ2 、ＳｉＯ2 、ガラス繊維または炭素繊維等を４０
重量％以下の範囲で添加することにより、ヘッド基板２
の強度等の機械的特性を向上させることができる。な
お、添加成分の範囲を４０重量％以下としたのは、４０
重量％を越えると、ヘッド基板２と圧電素子３の熱膨張
差が大きくなって、製造工程中に圧電素子３の剥離等を
防止する効果が乏しくなるためである。The ceramics forming the head substrate 2 may be made of Al 2 O 3 , Z
rO 2 , SiO 2 , glass fiber or carbon fiber
% By weight or less, the head substrate 2
Mechanical properties, such as the strength of the steel, can be improved. The reason for setting the range of the additive component to 40% by weight or less is that 40% by weight or less.
If the weight percent is exceeded, the thermal expansion difference between the head substrate 2 and the piezoelectric element 3 increases, and the effect of preventing the piezoelectric element 3 from peeling off during the manufacturing process becomes poor.
【００２０】さらに圧電素子３の両面に備える駆動用の
電極４ａ、４ｂは、例えば銀、パラジウム、白金、ニッ
ケル等のうち少なくとも一種により形成する。The driving electrodes 4a and 4b provided on both sides of the piezoelectric element 3 are formed of at least one of silver, palladium, platinum, nickel and the like.
【００２１】次に本発明のインクジェットプリンタヘッ
ドの製造方法を説明する。Next, a method for manufacturing the ink jet printer head of the present invention will be described.
【００２２】まず、圧電素子３と同種材料を主成分とす
るセラミックスのグリーンシートを作製し、このグリー
ンシートを用いてノズル板２３、インク室１及びインク
流路となる部位を金型で打ち抜いた隔壁２２、及び振動
板２１をそれぞれ作製し、これらを積層し、熱圧着後、
焼成することによりヘッド基板２を作製する。First, a ceramic green sheet mainly composed of the same material as that of the piezoelectric element 3 was prepared, and the nozzle plate 23, the ink chamber 1, and a portion serving as an ink flow path were punched out with a mold using the green sheet. The partition wall 22 and the diaphragm 21 are respectively manufactured, and these are laminated, and after thermocompression bonding,
By firing, the head substrate 2 is manufactured.
【００２３】その後、インク室１に位置する振動板２１
上に、下部の電極４ａのペーストをスクリーン印刷し、
その上に圧電素子３となる圧電材料を厚膜形成法により
形成、約１２００℃で焼成し、その上に上部の電極４ｂ
を印刷等の厚膜形成法、または蒸着、スパッタリング等
の薄膜形成法により形成すればよい。Thereafter, the diaphragm 21 located in the ink chamber 1
On the upper, screen paste of the paste of the lower electrode 4a,
A piezoelectric material for forming the piezoelectric element 3 is formed thereon by a thick film forming method, baked at about 1200 ° C., and an upper electrode 4 b
May be formed by a thick film forming method such as printing or a thin film forming method such as evaporation or sputtering.
【００２４】この時、鉛成分を含む圧電素子３を焼成す
る際に、焼成雰囲気中の鉛成分がヘッド基板２からも供
給されることにより、圧電素子３からの鉛成分の飛散を
抑制することができる。さらに、ヘッド基板２中に圧電
素子３と同程度の鉛成分が含まれることにより、圧電素
子３の焼成時における、ヘッド基板２への鉛成分の拡散
を抑制することができる。At this time, when the piezoelectric element 3 containing the lead component is fired, the lead component in the firing atmosphere is also supplied from the head substrate 2 so that the scattering of the lead component from the piezoelectric element 3 is suppressed. Can be. Further, since the head substrate 2 contains the same lead component as the piezoelectric element 3, the diffusion of the lead component into the head substrate 2 during firing of the piezoelectric element 3 can be suppressed.
【００２５】また、ヘッド基板２として、圧電素子３と
同種材料を主成分とするセラミックスを用いて両者の熱
膨張係数の差を小さくしているため、上記製造工程中の
焼成による熱応力が加わっても、圧電素子３が剥離した
り破損することを防止できる。Further, since the head substrate 2 is made of a ceramic mainly composed of the same material as that of the piezoelectric element 3 to reduce the difference in thermal expansion coefficient between the two, thermal stress due to firing during the above-described manufacturing process is applied. However, it is possible to prevent the piezoelectric element 3 from being peeled or damaged.
【００２６】なお、本発明のインクジェットプリンタヘ
ッドにおいては、ヘッド基板２の振動板２１が比較的ヤ
ング率の低いセラミックスから形成されることになるた
め、振動板２１を含めた駆動部の応答性が低下しやすく
なる。このような傾向を抑制し、駆動部の応答性を高め
るために、電極４ａ、４ｂ、圧電素子３および振動板２
１の構造によって駆動部の剛性を確保する設計が必要と
なる。ただし、これらの部材を過度に厚くすると、圧電
素子３の変形が振動板２１のたわみに変換されにくくな
る。In the ink jet printer head of the present invention, since the diaphragm 21 of the head substrate 2 is formed of a ceramic having a relatively low Young's modulus, the responsiveness of the driving section including the diaphragm 21 is improved. It tends to decrease. In order to suppress such a tendency and enhance the response of the driving unit, the electrodes 4a, 4b, the piezoelectric element 3, and the diaphragm 2
The structure 1 requires a design to secure the rigidity of the drive unit. However, if these members are excessively thick, the deformation of the piezoelectric element 3 becomes difficult to be converted into the deflection of the diaphragm 21.
【００２７】かかる制約下において、ヘッド駆動部の剛
性を確保しつつ、振動板２１に十分な変位を生じせしめ
るためには、振動板２１の厚みＹおよび／または圧電素
子３の厚みＸを４０μｍ以下とすれば良い。これは、厚
みが４０μｍを越えると、圧電素子３の変形が振動板２
１のたわみに変換されにくくなり、振動板２１の変位量
が小さくなるためである。Under such restrictions, in order to ensure sufficient displacement of the diaphragm 21 while securing the rigidity of the head drive unit, the thickness Y of the diaphragm 21 and / or the thickness X of the piezoelectric element 3 must be 40 μm or less. It is good. This is because when the thickness exceeds 40 μm, the deformation of the piezoelectric element 3
This is because it is difficult to convert to the deflection of 1 and the displacement of the diaphragm 21 is reduced.
【００２８】さらに、電極４ａ、４ｂのうち、圧電素子
３が駆動してたわんだ際に、曲面の内側となる方の電極
の厚みを５μｍ以下とし、他方の電極の厚みを２０μｍ
以下とすれば良い。一般に圧電素子３は、インク室１を
加圧するように、インク室１側に凸になるようにたわむ
ことから、上部の電極４ｂが曲面の内側となる。そのた
め、上部の電極４ｂの厚みを５μｍ以下とし、下部の電
極４ａの厚みを２０μｍ以下とすれば良い。なお、電極
の厚みを上記範囲とした理由は、この範囲を越えると振
動板２１の変位量が小さくなるためである。Further, of the electrodes 4a and 4b, when the piezoelectric element 3 is driven and bent, the thickness of the electrode on the inner side of the curved surface is set to 5 μm or less, and the thickness of the other electrode is set to 20 μm.
The following can be performed. Generally, the piezoelectric element 3 bends so as to protrude toward the ink chamber 1 so as to pressurize the ink chamber 1, so that the upper electrode 4b is inside the curved surface. Therefore, the thickness of the upper electrode 4b may be set to 5 μm or less, and the thickness of the lower electrode 4a may be set to 20 μm or less. The reason why the thickness of the electrode is set in the above range is that when the thickness exceeds this range, the displacement of the diaphragm 21 becomes small.
【００２９】[0029]
【実施例】実施例１ まず、圧電素子３の材質として、チタン酸ジルコン酸鉛
（ＰＺＴ系）を用い、ヘッド基板２の材質として、同じ
チタン酸ジルコン酸鉛（ＰＺＴ系）に表１に示すような
各種添加剤を加えたセラミックスを用いて、図１に示す
本発明のインクジェットヘッドを作製した。それぞれヘ
ッド基板２を成す材質の常温〜３００℃の熱膨張係数を
測定し、また製造工程中での圧電素子３の剥離の有無を
調べた。Embodiment 1 First, lead zirconate titanate (PZT type) is used as the material of the piezoelectric element 3 and the same lead zirconate titanate (PZT type) is used as the material of the head substrate 2 as shown in Table 1. The ink jet head of the present invention shown in FIG. 1 was manufactured using ceramics to which such various additives were added. The thermal expansion coefficient of the material forming the head substrate 2 at room temperature to 300 ° C. was measured, and the presence or absence of peeling of the piezoelectric element 3 during the manufacturing process was examined.
【００３０】一方、比較例として、ヘッド基板２をジル
コニアを主成分とするセラミックスで形成したものにつ
いても同様の測定を行った。On the other hand, as a comparative example, the same measurement was performed on a head substrate 2 formed of ceramics containing zirconia as a main component.
【００３１】結果は表１に示す通りである。この結果よ
り、比較例では、圧電素子３とヘッド基板２の熱膨張係
数の差が大きく、製造工程中で圧電素子３の剥離が発生
するものがあった。The results are as shown in Table 1. From these results, in the comparative example, there was a case where the difference in the thermal expansion coefficient between the piezoelectric element 3 and the head substrate 2 was large, and the piezoelectric element 3 was separated during the manufacturing process.
【００３２】これに対し、本発明実施例では、圧電素子
３と同種材料を主成分とし、４０重量％以下の添加成分
を含むセラミックスでヘッド基板２を形成したことによ
って、両者の熱膨張係数の差を小さくすることができ、
製造工程中ので圧電素子３の剥離を防止できることがわ
かる。On the other hand, in the embodiment of the present invention, the head substrate 2 is formed of ceramics containing the same material as the piezoelectric element 3 as a main component and containing 40% by weight or less of an additive component. Difference can be reduced,
It can be seen that peeling of the piezoelectric element 3 can be prevented during the manufacturing process.
【００３３】なお、種々実験の結果、圧電素子３とヘッ
ド基板２の熱膨張係数の差は２×１０-6以下としておけ
ば製造工程での圧電素子３の剥離等を防止できることが
わかった。As a result of various experiments, it was found that if the difference between the thermal expansion coefficients of the piezoelectric element 3 and the head substrate 2 was set to 2 × 10 −6 or less, peeling of the piezoelectric element 3 during the manufacturing process could be prevented.
【００３４】[0034]
【表１】 [Table 1]
【００３５】実施例２ 次に、図１のインクジェットヘッドにおいて、圧電素子
３としてチタン酸ジルコン酸鉛（ＰＺＴ系）を用い、ヘ
ッド基板２としてチタン酸ジルコン酸鉛（ＰＺＴ系）に
３重量％のＳｉＯ2 を添加したセラミックスを用いて、
各部分の寸法を変化させた時の振動板２１の変位量につ
いて、ＦＥＭ（Ｆｉｎｉｔｅ Ｅｌｅｍｅｎｔ Ｍｅｔ
ｈｏｄ）によるシミュレーション解析を行った。 Embodiment 2 Next, in the ink jet head of FIG. 1, lead zirconate titanate (PZT type) was used as the piezoelectric element 3 and 3% by weight of lead zirconate titanate (PZT type) was used as the head substrate 2. Using ceramics with SiO 2 added,
Regarding the displacement amount of the diaphragm 21 when the dimensions of each part are changed, an FEM (Finite Element Met) is used.
hod).
【００３６】振動板２１の寸法は、長さ（図面の奥行き
方向）３ｍｍ、隔壁２２間の幅Ｚを２６０μｍとして、
圧電素子３への印加電圧３０Ｖの時に、振動板２１の変
位量が０．１μｍを越えるかどうかで評価を行った。The dimensions of the vibration plate 21 are 3 mm in length (in the depth direction in the drawing) and the width Z between the partition walls 22 is 260 μm.
The evaluation was performed based on whether or not the displacement of the vibration plate 21 exceeded 0.1 μm when the voltage applied to the piezoelectric element 3 was 30 V.
【００３７】（１）まず、振動板２１の厚みＹを４０μ
ｍ、上部の電極４ｂの厚みを５μｍ、下部の電極４ａの
厚みを２０μｍとし、圧電素子３の厚みＸを変化させた
時の振動板２１の変位量を求めた。(1) First, the thickness Y of the diaphragm 21 is set to 40 μm.
m, the thickness of the upper electrode 4b was 5 μm, the thickness of the lower electrode 4a was 20 μm, and the displacement of the diaphragm 21 when the thickness X of the piezoelectric element 3 was changed was determined.
【００３８】結果は表２に示す通り、圧電素子３の厚み
Ｘを４０μｍ以下とすれば振動板２１の変位量を０．１
μｍ以上とできることがわかる。As shown in Table 2, when the thickness X of the piezoelectric element 3 is set to 40 μm or less, the displacement of the diaphragm 21 is set to 0.1.
It can be seen that the thickness can be set to μm or more.
【００３９】[0039]
【表２】 [Table 2]
【００４０】（２）次に、圧電素子３の厚みＸを４０μ
ｍ、上部の電極４ｂの厚みを５μｍ、下部の電極４ａの
厚みを２０μｍとし、振動板２１の厚みＹを変化させた
時の振動板２１の変位量を求めた。(2) Next, the thickness X of the piezoelectric element 3 is set to 40 μm.
m, the thickness of the upper electrode 4b was 5 μm, the thickness of the lower electrode 4a was 20 μm, and the displacement amount of the diaphragm 21 when the thickness Y of the diaphragm 21 was changed was determined.
【００４１】結果は表３に示す通り、振動板２１の厚み
Ｙを４０μｍ以下とすれば振動板２１の変位量を０．１
μｍ以上とできることがわかる。As shown in Table 3, when the thickness Y of the diaphragm 21 is set to 40 μm or less, the displacement amount of the diaphragm 21 is set to 0.1.
It can be seen that the thickness can be set to μm or more.
【００４２】[0042]
【表３】 [Table 3]
【００４３】（４）次に、圧電素子３の厚みＸを４０μ
ｍ、振動板２１の厚みＹを４０μｍとし、上部の電極４
ｂの厚みと下部の電極４ａの厚みを変化させた時の振動
板２１の変位量を求めた。(4) Next, the thickness X of the piezoelectric element 3 is set to 40 μm.
m, the thickness Y of the diaphragm 21 is 40 μm, and the upper electrode 4
The displacement of the diaphragm 21 when the thickness b and the thickness of the lower electrode 4a were changed was determined.
【００４４】結果は表４に示す通り、上部の電極４ｂの
厚みを５μｍ以下とし、下部の電極４ａの厚みを２０μ
ｍ以下とすれば振動板２１の変位量を０．１μｍ以上と
できることがわかる。As shown in Table 4, the thickness of the upper electrode 4b was set to 5 μm or less and the thickness of the lower electrode 4a was set to 20 μm.
It can be seen that the displacement amount of the diaphragm 21 can be set to 0.1 μm or more if it is set to m or less.
【００４５】[0045]
【表４】 [Table 4]
【００４６】[0046]
【発明の効果】以上説明したように、本発明によれば、
圧電素子の変形によりインク室内に溜められたインクを
噴射させるようにしたインクジェットプリンタヘッドに
おいて、複数のインク室を形成するヘッド基板を、上記
圧電素子の材質と同系のセラミックスで形成することに
よって、圧電素子とヘッド基板の熱膨張係数の差を小さ
くできるため、製造工程中の熱応力による圧電素子の破
損等を防止できる。As described above, according to the present invention,
In an ink jet printer head that ejects ink stored in an ink chamber due to deformation of a piezoelectric element, a head substrate that forms a plurality of ink chambers is formed of ceramics similar to the material of the piezoelectric element. Since the difference in thermal expansion coefficient between the element and the head substrate can be reduced, breakage of the piezoelectric element due to thermal stress during the manufacturing process can be prevented.
【００４７】また、鉛成分を含む圧電素子の焼成時に、
鉛成分の飛散やヘッド基板への拡散を防止し、所定の特
性を有する圧電素子及びヘッド基板を作製することがで
きる。In firing a piezoelectric element containing a lead component,
A lead element can be prevented from scattering or diffusing into the head substrate, and a piezoelectric element and a head substrate having predetermined characteristics can be manufactured.
【００４８】その結果、優れた特性を有し、製造歩留り
の高いインクジェットヘッドを得ることができる。As a result, an inkjet head having excellent characteristics and a high production yield can be obtained.
【図１】本発明のインクジェットプリンタヘッドを示す
一部破断斜視図である。FIG. 1 is a partially cutaway perspective view showing an ink jet printer head of the present invention.
１：インク室 ２：ヘッド基板 ２１：振動板 ２２：隔壁 ２３：ノズル板 ３：圧電素子 ４ａ：電極 ４ｂ：電極 ６：ノズル 1: ink chamber 2: head substrate 21: diaphragm 22: partition wall 23: nozzle plate 3: piezoelectric element 4a: electrode 4b: electrode 6: nozzle
Claims (5)
応する部位に圧電素子を備え、該圧電素子の変形によ
り、各インク室内に溜められたインクを噴射させるよう
にしたインクジェットプリンタヘッドにおいて、上記イ
ンク室を形成するヘッド基板が、上記圧電素子の材質と
同系のセラミックスからなることを特徴とするインクジ
ェットプリンタヘッド。1. An ink jet printer head comprising a piezoelectric element at a portion corresponding to a plurality of ink chambers built in a head substrate, wherein the piezoelectric element is deformed to eject ink stored in each ink chamber. An ink jet printer head, wherein the head substrate forming the ink chamber is made of ceramics similar to the material of the piezoelectric element.
記圧電素子と同種材料を主成分とし、Ａｌ2 Ｏ3 、Ｚｒ
Ｏ2 、ＳｉＯ2 、炭素繊維、ガラス繊維等を４０重量％
以下含有することを特徴とする請求項１記載のインクジ
ェットプリンタヘッド。2. The method according to claim 1, wherein the ceramic constituting the head substrate is composed mainly of the same material as that of the piezoelectric element, and is composed of Al 2 O 3 , Zr
40% by weight of O 2 , SiO 2 , carbon fiber, glass fiber, etc.
2. The ink jet printer head according to claim 1, wherein said ink jet printer head contains:
駆動時にたわみの内側となる方の電極の厚みを５μｍ以
下とし、もう一方の電極の厚みを２０μｍ以下としたこ
とを特徴とする請求項１記載のインクジェットプリンタ
ヘッド。3. A driving electrode is provided on both sides of the piezoelectric element,
2. The ink jet printer head according to claim 1, wherein the thickness of the electrode on the inner side of the deflection during driving is 5 μm or less, and the thickness of the other electrode is 20 μm or less.
ことを特徴とする請求項１記載のインクジェットプリン
タヘッド。4. An ink jet printer head according to claim 1, wherein said piezoelectric element has a thickness of 40 μm or less.
素子の変形をインク室に伝えるための振動板の厚みを４
０μｍ以下としたことを特徴とする請求項１記載のイン
クジェットプリンタヘッド。5. A vibrating plate for forming a part of the wall surface of the ink chamber and transmitting the deformation of the piezoelectric element to the ink chamber with a thickness of 4 mm.
2. The ink jet printer head according to claim 1, wherein the thickness is 0 [mu] m or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29090796A JP3340036B2 (en) | 1996-10-31 | 1996-10-31 | Inkjet printer head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29090796A JP3340036B2 (en) | 1996-10-31 | 1996-10-31 | Inkjet printer head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10128976A true JPH10128976A (en) | 1998-05-19 |
| JP3340036B2 JP3340036B2 (en) | 2002-10-28 |
Family
ID=17762061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29090796A Expired - Fee Related JP3340036B2 (en) | 1996-10-31 | 1996-10-31 | Inkjet printer head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3340036B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100366767B1 (en) * | 1999-10-14 | 2003-01-06 | 삼성전자 주식회사 | A method for manufacturing a piezo-electric actuator |
| US6616270B1 (en) | 1998-08-21 | 2003-09-09 | Seiko Epson Corporation | Ink jet recording head and ink jet recording apparatus comprising the same |
| GB2410463A (en) * | 2004-01-29 | 2005-08-03 | Hewlett Packard Development Co | A method of making an inkjet printhead |
| JP2005244090A (en) * | 2004-02-27 | 2005-09-08 | Kyocera Corp | Multilayer piezoelectric body, piezoelectric actuator and print head |
| JP2007188948A (en) * | 2006-01-11 | 2007-07-26 | Tdk Corp | Piezoelectric element and method of manufacturing same |
| JP2007242720A (en) * | 2006-03-06 | 2007-09-20 | Tdk Corp | Process for manufacturing piezoelectric element |
| JP2007273799A (en) * | 2006-03-31 | 2007-10-18 | Nec Tokin Corp | Laminated structure and manufacturing method thereof |
| US7347538B2 (en) | 2004-03-23 | 2008-03-25 | Fujifilm Corporation | Method for manufacturing discharge head, and discharge head |
| JP2008546208A (en) * | 2005-06-06 | 2008-12-18 | ザ・ユニバーシティ・オブ・リバプール | Composite production process |
| JP2012080121A (en) * | 2011-12-20 | 2012-04-19 | Kyocera Corp | Laminated piezoelectric body, piezoelectric actuator, and print head |
-
1996
- 1996-10-31 JP JP29090796A patent/JP3340036B2/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6616270B1 (en) | 1998-08-21 | 2003-09-09 | Seiko Epson Corporation | Ink jet recording head and ink jet recording apparatus comprising the same |
| US6966635B2 (en) | 1998-08-21 | 2005-11-22 | Seiko Epson Corporation | Ink jet recording head and ink jet recording apparatus comprising the same |
| KR100366767B1 (en) * | 1999-10-14 | 2003-01-06 | 삼성전자 주식회사 | A method for manufacturing a piezo-electric actuator |
| GB2410463A (en) * | 2004-01-29 | 2005-08-03 | Hewlett Packard Development Co | A method of making an inkjet printhead |
| US8152280B2 (en) | 2004-01-29 | 2012-04-10 | Hewlett-Packard Development Company, L.P. | Method of making an inkjet printhead |
| JP2005244090A (en) * | 2004-02-27 | 2005-09-08 | Kyocera Corp | Multilayer piezoelectric body, piezoelectric actuator and print head |
| US7347538B2 (en) | 2004-03-23 | 2008-03-25 | Fujifilm Corporation | Method for manufacturing discharge head, and discharge head |
| JP2008546208A (en) * | 2005-06-06 | 2008-12-18 | ザ・ユニバーシティ・オブ・リバプール | Composite production process |
| JP2007188948A (en) * | 2006-01-11 | 2007-07-26 | Tdk Corp | Piezoelectric element and method of manufacturing same |
| JP2007242720A (en) * | 2006-03-06 | 2007-09-20 | Tdk Corp | Process for manufacturing piezoelectric element |
| JP2007273799A (en) * | 2006-03-31 | 2007-10-18 | Nec Tokin Corp | Laminated structure and manufacturing method thereof |
| JP2012080121A (en) * | 2011-12-20 | 2012-04-19 | Kyocera Corp | Laminated piezoelectric body, piezoelectric actuator, and print head |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3340036B2 (en) | 2002-10-28 |
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