JPH09258642A - Production of hologram and exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form sharp interference fringes. SOLUTION: The luminous fluxes converted to luminous fluxes 301, 302 having a spread and expanded in width near a photosensitive member 81 are partly directly cast to the photosensitive member 81 to form reference light 31. The remaining part of the luminous fluxes expanded in the width are deflected or diverged so as to head toward the photosensitive member just before or near the photosensitive material and are converted to scattered light as object light 32. The luminous fluxes expanded in the width are partly converted to the scattered light via a scattering member and are directly cast to the photosensitive member 8 as object light 32. The remaining part of the luminous fluxes expanded in the width are deflected or diverged so as to head toward the photosensitive member 81 just before or near the photosensitive material 81 and aer converted to the reference light 31.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a method of manufacturing a Fresnel hologram capable of forming sharp interference fringes and an exposure apparatus.

[0002]

2. Description of the Related Art Overhead projectors and slide projectors are used by many people to view the same display image at the same place. Each of these projectors (projectors) requires a screen,
The screen is required to display an image brightly and efficiently reflect a specific light. Hologram screens have been proposed to meet such requirements (Japanese Patent Publication No. 5-85910, Japanese Patent Laid-Open No. 5-333435, Japanese Patent Laid-Open No. 5-5953, etc.).

The hologram screen manufacturing method shown in each of the above publications is based on a so-called two-beam exposure method. However, in the two-beam exposure method, as shown in FIG. 23, after separating the laser beam 30 into two optical paths forming the object light 32 and the reference light 31, the photosensitive member 81 is separated by fluctuations of air generated in the optical paths. There is a problem in that the interference fringes formed in 1 are likely to be disturbed. As a result, the sharpness of the interference fringes decreases and the hologram efficiency decreases. In the figure, reference numeral 91 is a laser light source, reference numeral 91
1 is a half mirror, reference numeral 912 is a mirror, reference numeral 913,
Reference numeral 914 is a diverging lens, and reference numeral 92 is a diffusing member recorded on the hologram. The display of the waveform of the object light 32 is a schematic representation of scattered light.

In contrast to the two-beam exposure method for the Fresnel hologram shown in FIG. 23, as shown in FIG. 24, the so-called one-beam method of the Fresnel hologram in which the optical path of the laser beam 30 is not divided into object light and reference light. There is an exposure method. In this method, since the diffusing member 92 is arranged in close contact with the photosensitive member 81, there is no clear distinction between the reference light 31 and the object light 32, the transparency as a hologram is lacking, and the screen has almost no directivity. I will end up.

There is also a method of using a master hologram in which a diffusing member is recorded instead of the diffusing member 92 shown in FIG. 24 (see Japanese Patent Laid-Open No. 232854/1993). In this case, there is a further problem that noise contained in the master hologram is recorded on the hologram screen. Moreover, instead of recording a specific object on a hologram, as shown in FIG.
From the object light 321 and the reference light 31 due to the reflected light of 32,
A method is known in which a simple interference fringe is formed on the photosensitive member 81 and the sensitivity of the photosensitive member 81 is evaluated based on the quality of the interference fringe.

A method of forming a Fresnel type hologram screen by replacing one of the mirrors 931 and 932 in FIG. 25 with a diffusing member is also conceivable. However, in this case, since the solid angle of the object light 321 (reference light 31) with respect to the photosensitive member 81 is small, the photosensitive member 81 and the mirror 93
It is necessary to increase the distance between the first and the third air ports 1,932, and a long air layer between them causes air fluctuations, and similarly, interference fringes are likely to be disturbed. The disturbance of the interference fringes due to the fluctuation of the medium (air) in the optical path is not a problem that occurs only in the case of a hologram screen, but is a general problem in manufacturing Fresnel holograms.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and suppresses the disturbance of interference fringes due to the fluctuation of the medium (air) in the optical path during exposure, and sharp interference fringes. The present invention aims to provide a method of manufacturing a Fresnel hologram with high efficiency by forming a film and a hologram exposure apparatus.

[0008]

According to the hologram manufacturing method of the present invention, the light beam is converted into a light beam having a spread in the vicinity of the photosensitive member, and a part of the widened light beam is directly irradiated to the photosensitive member for reference. Since light is used, the optical path of the reference light to the photosensitive member after the optical paths of the object light and the reference light are separated is shortened, and disturbance such as fluctuation of the medium (air) is unlikely to occur between them.

Further, the object light changes the remainder of the light beam expanded near the photosensitive member as scattered light and is deflected immediately before or near the photosensitive member. That is, the angle of the object light directed to the photosensitive member can be freely changed by the deflecting member, and the viewing area of the hologram screen can be easily adjusted. Also, the optical path length of the object light after the optical paths of the object light and the reference light are separated can be shortened. As described above, the optical paths of the reference light and the object light after the optical paths of the object light and the reference light have been separated are short, so that disturbances such as fluctuations of the medium (air) between them are less likely to occur, and the interference fringes are disturbed. Less likely to occur. Therefore, according to the manufacturing method of the first aspect, it is possible to manufacture a Fresnel hologram having stable interfering fringes during exposure and high transparency.

Further, according to the hologram manufacturing method of the third aspect, in the vicinity of the photosensitive member, it is converted into a light beam having a divergence, and a part of the widened light beam is converted into scattered light, which is directly applied to the photosensitive member. Since the object light is irradiated to form the object light, the optical path of the object light reaching the photosensitive member after the optical paths of the object light and the reference light are separated from each other is short, and disturbance such as fluctuation of the medium (air) is unlikely to occur therebetween.

Further, the reference light is deflected or diverged in the remainder of the light beam expanded in the vicinity of the photosensitive member immediately before or in the vicinity of the photosensitive member to enter the photosensitive member. Therefore,
The optical path length of the reference light after the optical paths of the object light and the reference light are separated can also be shortened. As described above, the optical paths after the optical paths of the object light and the reference light are separated from each other are short, so that disturbances such as fluctuations of the medium (air) between them are less likely to occur,
Disturbance of interference fringes is less likely to occur. Therefore, according to the manufacturing method of the third aspect, it is possible to manufacture a Fresnel hologram having stable interfering fringes during exposure and high transparency.

As described in claim 4, in the manufacturing method according to claim 1 or 3, one of the optical paths of the object light or the reference light connecting the diffusing member or the deflecting or diverging member and the photosensitive member. It is preferable that the part or the whole is made of a solid translucent member. Even if the optical paths of the object light and the reference light are shortened by the manufacturing method according to the first to third aspects, the fluctuation cannot be eliminated if the medium of the optical path is a fluid such as air. However, by using a solid light-transmissive member for the optical path of the reference light or the object light, fluctuations due to the optical path medium there can be eliminated, and fluctuations due to the optical path medium can be further suppressed. is there.

In the invention of claim 1, as one of the methods for forming the optical path by a solid light-transmitting member, there is a method of using a prism as described in claim 2. That is, a prism is arranged in the optical path of the widened light beam,
A photosensitive member is closely arranged on the first surface of the prism, the widened light beam is made incident from the second surface of the prism and a part of the light beam is used as reference light, and a reflecting member is closely arranged on the third surface of the prism. , The light reflected by the third surface is the object light.

According to the manufacturing method of claim 5,
It is possible to form a hologram screen over the entire surface of a large photosensitive member. That is, a plurality of pairs of a relatively small-sized diffusing member and a deflecting or diverging member capable of irradiating the object light or the reference light only to a local portion of the photosensitive member are arranged, and a plurality of the above-mentioned members are formed by one exposure process. Interference fringes are formed locally on the large photosensitive member. Then, after moving the photosensitive member or the diffusing member and the deflecting or diverging member and performing similar exposure, a hologram can be formed on the entire surface of the photosensitive member.

The method for manufacturing a hologram according to any one of claims 1 to 5 is not effective only for manufacturing a hologram screen, and as described in claim 14, an optical element other than the diffusing member (for example, a lens, It is also effective when recording holograms (mirrors, prisms, etc.).

The manufacturing method according to claim 1 is the method according to claim 6.
It can be realized using the hologram exposure apparatus described. That is, a photosensitive member that forms a hologram is attached to a holding member, coherent light is emitted from a light source, and the light emitted from the light source is converted into a spread light beam in the vicinity of the holding member via a widening irradiation means. The photosensitive member is directly irradiated with a part of the widened light beam as reference light.
Then, the residual of the widened light flux is converted into scattered light by the diffusing member, and the direction of the optical path is changed by the deflecting member to be incident on the photosensitive member as object light. The diffusing member and the diverting member can be integrated as described in claim 7 to form the diverting member (Embodiment 1 and reference numeral 21 in FIG. 1).

The manufacturing method according to the third aspect can be realized by the exposure apparatus according to the eleventh aspect. That is, a photosensitive member for forming a hologram is attached to a holding member, coherent light is emitted from a light source, and the light emitted from the light source is converted into a light beam having a spread in the vicinity of the holding member via a widening means. Then, a part of the widened light beam is converted into scattered light through a diffusing member and directly radiated as object light to the photosensitive member, and the direction of the optical path is changed by a member that diverts or diverges the remaining part of the widened light beam. The light is changed or diverged to enter the photosensitive member as reference light.

Further, in the exposure apparatus according to claim 6, claim 7, or claim 11, as described in claim 12, a part or the whole of the optical path of the object light connecting the diffusion member and the photosensitive member is formed. It is preferable to use a solid translucent member. That is, as described in the description of the invention of claim 4, by using a solid light-transmitting member for the optical path, fluctuations of the optical path medium (air) there can be eliminated.

In the invention according to claim 6, one of the specific methods for forming the optical path by a solid light-transmitting member.
As one of the methods, there is a method using a prism as described in claim 7. That is, a prism is arranged in the optical path of the widened light beam, and the photosensitive member is closely arranged on the first surface of this prism.
Light incident from the second surface of the prism, the part of which is used as reference light, a reflection member is closely arranged on the third surface of the prism, and light incident from the second surface and reflected by the third surface Is the object light. As a result, the fluctuations of the medium in the optical paths of the object light and the reference light in the prism can be eliminated, and more stable and sharp interference fringes can be formed.

The prism according to claim 7 can be composed of a first prism that does not diffuse transmitted light and a second prism that diffuses transmitted light, as described in claim 8. With such a configuration, the second prism also serves as a diffusing member, and the first and second prisms form the optical paths of the object light and the reference light by a solid translucent member, and the medium in the optical path ( Fluctuation of air) can be suppressed. Further, as described in claim 9, a diffuser for diffusing transmitted light is provided in a part of the optical path of the object light of the prism according to claim 7, and scattered light is formed without separately disposing a diffusing member. You can also do it.

On the other hand, the manufacturing method according to claim 5 can be realized by using the hologram exposure apparatus according to claim 13. That is, a plurality of sets of relatively small-sized diffusing members and deflecting or diverging members capable of irradiating the object light only to a local part of the photosensitive member are arranged, and the photosensitive member, or the diffusing member and the deflecting member are arranged. Alternatively, a moving means capable of moving the set of diverging members is provided. By operating the moving means and exposing the photosensitive member a plurality of times, it is possible to sequentially form interference fringes in different local areas and form holograms on the entire surface of the photosensitive member. Then, a large hologram screen can be manufactured.

The hologram exposure apparatus according to any one of claims 6 to 13 is not effective only in producing a hologram screen, and as described in claim 15,
It is also effective for an exposure device that records optical elements (for example, lenses, mirrors, prisms, etc.) other than the diffusing member as Fresnel holograms. Further, in each of the above inventions, it is needless to say that the optical path lengths of the reference light and the object light from the light source to the photosensitive member must be equal to or less than the coherence length in both cases of the object light and the reference light. Absent.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiment 1 In this embodiment, as shown in FIG. 1, a light source 11 that emits coherent light 30 and a photosensitive member 81 that forms a hologram.
And a holding member 12 for mounting the light source 30 arranged near the holding member 12 to convert the light 30 emitted from the light source 11 into spread light beams 301 and 302 and to widen the light beam 30.
Widening irradiation means (diverging lens 15 and collimating lens 16) for directly irradiating a part of 2 as the reference light 31 to the photosensitive member 81, and the remaining part of the widened light beam 302 that does not directly enter the photosensitive member 81 is the object light. Fresnel having a diffusing member (diverting diffusing member 21) for converting into scattered light as 32 and a diverting member (diverging diffusing member 21) for changing the direction of the optical path to make the object light 32 incident on the photosensitive member 81. 1 is an exposure apparatus 1 for a hologram screen.

The diffusing member and the diverting member are integrated as a diverting member 21. In the figure, reference numeral 13 is a mirror for reflecting the coherent light 30, and the light 30 reflected by the mirror 13 is converted into a divergent light beam 301 by the diverging lens 15 and then the collimating lens 1
It is converted into a parallel light beam 302 by 6. Also, the light source 1
The optical path length from 1 to the photosensitive member 81 is equal to or less than the coherence length for both the object light 32 and the reference light 31.

The light 30 emitted from the light source 11 is, for example, laser light having a wavelength of 514.5 nm, and the photosensitive member 81 is, for example, photopolymer. The redirecting / diffusing member 21 is provided with an aluminum film as a reflecting member on the back surface of frosted glass, opal glass or the like for diffusing transmitted light.

According to the method of manufacturing a hologram using the above-described exposure apparatus 1, near the photosensitive member 81, it is converted into a divergent parallel light beam 302, and a part of the expanded light beam 302 is directly irradiated to the photosensitive member 81. To form the reference light 31.
Therefore, the optical path of the reference light 31 to the photosensitive member 81 after the optical paths of the object light 32 and the reference light 31 are separated is shortened, and disturbance such as fluctuation of the medium (air) is unlikely to occur between them.

On the other hand, the object light 32 deflects the remainder of the light beam 302, which has been widened in the vicinity of the photosensitive member 81, into scattered light through the deflecting and diffusing member 21 and immediately before the photosensitive member 81. The angle of the object light 32 directed to the photosensitive member 81 can be freely changed by the deflection diffusion member 21, and the reflected light directed to the photosensitive member 81 can be easily widened or diverged. Therefore, FIG.
Unlike the above optical system, the optical path length of the object light 32 after the optical paths of the object light 32 and the reference light 31 are separated can also be shortened.

As described above, according to the present apparatus 1, the object light 3
The optical path after the optical paths of 2 and the reference light 31 are separated from each other in the light flux 302 can be shortened. Therefore, disturbance such as fluctuation of the medium (air) between them is less likely to occur, and the photosensitive member 8
The interference fringes formed in No. 1 are less likely to be disturbed. Therefore, according to the hologram screen manufacturing method using the exposure apparatus 1 of the present example, it is possible to manufacture a Fresnel hologram screen with stable interference fringes during exposure and high transparency.

Embodiment 2 As shown in FIG. 2, this embodiment is similar to Embodiment 1 except that the widened divergent light beam 301 is not converted into a parallel light beam.
It is another embodiment example in which the diffuser member 22 and the plane mirror 23 as a deflecting member are separated from each other while being 1 and the object light 32. Therefore, the collimator lens 16 of FIG. 1 is not needed. Further, the optical path length between the diffusion member 22 and the photosensitive member 81 can be made longer than that in the first embodiment. Moreover, the viewing angle of the hologram screen can be adjusted by adjusting the incident angle of the object light 32 using the plane mirror 23. Others are the same as those in the first embodiment.

Third Embodiment As shown in FIG. 3, this embodiment is similar to the first embodiment except that the widened divergent light beam 301 is not converted into a parallel light beam.
1 and the object light 32 are formed, and the deflecting and diffusing member 211 is provided with the reflection characteristic of a concave mirror. Therefore, only the reflected light around the central portion of the divergent light reflected by the turning diffusion member 211 can be made incident on the photosensitive member 81. Light present in the central portion of the divergent light has little chromatic dispersion, and the divergent light with little chromatic dispersion is incident on the photosensitive member 81, so that the hologram screen having a small chromatic dispersion and good reproducibility is obtained. be able to.

Fourth Embodiment In this embodiment, as shown in FIG. 4, in the second embodiment, the widened divergent light beam 301 is converted into a parallel light beam 302 via a collimator lens 16, and the reference light 31 and the object light are converted. 32. Others are the same as those in the second embodiment.

Embodiment 5 In this embodiment, as shown in FIG. 5, in Embodiment 2, a prism 25 is arranged in the optical path of the expanded light beam 301,
The photosensitive member 81 is closely arranged on the first surface 251 of the prism 25, and the diverging lens 15 is arranged so that the light beam 301 expanded from the second surface 252 of the prism 25 is incident on the third surface 253 of the prism 25. This is another embodiment in which the plane mirror 23 is closely arranged.

By making part of the optical paths of the reference light 31 and the object light 32 the prism 25 which is a solid translucent member, it is possible to eliminate the fluctuation of the medium in the prism 25 and to further stabilize the interference. It becomes possible to form stripes. Others are the same as those in the second embodiment.

Embodiment 6 In this embodiment, as shown in FIG. 6, the prism 25 is arranged in the optical path of the expanded light beam 302 in Embodiment 1 as shown in FIG.
The photosensitive member 81 is closely arranged on the first surface 251 of the prism 25, and the diverging lens 15 is arranged so that the light beam 301 expanded from the second surface 252 of the prism 25 is incident on the third surface 253 of the prism 25. It is another embodiment example in which the diffusion member 21 is closely arranged.

By making part of the optical paths of the reference light 31 and the object light 32 the prism 25 which is a solid translucent member, it is possible to eliminate the fluctuation of the medium in the prism 25 and to further stabilize the interference. It becomes possible to form stripes. Others are the same as in the first embodiment.

Embodiment 7 In this embodiment, as shown in FIG. 7, in Embodiment 5, the first prism 2 which does not diffuse transmitted light is used.
This is another embodiment in which the first prism 61 and the second prism 262 that diffuses the transmitted light are used, and the second prism 262 doubles as a diffusing member. Others are the same as in the fifth embodiment.

Embodiment 8 In this embodiment, as shown in FIG. 8, in Embodiment 7, the prism is composed of two transparent prisms 271, 272, and transmitted light is transmitted to the boundary portion of both prisms 271, 272. It is another embodiment example in which a diffusion unit 273 for diffusion is arranged. In this example, since the thickness of the diffusing portion 273 can be reduced, it is possible to obtain a hologram screen in which the viewing area is limited as compared with the seventh embodiment. Others are the same as in the seventh embodiment.

Embodiment 9 In this embodiment, as shown in FIG. 9, a transmission type optical element (lens 28) is arranged in the optical path of the object light 32 in place of the diffusing member 22 in Embodiment 2, and a hologram is obtained. 8 is an example of an embodiment in which the lens 28 is recorded on the optical disc. Others are the same as those in the second embodiment.

Embodiment 10 In this embodiment, as shown in FIGS. 10 and 11, diffusion of a relatively small size capable of irradiating the object light 32 only to the local portion 811 (FIG. 11) of the photosensitive member 81. A plurality of sets of the member 22 and the reflecting member (plane mirror) 23 are arranged and the photosensitive member 8
1 is provided with a moving means (not shown) capable of moving in parallel as shown by an arrow A in FIG.
1 is a hologram exposure apparatus 1 that sequentially forms interference fringes. In the figure, reference numeral 221 is a non-diffusive translucent member.

That is, as shown in FIG. 11, the photosensitive member 81
A plurality of sets of diffusing members 22 and reflecting members 23 are arranged at regular intervals on the surface of. Then, the local portion 811 of the photosensitive member 81
Interference fringes are formed on the local portion 811 by the reference light 31 that is directly incident on the object 8 and the object light 32 that is transmitted through the diffusing member 22 and then reflected by the reflecting member 23 and is incident on the local portion 811.

When a desired interference fringe is formed on the local portion 811, the photosensitive member 81 is moved to form a similar interference fringe on another local portion 811, and a hologram screen is formed on the entire surface of the photosensitive member 81. As described above, a large hologram screen can be formed by performing the exposure a plurality of times. Others are the same as in the first embodiment.

Embodiment 11 In this embodiment, as shown in FIG. 12, a plurality of the diffusing members 22 and the reflecting members 23 in Embodiment 10 are connected and integrated with each other through a light transmitting member 222. It is another embodiment example. As a result, it is possible to obtain an effect that there is no space when closely contacting with the photosensitive member 81 and no noise is reflected. Others are the same as in the tenth embodiment.

Embodiment 12 As shown in FIG. 13, this embodiment is different from Embodiment 10 in that a lens 24 that diverges the reference light 31 as a diverging member between adjacent diffusing members 22 without providing the reflecting member 23.
It is an embodiment example of the exposure apparatus 1 provided with. And Figure 1
As shown in FIG. 4, a part of the expanded parallel light beam 302 is
It is converted into scattered light through the diffusing member 22 and enters the local portion 812 of the photosensitive member 81 as object light 32. On the other hand, a part of the parallel light flux 302 is a light flux 3 diverged by the diverging lens 24.
03, part of which is similarly used as the reference light 31 in the local area 8
It is incident on 12 and an interference fringe is formed on the local part 812.

The local light 8 is generated by the reference light 31 and the object light 32.
When the desired interference fringes are formed on 12, the photosensitive member 81 is moved as shown by an arrow A to form a similar interference fringe on another local portion 812, and a hologram screen is formed on the entire surface of the photosensitive member 81. Then, a large hologram screen can be formed by performing exposure a plurality of times. Others are the same as in the tenth embodiment.

Embodiment 13 In this embodiment, as shown in FIG. 15, a transmission / scattering lens 25 is arranged in place of the diffusing member 22 in the embodiment 12 and a transparent diverging lens 24 and a transmission / scattering lens 25 are provided. It is another embodiment example in which they are alternately arranged and configured in a fly-eye lens shape. As a result, the area of the local portion 812 that forms the interference fringes by one exposure can be made wider than that of the twelfth embodiment. Others are the same as in the twelfth embodiment.

Embodiment 14 In this embodiment, as shown in FIG. 16, in place of the diffusion member 22 in Embodiment 11, a deflection diffusion member 21 similar to that shown in Embodiment 1 (FIG. 1) is used. A plurality of optical members 222 are arranged via the optical member 222. Others are the same as in the eleventh embodiment.

Embodiment 15 As shown in FIG. 17, this embodiment is the same as Embodiment 5 in which the diffusion member 22 and the reflecting member 23 are arranged on two surfaces of the prism 25 in Embodiment 10. It is another embodiment example in which a plurality of sets similar to the above are arranged. As a result, as described in the fifth embodiment, the prism 2
It is possible to obtain the effect of suppressing fluctuation in No. 5. Others are the same as in the tenth embodiment.

Embodiment 16 As shown in FIG. 18, this embodiment is another embodiment in which the expanded light beam is changed from the parallel light 302 to the divergent light 301 in the embodiment 15. Others are the same as those in the fifteenth embodiment.

Seventeenth Embodiment Although a uniform hologram is formed on the photosensitive member 81 in the sixteenth embodiment, in this embodiment, as shown in FIG. 19, the prisms 254 to 257 have different angles in the sixteenth embodiment. This is an example of an embodiment in which the holograms formed at the same time on the surface of the photosensitive member 81 can be non-uniform. Others are the same as those in the sixteenth embodiment.

Embodiment 18 In this embodiment, as shown in FIG. 20, an embodiment in which a widening member is provided inside the light source and a widened collimated light 302 is emitted is used in the embodiment 15. Here is an example. Therefore, the diverging lens 15 and the collimating lens 1
6 is unnecessary.

Embodiment 19 In the exposure apparatus 10 of this embodiment, as shown in FIG. 21, a photosensitive member 81 is attached to a part of a housing 41 having a spherical inner wall surface 410 for diffuse reflection, and is provided in the housing 41. The laser light 30 is made incident from the incident window 411 through the same optical system as shown in FIG. And housing 4
The laser light 30 incident on the laser beam No. 1 is diverged via the convex reflecting mirror or the convex reflecting half mirror 42 as the widening member, and a part of the primary reflected light 305 indicated by a black arrow is used as the reference light 311 as the photosensitive member 81. Incident directly on.

The other primary reflected light 305 is diffused and reflected by the inner wall surface 410 of the housing 41 and is reflected once or a plurality of times to show N-th reflected light 306 (N = 2, 3, 3).
...) and enters the photosensitive member 81 as the object light 321. As a result, the reference light 31
1 and the object light 321 form an interference fringe, and the hologram becomes a hologram screen in which a diffuser is recorded.

The inner wall surface 410 is coated with a reflective diffusive substance or white paint to scatter the incident laser light 30. That is, the inner wall surface 410 is coated with a white paint containing aluminum oxide or barium oxide as a main component, or a substance having a high scattering property such as glass bead powder. The inside of the housing 41 is filled with air or a highly transparent substance such as resin.

Others are similar to those of the first embodiment, and similar effects can be obtained. The entrance window 41
The light that enters the housing 41 from 1 does not need to be limited to a laser beam, and may be parallel light or divergent light.

Embodiment 20 In this embodiment, as shown in FIG. 22, a plurality of housings 41 of Embodiment 19 and a widening member composed of a convex reflecting half mirror 42 are provided, and the photosensitive member 81 is exposed by one exposure. The exposure apparatus 10 forms interference fringes on a plurality of local areas. Then, moving means (not shown) is provided, and the photosensitive member 8
1 is moved to sequentially form interference fringes at different positions on the photosensitive member 81. Others are the same as those in the nineteenth embodiment.

[Brief description of drawings]

FIG. 1 is a system configuration diagram of a hologram exposure apparatus according to a first embodiment.

FIG. 2 is a system configuration diagram of a hologram exposure apparatus according to a second embodiment.

FIG. 3 is a system configuration diagram of a hologram exposure apparatus according to a third embodiment.

FIG. 4 is a system configuration diagram of a hologram exposure apparatus according to a fourth embodiment.

FIG. 5 is a system configuration diagram of a hologram exposure apparatus according to a fifth embodiment.

FIG. 6 is a system configuration diagram of a hologram exposure apparatus according to a sixth embodiment.

FIG. 7 is a system configuration diagram of a hologram exposure apparatus according to a seventh embodiment.

FIG. 8 is a system configuration diagram of a hologram exposure apparatus according to an eighth embodiment.

FIG. 9 is a system configuration diagram of a hologram exposure apparatus according to a ninth embodiment.

FIG. 10 is a system configuration diagram of a hologram exposure apparatus according to a tenth embodiment.

11 is an enlarged view of the vicinity of the diffusion member and the reflection member of FIG.

FIG. 12 is a system configuration diagram of a hologram exposure apparatus according to an eleventh embodiment.

FIG. 13 is a system configuration diagram of a hologram exposure apparatus according to a twelfth embodiment.

FIG. 14 is an enlarged view of the vicinity of the diffusion member and the reflection member of FIG.

FIG. 15 is a system configuration diagram of a hologram exposure apparatus according to a thirteenth embodiment.

FIG. 16 is a system configuration diagram of a hologram exposure apparatus according to a fourteenth embodiment.

FIG. 17 is a system configuration diagram of a hologram exposure apparatus according to a fifteenth embodiment.

FIG. 18 is a system configuration diagram of a hologram exposure apparatus of the sixteenth embodiment.

FIG. 19 is a system configuration diagram of a hologram exposure apparatus according to a seventeenth embodiment.

FIG. 20 is a system configuration diagram of a hologram exposure apparatus of the eighteenth embodiment.

FIG. 21 is a system configuration diagram of a hologram exposure apparatus according to a nineteenth embodiment.

FIG. 22 is a system configuration diagram of a hologram exposure apparatus according to a twentieth embodiment.

FIG. 23 is a system configuration diagram (two-beam method) of an exposure optical system of a conventional hologram screen.

FIG. 24 is a system configuration diagram (one-beam method) of an exposure optical system of another conventional hologram screen.

FIG. 25 is a system configuration diagram of an exposure optical system that forms a hologram for a sensitivity test of a photosensitive member.

[Explanation of symbols]

 301, 302 ... Widened light flux, 31 ... Reference light, 32 ... Object light, 81 ... Photosensitive member,

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Atsuro Ishizuka 14 Iwatani, Shimohakaku-cho, Nishio City, Aichi Prefecture Japan Auto Parts Research Institute, Inc.

Claims (15)

[Claims] 1. A coherent light beam is converted into a divergent light beam in the vicinity of a photosensitive member, and a part of the widened light beam is directly applied to the photosensitive member as a reference light, which is directly incident on the photosensitive member. The remaining of the widened light beam, which has no width, is redirected to the photosensitive member immediately before or in the vicinity of the photosensitive member, and is converted into scattered light through a diffusing member into object light. A method of manufacturing a Fresnel hologram screen, characterized in that interference fringes are formed on the photosensitive member by light and object light. 2. The prism according to claim 1, wherein a prism is arranged in an optical path of the widened light beam, a photosensitive member is closely arranged on a first surface of the prism, and the widened light beam is spread from the second surface of the prism. A method for manufacturing a Fresnel hologram screen, characterized in that a reflecting member as the deflecting member is closely arranged on the third surface of the prism for exposure and is exposed. 3. An object which converts coherent light into a divergent light beam in the vicinity of the photosensitive member, converts a part of the widened light beam into scattered light through a diffusing member, and irradiates the photosensitive member directly. Light, and the remainder of the widened light beam is deflected or diverged so that the direction of the optical path is toward the photosensitive member immediately before or in the vicinity of the photosensitive member, and is used as reference light.
A method for manufacturing a Fresnel hologram screen, characterized in that interference fringes are formed on the photosensitive member by the reference light and the object light. 4. The solid or transparent member according to claim 1, wherein a part or the whole of the optical path of the object light or the reference light that connects the diffusion member or the member for deflecting or diverging and the photosensitive member is formed. A method of manufacturing a Fresnel hologram screen, which comprises constructing and exposing. 5. The diffusion member of any one of claims 1 to 4 having a relatively small size capable of irradiating only a local portion of the photosensitive member with the object light and the reference light, and the deflection. Or arrange multiple sets of divergent members,
Interference fringes are formed locally on a plurality of the photosensitive members by one exposure process, and then the photosensitive member or the set of the diffusing member and the deflecting or diverting member is sequentially moved to perform the same exposure. A method of manufacturing a Fresnel hologram screen, characterized in that the same interference fringes are formed on other local portions of the photosensitive member by performing the above. 6. A light source that emits coherent light, a holding member to which a photosensitive member that forms a hologram is attached,
Widening irradiating means arranged near the holding member for converting light emitted from the light source into a divergent light beam and irradiating a part of the widened light beam as a reference light directly to the photosensitive member, and the photosensitive member. A diffusing member that converts the residual of the widened light beam that does not directly enter into the diffused light as object light, and the direction of the residual light beam that has been widened before or after the widening member. An exposure apparatus for a Fresnel hologram screen, comprising: a deflecting member that is incident on a photosensitive member. 7. The Fresnel hologram screen exposure apparatus according to claim 6, wherein the diffusion member and the deflection member are integrated to form a deflection diffusion member. 8. The prism according to claim 6 or 7, wherein a prism is arranged in the optical path of the widened light beam, a photosensitive member is closely arranged on the first surface of the prism, and the second surface of the prism is connected to the first surface. An exposing device for a Fresnel hologram screen, wherein the widening irradiating means is arranged so that the widened light beam is incident, and a reflective optical element as the deflecting member is closely arranged on the third surface of the prism. 9. The prism according to claim 8, wherein the prism comprises a first prism that does not diffuse transmitted light and a second prism that diffuses transmitted light, and the first prism forms the first surface. An exposure apparatus for a Fresnel hologram screen, wherein the second prism forms the third surface. 10. The Fresnel hologram screen exposure apparatus according to claim 8, wherein a diffusion portion for diffusing transmitted light is provided in a part of an optical path of the object light of the prism. 11. A light source that emits coherent light,
A holding member to which a photosensitive member for forming a hologram is attached, a widening member arranged in the vicinity of the holding member for converting the light emitted from the light source into a spread light beam, and a part of the widened light beam scattered light And a diverting member for converting the light into an object light and irradiating it directly to the photosensitive member, and a deflecting member or a diverging member for diverting or diverging the remainder of the widened light beam and making it enter the object light irradiation portion of the photosensitive member as reference light. An exposure apparatus for a Fresnel hologram screen, comprising: 12. The optical path of object light or reference light that connects the diffusing member or the deflecting or diverging member to a photosensitive member according to any one of claims 6, 7 and 11, wherein a part or the whole of the optical path of the reference light is provided. An exposure apparatus for a Fresnel hologram screen, characterized in that: is composed of a solid translucent member. 13. The method according to any one of claims 6 to 12.
In the paragraph, while arranging a plurality of sets consisting of a relatively small size of the diffusing member and a member for diverting or diverging the object light and the reference light only on a local portion of the photosensitive member, A moving means capable of moving the photosensitive member or the set including the diffusing member and the deflecting or diverging member is provided, and the moving means is operated to perform a plurality of exposures so that different local portions of the photosensitive member are sequentially exposed. An exposure device for a Fresnel hologram screen, which is characterized by forming interference fringes. 14. The optical device according to claim 1, wherein an arbitrary single or a plurality of optical elements for recording in a hologram are arranged in the optical path of the object light in place of the diffusing member. A method of manufacturing a Fresnel holographic optical element. 15. The semiconductor device according to claim 6, wherein:
2. An exposure apparatus for a Fresnel-type holographic optical element, wherein in place of the diffusing member, an arbitrary single or plural optical elements for recording on a hologram are arranged in the optical path of object light.