JPH10104080A - Absolute radiation thermometer and method for measuring temperature - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an absolute radiation thermometer and a method of performing temperature measurement correctly by the use of the absolute radiation thermometer. SOLUTION: Infrared radiation received by a thermal radiation detector element 10 from a target 1 is estimated by electrical calibration, and the temperature of the target is obtained by estimated radiant quantities. In order to solve the problems of microphonic noise of a pyroelectric detector element 10, an anti-microphonic detector 100C is employed in which piezoelectric signals generated by both pyroelectric detectors can be canceled to each other by appropriate multiple connection or series connection depending on each polar direction of two pyroelectric detector elements, and pyroelectric signals to be objective in measurement can get rid of interference of piezoelectric signals generated by the pyroelectric detector elements.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an absolute radiation thermometer and a temperature measuring method. More specifically, the radiation emitted from a target, received by a radiation detector (or detection element), can be used to evaluate the absolute value of infrared power by electrical calibration, and the signal generated at the radiation detector (or detection element) The present invention relates to an absolute radiation thermometer and a temperature measurement method for measuring the temperature of a target based on the measurement.

[0002] Performing temperature measurement on an object
It is a common and important technology in the scientific and industrial fields. There are two types of temperature measurement means, the first being a contact type and the second a non-contact type. In the former method, a heat flow flows from the target to the detection element by bringing the detection element into contact with a target whose temperature is to be measured, and the temperature is measured to induce a signal. The latter means is a certain distance between the sensing element and the target, where the heat flow is transferred by radiation from the target to the sensing element.

[0003] The non-contact method of measuring heat by radiation has many advantages, the most important of which are the following three points. (1) Since the influence of the detection element on the target is smaller than when the heat measurement is performed by contact, a more accurate measurement result can be obtained. The advantage is particularly large when the heat capacity of the target is considerably small. (2) Inconvenience or danger due to contact is avoided. For example, in the case of measuring the surface temperature of a high power facility provided at a high place, it is very difficult to use the contact type. When monitoring to prevent a fire, the contact type cannot be adopted. (3) When measuring body temperature on medical treatment, a contact method is generally employed, but there is a risk of infection and many people are displeased. In such a case, the non-contact type solves all the problems. The present invention relates to such a non-contact type thermometer and a measuring method.

[0004]

2. Description of the Related Art A pyroelectric radiometer is an example of a non-contact type temperature measurement. This radiometer basically utilizes the principle of the pyroelectric effect, that is to say, making the detecting element out of pyroelectric material. Since there is a difference in temperature between the detection element and the target for which temperature measurement is performed, radiant heat exchange is performed during that time. That is, when the pyroelectric detection element is heated by the light of infrared heat radiation from the target and its temperature rises, the pyroelectric detection element induces a transient charge in the element due to the characteristics of the pyroelectric material (the pyroelectric effect). ), Which also lead to an external circuit to produce an induced current. This is the principle of temperature measurement.

FIG. 16 shows an example of a conventional electrically calibrated pyroelectric radiometer. FIG. 17 shows the structure of the detection element 10 in the radiometer. FIG. 18 is an equivalent circuit diagram of the pyroelectric detection element shown in FIG. As shown in the above-described drawing, the detection element 10 mainly includes a pyroelectric material layer 11 where a transient charge is induced when the temperature is increased by heating, and a resistance material layer provided on one side of the pyroelectric material layer 11. 12, heating terminals T1 and T2 which are provided on both sides of the resistance material layer 12 and are connected to an external power supply by a lead wire 14, and a lead wire 15 provided on the other side of the pyroelectric material layer 11; A bottom electrode 13 for causing the charge induced in the pyroelectric material layer 11 to flow to an external circuit, and a pyroelectric material layer 1 in the resistive material layer 12.
1 which absorbs infrared thermal radiation from an external target and transfers heat to said pyroelectric material layer 11. The bottom electrode 1
The polarity of No. 3 is determined as described later. When the pyroelectric material layer 11 is heated to generate a current, the bottom electrode 13 is positive if the bottom electrode 13 is configured as a source of the current. On the other hand, the electrode 13 sinks the current (sin
In the case of k), the bottom electrode 13 has a negative polarity.
This definition of polarity is adopted throughout the text.

Referring to FIG. 16, the structure of the conventional electrically calibrated pyroelectric radiometer will be described. The radiometer is mainly heated by electric power from an external power supply or light of an external target 1 (radiation source), and generates an induced current in an external circuit.
0, and provided between the target 1 and the detection element 10 so that the detection element 10 intermittently receives infrared rays emitted from the target 1 to the detection element 10 by continuously rotating. A chopper 2, a preamplifier 3 that amplifies an induced current generated by the detection element 10 by being connected to the detection element 10 through a lead wire 15, a motor 24 that drives and rotates the chopper 2, Drive circuit 25 for driving motor 24
An energy meter 4 for measuring power applied to the detection element 10, an isolation amplifier 5 for applying power to the detection element 10, an A / D converter 20, a preamplifier 3, and an energy meter 4. And select it from the A / D
An analog multiplexer 9 for sending to a converter 20;
A converter 6 and a control signal for sending to the drive circuit 25, the A / D converter 20, the analog multiplexer 9 and the D / A converter 6, and output to the analog multiplexer 9, A microprocessor 21 for processing data to be converted into a digital signal by the A / D converter 20; a storage device 22 which is connected to the microprocessor 21 and is a place where the microprocessor 21 accesses data; A display 23 connected to the processor 21 for displaying data provided by the microprocessor 21;
And a start button 26 for starting the operation. The electric heating signal generated by the microprocessor 21 is the D / A
The signal is converted into an analog signal by the converter 6, amplified by the isolation amplifier 5, and then applied to the detection element 10.

Next, an operation method of the above-mentioned conventional electric calibration type pyroelectric radiometer will be described. The infrared rays emitted from the target 1 are cut by the chopper 2. The rotation period of the chopper 2 will be described in detail.
(1) When the chopper 2 opens, the detection element 10
Receiving the radiated power produces a pyroelectric induction signal. After being amplified by the signal amplifier 3, the signal is selected by the multiplexer 9, enters the A / D converter 20, becomes a digital signal, and is processed by the microprocessor 21. (2) When the chopper 2 is closed, a certain test power is sent to the detection element 10. This power is to generate a pyroelectric induction signal in the pyroelectric material layer 11 by heating the resistive material layer 12. The pyroelectric induction signals generated in the above two cases are compared, and when they are equal (to be exact, when the difference between them is within a certain range), the value of the radiated power from the target 1 is a known electric heating value. Obtained by power. Generally, after performing the above-mentioned trials, that is, heating with radiant power and heating with electric power, several times alternately, for the first time, as described above,
Both pyroelectric induction signals can be equal (when they are equal, it is called auto-zero).

However, the conventional electrically calibrated pyroelectric radiometer shown in FIG. 16 has the following disadvantages. (1) Since a chopper for continuous rotation is required, the structure is complicated and the volume is large. (2) Electric power is consumed many times, so power consumption is large. (3) For automatic zeroing, heating by radiation power or heating by electric power must be repeated many times. Therefore, it takes time to measure the power of the infrared radiation emitted by the target, which makes it difficult to commercialize. (4) In the detection element, the resistance material layer 12 and the bottom electrode 1
3 (see FIG. 16), the high frequency component of the heating voltage passes through the element and reaches the preamplifier. Since the above-mentioned capacitive coupling signal is not a pyroelectric signal generated by heating, it becomes a false signal. In order to solve this problem, the conventional electrically calibrated pyroelectric radiometer shown in FIG. 16 employs an expensive isolation amplifier, thereby increasing the manufacturing cost.

[0009] As another conventional pyroelectric radiation thermometer,
There is U.S. Pat. No. 4,797,840 "Infrared electronic thermometer and its temperature measurement method". The method of this patent uses the piezoelectric effect to calibrate the pyroelectric detection signal. Therefore, it is necessary to correct the expected change in the pyroelectric detection signal due to material aging, temperature drift, or instability of the electronic element of the pyroelectric detection element. The calibration circuit and the calibration method will be described with reference to FIGS. As shown in FIG. 3, the calibration circuit 30 includes a pyroelectric detection element 31. The pyroelectric detection element 31 includes a pyroelectric film (which is also a piezoelectric film) 35 and an outwardly facing side of the pyroelectric film 35, and includes two independent electrode tips 33 and 3.
4, and an outer flat electrode 32 made of the same. The calibration circuit 30 further includes an amplification circuit 37, a microprocessor 38, a switch 36, and an excitation circuit 39. In FIG. 19, reference numeral 42 denotes a waveguide in the form of a hollow tube for guiding infrared radiation from a target to the pyroelectric detection element 31. Reference numeral 43 denotes an infrared radiation
Shows a shutter whose infrared radiation reaches the pyroelectric detection element only for a predetermined period of time. Electrode tip 3
4 is connected to the amplifier circuit 37. The electrode tip 33 is connected to a switch 36, which in turn connects the electrode tip 33 to an amplification circuit 37 or an excitation circuit 39. This is because the excitation circuit 39 generates a predetermined electrical calibration signal 40, and the electrical calibration signal 40
The pyroelectric film 35 is subjected to a mechanical stress, and is excited to generate an electric signal 41 in response to the mechanical stress (see FIG. 20). At the stage of assembly, that is, before the pyroelectric detection element 31 ages, the value of the electric signal 41 is configured on a predetermined basis and stored in the memory. The switch 36 and the excitation circuit 39 are controlled by the microprocessor 38, and the excitation circuit 39 generates a predetermined electrical calibration signal 40 according to a command from the microprocessor 38 during a calibration operation.

Next, the aforementioned US Pat. No. 4,797,840
Describes the proposed calibration operation. Immediately before performing the temperature measurement of the target, when the shutter 43 is still closed, the switch 36 connects the electrode chip 33 to the excitation circuit 39, so that a predetermined electric signal 40 is provided to the electrode chip 33. Because of the pyroelectric properties of the pyroelectric film 35, mechanical stress is induced, and this mechanical stress causes the pyroelectric film 35 to generate an electrical signal 41 at the electrode 32. The electric signal 41 enters the amplifier circuit 37 through the electrode chip 34. Since the mechanical stress calibration signal is a predetermined value, the deviation of the electric signal 41 indicates a change in the pyroelectric detection element 31, and the deviation value from the predetermined standard is corrected by the microprocessor 38. To do so, it can be the necessary calibration information.

Immediately after the calibration operation, the switch 36 connects the electrode chip 33 to the amplifier circuit 37, and the operation of measuring the temperature of the target starts. At this time, the shutter 43 is opened to enable infrared radiation from the target 1. By the guide of the waveguide 42, the infrared rays reach the pyroelectric detecting element 31 and are optically detected by the detecting element 31.
Heat. Assuming that the measured value of the power signal due to the optical heating in the pyroelectric detection element 31 is Vt ′, the correct value Vt of the power signal is obtained by using the calibration information obtained in the calibration operation, and obtaining the measured value Vt. 'Can be calculated by making corrections. This is because the calibration information can correct a deviation due to material aging or the like in the pyroelectric detection element. Subsequently, the temperature of the target 1 can be calculated by the following formula. Vt = f (Ta) * (Tt ⁴ -Ta ⁴ ) where Ta indicates the absolute ambient temperature, Tt indicates the absolute temperature of the target, and f (Ta) indicates a function of the ambient temperature Ta.

The above-described calibration operation is based on the assumption that the influence of aging on the pyroelectric response characteristics and the effect on the piezoelectric response characteristics of the pyroelectric detection element are exactly the same. However, besides the pyroelectric response characteristic being affected by the piezoelectric coefficient, it is affected by various parameters (for example, the thermal time constant of the pyroelectric detection element, and the thermal conductance between the pyroelectric detection element and the surroundings). The above assumption is incorrect. Therefore, even if the pyroelectric thermometer is used and a calibration operation is performed, accurate temperature measurement cannot be performed. Besides, when the calibration operation is performed, the anti-microphonic sensor is not already connected in series, so the original anti-microphonic means does not work, and the measurement result calibrated Noise increases.

In addition, the above-mentioned US Pat. No. 4,797,840 proposes a heating element which is fixed at a constant temperature by controlling the temperature, and the constant temperature is used as a reference value for knowing the temperature of the target. The selective opening and closing of the shutter causes the pyroelectric detector to selectively receive infrared radiation from the target and produce a first signal, or receive infrared radiation from a heating element and produce a second signal. Produces a signal. The temperature of the target is fixed to the measured first signal, the second signal, and the constant temperature, and the value can be calculated from the temperature of the heating element whose value is already known.

However, the above-described temperature measurement method has some disadvantages. That is, since the temperature of the heating element is fixed at a constant temperature, it must be continuously heated. Since this process requires considerable power, the cost cannot be easily suppressed when using the thermometer. Furthermore, the thermometer cannot be made compact. Further, it takes a very long time until the temperature of the heating element becomes stable, so that it is difficult to commercialize this thermometer. Further, since the temperature of the target is calculated using the reaction signal of the pyroelectric detector rather than using the absolute value of the infrared ray directly emitted by the target, the Temperature cannot be measured.

In addition, US Pat. Nos. 4,790,324 and 4,60
2,642 proposes a black body that is temperature controlled and fixed at a constant temperature, and that black body is used to calibrate the thermometer.
The two patented thermometers are essentially U.S. Pat.
4,797,840 have the same disadvantages as in the case of the heating element.

In addition, US Pat. No. 4,900,162 proposes a thermometer comprising a radiation detector and a heating device and a cooling device for fixing the radiation detector at a constant temperature. If the value of the null radiometer signal, which is directly proportional to the difference between the radiometer temperature and the target temperature, is zero, the system determines that the temperature difference between the radiation detector and the target is zero, The temperature is obtained by the known radiation detector temperature. Since both heating and cooling operations are very power and time consuming, this thermometer has disadvantages such as high cost, miniaturization and difficulty in commercialization.

In addition, US Pat. No. 4,907,895 proposes an optical chopper that is rotated by a motor, serving for an infrared radiation thermometer. Since considerable power is required to operate the motor, this design has the same disadvantages as the powered thermometer described above. In this design, since no calibration operation is performed, expensive elements are required to secure long-term stability, and the manufacturing cost is increased.

In addition, US Pat. No. 4,993,424 proposes an infrared medical thermometer that includes a calibration plate pivotally attached to the front end of a probe. Since the temperature of this calibration plate is fixed at a constant temperature,
It needs to be heated. Similarly, the heating process is both power and time consuming. Therefore, this thermometer has disadvantages such as high cost, miniaturization, and difficulty in commercialization.

In addition, the temperature measurement device proposed in US Pat. No. 5,127,742 includes a shutter fixed at a constant temperature. This temperature measuring device performs temperature measurement so as not to be affected by the ambient temperature, thereby expanding the range in which the temperature can be measured. As a result, this temperature measuring device has a problem that it is difficult to connect a heating wire to the shutter at a high speed, in addition to the above-mentioned disadvantages that occurred during the temperature control operation.

[0020]

In view of the above problems,
A first object of the present invention is to provide an absolute radiation thermometer and a temperature measurement method using the absolute radiation thermometer. A second object of the present invention is to provide a radiation thermometer that has advantages such as compactness, portability, simple structure, low manufacturing cost, and requires much less power than conventional radiation thermometers. A third object of the present invention is to provide a more accurate measurement of infrared radiation by applying optical heating by infrared radiation from a target and electric heating by a controlled power supply to the same element,
Further, a radiation thermometer capable of obtaining a more accurate target temperature is provided. A fourth object of the present invention is to provide a radiation thermometer having a longer use time, requiring no further calibration by the consumer and having excellent stability. A fifth object of the present invention is to provide a radiation thermometer whose temperature measurement is completed within one second and is very suitable for commercialization. A sixth object of the present invention is to solve the above-mentioned problem of "false signal" which is always present in the conventional pyroelectric radiometer without using an expensive and complicated device, thereby reducing the manufacturing cost. Provide a total. A seventh object of the present invention is to provide a radiation thermometer in which power supply noise is significantly reduced by using a floating power supply for electrical heating, isolated from the system power supply of the thermometer.

[0021]

The absolute radiation thermometer of claim 1 is inserted between the target and a detector and controlled to pass or block infrared radiation from the target to the detector. Thus, only during a predetermined period of time when infrared light from the target is received for a predetermined period, a chopper that is received by the detector, an energy exciter for providing power to the detector, and a first induced signal generated by the detector and A signal processing and calculating device for processing a second guide signal, calculating the infrared power emitted by the target and received by the detector, and obtaining a temperature using the calculated value of the infrared power. Features.

According to a second aspect of the present invention, in the absolute radiation thermometer, the detector is for receiving infrared radiation from a target or electric power provided by an external power supply. A first top electrode provided on a first side of the first, a first bottom electrode provided on a second side of the first pyroelectric layer, and a first bottom electrode provided on a side of the first top electrode opposite to the first pyroelectric layer. A resistance layer, a first heating terminal provided at a first end of the resistance layer,
A first pyroelectric detection element including a second heating terminal provided at a second end of the resistive layer, and an insulating device sandwiched between the resistive layer and a first top electrode; and a second pyroelectric layer. A second pyroelectric detection element including a second top electrode provided on a first side of the second pyroelectric layer, and a second bottom electrode provided on a second side of the second pyroelectric layer, Wherein the second top electrode has a polarity opposite to that of the first bottom electrode, and both are connected at a third node, and the first top electrode has a polarity opposite to that of the second bottom electrode. Have both connected at a fourth node, the third and fourth nodes connected to the signal processing and computing device, and the first heating terminal and the second heating terminal connected to the energy excitation Connected to a vessel.

The absolute radiation thermometer according to claim 3, wherein the detector is for receiving infrared radiation from a target or electric power provided by an external power supply, wherein the first pyroelectric layer and the first pyroelectric layer are provided. A first top electrode provided on a first side of the first, a first bottom electrode provided on a second side of the first pyroelectric layer, and a first bottom electrode provided on a side of the first top electrode opposite to the first pyroelectric layer. A resistance layer, a first heating terminal provided at a first end of the resistance layer,
A first pyroelectric detection element including a second heating terminal provided at a second end of the resistive layer, and an insulating device sandwiched between the resistive layer and a first top electrode; and a second pyroelectric layer. A second pyroelectric detection element including a second top electrode provided on a first side of the second pyroelectric layer, and a second bottom electrode provided on a second side of the second pyroelectric layer, The first bottom electrode has the same polarity as the second bottom electrode, both are connected, and the first top electrode and the second top electrode are connected to the signal processing and calculation device, It is characterized by.

The absolute radiation thermometer according to claim 4, wherein the detector is for receiving infrared radiation from a target or electric power provided by an external power supply, wherein the first pyroelectric layer and the first pyroelectric layer are provided. A first resistance layer provided on a first side of the first heating terminal provided at a first end of the first resistance layer, a second heating terminal provided at a second end of the first resistance layer, A first pyroelectric detection element including a first bottom electrode provided on a second side of the first pyroelectric layer, a second pyroelectric layer, and a top electrode provided on a first side of the second pyroelectric layer. And a second pyroelectric detection element including a second bottom electrode provided on the second side of the second pyroelectric layer, and wherein the first heating terminal and the second heating terminal are the energy exciter. And the top electrode has a polarity opposite to that of the first bottom electrode, and both are connected to a fourth node connected to the signal processing and calculation device. Wherein the energy exciter is electrically connected to the energy storage device and the detector only when power is provided to the energy storage device and the detector; It is characterized in that the power applied to the detector is prevented from interfering with the first inductive signal generated by the detector.

The absolute radiation thermometer according to claim 5, wherein the detector is for receiving infrared radiation from a target or electric power provided by an external power supply, wherein the first pyroelectric layer and the first pyroelectric layer are provided. A first resistance layer provided on a first side of the first heating terminal provided at a first end of the first resistance layer, a second heating terminal provided at a second end of the first resistance layer, A first pyroelectric detection element including a first bottom electrode provided on a second side of the first pyroelectric layer, a second pyroelectric layer, and a top electrode provided on a first side of the second pyroelectric layer. And a second pyroelectric detection element including a second bottom electrode provided on the second side of the second pyroelectric layer, and wherein the first heating terminal and the second heating terminal are the energy exciter. And the first bottom electrode has the same polarity as the second bottom electrode and is connected to each other, and the energy exciter is A switching device provided between the energy storage device and the detector for controlling whether the energy storage device provides power to the detector, and when the power is supplied to the detector. The energy storage device is electrically connected only to the detector, so that the power applied to the detector is prevented from interfering with the first inductive signal generated by the detector. I do.

In the absolute radiation thermometer according to claim 6, the energy storage device is electrically connected to a power supply controlled by the signal processing and calculation device through the switch device, so that the energy exciter can detect the energy. The capacitor to be charged when no power is supplied to the
A switching device including a (double pole double throw) switch, wherein when power is supplied to the detector, the capacitor is electrically connected to the detector only through the switching device. It is characterized by.

The absolute radiation thermometer according to claim 7, wherein the energy storage device includes a battery, and the switch device is an SPS.
And a T (single pole, single throw) switch, wherein the battery is electrically connected to the detector only through the switch device when power is provided to the detector.

In the absolute radiation thermometer according to claim 8, the energy storage device is electrically connected to a power source controlled by the signal processing and calculation device through the switch device so that the energy exciter can detect the energy. The capacitor to be charged when no power is supplied to the
A switching device including a (double pole double throw) switch, wherein when power is supplied to the detector, the capacitor is electrically connected to the detector only through the switching device. It is characterized by.

According to a ninth aspect of the present invention, in the absolute radiation thermometer, the energy storage device includes a battery, and the switch device has an SPS.
And a T (single pole, single throw) switch, wherein the battery is electrically connected to the detector only through the switch device when power is provided to the detector.

According to a tenth aspect of the present invention, there is provided a temperature measuring method comprising the following procedure using the absolute radiation thermometer according to the first aspect. (1) measuring the ambient temperature Ta; (2) causing the energy exciter to provide power to the detector, and in response to the provided power, causing the detector to produce a first induction signal Ve; 3) measure the power provided to the detector and record the measurement as standard power Ee; (4) open the chopper so that the detector can receive infrared radiation from the target; A second guidance signal Vt is generated in response to the received infrared radiation,
Then make close the chopper; (5) the signal processing and computing apparatus calculates the temperature Tt of the formula a target below, Tt = ((Ee * Vt / Ve) / Kb + Ta 4) 1/4 Here, Kb Is a constant accurately determined using a blackbody with a known Tt when manufacturing a thermometer.

According to the first aspect of the present invention, first, the infrared radiation from the target received by the pyroelectric detector is applied to the pyroelectric detector and calculated with a known heating power. Next, the infrared radiation from the target affects the measurement accuracy of the target temperature, and also affects the measurement accuracy of the target temperature obtained by the response characteristics of the pyroelectric detection element constituting the pyroelectric detector. The target temperature is further directly calculated by means of the calculated infrared radiation so that there is no target temperature.

[0032]

BRIEF DESCRIPTION OF THE DRAWINGS Other features of the present invention and its specific structure, functions, and effects can be better understood by referring to the accompanying drawings described below with reference to preferred embodiments of the present invention.

The absolute radiation thermometer according to the present invention will be described in detail with reference to FIG. The absolute radiation thermometer is shown in FIG.
And a pyroelectric detection element 10 having a structure shown in FIG. 18 and generating a response current in a connected circuit when externally heated or optically heated to a certain target (infrared radiation source), as shown in FIG. It is provided between the detection element 10 and the target 1 to be subjected to temperature measurement, and is controlled to allow or block infrared radiation from the target 1 to the pyroelectric detection element 10 so that the infrared radiation from the target 1 can be prevented. A chopper 63 that reaches the detection element 10 only during a scheduled “open” period of infrared light, a hollow tubular waveguide 90 that guides infrared light from the target 1 to the detection element 10, and the detection element 10 and detection element 1
A preamplifier 51 for amplifying a response current generated by a zero and a chopper driving means 64 for passing or blocking infrared rays by moving the chopper 63 up and down.
A chopper driving circuit 65 for driving the chopper driving means 64, an ambient temperature detector 61 for measuring an ambient temperature, a temperature signal amplifier 62 for amplifying an ambient temperature signal, An energy meter 58 for measuring power provided to the element 10 and an energy exciter 57 for providing power to the detecting element 10
, An A / D converter 53 and optionally the temperature signal amplifier 6.
2. An analog multiplexer 52 for sending a signal from a preamplifier 51 or an energy meter 58 to the A / D converter 53; a microprocessor 54; and the microprocessor 54 because the microprocessor 54 can access data. A storage device 55 to be connected, and a microprocessor 54 connected to the microprocessor 54.
56 for displaying the data provided by
And a start button 60 for starting the microprocessor 54.

The microprocessors 54 each include
To the A / D converter 53, to the analog multiplexer 52,
It provides control signals to an energy exciter 57 and to a chopper drive circuit 65 through a power amplifier 59, and processes data that is converted from the analog multiplexer 52 to a digital signal by the A / D converter 53. I do. Since the detecting element 10 and the ambient temperature detector 61 are housed in a thermomass 66 (a container having a large heat capacity), the influence of the ambient temperature on the pyroelectric coefficient of the pyroelectric detecting element 10 is affected. Is significantly reduced.

FIG. 2 is a block diagram for the sake of simplicity of explanation, and all elements not related to the features of the present invention in FIG. Hereinafter, reference numeral 80
Is referred to as a “signal processing and calculation device”.

Next, further improvements relating to the pyroelectric detection element 10 will be described. In the detecting element 10 shown in FIG. 18, when the resistive material layer 12 and the bottom electrode 13 are used as electrodes for reading an induced pyroelectric signal generated by the pyroelectric material layer 11, the capacitance of the pyroelectric detecting element 10 Due to the nature, an electric signal for heating the resistance material layer 12 is easily coupled to a true pyroelectric signal to be measured, and as a result, the measured value of the pyroelectric signal is affected. Therefore, FIG.
As shown in the figure, a variable resistor VR is connected in parallel between the heating terminals T1 and T2 at both ends of the resistance material layer 12, and both terminals T1 and T2 are connected to the outside by lead wires A1 and A2, The energy meter 58 is connected to the energy exciter 57 (see FIGS. 1 and 2).

The sliding electrode M is slidably connected to the variable resistor VR.
, And the contact point between the variable resistance VR and the resistance material layer 1
2 are selected to form a balanced bridge, thus avoiding affecting the measured pyroelectric signal of the capacitively coupled signal. The sliding electrode M is regarded as a temporary reading electrode, and is connected to the preamplifier 51 through the true reading electrode (bottom electrode 13) and the leads A3 and A4, respectively (see FIGS. 1 and 2). The purpose is for the pyroelectric signal to be read in such a way that it does not interfere with the heating signal and to be sent to the preamplifier 51. The aforementioned detector is represented by the symbol 100 in FIG.
Represented by A.

Another use of a pyroelectric detection element or detector is the so-called "microphonic".
It is desirable to solve the problem. In particular, since all pyroelectric materials have piezoelectric properties, when a pyroelectric sensing element made of the pyroelectric material is subjected to mechanical stress, an inductive electric signal is generated. The pyroelectric response characteristics of the electric detection element are not only affected by the fluctuation of its temperature, but also by the physical deformation due to its vibration, so that the generated induced electric signal is a mixture of the pyroelectric signal and the piezoelectric signal. In order to eliminate the unwanted piezoelectric signal, the detector 10 shown in FIG.
0A is shown in FIG.
It is preferable to change to the first type of phonic detector 100B. As shown in FIG. 4, two similar detectors are:
The pyroelectric layers are connected in parallel so that the polar directions are opposite (represented by “↑” and “↓”, respectively) so as to cancel the piezoelectric signals generated by the two detectors. Since optical heating (with infrared radiation) and electrical heating are applied only to the detector on the left, the balancing bridge on the right detector can be extinguished. The resistance layer and the black coating layer in the right detector can be replaced with the top electrode P. An example is the detector 100C shown in FIG.

In FIG. 5, the detector 100C includes a first pyroelectric element 10L on the left, a second pyroelectric element 10R on the right, and a variable resistor VR. The first pyroelectric detection element 10L is for receiving infrared radiation from a target or electric power provided by an external power supply. The first pyroelectric detection element 10L includes a first pyroelectric layer 11L, a first resistance layer 12 provided on a first side of the first pyroelectric layer 11L,
A heating terminal T1 provided at a first end of the first resistance layer 12;
A heating terminal T2 provided at a second end of the first resistance layer 12; a first bottom electrode 13L provided on a second side of the first pyroelectric layer 11L; A black coating layer 16 attached to the opposite side of the first pyroelectric layer 11L, receives infrared radiation from the target, and conducts its heat to the first pyroelectric layer 11L.

The second pyroelectric detection element 10R includes a second pyroelectric layer 11R, a top electrode P provided on a first side of the second pyroelectric layer 11R, and a second pyroelectric layer 11R. And a second bottom electrode 13R provided on the side.

The variable resistor VR has a second resistance layer having a first end S1 and a second end S2, and is slidably in contact with the second resistance layer, and is in contact with the first end S1 along the second resistance layer. Second end S2
And a sliding electrode M that can be moved between them. The position of the sliding electrode M is determined so that the variable resistor VR and the first resistance layer 12 form a balanced bridge, and the sliding electrode M is a temporary read electrode.

The first end S1 is connected to the first heating terminal T1 at a first node N1, and the second end S2 is connected to the second heating terminal T2 at a second node N2.
And the second node N2 is connected to the energy exciter 57 or 5
7A (see FIG. 2 or FIG. 9). The top electrode P
And the first bottom electrode 13L are connected to each other at a fourth node N4 and have opposite polarities (one is a positive electrode and the other is a negative electrode). The provisional read electrode M and the fourth node N4 are connected to the preamplifier 51 included in the signal processing and calculation device 80 (see FIG. 9). The second bottom electrode 13R is connected to the first heating terminal T1, the second heating terminal T2, or the temporary reading electrode M. If the surface of the resistive layer has a sufficiently high emissivity, the black coating layer 16 which may be in the first pyroelectric detection element 10L and has a high emissivity may be omitted.

FIG. 6 is a schematic diagram of a second type of anti-microphonic detector 100D according to the present invention, which is slightly different from the detector 100C shown in FIG. In FIG. 5, two pyroelectric detection elements connected in parallel are changed to series connection in the example of FIG. In addition, the bottom electrodes (having the same polarity) of the two pyroelectric detection elements are connected to each other. The top electrode of the right pyroelectric detection element is connected to the signal processing and calculation device 80 through the lead wire A4 (see FIG. 9). Other parts are shown in FIG.
Is the same as

Incidentally, in the detector 100D shown in FIG.
When the pyroelectric layers of the two pyroelectric detection elements separated from each other are integrated, a detector 100D ′ shown in FIG. 7 is obtained.

According to the present invention, since a power supply for heating the pyroelectric detection element is connected to one input terminal of the preamplifier 51 (see FIG. 9), the heating power supply is used for the entire thermometer system. If not isolated from the power supply, the only option is to use expensive triggering signal differential amplifiers to eliminate the problem of pyroelectric signal measurements being interfered with by the heating signal. 8 and 1
0 indicates an example of an energy exciter used as an isolated heating power supply, and is hereinafter referred to as a “floating power supply”.

FIG. 8 is a schematic diagram showing the structure of a kind of energy exciter used in the present invention. FIG. 9 is an anti-microphonic detector 100C shown in FIG. 5, an energy exciter 57A shown in FIG. And a connection method of the signal preamplifier 51 and the like. The energy exciter 57A shown in FIG.
It includes a capacitor 571 and a DPDT (double pole double head) switch 572. And the DPDT switch 572
May be a MOS switch or a mechanical switch, and is provided between the capacitor 571 and the energy meter 58.
Under the control of the signal processing and calculation device 80, the DPDT switch 572 can be switched between a first position (shown by a solid line in FIG. 8) and a second position (shown by a dotted line in FIG. 8). When in the first position, the capacitor 571 is connected to the DPD
It is electrically connected to a power source controlled by the signal processing and calculation device 80 through the T switch 572. Thus, the capacitor 571 is charged to its power supply and reaches a certain accurate potential. As shown in FIG. 9 and FIG.
Is in the second position, the capacitor 571 is connected to the D
PDT switch 572, energy meter 58, anti-microphonic detector 10 through lead wires A1, A2, etc.
By connecting only to the 0C heating terminals T1 and T2,
Power is provided to the heating terminals T1, T2 of the detector. Thus, the problem of the heating signal interfering with the measured value of the pyroelectric signal is avoided. The detector 100C is also connected to the input terminal of the preamplifier 51 through leads A3, A4 and the like.

In accordance with the present invention, electrical heating for performing electrical calibration on the pyroelectric detector can be achieved by utilizing the energy exciter 57A shown in FIGS.
The implementation is as simple as including a capacitor 571 and a DPDT switch 572 instead of the expensive isolation amplifier used in the prior art (see FIG. 16). In addition, the prior art, for example, the aforementioned U.S. Pat.
0 compared to the power (100 mW or more) consumed in the temperature control operation required by the heating element
By using A, the power for electric heating is less than 0.1mW, much lower than the prior art. Therefore, according to the present invention, necessary electrical calibration can be completed under conditions such as high accuracy and low cost.

FIG. 10 is a schematic diagram showing another type of energy exciter used in the present invention. This type of energy exciter 57B includes a battery 576 and an SPST
(Single pole single throw) switch 577 is included.
This switch 577 is selectively circuited or closed under the control of the signal processing and computing device 80, and thus determines whether the battery 576 provides power to the detector heating terminals T1, T2.

Instead of the above-described pyroelectric detection element 10 (see FIGS. 17 and 18), another type of pyroelectric detection element 70 shown in FIGS. 11 and 12 is used in the thermometer of the present invention. Can be

The pyroelectric detection element 70 includes a pyroelectric layer 71 that generates transient induced charges when heated and the temperature rises, a top electrode 78 provided on a first side of the pyroelectric layer 71, Provided on the second side of the layer 71 and connected to an external electrical circuit (not shown in FIGS. 17 and 18) through a lead wire, the current induced in the pyroelectric layer 71 flows to the external circuit. A bottom electrode 73, a resistance layer 72 provided on the opposite side of the pyroelectric layer 71 in the top electrode 78,
First and second heating terminals T1 and T2 respectively provided at both ends of the resistance layer 72, the resistance layer 72 and the top electrode 78
And an insulating device 77 sandwiched between the two, and attached to the opposite side of the pyroelectric layer 71 in the resistive layer 72, receives infrared radiation from a target, and conducts heat to the pyroelectric layer 71. And a black coating layer 76.

The only difference between the detection element 70 and the detection element 10 is that the top electrode 78 and the heating layer 72 are isolated from each other by an insulating device 77 so that the heating signal eliminates interference with the pyroelectric signal. is there.

As described above, in order to eliminate unnecessary microphonic noise, a pair of similar detecting elements 70 shown in FIG. 12 are used to separate the polarization of each pyroelectric layer as shown in FIG. By connecting in parallel so that the directions are opposite, microphonic noise generated by these two detection elements can be eliminated. Detector 100E having the structure described above (see FIG. 13) is a third type of anti-microphonic detector according to the present invention.

The details will be described below. The top electrode of the right detection element and the bottom electrode of the left detection element are connected at one node, and the top electrode of the left detection element and the bottom electrode of the right detection element are connected at another node. Both nodes are exit line A
3. Connect to the preamplifier 51 of the signal processing and computing device 80 through A4 (see also FIG. 2). Further, the first heating terminal T
The first and second heating terminals T2 are connected to an energy exciter 57 through an energy meter 58 (see also FIG. 2) to heat the resistance layer 72.

Since the optical heating (by infrared radiation) and the electric heating are applied only to the left detecting element, the resistance layer 72, the insulating device 77, and the black covering layer 76 in the right detecting element can be omitted. Such a configuration is the detector 100F shown in FIG. If the surface of the resistive layer has a sufficiently high emissivity, the black covering layer 76 in the left pyroelectric detection element can be omitted in some cases.

FIG. 15 shows a fourth type of anti-microphonic detector 100G according to the present invention.
4 is slightly different from the detector 100F shown in FIG. The connection method of the two pyroelectric detection elements is series connection instead of parallel connection (FIG. 14).

Note that the bottom electrodes of two pyroelectric detection elements having the same polarity are connected to each other. The top electrodes of the left and right pyroelectric detection elements pass through the preamplifier 51, and the lead wires A3 and A4 respectively.
To connect to the signal processing and computing device 80 (see also FIG. 2). Other parts are the same as those shown in FIG.

The power of the infrared (optical heating) radiation emitted from the target and received by the pyroelectric detector (or pyroelectric detection element) is proportionally determined by utilizing the electrical calibration method described below.

Referring to FIG. 17, the optical heating and the electric heating are performed by the black coating layer 16 (76) and the electric resistance layer 12 (72).
Is applied. If the black coating layer has a sufficiently high thermal conductivity, the black coating layer and the electrical resistance layer are very close to each other, and optical heating and electrical heating are considered to be equal (hereinafter “optical heating”). Electro-Equivalent "). Therefore, Et / Ee = Fr * Vt / Ve where, Fr = 1.00 ± 0.02 (constant); Et = power for optical heating; Ee = power for electrical heating; Vt = optical heating applied to the detector (See FIG. 1), the output induction signal of the A / D converter 53; Ve = the output induction of the A / D converter 53 when the electric heating is applied to the detecting element (see FIG. 1). Signal, by Stephan Boltzmann's law, Et = Kf * σ (Tt ⁴ -Ta ⁴ ) Et = Ka * (Tt ⁴ -Ta ⁴ ) -------- (a) where Ka = Kf * σ σ = 5.67 * 10 ^-8 W / M ² / ° k ⁴ Kf is the “optical coupling constant” determined by the optical arrangement of the thermometer system, and its value is approximately As * sin ² (θr) * εs * τs where, As = radiation receiving area of detector element θr = field of view of detector element εs = transmittance of detector element window τs = emissivity of detector element

Next, a method of measuring a target temperature used in the present invention will be described. In the detector, since the induction signal of the pyroelectric detection element is directly proportional to the power applied to it, the power of the infrared radiation radiated from the target and received by the detection element should be obtained from the known power applied to the detection element. Can be. Therefore, the temperature of the target can be calculated with the power. The method for measuring the target temperature according to the present invention mainly includes the following steps. (1) Measuring the ambient temperature Ta; (2) Using the energy exciter to electrically heat the detecting element of the detector, thereby causing the detector to generate a first induction signal. (3) Measure the power provided to the detector, and record the measured value as the standard power Ee. (4) The detector causes the chopper to open so that it can receive infrared radiation from the target, thereby producing a second induction signal Vt, and then closing the chopper. (5) Measure the infrared radiation Et from the target using a signal processing and computing device. Et / Ee = Fr * Vt / Ve by “Optical Electron Equivalence” and Et = Ee * Fr * Vt / Ve ---------- (b) (6) Measure target temperature Tt with: Et = Ka * (Tt ⁴ -Ta ⁴ ) Tt = (Et / Ka + Ta ⁴ ) ^1/4 ---------- (c) Formula (b) Substituting into (c), Tt = ((Ee * Fr * Vt / Ve) / Ka + Ta ⁴ ) ^1/4 Tt = ((Ee * Vt / Ve) / Kb + Ta ⁴ ) ^1/4 ---- -(d) Here, Kb = Ka / Fr is a constant accurately determined using a black body having a known Tt when manufacturing a thermometer. Ee
Can be accurately measured using an energy meter.

[0060] sensitivity coefficient and the deviation of the thermal time constant of the pyroelectric detector elements, general pyroelectric detector has always fluctuates ultrahigh resistance (about 10 ⁹ ohms) deviation, signal amplifier and A / Since the conditions such as the deviation of the D converter, the deviation due to the temperature coefficient of the components of the thermometer, etc. all simultaneously and similarly affect Vt and Ve, even if the value of Vt / Ve has the above deviation, It is maintained at a fixed value, and is also maintained at a fixed value by the value of Tt = ((Ee * Fr * Vt / Ve) / Ka + Ta ⁴ ) ^1/4 . As a result, an accurate target temperature Tt can be obtained by the temperature measurement method of the present invention.

For comparison, in US Pat. No. 4,797,840, the target temperature Tt can be calculated by the following equation. Tt = (Vt / f (Ta) + Ta ⁴ ) ^1/4 , where Vt is affected by the above-mentioned deviation, and worse is when f (Ta) is a function of the ambient temperature. as a result,
In view of the operable temperature range, long-term stability, and accuracy, etc., the radiation thermometer according to the present invention far exceeds the technique proposed in the above-mentioned US patent.

Considering the non-linearity of the detector, A / D converter, etc.,
Performing another electrical heating further improves the accuracy of the temperature measurement. That is, after completing the steps (1) to (6), the optical heating power Et is obtained by the formula (b), and thereafter, the test power which is substantially equal to the obtained optical heating power Et. Electric heating is performed at Ee 'to minimize the effects of nonlinearity.

Finally, the advantages of the absolute radiation thermometer and the temperature measurement method according to the present invention can be summarized as follows. (1) The measurement of the optical heating power radiated by the target and received by the detector is not affected by deviations in the sensitivity coefficient and thermal time constant of the pyroelectric detection element, deviations in the signal amplifier and A / D converter, etc. In addition, the target temperature can be directly calculated with the true value of the optical heating power, and an accurate measurement value can be obtained. (2) Since only one optical pulse is required to measure optical heating each time, power consumption is small. Since a continuously rotating chopper is not required, the entire thermometer is structurally simple, compact, and low in cost. (3) Since the optical heating and the electric heating are applied to the same element, accurate measurement results can be obtained. (4) When performing temperature measurement each time, the time required for optical heating is only about one second, so the measurement operation is immediately completed. (5) Since the target temperature Tt is calculated by Vt / Ve instead of Vt, its value has escaped the influence of the aforementioned deviation.

Although the preferred embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications can be made without departing from the spirit of the present invention. It should be appreciated that these alternatives are within the scope of the invention.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a detailed configuration of an absolute radiation thermometer according to a preferred embodiment of the present invention.

FIG. 2 is a simplified block diagram of FIG. 1A.

FIG. 3 is a block diagram of a detector provided so as to separate a reading electrode and a heating terminal.

FIG. 4 is a schematic diagram of a first type of an anti-microphonic detector according to the present invention by partially modifying the detector shown in FIG. 3;

FIG. 5 is a simplified schematic diagram of the anti-microphonic detector shown in FIG.

FIG. 6 is a schematic diagram of a second type of an anti-microphonic detector according to the present invention.

FIG. 7A is a modification of the detector in FIG. 6A.

FIG. 8 is a schematic diagram showing one type of structure of an energy exciter employed in the present invention.

FIG. 9 is a schematic diagram showing a connection scheme of the anti-microphonic detector shown in FIG. 5, the energy exciter shown in FIG. 8, and an inductive signal preamplifier.

FIG. 10 is a schematic diagram showing the structure of another type of energy exciter employed in the present invention.

FIG. 11 is a cross-sectional view showing a detailed structure of another type of pyroelectric detection element employed in the present invention.

12 is an equivalent circuit diagram of the pyroelectric detection element shown in FIG.

FIG. 13 is a schematic diagram of a third type of an anti-microphonic detector using the pyroelectric detection element shown in FIGS. 11 and 12 according to the present invention.

FIG. 14 is a simplified schematic diagram of the anti-microphonic detector shown in FIG.

FIG. 15 is a schematic diagram of a fourth type of an anti-microphonic detector according to the present invention including the pyroelectric detection elements shown in FIGS. 11 and 12;

FIG. 16 is a block diagram showing the structure of a conventional electric calibration pyroelectric radiometer.

17 is a cross-sectional view showing a detailed structure of a pyroelectric detection element used in the conventional radiometer shown in FIG. 16 and the absolute radiation thermometer of the present invention.

18 is an equivalent circuit diagram of the pyroelectric detection element shown in FIG.

FIG. 19 is a block diagram showing the structure of another conventional electrically calibrated pyroelectric radiometer.

20 shows an electric calibration signal applied to the pyroelectric detection element and an electric signal generated by the pyroelectric detection element when performing calibration by the calibration circuit shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Target 2 Chopper 3 Preamplifier 4 Energy meter 5 Isolation amplifier 6 D / A converter 9 Analog multiplexer 10 Detecting element 11 Pyroelectric material layer 12 First resistance layer 13 Bottom electrode 14 Lead wire 15 Lead wire 16 Black coating layer 20 A / D converter 21 Microprocessor 22 Storage device 23 Display 24 Motor 25 Drive circuit 26 Start button 30 Calibration circuit 31 Pyroelectric detection element 32 Electrode 33 Electrode chip 34 Electrode chip 35 Pyroelectric film 36 Switch 37 Amplifier circuit Reference Signs List 38 microprocessor 39 excitation circuit 40 electric calibration signal 41 electric signal 42 waveguide 43 shutter 51 preamplifier 52 analog multiplexer 53 A / D converter 54 microprocessor 55 storage device 56 display 57 energy exciter 58 energy Lugie meter 59 Power amplifier 60 Start button 61 Ambient temperature detector 62 Temperature signal amplifier 63 Chopper 64 Chopper drive means 65 Chopper drive circuit 66 Thermomass 80 Signal processing and calculation device 90 Waveguide 100A, 100B, 100C, 100D, 100E, 100F , 100G detector T1, T2 Heating terminal A1, A2, A3, A4 Outgoing wire

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masao Xie 7F, 70th Street, Jiangong 1st Road, Hsinchu City, Taiwan (72) Inventor Huang Yo-kun 23-2F, East Higashi Road, Science Park, Hsinchu City, Taiwan (72) Inventor Liang Jiamen 23F, Industrial East 9th Road, Science Park, Hsinchu City, Taiwan (72) Inventor Lin Sanbao, No.8, Sinsin 1 Road, Science Park, Hsinchu City, Taiwan (72) Inventor Ouyang League, 325, Jianguo Road, Fengshan City, Kaohsiung, Taiwan Street No. 3 3F (72) Inventor Yu Yobuchi No. 113 Gakufu Road, Hsinchu City, Taiwan

Claims (10)

[Claims] A detector for generating a first induction signal in response to power applied to an external power supply or for generating a second induction signal in response to infrared radiation from a target whose temperature is to be measured; A chopper inserted between the detector and being controlled to allow or block infrared radiation from the target to the detector so that infrared radiation from the target is received by the detector only for a predetermined period of time; An energy exciter for providing power to the detector, processing the generated first and second induction signals of the detector, the infrared power emitted by the target and received by the detector And a signal processing and calculating device for calculating the temperature by using the calculated value of the infrared power. 2. The detector is for receiving infrared radiation from a target or power provided by an external power supply,
A first pyroelectric layer, a first top electrode provided on a first side of the first pyroelectric layer, a first bottom electrode provided on a second side of the first pyroelectric layer, and the first top electrode A resistance layer provided on the opposite side of the first pyroelectric layer, a first heating terminal provided at a first end of the resistance layer, a second heating terminal provided at a second end of the resistance layer, A first pyroelectric detection element including an insulating device sandwiched between the resistive layer and the first top electrode, a second pyroelectric layer, and a second pyroelectric layer provided on a first side of the second pyroelectric layer. A second pyroelectric detection element including a top electrode and a second bottom electrode provided on a second side of the second pyroelectric layer, wherein the second top electrode is opposite to the first bottom electrode. Polarity, both are connected at a third node, the first top electrode has a polarity opposite to that of the second bottom electrode, and both are connected at a fourth node, The third node and the fourth node are connected to the signal processing and computing device, and the first heating terminal and the second heating terminal are connected to the energy exciter. Absolute radiation thermometer. 3. The detector is for receiving infrared radiation from a target or power provided by an external power source,
A first pyroelectric layer, a first top electrode provided on a first side of the first pyroelectric layer, a first bottom electrode provided on a second side of the first pyroelectric layer, and the first top electrode A resistance layer provided on the opposite side of the first pyroelectric layer, a first heating terminal provided at a first end of the resistance layer, a second heating terminal provided at a second end of the resistance layer, A first pyroelectric detection element including an insulating device sandwiched between the resistive layer and the first top electrode, a second pyroelectric layer, and a second pyroelectric layer provided on a first side of the second pyroelectric layer. A second pyroelectric detection element including a top electrode and a second bottom electrode provided on the second side of the second pyroelectric layer, wherein the first bottom electrode has the same polarity as the second bottom electrode. The absolute radiation according to claim 1, wherein the first and second top electrodes are connected to each other, and the first and second top electrodes are connected to the signal processing and calculation device. Degree meter. 4. The detector is for receiving infrared radiation from a target or power provided by an external power supply,
A first pyroelectric layer, a first resistance layer provided on a first side of the first pyroelectric layer, a first heating terminal provided at a first end of the first resistance layer, A second heating terminal provided at a second end, and a first pyroelectric detection element including a first bottom electrode provided on a second side of the first pyroelectric layer, and a second pyroelectric layer,
A top electrode provided on a first side of the second pyroelectric layer, and a second pyroelectric detection element including a second bottom electrode provided on a second side of the second pyroelectric layer, A first heating terminal and a second heating terminal are connected to the energy exciter, the top electrode has a polarity opposite to that of the first bottom electrode, and both are connected to the signal processing and calculating device. Connected to a node, wherein the energy exciter is provided between the energy storage device and the detector, and a switching device that controls whether the energy storage device provides power to the detector. When power is provided to the detector, the energy storage device is electrically connected only to the detector, so that the power applied to the detector is generated by the first detector. Avoid interference with inductive signals Absolute radiation thermometer according to claim 1, wherein the door. 5. The detector for receiving infrared radiation from a target or power provided by an external power supply,
A first pyroelectric layer, a first resistance layer provided on a first side of the first pyroelectric layer, a first heating terminal provided at a first end of the first resistance layer, A second heating terminal provided at a second end, and a first pyroelectric detection element including a first bottom electrode provided on a second side of the first pyroelectric layer, and a second pyroelectric layer,
A top electrode provided on a first side of the second pyroelectric layer, and a second pyroelectric detection element including a second bottom electrode provided on a second side of the second pyroelectric layer, The first heating terminal and the second heating terminal are connected to the energy exciter, the first bottom electrode has the same polarity as the second bottom electrode, and are mutually connected, the energy exciter is An energy storage device and a switch device provided between the energy storage device and the detector for controlling whether the energy storage device provides power to the detector, and when the power is supplied to the detector. The energy storage device is electrically connected only to the detector, so that the power applied to the detector is prevented from interfering with the first inductive signal generated by the detector. The absolute radiation thermometer according to claim 1. 6. When the energy exciter does not provide power to the detector, the energy storage device is electrically connected through the switch device to a power source controlled by the signal processing and computing device. A capacitor to be charged and a switch device including a DPDT (double pole double throw) switch, wherein when power is supplied to the detector, the capacitor is electrically connected to only the detector through the switch device. The absolute radiation thermometer according to claim 4, wherein the absolute radiation thermometer is electrically connected. 7. The energy storage device includes a battery, the switching device includes an SPST (single pole, single throw) switch, and when power is supplied to the detector, the battery is detected through the switching device. 5. The absolute radiation thermometer according to claim 4, wherein the absolute radiation thermometer is electrically connected only to the vessel. 8. When the energy exciter does not provide power to the detector, the energy storage device is connected to a power source that is electrically controlled by the signal processing and computing device through the switching device. A capacitor to be charged and a switch device including a DPDT (double pole double throw) switch, wherein when power is supplied to the detector, the capacitor is electrically connected to only the detector through the switch device. The absolute radiation thermometer according to claim 5, wherein the absolute radiation thermometer is electrically connected. 9. The energy storage device includes a battery, the switching device includes an SPST (single pole, single throw) switch, and when power is provided to the detector, the battery is detected through the switching device. 6. The absolute radiation thermometer according to claim 5, wherein the absolute radiation thermometer is electrically connected only to the vessel. 10. A temperature measuring method using an absolute radiation thermometer according to claim 1, comprising the following steps. (1) measuring the ambient temperature Ta; (2) causing the energy exciter to provide power to the detector, and in response to the provided power, causing the detector to produce a first induction signal Ve; 3) measure the power provided to the detector and record the measurement as standard power Ee; (4) open the chopper so that the detector can receive infrared radiation from the target; A second guidance signal Vt is generated in response to the received infrared radiation,
Causing then close the chopper; (5) the signal processing and computing apparatus calculates the temperature Tt of the formula a target below, Tt = ((Ee * Vt / Ve) / Kb + Ta 4) 1/4 where, Kb is an accurately determined constant using a blackbody with a known Tt when manufacturing a thermometer