JPH09236186A - Spool valve type mechanically-controlled valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a spool valve type mechanically-controlled valve having the advantages of both a spool valve type and a poppet valve type. SOLUTION: A spool S1 is reciprocatorily contained in a spool chamber in a valve body 2. An air flow passage is switched by mechanically operating the end part of the spool S1. A valve seat B1 additionally functioning as a stopper is arranged in a spool chamber. A poppet valve part 21 capable of making contact and no slide contact with a valve seat B1 is arranged at the spool S1. By pressing the spool S1 in the specified direction extending along the axis thereof by a press force generated due to a differential pressure of air flowing through the valve body 2, the valve seat B1 and the poppet valve part 21 are held in a contact state.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spool valve type mechanically operated valve in which fluid passages are switched by mechanically operating an end portion of a spool.

[0002]

2. Description of the Related Art Conventionally, a mechanically operated valve has been known as a type of valve used for switching a fluid passage in a vacuum circuit or the like. Further, such a mechanically operated valve can be roughly classified into a poppet valve type and a spool valve type.

In the poppet valve type mechanically operated valve, the rod is reciprocated along its axial direction by an external mechanical operation such as pressing the protruding end of the rod connected to the poppet valve portion. ing. As a result, the poppet valve portion comes into contact with or separates from the valve seat provided in the valve body, so that the fluid flow path is switched.

On the other hand, in the spool valve type mechanically operated valve, the spool is configured to reciprocate along its axial direction by an external mechanical operation such as pressing the protruding end of the spool. As a result, the packing comes into sliding contact with or separates from the inner wall surface of the spool chamber, so that the flow paths of the fluid can be switched.

[0005]

By the way, since the rubber packing is fitted on the peripheral surface of the spool, it is suitable between the packing and the inner wall surface of the spool chamber during sliding contact of the spool. Sliding resistance works. Therefore, in the spool valve type, the position of the spool can be held without continuously applying an external force by mechanical operation. on the other hand,
In the poppet valve type, such a self-holding function does not work structurally. This is because in this type, which does not have a structure corresponding to the packing, a large sliding resistance does not act between the valve body and the rod. Therefore, in this type, external force must be continuously applied to hold the position of the rod. Therefore, when comparing these points, it is concluded that the spool valve type is superior.

However, the spool valve type has the following drawbacks. First, the maximum flow rate cannot be obtained unless a large spool stroke (moving distance) is set. Therefore, compared to the poppet valve type,
Responsiveness is low and the whole tends to be large. Also,
If the stroke becomes large, the operating speed of the spool must be increased, and the durability tends to be impaired.

Secondly, some kind of stopper is required to determine the moving position of the spool, resulting in higher cost and lower reliability. The present invention has been made to solve the above problems, and an object of the present invention is to provide a spool valve type mechanically operated valve having the advantages of both the spool valve type and the poppet valve type.

[0008]

In order to solve the above-mentioned problems, in the invention described in claim 1, the spool is reciprocable along the axial direction in the spool chamber formed inside the valve body. In a spool valve type mechanical operation valve that is accommodated and whose fluid flow path is switched by mechanically operating the end of the spool, a valve seat that also functions as a stopper is provided in the spool chamber, and By providing the spool with a poppet valve portion capable of abutting against and not slidingly contacting each other, and pressing the spool in a specific direction along its axis by a pressing force based on a differential pressure of fluid in the valve body, A gist is a spool valve type mechanically operated valve configured such that a valve seat and the poppet valve portion are held in contact with each other.

According to the second aspect of the present invention, the spool is accommodated in the spool chamber formed inside the valve body so as to be capable of reciprocating along the axial direction, and the end portion of the spool is mechanically operated. In a spool valve type mechanically operated valve whose fluid flow path is switched by means of the spool valve, first and second valve seats that also function as stoppers are provided in the spool chamber so as to face each other, and the valve seats can come into contact with each other. Further, a poppet valve portion that cannot be slidably contacted is provided on the spool, and the first valve seat and the poppet valve are pressed by pressing the spool in a specific direction along an axis of the spool due to a differential pressure of fluid in the valve body. The second valve seat and the poppet valve portion are held in a separated state, and the spool is urged by the urging force of the spool urging means to move the spool in the direction opposite to the specific direction. By pressing, the spool is configured such that the second valve seat and the poppet valve portion are held in contact with each other and the first valve seat and the poppet valve portion are held in separated state. The gist is a valve-type machine operated valve.

According to a third aspect of the present invention, in the first or second aspect, a piston is formed in a part of the spool, and pressure acting spaces are defined on both sides of the piston,
The gist of the invention is to generate a differential pressure for pressing the spool by discharging the fluid inside one of the pressure acting spaces by vacuuming.

According to a fourth aspect of the present invention, in the third aspect, among the plurality of ports provided in the valve body,
A port that is in a vacuum state when the first valve seat and the poppet valve portion are in contact with each other and the second valve seat and the poppet valve portion are in the separated state, and the vacuum suction is performed. The main point is that the lower pressure acting space is connected via a fluid discharge communication passage.

The "action" of the present invention will be described below. According to the invention of claim 1, the fluid flow passage is closed when the poppet valve portion is in contact with the valve seat, and the fluid flow passage is when the poppet valve portion is separated from the valve seat. Is opened. As a result, the fluid flow path is switched,
The direction of the fluid flowing in the valve body is changed. Further, according to the present invention, the following effects are further exhibited.

I) The movement of the spool is restricted by the contact of the poppet valve portion with the valve seat that also serves as a stopper. Therefore, it is not necessary to separately provide a stopper for determining the moving position of the spool, and the cost can be reduced and the reliability can be improved.

Ii) Since the poppet valve portion that is not slidably contactable with the valve seat is provided, the spool stroke can be reduced by the amount that the sliding distance between the two is eliminated. Therefore,
It is possible to reduce the setting of the spool stroke for obtaining the maximum flow rate as compared with the general spool valve type. As a result, the responsiveness of the spool is improved and the overall size can be reduced. In addition, as a result that the stroke is small, it is not necessary to increase the operating speed of the spool, and the durability is improved.

Iii) The valve seat and the poppet valve portion are held in contact with each other by pressing the spool by the pressing force based on the differential pressure of the fluid. As a result of having such a self-holding function, the position of the spool can be held at a predetermined position without continuously applying an external force by a mechanical operation.

According to the second aspect of the present invention, while the fluid passage is closed when the poppet valve portion is in contact with the first valve seat, the poppet valve portion is closed with respect to the second valve seat. When separated, the fluid flow path is opened. In this case, the fluid will flow to the opened second valve seat side. While the fluid flow path is opened when the poppet valve portion is separated from the first valve seat, the fluid flow path is closed when the poppet valve portion is in contact with the second valve seat. in this case,
The fluid will flow to the opened first valve seat side. In this way, the fluid flow paths are switched, and the direction of the fluid flowing in the valve body is changed. Moreover, according to this invention, in addition to the effects of the above i) to iii), the following effects are achieved.

That is, the spool is pressed by the urging force of the spool urging means, so that the position of the spool is held by itself. That is, self-holding is achieved in both directions rather than in one direction.

According to the third aspect of the present invention, the pressures of the two pressure acting spaces partitioned by the pistons become imbalanced, and the pistons are provided on the side of the pressure acting space which is relatively low pressure due to vacuuming. Pressed.

According to the fourth aspect of the invention, in the predetermined switching state, the fluid in the pressure acting space is discharged to the outside through the fluid discharge communication passage, and the fluid pressure in the space becomes low. Therefore, the piston is pressed to the space side.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which the present invention is embodied in a mechanical valve of a spool valve type for a vacuum circuit will be described in detail with reference to FIGS.

As shown in FIGS. 2 and 3, a body 2 as a valve body constituting the mechanical operation valve 1 is a square tubular member made of aluminum alloy. The inside of the body 2 is divided into three regions, that is, a large diameter portion 2a, a small diameter portion 2b, and a medium diameter portion 2c in order from the first end surface (the left end surface in FIG. 2) of the body 2. The portion of the right opening edge of the small diameter portion 2b functions as the first valve seat B1 in this embodiment.

A first cap 3 made of an aluminum alloy is non-slidably fitted to the first end face. The cap 3 includes a bush mounting portion 3a, a flange portion 3b, and a tubular fitting insertion portion 3c. The flange portion 3b is fixed to the first end surface by a pan head machine screw 7 having a cross hole. The tubular fitting portion 3c is provided on the inner surface of the flange portion 3b so as to project therefrom. An annular groove is provided on the outer peripheral surface of the tubular fitting portion 3c, and an O-ring 4 is attached to the annular groove. As a result, sealing is achieved at the interface between the inner wall surface of the large diameter portion 2a of the body 2 and the outer peripheral surface of the tubular fitting portion 3c. The bush mounting portion 3a is provided so as to project from the central portion of the outer surface of the flange portion 3b. A bush 5 having a through hole in the center is fitted in the bush mounting portion 3a. Further, the spool S is provided at the center of the first cap 3.
Spool insertion hole 6 for inserting the member constituting 1
Are formed.

On the other hand, the second end surface of the body 2 (see FIG. 2)
The second cap 10 made of an aluminum alloy is non-slidably fitted to the right end surface of the. This cap 10
Includes a bush mounting portion 10a, a flange portion 10b, and a tubular fitting insertion portion 10c. The flange portion 10b is the second
Is fixed to the end surface of the machine by means of a cross-recessed pan head machine screw 7. The tubular fitting portion 10c is provided so as to project from the inner surface of the flange portion 10b. The tubular fitting portion 10c has a smaller diameter and is longer than the tubular fitting portion 3c. Annular groove portions are provided at two locations on the outer peripheral surface of the cylindrical fitting insertion portion 10c, and the O-rings 11 and 12 are provided there.
Is installed. As a result, sealing is achieved at the interface between the inner wall surface of the medium diameter portion 2c of the body 2 and the outer peripheral surface of the tubular fitting insertion portion 10c. The bush mounting portion 10a is provided so as to project from the central portion of the outer surface of the flange portion 10b. The bush 5 is fitted in the bush mounting portion 10a. A spool insertion hole 6 is formed in the center of the second cap 10. The tip edge portion of the tubular fitting portion 10c functions as the second valve seat B2 in this embodiment. The above-mentioned first valve seat B1 and second valve seat B2
And are opposed to each other at a predetermined interval. Further, each of these valve seats B1 and B2 also has a function as a stopper.

Then, as described above, both caps 3, 10
By closing both end surfaces of the body 2 by the above, a spool chamber for accommodating the spool S1 is defined inside the mechanical operation valve 1.

As shown in FIGS. 1 (a), 1 (c), 2 and 3, the lower surface of the body 2 has an A port 13 connected to a vacuum pad and a vacuum as a vacuuming means. The V port 14 connected to the pump is formed adjacently. O-rings 15 are attached to the openings of these ports 13 and 14, respectively. As shown in FIGS. 2 and 3, an R port 16 that is open to the atmosphere is formed on the front surface and the back surface of the body 2.

The A port 13 and the spool chamber are communicated with each other through a first communication passage 17 which is provided in the medium diameter portion 2c of the body 2 so as to pass therethrough. The V port 14 and the spool chamber are communicated with each other through a second communication passage 18 that is transparently provided at a position closer to the right end surface than the communication passage 17. The second communication passage 18 has two O-rings 11, 1 which are mounted on the tubular fitting portion 10c of the second cap 10.
Located between two. A through hole 19 that communicates the inside and the outside of the tubular fitting insertion portion 10c is provided at a location corresponding to the second communication hole 18 in the tubular fitting insertion portion 10c.

Two fixing holes 20 are formed on each of the upper surface and the lower surface of the body 2 for fixing the mechanical operation valve 1 to the support. As shown in FIGS. 2 and 3, a spool chamber inside the mechanical operation valve 1 accommodates a spool S1 so as to be capable of reciprocating along its axial direction. Spool S of this embodiment
1 is roughly three members, that is, the poppet valve portion 2
The first shaft 22, the second shaft 23, and the second shaft 23 are assembled together.

The poppet valve portion 21 includes a sleeve 24 made of an aluminum alloy and a rubber lining portion 2 formed so as to cover a flange portion in the middle of the sleeve 24.
5 The rubber lining portion 25 is arranged between the valve seats B1 and B2 provided so as to face each other, and the side surface thereof is a tapered surface. A through hole 26 that communicates the inside and outside of the sleeve 24 is formed at a position on the left side of the rubber lining portion 25 in the sleeve 24. Further, a female thread groove for screwing the first shaft 22 is formed on the inner peripheral surface of the left end opening of the sleeve 24.

The second shaft 22 is made of stainless steel and comprises a shaft portion 27 and a large diameter portion 28 provided in the middle of the shaft portion 27. A rubber packing 29 is attached to the annular recess provided on the outer peripheral surface of the large-diameter portion 28. The large diameter portion 28 slides on the inner wall surface of the tubular fitting portion 10c, while the shaft portion 27 does not slide on the same surface. In addition, the packing 29 allows the both 10c,
The interface on which 28 slides is sealed.

The left end of the second shaft 23 is crimped to the right opening of the sleeve 24. Therefore, the second shaft 23 and the poppet valve portion 21 are integrated. The right end of the second shaft 23 projects to the outside of the body 2 via the spool insertion hole 6 of the second cap 10 and the bush 5.

The first shaft 22 is made of stainless steel, and has a shaft portion 31, a piston 32 provided on the inner end side of the shaft portion 31, and a central portion of the piston 32 formed along the axial direction. And mounting holes 33. Piston 32
A rubber packing 34 is attached to the annular recess provided on the outer peripheral surface of the. The packing 34 seals between the outer peripheral surface of the piston 32 and the inner wall surface of the large diameter portion 2 a of the body 2. A female thread groove is formed on the inner wall surface of the mounting hole 33. The hexagon socket set screw 35 is screwed into the mounting hole 33 and the left opening of the sleeve 24. Therefore, the first shaft 22 and the poppet valve portion 21 are integrated. The left end of the first shaft 22 projects to the outside of the body 2 via the spool insertion hole 6 of the first cap 3 and the bush 5.

Spool S1 assembled as described above
When the rubber lining portion 25 is housed,
It is located between 1 and B2. As shown in FIGS. 2 and 3, the rubber lining portion 25 has valve seats B1,
B2 can be contacted but cannot be slidably contacted. In addition, the piston 32 housed in the large diameter portion 2a of the body 2
Defines a first pressure acting space R1 and a second pressure acting space R1 on both sides thereof. The first pressure acting space R1 exists on the left end face side of the piston 32, and the second pressure acting space R1
2 is on the right end face side of the piston 32. An O-ring 36, a spacer 37, and a coil spring 38 as a piston urging means are housed in the first pressure acting space R1. The coil spring 38 constantly presses the piston 32 to the right.

The first communication passage 17 connected to the A port 13
And the first pressure acting space R1 are connected to each other through a fluid discharge communication passage 39 provided in the body 2. Therefore, the air as the fluid in the first pressure acting space R1 is evacuated through the fluid discharge communication passage 39 in a predetermined case.

Further, as shown in FIGS. 2 and 3, machine operating portions M1 and M2 using, for example, a cam mechanism are attached to both end surfaces of the machine operating valve 1, respectively. By operating one of the machine operating parts M1 and M2, either end of the spool S1 is pushed into the body 2. As a result, the air flow path can be switched.

Next, the operation of the mechanical operation valve 1 configured as described above will be described. When an operating force is applied from the left end face of the spool S1 by operating only the first machine operating portion M1, the spool S1 moves to the rightmost position as shown in FIG. Then, the first valve seat B1 and the rubber lining portion 25 are separated from each other, and the second valve seat B2 and the rubber lining portion 25 are in contact with each other. therefore,
The A port 13 is not in communication with the V port 14 and is in communication with only the R port 16. That is, the A port 13 is open to the atmosphere, and the vacuum pad connected to the A port 13 also does not perform vacuum suction. Therefore, at this time, the vacuum pad releases the work.

In this case, the air pressures in the first pressure acting space R1 and the second pressure acting space R2 are both equal to atmospheric pressure. Therefore, the pressing force due to the differential pressure does not act on the piston 32, and only the biasing force of the coil spring 38 acts. As a result, even after the operating force is removed, the first valve seat B1 and the rubber lining portion 25 are kept in the separated state, and the second valve seat B2 and the rubber lining portion 25 are kept in the contact state. To be done. That is, the spool S1 is self-held at the right end of the stroke. In this case,
The second valve seat B2 serves as a stopper that restricts the spool S1 from moving further toward the right end of the stroke.

Next, when an operating force is applied from the right end surface of the spool S1 by operating only the second machine operating section M2,
As shown in FIG. 2, the spool S1 moves to the leftmost position against the biasing force of the coil spring 38. Then, the first valve seat B1 and the rubber lining portion 25 come into contact with each other, and the second valve seat B2 and the rubber lining portion 25 contact each other.
And are separated from each other. Therefore, the A port 13 is
It is not connected to the port 16 and is connected only to the V port 14. In other words, the air on the A port 13 side is
It is discharged to the outside of the body 2 through the second communication hole 18 and the V port 14. Therefore, the vacuum pad connected to the A port 13 vacuum-sucks the work.

In this case, the air in the first pressure acting space R1 is passed through the fluid discharge communication passage 39 to the first communication passage 17
And finally discharged through the V port 14 to the outside of the body 2. Therefore, the air pressure in the first pressure acting space R1 is lower than the atmospheric pressure at this time. On the other hand, the air pressure in the second pressure acting space R2 is still equal to the atmospheric pressure. Therefore, both the pressing force due to the differential pressure and the biasing force of the coil spring 38 act on the piston 32. However, the pressing force is set to a value larger than the biasing force. Therefore, even after the operating force is removed, the first valve seat B1 and the rubber lining portion 25 are kept in contact with each other, and the second valve seat B2 and the rubber lining portion 25 are kept in separated state. It That is, the spool S1 is self-held at the left end of the stroke. In this case, the first valve seat B1 serves as a stopper that restricts the spool S1 from moving further toward the left end of the stroke.

Then, if an operating force is applied again by the machine operating portion M1, the first valve seat B1 and the rubber lining portion 25
Are separated from each other, and air flows in from that part. Then, the air pressure in the first pressure acting space R1 rises, and the pressing force acting on the piston 32 also decreases accordingly.

The characteristic effects of this embodiment will be listed below. (A) According to this embodiment, the first and second valve seats B1,
B2 also functions as a stopper for the spool S1. Therefore, it is not necessary to separately provide such a stopper. Therefore, the structure is simpler than that of the conventional spool valve type mechanically operated valve, and the cost can be reduced and the reliability can be improved. Further, since it is not a stopper structure in which metals come into contact with each other, fatigue of the contact surface and scattering of foreign matter are prevented, and durability is improved.

(B) According to this embodiment, the spool S1
The rubber lining 25 provided on the poppet valve 21 of
While it can abut against the valve seats B1 and B2, the valve seat B1
, B2 cannot be slidably contacted. Therefore, the spool stroke can be reduced by the amount of the distance for sliding the poppet valve portion 21 and the inner wall surface of the spool chamber. Therefore, the spool stroke for obtaining the maximum flow rate can be set smaller than that of a general spool valve type. This brings the following benefits.

First, the responsiveness of the spool S1 becomes high. This is because if the spool stroke is small, the spool S1 can be reliably operated even at the same operation speed.

Secondly, the overall length of the mechanical operation valve 1 can be shortened. If the spool stroke is short, the outer dimensions of the cam are small even when the cam mechanism is used for operation. Therefore, the machine operating parts M1 and M2 themselves can be downsized.

Thirdly, the durability is improved. This is because if the spool stroke is small, it is not necessary to intentionally set the operating speed of the spool S1 high. It should be noted that FIG. 4 shows a graph for explaining the difference in characteristics between the general spool valve type and the poppet valve type. As is clear from the graph, the poppet valve type has higher responsiveness of pressure fluctuation to the displacement of the spool S1 than the spool valve type. Of course, the mechanically operated valve 1 of the present embodiment is called a spool valve type, but it goes without saying that its characteristics are similar to those of the poppet valve type.

(C) According to the present embodiment, the spool S1 is pressed by the pressing force based on the differential pressure of air,
The first valve seat B1 and the rubber lining portion 25 are securely held in the contact state. On the other hand, since the spool S1 is pressed by the biasing force of the coil spring 38, the second valve seat B2 and the rubber lining portion 25 are securely held in the contact state. That is, according to this embodiment, the self-holding of the spool S1 position is achieved in both directions. as a result,
The spool S can be used without applying external force by mechanical operation.
The position 1 can be reliably held at the end of the stroke. In addition, self-holding in both directions contributes to further shortening of the mechanical operation valve 1 as a whole.

The present invention can be modified, for example, as follows. (1) The present invention is not limited to the double rod structure as in the above embodiment, but may be applied to a single rod structure.

(2) For example, it is also possible to apply pressurized air to one end surface of the piston 32 and obtain the piston pressing force by the differential pressure caused by this. (3) In the above embodiment, the self-holding in both directions is achieved by the pressing force due to the differential pressure of the fluid and the urging force of the piston urging means. Of course, the present invention is not limited to this, and for example, it is also possible to achieve self-holding in both directions by utilizing the pressing force due to the differential pressure of the fluid.

(4) Instead of providing the rubber lining portion 25 on the spool S1 side, a rubber lining portion may be provided on the valve seat B1 and B2 sides. (5) The number of ports 13, 14, 16 provided in the body 2 may be three or more, or the rubber lining portion 25 may be formed at a plurality of locations.

(6) The piston urging means may be something other than the coil spring 38. For example, a leaf spring or the like can be used. Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments are listed below.

(1) A spool valve type according to any one of claims 1 to 4, wherein the spool is constructed by assembling a poppet valve portion having a rubber lining portion on an outer peripheral surface thereof between a pair of shafts. Machine operated valve.

(2) In the technical idea (1), the poppet valve portion comprises a sleeve and a rubber lining portion formed so as to cover a flange portion in the middle of the sleeve. Spool valve type machine operated valve.

(3) In the technical idea (2), a side surface of the rubber lining portion is a tapered surface, and a spool valve type mechanically operated valve is provided. (4) In the technical ideas (1) to (3), at least one of the shafts includes a shaft portion, a piston provided on an inner end side of the shaft portion, and an axial line at a central portion of the piston. A spool valve type machine operated valve, comprising: a mounting hole with a thread groove formed along the direction.

(5) Claims 2 to 4, technical idea (1)
In (4) to (4), the spool urging means is a spring for urging the piston by being housed in the pressure acting space of the one to be evacuated, and the spool valve type mechanical operation is characterized. valve.

The technical terms used in the present specification are defined as follows. "Fluid: Refers to nitrogen, oxygen, argon, carbon dioxide, hydrogen, air, which is a mixture thereof, and other gases, as well as liquids such as water."

[0055]

As described above in detail, according to the inventions described in claims 1 to 4, there is provided a spool valve type mechanically operated valve having the advantages of both the spool valve type and the poppet valve type. You can Specifically, cost reduction, overall size reduction, reliability improvement, durability improvement, response improvement, etc. can be achieved.

In particular, according to the second aspect of the invention, bidirectional self-holding can be achieved, so that the overall size can be further reduced.

[Brief description of drawings]

FIG. 1A is a plan view of a spool valve type mechanically operated valve according to an embodiment, and FIG. 1B is a left side view of the mechanically operated valve.
(C) is a bottom view of the machine operating valve, and (d) is a JIS symbol indicating the machine operating valve.

FIG. 2 is a sectional view of the machine operation valve.

FIG. 3 is a sectional view of the machine operation valve.

FIG. 4 is a graph for explaining a difference in characteristics between a poppet valve type mechanically operated valve and a spool valve type mechanically operated valve.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Mechanical valve of spool valve type, 2 ... Body as valve body, 13 ... A port, 14 ... V port, 16 ... R
Port, 21 ... Poppet valve part, 32 ... Piston, 38 ...
Coil spring as spool urging means, 39 ... Fluid discharge communication passage, R1 ... First pressure acting space R2 ... Second pressure acting space, S1
… Spool, B1… first valve seat, B2… second valve seat.

Claims (4)

[Claims] 1. A spool (S1) is housed in a spool chamber formed inside a valve body (2) so as to be capable of reciprocating along its axial direction, and the end of the spool (S1) is mechanically operated. In the mechanical valve (1) of the spool valve type in which the fluid flow path is switched by doing so, a valve seat (B1) also functioning as a stopper is provided in the spool chamber and abuts against the valve seat (B1). The spool (S1) is provided with a poppet valve portion (21) that can slide but cannot slide.
Is provided on the valve seat (B1) and the poppet valve portion by pressing the spool (S1) in a specific direction along the axis of the spool (S1) by a pressing force based on the differential pressure of the fluid in the valve body (2). A spool valve type mechanically operated valve configured to be held in contact with (21). 2. A spool (S1) is housed in a spool chamber formed inside a valve body (2) so as to be capable of reciprocating along its axial direction, and the end of the spool (S1) is mechanically operated. In the mechanical valve (1) of the spool valve type in which the fluid flow path is switched by doing so, the first and second valve seats (B1, B2) also functioning as stoppers are provided facing each other in the spool chamber, The spool (S1) is provided with a poppet valve portion (21) capable of abutting and non-sliding contact with each of the valve seats (B1, B2), and the spool due to the differential pressure of the fluid in the valve body (2). (S1
) In a specific direction along its axis, the first valve seat (B1) and the poppet valve portion (21) are held in contact with each other and the second valve seat (B2) is held. And the poppet valve portion (21) are held in a separated state, and the spool (S1) is pressed in the direction opposite to the specific direction by the urging force of the spool urging means (38),
The second valve seat (B2) and the poppet valve portion (21) are kept in contact with each other, and the first valve seat (B1) and the poppet valve portion (21) are kept in separation state. Spool valve type mechanically operated valve that is configured to. 3. A piston (32) is formed on a part of said spool (S1) and pressure acting spaces (R1, R2) are defined on both sides of said piston (32), and said pressure acting space (R1, R2). 3. A spool valve type according to claim 1 or 2, wherein the fluid inside one of the above is discharged by vacuuming to generate a differential pressure for pressing the spool (S1). Machine operated valve. 4. The first valve seat (B1) of the plurality of ports (13, 14, 16) provided in the valve body (2) is in contact with the poppet valve portion (21). And the second valve seat (B2) and the poppet valve portion (21)
The port (13) which is in a vacuum state when the two are separated from each other and the pressure acting space (R1) in which the vacuum is performed are connected through the fluid discharge communication passageway (39). The spool valve type mechanically operated valve according to claim 3, wherein