JPH08316289A - Automatic conveyor - Google Patents

Abstract

PURPOSE: To reduce the cost and the size and to shorten the processing time. CONSTITUTION: The title automatic conveyor has a cassette for keeping a plurality of glass boards 1, first and second processing parts 4, 5 having substance putting tables 4a, 5a for putting boards on, a conveying robot 10 for conveying a board taken out from the cassette 2 to the first processing part 4 and receiving a board from the second processing part 5 and putting it in the cassette 2, and a conveying arm 20 provided between the processing parts 4, 5 for conveying a board from the processing part 4 to the processing part 5. Since there is no need for the robot 10 to convey a board from the processing part 4 to the processing part 5, the robot can move to the processing part 5 to receive a processed board in the state of not holding a board, immediately after its conveyance of the board to the processing part 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic transfer system for carrying a flat object such as a semiconductor wafer, a rectangular glass substrate, a printed circuit board and each original plate between a case and a plurality of processing units for processing the flat object. Concerning a carrier device.

[0002]

2. Description of the Related Art As an automatic carrier of this type, for example, one shown in FIG. 5 is considered. This automatic carrying device has a cassette 51 for housing a plurality of flat objects (for example, a glass substrate for a liquid crystal display device) 50, and first mounts 52a, 53a on which the substrates 50 are mounted.
The second processing units 52 and 53 and a transfer robot (hereinafter, simply referred to as a robot) 54 that transfers the substrate 50 are provided. The first processing unit 52 holds the substrate 50 processed by the processing unit 52 for transfer to the robot 54.
A transfer unit 55 is provided. The substrate 50 processed by the processing unit 53 is transferred to the robot 5 in the second processing unit 53.
The second transfer unit 56 is provided for holding the transfer unit 4. The cassette 51 is provided with a plurality of storage portions for storing the substrates 50 one by one in the vertical direction.

The robot 54 includes a fork 54a for holding the substrate 50 on its upper surface, a cassette 51, a processing section 52, and a fork 54a.
X-axis rectilinear mechanism for advancing and retracting with respect to 53, and fork
It has a Z-axis rectilinear mechanism for moving a up and down, a rotating mechanism for rotating the fork 54a, and a Y-axis rectilinear mechanism for moving the robot main body on which the three mechanical parts and the like are mounted in the arrangement direction of the processing units 52, 53. It is a 4-axis robot. The Y-axis rectilinear mechanism has a guide rail 57.

The first transfer section 55 has a Y-axis rectilinear mechanism for advancing and retracting an arm 55a for holding the substrate 50 on the upper surface with respect to the first processing section 52, and a Z-axis rectilinear mechanism for vertically moving the arm 55a. It is a two-axis robot. The second transfer unit 56 is a two-axis robot similar to the first transfer unit 55 and has an arm 56a.

In the above-described automatic transfer apparatus, when the substrate 50 is processed by the two processing units 52 and 53, the automatic transfer of the substrate 50 is performed by the following procedure (see FIG. 6). In FIG. 6, solid arrows indicate the transport path of the substrate 50. (1) The fork 54a of the robot 54 receives one substrate 50 from the storage section in the cassette 51 (path 6 in FIG. 6).
1). (2) The fork 54 a attaches the substrate 50 to the first processing unit 52.
It is placed on the table 52a (path 62 in FIG. 6). (3) The arm 55a of the first transfer unit 55 receives the substrate 50, which has been processed by the first processing unit 52, from the stage 52a (path 63 in FIG. 6) and holds it for delivery to the fork 54a. (4) The robot 54 moves from the position of the stage 52a to the position of the first transfer unit 55 along the guide rail 57 (in the Y-axis direction), and moves the substrate 50 on the arm 55a of the first transfer unit 55. Received by fork 54a (FIG. 6)
64). (5) The robot 54 moves in the Y-axis direction from the position of the first transfer unit 55 to the position of the stage 53a of the second processing unit 53 (path 65 in FIG. 6). (6) The fork 54a places the substrate 50 on the stage 53a (path 66 in FIG. 6). (7) Substrate (processed substrate) 50 on which the arm 56a of the second transfer unit 56 has finished processing by the second processing unit 53
Is received from the stage 53a (path 67 in FIG. 6) and held for delivery to the fork 54a. (8) The robot 54 moves in the Y-axis direction from the position of the stage 53a to the position of the second transfer unit 56, and the processed substrate 50 on the arm 56a of the second transfer unit 56 is received by the fork 54a ( Route 68 in FIG. 6). (9) The robot 54 is shown in FIG.
Move in the Y-axis direction to the original position shown in (see path 6 in FIG. 6).
9). (10) After the processed substrate 50 is positioned by the pre-alignment mechanism 58 of the robot 54, the substrate 50 is processed.
Is stored in the original storage portion in the cassette 51 by the fork 54a (path 70 in FIG. 6).

As described above, in the above-described conventional automatic transfer apparatus, since the robot 54 has only one fork 54a, the apparatus tact (N + 1th substrate after the Nth substrate 50 is taken out from the cassette 51) 50 is cassette 5
In order to shorten the time (from the time of taking out from 1), the transfer units 55 and 56 are provided in the processing units 52 and 53, respectively.

That is, without the first transfer section 55,
The robot 54 uses the substrate 50 taken out from the cassette 51.
First on the stage 52a of the first processing unit 52, and then
Until the processing by the processing unit 52 is completed, it is necessary to wait on the spot to receive the substrate 50, which causes a waste of time. Similarly, if the second transfer unit 56 is not provided, the robot 54 holds the substrate 50 on the mounting table 53a of the second processing unit 53 until the processing in the second processing unit 53 is completed. You have to wait on-the-fly to receive it, which wastes time.
As a result, much time is wasted and the device tact becomes long.

[0008]

However, in the above-mentioned prior art, since the second processing section 53 is also provided with the transfer section 56, a space corresponding to that is required and the guide rail 57 becomes long. I will end up. As a result, there is a problem that the cost increases and the size of the entire apparatus increases.

Only the robot 54 can move between the two processing units 52 and 53, and the robot 54 transfers the substrate 50 from the first processing unit 52 to the second processing unit 53 (path 65 in FIG. 6). ) Is also performed, the number of times the substrate 54 is transported by the robot 54 increases accordingly. Moreover, the number of conveyances increases as the number of processing units increases. As a result, the device tact becomes long. In order to shorten the device task, it is necessary to improve the driving performance of the robot 54 by increasing the moving speed of the fork 54a and the moving speed of the robot 54 itself. However, the robot 54 must move or move the fork 54a while holding the substrate 50, and there is a limit in improving the driving performance. Therefore, there is a problem that the device tact becomes long and the processing time becomes long.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an automatic carrying device which is intended to reduce the cost and the size and to shorten the processing time.

[0011]

In order to solve the above problems, an automatic carrier device according to the invention of claim 1 is a case for accommodating a plurality of flat objects, and a mount on which the flat objects are placed. The first and second processing units having a base and the holding member for holding the flat object are provided, and the flat object taken out from the case is conveyed to the first processing unit, and from the second processing unit. A transfer robot that receives and stores the flat object in the case, and a transfer unit that is provided between the first processing unit and the second processing unit and transfers the flat object from the first processing unit to the second processing unit. It has and.

[0012]

In the automatic carrier device according to claim 1, carrier means for carrying the flat object from the first processing part to the second processing part is provided between the first processing part and the second processing part. With the above configuration, the transfer robot does not need to transfer the flat object from the first processing unit to the second processing unit. That is, the transport robot receives the flat object from the second processing unit immediately after transporting the flat object taken out of the case to the first processing unit, so that the flat object is not held from the first processing unit. It can be moved to the second processing unit. for that reason,
The second processing unit does not need to be provided with a means for holding the flat object for handing over to the transfer robot until the transfer robot receives the flat object, and the space is reduced accordingly.

Further, since the transfer robot can move the flat object taken out from the case to the first processing unit, immediately after moving the flat object from the first processing unit to the second processing unit without holding the flat object. , The moving time of the transfer robot from the first processing unit to the second processing unit is shortened. This moving time does not change so much even if the number of processing units increases. As a result, the device tact, which is the processing time for one flat object, is shortened.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an automatic carrying apparatus according to an embodiment of the present invention. This automatic transporting apparatus takes out a flat object, for example, a rectangular glass substrate 1 for a liquid crystal display device from a cassette, transports the glass substrate 1 to a processing unit that performs processing such as processing and inspection, and then processes the processed substrate 1 It is for returning to the cassette part.

The automatic carrier has a first cassette 2 and a second cassette 3 for accommodating a plurality of glass substrates (hereinafter, simply referred to as substrates) 1 and mounts 4a and 5a on which the substrates 1 are placed. First processing unit 4 and second processing unit 5
And a transfer robot (hereinafter, simply referred to as a robot) 10 that transfers the substrate 1, and a transfer arm 20 provided between the first processing unit 4 and the second processing unit 5.

The first cassette 2 and the second cassette 3 are fixed on a cassette table 6. In this cassette stand 6,
A positioning mechanism for positioning the first cassette 2 and the second cassette 3 at the cassette position is provided. FIG.
Then, the first cassette 2 is at the cassette position. The cassettes 2 and 3 are provided with a plurality of storage portions for storing the substrates 1 one by one in the vertical direction. Each storage unit supports the lower surfaces of both sides of the substrate 1.

The stage 4a of the first processing unit 4 is provided with a recess 4b into which the fork 11 of the robot 10 can enter and a recess 4c into which the arm 21 of the transfer arm 20 can enter. A plurality of vacuum suction pads 4d for holding the glass substrate 1 are provided on the upper surface of the stage 4a, and a sensor 4e for detecting the presence or absence of the substrate 1 is provided near the center of the stage 4a.

The second processing section 5 has the same structure as the first processing section 4. That is, in the stage 5a of the second processing unit 5,
The recess 5b and the recess 5c are formed. A plurality of vacuum suction pads 5d are provided on the upper surface of the stage 5a, and a sensor 5e is provided near the center of the stage 5a.

The robot 10 moves the fork 11, which holds the substrate 1 on the upper surface, forward and backward with respect to the cassette 2 and the processing units 4 and 5 at the cassette position, and the fork 11 up and down. It has a linear movement mechanism in the Z-axis direction, a rotation mechanism for rotating the fork 11, and a linear movement mechanism in the Y-axis direction for moving the robot main body on which the above-mentioned three mechanical parts are mounted in the arrangement direction of the processing units 4 and 5. Four
It is an axis robot. The linear movement mechanism in the Y-axis direction has a guide rail 12. The fork 11 is a plate-shaped member. A plurality of vacuum suction pads 13 for holding the substrate 1 and a sensor 14 for detecting the presence or absence of the substrate 1 are provided on the upper surface of the fork 11.
Are provided.

The robot 10 is also provided with a pre-alignment mechanism 15. Pre-alignment mechanism 15
Is for positioning the substrate 1 in order to accurately insert the substrate 1 into the storage portion of the cassette 2 at the cassette position. The pre-alignment mechanism 15 includes a fixing member 16 having three reference pins 16a and two pressing pins 1
And a pressing member 17 having 7a. An air cylinder, a motor or the like is used to press the two pressing pins 17a, but a relief mechanism is provided in the pre-alignment mechanism 15 so as to prevent the substrate 1 from being pressed more than necessary and damaged.

The transfer arm 20 has a function of receiving the substrate 1 which has been processed by the first processing unit 4 from the processing unit 4 by the arm unit 21 and holding it, and a second processing of holding the substrate 1 by the arm unit 21. It has a function of delivering to the unit 5. The transfer arm (hereinafter, simply referred to as an arm) 20 has a Y-axis linear movement mechanism that moves the arm portion 21 forward and backward with respect to the processing portions 4 and 5, a Z-axis linear movement mechanism that moves the arm portion 21 up and down, and its Z. It is a three-axis robot having a rotation mechanism that rotates the arm portion 21 about an axis. Arm part 21
Is a plate-shaped member. On the upper surface of the arm portion 21, the substrate 1
There are provided a plurality of vacuum suction pads 22 for holding the substrate and a sensor 23 for detecting the presence or absence of the substrate 1.

In the automatic transfer apparatus according to the above embodiment, when the substrate 1 is processed by the two processing units 4 and 5, the transfer of the substrate 1 is performed by the following procedure (see FIG. 2). In FIG. 2, solid arrows indicate the transport path of the substrate 1. (1) The fork 11 of the robot 10 receives one substrate 1 from the storage section in the cassette 2 (path 31 in FIG. 2). (2) Fork 11 of robot 10 is the first substrate 1
It is placed on the stage 4a of the processing unit 4 (path 32 in FIG. 2).
The first processing unit 4 processes the substrate 1. It should be noted that the robot 10 transfers the substrate 1 to the first processing unit 4 and immediately after the substrate 10 is not held, the guide rail 12 moves from the position of the first processing unit 4 to the position of the second processing unit 5. Along the direction of the Y-axis (moving path indicated by a dashed arrow in FIG. 2). (3) The arm part 21 of the transfer arm 20 receives the substrate 1 for which the processing by the first processing part 4 has been completed from the processing part 4 (path 33 in FIG. 2). The robot 21 has a second arm portion 21.
Substrate that has been processed by the processing unit 5 (processed substrate)
The processed substrate 1 until 1 is received from the processing unit 5.
The previous substrate 1 is held. (4) The second processing unit 5 processes the substrate 1 processed by the robot 10.
Then, the substrate 1 held by the arm section 21 of the transfer arm 20 is placed on the stage 5a of the second processing section 5 (path 34 in FIG. 2). The second processing section 5 processes the substrate 1. (5) The substrate 1 processed by the robot 10 is processed by the second processing unit 5
(Path 35 in FIG. 2). (6) The robot 10 moves in the Y-axis direction from the position of the second processing unit 5 to the position of the first processing unit 5 (path 3 in FIG. 2).
6). (7) After the pre-alignment mechanism 15 of the robot 10 positions the processed substrate 1, the fork 11 of the robot 54 stores the processed substrate 1 in the original storage unit in the cassette 2 (path 37 in FIG. 2). ).

When all the substrates 1 in the first cassette 2 have been processed and the substrates in the second cassette 3 are to be processed, the cassette base 6 is moved to move the first substrate at the cassette position. Instead of the cassette 2, the second cassette 3 may be located at the cassette position.

According to the above embodiment, the robot 10 moves from the first processing unit 4 to the second processing unit 5 (between a plurality of processing units).
There is no need to transfer the substrate 1. That is, the robot 10
Immediately after the substrate 1 taken out from the cassette 2 is transferred to the first processing unit (first processing unit of the plurality of processing units) 4, the processed substrate is immediately transferred to the second processing unit (the plurality of processing units). Of the second processing unit (the final processing unit of the plurality of processing units) 5 from the position of the first processing unit 4 in the state where the substrate is not held in order to receive it from the final processing unit 5 of Can be moved to a position. Therefore, the second processing unit 5, which is the final processing unit, does not need to be provided with a means for holding the substrate 1 for delivering it to the robot 10 until the robot 10 receives the processed substrate 1. , Space is reduced by that amount. Therefore, it is possible to reduce the cost and downsize the entire device. In particular, the size of the processing units 4 and 5 in the arrangement direction can be reduced, and the guide rail 12 can be shortened.

Further, the robot 10 conveys the substrate 1 taken out from the cassette 2 to the first processing section 4 and immediately after that,
Since it is possible to move from the first processing unit 4 to the second processing unit 5 without holding the substrate, the moving time of the robot 10 from the processing unit 4 to the processing unit 5 is shortened. This travel time is
It does not change much even if the number of processing units increases. As a result, the device tact time, which is the processing time for one substrate, can be shortened.

FIG. 2 shows a standard transfer example in which both the first processing section 4 and the second processing section 5 apply processing to all the substrates 1.

On the other hand, FIG. 3 shows another transport example in which only the first processing unit 4 processes all the substrates 1 and the second processing unit 5 processes only some of the substrates 1. ing. In this example, the substrate 1 that is not processed in the second processing unit 5 is also transported to the second processing unit 5 as described above, like the substrate 1 that is processed therein.

FIG. 4 shows another transportation example in which only the second processing section 5 processes all the substrates 1 and the first processing section 4 processes only some of the substrates 1. In this example, the substrate 1 that is not processed by the first processing unit 4 is also transported to the first processing unit 4 as described above, like the substrate 1 that is processed there.

Although the two processing units 4 and 5 are provided in the above-described embodiment, the present invention can be applied to the case where the number of processing units is increased to three or more, and the above-described effects can be obtained. To be For example, when three processing units are provided, between the first processing unit (first processing unit) and the second processing unit, and between the second processing unit and the third processing unit (final processing unit). The transfer arms 20 are provided respectively.

[0031]

As described above, according to the automatic carrier device according to the first aspect of the present invention, the first processing section and the second processing section are provided.
The transport robot transports the flat object from the first processing unit to the second processing unit because the transporting unit transports the flat object from the first processing unit to the second processing unit. You don't have to. That is, the transfer robot receives the flat object from the second processing unit immediately after transferring the flat object taken out from the case to the first processing unit.
It is possible to move from the first processing unit to the second processing unit without holding the flat object. Therefore, until the transfer robot arrives at the second processing unit to receive the flat object,
It is not necessary to provide a means for holding the flat object in order to transfer it to the transfer robot, and the space is reduced accordingly. Therefore, it is possible to reduce the cost and downsize the entire device.

Further, since the transfer robot can move the flat object taken out from the case to the first processing unit, immediately after the flat object is not held, it can move from the first processing unit to the second processing unit. , The moving time of the transfer robot from the first processing unit to the second processing unit is shortened. This moving time does not change so much even if the number of processing units increases. As a result, the device tact, which is the processing time for one flat object, is shortened. Therefore, the processing time can be shortened.

[Brief description of drawings]

FIG. 1 is a plan view showing an automatic transport device according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a standard transport example of a substrate according to an embodiment.

FIG. 3 is an explanatory diagram showing another example of conveyance.

FIG. 4 is an explanatory diagram showing another example of conveyance.

FIG. 5 is a plan view showing a conventional automatic transport device.

FIG. 6 is an explanatory diagram showing a standard transfer example of a substrate in a conventional automatic transfer device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass substrate (flat object) 2, 3 Cassette (case) 4 1st processing part (processing part) 5 2nd processing part (processing part) 4a, 5a Loading stage 10 Transfer robot 11 Fork (holding member) 20 Transfer arm (Transportation means)

Claims (1)

[Claims] 1. A first and a second having a case for accommodating a plurality of flat objects, and a stage for mounting the flat objects.
And a holding member that holds the flat object, and conveys the flat object taken out of the case to the first processing unit,
Further, the transfer robot is provided between the first processing unit and the second processing unit, which is received from the second processing unit and stored in the case, and is provided between the first processing unit and the second processing unit. An automatic transporting device comprising: a transporting unit that transports a flat object.