JPH0982476A - Organic electroluminescent device - Google Patents
Organic electroluminescent deviceInfo
- Publication number
- JPH0982476A JPH0982476A JP7260996A JP26099695A JPH0982476A JP H0982476 A JPH0982476 A JP H0982476A JP 7260996 A JP7260996 A JP 7260996A JP 26099695 A JP26099695 A JP 26099695A JP H0982476 A JPH0982476 A JP H0982476A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- wiring
- organic electroluminescent
- input terminal
- organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000005401 electroluminescence Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 14
- 238000002310 reflectometry Methods 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 21
- 239000000463 material Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910017911 MgIn Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 2
- 238000001579 optical reflectometry Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
(57)【要約】
【課題】 配線形状の発光が生じない有機電界発光素子
を提供することにある。
【解決手段】 透明基板１１上に、アノード電極１２と
入力端子１２Ｂとを同時に形成し、このアノード電極１
２上に有機発光層１３を介してカソード電極１４を形成
し、このカソード電極１２上に絶縁層１５を形成する。
さらに、絶縁層１５上に配線１６を形成する。このと
き、配線１６とカソード電極１４とは、接続用開口部１
５Ａを介して接続される。このように形成することによ
り、配線１６は有機発光層１３と接触しないため、配線
１６の形状の発光が生じることを防止できる。
(57) An object of the present invention is to provide an organic electroluminescence device in which light emission in the form of wiring does not occur. SOLUTION: An anode electrode 12 and an input terminal 12B are simultaneously formed on a transparent substrate 11, and the anode electrode 1
The cathode electrode 14 is formed on the cathode electrode 12 via the organic light emitting layer 13, and the insulating layer 15 is formed on the cathode electrode 12.
Further, the wiring 16 is formed on the insulating layer 15. At this time, the wiring 16 and the cathode electrode 14 are connected to each other by the opening 1 for connection.
5A is connected. By forming in this way, the wiring 16 does not come into contact with the organic light emitting layer 13, so that it is possible to prevent light emission in the shape of the wiring 16 from occurring.
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、有機電界発光素
子に関し、さらに詳しくは、表示素子、表示用照明など
に利用できるＥＬ（エレクトロルミネッセンス）素子に
係る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic electroluminescence device, and more particularly, to an EL (electroluminescence) device that can be used as a display device, a display illumination, and the like.
【０００２】[0002]
【従来の技術】従来、この種の有機電界発光素子として
は、図９（Ａ）および（Ｂ）に示すようなものがある。
その断面構造は、同図（Ｂ）に示すように、ガラス基板
１の上に遮光性を有するブラックマスク２がマトリクス
状に配置され、ブラックマスク２どうしの間に透明部材
３が配置されている。そして、ブラックマスク２および
透明部材３上の全面に、ＩＴＯ（Indium Tin Oxide）で
なるアノード電極としての透明電極４が形成され、この
透明電極４上に発光材料を含む有機発光層５が配置され
ている。さらに、有機発光層５の上に、例えばアルミニ
ウムからなるカソード電極としての背面電極６が各画素
に対応してパターニングされている。この背面電極６
は、上記した透明部材３と対向するように形成されてい
る。また、各背面電極６には、引き回し配線６Ａが接続
するように、背面電極６と同時にパターニングされてい
る。引き回し配線６Ａは、背面電極６の列どうしの間を
引き出されるように形成され、これら引き回し配線６Ａ
の束は、図９（Ｂ）に示すように、ブラックマスク２と
対向するように形成されている。なお、このように引き
回し配線６Ａの束とブラックマスク２とを対向させる理
由は、引き回し配線６Ａが有機発光層５に接触してお
り、透明電極４と背面電極６との間に所定電界が形成さ
れると引き回し配線６Ａ及び、背面電極６と等電位のた
め、引き回し配線６Ａに対応する有機発光層５に不要な
発光が生じてしまい、この不要な発光をブラックマスク
２で遮光するためである。2. Description of the Related Art Conventionally, as this type of organic electroluminescence device, there is one shown in FIGS. 9 (A) and 9 (B).
As for the cross-sectional structure, as shown in FIG. 1B, black masks 2 having a light shielding property are arranged in a matrix on a glass substrate 1, and a transparent member 3 is arranged between the black masks 2. . Then, a transparent electrode 4 made of ITO (Indium Tin Oxide) as an anode electrode is formed on the entire surface of the black mask 2 and the transparent member 3, and an organic light emitting layer 5 containing a light emitting material is arranged on the transparent electrode 4. ing. Furthermore, on the organic light emitting layer 5, a back electrode 6 made of, for example, aluminum as a cathode electrode is patterned corresponding to each pixel. This back electrode 6
Are formed so as to face the transparent member 3 described above. Further, each back electrode 6 is patterned at the same time as the back electrode 6 so that the leading wiring 6A is connected. The lead-out wiring 6A is formed so as to be drawn out between the rows of the back electrodes 6 and these lead-out wiring 6A is formed.
9B is formed so as to face the black mask 2 as shown in FIG. 9B. The reason why the bundle of routing wirings 6A and the black mask 2 are opposed to each other in this way is that the routing wirings 6A are in contact with the organic light emitting layer 5 and a predetermined electric field is formed between the transparent electrode 4 and the back electrode 6. This is because the wiring line 6A and the back electrode 6 have the same potential, so that unnecessary light emission occurs in the organic light emitting layer 5 corresponding to the wiring line 6A, and this unnecessary light emission is shielded by the black mask 2. .
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな従来の有機電界発光素子においては、各列の背面電
極６の数が増加するに従い、引き回し配線６Ａの数も増
加して、背面電極６の列どうしの間隔が長くなり、その
結果、配線面積が増大するという問題がある。このた
め、引き回し配線６に対向するブラックマスク２の幅も
大きくなり、表示面積全体に対する画素面積（背面電極
６の面積）の割合、すなわち開口率が減少するといる問
題点があった。また、特に単純マトリクス型構造では配
線間でクロストークが増大し、不点灯領域まで発光して
しまうため、発光効率が低くなってしまっていた。However, in such a conventional organic electroluminescent device as described above, as the number of back electrodes 6 in each column increases, the number of lead-out wirings 6A also increases, and the number of back electrodes 6 increases. There is a problem that the interval between columns becomes long, and as a result, the wiring area increases. Therefore, there is a problem that the width of the black mask 2 facing the routing wiring 6 also becomes large, and the ratio of the pixel area (the area of the back electrode 6) to the entire display area, that is, the aperture ratio decreases. Further, particularly in a simple matrix type structure, crosstalk increases between wirings, and light is emitted to a non-lighted region, resulting in low light emission efficiency.
【０００４】この発明の目的は、開口率が高く、発光効
率が良好な有機電界発光素子を提供することにある。An object of the present invention is to provide an organic electroluminescent device having a high aperture ratio and good luminous efficiency.
【０００５】[0005]
【課題を解決するための手段】請求項１記載の発明は、
相対向する第１の電極と第２の電極との間に有機発光層
が介在された有機電界発光素子において、第２の電極
は、その対向外側に当該第２の電極上方に開口された接
続用開口部を有する絶縁層の接続用開口部を介して入力
端子と接続されることを特徴としている。ここで有機発
光層とは、第１の電極及び第２の電極間に形成される所
定の電界を受けることにより発光する有機化合物をい
う。この所定の電界は、第１の電極及び第２の電極それ
ぞれに印加される電圧により形成することができる。こ
こで、入力端子は、外部からの印加電圧を入力する端子
をいう。According to the first aspect of the present invention,
In an organic electroluminescent device in which an organic light emitting layer is interposed between a first electrode and a second electrode facing each other, the second electrode is a connection in which the second electrode is opened outside the facing electrode above the second electrode. It is characterized in that it is connected to the input terminal through the connecting opening of the insulating layer having the opening for use. Here, the organic light emitting layer refers to an organic compound that emits light by receiving a predetermined electric field formed between the first electrode and the second electrode. This predetermined electric field can be formed by the voltage applied to each of the first electrode and the second electrode. Here, the input terminal is a terminal for inputting an applied voltage from the outside.
【０００６】請求項２記載の発明は、第２の電極は反射
性を有する部材でなり、第１の電極及び入力端子は第２
の電極より剛性度が高く、光透過性を有する部材でな
り、第１の電極及び入力端子は、それぞれ基板上に設け
られ、第２の電極は、配線を介して入力端子と接続され
ることを特徴としている。According to a second aspect of the present invention, the second electrode is a member having reflectivity, and the first electrode and the input terminal are the second member.
Of a member having higher rigidity than that of the electrode and having a light transmitting property, the first electrode and the input terminal are respectively provided on the substrate, and the second electrode is connected to the input terminal through the wiring. Is characterized by.
【０００７】請求項３記載の発明は、前記第２の電極が
複数の画素電極でなり、前記第１の電極がこれら画素電
極に対向する一枚の共通電極であることを特徴としてい
る。The invention according to claim 3 is characterized in that the second electrode is a plurality of pixel electrodes, and the first electrode is a single common electrode facing the pixel electrodes.
【０００８】請求項４記載の発明は、前記絶縁層が複数
の絶縁膜が積層されてなり、それぞれの絶縁膜上に、前
記画素電極に接続された配線群が分割されて介在されて
いることを特徴としている。According to a fourth aspect of the present invention, the insulating layer is formed by laminating a plurality of insulating films, and a wiring group connected to the pixel electrode is divided and interposed on each insulating film. Is characterized by.
【０００９】請求項５記載の発明は、配線が第２の電極
と一体的に形成されることを特徴としている。The fifth aspect of the invention is characterized in that the wiring is formed integrally with the second electrode.
【００１０】請求項６記載の発明は、第２の電極及び配
線はＭｇＡｇでなり、第１の電極はＩＴＯでなることを
特徴としている。The invention according to claim 6 is characterized in that the second electrode and the wiring are made of MgAg, and the first electrode is made of ITO.
【００１１】[0011]
【発明の実施の形態】以下、この発明に係る有機電界発
光素子およびその製造方法の詳細を図面に示す実施例に
基づいて説明する。 （実施形態１）図１（Ａ）はこの発明の実施形態１の有
機電界発光素子を示す平面図であり、図１（Ｂ）は同図
（Ａ）のＸ−Ｘ断面図である。図中符号１０は有機電界
発光素子を示している。この有機電界発光素子１０にお
いては、図１（Ｂ）に示すように、例えばガラスでなる
透明基板１１上に、第１の電極としての、ＩＴＯでなる
アノード電極１２Ａと入力端子１２Ｂとが形成されてい
る。なお、アノード電極１２Ａは、表示領域全面にわた
って形成される共通電極である。また、入力端子１２Ｂ
は、透明基板１１の周縁に、後記するカソード電極に対
応した数だけ形成されている。そして、アノード電極１
２Ａの上には、ポリＮビニルカルバゾール（ＰＶＣ
ｚ）、８−ヒドロキシキノリンアルミニウム錯体（Ａｌ
ｑ）、その他色素、電荷輸送材料などを含む任意の膜厚
の有機薄膜でなる有機発光層１３が形成されている。な
お、この有機発光層１３は、電子被注入層と正孔被注入
層等の複数層からなる構成のものでもよい。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, details of an organic electroluminescent device and a method for manufacturing the same according to the present invention will be described based on embodiments shown in the drawings. (Embodiment 1) FIG. 1 (A) is a plan view showing an organic electroluminescent element of Embodiment 1 of the present invention, and FIG. 1 (B) is a sectional view taken along line XX of FIG. 1 (A). Reference numeral 10 in the figure indicates an organic electroluminescent device. In this organic electroluminescent element 10, as shown in FIG. 1B, an anode electrode 12A made of ITO and an input terminal 12B as a first electrode are formed on a transparent substrate 11 made of glass, for example. ing. The anode electrode 12A is a common electrode formed over the entire display area. Also, the input terminal 12B
Are formed on the periphery of the transparent substrate 11 in the number corresponding to the cathode electrode described later. And the anode electrode 1
2A, poly N vinyl carbazole (PVC
z), 8-hydroxyquinoline aluminum complex (Al
q), other dyes, a charge transport material, and the like, and the organic light emitting layer 13 is formed of an organic thin film having an arbitrary thickness. The organic light emitting layer 13 may have a structure including a plurality of layers such as an electron injection layer and a hole injection layer.
【００１２】有機発光層１３の上には、図１（Ａ）に示
すように、第２の電極としての、複数のカソード電極１
４が所定の発光領域上に形成されている。このカソード
電極１４は、例えばマグネシウム銀（ＭｇＡｇ）膜また
はＭｇＩｎ膜が矩形状に形成されたものでなり、表示領
域全面にわたって、同図に示すようにマトリクス状に配
置されている。On the organic light emitting layer 13, as shown in FIG. 1 (A), a plurality of cathode electrodes 1 as second electrodes.
4 are formed on a predetermined light emitting region. The cathode electrode 14 is, for example, a magnesium silver (MgAg) film or a MgIn film formed in a rectangular shape, and is arranged in a matrix over the entire display area as shown in the figure.
【００１３】このように表示領域に形成されたアノード
電極１２Ａ、有機発光層１３およびカソード電極１４
は、例えばＳｉＯ2でなる絶縁層１５で全面的に覆われ
ている。ただし、絶縁層１５は、上記した入力端子１２
Ｂを覆わないように設定されている。そして、各カソー
ド電極１４上の絶縁層１５には、各カソード電極１４を
露出させる接続用開口部１５Ａが開設されている。さら
に、カソード電極１４とこのカソード電極１４に対応す
る入力端子１２Ｂとは、図に示すように、絶縁層１５と
透明基板１１との上に形成した配線１６で接続されてい
る。なお、この配線１６は、マグネシウム銀からなり、
絶縁層１５に開設した接続用開口部１５Ａを介してカソ
ード電極１４に接続され、また、入力端子１２Ｂに対し
ては配線端部が重なり合うことで接続されている。カソ
ード電極は絶縁層１５に発光領域に合わせた開口部を設
けた後、配線１６を開口部を埋設することにより、一体
的に形成してもよい。The anode electrode 12A, the organic light emitting layer 13 and the cathode electrode 14 thus formed in the display area.
Is entirely covered with an insulating layer 15 made of, for example, SiO 2 . However, the insulating layer 15 is the same as the input terminal 12 described above.
It is set not to cover B. Then, the insulating layer 15 on each cathode electrode 14 is provided with a connection opening 15A for exposing each cathode electrode 14. Further, the cathode electrode 14 and the input terminal 12B corresponding to the cathode electrode 14 are connected by a wiring 16 formed on the insulating layer 15 and the transparent substrate 11, as shown in the figure. The wiring 16 is made of magnesium silver,
It is connected to the cathode electrode 14 through the connection opening 15A formed in the insulating layer 15, and is connected to the input terminal 12B by overlapping the wiring end portions. The cathode electrode may be formed integrally by forming an opening in the insulating layer 15 in accordance with the light emitting region and then burying the wiring 16 in the opening.
【００１４】このとき、配線１６の部材であるＭｇＡｇ
は電子ポテンシャルが小さいため有機発光層１３に効率
よく電子を注入することができるが、外部からの信号電
圧を入力する入力端子としては柔軟すぎるため、外部端
子と熱圧着等により電気的に接続する場合に潰され隣接
する端子同士が短絡してしまい、駆動できなくなってし
まうという問題が生じるが、透明基板１１上にアノード
電極１２Ａと一括してＩＴＯからなる入力端子１２Ｂを
設けているので、この入力端子１２Ｂと接続するように
配線１６を堆積させれば、短絡することなく入力端子１
２Ｂを外部端子と接続することができる。At this time, MgAg which is a member of the wiring 16
Has a small electron potential, so that electrons can be efficiently injected into the organic light emitting layer 13, but since it is too flexible as an input terminal for inputting a signal voltage from the outside, it is electrically connected to the external terminal by thermocompression bonding or the like. In this case, there is a problem that the adjacent terminals are crushed and short-circuited to each other, which makes it impossible to drive. However, since the anode electrode 12A and the input terminal 12B made of ITO are provided together on the transparent substrate 11, this If the wiring 16 is deposited so as to be connected to the input terminal 12B, the input terminal 1 can be formed without short circuit.
2B can be connected to an external terminal.
【００１５】本実施形態では、有機発光層１３の第２の
電極であるカソード電極１４が接合する発光領域以外の
領域では絶縁層１５で覆われているため、配線１６が有
機発光層１３に接触することがなく、また発光領域の不
要な発光が生じるのを防止することができるので、発光
効率を良好にすることができ、特に携帯用の有機電界発
光素子では表示寿命を長くすることができる。また、本
実施形態のように、複数のカソード電極１４がマトリク
ス状に配置されている場合に、各カソード電極１４に接
続された配線１６をカソード電極１４の上方に形成する
ことができるため、従来の構造に比較して配線１６どう
しの間隔を長く設定することが可能となり、配線１６ど
うしのクロストークを防止することができ、また、カソ
ード電極１４どうしを近接させて配置することができ、
画素の開口率を大きくすることが可能となる。また、例
えばカソード電極１４をキャラクタ表示に用いる構成と
した場合、キャラクタ形状に配線１６の形状が付加して
表示されることが防止できる。このため、ブラックマス
クを形成する必要がなくなり、ブラックマスクの位置合
わせズレによる開口率の低下を防止できる。また、本実
施形態においては、キャラクタ形状の自由度を大きくす
る利点がある。In this embodiment, the wiring 16 is in contact with the organic light emitting layer 13 because the insulating layer 15 covers the region other than the light emitting region where the cathode electrode 14 which is the second electrode of the organic light emitting layer 13 is joined. In addition, since it is possible to prevent unnecessary light emission in the light emitting region, it is possible to improve the light emission efficiency, and it is possible to prolong the display life particularly in a portable organic electroluminescent device. . Further, as in the present embodiment, when the plurality of cathode electrodes 14 are arranged in a matrix, the wiring 16 connected to each cathode electrode 14 can be formed above the cathode electrodes 14, so It is possible to set the interval between the wirings 16 longer than that of the structure described above, it is possible to prevent crosstalk between the wirings 16, and it is possible to arrange the cathode electrodes 14 close to each other.
It is possible to increase the aperture ratio of the pixel. Further, for example, when the cathode electrode 14 is used for character display, it is possible to prevent the shape of the wiring 16 from being added to the character shape for display. For this reason, it is not necessary to form a black mask, and it is possible to prevent the aperture ratio from decreasing due to misalignment of the black mask. In addition, this embodiment has an advantage of increasing the degree of freedom of the character shape.
【００１６】次に、本実施形態の有機電界発光素子の製
造方法を、図２および図３に示す工程断面図を用いて説
明する。まず、図２（Ａ）に示すように、ガラスでなる
透明基板１１の表面にＩＴＯ膜１２を所定の膜厚に堆積
させる。次に、フォトリソグラフィー技術およびエッチ
ング技術を用いてＩＴＯ膜１２を加工して、アノード電
極１２Ａと入力端子１２Ｂとを一括して形成する。な
お、アノード電極１２Ａは、上記したように表示領域全
面にわたって形成し、入力端子１２Ｂは透明基板１１の
周縁部に形成する。その後、図２（Ｂ）に示すように、
有機発光層１３をアノード電極１２Ａ上に形成する。な
お、有機発光層１３の形成方法は、周知のパターニング
方法などを用いて行う。Next, a method of manufacturing the organic electroluminescent device of this embodiment will be described with reference to process sectional views shown in FIGS. First, as shown in FIG. 2A, the ITO film 12 is deposited to a predetermined thickness on the surface of the transparent substrate 11 made of glass. Next, the ITO film 12 is processed by using the photolithography technique and the etching technique to collectively form the anode electrode 12A and the input terminal 12B. The anode electrode 12A is formed over the entire display area as described above, and the input terminal 12B is formed on the peripheral portion of the transparent substrate 11. After that, as shown in FIG.
The organic light emitting layer 13 is formed on the anode electrode 12A. The organic light emitting layer 13 is formed by using a known patterning method or the like.
【００１７】続いて、図２（Ｃ）に示すように、ＭｇＡ
ｇ膜１４を基板全面に蒸着させる。その後、図２（Ｄ）
に示すように、ＭｇＡｇ膜をフォトリソグラフィー技術
およびエッチング技術を用いて島状のカソード電極１４
に加工する。Subsequently, as shown in FIG. 2 (C), MgA
The g film 14 is deposited on the entire surface of the substrate. After that, FIG. 2 (D)
As shown in FIG. 3, the MgAg film is formed into an island-shaped cathode electrode 14 by using a photolithography technique and an etching technique.
Process into
【００１８】その後、図３（Ａ）に示すように、基板全
面に、ＣＶＤ法によりＳｉＯ2を堆積させて絶縁層１５
を形成する。次に、図３（Ｂ）に示すように絶縁層１５
上にレジストパターン１７を形成し、このレジストパタ
ーン１７をマスクとして下地の絶縁層１５を異方性エッ
チングする。この異方性エッチングとしては、例えば反
応性イオンエッチング（ＲＩＥ）を行い、カソード電極
１４が露出するまでエッチングする。なお、このエッチ
ングは、ＩＴＯやガラスに対して選択比の大きい条件で
行う。このようにして、アノード電極１２Ａ、有機発光
層１３およびカソード電極１４を覆う絶縁層１５が形成
され、各カソード電極１４上の絶縁層１５には接続用開
口部１５Ａが形成される。次に、図３（Ｃ）に示すよう
に、全面に例えばアルミニウム（Ａｌ）膜（１６）を堆
積させ、続いて図３（Ｄ）に示すようにパターニングを
行うことにより、カソード電極１４と入力端子１２Ｂと
を接続する配線１６をパターン形成することができる。
本実施形態の製造方法によれば、アノード電極１２Ａと
入力端子１２Ｂとを、一括してパターン形成できるた
め、工程数を削減することが可能となる。After that, as shown in FIG. 3A, SiO 2 is deposited on the entire surface of the substrate by the CVD method to form the insulating layer 15.
To form Next, as shown in FIG. 3B, the insulating layer 15
A resist pattern 17 is formed on the resist pattern 17, and the underlying insulating layer 15 is anisotropically etched using the resist pattern 17 as a mask. As this anisotropic etching, for example, reactive ion etching (RIE) is performed, and etching is performed until the cathode electrode 14 is exposed. Note that this etching is performed under the condition that the selection ratio is large with respect to ITO or glass. In this way, the insulating layer 15 covering the anode electrode 12A, the organic light emitting layer 13 and the cathode electrode 14 is formed, and the insulating layer 15 on each cathode electrode 14 is formed with the connection opening 15A. Next, as shown in FIG. 3C, for example, an aluminum (Al) film (16) is deposited on the entire surface, and then patterning is performed as shown in FIG. The wiring 16 that connects to the terminal 12B can be patterned.
According to the manufacturing method of the present embodiment, since the anode electrode 12A and the input terminal 12B can be collectively patterned, it is possible to reduce the number of steps.
【００１９】（実施形態２）図４は、本発明の有機電界
発光素子の実施形態２を示す要部断面図である。本実施
形態を説明するにあたり、上記実施形態１と同一部材に
は同一の符号を付してその説明を省略する。本実施形態
の有機電界発光素子は、透明基板１１の周縁部表面にア
ノード電極１２Ａと同一材料でなる入力端子を有しない
構造である。この入力端子の代わりに配線の端部が透明
基板１１の周縁部に露出する構成とした。なお、カソー
ド電極１４に接続される配線には、図に示すように、絶
縁膜１５Ａに形成した接続用開口部を介して形成された
１層目の配線１６Ａと、絶縁膜１５Ａと絶縁膜１５Ｂと
の接続用開口部を介して形成された２層目の配線１６Ｂ
と、の２種類がある。なお、配線１６Ｂは、配線１６Ａ
のパターン形成の際に同時に形成されたコンタクト部１
６ａを介在させることにより、カソード電極に１４に接
続されている。１層目の配線１６Ａは、図４に示すよう
に、透明基板１１の周縁部にまで延在されている。ま
た、２層目の配線１６Ｂは、透明基板１１の周縁部より
少し内側の位置まで延在され、１層目の配線１６Ａと別
々に、例えばＴＡＢ実装し得るようになっている。本実
施形態によれば、多数のカソード電極１４が配置されて
いる場合に、絶縁膜１５Ａ上に形成する配線１６Ａの群
と、絶縁膜１５Ｂ上に形成する配線１６Ｂの群とに分割
することができるため、配線密度を小さくすることがで
き、クロストークの発生を防止することができる。な
お、本実施形態では、配線を２層構造としたが、それ以
上の多層配線構造としてもよい。(Embodiment 2) FIG. 4 is a cross-sectional view of essential parts showing Embodiment 2 of the organic electroluminescent element of the present invention. In describing the present embodiment, the same members as those in the first embodiment will be designated by the same reference numerals, and the description thereof will be omitted. The organic electroluminescent element of this embodiment has a structure in which the input terminal made of the same material as the anode electrode 12A is not provided on the peripheral surface of the transparent substrate 11. Instead of the input terminal, the end of the wiring is exposed at the peripheral edge of the transparent substrate 11. The wiring connected to the cathode electrode 14 includes the first-layer wiring 16A formed through the connection opening formed in the insulating film 15A, the insulating film 15A, and the insulating film 15B as shown in the figure. Second-layer wiring 16B formed through an opening for connection with
There are two types. The wiring 16B is the wiring 16A.
Contact part 1 formed at the same time as the pattern formation
It is connected to the cathode electrode 14 by interposing 6a. As shown in FIG. 4, the first-layer wiring 16A extends to the peripheral portion of the transparent substrate 11. The second-layer wiring 16B extends to a position slightly inside the peripheral portion of the transparent substrate 11, and can be mounted separately from the first-layer wiring 16A, for example, by TAB. According to the present embodiment, when a large number of cathode electrodes 14 are arranged, they can be divided into a group of wirings 16A formed on the insulating film 15A and a group of wirings 16B formed on the insulating film 15B. Therefore, the wiring density can be reduced and the occurrence of crosstalk can be prevented. Although the wiring has a two-layer structure in the present embodiment, it may have a multilayer wiring structure of more layers.
【００２０】（実施形態３）図５は、本発明の実施形態
３を示す要部断面図である。本実施形態は、同図に示す
ように、絶縁層１５に形成した接続用開口部１５Ａ内に
例えば導電性ペースト１６Ｃを充填し、この導電性ペー
スト１６Ｃにより配線１６Ｄを接続した構成である。本
実施形態によれば、有機電界発光素子側に配線をパター
ン形成する必要がないため、クロストークを低減でき、
しかも製造工程を大幅に削減することができる。(Embodiment 3) FIG. 5 is a cross-sectional view of essential parts showing Embodiment 3 of the present invention. In this embodiment, as shown in the figure, for example, a conductive paste 16C is filled in the connection opening 15A formed in the insulating layer 15, and the wiring 16D is connected by the conductive paste 16C. According to the present embodiment, since it is not necessary to form a wiring pattern on the organic electroluminescent element side, crosstalk can be reduced,
Moreover, the manufacturing process can be significantly reduced.
【００２１】（実施形態４）図６（Ａ）および（Ｂ）は
本発明の実施形態４を示す工程断面図である。本実施形
態は、絶縁層１５の膜厚を厚くして、絶縁層１５上に形
成する配線とアノード電極との間に生じる容量の低減を
図っている。なお、本実施形態では、絶縁層１５の膜厚
が厚いため、図６（Ａ）に示すように、カソード電極１
４上に形成する接続用開口部１５Ａのアスペクト比が高
くなるため、例えば選択タングステン−ＣＶＤ法にて接
続用開口部１５Ａの埋め込みを行う。図６（Ｂ）におけ
る符号１８は接続用開口部１５Ａ内に選択的に埋め込ま
れたタングステンプラグを示している。本実施形態にお
いては、選択タングステン−ＣＶＤ法を用いることによ
り、開口径寸法が小さく、しかもアスペクト比の高い接
続用開口部１５Ａの埋め込みが可能となる。このため、
本実施形態は、画素電極としてのカソード電極１４が微
細で画素密度の高い有機電界発光素子の製造に適したも
のといえる。(Embodiment 4) FIGS. 6A and 6B are process sectional views showing Embodiment 4 of the present invention. In the present embodiment, the thickness of the insulating layer 15 is increased to reduce the capacitance generated between the wiring formed on the insulating layer 15 and the anode electrode. In this embodiment, since the insulating layer 15 has a large film thickness, as shown in FIG.
Since the aspect ratio of the connection opening 15A formed on the wiring 4 is high, the connection opening 15A is embedded by, for example, the selective tungsten-CVD method. Reference numeral 18 in FIG. 6B indicates a tungsten plug selectively embedded in the connection opening 15A. In the present embodiment, by using the selective tungsten-CVD method, it becomes possible to embed the connection opening 15A having a small opening diameter dimension and a high aspect ratio. For this reason,
It can be said that the present embodiment is suitable for manufacturing an organic electroluminescence device having a fine cathode electrode 14 as a pixel electrode and a high pixel density.
【００２２】（実施形態５）図７は、本発明の有機電界
発光素子の実施形態５を示す要部断面図である。本実施
形態においては、同図に示すように、カソード電極１４
の数に応じた数の配線を、別途、例えばガラスエポキ
シ、ポリイミド、その他のプラスチック材料、またはセ
ラミックス材料などでなる、絶縁基板１９側に備えた構
成となっている。また、配線は、カソード電極１４に当
接するための突起状の端部２１を有している。図７は、
配線２０Ａ、２０Ｂが設けられた部分を示している。配
線は、例えば、絶縁基板１９に対して印刷、接着、蒸着
などの方法を用いて設けられている。また、配線は、絶
縁基板１９の上表面および下表面に形成され、相隣接す
るカソード電極１４に接続される配線どうしは、例えば
配線２０Ａが上表面、配線２０Ｂが下表面というように
表裏面に分割されて形成されている。このため、絶縁基
板１９の一方の表面に形成される配線の密度は低くな
り、クロストークを防止することが可能となる。また、
本実施形態によれば、絶縁基板１９側に対して有機電界
発光素子１０を容易に交換することが可能となる。な
お、配線２０Ａの端部は、絶縁基板１９に形成されたス
ルーホールを介して絶縁基板１９の下表面側に突出する
ようになっている。(Embodiment 5) FIG. 7 is a cross-sectional view of the essential parts showing Embodiment 5 of the organic electroluminescent element of the present invention. In this embodiment, as shown in FIG.
The number of wirings according to the number is separately provided on the side of the insulating substrate 19 made of, for example, glass epoxy, polyimide, other plastic material, or ceramic material. Further, the wiring has a projecting end portion 21 for coming into contact with the cathode electrode 14. FIG.
The portion where the wirings 20A and 20B are provided is shown. The wiring is provided on the insulating substrate 19 by using a method such as printing, adhesion, vapor deposition, or the like. Wirings are formed on the upper surface and the lower surface of the insulating substrate 19, and the wirings connected to the adjacent cathode electrodes 14 are on the front and back surfaces, for example, the wiring 20A is the upper surface and the wiring 20B is the lower surface. It is formed by being divided. Therefore, the density of the wiring formed on one surface of the insulating substrate 19 becomes low, and it becomes possible to prevent crosstalk. Also,
According to the present embodiment, the organic electroluminescent element 10 can be easily replaced with respect to the insulating substrate 19 side. The ends of the wiring 20A are configured to project to the lower surface side of the insulating substrate 19 through the through holes formed in the insulating substrate 19.
【００２３】（実施形態６）図８（Ａ）は本発明の実施
形態６の有機電界発光素子を示す平面図であり、図８
（Ｂ）は同図（Ａ）のＹ−Ｙ線に沿った断面図である。
この有機電界発光素子では、ガラス等からなる透明基板
３１上の一端部から列方向（図面左右方向）に延びて複
数配列されたＩＴＯからなるアノード電極３２Ａと、透
明基板３１上の他端部から行方向（図面上下方向）に延
び、先端部がアノード電極３２Ａに達しないように配列
された複数の入力端子３２Ｂとが同一部材により一括し
てパターン形成されている。透明基板３１上の一端部近
傍のアノード電極３２Ａ及び入力端子３２Ｂを除いた透
明基板３１上には電界に応じて発光を生じる有機発光層
３３が形成され、アノード電極３２Ａと、入力端子３２
Ｂの行方向延長上との重なる有機発光層３３上にＭｇＡ
ｇ等の反射性導電体からなるカソード電極３４がマトリ
クス状に形成されている。有機発光層３３上には絶縁膜
３５が形成され、絶縁膜３５はカソード電極３４上に接
続用開口部３５Ａを設けている。複数の配線３６は行方
向に延びており、一端が入力端子３２Ｂの先端上に接続
され、行方向の接続用開口部３５Ａを埋設し複数のカソ
ード電極３４と接続されている。本実施形態によれば、
単純マトリクス型の有機電界発光素子において絶縁膜３
５を設けたことによりクロストロークを抑制するので、
遮光膜がなくても良好な表示を実現できる。(Embodiment 6) FIG. 8A is a plan view showing an organic electroluminescent device according to Embodiment 6 of the present invention.
(B) is a cross-sectional view taken along the line YY of (A) of FIG.
In this organic electroluminescent device, from the one end on the transparent substrate 31 made of glass or the like, the anode electrodes 32A made of ITO are arranged in a plurality of rows extending in the column direction (horizontal direction in the drawing), and from the other end on the transparent substrate 31. A plurality of input terminals 32B, which extend in the row direction (vertical direction in the drawing) and are arranged so that their tip portions do not reach the anode electrode 32A, are collectively formed by the same member in a pattern. An organic light emitting layer 33 that emits light in response to an electric field is formed on the transparent substrate 31 except the anode electrode 32A and the input terminal 32B near one end of the transparent substrate 31, and the anode electrode 32A and the input terminal 32 are formed.
MgA is formed on the organic light emitting layer 33 that overlaps with the extension of B in the row direction.
Cathode electrodes 34 made of a reflective conductor such as g are formed in a matrix. An insulating film 35 is formed on the organic light emitting layer 33, and the insulating film 35 has a connection opening 35A on the cathode electrode 34. The plurality of wirings 36 extend in the row direction, one end thereof is connected to the tip of the input terminal 32B, and the connection opening 35A in the row direction is embedded and connected to the plurality of cathode electrodes 34. According to the present embodiment,
Insulating film 3 in a simple matrix organic electroluminescence device
Since the black stroke is suppressed by providing 5,
Good display can be realized without a light shielding film.
【００２４】以上、実施形態１〜６について説明した
が、この発明はこれらに限定されるものではなく構成の
要旨に付随する各種の設計変更が可能である。例えば、
上記各実施形態においては、透明基板上にアノード電極
を形成し、有機発光層を介してカソード電極を形成する
構成としたが、カソード電極を透明基板のすぐ上に形成
してもよい。Although the first to sixth embodiments have been described above, the present invention is not limited to these, and various design changes associated with the gist of the configuration can be made. For example,
In each of the above embodiments, the anode electrode is formed on the transparent substrate and the cathode electrode is formed via the organic light emitting layer. However, the cathode electrode may be formed directly on the transparent substrate.
【００２５】また、上記各実施形態では、カソード電極
１４は、ＭｇＡｇであったがＭｇＩｎでもよくまた、光
反射性をもつ材料で構成したが、カソード電極１４が透
明性をもち、アノード電極１２Ａが光反射性をもつ構成
としても勿論よい。また、上記した有機発光層１３の構
成は、アノード電極１２Ａやカソード電極１４などの材
質に応じて適宜変更が可能である。さらに、上記各実施
形態では、透明基板１１がガラスでなる構成としたが、
樹脂材料や、可撓性を有するフィルム材を用いても勿論
よい。また、上記実施形態では、カソード電極と配線と
を別々に設けたが、絶縁膜に適宜開口部を形成してＭｇ
Ａｇを堆積し、一括して形成してもよい。In each of the above embodiments, the cathode electrode 14 is made of MgAg, but may be made of MgIn. Alternatively, the cathode electrode 14 is made of a material having light reflectivity. However, the cathode electrode 14 has transparency and the anode electrode 12A is Of course, it may be configured to have light reflectivity. The configuration of the organic light emitting layer 13 described above can be appropriately changed according to the material of the anode electrode 12A, the cathode electrode 14, and the like. Further, in each of the above embodiments, the transparent substrate 11 is made of glass,
Of course, a resin material or a flexible film material may be used. Further, in the above-described embodiment, the cathode electrode and the wiring are separately provided, but an opening is appropriately formed in the insulating film to form Mg.
Alternatively, Ag may be deposited and formed collectively.
【００２６】さらに、上記した絶縁層１５は、無機系材
料の他に有機系材料を用いてもよく、有機系材料に部分
的に着色を施してブラックマスクと同様の着色パターン
を形成してもよい。また、画素に対応する位置にカラー
フィルタを備える構成としても勿論よい。また、カソー
ド電極１４に薄膜トランジスタ等のスイッチング素子を
接続しアクティブマトリクス型の表示素子としてもよ
い。Further, the insulating layer 15 may be made of an organic material in addition to the inorganic material, and the organic material may be partially colored to form a colored pattern similar to that of a black mask. Good. Further, it is of course possible to provide a color filter at a position corresponding to the pixel. Further, a switching element such as a thin film transistor may be connected to the cathode electrode 14 to form an active matrix type display element.
【００２７】[0027]
【発明の効果】以上の説明から明らかなように、この発
明によれば、発光表示に際して不要な発光を防止できる
という効果がある。また、各配線間の間隔を確保するこ
とが可能となるため、クロストークを防止するという効
果を奏する。さらに、この発明によれば、配線の引き回
し領域を省略できるため、画素の開口率を大きくできる
という効果がある。またさらに、この発明によれば、例
えば動画表示において変更のあったドットのみの表示状
態を変えるなどの駆動も可能になるという効果がある。
また、本発明によれば、駆動回路部を別の基板に形成す
ることもできるため、透明基板上の構造を簡略化できる
という効果がある。As is apparent from the above description, according to the present invention, it is possible to prevent unnecessary light emission during light emission display. In addition, since it is possible to secure a space between each wiring, it is possible to prevent crosstalk. Further, according to the present invention, since the wiring leading region can be omitted, there is an effect that the aperture ratio of the pixel can be increased. Further, according to the present invention, there is an effect that driving such as changing the display state of only the changed dots in the moving image display can be performed.
Further, according to the present invention, since the drive circuit section can be formed on another substrate, there is an effect that the structure on the transparent substrate can be simplified.
【図１】（Ａ）はこの発明の有機電界発光素子の実施形
態１の平面図、（Ｂ）は（Ａ）のＸ−Ｘ断面図。FIG. 1A is a plan view of Embodiment 1 of an organic electroluminescent element of the present invention, and FIG. 1B is a sectional view taken along line XX of FIG.
【図２】（Ａ）〜（Ｄ）は実施形態１の製造方法を示す
工程断面図。2A to 2D are process cross-sectional views showing the manufacturing method of the first embodiment.
【図３】（Ａ）〜（Ｄ）は実施形態１の製造方法を示す
工程断面図。3A to 3D are process cross-sectional views showing the manufacturing method of the first embodiment.
【図４】この発明の有機電界発光素子の実施形態２を示
す要部断面図。FIG. 4 is a sectional view of an essential part showing a second embodiment of the organic electroluminescent element of the present invention.
【図５】この発明の有機電界発光素子の実施形態３を示
す要部断面図。FIG. 5 is a sectional view of an essential part showing a third embodiment of the organic electroluminescent element of the present invention.
【図６】（Ａ）および（Ｂ）はこの発明の有機電界発光
素子の実施形態４を示す工程断面図。6A and 6B are process sectional views showing Embodiment 4 of the organic electroluminescent element of the present invention.
【図７】この発明の有機電界発光素子の実施形態５を示
す要部断面図。FIG. 7 is a cross-sectional view of essential parts showing Embodiment 5 of the organic electroluminescent element of the present invention.
【図８】（Ａ）はこの発明の有機電界発光素子の実施形
態６の平面図、（Ｂ）は（Ａ）のＹ−Ｙ断面図。8A is a plan view of Embodiment 6 of the organic electroluminescent element of the present invention, and FIG. 8B is a sectional view taken along line YY of FIG.
【図９】（Ａ）は従来の有機電界発光素子の平面図、
（Ｂ）は（Ａ）のＡ−Ａ断面図。FIG. 9A is a plan view of a conventional organic electroluminescent device,
(B) is an AA sectional view of (A).
１０ 有機電界発光素子 １１ 透明基板 １２Ａ アノード電極 １３ 有機発光層 １４ カソード電極 １５ 絶縁層 １５Ａ 接続用開口部 １６ 配線 10 Organic Electroluminescent Element 11 Transparent Substrate 12A Anode Electrode 13 Organic Light Emitting Layer 14 Cathode Electrode 15 Insulating Layer 15A Connection Opening 16 Wiring
Claims (6)
間に有機発光層が介在された有機電界発光素子におい
て、 前記第２の電極は、その対向外側に当該第２の電極上方
に開口された接続用開口部を有する絶縁層の当該接続用
開口部を介して入力端子と接続されることを特徴とする
有機電界発光素子。1. An organic electroluminescent device having an organic light-emitting layer interposed between a first electrode and a second electrode facing each other, wherein the second electrode has the second electrode on the opposite outer side thereof. An organic electroluminescent element, characterized in that it is connected to an input terminal through the connection opening of an insulating layer having a connection opening opened upward.
なり、前記第１の電極及び入力端子は前記第２の電極よ
り剛性度が高く、光透過性を有する部材でなり、前記第
１の電極及び入力端子は、それぞれ基板上に設けられ、
前記第２の電極は、配線を介して前記入力端子と接続さ
れることを特徴とする請求項１記載の有機電界発光素
子。2. The second electrode is made of a member having reflectivity, and the first electrode and the input terminal are made of a member having higher rigidity than the second electrode and having light transmittance. The electrode and the input terminal of 1 are provided on the substrate,
The organic electroluminescent device according to claim 1, wherein the second electrode is connected to the input terminal via a wiring.
り、前記第１の電極はこれら画素電極に対向する一枚の
共通電極であることを特徴とする請求項１または請求項
２記載の有機電界発光素子。3. The method according to claim 1, wherein the second electrode is composed of a plurality of pixel electrodes, and the first electrode is one common electrode facing the pixel electrodes. Organic electroluminescent device.
なり、それぞれの絶縁膜上に、前記画素電極に接続され
た配線群が分割されて介在されていることを特徴とする
請求項１〜請求項３のいずれかに記載の有機電界発光素
子。4. The insulating layer is formed by stacking a plurality of insulating films, and a wiring group connected to the pixel electrode is divided and interposed on each insulating film. The organic electroluminescent element according to any one of claims 1 to 3.
形成されることを特徴とする請求項１〜請求項４のいず
れかに記載の有機電界発光素子。5. The organic electroluminescence device according to claim 1, wherein the wiring is integrally formed with the second electrode.
り、前記第１の電極はＩＴＯでなることを特徴とする請
求項１〜請求項５のいずれかに記載の有機電界発光素
子。6. The organic electroluminescence device according to claim 1, wherein the second electrode and the wiring are made of MgAg, and the first electrode is made of ITO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7260996A JPH0982476A (en) | 1995-09-14 | 1995-09-14 | Organic electroluminescent device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7260996A JPH0982476A (en) | 1995-09-14 | 1995-09-14 | Organic electroluminescent device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0982476A true JPH0982476A (en) | 1997-03-28 |
Family
ID=17355621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7260996A Pending JPH0982476A (en) | 1995-09-14 | 1995-09-14 | Organic electroluminescent device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0982476A (en) |
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