JPH09318505A - Fine movement mechanism of sample, and sample holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely enable position alignment work by one time sample setting, and easily enable assay sample setting work in a short time. SOLUTION: Sample pressers 3 attached to springs 2 are installed on the side walls of two adjacent sides in a sample holder. As to two sides wherein the fixed sample pressers 3 are not installed, a member wherein a movable sample presser 4 and a sample position adjusting rod 5 are unified in a body is fixed by a presser 7 of a sample position adjusting rod. Threads are formed on the sample position adjusting rod 5 and the presser 7 of the rod. By rotating an adjusting screw 6 formed on the tip of the adjusting rod 5, the movable sample presser 4 is slid and moved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanism for finely moving a sample for mass spectrometry within a sample holder. For example, a sample alignment mechanism or the like in a silicon wafer holder for the purpose of mass spectrometric analysis of a specific location.

[0002]

2. Description of the Related Art FIG. 6 is a perspective view of an example of a conventional sample holder. To fix the analysis sample 8 to the sample holder 11, first, the analysis surface 9 of the analysis sample 8 is fixed to the measurement window 1
Then, the holder pressing spring 19 is placed on the back surface 10 of the analysis sample 8 and then the holding plate 20 is placed. Thereby, the sample holder 11
The analysis sample 8 and the sample pressing spring 19 are sandwiched between the pressing plate 20 and the pressing plate 20. Then, as shown in FIG. 7, by pressing the pressing plate 20 with a finger or the like,
With the sample holding spring 19 holding the analysis sample 8, the holding plate 20 is fixed by the plate fixing screw 21. As a result, the analysis sample 8 is held by the sample pressing spring 19
By this, the sample holder 11 is fixed while being pressed. In this case, there is a drawback that the sample cannot be fixed while observing the analysis surface 9 of the analysis sample 8 and the position of the sample cannot be adjusted after the fixation.

[0003]

As described above, the conventional analytical sample fixing method and sample holder cannot observe the analytical surface when setting the analytical sample and cannot adjust the sample position after the sample is fixed. It is difficult to align a specific location with the measurement window when performing location analysis.

2) It is difficult to align the position of the sample once, and it is necessary to fix the sample several times while adjusting the position of the sample.

3) It is impossible to adjust the position of the analytical sample after fixing the analytical sample.

There are problems such as the above.

[0007]

In order to solve the above problems, according to the present invention, a sample at a specific location intended for measurement is sampled at an arbitrary position in a measurement window while observing an analysis surface of the analysis sample. A fine movement function of the sample that enables movement is provided.

That is, the sample fine-moving mechanism of the present invention comprises a sample pressing means, a first sample pressing means composed of a sample pressing means and an elastic body having one end fixed and the other end connected to the sample pressing means, and a sample position adjusting means. , A second sample holding means composed of a movable sample holding means connected to the sample position adjusting means, and a measurement window.

Further, the present invention is characterized in that it has grooves for sliding the sample holder and the movable sample holder.

Further, the sample holder of the present invention is characterized in that at least one sample fine movement mechanism is mounted and the position adjustment of the analysis sample is controlled from the outside by the sample position adjusting means.

The analytical sample is fixed by setting the analytical sample in the sample holder and fixing the holder / lid. Since the work for fixing the sample becomes easy, the time for fixing the sample to the sample holder is shortened. By rotating the sample position adjusting screw, it is possible to finely move the analytical sample. By observing the analysis surface of the analysis sample, it is possible to easily position the specific portion for the measurement in a short time.

When the measurement is carried out by the mass spectrometer, it is necessary to take into consideration the stability of the electric field on the sample surface, and the best measurement is possible near the center of the measurement window as the measurement position of the sample. it is conceivable that. However, in the conventional sample holder, it is difficult to fix the sample while observing the measurement surface when setting the sample in the holder.
It is considered that delicate movement of the sample is an impossible mechanism.
Therefore, it is considered important to perform a fine movement of a specific measurement point (measurement region) in the target sample to the vicinity of the center of the measurement window after fixing the sample holder.

[0013]

1 is a perspective view showing details of a fine movement mechanism of the present invention. FIG. 2 is a perspective view showing a state where an analysis sample is set in the same mechanism.

As shown in FIG. 1, a sample holder 3 attached to a spring 2 is provided on the side walls of two adjacent sides in the sample holder. Since the position of the sample retainer 3 is the reference position of the two sides of the analysis sample 8, the sample retainer 3 is attached so as to come close to the measurement window 1. As a result, the side walls on two sides, the spring 2, and the sample retainer 3 are integrated, and when pressure is applied to the sample retainer 3, the spring 2 contracts and the sample retainer 3 slides. Further, the position where the two sides intersect on the extension line of the sample retainer 3 on the two sides becomes the center position of the measurement window 1. Next, the two sides not provided with the sample holder 3 are provided as a mechanism in which the movable sample holder 4 and the sample position adjusting rod 5 are integrated and fixed by the sample position adjusting rod holder 7. The mounting position of the movable sample retainer 4 is provided on the extension line of the sample retainer 3 so that the sample retainer 3 and the movable sample retainer 4 are on a straight line. By threading the sample position adjusting rod 5 and the sample position adjusting rod presser 7 attached to the movable sample presser 4 in advance, and rotating the sample position adjusting screw 6 provided at the tip of the sample position adjusting rod 5, The movable sample holder 4
The mechanism for sliding movement is provided by the screws of the sample position adjusting rod 5 and the sample position adjusting rod retainer 7. The position of the analysis sample 8 can be finely moved by the mechanism in which the movable sample holder 4 slides.

FIG. 2 shows an example of a set of analysis samples 8. A spring 2, a sample retainer 3, a measurement window 1, a movable sample retainer 4, a sample position adjusting rod 5, and a sample position adjusting screw 6 are formed in a straight line from the side wall in both the X and Y directions. The analysis sample 8 is set on the upper side with the analysis surface 9 on the lower side and the back surface 10 on the upper side. As a procedure for attaching the analysis sample 8, the space between the sample holder 3 and the movable sample holder 4 is widened by loosening the movable sample holder 4. Next, place the analysis sample 8 in the space between the sample holder 3 and the movable sample holder 4,
By gradually tightening the sample position adjusting screw 6, the sample 8 is sandwiched between the sample holder 3 and the movable sample holder 4 and is pressed by the pressure of the spring 2. In this state, the sample position adjusting screw 6 is rotated, the movable sample holder 4 and the sample holder 3 are moved by utilizing the movement of the screw and the expansion and contraction of the spring 2, and the analysis sample 8 can be freely moved in the X and Y directions. It is possible to move.

FIG. 3 shows an embodiment of attachment to the sample holder according to the present invention. As shown in FIG. 3, the inside of the sample holder 11 is partitioned into four in-holder sample chambers 14, and each of the in-holder sample chambers 14 is provided with the sample fine movement mechanism shown in FIG. At that time, a hole for adjusting the sample position adjusting screw 6 from the outside of the sample holder 11 is provided in each holder internal sample chamber 14. Further, the holder / lid 12 is provided with a sample support spring 16. The sample support spring 16 is attached so as to come to the same position as the measurement window 1 when the holder / lid 12 is closed with the holder / lid rotation shaft 15 as the rotation shaft. After the analysis sample 8 is set in the holder, the holder / lid 12 is squeezed, and the sample support spring 16 applies pressure from the back surface 10 of the analysis sample 8 to fix the analysis sample 8. Incidentally, in order to enable fine movement of the sample, the pressure pressed by the sample support spring 16 is adjusted so as not to be so high. Further, the analysis sample 8 of the sample support spring 16
By smoothing the part in contact with the sphere, smooth fine movement of the sample is possible.

4 and 5 show the holder after the sample is set.

After the analysis sample 8 is set on the sample holder 11, the holder lid 12 is closed as shown in FIG. 4, and the holder lid fixing screw 13 is tightened to fix the holder lid 12 (1
8: Back of holder). As a result, the analysis sample 8 is fixed to the sample holder 11 by the pressure of the sample support spring 16. Next, as shown in FIG. 5, turn the holder 11 toward the back surface (1
7: Holder surface), while observing the analysis sample 8 from the measurement window 1, the sample position adjusting screw 6 is rotated to slide the analysis sample 8. By this operation, the position of the analysis sample 8 is adjusted to a specific place for the purpose of measurement.

Next, a second embodiment of the present invention will be described.

Also in the perspective view of the fine movement mechanism shown in FIG.
Similar to FIG. 1, a sample holder having springs attached to the side walls of two adjacent sides in the sample holder is provided. Further, for the two sides where the sample retainer is not provided, a mechanism is provided in which a movable sample retainer and a sample position adjusting rod are integrated and fixed by the sample position adjusting rod retainer. The fine movement mechanism in FIG. 8 is a mechanism in which the spring contracts when pressure is applied to the sample retainer, and the sample retainer slides in the groove 22 in the drawing. Similarly, with respect to the movable sample holder, by rotating the sample position adjusting screw, the movable sample holder becomes a mechanism for slidingly moving the groove 23 in the drawing.

Therefore, the sample retainer and the movable sample retainer can be moved in the X and Y directions along the groove in the figure, and the other direction ((movable) sample retainer can be moved during the movement of the (movable) sample retainer in one direction. The movable sample holder is fixed by the sample position adjusting screw and the groove, and the position of the analysis sample 8 can be surely aligned with the fine movement mechanism of FIG. The (movable) sample holder used at this time is shown in FIGS. 10 (A), (B), and (G).
Shown in

Also in the perspective view of the fine movement mechanism shown in FIG.
Similar to FIG. 1, a sample holder having springs attached to the side walls of two adjacent sides in the sample holder is provided. Further, for the two sides where the sample retainer is not provided, a mechanism is provided in which a movable sample retainer and a sample position adjusting rod are integrated and fixed by the sample position adjusting rod retainer. The fine movement mechanism in FIG. 9 is a mechanism in which the spring contracts when pressure is applied to the sample retainer, and the sample retainer slides in the inverted T-shaped groove 24 in the figure. Similarly, with respect to the movable sample retainer, by rotating the sample position adjusting screw, the movable sample retainer becomes a mechanism that slides in the inverted T-shaped groove 25 in the drawing.

Therefore, the sample retainer and the movable sample retainer can move in the X and Y directions along the inverted T-shaped groove in the drawing, and the (movable) sample retainer moves in one direction. The sample holder in the other direction (movable) is fixed by the sample position adjusting screw and the inverted T-shaped groove, and the position of the analysis sample 8 can be surely aligned with the fine movement mechanism of FIG. The (movable) sample holder used at this time is shown in FIGS. 10 (C) and 10 (E). Further, by using the (movable) sample retainer shown in FIGS. 10D and 10F in the fine movement mechanism of FIG. 9, the sample position in the Z direction during the movement in the X direction or the Y direction and after the sample position adjustment is performed. It is possible to prevent the fluctuation of

In the (movable) sample holder of FIG. 10, the shaded portion slides in the groove.

Further, in actual measurement, it is not desirable that the step between the measurement surface of the sample and the surface of the holder becomes large, so that it is necessary to make the groove mechanism and the like as thin as possible.

In the above embodiment, the sample retainer and the movable sample retainer are movable in the X and Y directions. However, these are on the diagonal line of the sample fine movement mechanism (45 ° with respect to the X and Y directions). It may be configured to move in the direction of forming the angle.

The holder used in the present invention is preferably made of the same material as the conventional holder. In addition, the "sample holder" used for fine movement of the sample shall be conductive. This is because it is necessary to suppress the phenomenon that charges are accumulated in the sample when performing analysis in the mass spectrometer, and all holder components are made of a conductive material.

[0028]

As described in detail above, according to the present invention, since the sample fine adjustment mechanism is provided, the sample position can be adjusted while observing the analysis surface of the analysis sample. It can be surely performed by the sample set of. Therefore, the analysis sample setting work can be easily performed in a short time, and the effect of shortening the work time can be expected.
Furthermore, the method of fixing the analytical sample to the sample holder is also simplified, so the analytical sample can be fixed easily and in a short time, and the sample fixing time can be shortened even for samples that are not intended for measurement at a specific location. The effect of is obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing details of a sample fine movement mechanism according to the present invention.

FIG. 2 is a perspective view showing a state where an analysis sample is set on the sample fine movement mechanism.

FIG. 3 is a perspective view showing details of a sample holder including the same sample fine movement mechanism.

FIG. 4 is a perspective view showing a back surface side of the sample holder on which an analysis sample is set.

FIG. 5 is a perspective view showing the same surface side.

FIG. 6 is a perspective view showing details of a conventional sample holder and a sample setting procedure.

FIG. 7 is a perspective view showing a state in the middle of a sample setting operation on a conventional sample holder.

FIG. 8 is a perspective view showing a characteristic portion of another sample fine movement mechanism according to the present invention.

FIG. 9 is a perspective view showing a characteristic part of still another sample fine movement mechanism according to the present invention.

10A to 10G are perspective views showing the shape of a sample retainer used in the sample fine movement mechanism of FIG. 8 or FIG.

[Explanation of symbols]

 1 Measurement Window 2 Spring 3 Sample Presser 4 Movable Sample Presser 5 Sample Position Adjusting Rod 6 Sample Position Adjusting Screw 11 Sample Holder 22,…, 25 Sample Pressing Slide Groove

Claims (3)

[Claims] 1. A first sample pressing means comprising a sample pressing means and an elastic body having one end fixed and the other end connected to the sample pressing means, the sample position adjusting means, and the sample position adjusting means. A fine sample moving mechanism comprising: a second sample holding means including a movable sample holding means and a measurement window. 2. The sample fine movement mechanism according to claim 1, further comprising slide grooves for the sample retainer and the movable sample retainer. 3. A sample holder, wherein at least one sample fine movement mechanism according to claim 1 or 2 is mounted, and the position adjustment of an analysis sample is controlled by the sample position adjusting means from the outside.