JPH09236490A - Color filter density measuring method and apparatus - Google Patents

Abstract

(57) 【Abstract】 PROBLEM TO BE SOLVED: To realize a technology capable of measuring the color density of a color filter substrate with high sensitivity and capable of being installed even in an environment using a photosensitive material. SOLUTION: A light projecting means for irradiating the substrate with light from one surface of a color filter substrate having a characteristic of having a high light transmittance in a predetermined wavelength region of visible light, and a color filter substrate arranged on the other side of the color filter substrate. Has a light receiving means for measuring the light passing through, and the calculating portion, the light receiving means measures the amount of light of a wavelength having a low light transmittance of the color filter substrate, and the calculating portion determines the color of the color filter substrate from the output of the light receiving means. Find the darkness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter density measuring method and apparatus for measuring the color strength of a color filter substrate by light, and, for example, the characteristics of a three-color filter used in a liquid crystal display panel or the like. The color strength of the color filter substrate provided on one substrate is measured.

[0002]

2. Description of the Related Art In the following description, a red, green and blue filter substrate used for a liquid crystal display panel, that is, an R-G-B tri-color filter substrate will be described as an example. FIG. 7 is an explanatory diagram showing a general manufacturing process of an R-G-B three-color filter substrate, and description will be given using this. (1) As shown in FIG. 7A, a black matrix layer (hereinafter referred to as BM layer) 12 is formed on the transparent substrate 11. The BM layer 12 is usually a metal layer and its shape is R-G.
-B The contour of the portion that becomes each pixel is configured.
Since the BM layer 12 is not directly related to the present invention, description of its manufacturing method is omitted. (2) After forming the BM layer 12 on the transparent substrate 11, FIG.
As shown in (b), the R color filter layer 13 is formed on the transparent substrate 11
Apply evenly over one surface. (3) After that, an unnecessary portion is removed by a photo-etching technique as shown in FIG. As a result, the R color pixel 23 is formed only in the required portion. (4) After forming the R-color pixels 23 on the transparent substrate 11, FIG.
As shown in (d), the G color filter layer 14 is formed on the transparent substrate 11
Apply evenly over one surface. (5) After that, an unnecessary portion is removed by a photo etching technique as shown in FIG. As a result, a portion to be the G color pixel 24 is formed only in a necessary portion, so that the R-G pixels are formed adjacent to each other. (6) After the R pixel 23 and the G pixel 24 are formed on the transparent substrate 11, the B color filter layer 15 is formed as shown in FIG.
Is uniformly and uniformly coated on the transparent substrate 11. (7) After that, an unnecessary portion is removed by a photo etching technique as shown in FIG. As a result, a portion that becomes the B-color pixel 25 is formed only in a necessary portion, so that each pixel of RGB is formed. (8) After this, there is a step such as formation of a transparent electrode, but since it is not directly related to the present invention, that step is omitted. When the color filter substrate 2 in which the three color pixels R, G, and B are provided on the same substrate is completed, it is inspected in the inspection process whether or not the color filter substrate 2 is a good product.

The light transmittance of each color of the R, G, and B filter portions has the characteristics shown in FIG. 8, for example. In general,
It is theoretically possible to measure the color density of each color by irradiating white light from one surface of the R-G-B three-color filter substrate and measuring the amount of transmitted light to the other surface side for each pixel. Are known. In this conventional method, consider the case where the color depth is increased by doubling the filter film thickness of the R color pixel, for example. It is assumed that the light passing through the R color pixel is red and the transmittance of the red light is 90%. This is 2
When the film thickness is doubled, the transmitted light amount is 90% × 90% = 81%, and in terms of the change in the light amount, the film thickness is doubled, and the ratio before and after that is 90: 81 = 10: 9. Yes, the amount of change can be seen as 10%. In the above calculation example, the film thickness is doubled. However, when the film thickness is changed by several percent, the change in the light amount becomes extremely small and a slight change in the color depth caused by the change in the film thickness or the like. Cannot be measured with high accuracy.

Further, in order to make the color depth uniform, it is sometimes necessary to control the raw material of the applied filter material and to control the film thickness of each applied color. However, since these are substitute characteristics and the color density of the filter is not directly measured, there is an error factor and there is an obstacle in producing a large number of color filter substrates with stable quality.

Further, when there is a process abnormality, there is a risk that a large number of defective products will be manufactured. Therefore, in order to avoid this, the color strength is measured on the spot immediately after applying each color filter. If there is an abnormality, it is desirable to take prompt measures based on the results. Of course, when measuring the color strength of the color filter, optical measurement, which is not a substitute characteristic, is desirable. However, when a photo-sensitive material is used in the vicinity of the color filter application step by a photo etching technique, generation and irradiation of ultraviolet rays and blue light are prohibited including in the vicinity of the step. In such a case, it is necessary to perform the measurement only in a light source that does not generate or irradiate ultraviolet light or blue light, for example, in an environment of only a yellow light-emitting fluorescent lamp called yellow light. Therefore, in the conventional method, B color measurement cannot be adopted because it is necessary to radiate blue light, and B color measurement needs to take the substrate on the process out of the process and perform optical measurement outside the yellow room. was there.

As described above, there has been a demand for a measuring method and a measuring device for measuring the color intensity of the three R-G-B colors that can be used in a yellow light environment, but no measuring device of this kind has been found in the past.

[0007]

As described above, in order to make the color density uniform, the means for controlling the raw material of the applied filter material and controlling the film thickness of each applied color are Since the color density of the filter is not directly measured, there is an error factor, and there is an obstacle in producing a large number of color filter substrates with stable quality, and the environment in which the filter material is applied is in the yellow room. In the case of the environment, since the irradiation of ultraviolet rays and blue light is prohibited, there is a problem that the color strength cannot be optically measured immediately after the filter material is applied.

The present invention has been made in order to solve the above problems, and the color density can be measured on the spot immediately after applying each color filter, and the influence on the surroundings can be obtained even in a yellow light environment. An object of the present invention is to obtain a color filter density measuring method and an apparatus for directly and optically measuring color density with extremely high accuracy and high sensitivity without giving it.

[0009]

According to the first aspect of the present invention,
Irradiating light on one surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light,
By the light receiving means arranged on the other surface side of the color filter substrate, the light amount of light having a low light transmittance of the color filter layer of the light passing through the color filter substrate is measured,
The color density of the color filter layer is calculated from the output of the light receiving means by the calculating means connected to the light receiving means.

The invention according to claim 2 is the first of visible light.
Of the first colorant having a high light transmittance in the wavelength region of, and a second color filter layer laminated on the first part and having a high light transmittance in the second wavelength region of visible light. One of the surfaces of the filter substrate is irradiated with light, and the light receiving means disposed on the other surface side of the color filter substrate has a low light transmittance of the first portion of the light passing through the color filter substrate. The light intensity of the light of the wavelength is measured, and the calculation means connected to the light receiving means calculates the color density of the first portion from the output of the light receiving means.

According to a third aspect of the present invention, the first visible light is used.
Of the first colorant having a high light transmittance in the wavelength region of, and a second color filter layer laminated on the first part and having a high light transmittance in the second wavelength region of visible light. The light is irradiated onto one surface of the filter substrate, and the light receiving means arranged on the other surface side of the color filter substrate causes light passing through the color filter substrate to be outside the first wavelength region, and The light intensity of the light having a wavelength other than the second wavelength region is measured, and the calculation means connected to the light receiving means calculates the color density of the first portion from the output of the light receiving means.

The invention according to claim 4 is the first of visible light.
A first portion having a high light transmittance in the wavelength region of, a second portion having a high light transmittance in the second wavelength region of visible light, and laminated on the first portion and the second portion. , Irradiates light on one surface of a color filter substrate composed of a third color filter layer having a high light transmittance in the third wavelength region of visible light, and is arranged on the other surface side of the color filter substrate. The light receiving means measures the amount of light having a wavelength other than the first wavelength region out of the light passing through the color filter substrate, and the calculating means connected to the light receiving means measures the light amount from the output of the light receiving means. The color intensity of the portion 1 is calculated.

The invention according to claim 5 is the first of visible light.
Of the first wavelength having a high light transmittance in the wavelength region of, the second portion of the visible light having a high light transmittance of the second wavelength region, and the third portion of the visible light having a light transmittance of the third wavelength region. The one surface of the color filter substrate composed of the high third portion is irradiated with light and is arranged on the other surface side of the color filter substrate, and the first portion (or the second portion or the third portion). ), A mask plate having a through hole at a position corresponding to the position (1) allows only the light passing through the first portion (or the second portion or the third portion) to pass therethrough and is arranged on the other surface side of the color filter substrate. By the light receiving means, the first wavelength region (or the second wavelength region or the third wavelength region) of the light passing through the color filter substrate is received.
(The wavelength region of), the amount of light having a wavelength other than that of the first portion (or the second portion or the third portion) is output from the output of the light receiving means by the computing means connected to the light receiving means. Is to calculate the density of.

According to a sixth aspect of the present invention, there is provided light projecting means for irradiating light on one surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light, and the color filter. Light receiving means arranged on the other surface side of the substrate for measuring the amount of light of a wavelength having a low transmittance of the color filter layer among the light passing through the color filter substrate, and the light receiving means connected to the light receiving means. And an arithmetic means for arithmetically calculating the color intensity of the color filter layer from the output of.

According to a seventh aspect of the present invention, a light projecting means for irradiating light to one surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light, and the color filter. An optical filter which is arranged on the other surface side of the substrate and which passes only the light of the wavelength having a low transmittance of the color filter layer among the light passing through the color filter substrate, and the light of the wavelength which has passed through this optical filter A light receiving means for measuring the amount of light,
And a calculation unit that is connected to the light receiving unit and calculates the color intensity of the color filter layer from the output of the light receiving unit.

According to an eighth aspect of the invention, the light projecting means irradiates only the light in the specific wavelength range, and the light receiving means measures the light quantity of the light in the wavelength range.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below by taking an RGB color filter substrate used for a liquid crystal display panel as an example. Embodiment 1. 1 is a front view showing a configuration of a color filter density measuring device according to a first embodiment of the present invention, and FIG. 2 is a perspective view showing a configuration of a color filter density measuring device according to a first embodiment of the present invention. is there. 1 and 2, 1 is a color filter substrate to be measured, 2 is a light projecting means provided on one surface side of the color filter substrate 1,
For example, it is composed of a lamp that emits yellow light. 3
Is provided on the other surface side of the color filter substrate 1, and is optically opposed to the light projecting unit 2 via the color filter substrate 1, and 4 is the density of the color filter substrate 1 calculated from the output of the light receiving unit 3. Is a calculation means.

Next, a method of measuring the density of the color filter will be described. FIG. 3 is a specific configuration diagram of the color filter density measuring device according to the first embodiment of the present invention. As shown in FIG. 3, the color filter substrate 1 is conveyed at a predetermined speed, and A linear light source is arranged as the light projecting means 2 above the passage, and a light receiving means 3 is arranged below the passage of the color filter substrate 1 so as to face the light projecting means 2. In this case, the flow chart of the color density measurement is shown in FIG. The density measuring method of the color filter will be described with reference to this flow chart. First, the light projecting means 2 receives the light receiving means 3.
Irradiate light on the surface (step 1). Next, it is detected that the color filter substrate 1 has entered the irradiation position of the light from the light projecting means 2 (step 2). Then, the light receiving means 3 measures the amount of light of the wavelength having a low light transmittance among the light from the light projecting means 2 which has passed through the color filter substrate 1 (step 3).
Then, the completion of passing through the color filter substrate 1 is detected (step 4). Then, the calculation unit 4 calculates the color intensity of the color filter substrate 1 from the output of the light receiving unit 3 (step 5). If necessary, the process returns to the step 2 and the above operation is repeated.

Next, in the process of manufacturing the RGB color filter substrate shown in FIG. 7, as shown in FIG. 7B, the R color filter layer (color filter layer, first color filter) is used. The density measurement when measuring the color intensity of the R color filter layer 13 immediately after the layer 13 is applied on the transparent substrate 11 will be described. As shown in FIG. 7B, the measurement target has the BM layer 12 on the transparent substrate 11, and the R color filter layer 13 is applied on the upper surface thereof. As shown in FIG. 8, the R color filter layer 13 transmits light of red wavelength well, but hardly transmits other visible light. Therefore, in the conventional color filter density measurement method, white light was applied to this filter, and the color intensity was measured from the change in the amount of transmitted light.However, the main component of the transmitted light is light with a wavelength of high transmittance. In that case, since the intensity of the color can be assumed, even if the light source is changed from white light to red light, the degree of change in the light amount is considered to be substantially the same.

Suppose now that the light of wavelength λ1 shown in FIG. 8 is emitted from the light projecting section. At this time, the R color filter layer 1
If the color becomes darker due to the film thickness of 3 being doubled, it can be considered that light is transmitted twice through a filter having a transmittance of 90%, and thus a light amount of 90% × 90% = 81% is obtained. Will be done. Speaking of the change in light quantity, the ratio before and after the doubled film thickness is 90: 81 = 10: 9, and the change can be considered to be 10%. This is an index that gives sensitivity in the conventional optical color density measurement.

On the other hand, in the first embodiment of the present invention, the light in the wavelength range having a low transmittance, for example, the light having the wavelength λ2 shown in FIG.
Consider a case where the color filter layer 13 is irradiated to measure the amount of transmitted light. Assuming that the transmittance of light of wavelength λ2 is 10%, when the film thickness is doubled, the amount of light is also 10% × 10% = 1%. Since the film thickness is doubled, the ratio before and after the change in light amount is 10: 1, and it can be seen that the change amount is 10 times. As described above, when optically measuring the color intensity of the R color filter layer 13, as compared with the case of measuring the light amount of the light of the wavelength λ1 having high transmittance of the R color filter layer 13,
By measuring the amount of light of the wavelength λ2 having a low transmittance of the R color filter layer 13, it is possible to detect the change in color density with extremely high sensitivity.

In the above description, the film thickness is doubled.
The point is that the amount of light changes depending on the color intensity, so there is no need to limit to this, and the output of the present principle may be anything that corresponds to the color intensity that humans perceive. It is understood that the color density of the R color filter layer 13 can be measured even in a yellow light environment by selecting a wavelength longer than the blue range, for example, light having a wavelength λ2 when selecting a wavelength range having a low transmittance.

Next, in the manufacturing process of the R-G-B three-color filter substrate shown in FIG. 7, the R color pixel (first portion) 23 is formed on the transparent substrate 11 as shown in FIG. 7D. The case where the color density of the G color filter layer 14 is measured immediately after the G color filter layer (color filter layer, second color filter layer) 14 is evenly applied on the transparent substrate 11 after forming To do. In this color filter substrate 1, the material of the G color filter layer 14 is uniformly applied to the entire surface of the substrate as shown in FIG. 7 (d), and the R color pixel 23 is formed thereunder. Therefore, there is a portion only for the G color filter layer 14 and a portion where the G color filter layer 14 and the R color pixel 23 are laminated. In this case, the G color filter layer 1 to be measured
It is sufficient to measure the amount of transmitted light of wavelength 4 having a low transmittance, for example, light of λ1 in FIG. There is light that passes through only the G color filter layer 14 and light that passes through the portion in which the G color filter layer 14 and the R color pixel 23 are laminated, but the light of λ1 is less attenuated in the R color pixel 23. Therefore, the amount of light reaching the light receiving means 3 is equal to the amount of light passing through only the G color filter layer 14 by G.
The amount of light is the sum of the amounts of light transmitted through the portion where the color filter layer 14 and the R color pixels 23 are laminated, and as a result, the amount of light is close to the amount of light without the R color pixels 23.

As described above, since the total amount of light does not decrease even if there are R-color pixels 23, the influence of stray light reaching the light receiving means 3 can be reduced, and the amount of light becomes stronger against noise and the measurement accuracy is improved. Can be expected. Therefore, since the total amount of light is the light of the wavelength having the low transmittance of the G color filter layer 14, it is possible to detect the change in the color depth with extremely high sensitivity. In this case, when selecting a wavelength region having low transmittance, for example, light having a wavelength λ1 is selected to have a wavelength longer than the blue region, so that the G color filter layer 1 can be used even in a yellow light environment.
The density of 4 can be measured.

Next, in the manufacturing process of the R-G-B three-color filter substrate shown in FIG. 7, the R-color pixel 23 and the G-color pixel (first pixel) are formed on the transparent substrate 11 as shown in FIG. Two
Portion 24) and then the B color filter layer (color filter layer, third color filter layer) 15 is evenly applied onto the transparent substrate 11 immediately after which the color intensity of the B color filter layer 15 is measured. The case will be described. In this color filter substrate 1, as shown in FIG. 7 (f), the material of the B color filter layer 15 is uniformly applied to the entire surface of the substrate, and the R color pixel 23 and the G color pixel 24 are provided thereunder. Since it is configured, only the B color filter layer 15 and the B color filter layer 15 and the R
The portion where the color pixels 23 are laminated and the B color filter layer 1
5 and a portion in which the G color pixel 24 is laminated.
Even in this case, according to the present invention, the color density can be measured with extremely high sensitivity. That is, the amount of transmitted light of the wavelength having a low transmittance of the B color filter layer 15 to be measured, for example, the light having the wavelength λ1 or the light having the wavelength λ2 in FIG. 8 may be measured. The light transmitted through only the B color filter layer 15 and the B color filter layer 1
5 and R color pixels 23 are transmitted through a portion where the B color filter layer 15 and the G color pixel 24 are laminated. Since the attenuation in the color pixel 23 is small, the amount of light reaching the light receiving means 3 is transmitted through the portion where only the B color filter layer 15 is transmitted, and is transmitted through the portion where the B color filter layer 15 and the R color pixel 23 are laminated. The amount of light becomes the amount of light added with the amount of light, and as a result, the amount of light becomes close to the amount of light when there is no R color pixel 23. Also, the wavelength λ2
Light is less attenuated in the G color pixel 24, so that the amount of light reaching the light receiving means 3 is such that the B color filter layer 15 and the G color pixel 24 are laminated to the amount of light that passes through only the B color filter layer 15. The amount of light is the sum of the amounts of light transmitted through the existing parts, and as a result, the amount of light is close to the amount of light without the G color pixel 24.

In this way, the R color pixel 23 and the G color pixel 2
4 does not reduce the total amount of light, the light receiving means 3
The influence of stray light reaching to can be reduced, and it becomes stronger against noise, and improvement of measurement accuracy can be expected. In this case, since the total amount of light is light of a wavelength having a low transmittance of the B color filter layer 15, it can be detected with extremely high sensitivity to a change in the color depth. When selecting a wavelength region having a low transmittance, for example, light having a wavelength λ1 or light having a wavelength λ2, such as light having a wavelength longer than the blue region, can be selected to measure the thickness of the B color filter layer even in a yellow light environment.

Embodiment 2. As shown in FIG. 7 (d),
Since the laminated portion of the R color pixel 23 and the G color filter layer 14 is convex, the G color filter layer 14 flows out according to the viscosity immediately after the G color filter layer 14 is applied, and the convex portion of the G color filter layer 14 is projected. May be thin. This difference in thickness differs depending on the manufacturing method, and there are many factors such as the viscosity of the coating material and the size and shape of the R color pixel 23. However, the thickness of the convex portion of the filter layer and the other portions are different. Often has a very strong correlation. In other words, knowing the thickness of one can identify the thickness of the other. However, when the error of the identification value becomes a problem, it can be measured by the above-mentioned method. That is, the wavelength of the light to be measured may be selected and the wavelength that is attenuated by the R color pixel 23 and also attenuated by the G color filter layer 14, for example, the light having the wavelength λ3 in FIG. 8 may be used.

In this case, the total amount of light is 1 / in the R color pixel 23.
The light is attenuated to 8 and the G color filter layer 14 attenuates the light to 1/10. The amount of light reaching the light receiving means 3 is larger than that of light passing through only the G color filter layer 14 in the G color filter layer 1.
The amount of light transmitted through the portion where the 4 and R color pixels 23 are laminated is 1/8 in addition to the area due to the transmittance, and thus the amount of light from the convex portion of the filter layer is 1
It is 1/16 of the light amount of the portion of 4 only. Therefore, the total amount of light reflects the color intensity of the portion of only the G color filter layer 14. Thus, the total amount of light is the G color filter layer 14
Since the light of the wavelength has a low transmittance, the relationship between the color density and the amount of light is extremely large, and similar to the first embodiment,
The film thickness can be detected with high sensitivity.

Embodiment 3 Further, as shown in FIG. 7F, since the laminated portion of the R color pixel 23 and the G color pixel 24 and the B color filter layer 15 is convex, as in the case shown in FIG. 7D, Immediately after the application of the B-color filter layer 15, the thickness of the convex portion of the B-color filter layer 15 may become thin depending on its viscosity. Also in this case, the B color filter layer 15 to be measured
Of light having a low transmittance, and the transmittance of the R color pixel 23 and the transmittance of the G color pixel 24 are both low, for example, light having a wavelength λ4 in FIG. The light of wavelength λ4 is attenuated to 1/3 by the R color pixel 23 or the G color pixel 24, and the B color filter layer 1
At 5, the light is attenuated by 1/20. The portion in which the R color pixel 23 and the B color filter layer 15 are stacked, the G color pixel 24, and the B color filter layer 15.
The amount of light transmitted through the portion where the color filter layer 15 is laminated is ⅓ of the amount of light transmitted through the portion of only the B color filter layer 15 due to the transmittance, and the total amount of light is that much corresponding to the portion of only the B color filter layer 15. It comes to reflect the color strength of. That is, since the total amount of light is light having a wavelength with a low transmittance of the B color filter layer 15, the relationship between the color density and the amount of light is large, and the film thickness can be detected with high sensitivity as in the first and second embodiments. it can.

Fourth Embodiment In the first, second and third embodiments described above, a more specific method for detecting the specific wavelength can be realized by providing the light receiving means 3 with an optical filter that transmits the specific wavelength. By doing this,
Since the light source may radiate light of a wide band wavelength, the degree of freedom in selecting the light source is increased accordingly. FIG. 5 is a front view showing the structure of the color filter density measuring device according to the fourth embodiment, and 5 is an optical filter which allows the light receiving means 3 to transmit a specific wavelength. The same or corresponding parts as in FIG. 1 are designated by the same reference numerals. In this way, the optical filter 5 is inserted between the color filter substrate 1 and the light receiving means 3,
Since only the specific wavelength is transmitted to the light receiving means 3,
The light source (light projecting means) 2 can use light having a broadband wavelength. Therefore, the light projecting means 2 can use a fluorescent tube that emits yellow light called yellow light, and even if the fluorescent tube is installed in an environment where a photosensitive material is used, it does not adversely affect the surroundings.

Embodiment 5. Further, as a specific method different from the method of detecting the specific wavelength in the above-described Embodiment 4, the specific wavelength may be generated in the light projecting means 2. For example, a laser light source or an LED light source is used as the light projecting means 2. According to the fifth embodiment, it is possible to measure the color density of the R color filter layer 13, the G color filter layer 14 and the B color filter layer 15 shown in the first, second and third embodiments with high sensitivity. You can

Embodiment 6 FIG. When measuring the color intensity of the R color pixel 23, the G color pixel 24, and the B color pixel (third portion) 25 of the color filter substrate 1 in the state of FIG. 7G, the following means is adopted. be able to. That is, in the color filter substrate 1 in the state of FIG. 7 (g), R, G, and B pixels are generated. For example, when measuring the color depth of the R-color pixel 23, one method is to irradiate a pixel on the substrate with a light beam that is not larger than the pixel, for example, using laser light, and measure the amount of light. According to this method, it is possible to measure the color intensity of each pixel, but if the number of pixels on the substrate is very large, it takes longer to measure all pixels, and the smaller the pixel size, the more the light irradiation is performed. Positional accuracy is required, and an extremely large and precise mechanism is required. Therefore, the light projecting unit 2, the G color pixel 24, and the B color pixel 2
5 and the light receiving means 3 are blocked, and a mask plate having a hole serving as an optical path for passing only the R color pixel 23 is used.
Only the light that has passed through the R-color pixel 23 among the lights from (1) to (5) reaches the light receiving means 3. FIG. 6 is a block diagram showing a mask plate according to such a sixth embodiment. In the figure, reference numeral 6 denotes a mask plate, which is provided with a hole which serves as an optical path through which only the R color pixel 23 passes, and which has a G color pixel 24 and a B color pixel 25
The optical path of is blocked. Here, the color intensity of the R color pixel 23 can be measured with high sensitivity by measuring the amount of light of the wavelength λ2 described above. Although the R color pixel 23 has been described as an example,
The color pixel 24 or the B color pixel 25 has the same effect. According to the sixth embodiment, since the color type of the pixel to be measured is selected by the mask plate 6, the light amounts from a plurality of pixels of the same color are collectively measured, and the color density becomes finer in pixel units. The present invention is effective when the measurement of is not required.

[0033]

As described above, according to the first aspect of the present invention, from one surface of the color filter substrate having a high light transmittance in a predetermined wavelength region of visible light to this filter substrate. Of the light that has been irradiated with light and has passed through the color filter substrate by the light receiving means arranged on the other side of the color filter substrate, the calculation means measures the transmission intensity of the light in the wavelength region in which the transmittance of the color filter layer is low. Since this is done, there is an effect that detection can be performed with extremely high sensitivity to changes in color intensity. Further, since it is not necessary to use a light source having the same color as the filter color to be measured, it is possible to select light that can be used in the step of using a photosensitive material, so that the present invention can be adopted in a yellow room. .

According to the second aspect of the present invention, the first portion of the visible light having a high light transmittance in the first wavelength region and the second portion of the visible light which is laminated on the first portion are laminated. Of the second color filter layer having a high light transmittance in the wavelength region of irradiating light to one surface of the color filter substrate, and the light receiving means arranged on the other surface side of the color filter substrate Of the light that has passed through the filter substrate, the light quantity of the light of the wavelength having the low light transmittance of the first portion is measured, and the calculation means connected to the light receiving means measures the output of the light receiving means to obtain the light of the first portion. Since it is configured to calculate the color intensity, there is an effect that it can be detected with extremely high sensitivity to a change in color intensity. Further, since a light source having the same color as the filter color to be measured is not required, light usable in the step of using a photosensitive material can be selected, so that the present invention can be adopted in the yellow room. Further, even if the different color filter layers are doubled, there is an effect that the color density of the color filter layer to be measured can be accurately measured.

According to the third aspect of the present invention, the first portion of the visible light having a high light transmittance in the first wavelength region and the second portion of the visible light which is laminated on the first portion are laminated. Of the second color filter layer having a high light transmittance in the wavelength region of irradiating light to one surface of the color filter substrate, and the light receiving means arranged on the other surface side of the color filter substrate Of the light that has passed through the filter substrate, the amount of light having a wavelength other than the first wavelength region and a wavelength other than the second wavelength region is measured, and the output of the light receiving unit is output by the computing unit connected to the light receiving unit. Therefore, since the color intensity of the first portion is calculated, an output with extremely high sensitivity to a change in color intensity can be obtained. Further, since a light source having the same color as the filter color to be measured is not required, light usable in the step of using a photosensitive material can be selected, so that the present invention can be adopted in the yellow room. Further, similarly to the third aspect, there is an effect that the color density of the color filter layer to be measured can be accurately measured even when the different color filter layers are duplicated.

According to the invention of claim 4, the first portion of the visible light having a high light transmittance in the first wavelength region and the first portion of the visible light having a high light transmittance in the second wavelength region. One part of a color filter substrate, which is composed of a second part and a third color filter layer laminated on the first part and the second part and having a high light transmittance in the third wavelength region of visible light. The surface is irradiated with light, and the amount of light having a wavelength other than the first wavelength region of the light passing through the color filter substrate is measured by the light receiving means arranged on the other surface side of the color filter substrate. Since the calculation means connected to the light receiving means calculates the color density of the first portion from the output of the light receiving means, the output is extremely sensitive to the change in color density. Is obtained. Further, since a light source having the same color as the filter color to be measured is not required, light usable in the step of using a photosensitive material can be selected, so that the present invention can be adopted in the yellow room. Further, even when the color filter layers to be measured are overlaid on the filter pixels of two different colors, the color density of the color filter layer to be measured can be accurately measured.

According to the fifth aspect of the invention, the first portion having a high light transmittance in the first wavelength region of visible light and the first portion having a high light transmittance in the second wavelength region of visible light. 2 and the third portion of the visible light which has a high light transmittance in the third wavelength region.
And irradiating light to one surface of the color filter substrate, which is disposed on the other surface side of the color filter substrate, and corresponds to the first portion (or the second portion or the third portion). A light receiving means that allows only light passing through the first portion (or the second portion or the third portion) to pass through by a mask plate having a through hole at a position to be placed and is arranged on the other surface side of the color filter substrate. The amount of light having a wavelength other than the first wavelength region (or the second wavelength region or the third wavelength region) of the light passing through the color filter substrate is measured by
Since the calculation means connected to the light receiving means is configured to calculate the color density of the first portion (or the second portion or the third portion) from the output of the light receiving means, the color depth There is an effect that it can be detected with extremely high sensitivity to changes in. Further, since a light source having the same color as the filter color to be measured is not required, light usable in the step of using a photosensitive material can be selected, so that the present invention can be adopted in the yellow room.

According to the sixth aspect of the invention, a light projecting means for irradiating light to one surface of the color filter substrate having the color filter layer having a high light transmittance in a predetermined wavelength region of visible light, Light receiving means arranged on the other surface side of the color filter substrate for measuring the amount of light of a wavelength having a low transmittance of the color filter layer among the light passing through the color filter substrate, and the light receiving means connected to the light receiving means. Since the calculating means for calculating the color depth of the color filter layer from the output of the light receiving means is provided, there is an effect that it is possible to detect the change in color depth with extremely high sensitivity. Further, since it is not necessary to use a light source having the same color as the filter color to be measured, it is possible to select light that can be used in the step of using a photosensitive material, so that the present invention can be adopted in a yellow room. .

According to a seventh aspect of the invention, a light projecting means for irradiating light to one surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light, An optical filter that is arranged on the other surface side of the color filter substrate and that passes only light having a wavelength with a low transmittance of the color filter layer among the lights that pass through the color filter substrate, and a wavelength of light that has passed through this optical filter. Since the light receiving means for measuring the amount of light and the calculating means connected to the light receiving means for calculating the color density of the color filter layer from the output of the light receiving means are provided, the light source emits light in a wide band wavelength. May be radiated, so the degree of freedom in selecting the light source is wide. Further, similarly to the first aspect, an output having extremely high sensitivity to a change in color density of the color filter substrate can be obtained. This sensor system has no optical property even when installed in an environment handling a photosensitive material. Since the adverse effect is not exerted on the surroundings, the present invention can be adopted even in the yellow room.

According to the invention described in claim 8, since the light projecting means irradiates only the light in the specific wavelength range and the light receiving means measures the light quantity of the light in the wavelength range, the light receiving means is in the specific wavelength range. Since the optical filter function of 1 is unnecessary, the degree of freedom in selecting the light receiving means is widened, and similarly to claim 1, an output having extremely high sensitivity to a change in the color density of the color filter substrate can be obtained.
Moreover, even if this sensor system is installed in an environment in which a photosensitive material is handled, it has no optical adverse effect on the surroundings, so that the present invention can be adopted in a yellow room.

[Brief description of drawings]

FIG. 1 is a front view showing the configuration of a color filter density measuring method and apparatus according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a configuration of a color filter density measuring device according to a first embodiment of the present invention.

FIG. 3 is a specific configuration diagram of the color filter density measuring device according to the first embodiment of the present invention.

FIG. 4 is a flowchart of color density measurement according to the first embodiment of the present invention.

FIG. 5 is a front view showing the configuration of a color filter density measuring device according to a fourth embodiment of the present invention.

FIG. 6 is a configuration diagram showing a mask plate according to a sixth embodiment of the present invention.

FIG. 7 is a diagram illustrating a manufacturing process of a liquid crystal color filter substrate.

FIG. 8 is a characteristic diagram for explaining the light transmittances of pixels of R, G, and B colors of a liquid crystal color filter substrate.

[Explanation of symbols]

1 Color filter substrate 2 Light emitting means 3 Light receiving means 4 Computing means 5 Optical filter 6 Mask plate 13 R color filter layer (color filter layer, first color filter layer) 14 G color filter layer (color filter layer, second color filter layer) Color filter layer) 15 B color filter layer (color filter portion, third color filter layer) 23 R color pixel (first portion) 24 G color pixel (second portion) 25 B color pixel (third portion) )

Claims (8)

[Claims] 1. A surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light is irradiated with light, and the color filter substrate is arranged on the other surface side of the color filter substrate. The light receiving means measures the amount of light of a wavelength having a low light transmittance of the color filter layer out of the light passing through the color filter substrate, and the calculating means connected to the light receiving means measures the output of the light receiving means. A method for measuring the density of a color filter, which comprises calculating the color density of a color filter layer. 2. A first portion having a high light transmittance in a first wavelength region of visible light, and a first portion laminated on the first portion and having a light transmittance in a second wavelength region of visible light. Of the light that has passed through the color filter substrate, the one surface of the color filter substrate including the high second color filter layer is irradiated with light, and the light receiving means arranged on the other surface side of the color filter substrate Measuring the amount of light of a wavelength having a low light transmittance of the first portion, and calculating the color intensity of the first portion from the output of the light receiving means by the calculating means connected to the light receiving means. A method for measuring the density of a color filter, characterized by: 3. A first portion of the visible light having a high light transmittance in the first wavelength region, and a first portion laminated on the first portion and having a light transmittance of the visible light in the second wavelength region. Of the light that has passed through the color filter substrate, the one surface of the color filter substrate including the high second color filter layer is irradiated with light, and the light receiving means arranged on the other surface side of the color filter substrate The amount of light having a wavelength other than the first wavelength range and other than the second wavelength range is measured, and the color of the first portion is output from the output of the light receiving unit by the calculating unit connected to the light receiving unit. A method of measuring the density of a color filter, which comprises calculating the density of 4. A first portion having high light transmittance in the first wavelength region of visible light, a second portion having high light transmittance in the second wavelength region of visible light, and the first portion. And irradiating light on one surface of a color filter substrate formed on the second part and the third color filter layer having a high light transmittance in the third wavelength region of visible light. By the light receiving means arranged on the other surface side of the color filter substrate, the amount of light having a wavelength other than the first wavelength region of the light passing through the color filter substrate was measured and connected to the light receiving means. A method for measuring the density of a color filter, wherein the calculating means calculates the color density of the first portion from the output of the light receiving means. 5. A first portion of visible light having a high light transmittance in a first wavelength region, a second portion of visible light having a high light transmittance in a second wavelength region, and a visible light One surface of the color filter substrate, which is composed of a third portion having a high light transmittance in the third wavelength region, is irradiated with light, and is arranged on the other surface side of the color filter substrate, and the first portion is provided. (Or the second portion or the third portion) is made to pass only the light passing through the first portion (or the second portion or the third portion) by a mask plate having a through hole at a position corresponding to Light having a wavelength other than the first wavelength region (or the second wavelength region or the third wavelength region) of the light that has passed through the color filter substrate is received by the light receiving means arranged on the other surface side of the color filter substrate. The amount of light is measured and the above-mentioned light is received by the calculation means connected to the above light-receiving means. A density measuring method of a color filter, wherein the color density of the first portion (or the second portion or the third portion) is calculated from the output of the means. 6. A light projecting means for irradiating light to one surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light, and the other surface side of the color filter substrate. And a light receiving means for measuring the amount of light of a wavelength having a low transmittance of the color filter layer among the light passing through the color filter substrate, and the color filter connected to the light receiving means from the output of the light receiving means. A density measuring device for a color filter, comprising: a calculating means for calculating the color density of a layer. 7. A light projecting means for irradiating one surface of a color filter substrate having a color filter layer having a high light transmittance in a predetermined wavelength region of visible light, and the other surface side of the color filter substrate. An optical filter that passes only the light having a wavelength having a low transmittance of the color filter layer among the light that passes through the color filter substrate, and a light receiving unit that measures the amount of light having the wavelength that has passed through the optical filter. A density measuring device for a color filter, comprising: and a calculating means which is connected to the light receiving means and calculates the color density of the color filter layer from the output of the light receiving means. 8. The density measuring device for a color filter according to claim 5, wherein the light projecting means irradiates only the light in a specific wavelength range, and the light receiving means measures the light quantity of the light in the wavelength range.