JPH0846006A - Production management method and production line - Google Patents

Abstract

(57) [Summary] [Purpose] When a mass production product and a prototype are produced on one production line, the purpose is to reduce the production period of the prototype without reducing the production quantity of the mass production product. [Structure] An apparatus that includes a plurality of loaders and unloaders, and that can process lots with a high priority in the loader according to instructions from the host system first, by providing a wafer identification function so that lot division / combination can be performed on the apparatus. You can do it. Prototype lots can be produced in a short period of time by placing a prototype production control device on the production line using this device, which can instruct lot division / combination in consideration of the load status of each process. [Effects] According to the present invention, when there is a lot being processed by the apparatus, it is possible to process a lot with a high priority by interrupting it, and it is possible to shorten the production period of a prototype.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention manufactures a product having a large production quantity in a manufacturing line in which a plurality of products are processed at a plurality of steps in one manufacturing line to be finished products at the same time. Line production efficiency (defined as the quantity of products produced on the manufacturing line within a certain period of time), mass-produced products that are desired to be produced, and prototypes that have a small production quantity but prioritize a short production period. However, the present invention relates to a trial production control method capable of shortening the production period of a prototype without reducing the production quantity of mass-produced products when mixedly produced in the production line. In addition, this prototype production control method is provided to control the progress of lots within a production line (collections of products that can be easily transported and manufactured are called lots), maintain the production volume of mass-produced products, and give priority to prototypes. The present invention relates to a trial production control device suitable for production in a short period of time. Further, the present invention relates to a trial production line characterized by comprising the trial production control device and a production device suitable for producing a prototype, which allows the trial product to be produced with priority, and the operating rate of the production device is not reduced. In particular, it is suitable for a production line in which a prototype (including an evaluation lot for improving yield) is flown even in a line for producing mass-produced products such as semiconductor production to improve the yield as much as possible. Moreover, depending on the manufacturing equipment, such as semiconductor production,
There are single-wafer processing (equipment that processes one wafer at a time) and batch processing equipment (equipment that can process several lots at the same time). It is a trial production control method suitable for lines where lot progress control is difficult. .

[0002]

2. Description of the Related Art There are the following four conventional technologies. (1) Manufacture condition management / instruction of the prototype The prototype is produced in order to determine which of the manufacturing conditions was appropriate after processing the product under a plurality of manufacturing conditions in a specific process. Therefore, as a method of managing the process in which the manufacturing condition is changed and instructing the manufacturing condition to the operator or the equipment in the process, for example, Japanese Patent Laid-Open No. 4-2
No. 450, “Mixed lot management method and device”, JP-A-5-109596, “Manufacturing management method for semiconductor device”
It is described in. (2) Improvement of line production efficiency Efficient production of prototype lots with few sheets (line production efficiency)
The method of combining lots and dividing the combined lots for good production is described in the above two publications. (3) Lot synthesizing / dividing device A device for actually synthesizing and dividing lots is described in JP-A-62-286242, "Wafer Sorting Device". (4) Lot Progress Prediction / Planning The function of controlling the progress of lots in the manufacturing line and planning the progress schedule is a generally known technique.

[0003]

SUMMARY OF THE INVENTION In the above prior art,
The following points were not considered. (1) Combining / dividing lots on a manufacturing apparatus In the past, lots were combined / divided using a dedicated processing device for combining / dividing lots. Therefore, in order to combine and divide the lots, it is necessary to take the lot to another device, and it is difficult to frequently combine and divide the lots. Further, the following points cannot be realized if the lot combining / dividing device is a separate device.

Identification of wafers by a single manufacturing apparatus (wafers put into a line have unique markings on each wafer. When this mark is identified and each wafer is identified, the lot is identified. (Easy search) No ・ When changing the manufacturing conditions for each wafer, the wafers in the cassette (transfer jig that can store several tens of wafers) must be rearranged. Therefore, the manufacturing conditions cannot be arbitrarily changed on the manufacturing apparatus. -It is not possible to identify the wafers that have been processed by the processing apparatus and deliver the completed lots to the next process. That is, when a combined lot (for example, considering a combined lot of two lots) is processed, the combined two lots are processed in the next process until the processing of the entire combined lot is completed. I can't pay. However, if the manufacturing apparatus has a wafer identification function, the completed lot of the two lots is paid out to the next process.

(2) Change of Lot Start Order on Manufacturing Equipment In the semiconductor manufacturing equipment, both a loader (location of lot before processing) and unloader (location of lot after processing) are 2 There are many devices above. This is because the lot to be processed next can be placed in advance on the processing device so that the device does not wait for the product (waiting for the next processing lot) even after the processing of one lot on the device is completed.
There are two or more loaders and unloaders. However, in a general processing device, processing is performed only by the following procedure.

Place lot # 1 in one of the two loaders. -Start processing of lot # 1. -Place lot # 2 in another loader. -The processing of lot # 1 is completed. The lot # 1 is taken out and conveyed to the next step. -Start processing of lot # 2. -The processing of lot # 2 is completed. Lot # 2 is taken out and transported to the next step. However, by controlling the manufacturing equipment from the host system,
The start order of lots can be arbitrarily changed, and the process of lot # 2 can be interrupted during the process of lot # 1.

(3) Planning of Progress Schedule for Single-Wafer Units Conventional progress schedules are usually planned for each lot, and a schedule for progress is not made in consideration of lot-division in single-wafer units. . (4) Combining / dividing lots in consideration of production efficiency In the conventional lot combining / dividing method, lots are combined / divided only by focusing on the difference in manufacturing conditions. However, in an actual production line, it is necessary to combine and divide lots in consideration of the production efficiency of the entire line.

[0008]

Therefore, in the present invention, the following means are introduced to realize a function that cannot be realized by the above-mentioned prior art. (1) Combining / dividing lots on manufacturing equipment (1-a) Schedule planning means Combining / dividing lots is planned. (1-b) Wafer Identification Means Wafer identification means capable of identifying a wafer by a single manufacturing apparatus. (1-c) High-order communication means High-order communication means for exchanging data with a schedule management system, progress management for managing the progress of lots, and management of process conditions necessary for manufacturing. (1-d) Multiple loaders and unloaders

The processing apparatus has two or more loaders and unloaders. (1-e) Wafer transfer means (2) Change of lot start order on manufacturing equipment (2-a) Cassette identification means Cassette identification means for recognizing that a cassette is placed in the apparatus. (2-b) Start-up order determination means Start-up order determination means that can determine which of the plurality of loaders is to be started first.

(3) Planning of progress schedule for each single wafer (3-a) Single wafer completion time predicting means (4) Lot synthesis / division in consideration of production efficiency (4-a) Production efficiency calculating means

[0011]

The above-mentioned means for solving the problems work together to produce a prototype in a short period of time and produce a large number of mass-produced products by the following method. A process for predicting the progress of each lot calculated in advance by a schedule planning means and a process for combining and dividing lots by calculation from the progress prediction are obtained, and a lot combining / dividing plan is drafted. Based on this lot combining / borrowing plan, the lots are actually combined / divided. Specifically, the procedure is as follows.

(1) Set the lot in the loader. (2) Identify the cassette in which the cassette identification means is placed,
The cassette number is notified to the entire controller (control unit) of the device. (3) The overall control unit of the apparatus notifies the progress management system that the cassette has been set by using the upper communication means. (4) In the progress management system, information regarding the lot is transmitted to the device. (5) The apparatus divides and combines the lots according to the lot combining / dividing instruction transmitted from the progress management. (6) The mark of the wafer is read by the wafer identification means, and the destination of the wafer is determined by the apparatus overall control unit. (7) According to the instruction from the overall control unit of the apparatus, the wafer is loaded into a predetermined cassette by the wafer transfer means. With the above procedure, it is possible to combine and divide lots on the apparatus.

Next, the procedure for the priority start of lots on the apparatus will be described below. (1) Set the lot in the loader. (2) Identify the cassette in which the cassette identification means is placed,
The cassette number is notified to the entire controller (control unit) of the device. (3) The overall control unit of the apparatus notifies the progress management system that the cassette has been set by using the upper communication means. (4) In the progress management system, information regarding the lot is transmitted to the device. (5) The apparatus determines whether to give priority to the lot according to the lot priority information transmitted from the progress management. (6) When starting the lot in priority, the wafer of the lot to be prioritized is put into the process chamber by the wafer transfer means. (7) In accordance with an instruction from the overall control unit of the apparatus, the wafer transfer means loads the wafer into a predetermined cassette on the unloader side. Through the above procedure, a lot with a high priority can be processed on a device before a lot with a low priority.

As a result, the lot can be processed as follows. -Place lot # 1 in one of the two loaders. -Start processing of lot # 1. -Place lot # 2 in another loader. -It is determined that lot # 2 should be preferentially processed according to the above determination procedure. -Start processing of lot # 2. -The processing of lot # 2 is completed. Lot # 2 is taken out and transported to the next step. -Continue processing of the interrupted lot # 1. -The processing of lot # 1 is completed. The lot # 1 is taken out and conveyed to the next step.

Next, the progress control on a sheet-by-sheet basis will be described below. (1) The overall control unit of the apparatus recognizes that the wafer processing is completed. (2) The apparatus overall control unit determines whether all wafers in the lot to which the wafer belongs have been processed. (3) The operator is instructed to complete the lot when all the wafers have been processed. (4) The worker transfers the lot to the next process. As a result, it is possible to send a lot that has to be preferentially processed among the synthesized lots to the next process prior to other lots.

Next, a means for efficiently producing mass-produced products will be described. (1) The overall control unit of the apparatus recognizes that the wafer processing is completed. (2) When the combined lot currently being processed by the overall control unit of the apparatus is processed as it is in the next step as well, the lot is sent to the next step as it is without being divided in this step. To (3) The processed wafers are stored in one cassette.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of the system configuration of a prototype line which is the subject of the present invention. In this example, 8a step 1,
Consider a line consisting of four steps, 8b step 2, 8c step 3, and 8d step 4. Each process has an apparatus, and depending on the apparatus, the single-wafer processing apparatus 6 and the batch processing apparatus 7 coexist. As a system for managing this prototype line, a progress management device 2 for managing the progress of lots on the entire line, and a progress management D / B (database that contains the data managed by the progress management system) )
There are three. Further, a manufacturing condition management device 4 for managing the manufacturing conditions necessary for operating the manufacturing device, and a manufacturing condition management D / B (database) 5 containing data managed by the manufacturing condition management system. is there. There is a schedule planning device that receives the lot progress data and the manufacturing condition data from the progress management system and the manufacturing condition management system, and plans the progress schedule of all the lots on the trial production line.

These devices and each manufacturing device are connected by a LAN, and data can be exchanged with each other. In this prototype line, there are a lot dividing device 10 and a lot combining device 11 as devices for combining and dividing lots. Further, the lot processed in each step is transferred to the next step by the lot transfer device 12. Next, the concept of lot division according to the present invention is shown in FIG. In the present invention, the operation of dividing a plurality of wafers contained in one cassette into different cassettes is called lot division.

Similarly, the concept of the lot synthesis of the present invention is shown in FIG.
Shown in In the present invention, collectively storing a plurality of wafers contained in a plurality of cassettes in one cassette is called lot composition. Further, a batch processing device 7 and a single-wafer processing device 6 are present in the prototype line. The concept of the batch processing device 7 is shown in FIG. The batch processing apparatus can simultaneously process a plurality of lots or a plurality of wafers. However, on the other hand, lots processed at the same time cannot be divided and completed.

The concept of the single wafer processing apparatus 6 is shown in FIG. The single wafer processing apparatus can process only one wafer at a time. However, in an apparatus having a plurality of loaders and unloaders, it is possible to interrupt a lot being processed and start (process) another lot.

FIG. 6 shows a conceptual diagram of an apparatus having a wafer recognition function proposed by the present invention. In the processing apparatus with a wafer identification function, a wafer identification apparatus is provided between the loader and the unloader. The wafer identification device on the loader side can recognize the mark on the unprocessed wafer and determine the wafer to be processed. Particularly in a batch processing apparatus, the order of the wafers may be changed during the processing depending on the processing apparatus, and it may be necessary to identify the wafer again after the processing. In this case, it is necessary to attach the wafer identification device 17 also to the unloader side.

FIG. 7 shows a specific configuration of the above-described processing apparatus with a wafer recognition function. In the processing apparatus shown in this figure, unlike the above conceptual diagram, only one wafer recognition apparatus is attached to the processing apparatus. Further, a cassette identification section 19 is provided for all the loaders and unloaders in order to recognize the lots placed in the loaders and unloaders. The basic operation of this processing device will be described based on the communication procedure of FIG.

(1) The schedule planning system receives the manufacturing conditions of each lot from the manufacturing condition management system. (2) The schedule planning system receives the progress information of each lot from the progress management system. (3) In the schedule planning system, the progress of each lot is predicted, and the process of synthesizing / dividing the lots is calculated from the progress prediction, and a lot synthesizing / dividing plan is prepared. Based on this lot combining / dividing plan, each manufacturing apparatus actually combines / divides lots. (4) Set the lot in the loader. When the lot is set, the cassette identification device recognizes the cassette set and informs the entire device control unit.

(5) The overall control unit of the apparatus informs the progress management system of the number of the cassette placed in the loader. (6) In the progress management system, information about the lot (lot number, item name, process, number of sheets, priority, lot composition / division) is transmitted to the device. (7) The apparatus inquires the manufacturing condition management system about the manufacturing conditions of the lot. (8) In the manufacturing condition management system, manufacturing conditions (for example, temperature, pressure, current, etc.) of the lot are transmitted to the device. (9) In the apparatus, the divided construction of the lot is started in accordance with the lot combining / dividing instruction transmitted from the progress management. Therefore, a transfer instruction is issued to the wafer transfer control unit in the apparatus. If the lot is a priority process lot, the process of the lot that is already being processed is interrupted and the process of the lot is started.

(10) The wafer identification means reads the mark of the wafer carried by the transfer instruction and notifies the overall control section. (11) The notified wafer mark is sent to the progress management system and requested to collate with the lot. (12) In the progress management system, the collation result of the lot and the wafer is sent back to the device. (13) In the case of a prototype, since the manufacturing conditions may be changed for each wafer, the condition management system is inquired about the manufacturing conditions of the wafer. (14) The manufacturing condition management system transmits the manufacturing conditions for the wafer to the device. (15) A transfer instruction is sent to the transfer control unit such that the wafer is transferred from the wafer identification device to the process chamber. (16) Report processing conditions for each wafer to the process processing unit. The process processing section processes the wafer.

(17) When the processing is completed, a completion report is sent to the overall control section. This completion report is transmitted to the progress management system to manage the processing results for each wafer. (18) Respond to the validity of the processing result for each wafer. (19) The processing result for each wafer is managed by manufacturing condition management. (20) The transfer control unit is instructed of the transfer destination of the processed wafer. At that time, in the case of lot division, conveyance is instructed to the unloader for each lot to be divided. In addition, when synthesizing, even if the lots are different, they are transported to one unloader. (21) When the processing of all the wafers related to the lot in the unloader is completed, the fact that the lot is completed is displayed on the display unit. Looking at this display, the operator conveys the lot to the next process.

Next, FIG. 9 shows an example of the starting order of lots in one process. This figure is called a Gantt chart, in which the horizontal axis shows time and the vertical axis shows lots processed by the apparatus. In this example, it is assumed that lot # 4 is a priority processing lot (prototype). Conventionally, an operator judges in advance that Lot # 4 is coming, vacates the apparatus, and waits. In other words, although lots # 2 and # 3 exist, lots # 2 and # 3 were not processed and the arrival of lot # 4 was waited for. For this reason, there are times when the device operates,
It was supposed to reduce the number of mass-produced products. Moreover, the progress of the mass-produced product has been confused because the mass-produced product is stagnant for a long time in the process.

Therefore, if the products are built until the priority products come, as shown in FIG. 10, the priority products will stay in the process for a long time. As one of the proposals, a method of preferentially processing the lot # 4 by removing the lot # 3 on the unloader at the time 4 when the lot # 4 arrives is the proposal of FIG. According to this plan, a lot of waiting time occurs in lot # 4, though it is shorter than before.

Therefore, the processing as shown in FIG. 12 can be performed by controlling the progress of the sheet. That is, lot #
At time 6 when 4 arrives at the process, lot # 2 being processed is interrupted and lot # 4 is processed by interruption. As a result, the waiting time for lot # 4 can be reduced to zero. As described above, a lot having a high priority such as a prototype can be produced in a short production period by allowing the lot to overtake another lot on one processing apparatus. Further, since the equipment is not emptied and waiting, the equipment can be produced with a high operating rate, and the production amount of the entire line can be increased.

Next, the case of a plurality of steps will be described.
In the example shown in FIG. 13, the case of three steps A, B, and C will be described. First, at the time of process A, lots # 1 and # 2
Are synthesized in one lot, and step A is a batch processing apparatus. Generally, this combined lot is divided in the next step B. In other words, a general dividing condition is that the process is always performed in different manufacturing conditions. In this example, the divided lot is processed in step B and then in step C. At this point, due to the difference in processing time between the process B and the process C, in the process C, lot # 1
Is the next process (for example, process D) before lot # 2.
Can be sent to.

However, in the example shown in FIG. 14, the lot # 3 is processed first in the process C, and even if the lot is divided and processed in the process B (the dotted arrow in the middle of FIG. 14), C
The processing of is no different. Therefore, in such a case, the lot # 1 and the lot # 2 are not divided after the end of the process A, and the process B is also processed as a synthetic lot. As a result, the number of times of lot transportation can be reduced, and the time and work required for transportation can be reduced. Also, the process D shown in FIG.
Then, since the lot was divided on the unloader side in the process C, the lot # 1 should be processed at the dotted line position in the lower part of FIG. 14, but it is processed a little faster. This allows lot #
2 is processed quickly.

Next, the effect of lot division in the unloader will be described with reference to FIGS. 15 and 16. FIG.
Is similar to the Gantt chart shown earlier, in this example 2
An example of two steps A and B will be shown. In FIG. 15, the lot # 1 and the lot # 2 synthesized in the process A are processed by the single-wafer processing apparatus. In this example, when the synthetic lot, lot # 1 and lot # 2 are completed, the lot is divided and
It is sent to the next process, process B. However, in the example of FIG. 16, in the middle of the processing of the combined lot in the process A, only the already completed lot # 1 is divided first and delivered to the next process. As a result, lot # 1 can be produced as early as 5 units in time.

[0033]

As described above, when the trial production control method of the present invention is used, the trial lot can be produced earlier than the mass production lot, and the trial lot can be produced without lowering the operation rate of the device. A line with good line efficiency can be realized. Also, by using the trial production control method, lot composition / division can be minimized, and the capacity of the transfer device between processes can be reduced. Therefore, the investment of the transport device can be reduced. Further, in the case of manual transportation, it can be produced by a small number of workers. Further, by using a manufacturing apparatus having a wafer recognition function, it is not necessary to provide a dedicated apparatus for lot composition / division in the manufacturing line, and space efficiency can be improved. Further, by using this device, a lot can be overtaken in the device, and a lot with a high priority can be produced earlier. By using the prototype production control apparatus of the present invention and the manufacturing apparatus having the wafer recognition function, even if the prototype and the mass-produced product are produced in one production line, the line efficiency does not decrease. Therefore, even if a prototype line is not created separately from the mass production line, the total investment amount can be suppressed by flowing the prototype on the mass production line.

[Brief description of drawings]

FIG. 1 is a system configuration of an example of a trial production line of the present invention.

FIG. 2 is a conceptual diagram of lot division according to the present invention.

FIG. 3 is a conceptual diagram of lot synthesis according to the present invention.

FIG. 4 is a conceptual diagram of a batch processing apparatus of the present invention.

FIG. 5 is a conceptual diagram of a single-wafer processing apparatus of the present invention.

FIG. 6 is a conceptual diagram of a processing apparatus with a wafer identification function according to the present invention.

FIG. 7 is a functional block diagram of a processing apparatus with a wafer identification function according to the present invention.

FIG. 8 is a communication procedure in the prototype line of the present invention.

FIG. 9 is a Gantt chart showing a 1-step lot start state of the present invention (conventional, there is an express train).

FIG. 10 is a Gantt chart showing a lot process start state (without an express train) in one step of the present invention.

FIG. 11 is a Gantt chart showing a state in which a lot has been started in one step of the present invention (there is an express train, and a lot is passed).

FIG. 12 is a Gantt chart showing a lot process starting state (with an urgent express, overtaking by wafer unit) in one step of the present invention.

FIG. 13 is a Gantt chart showing a lot process start state (with lot division) of three steps of the present invention.

FIG. 14 is a Gantt chart showing a lot process start state (no lot division) in three steps of the present invention.

FIG. 15 is a Gantt chart showing a two-step lot start state of the present invention (no lot division during processing).

FIG. 16 is a Gantt chart showing a two-step lot start state of the present invention (no lot division during processing).

[Explanation of symbols]

 1 Schedule planning device 2 Progress management device 3 Progress management D / B (database) 4 Condition management device 5 Condition management D / B 6 Single wafer processing device 7 Batch processing device 8 Process 8a Process 1 8b Process 2 8c Process 3 8d Process 4 9 LAN 10 Lot division 11 Lot synthesis 12 Lot transfer 13 Synthesis lot 14 Lot 15 Wafer 16 Processing device 17 Wafer identification device 18 Cassette 19 Cassette identification device 20 Process processing room 21 Overall control unit 22 Transfer hand 23 Transfer unit 24 Transfer control Part 25 Display

Claims (7)

[Claims] 1. A production line comprising a plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control section, and a host system to which the control sections are connected. In the production control method of a prototype product, the manufacturing apparatus has a plurality of loaders and unloaders, each loader has a lot recognition means installed in the loader, and the host system is based on the information of the lots installed in the loader. A production management method comprising issuing a command to a manufacturing apparatus to preferentially process a lot of a prototype product. 2. A plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control unit, and a schedule planning apparatus and a progress which are host systems to which the control sections are connected. In a production line equipped with a management device and a condition management device, the manufacturing device is equipped with a plurality of loaders and unloaders that have means for recognizing the installed lots, and the host system is prioritized based on the lot information installed in the loaders. A production line having a function of issuing a command to a manufacturing apparatus to preferentially process a high lot. 3. A production line comprising a plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control section, and a host system to which the control section is connected. In the production control method of the prototype product, the manufacturing device has a plurality of loaders, unloaders, product recognition means, lot combining and dividing functions, and the host system transmits the product information to the manufacturing device and makes a prototype. A production management method characterized by issuing a command to preferentially divide and process a product. 4. A plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control unit, and a schedule planning apparatus and a progress which are host systems to which the control sections are connected. In a production line equipped with a management device and a condition management device, the manufacturing device has a plurality of loaders, unloaders, product recognition means, lot combining and dividing functions, and the host system manufactures product information. A production line having a function of transmitting to a device and issuing a command for dividing and processing a high-priority product. 5. A production line comprising a plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control section, and a host system to which the control sections are connected. In the production control method for prototype products, the above system considers the load status of each process and delays the product dividing process when the load is concentrated and the progress does not change without dividing the combined lot. By doing so, the number of transport circuits between steps is reduced, and the production period is shortened. 6. A plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control unit, and a schedule planning apparatus and a progress which are host systems to which the control sections are connected. In a production line equipped with a management device and a condition management device, the host system considers the load status of each process and when the load is concentrated and the progress does not change even if the combined lot is not divided, The production line having the function of instructing the manufacturing apparatus to reduce the number of transfer circuits between steps and shorten the manufacturing period by arranging the dividing steps of 1. 7. A plurality of manufacturing apparatuses corresponding to a plurality of processing steps, a product conveying apparatus connecting the manufacturing apparatuses, an overall control unit, and a schedule planning apparatus and a progress which are host systems to which the control sections are connected. In a production line equipped with a management device and a condition management device, the host system considers the load status of each process and when the load is concentrated and the progress does not change even if the combined lot is not divided, By rearranging the division process of step 1, the function of instructing the manufacturing equipment to reduce the carrier circuit between processes and executing the shortening of the manufacturing period, and the product with high priority can be preferentially produced. Plan with the prototype production control device, synthesize and divide the products with the production device for prototype production based on the plan, produce high priority products in a short production period, and keep the operating rate of the production device high function Production line, characterized in that it comprises.