JPH09293919A - Optical component holding structure and semiconductor laser pumped solid-state laser device - Google Patents
Optical component holding structure and semiconductor laser pumped solid-state laser deviceInfo
- Publication number
- JPH09293919A JPH09293919A JP10295096A JP10295096A JPH09293919A JP H09293919 A JPH09293919 A JP H09293919A JP 10295096 A JP10295096 A JP 10295096A JP 10295096 A JP10295096 A JP 10295096A JP H09293919 A JPH09293919 A JP H09293919A
- Authority
- JP
- Japan
- Prior art keywords
- holding member
- laser
- semiconductor laser
- laser medium
- optical component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 94
- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 239000000853 adhesive Substances 0.000 claims abstract description 24
- 230000001070 adhesive effect Effects 0.000 claims abstract description 24
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 16
- 230000010355 oscillation Effects 0.000 claims abstract description 15
- 230000005284 excitation Effects 0.000 claims abstract description 13
- 239000013078 crystal Substances 0.000 abstract description 16
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 9
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- WYOHGPUPVHHUGO-UHFFFAOYSA-K potassium;oxygen(2-);titanium(4+);phosphate Chemical compound [O-2].[K+].[Ti+4].[O-]P([O-])([O-])=O WYOHGPUPVHHUGO-UHFFFAOYSA-K 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
(57)【要約】 （修正有）
【課題】 光学部品の組立や位置調整が容易な光学部品
の保持構造を提供し、さらに光学部品の組立や位置調整
が容易で、温度変化に対して安定して動作する半導体レ
ーザ励起固体レーザ装置を提供する。
【解決手段】 固体レーザ装置は、励起光を放射する半
導体レーザ素子１７と、発振光を発生するレーザ媒質１
３と、発振光を非線形光に変換する非線形光学素子１２
と、半導体レーザ素子１７を保持するレーザマウント１
６およびベース板１９と、レーザ媒質１３および非線形
光学素子１２を保持する結晶ホルダ３と、ベース板１９
の温度を制御するペルチェ素子２０などで構成される。
レーザ媒質１３および非線形光学素子１２は、光軸に対
して平行であって互いに直交する２つの平面から成る接
着面を有する直方体状に形成される。結晶ホルダ３は、
互いに直交する２つの平面から成る台座を有し、レーザ
媒質１３および非線形光学素子１２は台座に密着するよ
うに位置決めされ、接着剤で固定される。
(57) [Abstract] (Correction) [Problem] To provide a holding structure for an optical component that allows easy assembly and position adjustment of the optical component, and further facilitates assembly and position adjustment of the optical component and stabilizes against temperature changes. Provided is a semiconductor laser pumped solid-state laser device that operates as described above. A solid-state laser device includes a semiconductor laser element that emits excitation light, and a laser medium that generates oscillation light.
3 and a nonlinear optical element 12 for converting oscillation light into nonlinear light
And a laser mount 1 for holding the semiconductor laser device 17.
6 and the base plate 19, the crystal holder 3 for holding the laser medium 13 and the nonlinear optical element 12, and the base plate 19
It is composed of a Peltier element 20 for controlling the temperature.
The laser medium 13 and the non-linear optical element 12 are formed in a rectangular parallelepiped shape having an adhesive surface composed of two planes parallel to the optical axis and orthogonal to each other. The crystal holder 3 is
It has a pedestal composed of two planes orthogonal to each other, the laser medium 13 and the nonlinear optical element 12 are positioned so as to be in close contact with the pedestal, and are fixed with an adhesive.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光学部品の保持構
造に関する。また本発明は、レーザ媒質および非線形光
学素子を共振器内に配置し、半導体レーザでレーザ媒質
を励起して短波長の非線形光を発生するための半導体レ
ーザ励起固体レーザ装置に関する。TECHNICAL FIELD The present invention relates to a holding structure for an optical component. The present invention also relates to a semiconductor laser pumped solid-state laser device for arranging a laser medium and a nonlinear optical element in a resonator and exciting the laser medium with a semiconductor laser to generate nonlinear light of a short wavelength.
【０００２】[0002]
【従来の技術】従来、ＧａＡｌＡｓ等から成る半導体レ
ーザを用いて、共振器内に配置されたＮｄ：ＹＡＧ結晶
などのレーザ媒質を励起してレーザ発振を行うようにし
た固体レーザ装置が知られている。こうした固体レーザ
装置の発振波長は一般に励起光の波長よりも長くなるた
め、短波長のレーザ光を必要とする用途、たとえば高密
度の光記録などには不向きである。2. Description of the Related Art Heretofore, there has been known a solid-state laser device in which a semiconductor laser made of GaAlAs or the like is used to excite a laser medium such as an Nd: YAG crystal arranged in a resonator to perform laser oscillation. There is. Since the oscillation wavelength of such a solid-state laser device is generally longer than the wavelength of the excitation light, it is unsuitable for applications requiring short-wavelength laser light, such as high-density optical recording.
【０００３】より短波長のレーザ光を得るために、レー
ザ媒質および非線形光学結晶を同じ共振器内に配置し
て、レーザ媒質による発振光を第２高調波などの非線形
光に変換する固体レーザ装置が種々提案されている（特
開平４−２８３９７７号、実開平４−９７３７５号、特
開平６−６９５６７号など）。たとえば、レーザ媒質と
してＹＡＧ結晶を使用し、非線形光学結晶として燐酸チ
タニルカリウムＫＴｉＯＰＯ4 （略称ＫＴＰ）を使用す
ると、ＹＡＧ結晶による波長１０６４ｎｍの発振光を半
分の５３２ｎｍのグリーン光に変換することが可能であ
る。In order to obtain a laser beam having a shorter wavelength, a laser medium and a nonlinear optical crystal are arranged in the same resonator to convert the oscillation light of the laser medium into a nonlinear light such as a second harmonic. Have been proposed (JP-A-4-283977, JP-A-4-97375, JP-A-6-69567, etc.). For example, when a YAG crystal is used as the laser medium and potassium titanyl phosphate KTiOPO 4 (abbreviated as KTP) is used as the non-linear optical crystal, it is possible to convert the oscillation light having a wavelength of 1064 nm by the YAG crystal into a green light having a wavelength of 532 nm. is there.
【０００４】[0004]
【発明が解決しようとする課題】こうした固体レーザ装
置において、半導体レーザ、レーザ媒質および非線形光
学素子の位置決めに高い精度が要求され、励起光、発振
光および非線形光の各光軸がμｍオーダーで一致しない
と変換効率が極端に低下してしまう。In such a solid-state laser device, high precision is required for positioning the semiconductor laser, the laser medium and the nonlinear optical element, and the optical axes of the pumping light, the oscillating light and the nonlinear light coincide with each other in the μm order. Otherwise, the conversion efficiency will drop extremely.
【０００５】また、光学部品を保持する保持部材や光学
部品間の距離が熱膨張によって大きく変化すると、光軸
ずれによる効率低下やモードホップによる出力変動を引
き起こす要因となる。Further, if the holding member for holding the optical parts or the distance between the optical parts changes greatly due to thermal expansion, it becomes a factor that causes a decrease in efficiency due to optical axis deviation and an output fluctuation due to mode hopping.
【０００６】従来、光学部品の保持構造として、１）光
学部品をホルダに収納して、押え部材で挟むようにした
機械的固定、２）光学部品の研磨面とホルダとを密着し
て接着剤で固定した研磨面での接着、３）研磨面以外の
面とホルダとを密着して接着剤で固定した１面接着、な
どが用いられているが、何れも光学部品の位置決めが容
易でなく、組立作業に熟練を要する。Conventionally, as a structure for holding an optical component, 1) a mechanical fixing in which the optical component is housed in a holder and sandwiched by a holding member, 2) a polishing surface of the optical component and a holder are brought into close contact with each other and an adhesive Adhesion on the polishing surface fixed with 3), 1) One-side adhesion in which the surface other than the polishing surface and the holder are closely adhered and fixed with an adhesive are used, but positioning of optical components is not easy. However, skill is required for assembly work.
【０００７】本発明の目的は、光学部品の組立や位置調
整が容易な光学部品の保持構造を提供することである。An object of the present invention is to provide a holding structure for an optical component that allows easy assembly and position adjustment of the optical component.
【０００８】また本発明の目的は、光学部品の組立や位
置調整が容易で、温度変化に対して安定して動作する半
導体レーザ励起固体レーザ装置を提供することである。It is another object of the present invention to provide a semiconductor laser pumped solid-state laser device in which assembling and position adjustment of optical parts are easy and which operates stably with respect to temperature changes.
【０００９】[0009]
【課題を解決するための手段】本発明は、光軸に対して
平行であって、互いに直交する２つの平面から成る接着
面を有する光学部品と、光学部品の接着面に密着するよ
うに、互いに直交する２つの平面から成る台座面を有す
る保持部材と、保持部材の温度を制御する温度制御手段
とを備え、光学部品および保持部材が互いに接着剤で固
定されていることを特徴とする光学部品の保持構造であ
る。 本発明に従えば、光学部品の接着面を保持部材の台座面
に密着するように乗載することによって、光軸に対して
垂直な２次元方向の位置決めを簡単に行うことができ
る。また、光学部品と保持部材との接触面積を比較的大
きく確保できるため、両者の熱結合が良好になり、保持
部材の温度制御によって光学部品の温度制御を安定に実
現できる。 さらに、光学部品および保持部材を接着剤で固定するこ
とによって、従来の機械的固定に比べて振動などによる
位置ずれをより確実に防止できる。また、直交２平面で
光学部品を保持しているため、従来の１面接着に比べて
固定強度をより高めることができる。According to the present invention, there is provided an optical component having an adhesive surface composed of two planes which are parallel to an optical axis and are orthogonal to each other, and an adhesive surface of the optical component. An optical system comprising: a holding member having a pedestal surface composed of two planes orthogonal to each other; and a temperature control means for controlling the temperature of the holding member, wherein the optical component and the holding member are fixed to each other with an adhesive. It is a part holding structure. According to the present invention, by mounting the adhesive surface of the optical component so as to be in close contact with the pedestal surface of the holding member, positioning in the two-dimensional direction perpendicular to the optical axis can be easily performed. Further, since the contact area between the optical component and the holding member can be ensured to be relatively large, the thermal coupling between the both can be improved, and the temperature control of the holding member can realize stable temperature control of the optical component. Furthermore, by fixing the optical component and the holding member with an adhesive, it is possible to more reliably prevent positional displacement due to vibration and the like, as compared with the conventional mechanical fixing. Further, since the optical component is held by the two orthogonal planes, the fixing strength can be further increased as compared with the conventional one-sided adhesion.
【００１０】また本発明は、励起光を放射する半導体レ
ーザと、共振器内に設けられ、励起光によって励起され
て発振光を発生するレーザ媒質と、半導体レーザを保持
する第１保持部材と、第１保持部材の温度を制御する温
度制御手段と、レーザ媒質を保持し、第１保持部材が固
定される第２保持部材とを備え、レーザ媒質は、光軸に
対して平行であって互いに直交する２つの平面から成る
接着面を有し、第２保持部材は、前記接着面に密着する
ように互いに直交する２つの平面から成る台座面を有す
ることを特徴とする半導体レーザ励起固体レーザ装置で
ある。 本発明に従えば、レーザ媒質の接着面を第２保持部材の
台座面に密着するように乗載することによって、光軸に
対して垂直な２次元方向の位置決めを簡単に行うことが
できる。また、これらの光学部品と第２保持部材との接
触面積を比較的大きく確保できるため、両者の熱結合が
良好になり、第１および第２保持部材の温度制御によっ
て光学部品の温度制御を安定に実現できる。According to the present invention, a semiconductor laser that emits excitation light, a laser medium that is provided in a resonator and that is excited by the excitation light to generate oscillation light, and a first holding member that holds the semiconductor laser are provided. A temperature control unit that controls the temperature of the first holding member and a second holding member that holds the laser medium and to which the first holding member is fixed are provided, and the laser medium is parallel to the optical axis and is A semiconductor laser pumped solid-state laser device having a bonding surface composed of two planes orthogonal to each other, and the second holding member having a pedestal surface composed of two planes orthogonal to each other so as to be in close contact with the bonding surface. Is. According to the invention, the laser medium is mounted so that the adhesive surface of the laser medium is in close contact with the pedestal surface of the second holding member, so that the two-dimensional direction perpendicular to the optical axis can be easily positioned. Further, since a relatively large contact area between these optical parts and the second holding member can be secured, thermal coupling between the two is improved, and temperature control of the first and second holding members stabilizes the temperature control of the optical parts. Can be realized.
【００１１】また本発明は、励起光を放射する半導体レ
ーザと、共振器内に設けられ、励起光によって励起され
て発振光を発生するレーザ媒質と、共振器内に設けら
れ、該発振光を非線形光に変換する非線形光学素子と、
半導体レーザを保持する第１保持部材と、第１保持部材
の温度を制御する温度制御手段と、レーザ媒質および非
線形光学素子を保持し、第１保持部材が固定される第２
保持部材とを備え、レーザ媒質および非線形光学素子
は、光軸に対して平行であって互いに直交する２つの平
面から成る接着面を有し、第２保持部材は、前記接着面
に密着するように互いに直交する２つの平面から成る台
座面を有することを特徴とする半導体レーザ励起固体レ
ーザ装置である。 本発明に従えば、レーザ媒質および非線形光学素子の接
着面を第２保持部材の台座面に密着するように乗載する
ことによって、光軸に対して垂直な２次元方向の位置決
めを簡単に行うことができる。また、これらの光学部品
と第２保持部材との接触面積を比較的大きく確保できる
ため、両者の熱結合が良好になり、第１および第２保持
部材の温度制御によって光学部品の温度制御を安定に実
現できる。The present invention also provides a semiconductor laser that emits excitation light, a laser medium that is provided in the resonator and that is excited by the excitation light to generate oscillation light, and that is provided in the resonator and that emits the oscillation light. A non-linear optical element for converting into a non-linear light,
A first holding member for holding the semiconductor laser, a temperature control means for controlling the temperature of the first holding member, a laser medium and a nonlinear optical element, and a second holding member for fixing the first holding member.
A holding member, the laser medium and the non-linear optical element have an adhesive surface made up of two planes that are parallel to the optical axis and are orthogonal to each other, and the second holding member is in close contact with the adhesive surface. Is a semiconductor laser pumped solid-state laser device having a pedestal surface composed of two planes orthogonal to each other. According to the present invention, the laser medium and the non-linear optical element are mounted so that the adhesive surfaces of the laser medium and the non-linear optical element are closely attached to the pedestal surface of the second holding member, so that the positioning in the two-dimensional direction perpendicular to the optical axis is easily performed. be able to. Further, since a relatively large contact area between these optical parts and the second holding member can be secured, thermal coupling between the two is improved, and temperature control of the first and second holding members stabilizes the temperature control of the optical parts. Can be realized.
【００１２】[0012]
【発明の実施の形態】図１は本発明の実施の一形態を示
す分解斜視図であり、図２はその中央断面図である。ハ
ウジング１は、ヘッダとキャップから成り、ヘッダには
複数のリード電極（不図示）が電気絶縁性を保つように
固定されている。ヘッダの上面には電子冷却装置である
ペルチェ素子２０が搭載され、ペルチェ素子２０のリー
ド線はリード電極の何れかに接続される。1 is an exploded perspective view showing an embodiment of the present invention, and FIG. 2 is a central sectional view thereof. The housing 1 includes a header and a cap, and a plurality of lead electrodes (not shown) are fixed to the header so as to maintain electrical insulation. A Peltier element 20, which is an electronic cooling device, is mounted on the upper surface of the header, and the lead wire of the Peltier element 20 is connected to any of the lead electrodes.
【００１３】ペルチェ素子２０の上面には、６面体形状
で金属製のベース板１９が搭載される。ベース板１９の
端面にはリード線１８が電気的に接続され、リード線１
８の一端はリード電極の何れかに接続されている。この
リード線１８は、半導体レーザ素子１７のカソードとし
て引き出される。A hexahedral metal base plate 19 is mounted on the upper surface of the Peltier element 20. The lead wire 18 is electrically connected to the end surface of the base plate 19, and the lead wire 1
One end of 8 is connected to any of the lead electrodes. The lead wire 18 is drawn out as a cathode of the semiconductor laser device 17.
【００１４】ベース板１９の上面には、６面体形状で金
属製のレーザマウント１６が搭載される。レーザマウン
ト１６の端面にはチップ状の半導体レーザ素子１７が固
定され、半導体レーザ素子１７のカソードはレーザマウ
ント１６、ベース板１９およびリード線１８から成る経
路と接続している。一方、半導体レーザ素子１７のアノ
ードはリード線１５と接続され、リード線１５の一端は
リード電極の何れかに接続されている。レーザマウント
１６とベース板１９とは、接触によって良好な電気接続
および熱伝導が得られる。A hexahedral metal laser mount 16 is mounted on the upper surface of the base plate 19. A chip-shaped semiconductor laser element 17 is fixed to the end surface of the laser mount 16, and the cathode of the semiconductor laser element 17 is connected to a path formed by the laser mount 16, the base plate 19 and the lead wire 18. On the other hand, the anode of the semiconductor laser device 17 is connected to the lead wire 15, and one end of the lead wire 15 is connected to any of the lead electrodes. The laser mount 16 and the base plate 19 are brought into contact with each other to obtain good electrical connection and heat conduction.
【００１５】レーザマウント１６の上面には、レーザ媒
質１３および非線形光学素子１２を保持する結晶ホルダ
３が搭載される。結晶ホルダ３は、銅などの熱伝導性材
料で形成され、レーザ媒質１３および非線形光学素子１
２で発生する熱をレーザマウント１６側に伝導してい
る。結晶ホルダ３の端面には、温度センサとして使用す
るサーミスタを装着するための小孔４が形成され、サー
ミスタのリード線はリード電極の何れかに接続される。A crystal holder 3 for holding the laser medium 13 and the nonlinear optical element 12 is mounted on the upper surface of the laser mount 16. The crystal holder 3 is made of a heat conductive material such as copper, and has a laser medium 13 and a nonlinear optical element 1.
The heat generated in 2 is conducted to the laser mount 16 side. A small hole 4 for mounting a thermistor used as a temperature sensor is formed on the end face of the crystal holder 3, and the lead wire of the thermistor is connected to any of the lead electrodes.
【００１６】図３（ａ）は結晶ホルダ３の形状を示す斜
視図であり、図３（ｂ）は平面図、図３（ｃ）は正面図
である。結晶ホルダ３は上から見て略Ｌ字状のブロック
であり、台座３ａおよび台座３ｂは互いに直交するよう
に形成されている。レーザ媒質１３および非線形光学素
子１２は、直方体状に形成されており、自らの光軸に対
して平行であって互いに直交する２つの平面から成る接
着面を有する。これらの接着面が台座３ａ、３ｂの両面
に密着することによって、光軸に対して垂直な２次元方
向が位置決めされ、熱伝導性の良好な接着剤、たとえば
Ａｇフィラー入りエポキシ樹脂系の接着剤などで固定さ
れる。FIG. 3 (a) is a perspective view showing the shape of the crystal holder 3, FIG. 3 (b) is a plan view, and FIG. 3 (c) is a front view. The crystal holder 3 is a substantially L-shaped block when viewed from above, and the pedestal 3a and the pedestal 3b are formed so as to be orthogonal to each other. The laser medium 13 and the non-linear optical element 12 are formed in a rectangular parallelepiped shape and have an adhesive surface composed of two planes parallel to their own optical axes and orthogonal to each other. By adhering these adhesive surfaces to both surfaces of the pedestals 3a and 3b, a two-dimensional direction perpendicular to the optical axis is positioned and an adhesive having good thermal conductivity, for example, an epoxy resin adhesive containing Ag filler. It is fixed with.
【００１７】こうしてレーザ媒質１３および非線形光学
素子１２の位置決めを簡単かつ高精度で行うことがで
き、しかも熱伝導に優れた強固な保持構造を実現するこ
とができる。Thus, the positioning of the laser medium 13 and the nonlinear optical element 12 can be performed easily and with high accuracy, and a strong holding structure excellent in heat conduction can be realized.
【００１８】一方、台座３ａに接する垂直な隅部にも台
座３ｃおよび台座３ｄが互いに直角になるように形成さ
れ、ビームスプリッタ１１を保持する角柱状の保持部材
１１ａが台座３ｃ、３ｄの両面に密着することによっ
て、光軸垂直方向の動きが位置決めされ、最終的に接着
剤で固定される。On the other hand, a pedestal 3c and a pedestal 3d are also formed at right angles to each other in a vertical corner contacting the pedestal 3a, and prismatic holding members 11a for holding the beam splitter 11 are provided on both sides of the pedestals 3c and 3d. By the close contact, the movement in the direction perpendicular to the optical axis is positioned and finally fixed by the adhesive.
【００１９】ビームスプリッタ１１は、非線形光学素子
１２から出てくる光を光軸に対して約９０度の方向に反
射するために、保持部材１１ａの先端部を所定角度で屈
曲させ、光軸に対して約４５度傾斜するように配置され
る。The beam splitter 11 bends the tip of the holding member 11a at a predetermined angle in order to reflect the light emitted from the nonlinear optical element 12 in the direction of about 90 degrees with respect to the optical axis, so that the optical axis is bent. It is arranged to incline about 45 degrees.
【００２０】こうしてベース板１９、レーザマウント１
６および結晶ホルダ３は、光軸調整後に止めネジの締結
によって固定してもよい。それにより良好な熱伝導が得
られるように一体化される。Thus, the base plate 19 and the laser mount 1
6 and the crystal holder 3 may be fixed by fastening a set screw after adjusting the optical axis. It is integrated so that good heat conduction is obtained.
【００２１】こうしてペルチェ素子２０の吸熱面に、半
導体レーザ素子１７、レーザ媒質１３および非線形光学
素子１２を保持するブロックが搭載され、小孔４に装着
されたサーミスタの測定温度が一定になるように温度コ
ントロールされる。In this way, a block for holding the semiconductor laser element 17, the laser medium 13 and the nonlinear optical element 12 is mounted on the heat absorption surface of the Peltier element 20, so that the temperature measured by the thermistor mounted in the small hole 4 becomes constant. Temperature controlled.
【００２２】一方、ビームスプリッタ１１で部分反射さ
れた非線形光は、外部のＡＰＣ(Auto Power Control）
回路に接続されたフォトダイオード（不図示）に入射し
て、非線形光の出力をモニタしながら半導体レーザ素子
１７の注入電流を制御することによって、非線形光の出
力が安定化される。On the other hand, the nonlinear light partially reflected by the beam splitter 11 is an external APC (Auto Power Control).
The output of the non-linear light is stabilized by controlling the injection current of the semiconductor laser element 17 while being incident on a photodiode (not shown) connected to the circuit and monitoring the output of the non-linear light.
【００２３】以上のように各構成部品をヘッダの上に取
付けた後、キャップを被せてハウジング１を形成する。
キャップの上面中央には非線形光を外部に取り出すため
の開口が形成され、開口の内側にはガラス板等の窓部材
７が貼着されている。窓部材７の両面には、非線形光の
波長に対して高透過率となるＡＲ（無反射）コートが施
される。After each component is mounted on the header as described above, the cap is covered to form the housing 1.
An opening for taking out non-linear light to the outside is formed in the center of the upper surface of the cap, and a window member 7 such as a glass plate is attached inside the opening. Both sides of the window member 7 are coated with an AR (non-reflection) coating having a high transmittance for the wavelength of the nonlinear light.
【００２４】次に具体的な構成例を説明する。レーザ媒
質１３としてＮｄ：ＹＶＯ4 結晶、非線形光学素子１２
としてＫＴＰ（ＫＴｉＯＰＯ4 ）結晶、半導体レーザ素
子１７として波長８０９ｎｍの励起光を出射するものを
それぞれ使用する。Next, a specific configuration example will be described. Nd: YVO 4 crystal as the laser medium 13 and the nonlinear optical element 12
A KTP (KTiOPO 4 ) crystal is used as the semiconductor laser element, and a semiconductor laser element 17 that emits excitation light having a wavelength of 809 nm is used.
【００２５】レーザ媒質１３の励起光入射側の表面に
は、レーザ媒質１３の発振波長である波長１０６４ｎｍ
に対して反射率が９９．９％以上であって、かつ励起光
の波長８０９ｎｍに対して透過率が９５％以上となるコ
ーティングが施されている。レーザ媒質１３および非線
形光学素子１２の対向する各表面には、波長１０６４ｎ
ｍに対して透過率が９９．９％以上となるコーティング
が施されている。非線形光学素子１２の出射側表面に
は、波長１０６４ｎｍに対して反射率が９９．９％以上
となるコーティングが施されている。こうしてレーザ媒
質１３の入射側表面と非線形光学素子１２の出射側表面
との間で光共振器が形成される。The surface of the laser medium 13 on the incident side of the excitation light has a wavelength of 1064 nm, which is the oscillation wavelength of the laser medium 13.
On the other hand, a coating having a reflectance of 99.9% or more and a transmittance of 95% or more with respect to the excitation light wavelength of 809 nm is applied. A wavelength of 1064n is provided on each surface of the laser medium 13 and the non-linear optical element 12 which face each other.
A coating having a transmittance of 99.9% or more with respect to m is applied. The emission-side surface of the nonlinear optical element 12 is coated with a reflectance of 99.9% or more for a wavelength of 1064 nm. In this way, an optical resonator is formed between the incident side surface of the laser medium 13 and the emitting side surface of the nonlinear optical element 12.
【００２６】半導体レーザ素子１７から波長８０９ｎｍ
の励起光が出力され、レーザ媒質１３を励起すると、光
共振器内で波長１０６４ｎｍのレーザ発振が起こり、こ
の発振光は非線形光学素子１２によって波長変換され、
第２高調波である波長５３２ｎｍの非線形グリーン光が
発生する。この非線形光は光軸に沿って進行し、途中ビ
ームスプリッタ１１によって部分反射され、一部はフィ
ルタ（不図示）を通ってフォトダイオードに受光され
る。残りの大部分は、ビームスプリッタ１１を通ってフ
ィルタ（不図示）および窓部材７を通過して外部に取り
出され、光記録や光通信、計測などの用途に利用され
る。Wavelength of 809 nm from the semiconductor laser device 17
When the laser medium 13 is excited and the laser medium 13 is excited, laser oscillation with a wavelength of 1064 nm occurs in the optical resonator, and the oscillation light is wavelength-converted by the nonlinear optical element 12,
Nonlinear green light having a wavelength of 532 nm, which is the second harmonic, is generated. This non-linear light travels along the optical axis, is partially reflected by the beam splitter 11 on the way, and part of it is received by the photodiode through a filter (not shown). Most of the remaining is passed through a beam splitter 11 and a filter (not shown) and a window member 7 to be taken out to the outside, and used for applications such as optical recording, optical communication, and measurement.
【００２７】なお、以上の説明において、レーザ媒質１
３および非線形光学素子１２から成る短波長光源の例を
示したが、非線形光学素子１２を省いてレーザ媒質１３
だけを使用する基本波レーザ光源にも本発明は適用可能
である。In the above description, the laser medium 1
Although the example of the short wavelength light source composed of 3 and the nonlinear optical element 12 is shown, the nonlinear optical element 12 is omitted and the laser medium 13 is omitted.
The present invention is also applicable to a fundamental wave laser light source using only a laser.
【００２８】[0028]
【発明の効果】以上詳説したように本発明の保持構造に
よれば、光学部品を保持部材に取付ける際に、光軸に対
して垂直な２次元方向の位置決めを簡単に行うことがで
きる。また、光学部品と保持部材との熱結合が良好にな
り、光学部品の温度制御を安定に実現できる。さらに、
光学部品および保持部材を接着剤で固定することによっ
て、耐久性や信頼性が向上する。As described in detail above, according to the holding structure of the present invention, when the optical component is attached to the holding member, the positioning in the two-dimensional direction perpendicular to the optical axis can be easily performed. Further, the thermal coupling between the optical component and the holding member becomes good, and the temperature control of the optical component can be stably realized. further,
By fixing the optical component and the holding member with an adhesive, durability and reliability are improved.
【００２９】また本発明の固体レーザ装置によれば、レ
ーザ媒質や非線形光学素子を第２保持部材に取付ける際
に、光軸に対して垂直な２次元方向の位置決めを簡単に
行うことができる。また、これらの光学部品と第２保持
部材との熱結合が良好になり、第１および第２保持部材
の温度制御によって光学部品の温度制御を安定に実現で
きる。Further, according to the solid-state laser device of the present invention, when the laser medium or the nonlinear optical element is attached to the second holding member, the positioning in the two-dimensional direction perpendicular to the optical axis can be easily performed. Further, the thermal coupling between these optical components and the second holding member becomes good, and the temperature control of the optical components can be stably realized by the temperature control of the first and second holding members.
【図１】本発明の実施の一形態を示す分解斜視図であ
る。FIG. 1 is an exploded perspective view showing an embodiment of the present invention.
【図２】本発明の実施の一形態を示す中央断面図であ
る。FIG. 2 is a central cross-sectional view showing an embodiment of the present invention.
【図３】図３（ａ）は結晶ホルダ３の形状を示す斜視図
であり、図３（ｂ）は平面図、図３（ｃ）は正面図であ
る。3 (a) is a perspective view showing the shape of a crystal holder 3, FIG. 3 (b) is a plan view, and FIG. 3 (c) is a front view.
１ ハウジング ３ 結晶ホルダ ４ 小孔 ７ 窓部材 １１ ビームスプリッタ １２ 非線形光学素子 １３ レーザ媒質 １５、１８ リード線 １６ レーザマウント １７ 半導体レーザ素子 １９ ベース板 ２０ ペルチェ素子 1 Housing 3 Crystal Holder 4 Small Hole 7 Window Member 11 Beam Splitter 12 Nonlinear Optical Element 13 Laser Medium 15, 18 Lead Wire 16 Laser Mount 17 Semiconductor Laser Element 19 Base Plate 20 Peltier Element
Claims (3)
する２つの平面から成る接着面を有する光学部品と、 光学部品の接着面に密着するように、互いに直交する２
つの平面から成る台座面を有する保持部材と、 保持部材の温度を制御する温度制御手段とを備え、 光学部品および保持部材が互いに接着剤で固定されてい
ることを特徴とする光学部品の保持構造。1. An optical component having an adhesive surface composed of two planes that are parallel to the optical axis and are orthogonal to each other, and 2 orthogonal to each other so as to be in close contact with the adhesive surface of the optical component.
A holding structure for an optical component, comprising: a holding member having a pedestal surface composed of two flat surfaces; and a temperature control means for controlling the temperature of the holding member, wherein the optical component and the holding member are fixed to each other with an adhesive. .
を発生するレーザ媒質と、 半導体レーザを保持する第１保持部材と、 第１保持部材の温度を制御する温度制御手段と、 レーザ媒質を保持し、第１保持部材が固定される第２保
持部材とを備え、 レーザ媒質は、光軸に対して平行であって互いに直交す
る２つの平面から成る接着面を有し、 第２保持部材は、前記接着面に密着するように互いに直
交する２つの平面から成る台座面を有することを特徴と
する半導体レーザ励起固体レーザ装置。2. A semiconductor laser that emits excitation light, a laser medium that is provided in a resonator and that is excited by the excitation light to generate oscillation light, a first holding member that holds the semiconductor laser, and a first holding member. A temperature control unit that controls the temperature of the member and a second holding member that holds the laser medium and to which the first holding member is fixed are provided. The laser medium is parallel to the optical axis and orthogonal to each other. 2. A semiconductor laser pumped solid-state laser device having a bonding surface composed of two planes, and the second holding member having a pedestal surface composed of two planes orthogonal to each other so as to be in close contact with the bonding surface.
を発生するレーザ媒質と、 共振器内に設けられ、該発振光を非線形光に変換する非
線形光学素子と、 半導体レーザを保持する第１保持部材と、 第１保持部材の温度を制御する温度制御手段と、 レーザ媒質および非線形光学素子を保持し、第１保持部
材が固定される第２保持部材とを備え、 レーザ媒質および非線形光学素子は、光軸に対して平行
であって互いに直交する２つの平面から成る接着面を有
し、 第２保持部材は、前記接着面に密着するように互いに直
交する２つの平面から成る台座面を有することを特徴と
する半導体レーザ励起固体レーザ装置。3. A semiconductor laser that emits excitation light, a laser medium that is provided in the resonator and that is excited by the excitation light to generate oscillation light, and that is provided in the resonator that converts the oscillation light into nonlinear light. Non-linear optical element for converting, first holding member for holding semiconductor laser, temperature control means for controlling temperature of the first holding member, and holding the laser medium and the non-linear optical element, the first holding member is fixed A second holding member, wherein the laser medium and the non-linear optical element have an adhesive surface composed of two planes parallel to the optical axis and orthogonal to each other, and the second holding member is in close contact with the adhesive surface. A semiconductor laser pumped solid-state laser device having a pedestal surface composed of two planes orthogonal to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10295096A JPH09293919A (en) | 1996-04-24 | 1996-04-24 | Optical component holding structure and semiconductor laser pumped solid-state laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10295096A JPH09293919A (en) | 1996-04-24 | 1996-04-24 | Optical component holding structure and semiconductor laser pumped solid-state laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09293919A true JPH09293919A (en) | 1997-11-11 |
Family
ID=14341103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10295096A Pending JPH09293919A (en) | 1996-04-24 | 1996-04-24 | Optical component holding structure and semiconductor laser pumped solid-state laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09293919A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5948738A (en) * | 1995-06-07 | 1999-09-07 | Alcon Laboratories, Inc. | Stable liquid enzyme compositions and methods of use in contact lens cleaning and disinfecting systems |
| US6069120A (en) * | 1995-08-18 | 2000-05-30 | Alcon Laboratories, Inc. | Liquid enzyme compositions containing mixed polyols and methods of use |
| JP2011523198A (en) * | 2008-01-28 | 2011-08-04 | クヮンジュ・インスティテュート・オブ・サイエンス・アンド・テクノロジー | Green light source generation device and portable electronic device provided with laser projection display using the same |
-
1996
- 1996-04-24 JP JP10295096A patent/JPH09293919A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5948738A (en) * | 1995-06-07 | 1999-09-07 | Alcon Laboratories, Inc. | Stable liquid enzyme compositions and methods of use in contact lens cleaning and disinfecting systems |
| US6069120A (en) * | 1995-08-18 | 2000-05-30 | Alcon Laboratories, Inc. | Liquid enzyme compositions containing mixed polyols and methods of use |
| JP2011523198A (en) * | 2008-01-28 | 2011-08-04 | クヮンジュ・インスティテュート・オブ・サイエンス・アンド・テクノロジー | Green light source generation device and portable electronic device provided with laser projection display using the same |
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