JPH09159680A - Cantilever holder, heating device using it, and heating/ shape measuring instrument using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To locally heat the small region in atom and molecule order of a sample. SOLUTION: By holding a support 1a of a cantilever 1 between a leaf spring 4 and the upper surface of a substrate 3, the cantilever 1 is retained. A metal pattern 8 as a heater is formed on the upper surface of the substrate 3. When current is fed to the pattern 8, the pattern 8 is heated and the heat is transferred to a probe 1c via the substrate 3, the support 1a of the cantilever 1, and a flexible plate 1b of the cantilever l and the tip of the probe 1c is heated. Then, the small region in atom or molecule order of the sample surface is locally heated via the tip of the probe 1c.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating device for heating a sample surface by using a cantilever, a cantilever holder used for the heating device, as well as heating the sample surface and measuring the shape of the sample surface. The present invention relates to a heating / shape measuring device that can perform.

[0002]

2. Description of the Related Art When locally heating a sample,
For example, it is conceivable to irradiate a laser beam to heat the sample.

However, even if the size of the laser beam spot is reduced to the diffraction limit, it is very large from the viewpoint of the atoms and molecules of the sample. Therefore, the atoms and molecules of the sample are heated locally. It is not possible.

Conventionally, a scanning atomic force microscope has been provided as an apparatus for measuring the surface shape of a sample (substance) with a resolution of the order of atoms and molecules. In a scanning atomic force microscope, a cantilever provided with a support, a flexible plate whose one end is supported by the support, and a probe provided in a tip side region of the flexible plate is a probe. Is used as.

By the way, one of the treatments of a sample observed by a scanning atomic force microscope is sample heating. The heating of the sample causes a temperature change, which changes the characteristics of the sample. In particular, biopolymers in the biological field change their active state, and organic substances change their phase state. As described above, it is important to observe the surface shape with a scanning atomic force microscope while heating the sample, because there is a possibility that various changes in characteristics can be detected.

However, with the conventional scanning atomic force microscope, the shape of the sample surface can be measured, but the sample cannot be locally heated.

Regarding the scanning tunneling microscope, a method of heating the entire sample is disclosed in Japanese Patent Laid-Open No. 6-748.
No. 80 is disclosed. But with this method,
The entire sample can be heated, but the sample cannot be heated locally.

As described above, conventionally, there was no means for locally heating the sample.

[0009]

As described above, in the past, it was not possible to locally heat the minute region of the sample on the atomic or molecular order. It was not possible to elucidate the changes in properties due to.

The present invention has been made in view of the above circumstances, and provides a heating device capable of locally heating a minute region of a sample on the order of atoms and molecules, and a cantilever holder used for the heating device. With the goal.

The present invention is also capable of locally heating a minute region of the sample in the order of atoms or molecules, and measuring the shape of the sample surface with a resolution in the order of atoms or molecules. The purpose is to provide a device.

[0012]

In order to solve the above-mentioned problems, a cantilever holder according to a first aspect of the present invention is a cantilever holder for holding a cantilever having a probe, comprising a heater for heating the held cantilever. It is a thing.

A cantilever holder according to a second aspect of the present invention is the cantilever holder according to the first aspect, which includes a support base and a pressing member that holds the cantilever between the support base and the support base. The heater is formed on the table or the pressing member.

A cantilever holder according to a third aspect of the present invention is the cantilever holder according to the first aspect, which includes a support base and a support plate that is fixed in advance to the cantilever and is fixed to the support base. And the heater is formed on the support plate.

A cantilever holder according to a fourth aspect of the present invention is the cantilever holder according to any one of the first to third aspects, in which heat generated by the heater is conducted to a portion other than the held cantilever. It further comprises a heat insulating material for reducing the above.

A heating device according to a fifth aspect of the present invention heats a cantilever having a probe, a cantilever holder according to any one of the first to fourth aspects for holding the cantilever, and the heater. The heating drive means for moving the probe relative to the sample in a direction substantially parallel to the sample surface, and the probe relative to the sample in a direction substantially perpendicular to the sample surface. In a state where the moving means for relatively moving and the cantilever bends and the probe is pressed against the sample surface, only a desired point on the sample surface is heated or a desired area on the sample surface is heated. Control means for controlling the heat generation driving means and the moving means so that each point is sequentially heated.

In a heating device according to a sixth aspect of the present invention, a cantilever having a probe, a cantilever holder according to any one of the first to fourth aspects for holding the cantilever, and the heater are heated. Heating driving means, a bending detection means for detecting bending of the cantilever, a probe relatively moved with respect to the sample in a direction of a plane substantially parallel to the sample surface, and substantially perpendicular to the sample surface. While moving the moving means for moving the probe relative to the sample in various directions, and controlling the moving means so that the bending of the cantilever becomes constant based on a detection signal from the bending detecting means, A means for controlling the moving means so that the probe faces a desired point on the sample surface or sequentially scans each point on a desired area of the sample surface; As each point in a desired region of or the surface of the sample only in the Nozomu is heated are sequentially heated, in which and means for controlling the heating drive means.

In a heating device according to a seventh aspect of the present invention, a cantilever having a probe, a cantilever holder according to any one of the first to fourth aspects for holding the cantilever, and the heater are heated. Heating means for driving, a vibrating means for vibrating the cantilever, a vibration detecting means for detecting a vibration state of the cantilever, and the probe relative to the sample in a direction substantially parallel to the sample surface. Moving means for moving the probe relative to the sample in a direction substantially perpendicular to the sample surface, and the probe of the cantilever based on a detection signal from the vibration detecting means. While controlling the moving means so that the interatomic force acting on the sample surface becomes constant, the probe is opposed to a desired point on the sample surface, or Means for controlling the moving means so as to sequentially scan each point of the desired area of the material surface, and only the desired point of the sample surface is heated, or each point of the desired area of the sample surface is sequentially heated. A means for controlling the heat generation driving means so that the heating is performed.

A heating / shape measuring apparatus according to an eighth aspect of the present invention is the heating apparatus according to the sixth or seventh aspect, and the probe with respect to the sample surface in a direction substantially parallel to the sample surface. Means for obtaining information on the relative position of the probe with respect to the sample surface in a direction substantially perpendicular to the sample surface, according to the relative position.

According to the cantilever holder according to the first to fourth aspects, when the cantilever is held by the cantilever holder, the heat generated from the heater is conducted to the tip of the probe of the cantilever, and the tip is heated. To be done. Therefore, the sample surface can be heated via the tip part of the probe by bringing the tip part of the probe into contact with the sample surface or bringing them closer to each other at a minute interval. At this time, the cantilever used in the scanning atomic force microscope as the cantilever can be used because the tip of the probe has a very sharp tip, so that atoms and molecules on the sample surface can be passed through the tip of the probe. A small area of the order can be locally heated. Also, since the cantilever used in the scanning atomic force microscope can be used as it is, there is no need to prepare a special cantilever,
Cost can be reduced.

Since the cantilever according to the first to fourth aspects adopts the cantilever structure, the flexure of the cantilever is skillfully utilized as in the fifth to seventh aspects. According to this, the tip of the probe can be brought into contact with the sample surface or can be brought close to each other at a minute interval.

The concrete structure of the cantilever holder according to the first aspect is not particularly limited, and for example, a structure in which the cantilever is sandwiched between the support base and the pressing member as in the second aspect. It can be adopted, or a structure using a support plate previously fixed to the cantilever as in the third aspect can be adopted. The cantilever holder according to the third aspect is, so to speak, a premount type holder, and according to the third aspect, positioning of the cantilever is facilitated and cantilever replacement or the like can be easily performed.

According to the cantilever holder according to the fourth aspect, to the portion other than the held cantilever,
Since conduction of heat generated by the heater is reduced by the heat insulating material, heat generated by the heater is efficiently conducted to the tip of the probe of the cantilever, and the sample surface can be efficiently heated. In addition, since unnecessary heat conduction is reduced by the heat insulating material in this manner, heating of an unnecessary portion of the cantilever holder is reduced, which reduces thermal deformation of the cantilever holder. Therefore, it is possible to prevent unintended movement of the probe caused by thermal deformation of the cantilever holder.

In the heating device according to the fifth aspect, only a desired point on the sample surface is heated or each desired region on the sample surface is heated while the cantilever is bent and the probe is pressed against the sample surface. So that the points are heated in sequence,
The heating means and the moving means are controlled by the control means. In this case, since the probe is pressed against the sample surface by the bending of the cantilever, the probe surely contacts the sample surface, and the heat conduction from the tip of the probe to the sample surface is effectively performed. Further, even when the probe is scanned with respect to the sample surface to heat a desired area of the sample surface, the probe can follow the unevenness of the sample surface due to the bending of the cantilever, so the probe can reliably And the heat is effectively conducted from the tip of the probe to the sample surface.

In the heating device according to the sixth aspect, the probe is opposed to a desired point on the sample surface or a desired region on the sample surface while the moving means is controlled so that the deflection of the cantilever becomes constant. The moving means is controlled so as to sequentially scan each point. Further, the heat generation driving means is controlled so that only a desired point on the sample surface is heated or each point in a desired region on the sample surface is sequentially heated. Therefore, while the movement control of the probe similar to the so-called contact mode in the scanning atomic force microscope is realized, only the desired points on the sample surface are heated or each point on the desired area of the sample surface is heated sequentially. To be done. Therefore, since the contact state between the probe and the sample surface can be kept constant by following the unevenness of the sample surface, the heating amount of the sample surface can be made constant regardless of the unevenness of the sample surface. Further, since the movement control of the probe similar to that in the contact mode is realized, the heating of the sample surface is performed simultaneously with the heating of the sample surface by obtaining the information on the relative position as in the heating / shape measuring device according to the eighth aspect. It becomes possible to obtain the shape data of the unevenness of the sample surface before or after the heating, which is preferable in determining the heating point on the sample surface and observing the sample.

In the heating device according to the seventh aspect, the cantilever is vibrated by the vibrating means, and the interatomic force acting between the probe of the cantilever and the sample surface is detected based on the detection signal of the vibration state of the cantilever. While the moving means is controlled so that the force is constant, the moving means is controlled so that the probe faces a desired point on the sample surface or sequentially scans each point in a desired area on the sample surface. Also,
The heat generation driving means is controlled so that only a desired point on the sample surface is heated or each point in a desired region on the sample surface is sequentially heated. Therefore, while the movement control of the probe similar to the predetermined mode in the atomic force microscope is realized, only a desired point on the sample surface is heated or each point in a desired region on the sample surface is sequentially heated. Therefore, the distance between the center of vibration of the probe and the sample surface can be kept constant by following the unevenness of the sample surface, so that the heating amount of the sample surface can be kept constant regardless of the unevenness of the sample surface. it can. Further, since the movement control of the probe similar to that in the predetermined mode of the scanning atomic force microscope is realized, as in the heating / shape measuring device according to the eighth aspect, by obtaining the information on the relative position, the sample can be obtained. Simultaneously with the heating of the surface, it becomes possible to obtain the shape data of the unevenness of the sample surface before or after the heating, which is preferable in deciding the heating point of the sample surface and observing the sample.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION A cantilever holder, a heating device and a heating / shape measuring device according to the present invention will be described below.
This will be described with reference to the drawings.

First, a cantilever holder according to an embodiment of the present invention will be described with reference to FIG.

FIG. 1 is a view showing a cantilever holder according to an embodiment of the present invention. FIG. 1 (a) is a schematic perspective view showing a state in which the cantilever 1 is held, and FIG. 1 (b) is a portion of a heater 8. FIG.

The cantilever 1 includes a support 1a, a flexible plate 1b whose one end is supported by the support 1a, and a probe 1c provided in the tip end side region of the flexible plate 1b. In the present embodiment, as the cantilever 1,
The one for a scanning atomic force microscope is used as it is, and it is a so-called Si ₃ N ₄ lever or Si lever. It is preferable that the material of the cantilever 1 has a high thermal conductivity, but even if the thermal conductivity is relatively low, the heating temperature range of the sample surface is low, or the heating value of the heater 8 described later is increased. If so, there is no particular obstacle.

As shown in FIG. 1, the cantilever holder according to this embodiment has a plate-like main body 2 made of metal or the like, a substrate 3 fixed on the main body 2 and made of alumina as a support, and a substrate 3 And a plate spring 4 as a pressing member for sandwiching the support 1a of the cantilever 1 between the plate spring 4 and the upper surface of the cantilever 1. One end portion of the leaf spring 4 is fixed to the main body 2 with a screw 6 via a spacer member 5 fixed on the main body 2. When the substrate 3 holds the cantilever 1,
The upper surface of the substrate 3 is processed to be an inclined surface so that the probe 1c of the cantilever 1 and the main body 2 can be held at a tilt of, for example, 15 degrees so as not to contact the sample (not shown). A handle 7 is provided on the side of the main body 2 for easy handling.

In the present embodiment, as shown in FIG. 1B, a heater having a narrow width (for example, 20 μm) is provided around the upper surface of the substrate 3 around the holding portion of the cantilever 1.
A gold pattern 8 (with a width of m) is formed like a hairpin. Gold is a material having a low volume resistivity, but it can be used as a heater by sufficiently narrowing the line width and increasing the resistance per unit length. Gold patterns 9a and 9b having a relatively large area are formed as electrodes in succession to the pattern 8 on both ends of the pattern 8. These gold patterns 8, 9a, 9b can be formed by, for example, screen printing or a lift-off method. The pattern shape of the pattern 8 is as shown in FIG.
It is not limited to the shape shown in (b). Gold wires 10a and 10b with a coating for connecting to a heat generation driving circuit described later are connected to the electrode patterns 9a and 9b by wire bonding, respectively.

As described above, in the present embodiment, the substrate 3 is made of alumina, but the material of the substrate 3 is, for example, mica, aluminum nitride, mullite, steatite or the like having a high thermal conductivity. It may be a material. Further, although the gold pattern 8 is used as the heater in the present embodiment, the heater may be a narrow pattern made of a material used for a normal wiring pattern such as aluminum. The material of the heater may be a material having a high volume resistivity such as chromel, alumel, nichrome, tungsten, tungsten oxide, platinum, ruthenium oxide. In this case, it is not always necessary to reduce the width of the pattern. The heater may be formed by a screen printing method, a lift-off method, a sputtering method, a CVD method, a vapor deposition method, a coating method, or the like.

According to the cantilever holder according to the present embodiment, when the cantilever 1 is newly attached or replaced, the screw 6 is loosened, the support 1a of the cantilever 1 is pinched with tweezers or the like, and the support 1a is removed. Insert between the leaf spring 4 and the upper surface of the substrate 3, and tighten the screw 6. As a result, as shown in FIG. 1, the support 1a of the cantilever 1 is sandwiched between the leaf spring 4 and the substrate 3, and the cantilever 1 is held.

Then, when an electric current is applied to the pattern 8 through the gold wires 10a and 10b, the pattern 8 generates heat, and the heat is generated on the substrate 3, the support 1a of the cantilever 1, the cantilever 1 and the like.
Is conducted to the probe 1c through the flexible plate 1b, and the tip of the probe 1c is heated. Therefore, the sample surface can be heated via the tip part of the probe 1c by bringing the tip part of the probe 1c into contact with the sample surface or bringing them close to each other at a minute interval. At this time, since the tip portion of the probe 1c is configured to be extremely sharp, it is possible to locally heat the atomic or molecular order minute region on the sample surface via the tip portion of the probe 1c. And cantilever 1
Since a cantilever structure is adopted, the tip of the probe 1c is brought into contact with the sample surface or brought close to it at a minute interval by skillfully utilizing the bending of the flexible plate 1c as described later. It is possible. Further, since the cantilever holder according to the present embodiment can use the cantilever employed in the scanning atomic force microscope as it is, it is not necessary to prepare a special cantilever, and the cost can be reduced.

Although the heat insulating material is not provided in this embodiment, for example, the heat insulating material may be provided on the lower surface of the leaf spring 4 in FIG. In this case, the heat generated in the pattern 8 is not conducted to the leaf spring 4, and as a result, the heat generated in the pattern 8 is efficiently used in the probe 1c of the cantilever 1.
Conducted to the tip of the sample, the sample surface can be efficiently heated.

Next, a cantilever holder according to another embodiment of the present invention will be described with reference to FIG.

FIG. 2 is a view showing a cantilever holder according to this embodiment, FIG. 2 (a) is a schematic perspective view showing a state in which the cantilever 1 is held, and FIG. 2 (b) is FIG.
2A is a cross-sectional view taken along the line AA in FIG. 2A, and FIG. 2C is a plan view showing a portion of the heater 8. In FIG. 2,
The same or corresponding elements as those in FIG. 1 are designated by the same reference numerals, and the duplicated description thereof will be omitted.

In this embodiment, the main body 2 has a shape as shown in FIG. 2, and the bottom surface of the concave portion formed on the upper surface of the main body 2 is an inclined surface 2a of 15 degrees, for example. The portion 2a corresponds to the support base. Further, in the present embodiment, instead of the leaf spring 4 in FIG. 1, a holding plate 20 made of alumina is provided as a holding member for holding the support body 1a of the cantilever 1 between the inclined surface 2a. . A plate-shaped heat insulating material 21 having substantially the same thickness as the support 1a of the cantilever 1 is provided between a part of the lower surface of the pressing plate 20 (a part where the support 1a of the cantilever 1 is not sandwiched) and the inclined surface 2a. Has been. The heat insulating material 21 is the inclined surface 2
It is fixed to a. The pressing plate 20 is fixed to the main body 2 with screws 22 via a heat insulating material 21.

In the present embodiment, the pattern 8 as a heater and the electrode patterns 9a and 9b are formed on the upper surface of the pressing plate 20. These patterns 8, 9
The a and 9b can be formed in the same manner as in the above-described embodiment. As the material of the pressing plate 20, various materials can be used as in the case of the substrate 3 in FIG.

According to the cantilever holder of the present embodiment, when the cantilever 1 is newly attached or replaced, the screw 22 is loosened, the support 1a of the cantilever 1 is pinched with tweezers or the like, and the support 1a is removed. Insert between the holding plate 20 and the inclined surface 2a, and screw 22
Tighten. As a result, as shown in FIG. 2, the support 1a of the cantilever 1 is sandwiched between the lower surface of the pressing plate 20 and the inclined surface 2a, and the cantilever 1 is held.

When a current is applied to the pattern 8 through the gold wires 10a and 10b, the pattern 8 generates heat, and this heat causes the pressing plate 20, the support 1a of the cantilever 1 and the flexible plate 1b of the cantilever 1 to move. The heat is conducted to the probe 1c through the heat, and the tip of the probe 1c is heated. Therefore, according to the present embodiment as well, similar to the above-described embodiments, it is possible to locally heat the atomic and molecular-order minute regions on the sample surface via the tip portion of the probe 1c. As the cantilever holder according to the present embodiment, the cantilever used in the scanning atomic force microscope can be used as it is, so that it is not necessary to prepare a special cantilever, and the cost can be reduced.

Further, in the present embodiment, the heat generated in the pattern 8 becomes difficult to be conducted to the inclined surface 2a by the heat insulating material 21, and as a result, the heat generated in the pattern 8 is efficiently transferred to the probe 1c of the cantilever 1. It is conducted to the tip, and the sample surface can be efficiently heated. Also, like this,
Since unnecessary heat conduction to the inclined surface 2a is reduced by the heat insulating material 21, thermal deformation such as thermal expansion of the inclined surface 2a is reduced, and unintended movement of the probe 1c can be prevented.

Next, a cantilever holder according to still another embodiment of the present invention will be described with reference to FIG.

FIG. 3 is a view showing a cantilever holder according to this embodiment, FIG. 3 (a) is a schematic perspective view showing a state in which the cantilever 1 is held, and FIG. 3 (b) is FIG.
3A is a sectional view taken along line BB in FIG. 3A, and FIG. 3C is a plan view showing a portion of the heater 8. In addition, in FIG.
Elements that are the same as or correspond to the elements in FIG. 2 are assigned the same reference numerals, and duplicate descriptions thereof are omitted.

The cantilever holder according to the present embodiment has the cantilever 1 instead of the pressing plate 20 shown in FIG.
The support plate 30 made of alumina is previously fixed to the support 1a. Specifically, in the present embodiment, a part of the upper surface of the support plate 30 is the support body 1a of the cantilever 1.
Is adhered to a part of the lower surface of the adhesive with an adhesive having a relatively high thermal conductivity such as silver paste. A plate-shaped heat insulating material 31 is provided between the entire lower surface of the support plate 30 and the inclined surface 2a. The heat insulating material 31 is fixed to the inclined surface 2a. The pressing plate 20 is fixed to the main body 2 with screws 32 via a heat insulating material 31.

Further, in this embodiment, the pattern 8 as the heater and the electrode patterns 9a and 9b are formed by the support plate 3
It is formed on the upper surface of 0. These patterns 8, 9
The a and 9b can be formed in the same manner as in the above-described embodiment. In addition, as a material of the support plate 30, FIG.
Various materials can be used similarly to the substrate 3 inside.

According to the cantilever holder according to the present embodiment, when the cantilever 1 is newly attached or replaced, the cantilever 1 is attached or replaced together with the support plate 30 fixed to the cantilever 1 in advance. On this occasion,
The screw 32 is once removed, and the support plate 30 is fixed with the screw 32.
It is fixed to the main body 2 via the heat insulating material 31. Thereby, as shown in FIG. 3, the cantilever 1 is held. In the present embodiment, by pre-mounting the cantilever 1 at a predetermined position on the support plate 30, the cantilever 1 can be easily positioned with respect to the main body 2, and the cantilever 1 can be easily replaced.

When an electric current is applied to the pattern 8 through the gold wires 10a and 10b, the pattern 8 generates heat, and this heat causes the support plate 30, the support 1a of the cantilever 1 and the flexible plate 1b of the cantilever 1 to move. The heat is conducted to the probe 1c through the heat, and the tip of the probe 1c is heated. Therefore, according to the present embodiment, as in the above-described embodiments,
It is possible to locally heat atomic and molecular-order minute regions on the sample surface via the tip of the probe 1c. As the cantilever holder according to the present embodiment, the cantilever used in the scanning atomic force microscope can be used as it is, so that it is not necessary to prepare a special cantilever, and the cost can be reduced.

Further, in the present embodiment, the heat generated in the pattern 8 is not conducted to the inclined surface 2a by the heat insulating material 31, and as a result, the heat generated in the pattern 8 is efficiently the tip of the probe 1c of the cantilever 1. Conducted to the part, the sample surface can be efficiently heated. Also, like this,
Since unnecessary heat conduction to the inclined surface 2a is blocked by the heat insulating material 21, thermal deformation such as thermal expansion of the inclined surface 2a is eliminated,
It is possible to prevent unintended movement of the probe 1c.

Next, a heating / shape measuring apparatus according to an embodiment of the present invention using each of the above described cantilever holders will be described with reference to FIG. FIG. 4 is a schematic configuration diagram schematically showing this heating / shape measuring device.

This heating / shape measuring device comprises the above-mentioned cantilever 1, the cantilever holder 40 (or the cantilever holder shown in FIG. 2 or FIG. 3) for holding the cantilever 1, and the cantilever holder 40 for X. , Y, Z directions (X direction is a direction perpendicular to the paper surface of FIG. 4, Y direction is a horizontal direction in FIG. 4, Z direction is a vertical direction in FIG. 4, and the XY plane is substantially the surface of the sample 41. Parallel surfaces.), A drive circuit 43 for driving the moving device 42, a moving device 44 for coarsely moving the sample 41 in the X, Y, and Z directions.
A drive circuit 45 for driving the moving device 44, a moving device 46 for finely moving the sample 41 in the X, Y, and Z directions, a driving circuit 47 for driving the moving device 46, and electrode patterns 9a, 9b of the cantilever holder 40. And gold wires 10a, 10
A heat generation drive circuit 48 for energizing the pattern (heater) 8 via b to drive the pattern 8 of the cantilever holder 40 to generate heat, a deflection detection unit 49 for detecting the deflection of the flexible plate 1b of the cantilever 1, and a drive. Circuits 43, 45,
An arithmetic / control unit 50 including a computer or the like for controlling the control units 47 and 48 and taking in a detection signal from the deflection detection unit 49 to perform a predetermined arithmetic operation, and a user giving an instruction or the like to the arithmetic / control unit. An input device 51 such as a keyboard and a mouse, and a display device 52 such as a CRT for displaying the obtained results and the like are provided. The moving device 46 is used for the sample 4
It also doubles as a sample stand. Further, in FIG. 4, reference numeral 53 is a base.

In the present embodiment, the deflection detecting section 49
Is configured to detect the bending of the flexible plate 1b of the cantilever 1 according to a well-known optical lever method. Specifically, for example, a He-Ne laser that irradiates the flexible plate 1b with a laser beam is used. And a two-divided photodetector for detecting the laser light reflected by the flexible plate 1b. However, the configuration of the deflection detection unit 49 is not limited to such a configuration, and may not be based on the optical lever method.

The structure of the heating / shape measuring apparatus as described above is almost the same as that of the conventional scanning atomic force microscope, except that the cantilever holder 40 has the heater 8 and the heating drive circuit 48. Points possessed, operation / control section 5
This is completely different from the conventional scanning atomic force microscope in terms of heating control described later by 0.

Next, an example of the operation of the heating / shape measuring device will be described.

In the first heating operation of the heating / shape measuring device, in response to a predetermined command input by the user via the input device 51, the arithmetic / control unit 50 causes the cantilever 1 to bend and search. A drive circuit is so arranged that, while the needle 1c is pressed against the surface of the sample 41, only a desired point on the surface of the sample 41 is heated or each point in a desired region on the surface of the sample 41 is sequentially heated. 43, 45, 47, 48 are controlled.

Specifically, in the case of heating only a desired point of the sample 41, the probe 1 is operated by operating the moving devices 44 and 46 via the drive circuits 45 and 47, for example.
X where the tip of c corresponds to a desired point on the surface of the sample 41,
A state in which the sample 41 is moved in the X and Y directions until it reaches a position in the Y direction, and then the sample 41 is moved in the Z direction, and the cantilever 1 is bent and the tip of the probe 1c is pressed against the surface of the sample 41. To After that, the drive circuit 48
The heater 8 of the cantilever holder 40 is caused to generate heat via the, or the heater 8 is made to generate heat in advance.

When heating a desired region of the sample 41, the tip of the probe 1c is moved to the surface of the sample 41 by operating the moving devices 25 and 27 via the drive circuits 45 and 47, for example. The sample 41 is moved in the X and Y directions until it reaches a position in the X and Y directions corresponding to the desired area of the sample 41, and then the sample 41 is moved in the Z direction. The sample 41 is pressed against the surface. After that, while the position of the sample 41 in the Z direction is maintained, the moving device 4 is moved through the drive circuits 45 and 47.
By operating 4 and 46, the sample 4 is moved so that the tip of the probe 1c scans a desired area on the surface of the sample 41.
1 is moved in the X and Y directions. During the scanning, the heater 8 of the cantilever holder 40 is caused to generate heat via the drive circuit 48.

In the first heating operation described above, the probe 1c is pressed against the surface of the sample 41 by the bending of the cantilever 1, so that the probe 1c surely contacts the surface of the sample 41, and the tip of the probe 1c. Heat is effectively conducted from the part to the surface of the sample 41. Further, even when the probe 1c is scanned with respect to the surface of the sample 41 in order to heat a desired region of the surface of the sample 41, the probe 1 is deflected by the bending of the cantilever 1.
Since c follows the unevenness of the surface of the sample 41, the probe 1c surely contacts the surface of the sample 41, and the heat conduction from the tip of the probe 1c to the surface of the sample 41 is effectively performed.

In the first heating operation, it is not always necessary to detect the deflection of the cantilever 1, so
When performing only the heating operation of the above, the bending detection unit 49 may be removed.

In the second heating operation of the heating / shape measuring device, in response to a predetermined command input by the user via the input device 51, the calculation / control unit 50 causes the deflection detecting unit 4 to operate.
The position of the sample 41 in the Z direction is set based on the detection signal from the drive circuit 4 so that the bending of the cantilever 1 becomes constant.
5, 47 and moving devices 44, 46 while controlling
The positions of the sample 41 in the X and Y directions are set to drive circuits 45 and 47 so that the probe 1c faces a desired point on the surface of the sample 41 or sequentially scans each point in a desired region on the surface of the sample 41.
And the moving device 44, 46, and the sample 4
The heat generation driving circuit 48 is controlled so that only a desired point on one surface is heated or each point on a desired region of the sample surface is sequentially heated.

Specifically, in the second heating operation, first,
The position of the cantilever 1 is adjusted using the moving device 42. This position adjustment is to irradiate a predetermined position of the cantilever 1 with laser light from a laser light source that constitutes the deflection detection unit 49, and to cause the reflected light reflected by the cantilever 1 to enter a predetermined position of the two-divided photodetector. , To adjust the position of the cantilever 1. Next, the drive circuit 4
By operating the moving devices 44 and 46 via the probes 5 and 47, the tip of the probe 1c reaches the position in the X and Y directions corresponding to the desired point or the desired region on the surface of the sample 41. 41 is moved in the X and Y directions. After that, the probe 1c of the cantilever 1 is moved by using the moving devices 44 and 46.
The sample 41 is moved in the Z direction until the sample 41 and the sample 41 come into contact with each other. At this time, the contact between the probe 1c of the cantilever 1 and the sample 41 can be achieved by detecting the bending of the cantilever 1 with the bending detection unit 49. When heating only a desired point on the surface of the sample 41, in this contact state, the heater 8 of the cantilever 1 is caused to generate heat via the drive circuit 48, and the heating is finished. On the other hand, when heating a desired region of the surface of the sample 41, after the contact between the sample 41 and the probe 1c is achieved, the bending of the cantilever 1 measured by the bending detection unit 49 using the moving device 46 is performed. While moving the sample 41 up and down in the Z direction so that
The sample 41 is moved in the X and Y directions so that the tip of the probe 1c scans a desired area on the surface of the sample 41. During the scanning, the heater 8 of the cantilever 1 is caused to generate heat via the drive circuit 48.

In the second heating operation described above, while the movement control of the probe 1c similar to the so-called contact mode in the atomic force microscope is realized, only a desired point on the surface of the sample 41 is heated or Each point in the desired area on the surface of the sample 41 will be heated sequentially. Therefore, the contact state between the probe 1c and the surface of the sample 41 can be kept constant by following the unevenness of the surface of the sample 41.
The heating amount of the surface of the sample 41 can be made constant regardless of the unevenness of the surface of No. 1.

For example, when so-called raster scanning is performed by the probe 1c, if the heater 8 is heated in a pulsed manner in accordance with the scanning order, it is possible to heat a region of any shape on the surface of the sample 41.

In the shape measuring operation of the heating / shape measuring apparatus, in response to a predetermined command input by the user through the input device 51, the calculation / control section 50 causes the calculation / control section 50 to perform the second heating operation. Similarly to the case, the position of the sample 41 in the Z direction is controlled via the drive circuits 45 and 47 and the moving devices 44 and 46 so that the bending of the cantilever 1 becomes constant based on the detection signal from the bending detection unit 49. While the probe 1c is the sample 4
The position of the sample 41 in the X and Y directions is controlled via the drive circuits 45 and 47 and the moving devices 44 and 46 so as to sequentially scan each point in the desired area on the surface of No. 1 and the X and Y directions. The information on the relative position of the probe 1c with respect to the surface of the sample 41, that is, the shape data of the surface of the sample 41 is obtained.

This shape measuring operation is the same as the contact mode operation in the conventional scanning atomic force microscope.

In the present embodiment, since the position control of the moving device is performed by the open loop control, the moving devices 42, 44, 46 output from the arithmetic / control unit 50.
The control signal to (1) corresponds to the position information of the moving devices 42, 44, 46. Therefore, the calculation / control unit 50 stores the shape data of the surface of the sample 41 in the internal memory based on this control signal. When the position control of the moving devices 42, 44, 46 is performed by feedback control, for example, the moving devices 42, 44, 46 may be provided with position detectors.

Then, in the present embodiment, the arithmetic / control unit 50 processes the shape data to display the unevenness image of the surface of the sample 41 on the display device.

Since the scanning itself of the probe 1c is common to the second heating operation and the shape measuring operation, these operations can be performed simultaneously.

Since the above-mentioned heating / shape measuring apparatus carries out each of the operations described above, it can be used as follows.

That is, the second heating operation and the third heating operation
By simultaneously performing the shape measurement operation of 1., it is possible to simultaneously obtain the shape data of the surface of the sample 41 and to heat the surface of the sample 41 entirely or locally.

Further, the shape data of the surface of the sample 41 before heating is acquired by the shape measuring operation, the heating point is determined based on this shape data, and then that point is locally changed by the second heating operation. It can be heated. That is, if it is desired to cause a thermal reaction at a singular point or an arbitrary position as a result of observing the unevenness of the sample 41 in the shape measuring operation, the position is locally heated by the second heating operation. It is possible. In this case, for example, by pointing out a part of the image of the unevenness of the surface of the sample 41 before heating displayed on the display device 52 with a mouse or the like as the input device 51, the portion is detected as the first image. It is preferable to build a user interface that is automatically heated by the second heating operation.

Further, the shape data of the surface of the sample 41 before heating is obtained by the shape measuring operation, the surface of the sample 41 is heated entirely or locally by the second heating operation, and then the shape measuring is performed again. Sample 4 heated by operation
By acquiring the shape data of the surface of No. 1, it is possible to observe the unevenness change of the surface of the sample 41 before and after heating.

The second heating operation and the shape measuring operation in the heating / shape measuring apparatus according to the above-described embodiment are based on the contact mode in the scanning atomic force microscope.

However, by modifying the above-mentioned heating / shape measuring device as follows, it is possible to realize the heating operation and the shape measuring operation in another predetermined mode in the scanning atomic force microscope.

That is, in FIG. 4, the cantilever 1
A vibration unit that vibrates the cantilever 1 and a vibration detection unit that detects the vibration state of the cantilever 1 are added.

The vibrating portion is, for example, a piezo element (not shown) provided on the flexible plate 1b of the cantilever 1, or a piezo element interposed between the cantilever holder 40 and the cantilever moving device 42. (Not shown) or the like can be employed. By applying an AC voltage to this piezo element, the cantilever 1 vibrates. At this time, it is preferable that the frequency of the AC voltage applied to the piezo element be a frequency slightly different from the natural frequency of the cantilever 1.

As the vibration detecting section, since the bending detecting section 49 is composed of a laser light source and a two-divided photodetector, this can be used as it is.
However, as the vibration detecting unit, for example, a piezoresistor provided in the flexible plate 1b of the cantilever 1 can be adopted, and the vibration state can be detected from the resistance change of the piezoresistor.

Then, the interatomic force acting between the probe 1c and the surface of the sample 41 changes according to the distance between the surface of the sample 41 and the probe 1c, and the cantilever according to the interatomic force. When the resonance frequency of 1 shifts and the atomic force changes, the detection signal from the vibration detecting unit changes. Therefore, based on the detection signal from the vibration detection unit, the distance between the sample 41 and the cantilever 1 is relatively moved in the vertical direction so that the interatomic force becomes constant. By doing so, the distance between the sample 41 and the center of vibration of the cantilever 1 becomes constant, so that the heating amount of the sample surface can be made constant regardless of the unevenness of the surface of the sample 41, and at the same time, the sample 41 can be heated. The shape data of the surface of can be obtained.

Even if the heating / shape measuring apparatus described above is modified to perform the heating operation and the shape measuring operation in such a mode as described above, it is substantially the same as the heating / shape measuring apparatus described above. .

Although various embodiments of the present invention have been described above, the present invention is not limited to these embodiments.

[0082]

According to the present invention, it is possible to locally heat the atomic or molecular-order minute regions of a sample.

Therefore, according to the present invention, the following specific application effects can be obtained.

The normal function of the biological sample in the living environment is 30 ° C to 40 ° C. Biological research is currently being carried out at the molecular level. According to the present invention, it is possible to finely observe the active state of living organisms by heating at a molecular level resolution in the range of 30 ° C to 40 ° C.

The temperature is also an important factor in controlling the protein activity and denaturing. Therefore, according to the present invention, the binding state can be examined at the molecular level by locally heating a protein having a large molecular weight.

Furthermore, in organic substances, the bonding state changes with temperature. Therefore, local heating of an organic substance having a large molecular weight can change the bonding state of molecular chains at the molecular level. Therefore, the present invention can also be applied to nanometer-order lithography.

[Brief description of the drawings]

FIG. 1 is a diagram showing a cantilever holder according to an embodiment of the present invention, FIG. 1 (a) is a schematic perspective view showing a state in which a cantilever is held, and FIG. 1 (b) is a plan view showing a heater portion. Is.

FIG. 2 is a view showing a cantilever holder according to another embodiment of the present invention, FIG. 2 (a) is a schematic perspective view showing a state in which the cantilever is held, and FIG. 2 (b) is FIG. 2 (a).
FIG. 2C is a plan view showing a heater portion, taken along the line AA in FIG.

FIG. 3 is a view showing a cantilever holder according to still another embodiment of the present invention, FIG. 3 (a) is a schematic perspective view showing a state in which the cantilever is held, and FIG. 3 (b) is FIG.
FIG. 3C is a cross-sectional view taken along line BB in FIG. 3A, and FIG. 3C is a plan view showing a heater portion.

FIG. 4 is a schematic configuration diagram schematically showing a heating / shape measuring device according to an embodiment of the present invention.

[Explanation of symbols]

 1 cantilever 1c probe 2 main body 2a inclined surface 3 substrate 4 leaf spring (pressing member) 6,22,32 screw 8 pattern (heater) 9a, 9b electrode pattern 20 pressing plate (pressing member) 21,31 heat insulating material 30 support plate 40 Cantilever Holder 42,44,46 Moving Device 43,45,47 Drive Circuit 48 Heat Generation Drive Circuit 49 Deflection Detection Unit 50 Calculation / Control Unit 51 Input Device 52 Display Device

Claims (8)

[Claims] 1. A cantilever holder for holding a cantilever having a probe, comprising a heater for heating the held cantilever. 2. A support base, and a pressing member for sandwiching the cantilever between the support base, and the heater is formed on the support base or the pressing member. Cantilever holder. 3. A support base, and a support plate fixed to the cantilever in advance, the support plate fixed to the support base, wherein the heater is formed on the support plate. The cantilever holder according to item 1. 4. The cantilever according to claim 1, further comprising a heat insulating material for reducing conduction of heat generated by the heater to a portion other than the held cantilever. holder. 5. A cantilever having a probe, a cantilever holder according to any one of claims 1 to 4 for holding the cantilever, a heat generating drive means for heating the heater, and a surface substantially parallel to the sample surface. Moving means for moving the probe relative to the sample in a direction and moving the probe relative to the sample in a direction substantially perpendicular to the surface of the sample, and the cantilever bends. In the state where the probe is pressed against the sample surface, only the desired point on the sample surface is heated, or each point in the desired region of the sample surface is sequentially heated, so that the heat generation drive means. And a control unit for controlling the moving unit, and a heating device. 6. A cantilever having a probe, a cantilever holder according to any one of claims 1 to 4, which holds the cantilever, a heat generation drive means for causing the heater to generate heat, and a deflection for detecting deflection of the cantilever. The detecting means and the probe relative to the sample in a direction substantially parallel to the sample surface, and the probe relative to the sample in a direction substantially perpendicular to the sample surface. And a moving unit for moving the cantilever based on a detection signal from the bending detecting unit so that the bending of the cantilever becomes constant, while the probe is opposed to a desired point on the sample surface. Or means for controlling the moving means so as to sequentially scan each point of a desired area of the sample surface, and only the desired point of the sample surface is heated or the sample surface A heating unit for controlling the heat generation driving unit so that each point in the desired area of the heating unit is heated sequentially. 7. A cantilever having a probe, a cantilever holder according to any one of claims 1 to 4 for holding the cantilever, a heat generating drive means for causing the heater to generate heat, and a vibrating means for vibrating the cantilever. A vibration detecting means for detecting a vibration state of the cantilever, and the probe relatively moving with respect to the sample in a direction of a plane substantially parallel to the sample surface, and in a direction substantially perpendicular to the sample surface. A moving means for moving the probe relative to the sample, and an atomic force acting between the probe of the cantilever and the sample surface based on a detection signal from the vibration detecting means is constant. While controlling the moving means so that the probe is opposed to a desired point on the sample surface or sequentially scans each point on a desired area of the sample surface. As described above, means for controlling the moving means, and means for controlling the heat generation driving means so that only desired points on the sample surface are heated or respective points in desired areas on the sample surface are sequentially heated. And a heating device. 8. The heating device according to claim 6 or 7, wherein the heating device is arranged in a direction substantially perpendicular to the sample surface according to a relative position of the probe with respect to the sample surface in a direction of a plane substantially parallel to the sample surface. A heating / shape measuring apparatus comprising: a unit that obtains information about a relative position of the probe with respect to the sample surface.