JPH09275690A - Vibrating actuator drive device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize amplitude reduction for prevention of efficiency degradation by supporting a vibrating actuator at an intersection of the first mode node part and the second mode node part generated in response to the first and second driving signals inputted 'into an electromechanical converting element which is provided at the prescribed position of an elastic body. SOLUTION: Four electromechanical converting elements 102a to 102d are glued onto the front surface of an elastic body 101, and four sliding members 103a to 103d are glued onto its rear surface. In response to the first and second driving signals inputted into the electromechanical converting elements 102a to 102d, two kinds of vibrating modes of the first and second modes or the third and fourth modes are contracted into the elastic body 101. An actuator is supported at the meeting point O of an intersection between the first mode node part A and the second mode node part B generated by inputting the first driving signal, and an intersection between the third mode node part C and the fourth mode node part D. It is thus possible to minimize amplitude reduction for prevention of efficiency degradation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration actuator driving device using a two-dimensional vibration actuator that causes relative movement in two directions with a relative movement member.

[0002]

2. Description of the Related Art In Japanese Patent Laid-Open No. 5-308618, a vibration actuator that generates a longitudinal vibration mode and a bending vibration mode in an elastic body by an electromechanical conversion element and generates relative motion in a one-dimensional direction by degenerating them Discloses that the elastic body is supported at the intersection of the node in the longitudinal vibration mode and the node in the bending vibration mode.

[0003]

The present applicant has already proposed that
In a two-dimensional type vibration actuator in which two types of modes degenerate in response to the input of one drive signal and generate relative movement in two directions with a relative movement member, an abdomen and a bending vibration in a longitudinal vibration mode. It is proposed to extract the driving force at the intersection of the abdomen of the mode (Japanese Patent Application No. 6-25360).
No. 9).

However, since the above-mentioned two-dimensional type vibration actuator causes relative movements in two directions, even if the supporting and pressing in one direction are efficiently performed, the relative movement is performed in the other direction. It becomes an obstacle and causes the amplitude to be reduced. This leads to a reduction in the efficiency of the vibration actuator.

Therefore, it is an object of the present invention to provide a vibration actuator driving device which can minimize the reduction of the amplitude and prevent the reduction of the efficiency. It is another object of the present invention to provide a vibration actuator driving device capable of supporting and / or pressurizing the vibration actuator most efficiently according to the use and purpose.

[0006]

In order to solve the above-mentioned problems, the invention of claim 1 is provided with an elastic body and an electromechanical conversion element provided at a predetermined position of the elastic body, and the electromechanical conversion device is provided. In response to the first and second driving signals input to the device, the elastic body may have first and second modes or third and fourth modes.
In a vibration actuator driving device using a two-dimensional vibration actuator in which two kinds of vibration modes each degenerate and generate relative movement in two directions with a relative movement member, the first drive signal is input. The present invention is characterized in that a support mechanism for supporting the vibration actuator is provided at an intersection of the generated first mode node and the second mode node. The invention of claim 2 is an elastic body,
An electromechanical conversion element provided at a predetermined position of the elastic body, and in response to first and second drive signals input to the electromechanical conversion element, the elastic body is provided with a first mode and a second mode, or A vibration actuator driving device using a two-dimensional vibration actuator in which two types of vibration modes, each of a third mode and a fourth mode, degenerate and generate relative motion in two directions with a relative motion member. A support mechanism for supporting the vibration actuator is provided at an intersection of the node of the first mode generated by the input of the drive signal and the node of the third mode generated in response to the input of the second drive signal. It is characterized by According to a third aspect of the present invention, in the vibration actuator driving device according to the first or second aspect, an intersection of the node portion in the first mode and the node portion in the second mode generated by the input of the first drive signal. And the third signal generated by the input of the second drive signal.
It is characterized in that a support mechanism for supporting the vibration actuator is provided at a point where a node of the mode and an intersection of the node of the fourth mode coincide with each other. The invention of claim 4 is claim 1
4. The vibration actuator driving device according to claim 3, wherein the vibration actuator has longitudinal vibrations in the first mode and the third mode, and in the second mode. The fourth mode vibration is bending vibration. According to a fifth aspect of the present invention, in the vibration actuator driving device according to the fourth aspect, the vibration actuator has different mode orders of the second mode vibration and the fourth mode vibration. According to a sixth aspect of the present invention, in the vibration actuator driving device according to the fourth aspect, in the vibration actuator, the first mode vibration and the third mode vibration are primary longitudinal vibrations, and the second vibration The mode vibration is a fourth-order bending vibration, and the fourth mode vibration is a sixth-order bending vibration. The invention of claim 7 is
The vibration actuator drive device according to any one of claims 1 to 6, wherein a pressure mechanism that pressurizes the vibration actuator and the relative motion member is provided at the same position as the support mechanism. Is characterized by.
The invention of claim 8 is the vibration actuator drive device according to any one of claims 1 to 6,
Arrangement of a pressure support shaft mechanism, which is provided on the surface of the vibration actuator opposite to the side where the relative movement member is arranged, and which has the support mechanism and the pressure mechanism coaxially, and the vibration actuator of the relative movement member. And a feed mechanism that makes rolling contact with a surface opposite to the formed surface. According to a ninth aspect of the present invention, in the vibration actuator driving device according to the eighth aspect, the pressurizing support shaft mechanism is capable of adjusting a pressing force. Claim 10
In the vibration actuator drive device according to any one of claims 1 to 6, the invention of No. 1 is a through hole through which the pressure support shaft mechanism penetrates the relative motion member, and which restricts the drivable range. Is formed, and the vibration actuator and the feed mechanism are connected by the pressure support shaft mechanism. According to an eleventh aspect of the present invention, in the vibration actuator driving device according to any one of the first to sixth aspects, a first relative motion member that comes into contact with a driving force take-out portion of the vibration actuator; A second member arranged substantially parallel to the first relative motion member
Relative motion member and the first of the vibration actuators.
A pressure support shaft mechanism provided on the opposite surface of the relative motion member on which the support mechanism and the pressure mechanism are provided coaxially, and a pressure support shaft mechanism on the opposite side of the vibration actuator of the pressure support shaft mechanism. It is characterized in that it is provided with a feeding mechanism which is provided at an end portion and is in rolling contact with the second relative movement member. According to a twelfth aspect of the present invention, in the vibration actuator driving device according to any one of the first to sixth aspects, a first relative motion member that comes into contact with a driving force output side of the vibration actuator, A second relative movement member disposed substantially parallel to the first relative movement member, the support mechanism provided on a surface of the vibration actuator on the opposite side of the first relative movement member, and And a feeding mechanism that is provided at an end of the support mechanism on the opposite side of the vibration actuator and that makes rolling contact with the second relative motion member. It is characterized by that.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) FIG. 1 is a perspective view showing the outline of a first embodiment of a vibration actuator driving device according to the present invention, and FIG. 2 is a sectional view showing the driving device of the first embodiment. The vibration actuator driving device 10 according to the first embodiment includes a fixing member 13, a shaft mechanism 12, and a vibration actuator 100.
The relative movement member 11 and the feeding mechanism 14 are arranged in this order from the upper side.

The vibrating actuator 100 has two-dimensional directions with respect to a member (relative movement member 11) that comes into contact with the driving force extracting portion by generating elliptic motion due to excitation in the driving force extracting portion existing at the four corners. It is an ultrasonic motor that produces relative motion. This vibration actuator 100
Will be described in detail with reference to later-described FIGS.

The relative motion member 11 is a member that is relatively moved in a two-dimensional direction by the vibration actuator 100.

The shaft mechanism 12 is a vibration actuator 100.
Is a mechanism for supporting and pressurizing the
The vibration actuator 100 has a lower end fixed to the center of the vibration actuator 100. This mounting position is, as shown in FIG. 5 to be described later, the first mode node A generated by the first drive signal input to the vibration actuator 100.
And the intersection of the node B of the second mode and the intersection of the node C of the third mode and the node D of the fourth mode generated by the second drive signal.

As shown in FIG. 2, the shaft mechanism 12 is composed of a bolt 12a, a nut 12b, a coil spring 12c, a pressure spacer 12d, a parallel pin 12e and the like. The pressure spacer 12d has a hole into which the tip of the bolt 12a is inserted on one side, and the parallel pin 12 on the other side.
e is attached. This shaft mechanism 12 includes a bolt 1
The nut 12b fitted in 2a can adjust the pressure applied to the pressure spacer 12d via the coil spring 12c. The pressure spacer 12d also serves to insulate the shaft mechanism 12 and the vibration actuator 100 from each other.

The feed mechanism 14 is for smoothing the operation of the relative motion member 11, and the spherical object 14b is rotatably attached to the fixed base 14a.

FIG. 3 is a plan view, a side view, a front view and a bottom view of the vibration actuator of the drive unit according to the first embodiment, which is drawn by trigonometry. The vibration actuator 100 of this embodiment includes an elastic body 101 and an electromechanical conversion element 10.
2a to 102d and sliding members 103a to 103d and the like. The elastic body 101 is a plate-shaped member, and the material thereof is metal such as stainless steel or aluminum alloy, or plastic. In this embodiment, the elastic body 101 has a thickness H, a length Wx,
It is assumed that the width is Wy. Four electromechanical conversion elements 102a to 102d are attached to the front surface of the elastic body 101, and four sliding members 103a to 103d are attached to the back surface thereof.

The electromechanical conversion elements 102a to 102d are
It is an element that converts electrical energy into mechanical energy, and for example, a piezoelectric element such as PZT or an electrostrictive element such as PMN is used. The sliding members 103a to 103d are portions that come into contact with the relative motion member 11, and are the elastic body 101.
It is provided at the part where the driving force is taken out from. As the sliding members 103a to 103d, a plastic containing ethylene tetrafluoride resin (for example, Teflon: trade name of DuPont), molybdenum disulfide, or the like is used.

In this vibration actuator 100, when a drive signal is applied to the electromechanical conversion elements 102a to 102d, elliptical vibration is generated at the position where the sliding members 103a to 103d of the elastic body 101 are attached, and the sliding members are moved. 103a-1
Since 03d is in pressure contact with the relative motion member 11, it performs relative motion with the relative motion member 11.

FIG. 4 is a block diagram showing a drive circuit of the vibration actuator drive device according to the first embodiment. In FIG. 4, 111 is an input frequency instruction unit, 112 is an oscillator, 113 is a phase shift instruction unit, 114 is a phase shifter, and 115 and 1
Reference numeral 16 is an amplifier, 117 is an XY direction indicator, 118 to 1
Reference numeral 21 is an analog switch.

In the vibration actuator 100, when it is desired to move the relative motion member 11 in the (+) direction of (X), first, (X) is set by the XY direction instructing section 117, and the analog switch 118 and the analog switch 118 are set. Turn on 120,
By turning off the analog switches 119 and 121, the electromechanical conversion elements 102a and 102c are integrally grouped, and the electromechanical conversion elements 102b and 102d are grouped integrally.

Next, the phase shift instructing section 113 sets (+), and the phase shifter 114 shifts the phase by + π / 2.
In this state, from the XY direction indicator 117 (X)
When the input frequency instructing unit 111 is instructed to drive in the direction, the input frequency instructing unit 111 instructs the oscillator 112 to the first frequency. When the first frequency signal (first AC voltage) is output from the oscillator 112, one is amplified by the amplifier 116 and the electromechanical conversion elements 102b and 102d.
Entered as The other is + π / 2 by the phase shifter 114.
After being phase-shifted by only, the signal is amplified by the amplifier 115 and input to the electromechanical conversion elements 102a and 102c. As a result, the elastic body 101 receives the first longitudinal vibration and
The following bending vibration is generated, these two kinds of vibrations are degenerated, and elliptical vibration is generated at the position where the sliding members 103a to 103d of the elastic body 101 are attached, and the relative motion member 11 (X) is generated. The relative movement will be in the (+) direction.

Further, the vibration actuator 100 is
When it is desired to move the relative movement member 11 in the (−) direction of (X), first, (X) is set by the XY direction indicator 117, the analog switches 118 and 120 are turned on, and the analog switches 119 and 119 are turned on. By turning off 121, the electromechanical conversion elements 102a and 102c are integrally grouped, and the electromechanical conversion elements 102b and 102d are grouped integrally.

Next, the phase shift instruction unit 113 sets (-), and the phase shifter 114 shifts the phase by -π / 2. In this state, when the XY direction instructing unit 117 instructs the input frequency instructing unit 111 to drive in the (X) direction, the input frequency instructing unit 111 instructs the oscillator 112 to the first frequency. When the first frequency signal is output from the oscillator 112, one is amplified by the amplifier 116 and input to the electromechanical conversion elements 102b and 102d. The other phase is shifted by -π / 2 by the phase shifter 114, amplified by the amplifier 115, and input to the electromechanical conversion elements 102a and 102c. As a result, first-order longitudinal vibration and sixth-order bending vibration are generated in the elastic body 101, and these two types of vibration are degenerated, and the sliding members 103a to 103d of the elastic body 101 are attached. Elliptical vibration is generated at the position, and the relative motion member 11 is relatively moved in the (−) direction of (X).

Further, this vibration actuator 100
When it is desired to move the relative motion member 11 in the (+) direction of (Y), first, (Y) is set by the XY direction indicator 117, the analog switches 119 and 121 are turned on, and the analog switch is turned on. By turning off 118 and 120, the electromechanical conversion elements 102a and 102b are integrally grouped, and the electromechanical conversion elements 102c and 102d are grouped integrally.

Next, the phase shift instructing section 113 sets (+) and the phase shifter 114 shifts the phase by + π / 2. In this state, when the XY direction instructing unit 117 instructs the input frequency instructing unit 111 to drive in the (Y) direction, the input frequency instructing unit 111 instructs the oscillator 112 to the second frequency. When the second frequency signal (second AC voltage) is output from the oscillator 112, one of the amplifier 1
The signal is amplified by 16 and input to the electromechanical conversion elements 102c and 102d. The other phase is shifted by + π / 2 by the phase shifter 114, amplified by the amplifier 115, and input to the electromechanical conversion elements 102a and 102b. As a result, first-order longitudinal vibration and fourth-order bending vibration are generated in the elastic body 101, and these two types of vibrations are degenerated, and the sliding members 103a to 103 of the elastic body 101 are generated.
Elliptical vibration occurs at the position where d is attached, and the relative motion member 11 is made to face in the (+) direction of (Y).

Finally, this vibration actuator 100
When it is desired to move the relative motion member 11 in the (-) direction of (Y), first, (Y) is set by the XY direction indicator 117, the analog switches 119 and 121 are turned on, and the analog switch is turned on. By turning off 118 and 120, the electromechanical conversion elements 102a and 102b are integrally grouped, and the electromechanical conversion elements 102c and 102d are grouped integrally.

Next, the phase shift instructing section 113 sets (-), and the phase shifter 114 shifts the phase by -π / 2. In this state, when the XY direction instructing unit 117 instructs the input frequency instructing unit 111 to drive in the (Y) direction, the input frequency instructing unit 111 instructs the oscillator 112 to the second frequency. When the second frequency signal is output from the oscillator 112, one is amplified by the amplifier 116 and input to the electromechanical conversion elements 102c and 102d. The other phase is shifted by -π / 2 by the phase shifter 114, amplified by the amplifier 115, and input to the electromechanical conversion elements 102a and 102b. As a result, first-order longitudinal vibration and fourth-order bending vibration are generated in the elastic body 101, and these two types of vibration are degenerated, and the sliding members 103a to 103d of the elastic body 101 are attached. Elliptical vibration is generated at the position, and the relative motion member 11 is relatively moved in the (-) direction of (Y).

FIG. 5 is a diagram for explaining the principle of driving the vibration actuators of the drive device according to the first embodiment in the X and Y directions, respectively. When the length Wx of the elastic body 101 is set to Wx = 32 · π · H / (12) ^1/2 , the resonance frequency ΩL1X of the first-order longitudinal vibration is expressed by E as the longitudinal elastic coefficient of the elastic body 101 and ρ as the density. Then, ΩL1X = [π · (E / ρ) ^1/2 ] / (2 · Wx) = [(12 · E / ρ) ^1/2 ] / (64 · H).

Further, the resonance frequency of the 6th bending vibration ΩB6X
Is ΩB6X = [16 · π · π · (E · I / ρ · A) ^1/2 ] / (Wx · Wx) where I is the second moment of area of the elastic body 101 and A is the sectional area. = [(12 · E / ρ) ^1/2 ] / (64 · H), and it can be seen that the first-order longitudinal vibration and the sixth-order bending vibration coincide with each other and degenerate. Therefore, [(12 · E / ρ)
By inputting the frequency of ^1/2 ] / (64 · H),
The vibration actuator 100 moves the relative motion member 11 in the X direction.

Next, when the width Wy of the elastic body 101 is set to Wy = 72πH / (12) ^1/2 , the resonance frequency ΩL1Y of the first-order longitudinal vibration is equal to the longitudinal elastic coefficient E of the elastic body 101. , ΩL1Y = [π · (E / ρ) ^1/2 ] / (2 · Wy) = [(12 · E / ρ) ^1/2 ] / (144 · H), where ρ is the density .

Further, the resonance frequency of the fourth-order bending vibration ΩB4Y
Is ΩB4Y = [16 · π · π · (E · I / ρ · A) ^1/2 ] / (Wy · Wy) where I is the second moment of area of the elastic body 101 and A is the sectional area. = [(12 · E / ρ) ^1/2 ] / (144 · H), and it can be seen that the first-order longitudinal vibration and the fourth-order bending vibration are coincident and degenerate. Therefore, [(12 · E / ρ)
By inputting the frequency of ^1/2 ] / (144 · H), the vibration actuator 100 moves the relative motion member 11 in the Y direction.

As a matter of course, the input frequency [(12 · E / ρ) ^1/2 )] / (64 · H) for driving in the X direction,
Input frequency for driving in Y direction [(12 · E / ρ)
Since it is different from ^1/2 ] / (144 · H), driving in the X direction and driving in the Y direction can be selected.

In order to improve the precision, the electromechanical conversion elements 102a to 102d and the sliding members 103a to 103d are used.
The resonance frequency may be obtained in consideration of the influence of the mounting position of the.

In the present embodiment, as shown in FIG. 5, the sliding members 103a to 103d are the intersections of the antinode position of the vibration of the fourth bending vibration B4 and the antinode position of the vibration of the sixth bending vibration B6. Is arranged so that the X-direction driving force extracting portion and the Y-direction driving force extracting portion are shared.

(Second Embodiment) FIG. 6 is a sectional view showing a second embodiment of the vibration actuator driving device according to the present invention. In each of the embodiments described below, the parts having the same functions as those of the first embodiment described above are given the same reference numerals at the end. Further, the vibration actuator 100 is the same as that in FIGS. 3 to 5, and thus the duplicated description will be omitted.

The shaft mechanism 22 is composed of a bolt 22a, a coil spring 22c, a pressure spacer 22d and the like. The pressure spacer 22d, the vibration actuator 100, and the relative motion member 21 have holes through which the bolts 22a pass. A coil spring 22c and a pressure spacer 22d are inserted into the bolt 22a, and the vibration actuator 100
And is fixed to the feed mechanism 24 with the relative motion member 21 interposed therebetween. The relative movement member 21 has a through hole 21a formed in the center thereof, and the drivable range thereof is determined by the area of the through hole 21a. The vibration actuator driving device 10 of this embodiment supports and pressurizes the vibration actuator 100 with a simpler structure when the drivable range of the relative motion member 21 is limited, such as with an XY stage. There is an advantage that you can.

(Third Embodiment) FIG. 7 is a sectional view showing a third embodiment of the vibration actuator driving device according to the present invention. Vibration actuator driving device 3 of the third embodiment
0 is a relative movement member 31, 31-1 arranged substantially in parallel
Is fixed, and the vibration actuator 100 is a self-propelled type that moves in a two-dimensional direction. The feed mechanism 34 is attached to the shaft mechanism 32 that supports and pressurizes the vibration actuator 100, and is pressurized on the relative motion member 31-1 side.

(Fourth Embodiment) FIG. 8 is a sectional view showing a vibration actuator driving device according to a fourth embodiment of the present invention. Vibration actuator driving device 4 of the fourth embodiment
Reference numeral 0 is also a self-propelled drive device, and the vibration actuator 10
0 moves between the relative motion members 41 and 41-1 arranged substantially in parallel. The feed mechanism 44 is a pressure spacer 44a.
And a spherical object 44b, and is attached to a substantially central portion of the vibration actuator 100. Further, the pressurizing mechanism 42 is provided between the relative motion member 41-1 and the fixed member 43, and presses the vibration actuator 100 through the relative motion member 41-1 via the feed mechanism 44.

(Fifth Embodiment) FIG. 9 is a sectional view showing a fifth embodiment of the vibration actuator driving apparatus according to the present invention. Vibration actuator driving device 5 of the fifth embodiment
0 is substantially the same as that of the first embodiment, except that the shaft device 52 uses a leaf spring 52c instead of the coil spring.

(Sixth Embodiment) FIG. 10 is a sectional view showing a sixth embodiment of the vibration actuator driving apparatus according to the present invention. In the vibration actuator driving device 60 of the sixth embodiment, the shaft mechanism 62 uses the leaf spring 62c for pressurization, but the pressing point on the vibration actuator 100 is the bending vibration node C1 of FIG. The difference is that it is C2. Note that 62f is an insulating member. Here, the nodes A1 and A2 of the flexural vibration may be pressed, or the nodes A
It is also possible to use a disc spring that is pressed by 1, A2 and the nodes C1, C2.

(Modifications) The present invention is not limited to the above-described embodiments, and various modifications and changes can be made, which are also within the scope of equivalents of the present invention. The pressing method as in the fifth and sixth embodiments can be similarly applied to the second to fourth embodiments.

[0039]

As described above, according to the present invention,
Since the vibration actuator is supported and pressed in the portion that further suppresses the reduction of the mode amplitude, the reduction of the mode amplitude can be minimized and the reduction of the efficiency can be prevented.
Then, the vibration actuator driving device according to the present invention is
It has the effect that it can be most efficiently supported and pressed according to the use and purpose.

[Brief description of drawings]

FIG. 1 is a perspective view schematically showing a first embodiment of a vibration actuator driving device according to the present invention.

FIG. 2 is a cross-sectional view showing a vibration actuator driving device according to the first embodiment.

3A and 3B are a plan view, a side view, a front view, and a bottom view of the vibration actuator of the drive device according to the first embodiment, which are drawn by trigonometry.

FIG. 4 is a block diagram showing a drive circuit of the vibration actuator drive device according to the first embodiment.

FIG. 5 is a diagram illustrating the principle of driving the vibration actuators of the drive device according to the first embodiment in the X and Y directions, respectively.

FIG. 6 is a sectional view showing a vibration actuator driving device according to a second embodiment.

FIG. 7 is a cross-sectional view showing a vibration actuator driving device according to a third embodiment.

FIG. 8 is a sectional view showing a vibration actuator driving device according to a fourth embodiment.

FIG. 9 is a sectional view showing a vibration actuator driving device according to a fifth embodiment.

FIG. 10 is a cross-sectional view showing a vibration actuator driving device according to a sixth embodiment.

[Explanation of symbols]

 100 Vibration Actuator 11, 12, 13, 14, 15, 16 Relative Motion Member 21, 22, 23, 24, 25, 26 Shaft Mechanism 31, 32, 33, 34, 35, 36 Fixing Member 41, 42, 43, 44 , 45, 46 Feeding mechanism

Claims (12)

[Claims] 1. An elastic body, and an electromechanical conversion element provided at a predetermined position of the elastic body, wherein the elastic body is responsive to first and second drive signals input to the electromechanical conversion element. Two kinds of vibration modes of the first and second modes or the third and fourth modes degenerate into the body,
Produces relative movement in two directions with the relative movement member 2
In a vibration actuator driving device using a three-dimensional vibration actuator, a support for supporting the vibration actuator at an intersection of the first mode node and the second mode node generated by the input of the first drive signal. A vibration actuator driving device comprising a mechanism. 2. An elastic body and an electromechanical conversion element provided at a predetermined position of the elastic body, wherein the elastic body is responsive to first and second drive signals input to the electromechanical conversion element. Two kinds of vibration modes of the first and second modes or the third and fourth modes degenerate into the body,
Produces relative movement in two directions with the relative movement member 2
A vibration actuator driving device using a three-dimensional vibration actuator, wherein the node of the first mode generated by the input of the first drive signal and the third mode generated in response to the input of the second drive signal A vibration actuator driving device, wherein a support mechanism for supporting the vibration actuator is provided at an intersection of the nodes of the vibration actuator. 3. The vibration actuator drive device according to claim 1, wherein an intersection of the first mode node and the second mode node generated by the input of the first drive signal, A vibration actuator provided with a support mechanism for supporting the vibration actuator at a point of intersection between the node of the third mode and the node of the fourth mode generated by the input of the second drive signal. Drive. 4. The vibration actuator driving device according to claim 1, wherein the vibration actuator has longitudinal vibrations in the first mode vibration and the third mode vibration. The vibration actuator driving device, wherein the second mode vibration and the fourth mode vibration are bending vibrations. 5. The vibration actuator driving device according to claim 4, wherein the vibration actuator has different mode orders between the vibration of the second mode and the vibration of the fourth mode. apparatus. 6. The vibration actuator driving device according to claim 4, wherein in the vibration actuator, the first mode vibration and the third mode vibration are primary longitudinal vibrations, and the second vibration
A vibration actuator driving device, wherein the mode vibration is a fourth-order bending vibration, and the fourth mode vibration is a sixth-order bending vibration. 7. One of claims 1 to 6
The vibration actuator drive device according to the item 1, wherein a pressure mechanism that pressurizes the vibration actuator and the relative motion member is provided at the same position as the support mechanism. 8. Any one of claims 1 to 6
In the vibration actuator drive device according to the paragraph (3), a pressure support shaft mechanism provided on the surface of the vibration actuator on the opposite side of the relative movement member is disposed, and the support mechanism and the pressure mechanism are coaxially provided, A vibration actuator driving device comprising: a feed mechanism that makes rolling contact with a surface of the relative movement member opposite to a surface on which the vibration actuator is arranged. 9. The vibration actuator driving device according to claim 8, wherein the pressurizing support shaft mechanism is capable of adjusting a pressing force. 10. The vibration actuator driving device according to claim 1, wherein the relative movement member is penetrated by the pressure support shaft mechanism and restricts a drivable range. A vibration actuator driving device, wherein a hole is formed, and the vibration support shaft mechanism connects the vibration actuator and the feed mechanism. 11. The vibration actuator driving device according to claim 1, wherein the vibration actuator driving device is in contact with a driving force extracting portion of the vibration actuator.
Relative movement member, a second relative movement member arranged substantially parallel to the first relative movement member, and a surface of the vibration actuator opposite to the first relative movement member. A support mechanism and a pressure support shaft mechanism coaxially provided with the pressure mechanism; and a second relative motion member provided at an end of the pressure support shaft mechanism opposite to the vibration actuator and rolling with the second relative motion member. A vibration actuator driving device comprising a feed mechanism that makes contact. 12. The vibration actuator driving device according to claim 1, wherein the vibration actuator driving device is in contact with a driving force output side of the vibration actuator.
Relative movement member, a second relative movement member arranged substantially parallel to the first relative movement member, and a surface of the vibration actuator opposite to the first relative movement member. The support mechanism, a pressurizing mechanism for pressurizing the second relative movement member toward the vibration actuator, and the second relative movement member provided at an end of the support mechanism opposite to the vibration actuator. A vibration actuator drive device comprising a feed mechanism that makes rolling contact with the vibration actuator.