JPH09222150A - Vibration resistant supporting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a low vibration resistant supporting device. SOLUTION: Stabilizing plates 18 and laminated layer elastic bodies 16 are alternately placed over each other and a recessed part 25 is formed in the center of an uppermost stabilizing plate 18. A driving force generator 30 is attached to the bottom surface 28 of the recessed part 25. Since the driving force generator 30 is provided in the recessed part 25 formed in the uppermost stabilizing plate 18, the height of a vibration-resistant supporting device 14 is lower than that of the conventional device, the weight center position of a vibration-resistant base 10 is lower and the stability of the vibration-resistant base 10 is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anti-vibration support device that actively suppresses vibration transmission by active control of an anti-vibration mount, anti-vibration table, anti-vibration floor, anti-vibration floor and the like.

[0002]

2. Description of the Related Art As a device for preventing the transmission of vibrations from the installation floor, a vibration isolation / vibration mount, a vibration isolation table, a vibration isolation floor, etc. are used. These are supported by a mechanism (passive mechanism) such as an anti-vibration rubber or an air spring.
Vibration is prevented from being transmitted from the installation floor by making the support flexible and lowering the natural frequency.

In addition, in precision equipment, in addition to a passive mechanism, an active mechanism such as a voice coil motor is added and controlled to further actively suppress vibration transmission from the installation floor. There is.

[0004]

By the way, in order to flexibly support in all directions, a method of combining vertical and horizontal supports in series has been taken. In that case, it is effective to use a laminated elastic body with a horizontal spring constant that is much lower than the vertical spring constant for horizontal support.
By combining these in multiple stages in the vertical direction, the horizontal spring constant can be further reduced.

Specifically, as shown in FIGS. 19 and 20, a plurality of vibration isolation tables are provided on a floor 12 as an installation surface on which an isolation table 10 as an object for vibration isolation for installing a device 40 is installed. It is supported via the vibration support device 100.

As shown in FIGS. 21 and 22, the vibration isolation support device 100 includes laminated elastic bodies 16 and stabilizers 18 which are alternately laminated. The laminated elastic body 16 includes an elastomer layer 20 made of rubber or another elastomer material,
It has a structure in which reinforcing plates 22 such as metal plates or hard plastic plates are alternately laminated, and flange plates 24 are integrally fixed to the upper and lower ends by vulcanization adhesion or the like. This laminated elastic body 16 has a high spring constant in the axial direction (direction of arrow V) and a small spring constant in the direction orthogonal to the axial direction (direction of arrow H) compared to the axial direction. . Further, a plurality of laminated elastic bodies 1 are provided between the stabilizers 18 and 18.
6 are arranged at equal intervals.

Further, as shown in FIG. 23, the vibration isolation table 10 for mounting precision equipment has an active mechanism 102 added on a vibration isolation support device 100, and the vibration isolation table 10 is mounted thereon. There is.

However, when the vibration isolation support device 100, which is a passive mechanism, and the active mechanism 102 are combined in series as shown in FIG. 23, the height of the support mechanism increases,
Since the height of the vibration isolation table 10 becomes high, there are problems in that the installation is restricted and the center of gravity becomes high, so that the stability is deteriorated. Further, in the vibration isolation floor, since the height from the installation floor surface is also increased, there is a problem that the floor cannot be lowered.

In view of the above facts, the present invention has an object to provide an anti-vibration supporting device which can be made lower in height than conventional ones.

[0010]

According to a first aspect of the present invention, there is provided a structure in which laminated elastic bodies, which are provided on an installation surface and in which an elastomer layer and a reinforcing plate are alternately laminated, are combined in multiple stages in a vertical direction. And an actuator that actively generates a force so that the vibration isolation target does not vibrate in the vertical direction, and a vibration isolation support device, wherein the actuator is housed in a relief portion that opens at the top of the structure. The lower part of the actuator and the upper part of the structure are connected by a connecting member.

In the vibration isolating support device according to the first aspect of the present invention, the portion of the connecting member on which the actuator is mounted is set lower than the upper portion of the laminated elastic body. The overall height can be kept lower than that of the vibration support device.

The horizontal vibration of the installation surface is absorbed by the laminated elastic body and is prevented from being transmitted to the vibration isolation target. In addition, the actuator actively applies force to the vibration isolation target so that the vibration isolation target mounted on the top does not vibrate vertically due to the vertical vibration of the installation surface. There is no.

The invention described in claim 2 is the first invention.
In the anti-vibration supporting device described in (1), between the connection member and the installation surface or between the connection member and the vibration isolation target, the vibration isolation target is actively horizontal so as not to vibrate in the horizontal direction. It is characterized by the provision of a horizontal actuator that generates a directional force.

In the vibration isolating support device according to the second aspect of the invention, even when the horizontal elastic vibration cannot be absorbed by the laminated elastic body, the vibration is supported between the connecting member and the installation surface or between the connecting member and the vibration isolation target. Since the horizontal actuator provided therebetween actively generates a horizontal force, the vibration isolation target does not vibrate in the horizontal direction.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment] A first embodiment of the present invention will be described with reference to FIGS.

As shown in FIG. 1, the anti-vibration table 10 is supported on the installation floor surface 12 by an anti-vibration support device 14.

As shown in FIGS. 1 and 2, in this embodiment, the vibration isolation table 10 is supported by four vibration isolation support devices 14.

As shown in FIG. 3, the vibration isolation support device 14 includes
The laminated elastic body 16 and the stabilizer 18 which are laminated alternately are provided.

The laminated elastic body 16 has a structure in which an elastomer layer 20 made of rubber or another elastomer material and a reinforcing plate 22 such as a metal plate or a hard plastic plate are alternately laminated. The flange plate 24 is integrally fixed by vulcanization adhesion or the like. This laminated elastic body 16 has a high spring constant in the axial direction (direction of arrow V) and a small spring constant in the direction orthogonal to the axial direction (direction of arrow H) compared to the axial direction. .

As shown in FIGS. 3 and 4, in this embodiment, three laminated elastic bodies 16 are arranged at equal intervals between the stabilizers 18.

As shown in FIG. 3, a recess 25 is formed in the central portion of the uppermost stabilizer 18, and the stabilizer 18 below the stabilizer 18 having the recess 25 is the uppermost stabilizer. A hole 26 is formed so as to escape the convex portion of the upper stabilizer 18. In the present embodiment, the hole 26 and the laminated elastic body 16 are provided.
The space between the laminated elastic body 16 and the laminated elastic body 16 corresponds to the relief portion of the present invention.

A driving force generator 30 is mounted on the bottom surface 28 of the recess 25. As shown in FIG. 5, the driving force generator 30 includes a disc-shaped upper flange plate 32.
And a disk-shaped lower flange plate 34 as well, and the upper flange plate 32 and the lower flange plate 3 are provided.
4 is connected via a cylindrical vibration-proof rubber 36.

The driving force generator 30 is also provided with a vertical actuator 31 composed of a magnet 35, a yoke 37 and a coil 38.

At the center of the upper surface of the lower flange plate 34,
A cylindrical coil 38 is coaxially attached. On the other hand, in the center of the lower surface of the upper flange plate 32, a cylindrical magnet 3 is partially inserted into the coil 30.
Reference numeral 5 is coaxially attached to the coil 38 via a yoke 37 composed of a disk 37A made of a magnetic material and a cylinder 37B. The direction of the lines of magnetic force is the radial direction. Here, when an electric current is applied to the coil 38, the coil 38 generates a driving force in the axial direction (direction of arrow V), and the upper flange plate 32 is displaced in the axial direction.

As shown in FIG. 3, the upper flange plate 3
The upper surface of 2 is protruded by a predetermined dimension from the upper surface of the uppermost stabilizer plate 18, and when a predetermined device 40 is mounted on the vibration isolation table 10 as shown in FIGS. The lower surface of the upper flange plate 32 does not contact the upper surface of the upper flange plate 32.

An acceleration sensor 42 for detecting the vertical acceleration (direction of arrow A) of the vibration isolation table 10 is attached to the vibration isolation table 10. This acceleration sensor 42
Is connected to the control device 44, and the control device 44 applies a current to the coil 38 so as to suppress the vibration of the vibration isolation table 10 in the vertical direction.

Next, the operation of the present embodiment will be described. In the vibration isolation support device 14 of the present embodiment, horizontal vibration of the installation floor 12 is prevented from being transmitted to the vibration isolation table 10 by the laminated elastic body 16 having a low horizontal spring constant. In particular, in the present embodiment, since the plurality of laminated elastic bodies 16 are combined in series in the vertical direction, the spring constant in the horizontal direction can be further reduced, and the natural frequency can be made extremely low, whereby the installation floor 12 It is possible to prevent horizontal vibration transmission from the.

On the other hand, since the spring constant of the laminated elastic body 16 in the vertical direction is higher than that in the horizontal direction, the vertical vibration of the installation floor surface 12 may be transmitted to the uppermost stabilizer plate 18. However, in this case, the control unit 44 applies a current to the coil 38 so that the vibration isolation table 10 does not vibrate in the vertical direction, and a driving force is generated in the vertical actuator 31, so that the vibration isolation table 10 vibrates in the vertical direction. There is nothing to do.

Further, in this embodiment, the uppermost stabilizer 1 is provided.
Since the concave portion 25 is formed in the central portion of 8 and the driving force generation device 30 is installed here, the height of the vibration isolation support device 14 can be suppressed lower than before, and the center of gravity of the vibration isolation table 10 can be positioned. This lowers the stability of the vibration isolation table 10. [Second Embodiment] Next, a second embodiment of the present invention will be described with reference to FIGS. The same components as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

In this embodiment, an active mechanism for suppressing horizontal vibration is added to the first embodiment.

As shown in FIG. 6, in the center of the lower surface of the uppermost stabilizer 18, a shaft 50 whose axial direction is vertical is provided.
Are coaxially connected.

On the other hand, on the lowermost stabilizer plate 18, there is shown in FIG.
And a horizontal actuator 52A as shown in FIG.
And a horizontal actuator 52B.

As shown in FIG. 8, the horizontal actuators 52A and 52B include a drive shaft 56 to which a cylindrical coil 54 is attached, and a columnar magnet 58 partially inserted into the coil 54. The main body case 60 is provided.

The magnet 58 is attached to the main body case 60 via a base 59 made of metal or the like. The coil 54 is attached to the drive shaft 56 via a yoke 61 composed of a disc 61A and a cylinder 61B. The magnetic lines of force are in the radial direction.

A pair of rotary shafts 62 whose axial direction is horizontal are fixed to the outer peripheral surface of the main body case 60, and each rotary shaft 62 is a bearing plate 64 attached to the lowermost stabilizer plate 18. It is rotatably inserted in the hole 66.

As shown in FIG. 7, the drive shaft 56 of the horizontal actuator 52A and the drive shaft 56 of the horizontal actuator 52B are fixed at their distal ends to the outer peripheral surface of the shaft 50. Further, the drive shaft 56 of the horizontal actuator 52A and the drive shaft 56 of the horizontal actuator 52B are different from each other in the axial direction by 90 degrees, and the drive shaft 56 of the horizontal actuator 52A has a horizontal direction of arrow X in FIG. The drive shaft 56 of the actuator 52B is arranged along the arrow Y direction in FIG. The lower end of the shaft 50 is separated from the lowermost stabilizer plate 18 by a predetermined dimension, and the stabilizer plates 1 other than the lowermost and uppermost stabilizer plates 18 are separated.
A hole 26 is formed at 8.

As shown in FIG. 9, the vibration isolation table 10 has an acceleration sensor 68 for detecting the acceleration of the vibration isolation table 10 in the X direction, and the acceleration of the vibration isolation table 10 in the Y direction. Acceleration sensor 70 for These acceleration sensors 68 and 70 are control devices 44.
The control device 44 is connected to the arrow X of the vibration isolation table 10.
A current is passed through each coil 54 so as to suppress the vibration in the direction and the arrow Y direction (that is, the horizontal direction) to generate a driving force.

In this embodiment, the horizontal actuator 52A and the horizontal actuator 52B, which are active mechanisms, can positively suppress horizontal vibration transmission from the installation floor surface 12. This allows
It is possible to suppress transmission of horizontal vibration that cannot be removed by the laminated elastic body 16. [Third Embodiment] Next, a third embodiment of the present invention will be described with reference to FIGS. The same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIGS. 10 and 11, in the vibration isolation support device 14 of this embodiment, an air spring type driving force generator 72 is mounted on the bottom surface 28 of the recess 25.

The driving force generator 72 has a circular base plate 74A mounted on the bottom surface 28 of the recess 25 and a cylindrical member 74 connected to the base plate 74A without any gap.
A cylindrical mounting plate 78 is elastically supported above the inner peripheral surface of the cylindrical member 74B via an annular thin elastic film 76 made of a material such as rubber. ing.

Case 74, thin elastic film 76 and mounting plate 7
The inner space surrounded by 8 is filled with air and is in a hermetically sealed state, and the case 74, the thin elastic film 76, and the mounting plate 7 are enclosed.
A so-called air spring is constituted by 8.

The coil 38 is coaxially mounted on the upper surface of the base plate 74A, and the magnet 35 and the yoke 37 are coaxially mounted on the lower surface of the mounting plate 78.

In this embodiment, since the driving force generator 72 itself is an air spring, the spring constant can be set extremely low, and the vibration isolation performance can be further improved.

Also, in this embodiment, the uppermost stabilizer 18 is also used.
Since the concave portion 25 is formed in the central portion of the machine, and the driving force generator 72 is installed here, the height of the vibration isolation support device 14 can be kept lower than before, and the center of gravity of the vibration isolation table 10 is low. Therefore, the stability of the vibration isolation table 10 is improved.

The other configurations, operations and effects are similar to those of the first embodiment. [Fourth Embodiment] Next, a fourth embodiment of the present invention will be described with reference to FIG. The same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 12, this embodiment is the third embodiment.
In the embodiment (see FIGS. 10 and 11), a horizontal actuator 52A and a horizontal actuator 52B, which are active mechanisms for suppressing the horizontal vibration described in the second embodiment, are added. Horizontal vibration transmission from the installation floor 12 can be positively suppressed.

Therefore, in this embodiment, the vibration isolation performance can be further improved as compared with the third embodiment. [Fifth Embodiment] Next, a fifth embodiment of the present invention will be described with reference to FIGS. The same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof will be omitted.

The driving force generator 30 of the above-described embodiment
Was designed to generate a vertical driving force,
The driving force generation device 80 of the present embodiment is configured to generate a horizontal driving force in addition to a vertical driving force.

As shown in FIG. 14, the driving force generator 80 of the present embodiment includes a horizontal actuator 95 composed of a coil mounting plate 82, a coil 86, a magnet mounting plate 88, a magnet 92 and a yoke 94, and a coil. A horizontal actuator 97 including a mounting plate 84, a coil 86, a magnet mounting plate 90, a magnet 92, and a yoke 94 is provided.

The coil mounting plates 82, 84 extending vertically are provided in the vicinity of the anti-vibration rubber 36 on the upper surface of the lower flange plate 34.
Is attached. The coil mounting plates 82 and 84 include
Cylindrical coil 86 is provided on the surface facing the coil 38, respectively.
Is fixed.

The coil 86 of the coil mounting plate 82 and the coil 86 of the coil mounting plate 84 are axially different from each other by 90 degrees, and the axial direction of the coil 86 of the coil mounting plate 82 is in the arrow X direction. The direction of the coil 86 axis is arrow Y
Along the direction.

On the disk 37A of the yoke 37, a magnet mounting plate 88 is fixed in parallel with the coil mounting plate 82, and a magnet mounting plate 90 is fixed in parallel with the coil mounting plate 84.

In the magnet mounting plate 88, a cylindrical magnet 92, a part of which is inserted into the inside of the coil 86 on a surface facing the coil mounting plate 82, and a circular plate 94 made of a magnetic material.
It is mounted coaxially with the coil 86 via a yoke 94 composed of A and a cylinder 94B. Further, on the magnet mounting plate 90, a cylindrical magnet 92, a part of which is inserted into the coil 86, is also formed on the surface facing the coil mounting plate 84.
It is mounted coaxially with the coil 86 via a yoke 94 composed of B.

Also in this embodiment, since the recessed portion 25 is formed in the central portion of the uppermost stabilizer plate 18 and the driving force generator 80 is installed therein, the vibration isolation support device 14 of the vibration isolation support device 14 is the same as in the above-described embodiment. The height can be kept lower than in the conventional case, the center of gravity of the vibration isolation table 10 is lowered, and the stability of the vibration isolation table 10 is improved.

Here, each coil 86 is connected to the controller 44 (not shown), and when a current is passed through the coil 86, a driving force in the axial direction is generated in the magnet 92. Therefore, when an electric current is applied to the coil 86 of the coil attachment plate 82, a driving force in the direction of arrow X is generated in the magnet 92 of the magnet attachment plate 88, and the coil 86 of the coil attachment plate 84 is generated.
When a current is applied to the magnet mounting plate 90, a driving force in the direction of the arrow Y is generated in the magnet 92 of the magnet mounting plate 90, and a driving force in the horizontal direction is applied to the upper flange plate 32, so that the installation floor surface 12 is the same as in the second embodiment. It is possible to positively suppress horizontal vibration transmission from the. [Sixth Embodiment] Next, a sixth embodiment of the present invention will be described with reference to FIGS. The same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIGS. 16 and 17, the driving force generator 96 of the present embodiment includes a horizontal actuator 95 and a horizontal actuator 95 for generating a horizontal driving force to the air spring type driving force generator 72 described above. Directional actuator 9
7 is added.

Also in this embodiment, since the recess 25 is formed in the central portion of the uppermost stabilizing plate 18 and the driving force generating device 80 is installed therein, the vibration isolating support device 1 is the same as the above-described embodiments.
The height of 4 can be kept lower than before, and the vibration isolation table 1
The center of gravity position of 0 is lowered, and the stability of the vibration isolation table 10 is improved.

Here, each coil 86 is connected to the controller 44 (not shown), and when a current is passed through the coil 86, a driving force in the axial direction is generated in the magnet 92. Therefore, when an electric current is applied to the coil 86 of the coil attachment plate 82, a driving force in the direction of arrow X is generated in the magnet 92 of the magnet attachment plate 88, and the coil 86 of the coil attachment plate 84 is generated.
When an electric current is applied to the magnet mounting plate 90, a driving force in the direction of the arrow Y is generated in the magnet 92 of the magnet mounting plate 90, and a driving force in the horizontal direction is applied to the upper flange plate 32, so that the installation floor surface 12 is the same as the second embodiment. It is possible to positively suppress horizontal vibration transmission from the.

In the above-described embodiment, an example in which the vibration isolation table 10 is mounted on the vibration isolation support device 14 has been described. However, what is mounted on the vibration isolation support device 14 is not limited to the vibration isolation table 10. The object may be any type of object as long as it does not need to be vibrated. For example, a precision device or the like may be directly mounted on the vibration isolation support device 14.

Further, if a vibration isolation floor is mounted on the vibration isolation support device 14 of the present embodiment, the height of the floor surface can be made lower than in the conventional case. Height restrictions are relaxed.

[0061]

As described above, in the vibration isolating support device according to the first aspect of the invention, the portion of the connecting member on which the actuator is mounted is set lower than the upper portion of the laminated elastic body. It has an excellent effect that the total height can be suppressed to be lower than that of the conventional vibration isolation supporting device having the actuator mounted therein.

Further, in the vibration isolating support device according to the second aspect, the vibration isolating target is active so as not to horizontally vibrate between the connecting member and the installation surface or between the connecting member and the vibration isolating target. Since a horizontal actuator that horizontally generates a horizontal force is provided, even if the horizontal vibration cannot be absorbed by the laminated elastic body, it is possible to reliably suppress the horizontal vibration of the vibration isolation target. Has excellent effect.

[Brief description of drawings]

FIG. 1 is a side view of a vibration isolation support device and a vibration isolation base according to a first embodiment of the present invention.

FIG. 2 is a plan view of a vibration isolation support device and a vibration isolation table shown in FIG.

3 is a vertical cross-sectional view of the vibration isolation support device shown in FIG.
3 is a sectional view taken along line -3).

FIG. 4 is a plan view of the vibration isolation support device shown in FIG.

FIG. 5 is an enlarged view of the driving force generation device shown in FIG.

FIG. 6 is a vertical cross-sectional view of a vibration isolation support device according to a second embodiment.

7 is a sectional view taken along line 7-7 of the vibration isolation support system shown in FIG.

8 is a cross-sectional view of the horizontal actuator shown in FIG.

FIG. 9 is a plan view of a vibration isolation support device and a vibration isolation table according to a second embodiment.

FIG. 10 is an enlarged cross-sectional view of a drive force generator of a vibration isolation support system according to a third embodiment.

FIG. 11 is a vertical cross-sectional view of a vibration isolation support device according to a third embodiment.

FIG. 12 is a vertical cross-sectional view of an anti-vibration support device according to a fourth embodiment.

FIG. 13 is a vertical cross-sectional view of a driving force generation device of a vibration isolation support device according to a fifth embodiment (1 of the driving force generation device shown in FIG. 14).
3 is a sectional view taken along the line 3-13).

14 is a sectional view taken along line 14-14 of the driving force generator shown in FIG.

FIG. 15 is a vertical cross-sectional view of a vibration isolation support device according to a fifth embodiment.

FIG. 16 is a vertical cross-sectional view of a driving force generator of a vibration isolation support system according to a sixth embodiment (1 of the driving force generator shown in FIG. 17).
6 is a sectional view taken along line 6-16).

17 is a sectional view taken along line 17-17 of the driving force generator shown in FIG.

FIG. 18 is a vertical cross-sectional view of a vibration isolation support device according to a sixth embodiment.

FIG. 19 is a side view of a conventional anti-vibration support device and anti-vibration table.

20 is a plan view of the anti-vibration support device and anti-vibration table shown in FIG.

21 is a side view of the anti-vibration support device shown in FIG. 19. FIG.

22 is a plan view of the anti-vibration support device shown in FIG. 21. FIG.

FIG. 23 is a side view of a conventional example in which a vibration isolation support device and an active mechanism are combined in series.

[Explanation of symbols]

 10 Vibration Isolation Table (Vibration Isolation Target) 12 Installation Floor Surface (Installation Surface) 14 Vibration Isolation Supporting Device 16 Laminated Elastic Body 18 Stabilizer Plate (Coupling Member) 26 Hole (Escape Area) 31 Vertical Actuator 95 Horizontal Actuator 97 Horizontal Direction Actuator 52A Horizontal actuator 52B Horizontal actuator

Claims (2)

[Claims] 1. A structure in which laminated elastic bodies, which are provided on an installation surface and in which elastomer layers and reinforcing plates are alternately laminated, are combined in multiple stages in the vertical direction, and a vibration isolation target does not vibrate in the vertical direction. An anti-vibration support device including an actuator that actively generates a force, wherein the actuator is housed in a clearance portion that opens at an upper portion of the structure, and a lower portion of the actuator and an upper portion of the structure are provided. An anti-vibration support device characterized by being connected by a connecting member. 2. A horizontal force is actively applied between the connecting member and the installation surface or between the connecting member and the vibration isolation target so that the vibration isolation target does not vibrate in the horizontal direction. The anti-vibration supporting device according to claim 1, further comprising a horizontal actuator that generates the vibration.