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JPH0943420A - Production of color filter - Google Patents

Production of color filter

Info

Publication number
JPH0943420A
JPH0943420A JP19504295A JP19504295A JPH0943420A JP H0943420 A JPH0943420 A JP H0943420A JP 19504295 A JP19504295 A JP 19504295A JP 19504295 A JP19504295 A JP 19504295A JP H0943420 A JPH0943420 A JP H0943420A
Authority
JP
Japan
Prior art keywords
color
irradiation
rays
development
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19504295A
Other languages
Japanese (ja)
Inventor
Masahiko Itabashi
雅彦 板橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP19504295A priority Critical patent/JPH0943420A/en
Publication of JPH0943420A publication Critical patent/JPH0943420A/en
Pending legal-status Critical Current

Links

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  • Optical Filters (AREA)
  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent deterioration in the display quality or adhesion defects of a color liquid crystal display device by removing a development residue which is produced when a pixel pattern is formed by exposure and development of a color photosensitive film, by irradiation of UV rays. SOLUTION: A color filter is produced by successively forming a light- shielding layer and color pixels on a transparent substrate. In this method, the development residue which is produced when a pixel pattern is formed by exposure and development of a color photosensitive resin film is removed by irradiation of UV rays in the succeeding process after development. Irradiation of UV rays is performed by using a UV-irradiation device which is generally used. Irradiation of UV rays is usually carried out in air, and oxygen may be intentionally introduced into a UV-ozone device to improve the production efficiency of ozone. For example, after dewatering and drying in the developing process, the substrate is irradiated with UV rays for five or more min. in a UV-ozone device equipped with 80-W low pressure mercury lamps arranged at 30-mm distance from each other. Then the film is hardened by heating at 150 deg.C to form a color pattern of one color.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、カラー液晶表示装
置に使用されるカラーフィルタの製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a color filter used in a color liquid crystal display device.

【0002】[0002]

【従来の技術】液晶ティスプレイ(以下LCDと略す)
は、薄型、小型、低消費電力などの特長を生かし、現
在、時計、電卓、TV、パソコン等の表示部に用いられ
ている。更に近年、カラーLCDが開発されOA・AV
機器を中心にナビゲーションシステム、ビュウファイン
ダーなど数多くの用途に使われ始めており、その市場は
今後、急激に拡大するものと予想されている。
2. Description of the Related Art Liquid crystal displays (hereinafter abbreviated as LCDs).
Utilizing features such as thinness, small size, and low power consumption, is currently used for display units such as watches, calculators, TVs, and personal computers. In recent years, color LCDs have been developed and OA / AV
It has begun to be used in many applications such as navigation systems and viewfinders, mainly in equipment, and the market is expected to expand rapidly in the future.

【0003】LCDをカラー表示させるためのカラーフ
ィルタは、図1に示すように格子状パターンのBM(ブ
ラックマトリックス)1が形成されたガラス板等の基板
2上に、R(赤)G(緑)B(青)からなるカラー画素
3(約100×100×2μm)を順次形成し、その上
に透明なオーバーコート層(OC)4形成したものであ
る。5は偏光板、6はITO電極である。
As shown in FIG. 1, a color filter for displaying an LCD in color is R (red) G (green) on a substrate 2 such as a glass plate on which a BM (black matrix) 1 having a lattice pattern is formed. ) B (blue) color pixels 3 (about 100 × 100 × 2 μm) are sequentially formed, and a transparent overcoat layer (OC) 4 is formed thereon. 5 is a polarizing plate and 6 is an ITO electrode.

【0004】カラーLCDは、カラーフィルタ7をLC
D内部に設置し、バックライト光をカラーフィルタに透
過することによって表示画面をカラー化できる。8は配
向膜、9は液晶、10はシ−ル材、11はトップコ−ト
層、12はITO電極、13はガラス板等の基板、14
は偏光板である。
[0004] In the color LCD, the color filter 7 has an LC
D, the display screen can be colored by transmitting backlight light through a color filter. 8 is an alignment film, 9 is a liquid crystal, 10 is a seal material, 11 is a top coat layer, 12 is an ITO electrode, 13 is a substrate such as a glass plate, 14
Is a polarizing plate.

【0005】現在、カラーフィルタは主に染色法を用い
て製造されている。しかし、この方法はガラス基板上に
透明な感光性樹脂を塗布、乾燥、露光、現像によって画
素を形成後、染料を用いて染色しその後、混色防止層を
形成するといった工程を3回繰り返し行う必要があるた
め、工程数が多くコスト高となる。また、着色剤として
染料を用いているため、カラーフィルタの重要課題であ
る信頼性(耐候性・耐熱性)が劣るという欠点がある。
そこで、着色剤として顔料を用いたカラーフィルタがい
くつか提案されており、その中に電着法、印刷法、フォ
トリソ法(フォトリソグラフィー法)がある。
At present, color filters are mainly manufactured using a dyeing method. However, in this method, a step of forming a pixel by applying a transparent photosensitive resin on a glass substrate, drying, exposing, and developing, dyeing with a dye, and then forming a color mixing prevention layer is required to be repeated three times. Therefore, the number of steps is large and the cost is high. Further, since a dye is used as a coloring agent, there is a disadvantage that reliability (weather resistance and heat resistance), which is an important issue of a color filter, is inferior.
Therefore, some color filters using a pigment as a coloring agent have been proposed, among which are an electrodeposition method, a printing method, and a photolithography method (photolithography method).

【0006】しかし、電着法は電極パターンを形成する
必要があるため(1)パターンの自由度が少ない、
(2)コストが高い、また印刷法は(1)大型基板の位
置合わせが難しく解像度が低いため微細化の対応が困
難、(2)パターンの平坦性が劣る、などの問題があ
り、現状ではフォトリソ法が主流と考えられている。フ
ォトリソ法には、液状レジストとフィルムが考えられ
る。液状レジストは、感光性樹脂中に顔料を分散させた
ワニスをスピナーでガラス基板上に塗布、乾燥後、露
光、現像によってカラー画素が形成される。一方、フィ
ルムは、プリント板用感光性フィルムと同様にワニスを
フィルム化したものであり、基板にラミネート後、露
光、現像によってカラー画素が形成される。
However, the electrodeposition method requires the formation of an electrode pattern. (1) The degree of freedom of the pattern is small.
(2) The cost is high, and the printing method has problems such as (1) it is difficult to align a large substrate and the resolution is low, so it is difficult to cope with miniaturization, and (2) the flatness of the pattern is poor. The photolithography method is considered to be the mainstream. For photolithography, liquid resists and films are contemplated. In the liquid resist, color pixels are formed by applying a varnish in which a pigment is dispersed in a photosensitive resin on a glass substrate with a spinner, drying, exposing, and developing. On the other hand, the film is a varnish formed into a film like the photosensitive film for printed boards, and after being laminated on a substrate, color pixels are formed by exposure and development.

【0007】[0007]

【発明が解決しようとする課題】フィルム法を用いたカ
ラー液晶表示装置用カラーフィルタの製造方法におい
て、着色感光性樹脂フィルムを熱ラミネート、露光、現
像してRGB画素を形成する工程でその現像時にパタ−
ン残留部以外の透明基板またはブラックマトリックス上
に現像残さが発生する。この現像残さは後工程で形成さ
れる画素の色むらの原因となり、また画素部分外周のガ
ラス面にはITO電極が形成されるため、これら電極を
ガラスの密着不良の原因となる。本発明は、カラ−液晶
表示装置の表示品質の低下や密着不良の発生しないカラ
ーフィルタの製造法を提供するものである。
In a method of manufacturing a color filter for a color liquid crystal display device using a film method, a colored photosensitive resin film is thermally laminated, exposed and developed to form RGB pixels. Pattern
The development residue is generated on the transparent substrate or the black matrix other than the remaining areas. This development residue causes color unevenness of pixels formed in a later process, and since ITO electrodes are formed on the glass surface around the pixel portion, these electrodes cause poor adhesion of the glass. The present invention provides a method for manufacturing a color filter in which the display quality of a color liquid crystal display device is not deteriorated and adhesion failure does not occur.

【0008】[0008]

【課題を解決するための手段】本願発明は、透明基板上
に遮光層、着色画素を順時形成するカラーフィルタの製
造法において、着色感光性樹脂フィルムを露光・現像す
る画素パタ−ン形成時に発生する現像残さを現像後の工
程において紫外線照射により除去することを特徴とする
カラーフィルタの製造法である。
The present invention relates to a method of manufacturing a color filter in which a light-shielding layer and colored pixels are sequentially formed on a transparent substrate, and when forming a pixel pattern for exposing and developing a colored photosensitive resin film. It is a method for producing a color filter, characterized in that the development residue generated is removed by irradiation with ultraviolet rays in a step after development.

【0009】[0009]

【発明の実施の形態】本発明のでは、紫外線照射は一般
に広く使用される紫外線照射装置により行うこたができ
る。紫外線照射は通常は大気中で行うが、オゾンの発生
効率を高めるためUV−オゾン装置内に積極的に酸素を
導入することもできる。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, ultraviolet irradiation can be carried out by an ultraviolet irradiation device which is generally widely used. The ultraviolet irradiation is usually performed in the atmosphere, but oxygen can be positively introduced into the UV-ozone device in order to increase the ozone generation efficiency.

【0010】[0010]

【実施例】以下本発明を実施例に基づいて説明する。2
−2’−ビス[4−メタクリロキシ、ポリエトキシフェ
ニル]プロパン35重量部、γ−クロロ−β−ヒドロキ
シプロピル−β’−メタクリロイルオキシエチル−o−
フタレート15重量部、メタクリル酸/エチルアクリレ
ート/エチルアクリレート(18/30/53重量比)
共重合樹脂50重量部、1,7ビス(9−アクリジニ
ル)ヘプタン2重量部、ヘキサメトキシメチルメラミ
ン、メチルエチルケトンと、アンスラキノン(赤)、ハ
ロゲン化銅フタロシアニン(緑)、銅フタロシアニン
(青)の各成分を均一にして感光性樹脂層塗工溶液を得
た。該溶液を厚さ6μmのポリエチレンテレフタレート
フィルム上にグラビア塗工機(平野精機社製)で塗工し
保護フィルムとして30μmのポリエチレンフィルムを
貼り合わせて感光性フィルムを得る。着色感光性樹脂層
の厚さは1.5μmであった。次にクロム膜(膜厚0.
1μm)付きガラス基板(1.1mm×200mm×3
00mm、ジオマテック社製)でブラックマトリックス
を形成したガラス基板に、ロールラミネータHLM15
00(日立化成テクノプラント社製)を用いて、基板温
度90℃、ロール温度110℃、ロール圧力6kg/c
m2、速度0.5m/分で、感光性フィルムを着色感光
性樹脂が前記基板に面するようにラミネートし、所定の
ネガマスクを通して、平行光露光機MAP1200L
(大日本スクリーン社製)を用いて100mJ/cm2
露光、次いでポリエチレンテレフタレートフィルムを除
去し、スプレー式現像装置DVW911(大日本スクリ
ーン社製)を用いて、25℃で0.2重量%Na2B2
O5水溶液で20秒間スプレー現像して未露光部を除去
する。現像工程での水切り乾燥後、80W低圧水銀灯を
30mm間隔で配したUV−オゾン装置内(大日本スク
リ−ン社製)で5分以上紫外線の照射を行う。その後、
クリーンオーブンCSO−402(楠本化成製)で15
0℃に加熱、硬化を行って1色の着色パターンを形成す
る。この着色形成工程をR、G、Bの順に各色のフィル
ムを用いて繰り返し行い、RGB画素パターンを形成す
る。これにより、現像残さのないカラ−フィルタを得
た。
EXAMPLES The present invention will be described below based on examples. Two
35 parts by weight of 2'-bis [4-methacryloxy, polyethoxyphenyl] propane, γ-chloro-β-hydroxypropyl-β'-methacryloyloxyethyl-o-
Phthalate 15 parts by weight, methacrylic acid / ethyl acrylate / ethyl acrylate (18/30/53 weight ratio)
Copolymer resin 50 parts by weight, 1,7 bis (9-acridinyl) heptane 2 parts by weight, hexamethoxymethylmelamine, methyl ethyl ketone, anthraquinone (red), halogenated copper phthalocyanine (green), copper phthalocyanine (blue) The components were made uniform to obtain a photosensitive resin layer coating solution. The solution is coated on a polyethylene terephthalate film having a thickness of 6 μm by a gravure coater (manufactured by Hirano Seiki Co., Ltd.) and a 30 μm polyethylene film is laminated as a protective film to obtain a photosensitive film. The colored photosensitive resin layer had a thickness of 1.5 μm. Next, a chrome film (film thickness 0.
1 μm) attached glass substrate (1.1 mm × 200 mm × 3)
Roll laminator HLM15 on a glass substrate on which a black matrix is formed with (00 mm, made by Geomatec).
00 (manufactured by Hitachi Chemical Techno Plant Co., Ltd.), substrate temperature 90 ° C., roll temperature 110 ° C., roll pressure 6 kg / c
A photosensitive film is laminated so that the colored photosensitive resin faces the substrate at m2 and a speed of 0.5 m / min, and a parallel light exposure machine MAP1200L is passed through a predetermined negative mask.
(Manufactured by Dainippon Screen Co., Ltd.) using 100 mJ / cm2
After exposure, the polyethylene terephthalate film was removed, and 0.2 wt% Na2B2 was added at 25 ° C. using a spray type developing device DVW911 (manufactured by Dainippon Screen).
The unexposed portion is removed by spray development with an O5 aqueous solution for 20 seconds. After draining and drying in the developing step, UV irradiation is performed for 5 minutes or more in a UV-ozone device (manufactured by Dainippon Screen Co., Ltd.) in which 80W low-pressure mercury lamps are arranged at intervals of 30 mm. afterwards,
15 in a clean oven CSO-402 (Kusumoto Kasei)
A 1-color colored pattern is formed by heating at 0 ° C. and curing. This coloring formation process is repeated in the order of R, G, and B using films of each color to form an RGB pixel pattern. As a result, a color filter having no development residue was obtained.

【0011】[0011]

【発明の効果】本発明により得られたカラ−フィルタ
は、カラ−液晶表示装置の表示品質の低下や密着不良の
発生がない。
The color filter obtained according to the present invention does not deteriorate the display quality of a color liquid crystal display device or cause defective adhesion.

【図面の簡単な説明】[Brief description of drawings]

【図1】液晶ティスプレイの断面図。FIG. 1 is a sectional view of a liquid crystal display.

【符号の説明】[Explanation of symbols]

1.BM(ブラックマトリックス) 2.ガラス基板 3.カラー画素 4.オーバーコート層(OC) 5.偏光板 6.ITO電極 7.カラーフィルタ 8.配向膜 9.液晶 10.シ−ル材 11.トップコ−ト層 12.ITO電極 13.ガラス基板 14.偏光板 1. 1. BM (black matrix) Glass substrate 3. Color pixels 4. 4. Overcoat layer (OC) Polarizing plate 6. ITO electrode 7. Color filter 8. Alignment film 9. Liquid crystal 10. Seal material 11. Top coat layer 12. ITO electrode 13. Glass substrate 14. Polarizer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 透明基板上に遮光層、着色画素を順時形
成するカラーフィルタの製造法において、着色感光性樹
脂フィルムを露光・現像する画素パタ−ン形成時に発生
する現像残さを現像後の工程において紫外線照射により
除去することを特徴とするカラーフィルタの製造法。
1. A method of manufacturing a color filter in which a light-shielding layer and colored pixels are sequentially formed on a transparent substrate, and a development residue generated during pixel pattern formation in which a colored photosensitive resin film is exposed and developed is developed. A method for producing a color filter, which comprises removing by ultraviolet irradiation in a process.
JP19504295A 1995-07-31 1995-07-31 Production of color filter Pending JPH0943420A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19504295A JPH0943420A (en) 1995-07-31 1995-07-31 Production of color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19504295A JPH0943420A (en) 1995-07-31 1995-07-31 Production of color filter

Publications (1)

Publication Number Publication Date
JPH0943420A true JPH0943420A (en) 1997-02-14

Family

ID=16334584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19504295A Pending JPH0943420A (en) 1995-07-31 1995-07-31 Production of color filter

Country Status (1)

Country Link
JP (1) JPH0943420A (en)

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