JPH0952707A - Production of thin film - Google Patents
Production of thin filmInfo
- Publication number
- JPH0952707A JPH0952707A JP7202299A JP20229995A JPH0952707A JP H0952707 A JPH0952707 A JP H0952707A JP 7202299 A JP7202299 A JP 7202299A JP 20229995 A JP20229995 A JP 20229995A JP H0952707 A JPH0952707 A JP H0952707A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- carbon
- diamond
- lubricant
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 54
- 239000010408 film Substances 0.000 claims abstract description 20
- 125000000524 functional group Chemical group 0.000 claims abstract description 9
- 239000000314 lubricant Substances 0.000 claims description 31
- 150000001875 compounds Chemical class 0.000 claims description 18
- 230000001050 lubricating effect Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 17
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 22
- 239000010702 perfluoropolyether Substances 0.000 description 14
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
- 239000011241 protective layer Substances 0.000 description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 6
- 239000011737 fluorine Substances 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 3
- 238000001237 Raman spectrum Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000012442 inert solvent Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、炭素膜上に所望の
化合物の層を形成する方法であり、より詳しくは、不飽
和結合を含む炭素膜上にこれと反応可能な官能基を有す
る化合物の結合させることにより薄膜を形成する方法に
関する。TECHNICAL FIELD The present invention relates to a method for forming a layer of a desired compound on a carbon film, and more specifically, a compound having a functional group capable of reacting with the carbon film containing an unsaturated bond. And a method for forming a thin film by bonding the above.
【０００２】[0002]
【従来の技術】基材上に薄膜を形成する技術は古くから
多種多様な方法が知られているが、電子工業、精密機械
工業、情報産業等における高度な薄膜作成法として、今
日ではいわゆる真空薄膜作成法が主流を占めている。こ
の方法は、真空中で目的とする薄膜の原料化合物の粒子
を生成させて基材上に付着させることにより薄膜を形成
するものであり、蒸着法、スパッタ法、CVD 法、イオン
プレーティング法等及びこれらの改良法が多数知られて
いる。2. Description of the Related Art Various techniques have been known for a long time for forming a thin film on a substrate, but as a sophisticated thin film forming method in the electronics industry, precision machinery industry, information industry, etc., so-called vacuum is now used. The thin film forming method is the mainstream. In this method, particles of the raw material compound of the target thin film are generated in vacuum and deposited on a substrate to form a thin film.Vacuum deposition, sputtering, CVD, ion plating, etc. And many of these improved methods are known.
【０００３】真空薄膜作成法は幅広い分野で用いられて
おり、例えば磁気記録媒体の分野では、支持体上に真空
中で金属を蒸着等により付着させてなる、いわゆる金属
薄膜型の磁気記録媒体の保護層としてダイヤモンドライ
クカーボンからなる薄膜を形成する手法が注目されてい
る。ダイヤモンドライクカーボン薄膜は非晶質炭素膜で
あり、グラファイト結合とダイヤモンド結合が混在する
構造と考えられている。そして、ダイヤモンドライクカ
ーボン層を形成した後、該層上に適当な潤滑剤を塗布し
て潤滑層を形成することが行なわれ、今日では潤滑剤と
して特にフッ素系潤滑剤が汎用されている。The vacuum thin film forming method is used in a wide variety of fields. For example, in the field of magnetic recording media, a so-called metal thin film type magnetic recording medium in which a metal is deposited on a support by vacuum deposition or the like. A method of forming a thin film made of diamond-like carbon as a protective layer has been attracting attention. The diamond-like carbon thin film is an amorphous carbon film, and is considered to have a structure in which graphite bonds and diamond bonds are mixed. Then, after forming the diamond-like carbon layer, an appropriate lubricant is applied on the layer to form a lubricating layer, and a fluorine-based lubricant is widely used as the lubricant today.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、従来で
は耐久性を向上させるために、よりダイヤモンドに近い
ダイヤモンドライクカーボンを製造するための検討がさ
れており、そのようなダイヤモンドライクカーボン薄膜
の結合様式は炭素−炭素単結合が殆どを占めている。一
方、フッ素系潤滑剤をダイヤモンドライクカーボン保護
層上に塗布する場合、塗布技術の面から充分に均一な塗
布は困難であり、潤滑層が不均一に塗布されているとよ
り摩擦係数が大きくなるとうい問題がある。また、潤滑
層は物理的に保護層上に塗布されているだけで、化学的
な結合は非常に弱いため、使用を繰り返すうちに潤滑剤
が離脱していって離脱した潤滑剤がヘッドに目詰まり
し、出力を低下させたり或いはジッタを発生させたりす
るという問題があった。このように、薄膜上に更に所望
の化合物の層を形成する場合に、単に塗布しただけでは
均一な塗布が難しく、しかも形成された層が充分に強固
なものとならないことが多く、この点を更に改良するこ
とが望まれる。However, conventionally, in order to improve durability, studies have been conducted to produce diamond-like carbon that is closer to diamond, and the bonding mode of such a diamond-like carbon thin film is Most of them are carbon-carbon single bonds. On the other hand, when a fluorine-based lubricant is applied to the diamond-like carbon protective layer, it is difficult to apply it sufficiently evenly from the viewpoint of application technology, and if the lubricating layer is applied unevenly, the friction coefficient becomes larger. I have a problem. In addition, the lubricant layer is only physically applied on the protective layer, and the chemical bond is very weak.Therefore, the lubricant is released during repeated use, and the released lubricant is visible on the head. There is a problem that it is clogged, the output is lowered, or jitter is generated. As described above, when further forming a layer of a desired compound on a thin film, uniform coating is difficult to perform simply and moreover, the formed layer is not sufficiently strong in many cases. Further improvements are desired.
【０００５】[0005]
【課題を解決するための手段】本発明者らは上記の現状
に鑑み鋭意研究した結果、不飽和結合を有する炭素膜と
該不飽和結合と反応可能な官能基を有する化合物とを紫
外光により反応させて両者を化学的に結合させることに
より、強固で均一な薄膜が形成できることを見出し、本
発明を完成するに至った。Means for Solving the Problems As a result of intensive studies conducted by the present inventors in view of the above-mentioned situation, the carbon film having an unsaturated bond and a compound having a functional group capable of reacting with the unsaturated bond were exposed to ultraviolet light. The inventors have found that a strong and uniform thin film can be formed by reacting them to chemically bond them, and completed the present invention.
【０００６】すなわち本発明は、不飽和結合を有する炭
素膜に、前記不飽和結合と反応可能な官能基を有する化
合物を塗布した後、該塗布面に紫外光を照射することに
より、前記化合物を前記炭素膜に結合させて薄膜を形成
することを特徴とする薄膜の製造方法を提供するもので
ある。That is, according to the present invention, a carbon film having an unsaturated bond is coated with a compound having a functional group capable of reacting with the unsaturated bond, and then the coated surface is irradiated with ultraviolet light to remove the compound. A method for manufacturing a thin film, which comprises forming a thin film by bonding to the carbon film.
【０００７】本発明に用いられる不飽和結合を有する炭
素膜は、不飽和結合を有するダイヤモンドライクカーボ
ンからなるものが好ましい。不飽和結合の割合は、sp3
結合とsp2 結合の比率がsp3/sp2 ＜９であることが望ま
しい。不飽和結合の数が少ないと官能基を有する化合物
との反応が不充分となる。なお、本発明において炭素膜
は通常、何らかの基材（支持体）上に形成されるが、そ
の種類は限定されない。The carbon film having an unsaturated bond used in the present invention is preferably made of diamond-like carbon having an unsaturated bond. The proportion of unsaturated bonds is sp 3
It is desirable that the ratio of bonds to sp 2 bonds is sp 3 / sp 2 <9. When the number of unsaturated bonds is small, the reaction with the compound having a functional group becomes insufficient. In the present invention, the carbon film is usually formed on some kind of base material (support), but its type is not limited.
【０００８】かかる不飽和結合を有する炭素膜は、例え
ば ECRプラズマCVD 法における炭素源として、不飽和結
合、芳香環を多く含む化合物を用いることにより製造で
き、特に炭素源としてはベンゼンが好適である。The carbon film having such an unsaturated bond can be produced, for example, by using a compound containing many unsaturated bonds and aromatic rings as a carbon source in the ECR plasma CVD method, and benzene is particularly preferable as the carbon source. .
【０００９】本発明は、前記のような不飽和結合を有す
る炭素膜上に所望の化合物を結合させて薄膜を形成する
方法であり、炭素膜の不飽和結合と結合し得る官能基を
有する化合物を用いる必要があるが、官能基の種類とし
ては不飽和結合と結合し得るものであれば何れでもよ
い。The present invention is a method for forming a thin film by bonding a desired compound on a carbon film having an unsaturated bond as described above, and a compound having a functional group capable of bonding with the unsaturated bond of the carbon film. However, any functional group may be used as long as it can bond with an unsaturated bond.
【００１０】[0010]
【発明の実施の形態】本発明の方法は特に、磁性層上に
形成されたダイヤモンドライクカーボン薄膜からなる保
護層上に潤滑層を形成するのに好適である。すなわち、
支持体上に形成された磁性層上に、不飽和結合を有する
ダイヤモンドライクカーボン薄膜を形成し、ついで該ダ
イヤモンドライクカーボン薄膜上にフッ化アルキル基を
有する化合物からなる潤滑剤を塗布し、該塗布面に紫外
光を照射することにより前記ダイヤモンドライクカーボ
ン薄膜と前記潤滑剤を結合させて前記ダイヤモンドライ
クカーボン薄膜上に潤滑層を形成する工程を含むことを
特徴とする磁気記録媒体の製造方法を提供することがで
きる。BEST MODE FOR CARRYING OUT THE INVENTION The method of the present invention is particularly suitable for forming a lubricating layer on a protective layer formed of a diamond-like carbon thin film formed on a magnetic layer. That is,
On the magnetic layer formed on the support, a diamond-like carbon thin film having an unsaturated bond is formed, and then a lubricant comprising a compound having a fluorinated alkyl group is applied onto the diamond-like carbon thin film, and the application A method of manufacturing a magnetic recording medium, comprising the step of forming a lubricating layer on the diamond-like carbon thin film by irradiating the surface with ultraviolet light to combine the diamond-like carbon thin film and the lubricant. can do.
【００１１】ここで用いられる潤滑剤としては、特にフ
ッ化アルキル基を有する化合物からなるものが好まし
く、特にパーフルオロポリエーテルからなる潤滑剤が好
ましい。パーフルオロポリエーテル系潤滑剤としては、
分子量2000〜5000のものが好適であり、例えば「FOMBLI
N Z DIAC」〔カルボキシル基変性、モンテカチーニ
(株) 製〕、「FOMBLIN Z DOL 」〔アルコール変性、モ
ンテカチーニ (株) 製〕の商品名で市販されているもの
が使用できる。これらの潤滑剤は、フッ素系不活性溶媒
（例えば住友スリーエム (株) 製「フロリナート」等の
パーフルオロカーボン、モンテカチーニ (株) 製「ガル
デン」等のパーフルオロポリエーテル）、アルコール系
溶媒等の適当な溶媒に溶解させた 0.001〜10重量％程度
の溶液として塗布するのがよい。また、潤滑剤はそのま
ま或いは適当な溶剤で希釈した後、超音波発振装置を備
えた超音波噴霧器により噴霧する方法により保護層上に
塗布することもできる。この方法はより潤滑剤の塗布を
均一にできる。As the lubricant used here, one made of a compound having a fluorinated alkyl group is particularly preferable, and a lubricant made of perfluoropolyether is particularly preferable. As a perfluoropolyether lubricant,
Those having a molecular weight of 2000 to 5000 are suitable, and for example, "FOMBLI
NZ DIAC "[carboxyl group modified, Montecatini
Commercially available under the trade name of "FOMBLIN Z DOL" (alcohol-modified, Montecatini Co.). These lubricants may be used with suitable fluorine-based inert solvents (eg, perfluorocarbons such as “Fluorinert” manufactured by Sumitomo 3M Ltd., perfluoropolyethers such as “Galden” manufactured by Montecatini Co., Ltd.), and alcohol solvents. It is recommended to apply it as a solution of about 0.001 to 10% by weight dissolved in a solvent. Further, the lubricant can be applied on the protective layer as it is or after being diluted with an appropriate solvent, by spraying with an ultrasonic atomizer equipped with an ultrasonic oscillator. This method allows more uniform application of the lubricant.
【００１２】磁気記録媒体の磁性層上に形成されたダイ
ヤモンドライクカーボン薄膜とパーフルオロポリエーテ
ル系潤滑剤との反応について説明する。まず適当な支持
体上に磁性層を形成し、その上に不飽和結合を有するダ
イヤモンドライクカーボン薄膜を形成する。このような
ダイヤモンドライクカーボン薄膜は、 ECRプラズマCVD
法において、ベンゼンを炭素源として用いることにより
容易に得ることができる。ダイヤモンドライクカーボン
薄膜中の不飽和結合の割合は、sp3 結合とsp2結合の比
率でsp3/sp2 ＜９、特に0.25＜sp3/sp2＜4.5であること
が望ましい。ダイヤモンドライクカーボン薄膜の厚さは
限定されないが、50〜300 Åが好適である。The reaction between the diamond-like carbon thin film formed on the magnetic layer of the magnetic recording medium and the perfluoropolyether lubricant will be described. First, a magnetic layer is formed on an appropriate support, and a diamond-like carbon thin film having an unsaturated bond is formed thereon. Such a diamond-like carbon thin film is produced by ECR plasma CVD.
In the method, it can be easily obtained by using benzene as a carbon source. The ratio of unsaturated bonds in the diamond-like carbon thin film is preferably sp 3 / sp 2 <9, particularly 0.25 <sp 3 / sp 2 <4.5 in terms of the ratio of sp 3 bonds to sp 2 bonds. The thickness of the diamond-like carbon thin film is not limited, but is preferably 50 to 300 Å.
【００１３】ついで、かかるダイヤモンドライクカーボ
ン薄膜上に前記のような方法でパーフルオロポリエーテ
ル系潤滑剤を塗布する。その後、紫外光を塗布面に照射
する。紫外光としては近紫外光（波長 400〜300 nm）、
遠紫外光（波長 300〜200nm）、真空紫外光（波長 200
〜１nm）の何れを照射してもよいが、波長が400 nm以下
の紫外光を全て照射するのがよい。紫外光の照射時間は
ダイヤモンドライクカーボン薄膜や潤滑剤の種類により
異なる。紫外光による反応の進行はラマンスペクトルに
より確認され、潤滑剤とダイヤモンドライクカーボンと
が結合していることはラマンスペクトルのベースライン
（蛍光線）の傾きが小さくなることにより確認できる。
かかる反応は真空チャンバ内で実施することが望まし
い。それにより磁性層の形成、ダイヤモンドライクカー
ボン保護層の形成、フッ素系潤滑剤の噴霧、そして保護
層と潤滑剤の紫外光の照射による潤滑層の形成の各工程
を連続的に真空中で行なうことができる。Then, the perfluoropolyether type lubricant is applied on the diamond-like carbon thin film by the above-mentioned method. Then, the coated surface is irradiated with ultraviolet light. As ultraviolet light, near-ultraviolet light (wavelength 400-300 nm),
Far ultraviolet light (wavelength 300 to 200 nm), vacuum ultraviolet light (wavelength 200
˜1 nm), but it is preferable to irradiate all ultraviolet light having a wavelength of 400 nm or less. The irradiation time of ultraviolet light differs depending on the type of diamond-like carbon thin film and the lubricant. The progress of the reaction due to ultraviolet light can be confirmed by Raman spectrum, and the fact that the lubricant and diamond-like carbon are bound can be confirmed by the decrease of the slope of the Raman spectrum baseline (fluorescence line).
It is desirable to carry out such a reaction in a vacuum chamber. Therefore, each step of forming a magnetic layer, forming a diamond-like carbon protective layer, spraying a fluorine-based lubricant, and forming a lubricating layer by irradiating the protective layer and the lubricant with ultraviolet light is continuously performed in a vacuum. You can
【００１４】[0014]
【実施例】以下に本発明の実施例を説明する。しかしな
がら、本発明はこれらの実施例に限定されるものではな
い。Embodiments of the present invention will be described below. However, the invention is not limited to these examples.
【００１５】実施例１ 磁性層（コバルト製、厚さ2000Å）が形成されたPET フ
ィルム（厚さ６μｍ）の磁性層上に、 ECRマイクロ波プ
ラズマCVD 法により不飽和結合を有するダイヤモンドラ
イクカーボンからなる保護層（厚さ100 Å）を形成し
た。ここでは原料としてベンゼンをガス化したものを用
いた。このダイヤモンドライクカーボン薄膜上に潤滑剤
であるパーフルオロポリエーテル(FOMBLINZ DIAC、モン
テカチーニ (株) 製) をフッ素系不活性溶媒（フロリナ
ートFC-77 、住友スリーエム (株) 製）で0.05重量％濃
度となるように希釈した溶液を塗布しながら400 nm以下
の紫外光を塗布面に照射した。なお、フィルムの走行速
度は３ｍ／分であり、この速度で紫外光により潤滑剤と
ダイヤモンドライクカーボンとの結合は充分に進行す
る。その後フロリナートFC-77 にて洗浄を行なった。Example 1 On a magnetic layer of a PET film (thickness: 6 μm) having a magnetic layer (cobalt, thickness: 2000 Å) formed of diamond-like carbon having an unsaturated bond by ECR microwave plasma CVD method. A protective layer (thickness 100Å) was formed. Here, gasified benzene was used as the raw material. Perfluoropolyether (FOMBLINZ DIAC, manufactured by Montecatini Co., Ltd.), which is a lubricant, was applied on this diamond-like carbon thin film in a concentration of 0.05% by weight with a fluorine-based inert solvent (Fluorinert FC-77, manufactured by Sumitomo 3M Co., Ltd.). The coating surface was irradiated with ultraviolet light having a wavelength of 400 nm or less while coating the diluted solution. The running speed of the film is 3 m / min, and the bonding between the lubricant and the diamond-like carbon is sufficiently advanced by the ultraviolet light at this speed. Then, it was washed with Fluorinert FC-77.
【００１６】実施例２ 実施例１において、パーフルオロポリエーテルとして
「FOMBLIN Z DEAL」（モンテカチーニ (株) 製) を用
い、その他は実施例１と同様にしてダイヤモンドライク
カーボン薄膜と潤滑剤とを反応させた。Example 2 In Example 1, “FOMBLIN Z DEAL” (manufactured by Montecatini Co., Ltd.) was used as the perfluoropolyether, and the diamond-like carbon thin film and the lubricant were reacted in the same manner as in Example 1. Let
【００１７】実施例３ 実施例１において、パーフルオロポリエーテルとして
「FOMBLIN Z DOL 」（モンテカチーニ (株) 製) を用
い、その他は実施例１と同様にしてダイヤモンドライク
カーボン薄膜と潤滑剤とを反応させた。Example 3 In Example 1, “FOMBLIN Z DOL” (manufactured by Montecatini Co., Ltd.) was used as the perfluoropolyether, and the diamond-like carbon thin film and the lubricant were reacted in the same manner as in Example 1. Let
【００１８】実施例４ 実施例１において、パーフルオロポリエーテルとして
「FOMBLIN AM 2001 」（モンテカチーニ (株) 製) を用
い、その他は実施例１と同様にしてダイヤモンドライク
カーボン薄膜と潤滑剤とを反応させた。Example 4 In Example 1, “FOMBLIN AM 2001” (manufactured by Montecatini Co., Ltd.) was used as the perfluoropolyether, and the diamond-like carbon thin film and the lubricant were reacted in the same manner as in Example 1. Let
【００１９】実施例５ 実施例１において、パーフルオロポリエーテルとして
「FOMBLIN Z DISOC 」（モンテカチーニ (株) 製) を用
い、その他は実施例１と同様にしてダイヤモンドライク
カーボン薄膜と潤滑剤とを反応させた。Example 5 In Example 1, “FOMBLIN Z DISOC” (manufactured by Montecatini Co.) was used as the perfluoropolyether, and the diamond-like carbon thin film and the lubricant were reacted in the same manner as in Example 1. Let
【００２０】実施例６ 実施例１において、パーフルオロポリエーテルとして
「デムナムSH」（ダイキン (株) 製) を用い、その他は
実施例１と同様にしてダイヤモンドライクカーボン薄膜
と潤滑剤とを反応させた。Example 6 In Example 1, “Demnum SH” (manufactured by Daikin Co., Ltd.) was used as the perfluoropolyether, and the diamond-like carbon thin film and the lubricant were reacted in the same manner as in Example 1. It was
【００２１】実施例７ 実施例１において、パーフルオロポリエーテルとして
「デムナムSP」（ダイキン (株) 製) を用い、その他は
実施例１と同様にしてダイヤモンドライクカーボン薄膜
と潤滑剤とを反応させた。Example 7 In Example 1, "Demnum SP" (manufactured by Daikin Co., Ltd.) was used as the perfluoropolyether, and the diamond-like carbon thin film and the lubricant were reacted in the same manner as in Example 1. It was
【００２２】比較例１ 実施例１において、パーフルオロポリエーテルを塗布し
た後、紫外光を照射せずに洗浄を行なった。Comparative Example 1 In Example 1, after applying the perfluoropolyether, washing was performed without irradiating with ultraviolet light.
【００２３】比較例２ 実施例２において、パーフルオロポリエーテルを塗布し
た後、紫外光を照射せずに洗浄を行なった。Comparative Example 2 In Example 2, after applying the perfluoropolyether, washing was performed without irradiating with ultraviolet light.
【００２４】＜性能評価＞上記実施例１〜７及び比較例
１〜２により得られた、磁性層、ダイヤモンドライクカ
ーボン保護層及びフッ素系潤滑層が形成されたフィルム
を巻き取った後、常法により、カーボンブラックとバイ
ンダー樹脂（塩化ビニル系樹脂とウレタンプレポリマ
ー）とからなる厚さ5000Åのバックコート層をベースフ
ィルムの磁性層と反対の面に形成した。得られたフィル
ムを８mm巾に裁断し、カセットケースにローディングし
８mmカセットテープを得た。この８mmカセットテープ
を、市販８mmVTR を改造した測定システムにセットし、
ジッターメーターによりジッター（ns）を測定し、また
下記の方法で再生出力の経時変化をそれぞれ測定した。
これらの結果を表１に示す。 ＜再生出力の経時変化＞再生出力の経時変化は下記Ａ〜
Ｃの３つのパターンにより測定した。 （Ａ）テスト用映像信号を記録し、巻戻し、再生した時
の出力の経時変化を測定した。 （Ｂ）（Ａ）の後、引き続きテープを巻戻し、ヘッドク
リーニングした後、再生した時の出力の経時変化を測定
した。 （Ｃ）（Ｂ）の後、引き続きテープを巻戻し、ヘッドク
リーニングした後、再生し、途中で一旦再生を停止した
時の出力（Ｃ1 ）の経時変化と、次いで再度ヘッドクリ
ーニングした後、その位置から引き続き残りを再生した
時の出力（Ｃ2 ）の経時変化を測定した。<Performance Evaluation> After winding the films obtained in Examples 1 to 7 and Comparative Examples 1 and 2 on which the magnetic layer, the diamond-like carbon protective layer and the fluorine-based lubricating layer were formed, the conventional method was used. Thus, a backcoat layer of carbon black and a binder resin (vinyl chloride resin and urethane prepolymer) having a thickness of 5000 Å was formed on the surface of the base film opposite to the magnetic layer. The obtained film was cut to a width of 8 mm and loaded in a cassette case to obtain an 8 mm cassette tape. Set this 8mm cassette tape on a measuring system that is a remodeled commercial 8mm VTR,
Jitter (ns) was measured with a jitter meter, and the change with time of the reproduction output was measured by the following method.
Table 1 shows the results. <Change in playback output over time>
The measurement was performed by three patterns of C. (A) A test video signal was recorded, rewound, and the change with time in output when reproduced was measured. After (B) and (A), the tape was continuously rewound, the head was cleaned, and the change with time in the output during reproduction was measured. After (C) and (B), the tape is continuously rewound, head cleaning is performed, reproduction is performed, and the output (C 1 ) changes with time when reproduction is temporarily stopped in the middle and then head cleaning is performed again. The change with time of the output (C 2 ) when the rest was continuously reproduced from the position was measured.
【００２５】[0025]
【表１】 [Table 1]
───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐々木 克己 栃木県芳賀郡市貝町赤羽2606 花王株式会 社研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Katsumi Sasaki 2606 Akabane, Kai-cho, Haga-gun, Tochigi Kao Institute of Stock Research
Claims (5)
和結合と反応可能な官能基を有する化合物を塗布した
後、該塗布面に紫外光を照射することにより、前記化合
物を前記炭素膜に結合させて薄膜を形成することを特徴
とする薄膜の製造方法。1. A carbon film having an unsaturated bond is coated with a compound having a functional group capable of reacting with the unsaturated bond, and then the coated surface is irradiated with ultraviolet light so that the compound is treated with the carbon film. A method for producing a thin film, which comprises forming a thin film by bonding to.
ヤモンドライクカーボンからなる請求項１記載の製造方
法。2. The manufacturing method according to claim 1, wherein the carbon film is made of diamond-like carbon having an unsaturated bond.
する化合物が、フッ化アルキル基を有する化合物である
請求項１又は２記載の薄膜の製造方法。3. The method for producing a thin film according to claim 1, wherein the compound having a functional group capable of reacting with the unsaturated bond is a compound having a fluorinated alkyl group.
求項１〜３の何れか１項記載の薄膜の製造方法。4. The method for producing a thin film according to claim 1, wherein the wavelength of the ultraviolet light is 400 nm or less.
和結合を有するダイヤモンドライクカーボン薄膜を形成
し、ついで該ダイヤモンドライクカーボン薄膜上にフッ
化アルキル基を有する化合物からなる潤滑剤を塗布し、
該塗布面に紫外光を照射することにより前記ダイヤモン
ドライクカーボン薄膜と前記潤滑剤を結合させて前記ダ
イヤモンドライクカーボン薄膜上に潤滑層を形成する工
程を含むことを特徴とする磁気記録媒体の製造方法。5. A diamond-like carbon thin film having an unsaturated bond is formed on a magnetic layer formed on a support, and a lubricant comprising a compound having a fluorinated alkyl group is then formed on the diamond-like carbon thin film. Apply
A method of manufacturing a magnetic recording medium, comprising the step of irradiating the coated surface with ultraviolet light to combine the diamond-like carbon thin film and the lubricant to form a lubricating layer on the diamond-like carbon thin film. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7202299A JPH0952707A (en) | 1995-08-08 | 1995-08-08 | Production of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7202299A JPH0952707A (en) | 1995-08-08 | 1995-08-08 | Production of thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0952707A true JPH0952707A (en) | 1997-02-25 |
Family
ID=16455252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7202299A Pending JPH0952707A (en) | 1995-08-08 | 1995-08-08 | Production of thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0952707A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001001403A1 (en) * | 1999-06-24 | 2001-01-04 | Fujitsu Limited | Production method of magnetic recording medium and magnetic recording medium produced by this method |
| US6753060B1 (en) * | 2001-05-04 | 2004-06-22 | Seagate Technology Llc | Method for improving performance of thin film recording media and media obtained thereby |
| WO2005097673A1 (en) * | 2004-03-30 | 2005-10-20 | Toyo Advanced Technologies Co., Ltd. | Method for treating surface of base, surface-treated base, material for medical use and instrument for medical use |
| JP2006056741A (en) * | 2004-08-19 | 2006-03-02 | Sumitomo Electric Ind Ltd | Method for reforming hydrogenated carbon film and hydrogenated carbon film |
| JP2008230880A (en) * | 2007-03-19 | 2008-10-02 | Toyo Advanced Technologies Co Ltd | Method for modifying diamond-like thin film, superhydrophilic material, medical material, medical appliance and method for producing the same |
| JP2008540771A (en) * | 2005-05-12 | 2008-11-20 | ダウ・コーニング・アイルランド・リミテッド | Try to bond the adhesive to the substrate via a primer |
| JP2009061725A (en) * | 2007-09-07 | 2009-03-26 | Univ Kinki | Modified carbonaceous film and method for producing the same |
| JP2010086598A (en) * | 2008-09-30 | 2010-04-15 | Hoya Corp | Method for manufacturing magnetic disk |
| CN119114994A (en) * | 2024-11-13 | 2024-12-13 | 浙江大学 | A method for precision cutting of pure iron using a diamond coated tool |
-
1995
- 1995-08-08 JP JP7202299A patent/JPH0952707A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001001403A1 (en) * | 1999-06-24 | 2001-01-04 | Fujitsu Limited | Production method of magnetic recording medium and magnetic recording medium produced by this method |
| US6878398B2 (en) | 1999-06-24 | 2005-04-12 | Fujitsu Limited | Method of manufacturing magnetic recording medium and the magnetic recording medium |
| US6890585B2 (en) | 1999-06-24 | 2005-05-10 | Fujitsu Limited | Method of manufacturing magnetic recording medium and the magnetic recording medium |
| US6753060B1 (en) * | 2001-05-04 | 2004-06-22 | Seagate Technology Llc | Method for improving performance of thin film recording media and media obtained thereby |
| JPWO2005097673A1 (en) * | 2004-03-30 | 2008-02-28 | トーヨーエイテック株式会社 | Surface treatment method for substrate, surface-treated substrate, medical material, and medical instrument |
| WO2005097673A1 (en) * | 2004-03-30 | 2005-10-20 | Toyo Advanced Technologies Co., Ltd. | Method for treating surface of base, surface-treated base, material for medical use and instrument for medical use |
| JP2010005428A (en) * | 2004-03-30 | 2010-01-14 | Toyo Advanced Technologies Co Ltd | Medical material, medical instrument, and method of manufacturing the material |
| JP4838709B2 (en) * | 2004-03-30 | 2011-12-14 | トーヨーエイテック株式会社 | Substrate manufacturing method |
| US8221823B2 (en) | 2004-03-30 | 2012-07-17 | Toyo Advanced Technologies Co., Ltd. | Method for fabricating material |
| JP2006056741A (en) * | 2004-08-19 | 2006-03-02 | Sumitomo Electric Ind Ltd | Method for reforming hydrogenated carbon film and hydrogenated carbon film |
| JP2008540771A (en) * | 2005-05-12 | 2008-11-20 | ダウ・コーニング・アイルランド・リミテッド | Try to bond the adhesive to the substrate via a primer |
| JP2008230880A (en) * | 2007-03-19 | 2008-10-02 | Toyo Advanced Technologies Co Ltd | Method for modifying diamond-like thin film, superhydrophilic material, medical material, medical appliance and method for producing the same |
| JP2009061725A (en) * | 2007-09-07 | 2009-03-26 | Univ Kinki | Modified carbonaceous film and method for producing the same |
| JP2010086598A (en) * | 2008-09-30 | 2010-04-15 | Hoya Corp | Method for manufacturing magnetic disk |
| CN119114994A (en) * | 2024-11-13 | 2024-12-13 | 浙江大学 | A method for precision cutting of pure iron using a diamond coated tool |
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