JPH08292197A - Scanning probe microscope wader high-pressure environmental - Google Patents

Abstract

PURPOSE: To measure in a high-pressure gas atmosphere, a high-pressure liquid atmosphere or a supercritical fluid atmosphere by providing a scanning probe microscope in a high-pressure vessel. CONSTITUTION: One set of a scanning probe microscope having a probe scanning unit such as a piezo actuator 3 and a sample scanning unit 4 is contained in a high-pressure vessel 5, a high-pressure gas inlet 6 and a high-pressure gas outlet 7 are installed, and operated in a high-pressure environment of the atmospheric pressure to 200atm. Thus, a scanning probe microscope which has heretofore been limited to measure in a gas atmosphere of the atmospheric pressure or less, a liquid atmosphere or a vacuum atmosphere can measure in a high- pressure gas atmosphere of the atmospheric pressure to 200atm, a high-pressure liquid atmosphere or a supercritical fluid atmosphere. A method for synthesizing substance such as a film forming, etching, chemical reaction or surface treatment under new conditions of a high-pressure environment by utilizing these scanning probe microscopes is provided.

Description

Detailed Description of the Invention

[0001]

This invention relates to scanning probe microscope technology.

[0002]

[Prior Art and Problems to be Solved by the Invention]
A scanning probe microscope typified by a scanning tunneling microscope is widely used for analysis of solid surface structure in vacuum, atmospheric pressure or low pressure gas, or liquid.

However, all of the conventional techniques cannot measure in a high-pressure gas atmosphere, a high-pressure liquid atmosphere, or a supercritical fluid atmosphere because they are all measuring devices under atmospheric pressure.

Under the circumstances, it is an object of the present invention to provide a scanning probe microscope capable of measuring in a high pressure gas atmosphere, a high pressure liquid atmosphere, and a supercritical fluid atmosphere.

[0005]

In order to solve the above-mentioned problems, the present inventor has a scanning probe microscope inside a high-pressure container and operates in a high-pressure environment of not less than atmospheric pressure and not more than 200 atm. We came to the development of a microscope.

[0006]

The present invention has the above-described structure, and is a measuring device under atmospheric pressure, which has been limited to measurement in a gas atmosphere, a liquid atmosphere, or a vacuum atmosphere under atmospheric pressure. In the above high pressure gas atmosphere, high pressure liquid atmosphere,
It enables scanning probe microscope measurements in a supercritical fluid atmosphere.

[0007]

1 is a schematic view showing an embodiment of the device of the present invention. In the figure, 1 is a probe, 2 is a sample part, 3 is a probe scanning unit such as a piezo actuator, 4
Is a sample scanning unit, and a set of these scanning probe microscope systems is housed in a high-pressure container 5, and a high-pressure gas inlet 6 and an outlet 7 are installed. It is needless to say that the drawings are examples of the present research and the scope of the present invention is not limited by these. On the other hand, FIG. 2 is a graphite lattice image of a scanning tunneling microscope obtained in a supercritical fluid N ₂ (nitrogen) (room temperature, 40 atm). This is the first measurement example of atomic-level structural analysis in a supercritical fluid. Furthermore, FIG. 3 shows a high-pressure hydrogen environment (room temperature, (A)
2 is a scanning tunneling microscope image of a surface structure change accompanying a hydrogen storage phase transformation of a hydrogen storage metal LaNi ₅ under a 2 atmosphere hydrogen environment (before storage) and (B) 5 atmosphere hydrogen environment ((after storage)). These can be measured for the first time by the present invention.

[0008]

EFFECT OF THE INVENTION Conventionally, a scanning probe microscope, which is a measuring device at atmospheric pressure or less and is limited to measurement in a gas atmosphere, a liquid atmosphere, or a vacuum atmosphere at an atmospheric pressure or less, is It enables measurement in a high-pressure liquid atmosphere or a supercritical fluid atmosphere. Further, the present invention provides a method for synthesizing a substance such as film formation, etching, chemical reaction, and surface treatment under a new condition of high pressure environment using these scanning probe microscopes.

[Brief description of drawings]

FIG. 1 is a diagram showing an outline of an experimental device.

FIG. 2 Supercritical fluid N ₂ (nitrogen) (room temperature, 40 atm)
3 is a graphite lattice image of a scanning tunneling microscope measured in 1. This is the first example of atomic-level structural analysis in a supercritical fluid.

FIG. 3 shows the hydrogen storage phase transformation of the hydrogen storage metal LaNi ₅ under high pressure hydrogen environment (room temperature, (A) 2 atmosphere hydrogen environment (before storage) and (B) 5 atmosphere hydrogen environment (after storage)). It is a scanning tunneling microscope image of surface structure change.

[Explanation of symbols]

 1 probe 2 sample part 3 probe scanning unit 4 sample scanning unit 5 high-pressure container 6 high-pressure gas inlet 7 high-pressure gas outlet

Claims (2)

[Claims] 1. A scanning probe microscope having a high-pressure container and a scanning probe microscope in the interior thereof, which operates under a high-pressure environment of not less than atmospheric pressure and not more than 200 atmospheres. 2. A substance synthesizing method using the above apparatus, such as film formation, etching, chemical reaction, and surface treatment.