JPH08339651A - Head support member and disk unit - Google Patents

Abstract

PURPOSE: To obtain a head support member in which the resonance mode of an elastic support member constituting the head support member of a rotation- type actuator is shifted to a high region and whose gain is reduced and to obtain a disk unit. CONSTITUTION: A magnetic disk unit is provided with an elastic support member 14b which is supported so as to be swingable with reference to a disk to be used as a recording medium which is turned and driven, with a head slider 14a which is attached to the tip of the elastic support member and with a magnetic head which records and reproduces the disk attached to the head slider. The elastic support member 14b is constituted of a plurality of layers 17, 18 in at least a part of it, and at least one layer 18 out of them is formed of a high-rigidity material whose rigidity is higher than that of stainless steel.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass storage device for an information processing device, and more particularly to a magnetic disk
The present invention relates to a head support member in a rotating disk type storage device such as an optical disk and a disk device using the same.

[0002]

2. Description of the Related Art Conventionally, a magnetic disk device is shown in FIG.
It is configured as shown in FIG. 31, the magnetic disk device 1 includes a housing 2, a spindle motor 3,
It includes a magnetic disk 4 which is rotationally driven by the spindle motor 3 and a rotary actuator 5.

Further, the rotary actuator 5 has a flying head slider 5a, an elastic support member 5b for supporting the head slider 5a, an arm 5c for supporting the elastic support member 5b, and one end of the arm 5c. It includes a vertical shaft 5d that is rotatably supported and a motor 5e that rotates the arm 5c around the vertical shaft 5d. here,
The head slider 5a and the elastic support member 5b shown in FIG.
As shown in FIG. 2, a magnetic head (not shown) attached to the head slider 5a is supported as a head supporting member so as to be movable in the radial direction of the magnetic disk 4.

The head slider 5a is shown in FIGS.
As shown in, the elastic support member 5b is attached via a gimbal 6 to the lower surface of the tip of the elastic support member 5b. As shown in FIG. 34, the elastic support member 5b is formed of a single layer of non-high rigidity material, for example, stainless steel, and acts as a spring based on its elasticity, so that the head slider 5a is attached to the surface of the magnetic disk 4. Against it is pressed with a predetermined load.

The motor 5e comprises a voice coil 5f attached to the other end of the arm 5c and a magnet 5g fixedly arranged on the housing 2. Voice coil 5
The polarity of the winding of f and the magnet 5g is the voice coil 5f.
The voice coil 5f is arranged so as to be driven in the arrow R2 direction by being supplied with a drive voltage from the outside.

Therefore, when a driving voltage is externally supplied to the voice coil 5f, the arm 5c moves to the magnet 5
It is rotated about the vertical axis 5d based on the force generated by the magnetic field of g and the current flowing through the voice coil 5f. As a result, the head slider 5a attached to the other end of the arm 5c is moved substantially in the radial direction of the magnetic disk 4, as indicated by the arrow R3 in FIG.
Thus, the magnetic head provided on the slider 5a seeks for the magnetic disk 4. As a result, a magnetic head (not shown) attached to the head slider 5a records / reproduces information on / from a predetermined track on the magnetic disk 4.

In the magnetic disk device 1 having such a structure, the spindle motor 3 is started up at the time of start-up with the head slider 5a being in contact with the innermost circumference of the magnetic disk 4. Therefore, at the time of startup, the head slider 5
After moving while rubbing the surface of the magnetic disk 4 first, “a” is levitated from the surface of the magnetic disk 4. Similarly, when the magnetic disk 4 is stopped, the head slider 5a contacts the innermost circumference of the magnetic disk 4.

Therefore, such a magnetic disk drive 1
Is CSS (Contact Start Stop)
Although called a method, there is a problem that the surface of the magnetic disk 4 may be damaged because the head slider 5a comes into contact with the surface of the magnetic disk 4 at the time of starting and stopping.

Therefore, in recent years, at the time of starting and stopping,
A magnetic disk device is used in which the head slider 5a is supported while being separated from the surface of the magnetic disk 4.

Such a magnetic disk device is constructed, for example, as shown in FIG. In FIG. 35, the magnetic disk device 7 includes a housing 2, a spindle motor 3, a magnetic disk 4, and a rotary actuator 5,
It has the same configuration as the magnetic disk device 1 of FIG. The magnetic disk device 7 is further provided with a lamp 8 on the housing 2, and near the tip of the rotary actuator 5,
The projection 9 is provided.

The ramp 8 tilts like a slide along the locus of the convex portion 9 when the rotary actuator 5 is rotated, and in the illustrated case, the upper edge is low and the lower edge is high. Is formed.

As shown in FIGS. 36 and 37, the convex portion 9 is provided integrally with the tip of the elastic support member 5b of the rotary actuator 5. Also in this case, as shown in FIG. 38, the elastic support member 5b is formed of a single-layer non-high rigidity material, for example, stainless steel.

According to the magnetic disk device 7 having such a structure, when not in use, the rotary actuator 5 is retracted to the outside of the magnetic disk 4 at the stop position, and the projection 9 of the rotary actuator 5 is ramped. It is on the lower surface of No. 8. As a result, the head slider 5a of the rotary actuator 5 is
Is separated from the surface of the magnetic disk 4 and held in the air.

When starting from this state, the spindle motor 3 first rises and reaches a predetermined number of rotations, and then the rotary actuator 5 moves in the direction R4 in FIG. At this time, the rotary actuator 5 rotates while the convex portion 9 slides along the slope of the lamp 8. Then, the protrusion 9 separates from the ramp 8 and the head slider 5a is pressed against the surface of the magnetic disk 4 by the elasticity of the elastic support member 5b. However, between the head slider 5a and the surface of the magnetic disk 4. As a result of the levitation force acting on the head slider 5a due to the air flow, the head slider 5a floats without contacting the surface of the magnetic disk 4 (the above operation is referred to as loading, and the head slider 5a is also referred to as a magnetic disk). Floating on the surface of 4 is called landing).

When stopped, the rotary actuator 5 rotates toward the above-mentioned stop position. At this time, the convex portion 9 of the rotary actuator 5 is raised on the slope of the ramp 8 and slides along the slope, whereby the head slider 5a is separated from the surface of the magnetic disk 4. When the rotary actuator 5 reaches the stop position,
By moving the convex portion 9 to the higher side of the slope of the ramp 8, the head slider 5a is separated from the surface of the magnetic disk 4 and held in the air (the above operation is called unloading). Then, the spindle motor 3 is stopped. Thus, the head slider 5a of the rotary actuator 5
Is not called the N-CSS (Non CSS) system or the dynamic load-unload system because it does not contact the surface of the magnetic disk 4 at the time of starting and stopping.

[0016]

However, in any of the magnetic disk devices 1 and 7 configured as described above, the elastic support member 5b of the rotary actuator 5 is as shown in FIGS. As shown, it is formed from a single layer of non-rigid material, such as stainless steel. Therefore, when the rotary actuator 5 is rotated by, for example, the positioning control system, resonance occurs in the elastic support member 5b.

By the way, the track width of the magnetic disk 4 has become extremely narrow with the increase in track density of the magnetic disk device, so that the positioning control system of the rotary actuator 5 has a wider servo band. Although required, since the resonance frequency of the elastic support member 5b made of the single-layer non-high rigidity material, for example, stainless steel, is within several times the required servo band, the track density is increased. There was a problem that it was difficult to deal with. For example, as the servo band of the positioning control system, 1k
When Hz is required, a condition that no significant resonance of the elastic support member 5b exists in the band up to about 10 kHz is required.

On the other hand, in the case of the elastic support member 5b made of a single layer of non-high rigidity material, for example, stainless steel,
It is impossible to satisfy such a condition. For example, in the elastic supporting member used in the conventional 2.5-inch magnetic disk device, as shown by reference numeral A in FIG. The rotary actuator 5 using the elastic support member 5b made of non-highly rigid material such as stainless steel has a problem that the resonance condition for securing the servo band of 1 kHz cannot be satisfied.

Further, the magnetic disk is required to have a high linear density, and it is required to reduce the flying height generated between the head slider 5a and the surface of the magnetic disk 4. However, in the case of the elastic support member 5b made of the single-layer non-high rigidity material described above, for example, stainless steel,
Since the disturbance acting on the head slider 5a increases as the flying height decreases, there is a problem that the above resonance condition cannot be satisfied. For example, in the elastic supporting member used in the conventional 2.5-inch magnetic disk device, the flying height of the head slider 5a is 10
Since it is about 0 nm, the above-mentioned 9
The gain in the resonance mode near kHz is smaller than that in the case of FIG. However, when the flying height becomes about 50 nm, this gain increases by about 20 dB. Therefore, the rotary actuator 5 using the elastic support member 5b made of the single-layer non-high rigidity material described above, for example, stainless steel. Then, there is a problem that the resonance condition for securing the servo band of 1 kHz cannot be satisfied.

In view of the above points, the present invention is capable of shifting the resonance mode of the elastic support member constituting the head support member of the rotary actuator to a high range and reducing the gain thereof, and the head support member and the disk device. Is intended to provide.

[0021]

SUMMARY OF THE INVENTION According to the present invention, the above object is an elastic support member swingably supported with respect to a disk which is a rotationally driven recording medium, and a head attached to the tip of the elastic support member. The elastic support member is provided with a slider and a magnetic head for recording / reproducing a disk attached to the head slider, and at least a part of the elastic support member is composed of a plurality of layers. This is achieved by the head support member, wherein the layer is formed of a high rigidity material that is stiffer than stainless steel.

According to the above structure, since the elastic support member is composed of a plurality of layers, the internal loss during vibration of the elastic support member increases. As a result, the resonance mode gain of the rotary actuator is reduced. Also,
Since at least one layer of the plurality of layers is formed of a high-rigidity material having higher rigidity than stainless steel, the rigidity of the entire elastic support member can be increased. As a result, the resonance mode of the rotary actuator is shifted to the high frequency side.

At least a part of the elastic support member is composed of three or more layers, and the high-rigidity material layer is adjacent to the upper and lower layers of the non-high-rigidity material layer made of another material. When the elastic support member is provided, the rigidity of the elastic support member is further increased, and the gain of the resonance mode is further reduced.

At least a part of the elastic supporting member is composed of five or more layers, and the high-rigidity material layer is disposed above and below the non-high-rigidity material layer. , Further between the high rigidity material layer and the non-high rigidity material layer,
When the thin film layer is provided, the rigidity of the elastic support member is further enhanced, and the gain of the resonance mode is further reduced.

When the high-rigidity material layer is made of single-crystal or polycrystal diamond or diamond-like amorphous carbon, the rigidity of the elastic support member is significantly increased, and the resonance mode gain is remarkably increased. While being reduced, the resonance mode is shifted to a higher band.

Further, the elastic supporting member is composed of a plurality of layers in at least a part thereof except for the thin film lead wire portion, and at least one of the layers is
Made from high-rigidity material with higher rigidity than stainless steel,
When at least one of the other layers is made of an insulating material and the thin film lead wire portion is disposed adjacent to the insulating material layer, elastic support is provided. The rigidity of the member is enhanced, and the insulating material layer acts as an insulating layer that covers the thin film lead wire portion.

The high-rigidity material layer is formed of an insulating material, and the thin-film lead wire portion is covered with the high-rigidity material layer or disposed adjacent to the high-rigidity material layer. In this case, the high-rigidity material layer acts as an insulating layer that covers the thin film lead wire portion.

Further, the elastic supporting member is composed of a plurality of layers in at least a part thereof except for the thin film lead wire portion, and at least one of these layers has an insulating property. In the case where the material is a high-rigidity material having a higher rigidity than stainless steel, and the thin film lead wire portion is disposed adjacent to the high-rigidity and insulating material layer, The rigidity of the elastic support member is increased, and the high-rigidity material acts as an insulating layer that covers the thin film lead wire portion.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments described below are preferable specific examples of the present invention, and therefore, various technically preferable limitations are given,
The scope of the present invention is not limited to these embodiments unless otherwise specified in the description below.

FIG. 1 shows a magnetic disk device provided with a first embodiment of a head supporting member according to the present invention. In FIG. 1, a magnetic disk device 10 includes a housing 11
And spindle motor 12 and this spindle motor 1
The magnetic disk 13 is driven to rotate by 2, and the rotary actuator 14 is provided.

The housing 11 is formed substantially flat, for example, of aluminum alloy, and the spindle motor 12 is arranged on the flat surface portion. The spindle motor 12 is configured as, for example, a flat brushless motor, and is driven and controlled so that the angular velocity is constant, so that the magnetic disk 13 is rotated.

Further, the rotary actuator 14 includes a flying type head slider 14a and the head slider 1a.
4a, an elastic support member 14b, an arm 14c that supports the elastic support member 14b, a vertical shaft 14d that rotatably supports one end of the arm 14c, and the arm 1c.
4c and a motor 14e for rotating the shaft 4c around a vertical axis 14d. Here, as shown in FIG. 2, the head slider 14a and the elastic supporting member 14b move a magnetic head (not shown) attached to the head slider 14a in the radial direction of the magnetic disk 13 as the head supporting member 15. Supports possible.

The head slider 14a is pressed against the surface of the rotating magnetic disk 13 by the elastic supporting member 14b, so that the airflow flowing between the lower surface of the head slider 14a and the surface of the magnetic disk 13 causes the head slider 14a to move. It floats above the surface of the magnetic disk 13 at a slight distance.

The elastic support member 14b acts as a spring based on its elasticity and presses the head slider 14a against the surface of the magnetic disk 13 with a predetermined load.

The arm 14c is made of a rigid material, and is rotated about a vertical axis 14d to move the head slider 14a in the radial direction R3 of the magnetic disk 13 to perform a seek operation. As a result, the magnetic head attached to the head slider 14a can access a predetermined track on the magnetic disk 13.

The motor 14e is composed of a voice coil 14f attached to the other end of the arm 14c and a magnet (not shown) fixedly arranged on the housing 11. The polarities of the winding of the voice coil 14f and the magnet are
The arm 14c is arranged so as to be rotated around the vertical shaft 14d by supplying a driving voltage from the outside to the voice coil 14f.

Therefore, when a driving voltage is externally supplied to the voice coil 14f, the arm 14c rotates around the vertical axis 14d based on the force generated by the magnetic field of the magnet and the current flowing through the voice coil 14f. Be moved. As a result, the head slider 14a attached to the other end of the arm 14c is moved substantially in the radial direction of the magnetic disk 13, as indicated by the arrow R3 in FIG. Thus, the magnetic head provided on the slider 14a makes a seek operation with respect to the magnetic disk 13. As a result, the magnetic head moves to the magnetic disk 13
Recording and reproduction of information on the predetermined track above is performed.

Here, the head supporting member 15 is composed of a head slider 14a and an elastic supporting member 14b for supporting the head slider 14a, as shown in FIGS.

The elastic support member 14b supports the head slider 14a by a gimbal 16 provided near the tip thereof, and acts as a spring based on its elasticity.
The head slider 14a is pressed against the surface of the magnetic disk 13 with a predetermined load. The elastic support member 14a is
As shown in FIGS. 3 and 4, the first layer 17 on the lower side and the second layer 18 on the upper side are composed of two layers. In addition, FIG.
It is a principal part expanded sectional view which expands and shows the part shown by the thick line in FIG. The first layer 17 is made of a non-highly rigid material, for example, stainless steel, like the elastic support member in the conventional head support member.

The second layer 18 is made of a highly rigid material having higher rigidity than stainless steel, for example, ceramics, and has a thickness t compared to the total thickness tsub of the elastic support member 14b. In this case, the second layer 18 is provided over the entire upper surface of the first layer 17. As a result, the elastic support member 14b is easily processed, and the cost is reduced.

The magnetic disk drive to which the flying head slider 14a according to the present embodiment is attached is configured as described above, and the head slider 14a is activated at startup.
The spindle motor 12 is started up in a state where is in contact with the innermost circumference of the magnetic disk 13. Therefore, at startup,
The head slider 14a moves while rubbing the surface of the magnetic disk 13 first, and then floats above the surface of the magnetic disk 13. After the flying head slider 14a is moved to a predetermined position on the magnetic disk 13 by the rotary actuator 14, the head slider 14a
The positioning of the head slider 14a is controlled so that the magnetic head provided in a follows the predetermined track on the magnetic disk 13. As a result, the magnetic head records / reproduces information on / from a predetermined track on the magnetic disk 13.

In this case, since the elastic support member 14b of the head support member 15 has a two-layer structure of the first layer 17 and the second layer 18, the internal loss thereof increases. For example, as compared with the head support member of FIGS. 32 and 33,
The internal loss is about double. As a result, the resonance mode gain of the rotary actuator 14 is reduced.

Further, since the second layer 18 is a high-rigidity material layer, the rigidity of the elastic support member 14b can be increased,
The resonance mode of the rotary actuator 14 is shifted to the high frequency range.

FIGS. 5 and 6 show a second embodiment of the head support member according to the present invention. 5 and 6, the head supporting member 20 is the head slider 21.
And an elastic support member 2 for supporting the head slider 21.
2 and. The head slider 21 has the same structure as the head slider 14a in the head supporting member 15 shown in FIGS.

The elastic support member 22 supports the head slider 21 by means of a gimbal 22a provided near the tip thereof, and acts as a spring based on the elasticity of the gimbal 22a, thereby causing the head slider 21 to move against the surface of the magnetic disk 13 in a predetermined manner. Press with the load.

Here, the elastic supporting member 22 is composed of two layers, a lower first layer 23 and an upper second layer 24, as shown in FIGS. 6 and 7. The first layer 23 is made of a non-highly rigid material, for example, stainless steel, like the elastic support member in the conventional head support member. The second layer 24 is made of a highly rigid material having a rigidity higher than that of stainless steel, for example, ceramics, and has a thickness t as compared with the total thickness tsub of the elastic support member 22.

In this case, the elastic supporting member 22 is provided with a convex portion 22b for sliding on the ramp 8 in the so-called N-CSS type magnetic disk device shown in FIG. 2 and 3 in that it is provided on the upper surface of the first layer 23 excluding the gimbal 22a.
5 is different from the elastic support member 14a in FIG.

According to the head supporting member 20 having such a structure, since the elastic supporting member 22 of the head supporting member 20 has the two-layer structure of the first layer 23 and the second layer 24, Internal loss increases. For example, the internal loss becomes about twice as large as that of the head support member of FIGS. 32 and 33. As a result, the resonance mode gain of the rotary actuator 14 is reduced. Also, the second layer 2
Since 4 is a high-rigidity material layer, the rigidity of the elastic support member 22 is increased, so that the resonance mode of the rotary actuator 14 is shifted to a high range. Furthermore, since the second layer 24 is provided excluding the portion of the gimbal 22a, the dynamic characteristics of the head slider 21 when the magnetic disk device 10 is activated are improved.

Here, in the above-described two embodiments, the head supporting members 15 and 20 have a resonance mode as shown by reference numeral B in FIG. The gain of is reduced by about 20 dB, and this resonance mode is shifted to the high frequency side. Therefore, the rotary actuator 5 using such head supporting members 15 and 20 can sufficiently satisfy the resonance condition for securing the servo band of 1 kHz, for example.

9 and 10 show a third embodiment of the head supporting member according to the present invention. 9 and 1
0, the head support member 30 is attached to the head slider 3
1 and an elastic support member 32 that supports the head slider 31. The head slider 31 is
The head support member 20 of FIGS. 5 and 6 has the same structure as the head slider 21.

The elastic support member 32 supports the head slider 31 with a gimbal 32a provided near the tip thereof, and acts as a spring on the basis of its elasticity, so that the head slider 31 is moved to a predetermined surface of the magnetic disk 13. Press with the load. Further, the elastic support member 32 is provided with a convex portion 32b for sliding on a ramp in a so-called N-CSS type magnetic disk device.

The above-mentioned structure is similar to the head supporting member 20 shown in FIGS. 5 and 6, but in this embodiment, the elastic supporting member 32 has the same structure as that shown in FIGS.
1, the central first layer 33 and the upper second layer 34
And the lower third layer 35. The first layer 33 is made of a non-highly rigid material, for example, stainless steel, similar to the elastic supporting member in the conventional head supporting member. The second layer 34 and the third layer 35 are formed of a highly rigid material having a rigidity higher than that of stainless steel, for example, ceramics, and the total thickness tsub of the elastic support member 32 is tsub.
On the other hand, the thickness is t / 2. That is, each has a thickness of 1/2 that of the second layer 24 in the case of FIG.

Further, the second layer 34 is provided on the upper surface of the first layer 33 excluding the gimbal 32a, and the third layer 35 is provided on the lower surface of the first layer 33 excluding the head slider 31. .

According to the head support member 30 having such a structure, the elastic support member 32 of the head support member 30 has a three-layer structure of the first layer 33, the second layer 34 and the third layer 35. Therefore, the internal loss further increases. As a result, the resonance mode gain of the rotary actuator 14 is reduced. Further, since the second layer 34 and the third layer 35 are high-rigidity material layers, the rigidity of the elastic support member 32 is increased, so that the resonance mode of the rotary actuator is shifted to a high range. further,
Since the second layer 34 is provided excluding the portion of the gimbal 32a, the dynamic characteristics of the head slider 31 at the start of the magnetic disk device are improved.

Head support member 3 in the above embodiment
With respect to 0, the rigidity ratio M / Msub, that is, the thickness tsub
Rigidity Msu in Single Layer Structure Composed of Non-High Rigidity Material Layer
b and a thickness ts obtained by forming a high-rigidity material layer having a thickness t on both sides.
The ratio of rigidity M in the two-layer structure and three-layer structure of ub will be specifically compared. For example, for the elastic supporting members 22 and 32 in which the high rigidity material layer is composed of diamond-like amorphous carbon (DLC) and the non-high rigidity material layer is composed of stainless steel, the rigidity ratio M / Msub is shown in FIG. Are represented by the symbols C and D, respectively. Thus, when the ratio of the thickness t of the high-rigidity material layer to the thickness tsub of the multilayer structure exceeds 0.2, the thickness of the high-rigidity material layer on both surfaces is larger than that of the high-rigidity material layer formed on one surface. It can be seen that the rigidity is more efficiently enhanced by forming the t / 2 high-rigidity material layer.

13 and 14 show a fourth embodiment of the head support member according to the present invention. 13 and 14, the head support member 40 includes a head slider 41 and an elastic support member 42 that supports the head slider 41. Head slider 41
Is configured similarly to the head slider 21 in the head supporting member 20 of FIGS.

The elastic supporting member 42 supports the head slider 41 by means of a gimbal 42a provided near the tip thereof, and acts as a spring based on its elasticity, so that the head slider 41 can be moved to a predetermined position on the surface of the magnetic disk. Press with load. The elastic member support 42 is a so-called N-.
The CSS type magnetic disk device is provided with a convex portion 42b for sliding on a ramp.

The above-mentioned structure is similar to the head supporting member 20 shown in FIGS. 5 and 6, but in this embodiment, the elastic supporting member 42 has the same structure as that shown in FIGS.
5, the central first layer 43 and the upper second layer 44
And a lower third layer 45, a first thin film 46 formed between the first layer 43 and the second layer 44, and a second thin film 47 formed between the first layer 43 and the third layer 45. It is composed of five layers. The first layer 43 is made of a non-highly rigid material, for example, stainless steel, similar to the elastic supporting member in the conventional head supporting member. Second layer 44 and third layer 45
Is made of a highly rigid material having higher rigidity than stainless steel, for example, ceramics. The thermal expansion coefficient α of the first thin film 46 and the second thin film 47 constitutes the thermal expansion coefficient α1 of the non-highly rigid material forming the first layer 43, and the second layer 44 and the third layer 45. It is formed of a material having a coefficient of thermal expansion α2 of a high-rigidity material.

Further, the second layer 44 is provided on the upper surface of the first layer 43 excluding the gimbal 42a, and the third layer 45 is provided on the lower surface of the first layer 43 excluding the head slider 41. . Head support member 40 having such a configuration
According to this, in addition to the same effect as the third embodiment, in comparison with this, in the head support member 40, the elastic support member 42 has the first layer 43, the second layer 44 and the third layer 45.
Since it has a five-layer structure composed of the first thin film 46 and the second thin film 47, its internal loss is further increased. As a result, the resonance mode gain of the rotary actuator 14 is reduced.

In this case, the second layer 44 and the third layer 45 are
Since it is formed on both surfaces of the first layer 43 via the first thin film 46 and the second thin film 47, respectively, in particular, the thermal expansion coefficient α1 of the non-high rigidity material forming the first layer 43,
When the thermal expansion coefficients α2 of the high-rigidity materials forming the second layer 44 and the third layer 45 are greatly different, the internal stress generated inside the layers of the multilayer structure in the cooling process after processing is caused by the first thin film 46. And due to the presence of the second thin film 47.
Therefore, the mutual adhesion of the first layer 43, which is a non-high-rigidity material layer, and the second layer 44 and the third layer 45, which are high-rigidity material layers, is improved.

16 and 17 show a head support member according to a fifth embodiment of the present invention. Note that FIG.
Compared with the corresponding drawings of the above-mentioned respective embodiments, for convenience of illustration, the figure is shown upside down. 16 and 17, the head support member 50 is a head slider 51.
And the elastic support member 5 for supporting the head slider 51.
2 and. The head slider 51 has the same structure as the head slider 14a in the head supporting member 15 shown in FIGS.

The elastic support member 52 supports the head slider 51 with a gimbal provided near the tip thereof, and acts as a spring based on its elasticity, so that the head slider 51 is subjected to a predetermined load on the surface of the magnetic disk. Press with.

The above-mentioned structure is the same as the head supporting member 15 shown in FIGS. 2 and 3, but in this embodiment, the elastic supporting member 52 is the same as that shown in FIGS.
As shown in 0, the first layer 53 in the center and the second layer 54 above
And the third layer 55 below, and
The thin film lead wire portion 56 formed on the surface of the second layer 54 is provided. The first layer 53 is made of a non-highly rigid material, for example, stainless steel, like the elastic support member in the conventional head support member. The second layer 54 is formed of an insulating material such as a polyimide resin. The third layer 55 is made of a highly rigid material having higher rigidity than stainless steel, for example, ceramics.

The thin film lead wire portions 56 are formed on the surface of the second layer 54 by, for example, a photolithography method, and a plurality of thin film lead wire portions 56 extending along the longitudinal direction of the elastic support member 52, four in the illustrated case, are mutually formed. It consists of independent leads. One end 56a of each lead wire is connected to a head terminal of a magnetic head (not shown) attached to the head slider 51, and
The other end 56b extends to the root portion of the elastic support member 52. The thin film lead wire portion 56 may be covered with a thin film of nickel, gold, or the like from above in order to prevent corrosion.

According to the head supporting member 50 having such a structure, the head supporting member 50 has the elastic supporting member 52.
Has a three-layer structure including the first layer 53, the second layer 54, and the third layer 55, the internal loss is further increased. As a result, the resonance mode gain of the rotary actuator is reduced. Also, the third layer 5
Since 5 is a high-rigidity material layer, the rigidity of the elastic support member 52 is increased, so that the resonance mode of the rotary actuator is shifted to a high range. Further, since the second layer 54 is made of an insulating material and the thin film lead wire portion 56 is formed on the surface thereof, the magnetic disk device is easily assembled and automatically assembled. Will be possible. Therefore, the productivity of the magnetic disk device is improved.

When the second layer 54 is made of a polyimide resin, the thin film lead wire portion 56 has the second layer 5
4 is formed by applying a wiring pattern forming technique such as a photolithography method to the surface of No. 4.

21 and 22 show a sixth embodiment of the head supporting member according to the present invention. 21 and 22, the head support member 60 includes a head slider 61 and an elastic support member 62 that supports the head slider 61.

The head slider 61 has the same structure as the head slider 14a in the head supporting member 16 shown in FIGS. The elastic support member 62 supports the head slider 61 with a gimbal provided near the tip thereof, and acts as a spring based on its elasticity to press the head slider 61 against the surface of the magnetic disk with a predetermined load. .

The above-mentioned structure is similar to that of the head supporting member 16 shown in FIGS. 2 and 3, but in this embodiment, the elastic supporting member 62 has a structure similar to that shown in FIGS.
5, the central first layer 63 and the upper second layer 64
And a lower third layer 65, a thin film lead wire portion 66 formed on the surface of the second layer 64, and a fourth layer 67 formed on the thin film lead wire portion 66. Have The first layer 63 is made of a non-highly rigid material, for example, stainless steel, like the elastic support member in the conventional head support member. The second layer 64, the third layer 65, and the fourth layer 67 are each formed of a material having high rigidity and insulating properties, such as monocrystalline and polycrystalline diamond, alumina, or silicon dioxide. Thereby, the second layer 64, the third layer 65, and the fourth layer 67 become an insulating layer and a high-rigidity material layer.

When the second layer 64, the third layer 65 and the fourth layer 67 are made of ceramics, the same thickness is sufficient as compared with the case where they are made of polyimide resin. High rigidity can be obtained. Since the thin film lead wire portion 66 is surrounded by the second layer 64 and the fourth layer 67, the thin film lead wire portion 66 is prevented from being corroded and the corrosion resistance is improved. Further, between the first layer 63 and the second layer 64 and the third layer 65, and between the thin film lead wire portion 66 and the second layer 64 and the fourth layer 67, as in the above-described embodiment, an intermediate layer is formed. When the thin film having the coefficient of thermal expansion α is formed, the internal stress generated in the cooling process between the layers is relaxed, and the adhesion between the layers is improved.

According to the head supporting member 60 having such a structure, the head supporting member 60 has the elastic supporting member 62.
Has a three-layer structure including the first layer 63, the second layer 64, and the third layer 65, the internal loss is further increased. As a result, the resonance mode gain of the rotary actuator is reduced. Also, the third layer 6
Since 5 is a high-rigidity material layer, the rigidity of the elastic support member 62 is increased, so that the resonance mode of the rotary actuator is shifted to a high range. Further, the second layer 64 is made of an insulating material, and the thin film lead wire portion 66 is formed on the surface thereof, so that the magnetic disk device can be easily assembled and automatically assembled. Will be possible. Therefore, the productivity of the magnetic disk device is improved. When the second layer 64 is made of polyimide resin, the thin film lead wire portion 66 is
It is formed by applying a wiring pattern forming technique such as a photolithography method to the surface of the second layer 64.

26 and 27 show a seventh embodiment of the present invention. 26 and 27, the head support member 70 includes a head slider 71 and an elastic support member 72 that supports the head slider 71. The head slider 71 has the same structure as the head slider 14a in the head support member 15 shown in FIGS. The elastic support member 72 supports the head slider 71 with a gimbal provided near the tip thereof, and acts as a spring based on its elasticity to press the head slider 71 against the surface of the magnetic disk with a predetermined load. .

The above-mentioned structure is similar to that of the head supporting member 15 shown in FIGS. 2 and 3, but in this embodiment, the elastic supporting member 72 has a structure as shown in FIGS. , A lower first layer 74 and an upper second layer 75, and is provided with a thin film lead wire portion 76 formed on the surface of the second layer. The first layer 74 is, for example, similar to the elastic supporting member in the conventional head supporting member,
It is made of a non-rigid material such as stainless steel. In the present embodiment, the second layer 75 is made of a material having higher rigidity than stainless steel and having electrical insulation. As an example of such a material, the monocrystalline and polycrystalline diamond, alumina, silicon dioxide, etc. which have already been described in the sixth embodiment are used. The thin film lead wire portion 76 is provided on the surface adjacent to the second layer 75, and its structure is similar to that of the thin film lead wire portion 56 described with reference to FIGS. 17 to 20.

According to the head supporting member 70 having such a structure, the elastic supporting member 72 of the head supporting member 70 has a two-layer structure composed of the first layer 74 and the second layer 75. Its internal loss is increased. This allows
The gain of the resonance mode of the rotary actuator is reduced. Further, since the second layer 75 is made of an insulating material and a high-rigidity material, the rigidity of the elastic support member 72 is increased, so that the resonance mode of the rotary actuator is shifted to a high range. Further, the second layer 75 is
Since it is made of a material having an insulating property and high rigidity, and the thin film lead wire portion 76 is formed on the surface thereof, by using a material having two or more characteristics, The number of layers of the head supporting member 70 is reduced. Thereby, the elastic support member 72 is easily designed and processed, and the cost is reduced.

In each of the above-mentioned embodiments, the second layers 18, 24, 34, 44 and the third layers 35, 45, 55, which are high-rigidity material layers, are each made of ceramics or the like. It may be composed of single crystalline and polycrystalline diamond, or diamond-like amorphous carbon. In this case, in the head supporting member 30 shown in FIG. 9 and FIG.
When the second layer 34 and the third layer 35 made of the diamond-like amorphous carbon (DLC) layer having the thickness of 1 to 3 are formed, as compared with the conventional head supporting member, as shown in FIG.
Since the rigidity of about 3 times is obtained and the resonance frequency becomes about 2 times, the servo band condition by the positioning control system is satisfied.

In the above embodiments, the present invention is applied to the CSS type magnetic disk device of FIG. 31 or the N-CSS type magnetic disk device of FIG. 35, respectively. However, the present invention is not limited to this, and all the embodiments are based on the CSS method or NC, respectively.
It is obvious that the present invention can be applied to the SS type magnetic disk device. Further, the present invention is directed to the head slider 14a.
The present invention is not limited to a magnetic disk device that floats above the surface of the magnetic disk 13, but it goes without saying that the present invention is also applied to a magnetic disk device in which the head slider 14a is in constant contact with the magnetic disk 13.

Although the above embodiments have been described with respect to the magnetic disk device, the present invention is not limited to this, and the present invention is applied to a disk device for recording or reproducing other kinds of disks such as a magneto-optical disk and an optical disk. It is also possible to do so.

[0078]

As described above, according to the present invention, it is possible to shift the resonance mode of the elastic support member constituting the head support member of the rotary actuator to a high range and reduce the gain thereof. As a result, recording / reproducing of the disc by the rotary actuator in the disc device can be accurately performed.

[Brief description of drawings]

FIG. 1 is a schematic plan view of a magnetic head device incorporating a first embodiment of a head support member according to the present invention.

FIG. 2 is a schematic plan view of the head support member of FIG.

FIG. 3 is a longitudinal sectional view of the head support member of FIG.

4 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 5 is a schematic plan view of a second embodiment of a head support member according to the present invention.

6 is a longitudinal cross-sectional view of the head support member of FIG.

7 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 8 is a graph showing resonance characteristics of a rotary actuator using a head supporting member according to an embodiment of the present invention and a conventional head supporting member.

FIG. 9 is a schematic plan view of a head support member according to a third embodiment of the present invention.

FIG. 10 is a longitudinal sectional view of the head support member of FIG.

11 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 12 is a graph showing changes in the rigidity ratio with respect to the ratio of the thickness of the elastic support member and the thickness of the high-rigidity material layer in the head support member according to the embodiment of the present invention.

FIG. 13 is a schematic plan view of a head support member according to a fourth embodiment of the present invention.

14 is a longitudinal sectional view of the head support member of FIG.

15 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 16 is a schematic plan view of a head support member according to a fifth embodiment of the present invention.

17 is a longitudinal sectional view of the head support member of FIG.

18 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

19 is a cross-sectional view of the head support member of FIG.

20 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 21 is a schematic plan view of the sixth embodiment of the head supporting member according to the present invention.

22 is a longitudinal sectional view of the head support member of FIG.

23 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

24 is a cross-sectional view of the head support member of FIG.

25 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 26 is a schematic plan view of the seventh embodiment of the head supporting member according to the present invention.

27 is a longitudinal sectional view of the head support member of FIG.

28 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

29 is a cross-sectional view of the head support member of FIG.

30 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG.

FIG. 31 is a schematic plan view showing an example of a conventional magnetic disk device.

32 is a schematic plan view of a head support member in the magnetic disk device of FIG. 31.

33 is a longitudinal sectional view of the head support member of FIG. 32.

34 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG. 27.

FIG. 35 is a schematic plan view showing another example of a conventional magnetic disk device.

36 is a schematic plan view of a head support member in the magnetic disk device of FIG. 35.

37 is a longitudinal cross-sectional view of the head support member of FIG. 36.

38 is an enlarged cross-sectional view of a main part of an elastic support member in the head support member of FIG. 36.

[Explanation of symbols]

 10 magnetic disk device 11 housing 12 spindle motor 13 magnetic disk 14 rotary actuator 14a head slider 14b elastic support member 14c arm 14d vertical shaft 14e motor 15 head support member 16 gimbal 17 first layer (non-high rigidity material layer) 18 Second layer (high rigidity material layer) 20 Head support member 21 Head slider 22 Elastic support member 23 First layer (non-high rigidity material layer) 24 Second layer (high rigidity material layer) 30 Head support member 31 Head slider 32 Elasticity Support Member 33 First Layer (Non-High Rigidity Material Layer) 34 Second Layer (High Rigidity Material Layer) 35 Third Layer (High Rigidity Material Layer) 40 Head Supporting Member 41 Head Slider 42 Elastic Supporting Member 43 First Layer (Non-High) High-rigidity material layer) 44 Second layer (high-rigidity material layer) 45 Third layer (high-rigidity material layer) 46, 4 Thin film 50 Head support member 51 Head slider 52 Elastic support member 53 First layer (non-high rigidity material layer) 54 Second layer (insulating layer) 55 Third layer (high rigidity material layer) 56 Thin film lead wire portion 70 Head support member 71 Head Slider 72 Elastic Support Member 74 First Layer (Non-High Rigidity Material Layer) 75 Second Layer (Layer Made of Insulating Material and High Rigidity Material) 76 Thin Film Lead Wire Part

Claims (14)

[Claims] 1. A head slider having an elastic support member swingably supported with respect to a disk which is a rotationally driven recording medium, and a head slider attached to the tip, and recording / reproducing of a disk attached to the head slider. And at least a part of the elastic support member is formed of a plurality of layers, and at least one layer of the elastic support members is formed of a high-rigidity material having higher rigidity than stainless steel. A head support member characterized by being provided. 2. The elastic supporting member is composed of at least a part of three or more layers, and the high-rigidity material layer is vertically adjacent to a non-high-rigidity material layer made of another material. The head support member according to claim 1, wherein the head support member is provided in a plurality. 3. The elastic support member is composed of at least a part of five or more layers, and the high-rigidity material layer is disposed above and below the non-high-rigidity material layer. The thin film layer is disposed between the high-rigidity material layer and the non-high-rigidity material layer.
The head support member according to. 4. The head support member according to claim 1, wherein the high-rigidity material layer is single crystal or polycrystalline diamond or diamond-like amorphous carbon. 5. An elastic support member swingably supported with respect to a disk which is a rotationally driven recording medium and which has a thin film lead wire portion, the head slider being attached to a tip and the head slider. A magnetic head for recording and reproducing the attached disk, and the elastic supporting member is composed of a plurality of layers in at least a part of the layers except for the thin film lead wire portion. At least one of the layers is formed of a high-rigidity material having a higher rigidity than stainless steel, and at least one of the other layers is formed of an insulating material, and the thin film lead wire portion is A head support member disposed adjacent to the insulating material layer. 6. The high-rigidity material layer is formed of an insulating material, and the thin-film lead wire portion is covered with the high-rigidity material layer or disposed adjacent to the high-rigidity material layer. The head support member according to claim 5, wherein: 7. An elastic support member swingably supported with respect to a disk which is a rotationally driven recording medium, and having a thin film lead wire portion, wherein the head slider is attached to the tip and the head slider is attached to the head slider. A magnetic head for recording and reproducing the attached disk, and the elastic supporting member is composed of a plurality of layers in at least a part of the layers except for the thin film lead wire portion. At least one of the layers is a material having an insulating property and is formed of a high-rigidity material having a higher rigidity than stainless steel, and the thin-film lead wire portion is adjacent to the high-rigidity and insulating-material layer. A head support member, which is provided. 8. A disk as a recording medium, a drive means for rotationally driving the disk, a rotary actuator swingably supported by the disk rotationally driven by the drive means, and a rotary actuator. A magnetic head for recording / reproducing a disk provided at the tip, wherein the rotary actuator is an elastic support member swingably supported with respect to a disk serving as a recording medium to be rotationally driven; A head slider attached to the tip of the elastic support member; and a magnetic head for recording / reproducing a disk attached to the head slider, wherein the elastic support member has at least a part thereof.
A disk device comprising a plurality of layers, at least one layer of which is formed of a highly rigid material having a rigidity higher than that of stainless steel. 9. The elastic support member is composed of at least a part of three or more layers, and the high-rigidity material layer is adjacent to a non-high-rigidity material layer made of another material. 9. The disk device according to claim 8, wherein the disk device is arranged as a unit. 10. The elastic support member is composed of at least a part of five or more layers, and the high-rigidity material layer is disposed above and below the non-high-rigidity material layer. The thin film layer is disposed between the high-rigidity material layer and the non-high-rigidity material layer.
The disk device described in 1. 11. The disk device according to claim 8, wherein the high-rigidity material layer is single crystal or polycrystalline diamond or diamond-like amorphous carbon. 12. A disk as a recording medium, a drive means for rotationally driving the disk, a rotary actuator swingably supported by the disk rotationally driven by the drive means, and a rotary actuator. And a magnetic head for recording / reproducing a disk provided at the tip, wherein the rotary actuator is swingably supported with respect to a disk serving as a recording medium to be rotationally driven, and a thin film line portion. An elastic supporting member, a head slider attached to the tip of the elastic supporting member, and a magnetic head for recording / reproducing a disk attached to the head slider, wherein the elastic supporting member is a thin film lead. Excluding the lines
At least a part thereof is composed of a plurality of layers, at least one of these layers is formed of a high-rigidity material having higher rigidity than stainless steel, and at least of the other layers. A disk device, wherein one layer is formed of an insulating material, and the thin film lead wire portion is disposed adjacent to the insulating material layer. 13. The high-rigidity material layer is formed of an insulating material, and the thin-film lead wire portion is covered with the high-rigidity material layer or disposed adjacent to the high-rigidity material layer. The disk drive according to claim 12, wherein the disk drive is a disk drive. 14. A disk as a recording medium, a drive means for rotationally driving the disk, a rotary actuator swingably supported with respect to the disk rotationally driven by the drive means, and a rotary actuator comprising: And a magnetic head for recording / reproducing a disk provided at the tip, wherein the rotary actuator is swingably supported with respect to a disk serving as a recording medium to be rotationally driven, and a thin film line portion. An elastic supporting member, a head slider attached to the tip of the elastic supporting member, and a magnetic head for recording / reproducing a disk attached to the head slider, wherein the elastic supporting member is a thin film lead. Excluding the lines
At least a part of it is composed of a plurality of layers, and at least one of these layers is made of a material having an insulating property and made of a high-rigidity material having higher rigidity than stainless steel. A disk device, wherein the thin-film lead wire portion is disposed adjacent to the highly rigid and insulating material layer.