JPH09229911A - Transmission type ultrasonic inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transmission type ultrasonic inspection device which is not limited by the size of an object under inspection, and capable of performing inspection of high precision. SOLUTION: The inspection device is provided with a wave sending probe 2 which sends ultrasonic wave toward an object under inspection 1 and a wave receiving probe 12 which receives the ultrasonic wave that is sent from the wave sending probe 2 and passes through the object 1. In addition, magnets 6 and 16 which, thanks to the magnetic force acting between the wave sending probe 2 and the wave receiving probe 12, make the wave sending prove 2 and the wave receiving probe 12 face each other interposing the object 1 in between are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transmission type ultrasonic inspection apparatus for inspecting the inside of a subject based on the information of the ultrasonic waves transmitted through the subject.

[0002]

2. Description of the Related Art A transmission type ultrasonic inspection apparatus is known which sends ultrasonic waves to a subject and receives the ultrasonic waves transmitted through the subject to inspect the inside of the subject. In the ultrasonic inspection apparatus (prior art 1) shown in FIG. 3, a plate-shaped receiving probe 10 having an area larger than the inspection region of the subject 1 is used.
The subject 1 is placed above the subject 1, and the subject 1 is inspected by scanning the transmitting probe 102 from the upper side of the subject 1 with a scanner 103 having an XYZ axis drive mechanism. The transmitting probe 102 is scanned in the XY plane by the scanner 103, and the entire surface of the subject 1 is irradiated with ultrasonic waves at a predetermined pitch. A part of the ultrasonic wave transmitted from the wave transmitting probe 102 is transmitted through the subject 1 and received by the wave receiving probe 101, and at each point as a function of the XY coordinate of the ultrasonic wave transmitting point. Since the reception intensity of ultrasonic waves is obtained, a two-dimensional image of the subject 1 is created based on this reception intensity.

Ultrasonic inspection apparatus shown in FIG. 4 (prior art 2)
Then, the wave transmission probe 105 and the wave reception probe 106 are attached to the tip of the branched arm 104 so as to face each other, and the arm 104 is driven by a scanner (not shown). By scanning the opposing wave-transmitting probe 105 and wave-receiving probe 106 in the ZY plane across the subject 1, the reception intensity of the ultrasonic wave at each point on the ZY coordinates can be obtained. A two-dimensional image of the subject 1 is obtained based on the reception intensity.

[0004]

However, in the ultrasonic inspection apparatus of Prior Art 1, the size (area) of the inspected object 1 is limited by the area of the receiving probe 101, and As the area of the wave probe 101 increases, the ratio of the receiving area to the entire area of the wave receiving probe 101 decreases, the reception sensitivity decreases, and the inspection accuracy decreases.

Further, in the ultrasonic inspection apparatus of the prior art 2,
Arm 104 for inspecting a large (large area) subject 1
However, if the arm length is increased, the deflection of the arm 104 at the time of scanning becomes large.
05 and the wave-receiving probe 106 are displaced from the regular facing positions, and there is a problem that the accuracy of the inspection data is significantly deteriorated particularly when scanning at high speed.

An object of the present invention is to provide a transmission type ultrasonic inspection apparatus capable of performing an accurate inspection even on a large area subject.

[0007]

FIG. 1 shows an embodiment of the present invention.
2 will be described in association with FIG. 2, the invention according to claim 1 is a probe for transmitting waves 2 for transmitting ultrasonic waves toward the subject 1, and a probe for transmitting waves that has passed through the subject 1. Due to the magnetic force acting between the wave-receiving probe 12 that receives the ultrasonic waves from the child 2, and the wave-transmitting probe 2 and the wave-receiving probe 12, the wave-transmitting probe 2 and the wave-receiving probe 12 are received. The above-described object is achieved by including the positioning means 6 and 16 for causing the wave probe 12 to face each other with the subject 1 interposed therebetween. The invention according to claim 2 comprises: a wave-transmitting probe 2 for transmitting ultrasonic waves from the liquid toward the subject 1 in the liquid; and a wave-transmitting probe 2 that has passed through the subject 1. Receiving probe for receiving ultrasonic waves in liquid 1
2 and the magnetic force acting between the wave-transmitting probe 2 and the wave-receiving probe 12, the wave-transmitting probe 2 and the wave-receiving probe 12 face each other across the subject 1. The above-described object is achieved by including the aligning means 6 and 16 for causing the wave transmitting probe 2 and the levitation means for giving the buoyancy to the wave transmitting probe 2. The invention according to claim 3 comprises: a wave-transmitting probe 2 for transmitting ultrasonic waves from the liquid toward the subject 1 in the liquid; and a wave-transmitting probe 2 that has passed through the subject 1. By the wave-receiving probe 12 that receives ultrasonic waves in a liquid and the magnetic force acting between the wave-transmitting probe 2 and the wave-receiving probe 12, the wave-transmitting probe 2 and the wave-receiving probe 2 are received. The above-described object is achieved by including the positioning means 6 and 16 for causing the probe 12 to face each other with the subject 1 interposed therebetween, and the levitation means for giving buoyancy to the wave receiving probe 2. The invention according to claim 4 is the transmission type ultrasonic inspection apparatus according to any one of claims 1 to 3, wherein either one of the transmitting probe 2 and the receiving probe 12 is used. It further comprises a scanning means 9 for scanning the probe in accordance with the subject 1. According to a fifth aspect of the present invention, in the transmission ultrasonic inspection apparatus according to any one of the first to fourth aspects, the frictional force between the wave transmission probe 2 and the subject 1 is reduced. The sled-shaped sliding portion 5A is attached to the wave transmission probe 2. The invention according to claim 6 is the invention according to claims 1 to 5
In the transmission type ultrasonic inspection apparatus according to any one of items 1 to 5, the sled-shaped sliding portion 15A that reduces the frictional force between the wave receiving probe 12 and the subject 1 is used as the wave receiving probe. It is attached to 12.

According to the first aspect of the invention, the aligning means 6 and 16 cause the wave-transmitting probe 2 and the wave-receiving probe 12 to face each other with the subject 1 interposed therebetween by the magnetic force. In the invention according to claim 2, the alignment means 6 and 16 attach the wave-transmitting probe 2 and the wave-receiving probe 12 to the subject 1 by magnetic force.
The levitation means applies buoyancy to the wave-transmitting probe 2 by sandwiching them. In the invention according to claim 3, the positioning means 6 and 16 cause the wave-transmitting probe 2 and the wave-receiving probe 12 to face each other across the subject 1 by magnetic force, and the levitation means receives the wave. Buoyancy is applied to the probe 2. In the invention according to claim 4, the scanning means 9 scans one of the probe 2 for transmitting waves and the probe 12 for receiving waves according to the subject 1. In the invention according to claim 5, the sled-shaped sliding portion 5A reduces the frictional force between the wave transmission probe 2 and the subject 1. In the invention according to claim 6, the slidable sliding portion 15 is provided.
A reduces the frictional force between the wave receiving probe 12 and the subject 1.

In the means and means for solving the above problems which explain the constitution of the present invention, the drawings of the embodiments are used to make the present invention easy to understand. However, the present invention is not limited to this.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION

-First Embodiment- Hereinafter, a first embodiment of the transmission ultrasonic inspection apparatus according to the present invention will be described with reference to FIG. In FIG.
Reference numeral 1 is a plate-shaped object placed in water in a water tank (not shown) (for example, a target material for sputtering when a liquid crystal display is manufactured), and 2 is a cylindrical wave-transmitting ultrasonic wave downward in FIG. Probe 3, 3 is a probe holder for wave transmission, which holds a probe 2 for wave transmission with a predetermined distance from the subject 1, and 4 is a probe 2 for wave transmission and wave transmission. Adjustment screw for adjusting the mounting position relationship with the probe holder 3 for use
Is a sliding member (for example, made of fluororesin or polyimide resin) attached to the end of the wave transmission probe holder 3, 6
Is a cylindrical magnet for attraction provided coaxially with the wave transmitting probe 2, 7 is a magnet holder for slidably attaching the magnet 6 for attraction to the wave transmitting probe holder 3, and 8 is a magnet holder. Magnet holder 6
It is an adjusting screw that adjusts the mounting relationship between the probe holder 3 for wave transmission and the probe holder 3. The wave transmitting probe 2, the wave transmitting probe holder 3, the adjusting screw 4, the sliding member 5, the attracting magnet 6, the magnet holder 7 and the adjusting screw 8 constitute the wave transmitting unit U1. Reference numeral 9 denotes a scanner which is attached to the wave transmission probe holder 3 and scans the wave transmission unit U1 in accordance with the subject 1.

On the other hand, 12 is a cylindrical wave-receiving probe for receiving the ultrasonic waves transmitted through the subject 1, and 13 is a wave-receiving probe 12 with a predetermined distance from the subject 1. Retaining probe holder, 14 is an adjusting screw for adjusting the mounting positional relationship between the receiving probe 12 and the receiving probe holder 13, and 15 is a receiving probe. A sliding member (for example, made of fluorine resin or polyimide resin) attached to the end portion of the holder 13, 16 is a cylindrical attracting magnet provided coaxially with the wave receiving probe 12, and 17 is a wave receiving probe. Tentacle holder 1
3, a magnet holder for slidably attaching the attraction magnet 16 to the magnet holder 3, and a magnet holder 16 and a wave receiving probe holder 1
It is an adjusting screw for adjusting the mounting relationship with 3. Receiving probe 12, receiving probe holder 13, adjusting screw 14,
The sliding member 15, the attraction magnet 16, the magnet holder 17, and the adjusting screw 18 constitute the wave receiving unit U2.

Next, the operation when the subject 1 is inspected using the apparatus of the first embodiment configured as described above will be described. In FIG. 1, the probe holder 3 for transmitting waves
And the water in the water tank has entered the inside of the wave-receiving probe holder 13, so that the space between the wave-transmitting probe 2 and the object 1 and between the wave-receiving probe 12 and the object 1 are separated. The space is completely filled with water.

As shown in FIG. 1, since the magnet 6 of the wave sending unit U1 is attached to the subject 1 with its north pole facing the magnet 16 and the magnet 16 of the wave receiving unit U2 with its south pole facing toward the subject 1 respectively. 6 and the magnet 16 cause the wave-transmitting unit U1 and the wave-receiving unit U2 to move to the subject 1 from each other.
The wave-sending unit U1 and the wave-receiving unit U2 are sucked by sandwiching the sliding member 5 and the sliding member 15 respectively.
It adheres to both sides of the subject 1 via. Further, the wave sending unit U1 is slidable with respect to the subject 1 by the sliding member 5 and the wave receiving unit U2 is slidable with respect to the subject 1 by the sliding member 15, so that the wave sending unit U1 or The wave receiving unit U2 slides along with the subject 1 and is arranged at a position where the magnet 6 and the magnet 16 are coaxially opposed to each other. As described above, since the magnet 6 and the wave transmitting probe 2 and the magnet 16 and the wave receiving probe 12 are provided coaxially, the wave transmitting probe 2 and the wave receiving probe 2 are provided. The probe 12 will be arranged coaxially with each other.

The wave transmitting probe 2 is provided so as to be slidable in the vertical direction in FIG. 1 with respect to the holder 3, and can be fixed at an arbitrary position by an adjusting screw 4. Further, the wave receiving probe 12 is provided so as to be slidable in the vertical direction in FIG. 1 with respect to the holder 13, and can be fixed at an arbitrary position by the adjusting screw 14. Transmitting probe 2 and receiving probe 12
The subject 1 can be inspected by focusing the focus on the depth of a predetermined portion of the subject 1.

The magnet 6 is attached to the holder 3 slidably in the vertical direction in FIG. 1, and can be fixed at an arbitrary position by an adjusting screw 8. The magnet 16 is the holder 1
3 is attached so as to be slidable in the vertical direction in FIG. 1, and can be fixed at an arbitrary position by the adjusting screw 18. By changing the fixed positions of the magnets 6 and 16, the distance between the magnets 6 and 16 can be changed to optimize the attractive force between the wave sending unit U1 and the wave receiving unit U2. The suction force may be adjusted so that the coaxial relationship between the probe 2 and the probe 12 is most accurately maintained during the inspection described below. The optimum positions of the magnets 6 and 16 differ depending on the thickness of the subject 1 or whether the subject 1 is a magnetic body or not.

When the scanner 9 is operated with the wave-transmitting probe 2 and the wave-receiving probe 12 opposed to each other by a magnetic attraction force, the wave-transmitting probe is matched with the subject 1. Child 2 is scanned. At this time, the driving force of the scanner 9 applied to the wave transmission unit U1 is only the AB direction component in FIG. 1 and the driving force does not act in the vertical direction. When the wave unit U1 is lifted up from the subject 1, the wave transmission unit U
Also, the subject 1 is not pushed downward by 1.

When the scanner 9 scans the wave-transmitting unit U1 in the AB direction in accordance with the subject 1, the magnetic force between the magnets 6 and 16 causes the wave-receiving unit U2 to move. It follows U1 and moves in the AB direction. At this time, the transmitting probe 2 and the receiving probe 12 are maintained in a positional relationship such that they are substantially coaxial with each other.

In this way, in the state in which the transmitting probe 2 and the receiving probe 12 are scanned so as to face each other with the subject 1 in between, the transmitting probe 2 is periodically scanned. An electric pulse is applied. When an ultrasonic pulse is transmitted from the wave transmitting probe 2 in response to an electric pulse, the transmitted ultrasonic wave propagates in the water inside the wave transmitting probe holder 3 and is incident on the subject 1. . Part of the ultrasonic waves propagated in the subject 1 is the subject 1.
Is transmitted through the water and propagates in water inside the wave-receiving probe holder 13, and is received by the wave-receiving probe 12. The ultrasonic waves transmitted through the subject 1 at each point on the scanning surface in this way are received by the receiving probe 1.
At 2, the signal is converted into a received signal (electrical signal). Then, a two-dimensional image of the subject 1 is displayed based on the reception intensity of the received wave at each point.

As described above, in the apparatus according to the first embodiment, the wave sending unit U1 and the wave receiving unit U2 are attracted to each other by sandwiching the subject 1 by the magnet 6 and the magnet 16 and the probe 2 and Since the probe 12 and the probe 12 are always kept coaxial with each other, the wave-receiving unit U2 can follow and scan the object by simply driving the wave-transmitting unit U1. Therefore, a large-area test object can be easily and highly accurately tested without degrading the sensitivity.

In the first embodiment, the wave transmission unit U
Although 1 is driven by the scanner 9, the wave receiving unit U2 may be driven instead of driving the wave transmitting unit U1. When driving the wave-receiving unit U2, the wave-transmitting unit U1 moves following the wave-receiving unit U2. Therefore, as in the first embodiment, the wave-transmitting probe 2 and the wave-receiving unit U2 are received. The coaxial relationship with the probe 12 is maintained. Further, the upper and lower positions of the wave sending unit and the wave receiving unit may be interchanged, and in this case as well, the inspection can be performed by driving either one of the units.

Various materials can be used as the material of the sliding members 5 and 15, but the friction resistance between the sliding members 5 and 15 is small and the sliding members 5 and 15 are softer than the object 1 so as not to damage the object 1. It is preferable to use a material. Further, instead of the sliding member such as resin, for example, the wave transmission unit U1
Alternatively, a large number of rotatable balls or the like may be attached to the contact surface of the wave receiving unit U2 with the subject 1 to reduce the frictional force by rotating the balls or the like.

Buoyancy in water can be provided by forming a part of the wave-transmitting unit U1 or the wave-receiving unit U2 by a member having a smaller specific gravity than water, or by providing an air layer. For example, in FIG. 1, the receiving unit U2
When a part of the magnet is made of a material with a small specific gravity and buoyancy is given in water, the buoyancy acts in a direction to assist the magnetic force of the magnets 6 and 16, so the attraction force of the magnets 6 and 16 can be reduced. Becomes If the wave receiving unit U2 can be brought into close contact with the subject 1 only by buoyancy, the wave receiving unit U2 will not fall from the surface of the subject 1 without a magnetic force acting in the suction direction. If you use buoyancy in water like this,
The vector of the magnetic action force between the wave-transmitting unit U1 and the wave-receiving unit U2 in the attraction direction can be made small, or can be zero or negative (repulsion direction), and the following performance of the wave-receiving unit U2 can be obtained. The arrangement of the magnets can be selected to further improve

Further, for example, when buoyancy is applied to the wave transmission unit U1 in FIG. 1, the contact pressure between the wave transmission unit U1 and the subject 1 can be reduced, so Friction between them can be reduced and the drive by the scanner 9 can be made smoother. As described above, by appropriately combining the buoyancy and the magnetic force, it is possible to increase the degree of freedom in design and improve the relative positional accuracy between the wave transmission unit U1 and the wave reception unit U2.

In the first embodiment, water is used as a medium for propagating ultrasonic waves, but various ultrasonic wave propagating media (liquids) can be used depending on the characteristics of the subject. Further, in the first embodiment, the method of placing the whole subject in the water tank, that is, the case of adopting the so-called total immersion method has been described, but the ultrasonic inspection apparatus according to the present invention is applied to the local immersion method. You can also do it.

-Second Embodiment- A second embodiment of the transmission ultrasonic inspection apparatus according to the present invention will be described below with reference to FIG. The same elements as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

In FIG. 2, U1A is an ultrasonic wave for subject 1
5A is a unit for transmitting waves to the probe holder 3, and 5A is a pair of slidable sliding portions (for example, made of fluorine resin or polyimide resin), and 19 is a slidable sliding portion 5A attached to the probe holder 3. The support member 6A is a magnet embedded in the support member 19. Further, U2A is a wave receiving unit that receives ultrasonic waves transmitted through the subject 1, 15A is a pair of slidable sliding portions (for example, made of fluorine resin or polyimide resin), and 29 is a slidable sliding portion 15A. Is attached to the probe holder 13, and 16A is a support member 2
It is a magnet embedded in 9.

In FIG. 2, the magnet 6A and the magnet 16A are
The slidable sliding portions 5A and 15A are attached to each other in a direction in which they generate a suction force.
Are opposed to each other with the subject 1 interposed therebetween, and the wave transmission unit U1
A is a wave receiving unit U2A through a sled-like sliding portion 5A.
Each of them is brought into close contact with the subject 1 via the sled-shaped sliding portion 15A. In the state shown in FIG. 2 in which the wave transmission unit U1A and the wave reception unit U2A are attracted to each other via the subject 1, the wave transmission probe 2 of the wave transmission unit U1A
The wave receiving probe 12 of the wave receiving unit U2A is arranged coaxially with each other.

In the second embodiment configured as described above, the wave transmission unit U1 is driven by a scanner (not shown).
When A is driven, the wave-receiving unit U2A causes the wave-transmitting unit U1A by the magnetic force between the magnets 6A and 16A.
And the coaxial relationship between the wave transmitting probe 2 and the wave receiving probe 12 is maintained, so that transmission type ultrasonic inspection can be performed as in the first embodiment. .

In the second embodiment, since the sliding portion 5A and the sliding portion 15A are formed in a sled shape, the frictional force between the wave transmitting unit U1A and the subject 1 and the wave receiving unit. The frictional force between U2A and the subject 1 can be further reduced as compared with the first embodiment. Therefore, the motion of the wave transmission unit U1A becomes smoother, and
Since the followability of the wave receiving unit U2A is improved, the relative positional accuracy between the probe 2 and the probe 12 can be further improved. Further, by providing the slidable sliding portions 5A and 15A, the wave transmission unit U1A and the wave reception unit U2A can be stably brought into close contact with the subject 1 even at a position close to the end of the subject 1. it can.

Further, in the state where the subject 1 does not exist,
Wave transmission unit U1A by magnet 6A and magnet 16A
The wave-receiving unit U2A and the wave-receiving unit U2A can be suction-adhered to each other, but in that case, since the sliding portions 5A and 15A are raised to the opposite sides, the tips of the sliding portions 5A and 15A are bifurcated. (See Fig. 2). Therefore, when the inspection of the subject 1 is started, the wave sending unit U1A and the wave receiving unit U2A are adsorbed, and the subject 1 is inserted into the bifurcated gap formed at the tips of the sliding portions 5A and 15A. Thus, if the wave transmission unit U1A and the wave reception unit U2A are set on the subject 1,
The axis alignment of the wave transmission unit U1A and the wave reception unit U2A at the start of the inspection can be easily performed. After the inspection is completed, the wave transmission unit U1A and the wave reception unit U2A
While facing each other, both units U from the end of the subject 1
Since 1A and U2A can be pulled out, the work is simplified.

Various materials can be used as the material of the sliding portions 5A and 15A, but the friction resistance between the sliding portions 5A and 15A is small, and the specimen 1 is protected from damage.
It is preferable to use a softer material. Also,
Instead of using resin or the like, for example, sled-shaped sliding portions 5A, 1
A large number of freely rotatable balls or the like may be attached to the contact surface of 5A with the subject 1 to reduce the frictional force by rotating the balls or the like.

In the description of the embodiments and claims, the attraction magnet 6 and the attraction magnet 16 correspond to alignment means, and the scanner 9 corresponds to scanning means.

[0033]

According to the first aspect of the invention, the wave-transmitting probe and the wave-receiving probe are formed by the magnetic force acting between the wave-transmitting probe and the wave-receiving probe. Since the subject is opposed to each other with the subject in-between, the wave-transmitting probe and the wave-receiving probe are scanned by driving only the wave-transmitting probe or the wave-receiving probe. be able to. Therefore, inspection of a large-area subject can be performed accurately and easily. According to the second aspect of the present invention, since the levitation means for giving buoyancy to the wave-transmitting probe is provided, the wave-transmitting probe and the wave-receiving probe can be smoothly scanned. Claim 3
According to the invention described in (1), since the levitation unit that gives buoyancy to the wave receiving probe is provided, the wave transmitting probe and the wave receiving probe can be smoothly scanned. According to the invention described in claim 5, since the sled-shaped sliding portion for reducing the frictional force between the wave-transmitting probe and the subject is attached to the wave-transmitting probe, The probe can be smoothly scanned, and the edge of the subject can be inspected. According to the invention described in claim 6, since the sled-shaped sliding portion for reducing the frictional force between the wave receiving probe and the subject is attached to the wave receiving probe, You can make the scanning of the probe smooth,
It is possible to inspect the end of the subject.

[Brief description of drawings]

FIG. 1 is a diagram showing a first embodiment of a transmission ultrasonic inspection apparatus according to the present invention.

FIG. 2 is a diagram showing a second embodiment of a transmission ultrasonic inspection apparatus according to the present invention.

FIG. 3 is a diagram showing a conventional transmission type ultrasonic inspection apparatus (prior art 1).

FIG. 4 is a diagram showing a conventional transmission type ultrasonic inspection apparatus (prior art 2).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Subject 2 Wave-transmitting probe 5A Sliding part 6 Suction magnet 9 Scanner 12 Wave-receiving probe 15A Sliding part 16 Suction magnet

Claims (6)

[Claims] 1. A wave transmitting probe for transmitting ultrasonic waves toward a subject, and a wave receiving probe for receiving the ultrasonic waves from the wave transmitting probe that has passed through the subject. And the magnetic force acting between the wave-transmitting probe and the wave-receiving probe causes the wave-transmitting probe and the wave-receiving probe to face each other across the subject. A transmission type ultrasonic inspection apparatus comprising: a positioning unit. 2. A wave-transmitting probe that sends out ultrasonic waves from the liquid toward a subject in the liquid, and the ultrasonic wave from the wave-transmitting probe that has passed through the subject. The wave-receiving probe and the wave-receiving probe which receive in a liquid and the magnetic force acting between the wave-transmitting probe and the wave-receiving probe. A transmission type ultrasonic inspection apparatus comprising: a positioning unit that makes a child face each other with the subject interposed therebetween; and a levitation unit that gives buoyancy to the transmitting probe. 3. A wave-transmitting probe for transmitting ultrasonic waves from the liquid to a subject in the liquid, and the ultrasonic wave from the wave-transmitting probe transmitted through the subject. The wave-receiving probe and the wave-receiving probe which receive in a liquid and the magnetic force acting between the wave-transmitting probe and the wave-receiving probe. A transmission type ultrasonic inspection apparatus comprising: a positioning unit that makes a child face each other with the subject in between; and a levitation unit that gives a buoyancy force to the receiving probe. 4. A scanning means for scanning any one of the wave-transmitting probe and the wave-receiving probe in accordance with the subject. Item 1
4. The transmission type ultrasonic inspection apparatus according to any one of items 1 to 3. 5. A sled-shaped sliding portion for reducing frictional force between the wave-transmitting probe and the subject is attached to the wave-transmitting probe. ~ Any one of 4
The transmission type ultrasonic inspection device according to the item. 6. The wave receiving probe is provided with a sled-like sliding portion for reducing a frictional force between the wave receiving probe and the subject. ~ Any one of 5
The transmission type ultrasonic inspection device according to the item.