JPH09202990A - Copper plating liquid - Google Patents
Copper plating liquidInfo
- Publication number
- JPH09202990A JPH09202990A JP4198796A JP4198796A JPH09202990A JP H09202990 A JPH09202990 A JP H09202990A JP 4198796 A JP4198796 A JP 4198796A JP 4198796 A JP4198796 A JP 4198796A JP H09202990 A JPH09202990 A JP H09202990A
- Authority
- JP
- Japan
- Prior art keywords
- copper
- plating liquid
- copper plating
- plating
- plating solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 title claims abstract description 41
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 239000010949 copper Substances 0.000 title claims abstract description 34
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 34
- 239000007788 liquid Substances 0.000 title abstract description 8
- 150000003839 salts Chemical class 0.000 claims abstract description 12
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910001431 copper ion Inorganic materials 0.000 claims abstract description 6
- 239000013522 chelant Substances 0.000 claims abstract description 5
- 229910019142 PO4 Inorganic materials 0.000 claims abstract description 3
- 229910001854 alkali hydroxide Inorganic materials 0.000 claims abstract description 3
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims abstract description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims abstract description 3
- 239000010452 phosphate Substances 0.000 claims abstract description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims abstract 2
- 229910002651 NO3 Inorganic materials 0.000 claims abstract 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims abstract 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 231100000614 poison Toxicity 0.000 abstract description 3
- 230000007096 poisonous effect Effects 0.000 abstract description 3
- 230000002378 acidificating effect Effects 0.000 abstract description 2
- 150000002739 metals Chemical class 0.000 abstract description 2
- 230000002498 deadly effect Effects 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 239000008139 complexing agent Substances 0.000 description 5
- 229910000365 copper sulfate Inorganic materials 0.000 description 5
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 210000004243 sweat Anatomy 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 150000001879 copper Chemical class 0.000 description 2
- DOBRDRYODQBAMW-UHFFFAOYSA-N copper(i) cyanide Chemical compound [Cu+].N#[C-] DOBRDRYODQBAMW-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 235000011121 sodium hydroxide Nutrition 0.000 description 2
- 239000012085 test solution Substances 0.000 description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- AVTYONGGKAJVTE-OLXYHTOASA-L potassium L-tartrate Chemical compound [K+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O AVTYONGGKAJVTE-OLXYHTOASA-L 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 239000001472 potassium tartrate Substances 0.000 description 1
- 229940111695 potassium tartrate Drugs 0.000 description 1
- 235000011005 potassium tartrates Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 229910052979 sodium sulfide Inorganic materials 0.000 description 1
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Landscapes
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は銅メッキ液、特にノ
ーシアン銅メッキ液に係るものであり、亜鉛,アルミニ
ウム,鉄など、酸性の銅メッキ液では密着しにくい金属
の表面上に、銅メッキを密着性よくメッキする為の浴に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copper plating solution, in particular, a non-cyan copper plating solution, in which copper plating is performed on the surface of a metal such as zinc, aluminum or iron which is difficult to be adhered by an acidic copper plating solution. It relates to a bath for plating with good adhesion.
【0002】[0002]
【従来の技術】亜鉛,アルミニウム,鉄などは、耐蝕性
を向上させるため、その表面上に、銅,ニッケル,クロ
ム,金などがメッキされている。これらの金属に銅メッ
キを施すには、従来では、シアン化銅メッキが行われて
いた。2. Description of the Related Art Zinc, aluminum, iron, etc. are plated with copper, nickel, chromium, gold, etc. on their surfaces in order to improve their corrosion resistance. In order to apply copper plating to these metals, copper cyanide plating has been conventionally performed.
【0003】[0003]
【発明が解決しようとする課題】しかし、シアン系の銅
メッキは猛毒であり、排水処理をするのに多大の費用と
長い処理時間を要していた。However, the cyan copper plating is extremely poisonous, and it requires a great deal of expense and a long treatment time to treat the waste water.
【0004】本発明は、上記従来技術に鑑み、猛毒のシ
アンを使用することなく、密着性が良好で且つ外観の優
れた銅メッキを実現することのできる銅メッキ液を提供
することを目的とする。In view of the above prior art, it is an object of the present invention to provide a copper plating solution capable of realizing copper plating having good adhesion and excellent appearance without using highly poisonous cyanide. To do.
【0005】[0005]
【課題を解決するための手段】上記課題を解決する本発
明は、銅イオンを5〜200g/l含有することを特徴
とする。また、pHが5以上であることを特徴とする。
また、銅とのキレート安定度定数が2.0以上である錯
化物を、銅と等モル以上含有することを特徴とする。更
に、電導塩として、硫酸塩,炭酸塩,硝酸塩,塩化物,
リン酸塩,水酸化アルカリの中から少なくとも1つを含
有し、しかも、含有した各電導塩の各濃度を1〜200
g/lとしたことを特徴とする。The present invention for solving the above-mentioned problems is characterized by containing copper ions in an amount of 5 to 200 g / l. Further, it is characterized in that the pH is 5 or more.
In addition, a complex compound having a chelate stability constant with copper of 2.0 or more is contained in an amount of equimolar or more with copper. Furthermore, as conductive salts, sulfates, carbonates, nitrates, chlorides,
It contains at least one of phosphate and alkali hydroxide, and the concentration of each conductive salt contained is 1 to 200
It is characterized by being set to g / l.
【0006】[0006]
【発明の実施の形態】銅塩に対する錯化剤を銅と等モル
以上含有し、且つ、電導塩を1〜200g/l含む本発
明の銅メッキ液によれば、シアンを用いることなく、密
着性が良好で外観の優れた銅メッキができる。BEST MODE FOR CARRYING OUT THE INVENTION According to the copper plating solution of the present invention containing a complexing agent for a copper salt in an amount of equimolar or more to copper and containing a conductive salt in an amount of 1 to 200 g / l, adhesion can be achieved without using cyan Copper plating with good properties and excellent appearance can be formed.
【0007】ノーシアン銅塩,錯化剤,電導塩からなる
銅メッキ液は、亜鉛,アルミニウム,鉄材に対してすぐ
れた密着性を示し、また、光沢もよいので、装身具関係
の下地メッキとして最適である。A copper plating solution consisting of a non-cyan copper salt, a complexing agent, and a conductive salt exhibits excellent adhesion to zinc, aluminum and iron materials, and also has a good luster, so it is most suitable as an undercoat for accessories. is there.
【0008】本発明の銅メッキ液において、仮に、銅イ
オンが5g/l未満では、つきまわりが悪く密着性もよ
くない。また銅イオンが200g/l以上では錯化剤を
加えたときに沈澱を生ずる。pHが5未満では、つきま
わりが悪く密着性も悪い。錯化剤が銅と等モル以下では
pHを上げたときに沈澱を生ずる。また、キレート安定
度定数が2.0以下では電解したときに液が分解する。In the copper plating solution of the present invention, if the copper ion content is less than 5 g / l, the throwing power is poor and the adhesion is poor. When the copper ion content is 200 g / l or more, precipitation occurs when the complexing agent is added. When the pH is less than 5, the throwing power is poor and the adhesion is poor. If the complexing agent is less than equimolar to copper, precipitation will occur when the pH is raised. If the chelate stability constant is 2.0 or less, the liquid decomposes when electrolyzed.
【0009】電導塩濃度が1g/l以下では電解電圧が
高くなり、銅が析出しにくくなり、電導塩濃度が200
g/l以上では建浴コストが高くなり、また、溶解度の
関係で沈澱しやすくなる。錯化剤を電導塩をかねて多く
入れる方法もあるが、やはり建浴コストが高くなる。When the conductive salt concentration is 1 g / l or less, the electrolysis voltage becomes high, copper is less likely to deposit, and the conductive salt concentration is 200
If it is more than g / l, the bath cost is high, and it is likely to precipitate due to the solubility. There is also a method of adding a large amount of complexing agent to serve as a conductive salt, but this also increases the bath cost.
【0010】[0010]
【実施例】以下本発明を実施例によってさらに詳細に説
明する。EXAMPLES The present invention will now be described in more detail with reference to Examples.
【0011】<実施例1>硫酸銅10g/l,クエン酸
ナトリウム50g/l,硫酸ナトリウム100g/lを
水にとかし、カセイソーダでpH7.0に調整した。常
法により前処理を施した20mm×20mmの鉄板に5
0℃,1A/dm2で3分間メッキした。さらに光沢硫
酸銅メッキを10μm,光沢ニッケルメッキを5μm施
した。<Example 1> 10 g / l of copper sulfate, 50 g / l of sodium citrate, and 100 g / l of sodium sulfate were dissolved in water and adjusted to pH 7.0 with caustic soda. 5 mm on a 20 mm x 20 mm iron plate that has been pretreated by a conventional method
It was plated at 0 ° C. and 1 A / dm 2 for 3 minutes. Further, bright copper sulfate plating was applied to 10 μm and bright nickel plating was applied to 5 μm.
【0012】上記の処理により出来上ったメッキ面は光
沢があり90°におりまげてもメッキのハクリはなかっ
た。The plated surface produced by the above treatment was glossy and there was no peeling of the plating even if it was bent at 90 °.
【0013】<実施例2>硝酸銅50g/l,酒石酸カ
リウム150g/l,硝酸カリウム30g/lを水にと
かし、カセイカリでpHを10に調整した。25mm×
25mmの亜鉛板を常法により前処理を施し、前記メッ
キ液を40℃に加熱し、2A/dm2で5分間メッキし
た。さらに光沢硫酸銅メッキを15μm,光沢ニッケル
メッキを5μm,クロムメッキを0.2μm施した。Example 2 50 g / l of copper nitrate, 150 g / l of potassium tartrate and 30 g / l of potassium nitrate were dissolved in water, and the pH was adjusted to 10 with caustic. 25 mm x
A 25 mm zinc plate was pretreated by a conventional method, the plating solution was heated to 40 ° C., and plated at 2 A / dm 2 for 5 minutes. Further, bright copper sulfate plating was applied to 15 μm, bright nickel plating was applied to 5 μm, and chromium plating was applied to 0.2 μm.
【0014】上記の処理により出来上ったメッキ面は光
沢があり90°におりまげてもメッキのハクリはなかっ
た。The plated surface produced by the above treatment was glossy and there was no peeling of the plating even if it was bent at 90 °.
【0015】<実施例3>硫酸銅30g/l,EDTA
(エチレンジアミンテトラ酢酸)・2Na 100g/
l,炭酸ソーダ50g/lを水にとかし、カセイソーダ
でpHを8.5に調整した。亜鉛ダイキャスト製のベル
ト用バックルを研磨した後、常法により前処理を施し、
45℃に加熱した前記メッキ液中で3A/dm2,3分
間メッキした。さらに光沢硫酸銅メッキを12μm,光
沢ニッケルメッキを10μm,金メッキを1μm施し
た。Example 3 Copper sulfate 30 g / l, EDTA
(Ethylenediaminetetraacetic acid) ・ 2Na 100 g /
1 and 50 g / l of sodium carbonate were dissolved in water, and the pH was adjusted to 8.5 with caustic soda. After polishing the buckle for belt made of zinc die-cast, pretreatment is performed by the usual method,
Plating was performed for 3 minutes at 3 A / dm 2 in the plating solution heated to 45 ° C. Further, bright copper sulfate plating was applied to 12 μm, bright nickel plating was applied to 10 μm, and gold was applied to 1 μm.
【0016】このベルト用バックルをアンモニアバッキ
試験24時間,人工汗試験24時間,おりまげ試験を夫
々各2ピースづつ行ったが、いずれも異常なかった。This belt buckle was subjected to an ammonia backing test for 24 hours, an artificial sweat test for 24 hours, and a flapping test for each two pieces, each showing no abnormality.
【0017】尚これらの試験に使用した試験液は次のと
おりである。The test solutions used in these tests are as follows.
【0018】(1)人工汗試験における人工汗組成は、
食塩9.9g/l,尿素1.7g/l,硫化ナトリウム
0.8g/l,アンモニア水0.07ml/l,乳酸
1.1ml/l,蔗糖0.2g/l,水で全容1リット
ルとする。(1) The artificial sweat composition in the artificial sweat test is
Salt 9.9 g / l, urea 1.7 g / l, sodium sulfide 0.8 g / l, ammonia water 0.07 ml / l, lactic acid 1.1 ml / l, sucrose 0.2 g / l, and water to a total volume of 1 liter. To do.
【0019】(2)アンモニアバッキ試験における試験
液としては、アンモニア水45ml,純水85mlを内
径210mmφのデシケータに充填する。(2) As a test solution in the ammonia back test, 45 ml of ammonia water and 85 ml of pure water are filled in a desiccator having an inner diameter of 210 mmφ.
【0020】[0020]
【発明の効果】本発明によれば、従来のシアン化銅を使
用した下地メッキとしての銅メッキと密着,外観の点で
遜色なく、猛毒のシアンを使用していないので危険性が
なく、取扱いも簡単で、排水処理も容易になる。EFFECTS OF THE INVENTION According to the present invention, there is no difference in terms of adhesion and appearance with copper plating as a base plating using conventional copper cyanide, and there is no danger because no toxic cyanide is used. It is also easy and wastewater treatment becomes easy.
Claims (4)
することを特徴とする銅メッキ液。1. A copper plating solution containing copper ions in an amount of 5 to 200 g / liter.
求項1の銅メッキ液。2. The copper plating solution according to claim 1, which has a pH of 5 or more.
である錯化物を、銅と等モル以上含有することを特徴と
する請求項1または請求項2の銅メッキ液。3. The copper plating solution according to claim 1 or 2, wherein a complex compound having a chelate stability constant with copper of 2.0 or more is contained in an amount of equimolar or more with copper.
塩,塩化物,リン酸塩,水酸化アルカリの中から少なく
とも1つを含有し、しかも、含有した各電導塩の各濃度
を1〜200g/リットルとしたことを特徴とする請求
項1または請求項2または請求項3の銅メッキ液。4. The conductive salt contains at least one of a sulfate, a carbonate, a nitrate, a chloride, a phosphate, and an alkali hydroxide, and the concentration of each conductive salt contained is 1 to 1. The copper plating solution according to claim 1, 2 or 3, wherein the amount is 200 g / liter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4198796A JPH09202990A (en) | 1996-01-24 | 1996-01-24 | Copper plating liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4198796A JPH09202990A (en) | 1996-01-24 | 1996-01-24 | Copper plating liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09202990A true JPH09202990A (en) | 1997-08-05 |
Family
ID=12623557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4198796A Pending JPH09202990A (en) | 1996-01-24 | 1996-01-24 | Copper plating liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09202990A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001007687A1 (en) * | 1999-07-26 | 2001-02-01 | Tokyo Electron Limited | Plating method and device, and plating system |
WO2020158418A1 (en) * | 2019-02-01 | 2020-08-06 | 石原ケミカル株式会社 | Electrolytic copper plate or copper alloy plating bath |
JP2020125539A (en) * | 2019-02-01 | 2020-08-20 | 石原ケミカル株式会社 | Electrolytic copper plating or copper alloy plating bath |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254397A (en) * | 1985-09-02 | 1987-03-10 | 松下電工株式会社 | Information transmitter |
JPH01219187A (en) * | 1988-02-25 | 1989-09-01 | Ishihara Chem Co Ltd | Copper electroplating solution |
-
1996
- 1996-01-24 JP JP4198796A patent/JPH09202990A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254397A (en) * | 1985-09-02 | 1987-03-10 | 松下電工株式会社 | Information transmitter |
JPH01219187A (en) * | 1988-02-25 | 1989-09-01 | Ishihara Chem Co Ltd | Copper electroplating solution |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001007687A1 (en) * | 1999-07-26 | 2001-02-01 | Tokyo Electron Limited | Plating method and device, and plating system |
US6607650B1 (en) | 1999-07-26 | 2003-08-19 | Tokyo Electron Ltd. | Method of forming a plated layer to a predetermined thickness |
WO2020158418A1 (en) * | 2019-02-01 | 2020-08-06 | 石原ケミカル株式会社 | Electrolytic copper plate or copper alloy plating bath |
JP2020125539A (en) * | 2019-02-01 | 2020-08-20 | 石原ケミカル株式会社 | Electrolytic copper plating or copper alloy plating bath |
US11946153B2 (en) | 2019-02-01 | 2024-04-02 | Ishihara Chemical Co., Ltd. | Copper or copper alloy electroplating bath |
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