JPH09201079A - Linked vibrating actuator and its drive device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a linked vibrating actuator which can change a drive force without resetting the characteristic of a vibrator as a single body by a method wherein a plurality of vibrators which are arranged in series and/or in parallel are linked to each other and the respective vibrators are moved relatively by the drive force of every vibrator. SOLUTION: A plurality of actuators 10A to 10C as ultrasonic motors which obtain their drive forces by the combined vibration of a first-order longitudinal vibration with a fourth-order bend vibration are connected by connecting members 21, 22 so as to increase their drive forces. The respective actuators 10A to 10C are arranged in such a way that their slide faces come into pressure contact by pressure members 31. Every pressure member 31 is composed of a mounting member 31a attached to the side face of an elastic body and of a rotating member 31b which is installed at the mounting member 31a so as to be rotatable. While the rotating member 31b is being rolled on the rear surface of a relative motion member 40 drive-force takeout parts 11a, 11b at the elastic body are brought into pressure contact with the surface of the relative motion member 40.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connected vibration actuator in which a plurality of vibration actuators are connected to each other, and a drive system for the same.

[0002]

2. Description of the Related Art As a conventional vibration actuator, there is known one utilizing the contraction of bending vibration and longitudinal vibration (Japanese Patent Laid-Open No. 7-143770, etc.).

FIG. 21 is a diagram showing a conventional example of a vibration actuator, and FIG. 22 is a block diagram showing a conventional example of a drive device for the vibration actuator. The vibration actuator 10 includes a rectangular flat plate-shaped elastic body 11 and piezoelectric elements 12 and 13 which are electromechanical conversion elements coupled to the elastic body 11.
And the piezoelectric elements 12 and 13 provide elastic body 11
In addition, the first longitudinal vibration and the fourth bending vibration are generated, and the elastic body 11 is generated by the elliptic motion generated by the combined vibration of them.
Driving force take-out portions 11a and 11b provided at predetermined positions of the
Driving force is generated. The vibration actuator 10 carries out relative motion with the relative motion member 40 by being pressed into contact with the relative motion member 40 such as a rail.

A conventional drive device for a vibration actuator is
After the high frequency voltage from the oscillator 91 is amplified by the amplifier 92, it is connected to the control unit 93. The control unit 93 is a unit that controls the speed and the traveling direction, and the output thereof is branched, one of which is connected to the piezoelectric element 12 of the vibration actuator 10 via the amplifier 94 and the other of which is transferred. After being provided with a phase difference of π / 2 by the phase shifter 95, it is connected to the other piezoelectric element 13 via the amplifier 96. In addition, the detection unit 97 uses the vibration actuator 1
This is a portion for detecting a vibration state of 0, and its output is fed back to the control unit 93.

[0005]

However, in the above-mentioned conventional vibration actuator, when it is desired to increase the driving force, the characteristics of the vibrator alone must be changed so as to obtain the desired driving force. The reason for this is that there are many restrictions on the shape and size of the elastic body in order to obtain the driving force by the contraction of the longitudinal vibration and the bending vibration. Therefore, each time the driving force is different, the vibrator must be redesigned, leading to an increase in design and manufacturing costs.

Therefore, an object of the present invention is to provide a coupled vibration actuator and its drive device that can change the driving force without resetting the characteristics of the vibrator alone.

[0007]

In order to solve the above-mentioned problems, the invention of claim 1 generates longitudinal vibration and bending vibration in a rectangular flat plate-like elastic body, and a driving force is generated by their combined vibration. A plurality of oscillators arranged in series and / or in parallel, a relative motion member that performs relative motion between the oscillators by the driving force of each oscillator, and the oscillators are connected to each other. And a connecting member. According to a second aspect of the present invention, in the coupled vibration actuator according to the first aspect, the coupling member can be bent or flexed in an amplitude direction of bending vibration of the vibrator, or each of the vibrators can be bent. It is characterized in that they are rotatably connected to each other. According to a third aspect of the present invention, in the coupled vibration actuator according to the first or second aspect, a pressurizing member for pressurizing and contacting each of the vibrators and the relative motion member is provided. According to a fourth aspect of the present invention, in the coupled vibration actuator according to any one of the first to third aspects, a guide that restrains movement in a direction other than the traveling direction without limiting the vibration of each of the vibrators. It is characterized by having a section. According to a fifth aspect of the present invention, there is provided a drive device for a coupled vibration actuator that drives the coupled vibration actuator according to any one of the first to fourth aspects, wherein A plurality of drive signal output units that are provided and output drive signals to the corresponding vibrators,
A detector that individually detects the driving state of each of the vibrators, and each of the driving signal output units is configured to detect a driving state detection result of the driving signal output destination vibrator and a driving state of another vibrator. The drive signal output to each of the vibrators is set based on the detection result. Claim 6
In the drive control device for the linked vibration actuator according to claim 5, a single oscillator that outputs a common drive signal to each drive signal output section, and a drive signal from the oscillator are input. And a drive signal division unit for outputting to each of the drive signal output units, the drive signal division unit being output from the oscillator based on the drive signals respectively set by the drive signal output units. The distribution ratio of the drive signal is set, and the set drive signal is output to a predetermined drive signal output unit.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments will be described in more detail with reference to the drawings. (First Embodiment) FIGS. 1 to 3 are views showing a first embodiment of a connected vibration actuator according to the present invention, FIG. 1 is an overall view, and FIG. 2 is a perspective view mainly showing a connecting member, Figure 3
FIG. 4 is a diagram mainly showing a pressure member. The coupled vibration actuator of the first embodiment is three vibration actuators 10A to 10A that are L1-B4 type ultrasonic motors that obtain a driving force by the combined vibration of the primary longitudinal vibration and the quaternary bending vibration.
C is connected by connecting members 21 and 21. Therefore, the driving force can be increased by using a plurality of adjusted vibration actuators 10A to 10C.

As shown in FIG. 2, the connecting member 21 includes adjacent vibration actuators 10A, 10B and 10B, 1.
The front part and the rear part of the elastic body 11 of 0C are connected by adhesive bonding on the upper surface, and even when the vibration actuators 10A to 10C are displaced in the vertical direction, the displacement can be absorbed without restraining each other. It has some elasticity. The connecting member 21 may be, for example, a thin (1 mm or less) metal plate, a plastic plate, a rubber plate, or the like. In the case of a metal plate, copper, beryllium copper, stainless steel, or the like may be used. Is a vinyl chloride type,
Acrylic resin or the like can be used respectively. Further, the connecting member 21 is not limited to a plate-like member, and may be a thin wire or a coil spring.

The respective vibration actuators 10A-10C are
The sliding member is arranged on the relative motion member 40 by the pressing member 31 so that the sliding surface is in pressure contact. Pressure member 31
As shown in FIG. 3, the mounting member 3 is processed into a U shape by a metal wire or the like and is mounted on the side surface of the elastic body 11.
1a and a rotating member 31b such as a roller and a bearing rotatably provided on the mounting member 31a. The rotating member 31b rolls on the lower surface of the relative motion member 40, and the driving force extracting portion 11a of the elastic body 11 is formed. , 11b are brought into pressure contact with the upper surface of the relative motion member 40.

FIG. 4 is a block diagram showing a first embodiment of a drive device for a coupled vibration actuator according to the present invention. The actuator units 50A to 50C are units in which the vibration actuators 10A to 10C shown in FIG. 1 and a drive circuit for driving the vibration actuators 10A to 10C are unitized. Actuator unit 50
Since A to 50C have the same configuration, only the actuator unit 50A will be described here as an example. The control unit 51A is a unit that controls the speed and the traveling direction, and its output is branched, one is connected to one piezoelectric element of the vibration actuator 10A via the amplifier 52A, and the other is phase-shifted. After changing the phase by 90 degrees by the device 53A, it is connected to the other piezoelectric element through the amplifier 54A. The detection unit 55A is a unit that detects the vibration state of the vibration actuator 10A, and its output is fed back to the control unit 51A.
Specifically, the detection unit 55A provides a mechanical-electrical conversion element that converts mechanical displacement such as a piezoelectric element into electric energy at a predetermined position of the elastic body 11, and obtains a signal based on the vibration state of the elastic body 11. I am trying.

In the drive apparatus of this embodiment, after the output of the single oscillator 61 is amplified by the main amplifier 62, the drive signal setting sections 63A to 63C output drive signals to the respective actuator units 50A to 50C. There is. In this embodiment, since the oscillator 61 is shared by the individual actuator units 50A to 50C, only one oscillator is required, which has the advantage of simplifying the circuit configuration. The drive signal setting sections 63A to 63C are individually provided for the respective actuator units 50A to 50C. Drive signal circuits 100A to 100C are configured by the actuator units 50A to 50C and the drive signal setting units 63A to 63C. The drive signal setting unit 63A inputs the detection signals from the detection units 55A to 55C of the actuator units 50A to 50C, and based on these values, the control unit 51 of the corresponding unit 50A.
The drive signal output to A is set appropriately. When the output from a certain detection unit 55 is large, the drive signal setting unit 63 determines that the actuator 10 is idling, and resets the drive signal so that the linked actuator maintains a stable drive state. To do. Since such an operation is performed, each drive signal setting unit 63 can always perform stable driving.

Next, the setting of the drive signal will be described.
FIG. 5 is a flowchart showing the operation of the drive signal setting unit of the drive device according to the first embodiment. Drive signal setting unit 6
In step 3, first, a target value D of displacement (distance) giving a driving force is set (S101). Next, the gain Y1 before driving is set (the first time is the initial value) (S102), and based on the set value, the driving force is distributed to drive the vibration actuator 10 (S103). At this time, all the detection units 55
Input the detected values X (Xα to Xγ) from A to 55C (S
104), the target value D and the gain matrix A for the detected value X
Difference from GAX multiplied by the coefficient G (D-GAX) [Fig.
(See (B)], the gain Y2 after driving is calculated (S1).
05).

Next, the magnitude of the difference between the gain Y1 before driving set in S102 and the gain Y2 after driving calculated in S105 is compared (S106). If the gain Y1 is large, the process proceeds to S107 to set the gain. Decrease and gain Y
When 1 is small, the process proceeds to S108, the gain is increased, the process returns to S102, and the gain Y1 before the next driving is set. If they are equal, the process proceeds to S109. If the next setting is to be performed, the process returns to S101. If not, the process ends.

FIG. 6 is a diagram for explaining the gain matrix of the drive signal setting section of the drive device according to the first embodiment.
Here, a case where there are two vibration actuators will be described. In S105, in order to calculate the gain Y2 after driving, it is necessary to obtain the gain matrix A in advance. First, the transfer function H shown in FIG. This transfer function H can be obtained by actually measuring the individual Haα, Haβ, Hbα, and Hbβ by the servo analyzer SA. At this time, always
By driving the two vibration actuators 10A and 10B,
Select one input and one output. For example, as shown in FIG. 6A, the input α and the output a are connected to obtain Haα. Then, by changing the individual connection method, Haβ, Hbα, Hbβ
Is measured to obtain a total of four measured values. The formula of FIG. 6B is obtained from these four measured values, the inverse matrix is obtained from the obtained formula, and when this is A, FIG. 6C is obtained. Therefore, the equation of FIG. 6D corresponding to the equation shown in S105 of FIG. 5 becomes FIG. 6E, and if A is known,
Yα, Yβ, that is, the gain Y can be obtained.
When three or more vibration actuators are connected, the gain matrix may be obtained using the actuators corresponding to the number. For example, if three actuators are used, the matrix is 3 × 3.

In this embodiment, the vibration actuator 10A is used.
By connecting 10C by the connecting member 22,
The driving force can be increased by the number of the vibration actuators 10A to 10C. The driving force F can be calculated based on the following equation. F = BΣ [f (1-Y _k )] where n: number of connections Σ: summation from k = 1 to n B: gain of main amplifier 62 f: driving force of vibration actuator alone Y _k : each Gain of Drive Circuit of Actuator Unit Note that the gain B changes depending on the frictional force with the sliding surface of the vibration actuator 10, the characteristics of the connecting member 21, the characteristics of the drive circuit, and the like. Further, in this embodiment, the displacement information of each actuator is used as the external information when the gain Y is calculated. At this time, when the detection unit 55 outputs the displacement information itself of the actuator 10,
The gain Y can be obtained by D-AX. However, in the case of the detector 55 (for example, a mechanical-electrical conversion element) that detects the vibration state of the elastic body 11 and outputs a signal corresponding thereto, it is necessary to convert the signal into displacement information. In this case, the output (detection value X) of the detection unit 55 is multiplied by a predetermined coefficient G to obtain a gain Y (= DG).
AX) is calculated. In FIG. 6, the gain matrix A is obtained using the servo analyzer. At this time, the output a from the electromechanical conversion element and the actuator 10A are used.
The relation of the displacement information of is also obtained, and the coefficient G is obtained from this relation. It may be considered that the matrix A includes the coefficient G, but when the calculation of the inverse matrix is performed, there is a possibility that a linear relationship may not be obtained, and it is preferable to process it as the coefficient G. The coefficient G changes depending on the frictional force and the characteristics of the drive circuit, and should be measured by the actual actuator itself. Therefore, when the relative motion member (rail or the like) is changed, the measurement is performed again.

(Second Embodiment) FIG. 7 is a perspective view showing a second embodiment of the coupled vibration actuator according to the present invention. In each embodiment described below, parts having the same functions as those in the first embodiment are designated by the same reference numerals, and redundant description will be appropriately omitted. In the second embodiment,
The connecting member 22 is screwed to the elastic body 11. Therefore, it is easy to manufacture and can be surely connected. Moreover, the restraining force of the connecting portion can be adjusted by increasing or decreasing the number of screws.

(Third Embodiment) FIG. 8 is a plan view showing a third embodiment of the coupled vibration actuator according to the present invention. In the third embodiment, the elastic body 11 has the convex portion 11c formed on one side and the concave portion 11d formed on the other side, and the convex portion 11c and the concave portion 11d of the adjacent elastic bodies 11 are fitted to each other to form a pin shape. They are connected by the connecting member 23. In this embodiment, since the elastic bodies 11 are rotatably connected to each other, mutual restraint can be further reduced.
Further, it is possible to strengthen the restraining force of the rotation around the traveling direction.

(Fourth Embodiment) FIG. 9 is a view showing a fourth embodiment of the coupled vibration actuator according to the present invention. In the fourth embodiment, a groove portion 41a is formed in the longitudinal direction at the substantially center of the relative motion member 41, and the guide member 71 is provided in the groove portion 41a. In the vibration actuator 10, a groove 11e is formed at the center of the driving force output members 11a and 11b, and the groove 11e and the guide member 71 are formed.
And are engaged and move while being guided. Therefore,
Since movement in a direction other than the driving direction is restricted, it is possible to reliably move. The guide member 71 may be formed in a convex shape integrally with the relative motion member 41. When it is used as a separate member, the sliding surface of the relative motion member 41 can be easily polished by mounting it after polishing the sliding surface.

(Fifth Embodiment) FIG. 10 is a view showing a fifth embodiment of the coupled vibration actuator according to the present invention. In the fifth embodiment, guide portions 41a, 41a are formed at both ends of the relative movement member 42. The vibration actuator 10 moves while both ends of the driving force extracting members 11a and 11b are guided by the guide portions 41a and 41a. Also,
The pressure member 31 is provided with a mounting member 31a ′ processed by a metal wire or the like on the side surface of the elastic body 11 in a cantilevered manner.
A rotary member 31b is rotatably provided on the mounting member 31a '. Therefore, the structure is simple and stable traveling is possible. In addition, it can be easily assembled.

(Sixth Embodiment) FIG. 11 is a view showing a sixth embodiment of the coupled vibration actuator according to the present invention. The sixth embodiment has two vibration actuators 10.
A and 10B sandwich the relative motion member 40, and the connecting member 23
It is connected up and down by. Connecting member 23
Is provided substantially at the center of the side surface of the elastic body 11 (position of the node), but as shown by the two-dot chain line in FIG. 11, at the position (antinode position) of the driving force extracting portion 11a (11b). It may be. In this embodiment, since two pieces are provided in parallel, it is possible to obtain approximately twice the driving force.

(Seventh Embodiment) FIGS. 12 and 13 are views showing a seventh embodiment of a coupled vibration actuator according to the present invention. The seventh embodiment is similar to the sixth embodiment,
The two vibration actuators 10 </ b> A and 10 </ b> B are vertically connected by the connecting member 23 with the relative motion member 43 interposed therebetween, and the connecting member 24 is the driving force extracting member 11.
They are different in that they are provided at two positions a and 11b, and that their connecting members 24 are tension springs and serve as a pressing member. In addition, the relative motion member 43
Differs from the fourth embodiment in FIG. 9 in that guide portions 43a, 43a are formed in the central portion of the upper and lower surfaces.

(Eighth Embodiment) FIGS. 14 and 15 are views showing an eighth embodiment of a linked vibration actuator according to the present invention. In the eighth embodiment, four vibration actuators 10A, 10B, 10C and 10D are vertically and horizontally connected by a frame-shaped connecting member 25 with a relative motion member 44 having a substantially square cross section sandwiched therebetween. Each vibration actuator 10A-10D is being fixed to the connection member 25 with the screw 25a. According to this embodiment, since four pieces are provided in parallel, it is possible to obtain a driving force that is approximately four times as large. Further, in this embodiment, there is an advantage that the guide can be performed in the traveling direction without the guide portion. further,
Regardless of the position of the relative motion member 44 with respect to gravity, the relative motion member 44 can be arranged without dropping the coupled vibration actuator and without considering the direction of gravity. In addition, if a relative motion member having a rectangular cross section is used, four or more vibration actuators can be connected in parallel.

(Ninth Embodiment) FIG. 16 is a diagram showing a main part of a ninth embodiment of a coupled vibration actuator according to the present invention. The ninth embodiment is substantially the same as the eighth embodiment, but the connecting member 25 and each vibration actuator 10A to 10A.
The difference is that the spring 32 as a pressing member is arranged between 10D. Therefore, pressure contact can be made, and the driving force is stable. Further, even if the surface is inclined, the respective vibration actuators can be brought into pressure contact with each other.

(Tenth Embodiment) FIG. 17 is a diagram showing a tenth embodiment of a coupled vibration actuator according to the present invention. In the tenth embodiment, three vibration actuators 10A, 10B and 10C are connected in series by a connecting member 21, and the other three vibration actuators 10D and 10C are connected.
E and 10F are connected in series by the connecting member 21, and the connecting member 26 is provided with the relative motion member 40 interposed therebetween.
It is connected in parallel vertically. By connecting in this way, even if the relative motion member 40 is undulating, it is possible to travel stably.

(Eleventh Embodiment) FIG. 18 is a diagram showing an eleventh embodiment of a coupled vibration actuator according to the present invention. In this embodiment, the curtain 81 is driven along the curved rail 45. This connection type vibration actuator is formed by connecting two vibration actuators 10A and 10B, and is brought into close contact with a side surface of a rail 45 as a relative movement member by a pressure member 33 including a mounting member 33a and a roller 33b.
In the pressing member 33, the roller 33b is arranged on the upper surface of the rail 45. The curtain 81 is connected by hooking a hook 82 on the upper surface of the elastic body 11 with a clasp 82. Further, the curtain 81 is supported by hooking a clasp 82 on an appropriate supporting member 83 at a portion other than the portion where the connection type vibration actuator is attached.

(Twelfth Embodiment) FIG. 19 is a block diagram showing a twelfth embodiment of the linked vibration actuator according to the present invention, and FIG. 20 is a flowchart showing the operation of the linked vibration actuator according to the twelfth embodiment. is there. In the twelfth embodiment, after the output from the single oscillator 61 is amplified by the main amplifier 62, the drive signal division unit 110
Is different from that of the first embodiment (see FIG. 4). In the twelfth embodiment, in addition to the first embodiment, information (Yα to Yγ) on the drive signal set by each drive signal setting unit 63.
Is sent to the drive signal division unit 110. The drive signal division unit 110 obtains the distribution ratio of the signal P output from the oscillator 61 on the basis of the information [see FIG. 19 (C)], and the drive signals (Yα ′ to Y) corresponding to the distribution ratio.
γ ′) is output to the drive signal setting unit 63. The drive signal dividing unit 110 distributes a constant amount of drive signal according to the drive state of each of the actuators 10A to 10C, so that stable drive of the linked actuator is possible, and
At that time, since it is not necessary to increase the input, energy can be effectively used.

Next, setting of the drive signal (gain) will be described. Here, the drive signal setting unit 63A will be described. The drive signal setting unit 63A first sets the target value D
α is set (S201). Next, the gain Yα before driving
(Previous) is set (the first time is the initial value) (S202), and information corresponding to the set value Yα (previous) is output to the drive signal division unit 110 (S203). Drive signal division unit 110
Determines a distribution ratio for the drive signal setting unit 63A, and inputs a gain Yα (pre) ′ corresponding to the distribution ratio to the drive signal setting unit 63A (S204). The drive signal setting unit 63A drives the actuator unit 50A based on the gain Yα (previous) '(S205). At this time, the drive signal setting unit 63A causes the detection units 55A to 5A to
The detected value from 5C is input (S207), and the gain Yα (after) after driving is calculated (S208). Here, it is determined whether or not the next setting is performed, and if the next setting is performed, S2 is set.
02, the gain Yα (after) calculated in S208 is
As the gain Yα (before) before driving, S204 to S207
Execute If the next setting is not performed, the process ends.

(Other Embodiments) The present invention is not limited to the above-described embodiments, and various modifications and changes can be made, which are also included in the equivalent scope of the present invention. Second
The 11th embodiment can also be driven by the same drive device as that of the 1st or 12th embodiment. Although the example in which the linked vibration actuator is self-propelled has been described, it can be similarly applied to the case of driving the relative motion member.

[0030]

As described in detail above, according to the present invention, the driving force can be changed without resetting the characteristics of the vibrator alone.

[Brief description of drawings]

FIG. 1 is a first view of a coupled vibration actuator according to the present invention.
It is the figure which showed the whole embodiment.

FIG. 2 is a first view of a coupled vibration actuator according to the present invention.
It is a perspective view mainly showing the connecting member of an embodiment.

FIG. 3 is a first view of a coupled vibration actuator according to the present invention.
It is a figure which mainly shows the pressurizing member of embodiment.

FIG. 4 is a block diagram showing a first embodiment of a drive device for a coupled vibration actuator according to the present invention.

FIG. 5 is a flowchart showing an operation of a drive signal setting unit of the drive device according to the first embodiment.

FIG. 6 is a diagram illustrating a gain matrix of a drive signal setting unit of the drive device according to the first embodiment.

FIG. 7 is a perspective view showing a coupled vibration actuator of a second embodiment.

FIG. 8 is a plan view showing a linked vibration actuator according to a third embodiment.

FIG. 9 is a diagram showing a coupled vibration actuator according to a fourth embodiment.

FIG. 10 is a diagram showing a coupled vibration actuator according to a fifth embodiment.

FIG. 11 is a diagram showing a coupled vibration actuator according to a sixth embodiment.

FIG. 12 is a side view showing a coupled vibration actuator of a seventh embodiment.

FIG. 13 is a sectional view showing a coupled vibration actuator of a seventh embodiment.

FIG. 14 is a sectional view showing a coupled vibration actuator of an eighth embodiment.

FIG. 15 is a side view showing a linked vibration actuator according to an eighth embodiment.

FIG. 16 is a side view showing a main part of a linked vibration actuator according to a ninth embodiment.

FIG. 17 is a side view showing the coupled vibration actuator of the tenth embodiment.

FIG. 18 is a view showing a linked vibration actuator according to an eleventh embodiment.

FIG. 19 is a block diagram showing a coupled vibration actuator according to a twelfth embodiment.

FIG. 20 is a flowchart showing an operation of the coupled vibration actuator according to the twelfth embodiment.

FIG. 21 is a diagram showing a conventional example of a vibration actuator.

FIG. 22 is a block diagram showing a conventional example of a drive device for a vibration actuator.

[Explanation of symbols]

10, 10A, 10B, 10C Vibration actuators 21, 22, 23, 24, 25, 26 Connecting member 31, 32, 33 Pressing member 40, 41, 42, 43, 44, 45 Relative movement member 50, 50A, 50B, 50C Actuator unit 51 Control part 52,54 Amplifier 53 Phase shifter 55 Detection part 61 Oscillator 62 Main amplifier 63 Drive signal setting part

Claims (6)

[Claims] 1. A plurality of vibrators arranged in series and / or in parallel, which generate longitudinal vibration and bending vibration in a rectangular flat plate-like elastic body and generate a driving force by their combined vibration, and each of the vibrators. And a connecting member that connects the vibrators to each other, and a connecting member that connects the vibrators to each other. 2. The coupled vibration actuator according to claim 1, wherein the coupling member is bendable or bendable in an amplitude direction of bending vibration of the oscillator, or the oscillators rotate with respect to each other. A connected vibration actuator characterized by being connected as much as possible. 3. The linked vibration actuator according to claim 1, further comprising a pressure member that press-contacts each of the vibrators with the relative motion member. Actuator. 4. One of claims 1 to 3
Item 10. The connected vibration actuator according to item 4, wherein the connected vibration actuator includes a guide portion that restricts movement of the vibrators other than in the traveling direction without limiting the vibration of the vibrators. 5. The method according to claim 1, wherein:
Item 6. A drive device for a linked vibration actuator for driving the linked vibration actuator according to the item 1, wherein a plurality of drive signal outputs are provided separately for each of the vibrators and output drive signals to the corresponding vibrators. And a detector that individually detects the driving state of each of the transducers, and each of the driving signal output sections relates to the detection result of the driving state of the transducer to which the driving signal is output and other transducers. A drive control device for a coupled vibration actuator, wherein a drive signal to be output to each of the vibrators is set based on a drive state detection result. 6. The drive control device for the coupled vibration actuator according to claim 5, wherein a single oscillator that outputs a common drive signal to each of the drive signal output units, and a drive signal from the oscillator are provided. A drive signal dividing unit for inputting and outputting to each of the drive signal output units, wherein the drive signal dividing unit outputs from the oscillator based on the drive signals respectively set by the drive signal output units. A drive control device for a concatenated vibration actuator, characterized by setting a distribution ratio of the set drive signal and outputting the set drive signal to a predetermined drive signal output section.