JPH09289343A - Piezoelectric vibrator - Google Patents

Abstract

(57) [PROBLEMS] To provide a piezoelectric vibrator having a fixed terminal capable of suppressing the inhibition of the vibration of the piezoelectric vibrator even when the piezoelectric vibrator is connected at a position other than the node of the vibration of the piezoelectric vibrator. SOLUTION: A flexible external conductive fixed terminal 100 in which a polyimide film 120 and a copper foil 110 are laminated is connected to an electrode 210 of a piezoelectric ceramic substrate 10 forming a piezoelectric transformer with cream solder 220, and a copper foil is formed. 110
And the electrode 210 are electrically connected. By using this fixed terminal 100 for external conductivity, one member can have two functions of supporting the piezoelectric ceramic substrate 10 and electrical conduction, and further, at a place other than the vibration node of the piezoelectric ceramic substrate 10. Even if the external conductive fixed terminal 100 is connected, since it has flexibility, inhibition of vibration is suppressed, and good vibration characteristics can be maintained.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a piezoelectric vibrator,
In particular, it relates to a piezoelectric transformer.

[0002]

2. Description of the Related Art Piezoelectric vibrators used for piezoelectric transformers and the like have electrodes formed on both sides of the vibrator, and an alternating current is externally applied to the electrodes. A fixed terminal is attached to a part of the vibrator to fix the vibrator to the case. In general, a common conductor for introducing alternating current is used in common with a fixed terminal to reduce factors that hinder vibration and facilitate manufacturing.

A piezoelectric transformer using a piezoelectric vibrator will be described as an example with reference to FIG. 6A and 6B are views for explaining a piezoelectric transformer to which the present invention is applied, FIG. 6A is a perspective view, FIG. 6B is a cross-sectional view, and FIG. 6C is a view showing stress distribution.
FIG. 6D is a diagram showing the amplitude distribution.

The left side 2/3 of the piezoelectric ceramic substrate 10 is the primary side, the primary electrode 22 is provided on the upper surface 12 of the piezoelectric ceramic substrate 10, and the primary electrode 24 is provided on the lower surface 14. . The left side 1/3 of the piezoelectric ceramic substrate 10 between the primary side electrodes 22 and 24 is polarized downward in the thickness direction, and the area between the left sides 1/3 and 2/3 is polarized upward in the thickness direction.

The right side 1/3 of the piezoelectric ceramic substrate 10 is the secondary side, and is polarized in the longitudinal direction of the piezoelectric ceramic substrate 10. A secondary electrode 42 is provided on the upper surface 12 of the piezoelectric ceramic substrate 10 near the secondary end surface 17.

The piezoelectric ceramic substrate 10 configured as described above uses the piezoelectric transformer 50 that uses resonance in the longitudinal direction.
It functions as 0 and can be driven so that a vibration mode of, for example, 1.5 wavelengths stands in the longitudinal direction between the primary side end surface 16 and the secondary side end surface 17. In this case, 1/6, 3/6 and 5/6 of the length of the piezoelectric ceramic substrate 10 from the primary end face 16 are nodes X, Y and Z of the longitudinal vibration, respectively.

On the primary side, since there are primary side electrodes 22 and 24 at the node X of vibration in the longitudinal direction, at the node X of this vibration, the lead frame 6 as a fixed terminal which also serves as a current is conducted.
Attach 2, 64. However, since the position of the secondary electrode 42 is different from the position of the vibration node in the longitudinal direction, it is necessary to devise such that the fixed terminal attached to the position of the secondary electrode 42 does not hinder the vibration.

[0008]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a piezoelectric vibration having a fixed terminal capable of suppressing the inhibition of the vibration of the piezoelectric vibrator even when the piezoelectric vibrator is connected at a position other than the vibration node. To provide a child.

[0009]

According to the present invention, a flexible piezoelectric substrate made of a piezoelectric material, a plurality of electrodes provided on the surface of the piezoelectric substrate, a resin and a metal foil are laminated. A piezoelectric vibrator comprising: an external conductive member, wherein one end of the member is connected to the at least one electrode so that the metal foil is electrically conductive to at least one of the plurality of electrodes. .

Further, when this piezoelectric vibrator is applied to a piezoelectric transformer, a piezoelectric transformer which hardly deteriorates resonance characteristics is provided.

That is, according to the present invention, a piezoelectric substrate made of a piezoelectric material, a primary side electrode and a secondary side electrode provided on the surface of the piezoelectric substrate, and a flexible resin formed by laminating a resin and a metal foil are laminated. An external conductive member is provided, and one end of the member is connected to the primary side electrode or the secondary side electrode so that the metal foil is conductive with the primary side electrode or the secondary side electrode, and the piezoelectric substrate. Is provided in a plurality of regions and is polarized in a predetermined direction to form a piezoelectric transformer.

A flexible external conductive member in which a resin and a metal foil are laminated bends when the member is attached so that the longitudinal direction of this member is parallel to the expansion and contraction direction of the piezoelectric vibrator. Therefore, when the longitudinal direction is perpendicular to the expansion and contraction direction of the piezoelectric vibrator, the piezoelectric vibrator is twisted to absorb the vibration of the piezoelectric vibrator. Therefore, even if this external conductive member is connected to the piezoelectric vibrator at a location other than the nodes of the piezoelectric vibration of the piezoelectric vibrator, the influence on the vibration of the piezoelectric vibrator is reduced. In particular, so that this external conductive member bends or curves,
When the piezoelectric vibrator is mounted on a wiring board or the like, the bent or curved portion absorbs the absorption of the piezoelectric vibrator more effectively, and as a result, the influence on the vibration of the piezoelectric vibrator is further reduced. Furthermore, since the flexible external conductive member formed by laminating the resin and the metal foil has a certain degree of rigidity, the piezoelectric substrate can be mechanically supported by the external conductive member.

As the resin for the external connection member, a resin having a high heat resistance that can withstand the temperature when the metal foil is soldered to the electrode is preferably used, and among them, a polyimide resin is more preferably used. The thickness is 1
It is preferably 0 μm to 100 μm, and 10 μm to
More preferably, it is 40 μm. Further, as the metal foil, a metal having high conductivity is preferably used, and among them, copper, copper alloy, aluminum or aluminum alloy is more preferably used. The thickness is 10μ
m to 50 μm is preferable, and 10 μm to 30 μm
More preferably m. The thickness of the entire external connection member is preferably 20 μm to 150 μm, more preferably 20 μm to 70 μm. The width of the external connection member is 0.2 mm to 1 mm
It is preferred that Moreover, it is preferable that the resin and the metal foil are laminated using an adhesive. In addition, resin,
If the thickness of both metal foils is too thick, vibration is hindered, so it is preferably not more than the above value. If the resin is less than 10 μm, the rigidity is low and it is difficult to handle, and if the metal foil is less than 10 μm, the impedance is high.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

(First Embodiment) FIG. 1 is a diagram for explaining a piezoelectric transformer according to a first embodiment of the present invention. FIG. 1A is a perspective view, FIG. 1B is a sectional view, and FIG. 1C. Is a diagram showing a stress distribution, and FIG. 1D is a diagram showing an amplitude distribution.

The piezoelectric transformer 500 of this embodiment includes a piezoelectric ceramic substrate 10. The left side 2/3 of the piezoelectric ceramic substrate 10 is the primary side, and the left side 2/3 of the upper surface 12 of the piezoelectric ceramic substrate 10 is the primary electrode 2
2 is provided, and the left side 2/3 of the lower surface 14 is provided with the primary side electrode 24. The left side 1/3 of the piezoelectric ceramic substrate 10 between the primary side electrodes 22 and 24 is polarized downward in the thickness direction, and the area between the left side 1/3 and the left side 2/3 is polarized upward in the thickness direction. With this configuration, the resonance of the entire piezoelectric ceramics substrate 10 excited by the left side 1/3 of the piezoelectric ceramics substrate 10 and the left side 1/3 to the left side 2 of the piezoelectric ceramics substrate 10.
Piezoelectric ceramics substrate 10 excited by / 3
The overall resonance increases each other's other resonances.

The right side ⅓ of the piezoelectric ceramic substrate 10 is the secondary side and is polarized in the longitudinal direction of the piezoelectric ceramic substrate 10. A secondary electrode 42 is provided on the upper surface 12 of the piezoelectric ceramic substrate 10 near the secondary end surface 17 over the entire width in the width direction of the piezoelectric ceramic substrate 10 from the width direction end surface 18 to the width direction end surface 19 of the piezoelectric ceramic substrate 10. And the boosted voltage is taken out.

The piezoelectric ceramic substrate 10 configured as described above functions as a piezoelectric transformer 500, and a vibration mode of, for example, 1.5 wavelength is generated in the longitudinal direction between the primary side end face 16 and the secondary side end face 17. Can be driven to stand. In this case, 1/6, 3/6 and 5/6 of the length of the piezoelectric ceramic substrate 10 from the primary end face 16 are nodes X, Y and Z of the longitudinal vibration, respectively. The node of vibration in the width direction is on the center line of the piezoelectric ceramic substrate 10 in the width direction.

In this embodiment, the node X of vibration in the longitudinal direction on the center line in the width direction of the piezoelectric ceramic substrate 10 is used.
At the upper and lower primary side connecting portions 61 and 63, the lead frames 62 and 64, which are copper ribbons, and the primary side electrode 2
2 and 24 are connected to each other to form a lead frame 62,
Electrical continuity is established between 64 and the primary side electrodes 22, 24.
The lead frames 62 and 64 are the piezoelectric ceramic substrate 10.
Extends in the width direction. Further, in the secondary side connection portion 71 near the secondary side end surface 17 and the width direction end surface 18 of the piezoelectric ceramic substrate 10, a flexible external conductive fixed terminal 72 formed by laminating a resin and a metal foil is used as a secondary. Side electrode 42
The metal foil of the fixed terminal 72 and the secondary electrode 42 are electrically connected to each other by being mounted on the upper side. The fixed terminals 72 extend in the width direction of the piezoelectric ceramic substrate 10.

On the primary side, the longitudinal vibration node X
Since the lead frames 62 and 64 are connected at the primary side connecting portions 61 and 63 at the position of
The inhibition of vibration due to the connection of 2, 64 is suppressed. Also,
On the secondary side, the fixed terminal 72 is not located at the node of vibration in the longitudinal direction and the width direction of the secondary connecting portion 71 where the fixed electrode 72 is connected to the secondary electrode 42, but the fixed terminal 72 is made of resin and metal. Since it is composed of a flexible member laminated with a foil, even if the piezoelectric ceramic substrate 10 expands and contracts in the longitudinal direction, it can be effectively absorbed by twisting the effect of the expansion and contraction. The influence of the expansion and contraction of the substrate 10 in the width direction can also be effectively absorbed by bending. As a result, the inhibition of vibration of the piezoelectric ceramic substrate 10 due to the attachment of the fixed terminal 72 is suppressed. Furthermore, since the fixed terminal 72 has a certain degree of rigidity, the fixed terminal 72 can also mechanically support the piezoelectric ceramic substrate 10.

(Second Embodiment) FIG. 2 is a diagram for explaining a piezoelectric transformer according to a second embodiment of the present invention. FIG. 2A is a perspective view, FIG. 2B is a sectional view, and FIG. 2C. Is a diagram showing a stress distribution, and FIG. 2D is a diagram showing an amplitude distribution.

The piezoelectric transformer 500 of the present embodiment is provided with the piezoelectric ceramic substrate 10, and the left 2/3 of the piezoelectric ceramic substrate 10 is the primary side. The structure of the primary side in this embodiment is the same as that in the first embodiment,
The structure, mounting position, extending direction, etc. of the lead frames 62, 64 are the same as those in the first embodiment, and therefore the description thereof will be omitted.

The right side 1/3 of the piezoelectric ceramic substrate 10 is the secondary side, and is polarized in the longitudinal direction of the piezoelectric ceramic substrate 10. The upper surface 12 near the secondary end surface 17 of the piezoelectric ceramic substrate 10 and the secondary electrode 33 on the lower surface 14,
34 are provided over the entire width of the piezoelectric ceramics substrate 10 from the widthwise end face 18 to the widthwise end face 19 of the piezoelectric ceramics substrate 10. Secondary side electrodes 31 and 32 are provided on the upper surface 12 and the lower surface 14 at a distance from the secondary side end surface 17 of the piezoelectric ceramic substrate 10 to about a third of the longitudinal length of the piezoelectric ceramic substrate 10. 10 from the width direction end surface 18 to the width direction end surface 1
9 are provided over the entire width of the piezoelectric ceramic substrate 10 in the width direction. With such a configuration on the secondary side, the output power is output to the secondary electrodes 31, 3
Since it is possible to take out between the secondary side electrode 33 and the secondary side electrode 33, 34, the secondary side does not need to have the same ground potential as the primary side. As a result, the circuit on the primary side and the circuit on the secondary side can be separated in terms of direct current,
Noise resistance is also improved.

In the present embodiment, in the secondary side connecting portion 81 on the center line in the width direction of the piezoelectric ceramic substrate 10,
A flexible external conductive fixed terminal 82 formed by laminating a resin and a metal foil is mounted on the secondary electrode 33, and the metal foil of the fixed terminal 82 and the secondary electrode 33 are electrically connected.
The fixed terminal 82 extends in the longitudinal direction of the piezoelectric ceramic substrate 10. Further, at the secondary side connecting portion 83 on the center line in the width direction of the piezoelectric ceramic substrate 10, a flexible external conductive fixed terminal 8 in which a resin and a metal foil are laminated.
4 is mounted on the secondary electrode 31 and fixed terminal 84
The metal foil and the secondary electrode 31 are electrically connected. The fixed terminals 84 extend in the width direction of the piezoelectric ceramic substrate 10.

On the primary side, the longitudinal vibration node X
Since the lead frames 62 and 64 are connected at the primary side connecting portions 61 and 63 at the position of
The inhibition of vibration due to the connection of 2, 64 is suppressed.

On the secondary side, the secondary electrode 33, to which the fixed terminal 82 is connected, is not located at the node of vibration in the longitudinal direction, but the fixed terminal 82 is flexible by laminating resin and metal foil. Since the piezoelectric ceramic substrate 10 is expanded and contracted in the longitudinal direction, it can be effectively absorbed by flexing the influence of the expansion and contraction. As a result, the fixed terminal 82 is attached. The inhibition of the vibration of the piezoelectric ceramic substrate 10 due to is suppressed. Also,
The secondary electrode 31 to which the fixed terminal 84 is connected is also not located at the node of vibration in the longitudinal direction, but the fixed terminal 84 is made of a flexible member in which a resin and a metal foil are laminated. Therefore, even if the piezoelectric ceramic substrate 10 expands and contracts in the longitudinal direction, the influence of the expansion and contraction can be effectively absorbed by twisting, and as a result, the vibration of the piezoelectric ceramic substrate 10 due to the attachment of the fixed terminal 84 is inhibited. Is suppressed. Furthermore, since the fixed terminals 82 and 84 have a certain degree of rigidity, the fixed terminals 82 and 84 can also mechanically support the piezoelectric ceramic substrate 10.

(Third Embodiment) FIG. 3 is a diagram for explaining a piezoelectric transformer according to a third embodiment of the present invention. FIG. 3A is a perspective view, FIG. 3B is a sectional view, and FIG. 3C. Is a diagram showing a stress distribution, and FIG. 3D is a diagram showing an amplitude distribution.

The piezoelectric transformer 500 of this embodiment is provided with the piezoelectric ceramic substrate 10, and the left 2/3 of the piezoelectric ceramic substrate 10 is the primary side. The structure of the primary side in this embodiment is the same as that in the first embodiment,
The structure, mounting position, extending direction, etc. of the lead frames 62, 64 are the same as those in the first embodiment, and therefore the description thereof will be omitted.

The right side 1/3 of the piezoelectric ceramic substrate 10 is the secondary side, and is polarized in the width direction of the piezoelectric ceramic substrate 10. In the vicinity of the widthwise end face 18 and the widthwise end face 19 of the upper surface 12 of the piezoelectric ceramic substrate 10, secondary side electrodes 52, 54 are provided from the secondary side end face 17 of the piezoelectric ceramic substrate 10 in the longitudinal direction of the piezoelectric ceramic substrate 10. It is provided so as to extend to a position at a distance of about 1/3 of the above. With such a configuration on the secondary side, the secondary side region of the piezoelectric ceramics substrate 10 is coupled with resonance in the longitudinal direction excited by the primary side region of the piezoelectric ceramics substrate 10 at Poisson's ratio and vibrates in the lateral direction. However, since mechanical strain is generated in the width direction and a potential difference is generated in the polarization direction in the width direction, the potential difference can be taken out by the secondary electrodes 52 and 54. Since the secondary electrodes 52 and 54 are provided independently of the primary side in this way, the primary side circuit and the secondary side circuit can be separated in terms of direct current, and noise resistance is improved. Also improves.

In the present embodiment, at the secondary side connecting portions 91, 93 at the position of the node Z of vibration in the longitudinal direction of the piezoelectric ceramic substrate 10, a flexible external conductive layer made of resin and metal foil is laminated. The fixed terminals 92 and 94 are the secondary side electrodes 5.
The metal foil of the fixed terminal 92 is electrically connected to the secondary electrode 52, and the metal foil of the fixed terminal 94 is electrically connected to the secondary electrode 54. The fixed terminals 92 and 94 extend in the width direction of the piezoelectric ceramic substrate 10.

On the primary side, the longitudinal vibration node X
Since the lead frames 62 and 64 are connected at the primary side connecting portions 61 and 63 at the position of
The inhibition of vibration due to the connection of 2, 64 is suppressed.

On the secondary side, the secondary side connecting portion 91 where the fixed terminal 92 is connected to the secondary side electrode 52 is located at the node Z of vibration in the longitudinal direction, but the node of vibration in the width direction. Is not in the position. In addition, the secondary side connecting portion 93 in which the fixed terminal 94 is connected to the secondary side electrode 54 also has a node Z of vibration in the longitudinal direction.
, But not at the node of the vibration in the width direction.
However, since the fixed terminals 92 and 94 are made of a flexible member in which a resin and a metal foil are laminated, even if the piezoelectric ceramic substrate 10 expands and contracts in the width direction, it is effective by flexing the influence. As a result, the inhibition of vibration in the width direction of the piezoelectric ceramic substrate 10 due to the attachment of the fixed terminals 92, 94 is suppressed. Since both the secondary side connecting portions 91 and 93 are located at the nodes of vibration in the longitudinal direction, the fixed terminals 92, 93
Piezoelectric ceramic substrate 10 by attaching 94
Inhibition of vibration in the longitudinal direction of is also suppressed. Further, since the fixed terminals 92, 94 have a certain degree of rigidity, the fixed terminals 92, 94 allow the piezoelectric ceramic substrate 10
It is also possible to provide mechanical support for the.

FIG. 4 shows, in the first to third embodiments of the present invention, a flexible external conductive fixed terminal formed by laminating a resin and a metal foil on the electrode of the piezoelectric substrate and the case side. FIG. 5 is a cross-sectional view for explaining a method of connecting to an electrode, and FIG.
It is sectional drawing for demonstrating the other connection example of the fixed terminal used in the 1st thru | or 3rd embodiment of this invention.

Here, a method of attaching the flexible external conductive fixed terminal formed by laminating resin and metal foil to the piezoelectric ceramic substrate and the case will be described.

First, as shown in FIG. 4A, the thickness is 18 μm.
Polyimide film 120 and thickness 18 provided thereon
A fixed terminal 100 was obtained by cutting a sheet made of a copper foil 110 having a thickness of 0.5 μm into a width of 0.5 mm. The copper foil 11
0 was laminated on the polyimide film 120 with an adhesive.

Next, as shown in FIG. 4B, one end of the fixed terminal 100 is arranged so that the copper foil 110 is located on the vibrator side, and a cream solder (Sn / Pb / Ag) 220 is sandwiched therebetween to perform piezoelectric vibration. It is placed on a part of the child electrode 210. A welding iron 230 was applied from above the polyimide 120 to melt the cream solder 220, and the copper foil 110 and the electrode 210 were soldered. At this time, since the fixed terminal 100 has a certain degree of rigidity, it stands substantially horizontally.

When this is put in a case, as shown in FIG. 4C, the piezoelectric ceramic substrate 10 constituting the piezoelectric vibrator is lightly pressed to a predetermined position of the case 310 with a holding jig or the like, and then the welding iron is applied from above. 230 is lowered and the other end of the fixed terminal 100, which is substantially horizontal and is self-supporting, is pressed against the conductive portion 320 on the case 310 on which the cream solder 330 is previously placed. The polyimide film 120 was heated from above and soldered. Since the heat resistant temperature of polyimide is close to 400 ° C., the polyimide film can be soldered without damage. The fixed terminal 100 is preferably curved while being fixed to the case 310. Further, it may be bent in advance as shown in FIG. As seen in the first to third embodiments, the external conductive fixed terminal of the present invention does not impede vibrations when the piezoelectric substrate is taken out in the width direction or in the longitudinal direction. Further, it may be taken out in an oblique direction between the longitudinal direction and the width direction.

[0038]

【Example】

(Example) In this example, the piezoelectric transformer 500 of the first embodiment shown in FIG. 1 is used, and the fixed terminal 100 having the structure described with reference to FIG. 4 is used as the fixed terminal 72. The piezoelectric transformer 5 is mounted by the mounting method described with reference to FIG.
00 was implemented in the case. In the present embodiment, the connecting portion between the fixed terminal 72 and the secondary electrode 42 is the piezoelectric ceramic substrate 10.
Is near the ends in the longitudinal direction and the width direction, and this is a portion that does not become a node of vibration in the longitudinal direction and the width direction.

The piezoelectric transformer 50 mounted in this way
Impedance analyzer (HP4194A) is used to check the state of 0 vibration.
It was measured in the range of the sweep frequencies 120-135KH _Z used. The size of the piezoelectric ceramic substrate 10 is 40 m in length.
m × width 8 mm × thickness 1 mm.

For comparison, the same piezoelectric transformer was suspended by a lead wire and measured in a mechanically free state. Compared to that case, the resonance impedance is about 9 on the primary side.
%, And 11% on the secondary side, but this is not a problem.

(Comparative Example) A piezoelectric transformer prepared under the same conditions as in the example was fixed on the surface thereof with a tin-plated copper wire (thickness: about 1 μm). The diameter of the copper wire was 0.2 mm in order to support the piezoelectric transformer. The impedance characteristics of the primary side and the secondary side were measured in the same manner as in the example. Compared to the case where the same piezoelectric transformer is suspended with a lead wire and measured in a mechanically free state, the resonance impedance is 40 at the primary side.
%, And increased by 20% on the secondary side.

[0042]

EFFECT OF THE INVENTION By using a flexible external conductive member in which a resin and a metal foil are laminated, one member can have two functions of supporting the piezoelectric substrate and electrically conducting, Furthermore, even if the connection is made at a position other than the vibration node, the inhibition of vibration is suppressed, and good vibration characteristics can be maintained.

[Brief description of drawings]

1A and 1B are views for explaining a piezoelectric transformer according to a first embodiment of the present invention, FIG. 1A is a perspective view, FIG. 1B is a sectional view, FIG. 1C is a view showing stress distribution, and FIG. 1D is amplitude. It is a figure which shows distribution.

2A and 2B are views for explaining a piezoelectric transformer according to a second embodiment of the present invention, FIG. 2A is a perspective view, FIG. 2B is a sectional view, FIG. 2C is a stress distribution diagram, and FIG. 2D is amplitude. It is a figure which shows distribution.

3A and 3B are diagrams for explaining a piezoelectric transformer according to a third embodiment of the present invention, FIG. 3A is a perspective view, FIG. 3B is a sectional view, FIG. 3C is a stress distribution diagram, and FIG. 3D is amplitude. It is a figure which shows distribution.

FIG. 4 is a cross-sectional view for explaining a method of connecting the external conductive fixed terminal used in the first to third embodiments of the present invention.

FIG. 5 is a sectional view for explaining another connection example of the external conductive fixed terminal used in the first to third embodiments of the present invention.

6A and 6B are views for explaining a piezoelectric transformer to which the present invention is applied, FIG. 6A is a perspective view, FIG. 6B is a sectional view, and FIG.
C is a diagram showing a stress distribution, and FIG. 6D is a diagram showing an amplitude distribution.

[Explanation of symbols]

10 ... Piezoelectric ceramics substrate 16 ... Primary end surface 17 ... Secondary end surface 18, 19 ... Width direction end surface 22, 24 ... Primary side electrode 31-34, 42, 52, 54 ... Secondary side electrode 61, 63 ... Primary side Connection part 62, 64 ... Lead frame 71, 81, 83, 91, 93 ... Secondary side connection part 72, 82, 84, 92, 94, 100 ... Fixed terminal for external conduction 110 ... Copper foil 120 ... Polyimide film 210 ... Electrodes 220, 330 ... Cream solder 500 ... Piezoelectric transformer

Claims (2)

[Claims] 1. A piezoelectric substrate made of a piezoelectric material, a plurality of electrodes provided on a surface of the piezoelectric substrate, and a flexible external conductive member in which a resin and a metal foil are laminated, A piezoelectric vibrator, wherein one end of the member is connected to the at least one electrode so that a foil is electrically conductive with at least one of the plurality of electrodes. 2. A piezoelectric substrate made of a piezoelectric material, a primary side electrode and a secondary side electrode provided on the surface of the piezoelectric substrate,
A flexible external conductive member in which a resin and a metal foil are laminated, and one end of the member is the primary electrode or so that the metal foil is conductive with the primary electrode or the secondary electrode. A piezoelectric vibrator connected to the secondary electrode, wherein the piezoelectric substrate is polarized in a predetermined direction in a plurality of regions to form a piezoelectric transformer.