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JPH09108886A - Joint structure for members - Google Patents

Joint structure for members

Info

Publication number
JPH09108886A
JPH09108886A JP30039795A JP30039795A JPH09108886A JP H09108886 A JPH09108886 A JP H09108886A JP 30039795 A JP30039795 A JP 30039795A JP 30039795 A JP30039795 A JP 30039795A JP H09108886 A JPH09108886 A JP H09108886A
Authority
JP
Japan
Prior art keywords
metal
alloy
members
melt
joining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30039795A
Other languages
Japanese (ja)
Inventor
Seiichiro Miyata
征一郎 宮田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIYATA R ANDEII KK
Original Assignee
MIYATA R ANDEII KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIYATA R ANDEII KK filed Critical MIYATA R ANDEII KK
Priority to JP30039795A priority Critical patent/JPH09108886A/en
Publication of JPH09108886A publication Critical patent/JPH09108886A/en
Pending legal-status Critical Current

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  • Pressure Welding/Diffusion-Bonding (AREA)
  • Ceramic Products (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a joint structure in which the penetration of a joint surface metal is obviated and the joint strains between two members varying in the coeffts. of expansion are decreased by metallurgically coupling the two members by holding a melt phase of an alloy contg. an active metal between these members. SOLUTION: The members of the joint structure of the metal-metal, the metal-ceramics are joined across the melt phase of the M-X (X is the active metal) alloy. The joint surface of the metallic member consists of the metal Y which does not form the alloy with the metal M or a metallic material formed with an oxidized film or nitrided film which does not cause the reaction of the molten metal M. Y does not melt into the metal M in the case of the metal Y. The penetration of the metallic component into the metal M does not arise in the case of the metallic material formed with the oxidized film and the nitrided film. The active metal X added into the metal M is diffused into the metal Y or the oxidized film and nitrided film, by which the melt M-X alloy and the metal Y or the melt M-X allay and the oxidized film and nitrided film are metallurgically coupled.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、部材の接合構造に関わ
り、さらに詳しくは、膨脹係数の異なる二つの部材の接
合歪みを小さくできる接合構造に係わるものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joining structure of members, and more particularly to a joining structure capable of reducing a joining strain between two members having different expansion coefficients.

【0002】[0002]

【従来の技術】金属−金属あるいは金属−セラミックの
接合で、熱膨張係数の異なる部材を接合する際、柔らか
い金属をろう材に使用して接合する場合が多い。例え
ば、In,Sn,Zn,Pb,Cd等の低融点金属、A
g,Au,Pt,Pd等の貴金属はおしなべて柔らかい
金属で、これらを用いて接合すると熱膨張係数の違いに
よって生ずる熱歪はこれらの金属の塑性変形あるいは弾
性変形によって緩和される。この際問題は、これらろう
材金属の中に接合部材の接合面金属の溶け込みが起こる
ことである。この結果、ろう材金属が硬化し、ろう材金
属の変形抵抗が大きくなり、接合部の残留応力が大きく
なる。部材の一方がセラミックの場合、最悪の場合、セ
ラミックが破壊されることがある。この溶け込みは冶金
学的に不可避な現象であるので、従来は溶け込みによる
変形抵抗の増大は容認した上で、いかにして残留応力を
小さくするかに考慮が払われている。最も一般的な方法
は中間的な膨脹係数を有する中間層を挿入することであ
る。中間層の挿入によって、隣り合う部材間の熱膨張差
をできるだけ小さくして残留応力を小さくすることが行
われているにすぎず、根本的な解決は計られていないの
が現状である。
2. Description of the Related Art In metal-metal or metal-ceramic joining, when joining members having different thermal expansion coefficients, a soft metal is often used as a brazing material. For example, a low melting point metal such as In, Sn, Zn, Pb, Cd, A
Noble metals such as g, Au, Pt, and Pd are generally soft metals, and when they are joined together, thermal strain caused by a difference in thermal expansion coefficient is relaxed by plastic deformation or elastic deformation of these metals. In this case, the problem is that the joining surface metal of the joining member is melted into the brazing filler metal. As a result, the brazing filler metal is hardened, the deformation resistance of the brazing filler metal increases, and the residual stress in the joint increases. If one of the members is ceramic, in the worst case the ceramic may be destroyed. Since this penetration is a metallurgically unavoidable phenomenon, it has been conventionally considered how to reduce the residual stress after allowing the deformation resistance to increase due to the penetration. The most common method is to insert an intermediate layer with an intermediate coefficient of expansion. The insertion of the intermediate layer merely reduces the difference in thermal expansion between the adjacent members to reduce the residual stress, and the current situation is that no fundamental solution has been made.

【0003】[0003]

【発明が解決する課題】本発明は、かかる状況に鑑みて
なされたもので、その目的とするところは、接合面金属
の溶け込みを皆無あるいは極小にすることができる新し
い接合構造を提供せんとするものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a new joining structure capable of completely or minimally melting the joining surface metal. It is a thing.

【0004】[0004]

【課題を解決するための手段】本発明者は上記問題に関
して鋭意研究を行った結果、次の知見を得た。すなわ
ち、接合部での溶け込みをなくすためには、ろう材と接
合部金属が反応しない、あるいは合金を作らない金属の
組合わせにすると、溶融したろう材に接合部金属は溶け
込むことがない(しかし反面接合も起こらないが)こと
に着目し、本発明に思い至った。すなわち、 1.少なくとも一方の部材の接合面が金属からなる二つ
の部材がM−X(Xは活性金属)なる合金の融体相を間
に挟んで冶金的に接合された構造であって、該接合部金
属面が金属Mの融体と反応せず、かつ該M−X合金の接
合時の融体温度では固相状態で存在する金属Yからな
り、該金属Yに該活性金属Xが拡散することによって合
金M−Xと金属Yが冶金的に接合されてなることを特徴
とする部材の接合構造。 2.上記金属MがIn,Sn,Au,Ag,Cu,A
L,Pd,Zn,Pb,Cd,の中から選ばれた一種あ
るいは二種以上の金属を主成分にする合金であって、金
属YがCr,Mo,Wから選ばれた金属である1に記載
の接合構造。 3.上記冶金的接合がロー付である1あるいは2に記載
の接合構造。 4.少なくとも一方の部材が金属からなる二つの部材
が、M−X(Xは活性金属)なる合金の融体相を間に挟
んで冶金的に接合された構造であって、該金属部材の少
なくとも接合面が、(Fe,Ni,Co)の中から選ば
れた一種あるいは二種以上の金属と、(Cr,AL,S
i)の中から選ばれた一種あるいは二種以上の金属を主
成分とする合金で、かつCrにあっては10%以上,A
Lにあっては1%以上,Siにあっては1%以上の合金
からなり、該合金の表面に成分として含むCrあるいは
ALあるいはSiの酸化膜が形成されてなることを特徴
とする部材の接合構造。 5.上記金属Mが、In,Sn,Au,Ag,Cu,A
L,Pd,Zn,Pb,Cd,の中から選ばれた一種あ
るいは二種以上の金属を主成分にする合金である4に記
載の接合構造。 6.少なくとも一方の部材が金属からなる二つの部材が
M−X(Xは活性金属)なる合金の融汰を間に挟んで冶
金的に接合された構造であって、該接合部金属表面が窒
化されてなることを特徴とする部材の接合構造。 7.上記活性金属Xが、Ti,Zr,Nb,Taの中か
ら選ばれた金属である1〜6のいずれかに記載の接合構
造。
Means for Solving the Problems The present inventor has made intensive studies on the above problems and obtained the following findings. That is, in order to prevent the melting at the joint, if the brazing filler metal and the joint metal do not react with each other, or if a metal that does not form an alloy is used, the joint metal does not melt into the molten brazing filler metal (but On the other hand, the present invention was conceived, focusing on the fact that joining does not occur). That is, 1. A structure in which two members, at least one of which has a joining surface made of a metal, is metallurgically joined with a melt phase of an alloy of M-X (X being an active metal) sandwiched therebetween, and the joining portion metal The surface is made of metal Y which does not react with the melt of the metal M and exists in a solid state at the melt temperature at the time of joining the MX alloy, and the active metal X diffuses into the metal Y. A joining structure of members, wherein the alloy M-X and the metal Y are metallurgically joined. 2. The metal M is In, Sn, Au, Ag, Cu, A
An alloy mainly composed of one or more metals selected from L, Pd, Zn, Pb and Cd, in which the metal Y is a metal selected from Cr, Mo and W. The joining structure described. 3. The joining structure according to 1 or 2, wherein the metallurgical joining is with brazing. 4. A structure in which two members, at least one of which is made of metal, are metallurgically bonded with a melt phase of an alloy M-X (X is an active metal) sandwiched therebetween, and at least the bonding of the metal members The surface is one or more metals selected from (Fe, Ni, Co), and (Cr, AL, S
An alloy containing one or more metals selected from i) as the main component, and Cr is 10% or more, A
L is 1% or more, and Si is 1% or more, and an oxide film of Cr, AL, or Si contained as a component is formed on the surface of the alloy. Junction structure. 5. The metal M is In, Sn, Au, Ag, Cu, A
5. The joint structure according to 4, which is an alloy containing one or more metals selected from L, Pd, Zn, Pb, and Cd as a main component. 6. Two members, at least one of which is made of metal, are metallurgically bonded with a melt of an alloy M-X (X is an active metal) sandwiched therebetween, and the metal surface of the bonded portion is nitrided. A joining structure of members characterized by the following. 7. The junction structure according to any one of 1 to 6, wherein the active metal X is a metal selected from Ti, Zr, Nb, and Ta.

【0005】[0005]

【発明の実施の形態】本発明は、少なくとも一方の部材
が金属からなる部材の接合構造である。すなわち、金属
−金属、、金属−セラミックの接合構造である。これら
部材はM−X(Xは活性金属)なる合金の融体相を間に
挟んで接合されている。つまり溶融したM−X合金によ
って冶金的に接合されている。このとき金属部材の接合
面は金属Mとは合金を形成しない金属Yあるいは溶融し
た金属Mと反応しない酸化膜あるいは窒化膜が形成され
た金属材料からなる。金属Yの場合、Yは溶融した金属
Mに溶け込むこともないし、また、酸化膜、窒化膜が形
成された金属材料の場合、この金属成分が金属Mに溶け
込むこともない。しかし反面、冶金的に接合されること
もない。ここでMの中に添加された活性金属Xが金属Y
あるいは酸化膜、窒化膜に拡散することによって融体M
−X合金と金属Yあるいは融体M−X合金と酸化膜ある
いは窒化膜が冶金的に接合される。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention is a joining structure of members in which at least one member is made of metal. That is, it is a metal-metal or metal-ceramic bonding structure. These members are joined with a melt phase of an alloy of M-X (X is an active metal) interposed therebetween. That is, they are metallurgically joined by the molten MX alloy. At this time, the joint surface of the metal member is made of a metal Y that does not form an alloy with the metal M or a metal material that has an oxide film or a nitride film that does not react with the molten metal M. In the case of the metal Y, Y does not melt into the melted metal M, and in the case of a metal material having an oxide film or a nitride film, this metal component does not melt into the metal M. However, on the other hand, they are not metallurgically bonded. Here, the active metal X added to M is metal Y
Alternatively, the melt M is formed by diffusing into an oxide film or a nitride film.
The -X alloy and the metal Y or the melt MX alloy and the oxide film or the nitride film are metallurgically bonded.

【0006】添加される活性金属Xは0.1〜数%の添
加で十分である。好ましくは0.1〜5%、最も好まし
くは0.5〜2%である。過度(10%以上)の添加は
M−X合金を硬くするので好ましくない。
It is sufficient to add 0.1 to several% of the active metal X to be added. It is preferably 0.1 to 5%, most preferably 0.5 to 2%. Excessive addition (10% or more) hardens the MX alloy and is not preferred.

【0007】金属Yは、少なくとも部材表面がYであれ
ばよいので、部材全体が必ずしもYである必要はない。
異種材の上に金属Yが被覆されたものでもよい。被覆の
有効な手段はメッキ、溶射、スパッタリングである。
The metal Y does not necessarily have to be Y for the entire member because at least the surface of the member must be Y.
A different material may be coated with metal Y. Effective means of coating are plating, thermal spraying, sputtering.

【0008】金属YはCr,Mo,Wあるいはこれらの
合金であり、金属Mは、In,SnZn,Pb,Cd、
AL,Au,Ag,Cu,Pdの中から選ばれた一種あ
るいは二種以上の金属を主成分にする合金である。
The metal Y is Cr, Mo, W or an alloy thereof, and the metal M is In, SnZn, Pb, Cd,
It is an alloy whose main component is one or more metals selected from AL, Au, Ag, Cu and Pd.

【0009】表面に酸化膜が形成された部材にあって
は、表面の成分組成が、(Fe,Ni,Co)の中から
選ばれた一種あるいは二種以上の金属と、(Cr,A
L,Si)の中から選ばれた一種あるいは二種以上の金
属を主成分とする合金で、かつCr AL,Siが単独
で存在する場合、Crにあっては10%以上,ALにあ
っては1%以上,Siにあっては1%以上のものが好ま
しい。CrとAL、CrとSiが共存する場合、Crは
5%以上で、AL,Siはそれぞれ0.5%以上が好ま
しい。AL,Siが共存する場合、AL,Siの和が1
%以上が好ましい。Cr、AL,Siが共存する場合、
Crは5%以上でAL,Siの和が0.5%以上が好ま
しい。これらの成分範囲のものは表面に緻密で、密着性
が強く、安定した酸化膜が形成できる。これらの元素の
上限は、Crには特別な制限はないが、経済性を考慮す
ると、40%程度まで、ALでは5%程度まで、Siで
は10%程度までである。上限を越えると溶製が困難に
なる。部材は、全体が上記成分の材料で一体的に形成さ
れていてもよく、あるいは表面だけこの成分になるよう
にしたものでもよい。つまりこの成分のものを表面に被
覆したものでもよい。被覆に当たって、特別な限定はな
く、本成分の被覆が形成できればいかなる方法でも適用
できるが、中でもとりわけ溶射が有効である。本成分の
材料は、高温800℃以上で酸化焼鈍するとさらに緻密
で厚い酸化膜が形成される。また、接合部材金属の表面
にセラミックを被覆することによって酸化膜を形成する
ようにしてもよい。すなわち、セラミックを溶射、スパ
ッタリング、PVD,CVD、あるいはゾルーゲル法等
の手段で被覆してもよい。スパッタリング、PVD,C
VDの手法を採用すると窒化物、炭化物被膜も形成で
き、いずれも本発明には有効である。
In a member having an oxide film formed on its surface, the component composition of the surface is one or more metals selected from (Fe, Ni, Co), and (Cr, A
L, Si) is an alloy mainly composed of one or more metals selected from the group consisting of (L, Si) and Cr AL, Si is present alone, the Cr content is 10% or more, and the AL content is AL. Is preferably 1% or more, and Si is preferably 1% or more. When Cr and AL coexist, and Cr and Si coexist, Cr is preferably 5% or more and AL and Si are preferably 0.5% or more. When AL and Si coexist, the sum of AL and Si is 1
% Or more is preferable. When Cr, AL and Si coexist,
It is preferable that Cr is 5% or more and the sum of AL and Si is 0.5% or more. Those having these component ranges are dense on the surface, have strong adhesion, and can form a stable oxide film. The upper limit of these elements is not particularly limited to Cr, but considering economic efficiency, it is up to about 40%, about 5% for AL, and about 10% for Si. If it exceeds the upper limit, melting becomes difficult. The member may be wholly integrally formed of the materials of the above-mentioned components, or may have only the surface made of this component. That is, the surface of this component may be coated. The coating is not particularly limited, and any method can be applied as long as the coating of the present component can be formed. Among them, thermal spraying is particularly effective. When the material of this component is oxidized and annealed at a high temperature of 800 ° C. or higher, a denser and thicker oxide film is formed. Alternatively, the oxide film may be formed by coating the surface of the joining member metal with ceramic. That is, the ceramic may be coated by means such as thermal spraying, sputtering, PVD, CVD, or sol-gel method. Sputtering, PVD, C
When the VD method is adopted, nitride and carbide coatings can be formed, and both are effective for the present invention.

【0010】表面に窒化膜が形成された部材にあって
は、成分に特別な制限はないが、窒化鋼と称せられる鋼
材が好ましい。
There is no particular limitation on the composition of the member having the nitride film formed on its surface, but a steel material called nitrided steel is preferable.

【0011】活性金属は、Ti,Zr,Nb,Ta,V
の中から一種あるいは二種以上を選んで適宜使用しても
よい。
Active metals include Ti, Zr, Nb, Ta and V.
One or two or more of these may be selected and used as appropriate.

【0012】[0012]

【実施例】【Example】

実施例1 部材1: アルミナの板(φ200mm×10mm厚
さ) 部材2: 炭素鋼の板(φ200mm×20mm厚さ) ろう材:In−1%Ti(100ミクロン) 部材1と2の間にろう材の箔を挟み、真空中(1×10
−5トール)800℃に加熱してロー付した。アルミナ
の板にはクラックが発生した。ろう材(In−1%T
i)には鉄が多量に溶け込んでいた。次に、部材2の炭
素鋼の板に5ミクロン、ニッケルメッキし、この上にク
ロムを10ミクロンメッキし、同じくIn−1%Ti
(100ミクロン)を挟んで同じ条件でロー付した。ア
ルミナは割れることなく接合できた。ミクロ組織を観察
した結果、クロムのIn中への溶け込みは認められなか
った。また成分分析でも、ろう材へのクロムの溶け込み
は認められなかった。クロムを被覆することによって、
In中へ鋼の溶け込みが阻止され、割れ防止に効果があ
ることが確認できた。
Example 1 Member 1: Alumina plate (φ200 mm × 10 mm thickness) Member 2: Carbon steel plate (φ200 mm × 20 mm thickness) Brazing material: In-1% Ti (100 micron) Wax between members 1 and 2 Sandwich the foil of the material, in vacuum (1 x 10
-5 torr) Heated to 800 ° C and brazed. Cracks occurred on the alumina plate. Brazing material (In-1% T
A large amount of iron was dissolved in i). Next, the carbon steel plate of the member 2 was plated with nickel of 5 microns, and chromium was plated with 10 microns on the plate.
(100 micron) was sandwiched and brazed under the same conditions. Alumina could be joined without cracking. As a result of observing the microstructure, dissolution of chromium into In was not recognized. Further, in the component analysis as well, the dissolution of chromium into the brazing material was not observed. By coating chrome,
It was confirmed that the steel was prevented from melting into In and was effective in preventing cracking.

【0013】実施例2 部材1: Moの板(φ180mm×5mm厚さ) 部材2: 純銅の板(φ180mm×10mm厚さ) ろう材:Sn−1%Zr(80ミクロン) 部材1と2の間にろう材の箔を挟み、真空中(1×10
−5トール)850℃に加熱してロー付した。接合材は
純銅の方向に弓なりに反っていた。反り量は、1000
ミクロンであった。ろう材(Sn−1%Zr)には銅が
多量に溶け込んでいた。次に、部材2の純銅の板に10
0ミクロン,タングステンを溶射し、Sn−1%Zr
(80ミクロン)を挟んで同じ条件でロー付した。反り
量は、300ミクロンであった。ミクロ組織を観察した
結果、タングステンのSn中への溶け込みはなかった。
また成分分析でも、ろう材へのタングステンの溶け込み
は認められなかった。タングステンを被覆することによ
って、Sn中へ銅の溶け込みが阻止され、変形防止に著
効があることが確認できた。
Example 2 Member 1: Mo plate (φ180 mm × 5 mm thickness) Member 2: Pure copper plate (φ180 mm × 10 mm thickness) Brazing material: Sn-1% Zr (80 μm) Between members 1 and 2 Sandwich a foil of brazing material in a vacuum (1 x 10
-5 torr) Heated to 850 ° C and brazed. The joining material was bowed in the direction of pure copper. The amount of warpage is 1000
Micron. A large amount of copper was dissolved in the brazing material (Sn-1% Zr). Next, the pure copper plate of member 2 is applied with 10
0 micron sprayed with tungsten, Sn-1% Zr
(80 microns) were sandwiched and brazed under the same conditions. The amount of warpage was 300 microns. As a result of observing the microstructure, tungsten did not dissolve into Sn.
In addition, in the component analysis, no dissolution of tungsten into the brazing material was observed. It was confirmed that by coating with tungsten, the dissolution of copper in Sn was prevented and the deformation was significantly prevented.

【0014】実施例3 部材1:アルミナの板(φ80mm×5mm厚さ) 部材2:Fe−3%C−3%AL鋳鉄の板(φ80mm
×10mm厚さ) 比較材1:Fe−3%C鋳鉄の板(φ80mm×10m
m厚さ) 比較材2:Fe−3%C鋳鉄の板(φ80mm×10m
m厚さ)にNi−10%Cr−3%AL−1%Y合金を
100ミクロン溶射したもの。 ろう材:AL−0.5%Ti(120ミクロン) 部材2は大気中900℃に2時間加熱して酸化処理し
た。部材1と2、および部材1と比較材1,2の間にそ
れぞれろう材の箔を挟み、真空中(1×10−5トー
ル)850℃に加熱してロー付した。部材1と2ではア
ルミナは割れることなく接合できた。成分分析では、ろ
う材(AL−0.5%Ti)への鋳鉄の溶け込みは認め
られなかった。一方部材1と比較材1ではアルミナが割
れた。この組み合わせでは、アルミニウムと鋳鉄が合金
化し、硬くて脆い相が形成されていた。一方部材1と比
較材2ではアルミナが割れることなく接合できた。成分
分析では、ろう材(AL−0.5%Ti)への溶射層の
溶け込みは認められなかった。溶射層表面の酸化膜で溶
け込みが阻止されていた。部材表面の酸化膜によって合
金層の形成を阻止し、割れを防止できることが確認でき
た。
Example 3 Member 1: Alumina plate (φ80 mm × 5 mm thickness) Member 2: Fe-3% C-3% AL cast iron plate (φ80 mm)
Comparative material 1: Fe-3% C cast iron plate (φ80 mm × 10 m)
Comparative thickness 2: Fe-3% C cast iron plate (φ80 mm × 10 m)
(m thickness), which was sprayed with Ni-10% Cr-3% AL-1% Y alloy by 100 microns. Brazing material: AL-0.5% Ti (120 micron) The member 2 was heated at 900 ° C. in the atmosphere for 2 hours to be oxidized. A brazing material foil was sandwiched between the members 1 and 2 and between the member 1 and the comparative materials 1 and 2, respectively, and heated at 850 ° C. in vacuum (1 × 10 −5 torr) and brazed. In members 1 and 2, alumina could be joined without cracking. In the component analysis, the dissolution of cast iron into the brazing material (AL-0.5% Ti) was not recognized. On the other hand, the alumina cracked in the member 1 and the comparative material 1. In this combination, aluminum and cast iron were alloyed to form a hard and brittle phase. On the other hand, in the member 1 and the comparative material 2, the alumina could be joined without cracking. In the component analysis, no penetration of the sprayed layer into the brazing material (AL-0.5% Ti) was observed. The oxide film on the surface of the sprayed layer prevented the penetration. It was confirmed that the oxide film on the surface of the member could prevent the formation of the alloy layer and prevent cracking.

【0015】実施例4 部材1:アルミナの板(φ100mm×5mm厚さ) 部材2:窒化処理したFe−0.1%C−2%Cr鋼の
板(φ100mm×10mm厚さ) 比較材:Fe−0.1%C−2%Cr鋼の板(無処理)
(φ100mm×10mm厚さ) ろう材:Sn−0.5%Ti(100ミクロン) 部材1と2、および部材1と比較材の間にそれぞれろう
材の箔を挟み、真空中(1×10−5トール)850℃
に加熱してロー付した。部材1と2ではアルミナは割れ
ることなく接合できた。成分分析では、ろう材(Sn−
0.5%Ti)への鉄の溶け込みは認められなかった。
一方部材1と比較材ではアルミナが割れた。この組み合
わせでは、鉄がSn中に溶け込んで硬くて脆い相が形成
されていた。部材表面の窒化膜によって合金層の形成を
阻止し、割れを防止できることが確認できた。
Example 4 Member 1: Alumina plate (φ100 mm × 5 mm thickness) Member 2: Nitrided Fe-0.1% C-2% Cr steel plate (φ100 mm × 10 mm thickness) Comparative material: Fe -0.1% C-2% Cr steel plate (untreated)
(Φ100 mm × 10 mm thickness) Brazing material: Sn-0.5% Ti (100 μm) A brazing material foil is sandwiched between the members 1 and 2 and between the member 1 and the comparative material, and in vacuum (1 × 10 − 5 Torr) 850 ° C
Heated and brazed. In members 1 and 2, alumina could be joined without cracking. In the component analysis, the brazing material (Sn-
No dissolution of iron into 0.5% Ti) was observed.
On the other hand, alumina cracked in the member 1 and the comparative material. In this combination, iron was dissolved in Sn to form a hard and brittle phase. It was confirmed that the nitride film on the surface of the member can prevent the formation of the alloy layer and prevent cracking.

【0016】実施例5 部材1:炭化ケイ素の板(φ80mm×2mm厚さ) 部材2:Fe−42%Ni鋼の板(φ80mm×10m
m厚さ)(接合面に高純度アルミナを30ミクロン溶
射) 比較材1:Fe−42%Ni鋼の板(無処理)(φ80
mm×10mm厚さ) 比較材2:接合面にTiCを0.5ミクロン、PVDで
被覆したFe−42%Ni鋼の板(φ80mm×10m
m厚さ) ろう材:Sn−5%Ag−1%Zr(100ミクロン) 部材1と2、および部材1と比較材1,2の間にそれぞ
れろう材の箔を挟み、真空中(1×10−5トール)8
50℃に加熱してロー付した。部材1と2ではセラミッ
クは割れることなく接合できた。一方部材1と比較材1
ではセラミックの板が割れた。この組み合わせでは、ろ
う材と42Ni鋼が合金化し、硬くて脆い相が形成され
ていた。一方部材1と比較材2ではセラミックが割れる
ことなく接合できた。成分分析では、ろう材への42N
i鋼の溶け込みは認められなかった。TiCのPVD被
膜で溶け込みが阻止されていた。部材表面のセラミック
膜によって合金層の形成を阻止し、割れを防止できるこ
とが確認できた。
Example 5 Member 1: Silicon Carbide Plate (φ80 mm × 2 mm Thickness) Member 2: Fe-42% Ni Steel Plate (φ80 mm × 10 m)
m thickness) (High-purity alumina sprayed on the bonding surface to 30 microns) Comparative material 1: Fe-42% Ni steel plate (untreated) (φ80
mm × 10 mm thickness) Comparative material 2: Fe-42% Ni steel plate (φ80 mm × 10 m) with TiC 0.5 μm and PVD coated on the joint surface
m thickness) Brazing material: Sn-5% Ag-1% Zr (100 microns) A brazing material foil is sandwiched between the members 1 and 2 and between the member 1 and the comparative materials 1 and 2, respectively, and in vacuum (1 x 10-5 torr) 8
It was heated to 50 ° C and brazed. In members 1 and 2, the ceramic could be joined without cracking. On the other hand, member 1 and comparative material 1
Then the ceramic plate broke. In this combination, the brazing material and 42Ni steel were alloyed to form a hard and brittle phase. On the other hand, in the member 1 and the comparative material 2, the ceramics could be joined without cracking. In component analysis, 42N for brazing material
No penetration of i-steel was observed. The PVD coating of TiC prevented penetration. It was confirmed that the ceramic film on the surface of the member can prevent the formation of the alloy layer and prevent cracking.

【0017】[0017]

【発明の効果】以上詳記したように本発明は接合部材の
割れ、変形を極小化できる特徴を有し、金属、セラミッ
ク材料の大型部材の接合に多大の威力を発揮するもので
ある。
As described above in detail, the present invention has a feature that cracking and deformation of the joining member can be minimized, and exerts great power in joining large-sized members made of metal or ceramic material.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】少なくとも一方の部材の接合面が金属から
なる二つの部材がM−X(Xは活性金属)なる合金の融
体相を間に挟んで冶金的に接合された構造であって、該
接合部金属面が金属Mの融体と反応せず、かつ該M−X
合金の接合時の融体温度では固相状態で存在する金属Y
からなり、該金属Yに該活性金属Xが拡散することによ
って合金M−Xと金属Yが冶金的に接合されてなること
を特徴とする部材の接合構造。
1. A structure in which two members, at least one of which has a bonding surface made of metal, are metallurgically bonded with a melt phase of an alloy of MX (X is an active metal) interposed therebetween. , The joint metal surface does not react with the melt of the metal M, and the MX
Metal Y that exists in the solid state at the melt temperature when joining alloys
And a metal-metallurgically-bonded alloy M-X and metal Y by diffusing the active metal X into the metal Y.
【請求項2】上記金属MがIn,Sn,Au,Ag,C
u,AL,Pd,Zn,Pb,Cd,の中から選ばれた
一種あるいは二種以上の金属を主成分にする合金であっ
て、金属YがCr,Mo,Wから選ばれた金属である請
求項1に記載の接合構造。
2. The metal M is In, Sn, Au, Ag, C.
An alloy mainly composed of one or more metals selected from u, AL, Pd, Zn, Pb and Cd, and a metal Y is a metal selected from Cr, Mo and W. The joint structure according to claim 1.
【請求項3】上記冶金的接合がロー付である請求項1あ
るいは2に記載の接合構造。
3. The joining structure according to claim 1, wherein the metallurgical joining is brazing.
【請求項4】少なくとも一方の部材が金属からなる二つ
の部材が、M−X(Xは活性金属)なる合金の融体を間
に挟んで冶金的に接合された構造であって、該金属部材
の少なくとも接合面が、(Fe,Ni,Co)の中から
選ばれた一種あるいは二種以上の金属と、(Cr,A
L,Si)の中から選ばれた一種あるいは二種以上の金
属を主成分とする合金で、かつCrにあっては10%以
上,ALにあっては1%以上,Siにあっては1%以上
の合金からなり、該合金の表面に成分として含むCrあ
るいはALあるいはSiの酸化膜が形成されてなること
を特徴とする部材の接合構造。
4. A structure in which two members, at least one of which is made of metal, are metallurgically joined with a melt of an alloy of MX (where X is an active metal) sandwiched between them. At least the joint surface of the member is composed of one or more metals selected from (Fe, Ni, Co), and (Cr, A
L, Si) is an alloy mainly composed of one or more metals selected from among L, Si), and is 10% or more for Cr, 1% or more for AL, and 1 for Si. % Or more of an alloy, and an oxide film of Cr, AL, or Si contained as a component is formed on the surface of the alloy, the joining structure of members.
【請求項5】上記金属MがIn,Sn,Au,Ag,C
u,AL,Pd,Zn,Pb,Cd,の中から選ばれた
一種あるいは二種以上の金属を主成分にする合金である
請求項4に記載の接合構造。
5. The metal M is In, Sn, Au, Ag, C.
The joint structure according to claim 4, which is an alloy containing one or more metals selected from u, AL, Pd, Zn, Pb, and Cd as a main component.
【請求項6】少なくとも一方の部材が金属からなる二つ
の部材がM−X(Xは活性金属)なる合金の融体相を間
に挟んで冶金的に接合された構造であって、該接合部金
属表面が窒化されてなることを特徴とする部材の接合構
造。
6. A structure in which two members, at least one of which is made of metal, are metallurgically bonded with a melt phase of an alloy of MX (X is an active metal) sandwiched between them. A joining structure of members, wherein the metal surface of the part is nitrided.
【請求項7】上記活性金属Xが、Ti,Zr,Nb,T
aの中から選ばれた金属である請求項1〜6のいずれか
に記載の接合構造。
7. The active metal X is Ti, Zr, Nb, T.
The joining structure according to any one of claims 1 to 6, which is a metal selected from a.
JP30039795A 1995-10-11 1995-10-11 Joint structure for members Pending JPH09108886A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30039795A JPH09108886A (en) 1995-10-11 1995-10-11 Joint structure for members

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30039795A JPH09108886A (en) 1995-10-11 1995-10-11 Joint structure for members

Publications (1)

Publication Number Publication Date
JPH09108886A true JPH09108886A (en) 1997-04-28

Family

ID=17884302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30039795A Pending JPH09108886A (en) 1995-10-11 1995-10-11 Joint structure for members

Country Status (1)

Country Link
JP (1) JPH09108886A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100362655C (en) * 2002-01-30 2008-01-16 霍尼韦尔国际公司 Thermal interface materials, and compositions comprising indium and zinc
US7398912B2 (en) 2002-12-26 2008-07-15 Ngk Insulators, Ltd. Different materials bonded member and production method thereof
JP2011092973A (en) * 2009-10-29 2011-05-12 Kobe Steel Ltd Dissimilar material joined body
US8051562B2 (en) 2007-01-23 2011-11-08 Denso Corporation Method and apparatus for manufacturing fuel pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100362655C (en) * 2002-01-30 2008-01-16 霍尼韦尔国际公司 Thermal interface materials, and compositions comprising indium and zinc
US7398912B2 (en) 2002-12-26 2008-07-15 Ngk Insulators, Ltd. Different materials bonded member and production method thereof
US7758970B2 (en) 2002-12-26 2010-07-20 Ngk Insulators, Ltd. Different materials bonded member and production method thereof
US8051562B2 (en) 2007-01-23 2011-11-08 Denso Corporation Method and apparatus for manufacturing fuel pump
JP2011092973A (en) * 2009-10-29 2011-05-12 Kobe Steel Ltd Dissimilar material joined body

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