JPH08267754A - Orifice plate - Google Patents

Abstract

PURPOSE: To facilitate the manufacturing, to enhance the productivity and accuracy of printing and to uniformize an ejection quantity of a liquid. CONSTITUTION: First and second penetration holes 2, 1 which penetrate an orifice plate 11 from one face 11a to the other face 11b are provided such that openings on the face 1 la are to be liquid supplying holes 1a, 2a and openings on the other face 11b are to be liquid ejection nozzles 1b, 2b. At least one of the penetration holes 2, 1 is formed inclined with respect to a thickness direction of the orifice plate 11. The first and second penetration holes can be arranged regularly in a prescribed direction and in a group of the first penetration holes or in a group of second penetration holes, the penetration holes can be arranged adjacent to each other in a prescribed direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an orifice plate constituting a printing head mounted on a printer device. More specifically, by devising the shape of the through hole of the orifice plate that serves as a nozzle for ejecting the ink or the diluting liquid, the fabrication thereof can be easily performed, and the ejection amount accuracy is good and accurate printing can be performed. It relates to a possible orifice plate.

[0002]

2. Description of the Related Art In recent years, especially in offices and the like, document creation using a computer called desktop publishing has become popular, and recently, not only letters and figures but also natural colors for photographs are used. There is also an increasing demand for outputting images together with characters and figures. Along with this, it is required to print high-quality natural images, and the reproduction of halftones has become important.

In addition, ink droplets are ejected from a nozzle in accordance with a recording signal to record on a recording medium such as paper or film.
The so-called on-de-mind type printer device is downsized,
Since it is possible to reduce the cost, it is rapidly spreading in recent years.

As described above, various methods have been proposed for ejecting ink droplets, but a method using a piezo element or a method using a heating element is generally used. The former is a method in which pressure is applied to the ink by the deformation of the piezo element to eject the ink. The latter is a method of ejecting the ink with the pressure of bubbles generated by heating and boiling the ink with a heating element.

The printing head of the printer device for ejecting ink droplets as described above has a portion for applying a force for ejecting ink droplets to ink (for example, an ink reservoir having a piezo element or a heating element). It is composed of a nozzle portion (so-called orifice plate) that gives an ejection direction to ink droplets, and the orifice plate is manufactured by a method based on electroplating.

Various methods have been proposed as methods for reproducing the above-mentioned halftones. That is,
As a first method, there is a method in which a voltage applied to a piezo element or a heating element or a pulse width is changed to control a size of a droplet to be ejected, and a diameter of a printing dot is changed to express a gradation.

However, in the first method, if the voltage applied to the piezo element or the heating element or the pulse width is lowered too much, the ink will not be ejected, and the minimum droplet diameter will be limited. It has a drawback that it is very difficult to express low density, especially low density. Therefore,
It is unsatisfactory to print out natural images.

As a second method, one pixel is formed by a matrix of, for example, 4 × 4 dots without changing the dot diameter, and gradation expression is performed by using a so-called dither method in this matrix unit. There is a method.

However, also in the second method, when one pixel is formed by a 4 × 4 matrix, it is possible to express a density of 17 gradations. For example, with the same dot density as in the first method. When printed, the resolution deteriorates to 1/4 and the roughness is conspicuous, which is also unsatisfactory for printing out a natural image.

Therefore, the present inventors changed the concentration of ink droplets ejected from the print head of the on-de-mind type printer device by mixing the ink and the diluent when ejecting the ink. We have proposed a printing head that makes it possible to control the density of printed dots and prints out a natural image without causing deterioration of resolution.

That is, as shown in FIG. 17, in the orifice plate 101 constituting the printing head, for example, a first hole portion 102 serving as an ink nozzle and a second hole serving as a diluting liquid nozzle are formed. In the portion 103, one end of each of the first and second hole portions 102 and 103 has an orifice plate 101.
It is formed so as to be connected in the liquid ejection portion 104 facing the surface 101a of the.

The second hole portion 103 is formed in the thickness direction of the orifice plate 101, and the liquid discharge portion 104 is formed on the upper end side thereof.
02 may be formed in an L shape so as to be connected to the side surface of the liquid ejection portion.

Then, the first and second through holes 102, 1
If the other end of 03 is connected to an ink reservoir or a diluent reservoir not shown, the ink and the diluent are supplied from the ink reservoir and the diluent reservoir to the liquid ejecting unit 104 through the first and second through holes 102 and 103. As a result, the ink is mixed and ejected here, and the density of the ejected ink droplets is changed to control the density of the printed dots.

[0014]

However, in the printing head proposed by the present inventors, the manufacturing process of the orifice plate forming the printing head is very complicated. Hereinafter, an example of the manufacturing process of the orifice plate will be described.

That is, first, as shown in FIG. 18, a dry film resist is laminated on a base material 111 made of stainless steel or the like, or a liquid resist is coated and exposed and developed, and one end of the first and second holes is formed. A resist pattern 112 having a predetermined shape is formed on the portion to be formed.

Next, as shown in FIG. 19, the resist pattern 1 is formed on the surface of the base material 111 on which the resist pattern 112 is formed.
A nickel film 113 having the same thickness as 12 is formed by electroplating.

Then, as shown in FIG.
On the upper resist pattern 112 and the nickel film 113,
A resist pattern 114 for connecting a pattern 112a corresponding to the first hole and a pattern 112b corresponding to the second hole by laminating a dry film resist or coating a liquid resist and exposing and developing.
To form.

Next, as shown in FIG. 21, a nickel film 115 having the same thickness as the resist pattern 114 is formed on the surface on which the resist pattern 114 is formed by electroplating.

Next, as shown in FIG. 22, the base material 111
On the upper resist pattern 114 and the nickel film 115,
A dry film resist is laminated, or a liquid resist is coated and exposed and developed to form a resist pattern 116 corresponding to a liquid ejection portion.

Next, as shown in FIG. 23, a nickel thin film 117 is formed on the surface on which the resist pattern 116 is formed, including the resist pattern 116, by a method such as sputtering or vapor deposition.

Next, as shown in FIG. 24, the resist pattern 1 is formed on the nickel thin film 117 except the portion where the resist pattern 116 is formed on the surface on which the resist pattern 116 is formed.
A nickel film 118 thinner than 16 is formed by electroplating.

Finally, the resist pattern 11 is formed.
2,114,116 is, for example, KOH aqueous solution or NaOH
The nickel film 1 is removed by a resist removing solution such as an aqueous solution.
13, 115, nickel thin film 117, nickel film 118
The laminate of is peeled from the base material 111 to obtain an orifice plate as shown in FIG.

Therefore, as described above, in order to manufacture the orifice plate of the printing head proposed by the present inventors, the manufacturing cannot be performed only by the plating process, which is complicated, and the sputtering or vapor deposition is required. Since an expensive device such as a device is required, the manufacturing cost becomes high.

Further, in order to manufacture the above-mentioned orifice plate, it is necessary to perform electroplating and formation of a resist pattern several times, which is complicated and the manufacturing time becomes long, resulting in poor productivity. Not good.

Furthermore, in order to manufacture the above orifice plate, electroplating is performed several times, and in the above orifice plate, the positioning error of the hole portion is likely to be large, and the liquid discharge amount becomes uneven. Printing accuracy may vary.

Therefore, the present invention has been proposed in view of the conventional circumstances, and it is possible to perform printing easily, with good productivity, uniform discharge amount of liquid, and good printing accuracy. An object of the present invention is to provide an orifice plate having:

[0027]

In order to achieve the above-mentioned object, the inventors of the present invention have conducted extensive studies and as a result, as a result, at least one of the holes for ink or diluting liquid formed in the orifice plate has an orifice. If it is formed obliquely with respect to the thickness direction of the plate, it becomes possible to easily form the holes by irradiation with a laser or the like,
The orifice plate can be easily manufactured, and since there is no need for alignment between the layers as in the conventional case, the holes that will serve as nozzles can be formed with good precision, and the liquid discharge amount can be made uniform. Found out.

That is, the present invention has a pair of through holes provided so as to penetrate from one surface of the plate to the other surface thereof, and the opening presented on one surface of the through hole serves as the liquid supply port. In the orifice plate in which the opening presented on the other surface is the liquid discharge port, at least one through hole is formed obliquely with respect to the thickness direction of the orifice plate.

Further, according to the present invention, the plate is provided so as to penetrate from one surface of the plate to the other surface thereof, and the opening provided on the one surface is a liquid supply port, and the opening provided on the other surface is a liquid discharge port. In the orifice plate in which a pair of through holes including the first through hole and the second through hole are regularly arranged in a predetermined array direction, at least one through hole of the pair of through holes is an orifice. The plate is formed obliquely with respect to the thickness direction of the plate, and the first through holes and the second through holes are arranged adjacent to each other in a predetermined arrangement direction. It is a thing.

At this time, it is preferable that the slanted through holes are inclined by 5 ° or more with respect to the thickness direction of the orifice plate.

Further, in the orifice plate of the present invention, one of the pair of through holes is formed as a first through hole that is formed obliquely with respect to the thickness direction of the orifice plate, and the other through hole is formed. The through hole may be formed as a second through hole formed in parallel to the thickness direction of the orifice plate.

Further, in the orifice plate of the present invention, both the pair of through holes may be formed obliquely with respect to the thickness direction of the orifice plate.

In the orifice plate of the present invention, it is preferable that the cross-sectional area of the pair of through holes be smaller from the liquid supply port side toward the liquid discharge port side.

Further, in the orifice plate of the present invention, it is preferable that one of the pair of through holes is a nozzle for ink and the other through hole is a nozzle for diluting liquid.

Furthermore, in the orifice plate of the present invention, it is preferable that the shortest distance between the pair of through holes becomes smaller as it approaches the liquid ejection port.

In the orifice plate in which the pair of through-holes are regularly arranged in a predetermined arrangement direction, the shortest distance between the pair of through-holes is one of the pair of through-holes and the predetermined direction. It is preferable that the distance is smaller than the distance from one of the other pair of through holes adjacent to each other.

Further, the pair of through holes are preferably formed by laser processing, and the plate may be made of one kind of organic material, inorganic material and metal material.

[0038]

In the orifice plate of the present invention, the orifice plate is provided so as to penetrate from one surface of the plate to the other surface, the opening provided on one surface serves as the liquid supply port, and the opening provided on the other surface serves as the liquid discharge port. At least one through hole of the pair of through holes that is the outlet is formed obliquely with respect to the thickness direction of the orifice plate, so that the above pair of through holes are formed by irradiation with a laser or the like. Moreover, since the through holes are formed by irradiation with a laser or the like, the conventional alignment of each layer is not necessary.

[0039]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings.

In this embodiment, the ink is placed on the fixed amount side and the diluting liquid is placed on the ejection side, and the ink solution which is a mixed liquid of these is ejected toward the recording paper or the like.
An example of an orifice plate used in a so-called carrier jet printer device will be described.

Example 1 The orifice plate of this example, as shown in FIG.
The orifice plate 11 has a pair of through holes 1 and 2 penetrating from one surface 11a of the orifice plate 11 to the other surface 11b, and the opening presented on one of the main surfaces 11a of the through holes 1 and 2 supplies the liquid. The openings 1a and 2a are formed on the other main surface 11b, and the liquid ejection openings 1b and 2b are formed on the other main surface 11b.

Then, the orifice plate 1 of this embodiment
1, the through hole 2 on one side is the orifice plate 1
The first through hole 1 is formed obliquely with an inclination of 5 ° or more with respect to the thickness direction, and the other through hole 1 is formed parallel to the thickness direction of the orifice plate 11. Hereinafter, one through hole 2 will be referred to as a first through hole 2, and the other through hole 1
Is referred to as a second through hole 1. Further, as the first through hole 2 approaches the liquid ejection port 2b, it approaches the liquid ejection port 1b of the second through hole 1.

Further, in the orifice plate of this embodiment, the first through hole 2 is a nozzle for ink and the second through hole 1 is a nozzle for diluting liquid.

Furthermore, in the orifice plate 11 of this embodiment, as shown in FIGS.
The cross-sectional areas of the two through holes 2 and 1 decrease from the liquid supply ports 1a and 2a side toward the liquid discharge ports 1b and 2b side. That is, the liquid supply port 2 of the first and second through holes 2 and 1
a, S2 is the cross-sectional area of 1a side each _a, and S1 _a, a liquid discharge port 2b, respectively S2 is the cross-sectional area of the 1b side _b, S1
_{When b} is set, the relationship of S2 _b <S2 _a and S1 _b <S1 _a is established.

In the orifice plate of this embodiment, the cross-sectional area S1 _b of the second through hole 1 on the liquid ejection port 1b side is 0.04 mm ² or less, and the liquid ejection port of the first through hole 2 is set. 2b side cross-sectional area S2 _b
It is 1/3 of _b . This is because the flow path resistance of the liquid in the first through hole 2 is increased and the control of the size of the ejected droplet is improved.

The cross-sectional area S1 _b is 50 μm ² to
Range of 0.04 mm ² , further 100 μm ^{2 to} 0.0
The range is preferably 1 mm ² . If it is larger than the above range, it is difficult to secure the minimum resolution required for the printer device, and if it is smaller than the above range, ejection becomes difficult. In addition, S1 _b is 0.04 mm ²
The resolution is about 75 dpi and 0.01 m
The resolution at m ² is about 200 dpi.

Further, the ratio (S2 _b / S1 _b ) of the cross-sectional areas S1 _b and S2 _b is 5/10000 ≦ S2 _b / S1.
_b ≦ 10, further 5 or less, further 1/100 ≦ S2
_b / S1 _b ≦ 5, more preferably 1/100 ≦ S2 _b /
It is preferable that S1 _b ≦ 1/2. Cross-sectional area ratio is 1
If it is larger than 0, the ink spreads around the through holes, and the printing accuracy is reduced. If the ratio of the cross-sectional areas is smaller than 5 / 10,000, the amount that can be quantified at one time is too small. Then, by narrowing the range of the ratio of the cross-sectional areas as described above, it becomes possible to quantify the ink with high accuracy and to lower the minimum density of dots to be formed.

Further, in the orifice plate of the present embodiment, the shortest distance D between the liquid ejection ports 2b, 1b of the first through hole 2 and the second through hole 1 is 1 / 10√S1 _b ≤D≤5.
The range is √S1 _b . When the shortest distance D is larger than the above range, the ink quantitative response is not good, and when it is smaller than the above range, natural mixing becomes difficult.

Further, the thickness of the orifice plate of the present embodiment is set to about 50 μm in order to stabilize the flight direction of the droplet and to withstand the increased pressure of the liquid. As will be described later in the manufacturing method, when the through hole is formed by irradiation with an energy beam such as a laser, the thickness is preferably about 15 to 100 μm.

Next, a printing head using the orifice plate of this embodiment will be shown. The printing head is shown in FIG.
As shown in FIG. 5, a box-shaped ink reservoir 16 filled with ink 6 is arranged inside the first through hole 2 of the orifice plate 11 of the present embodiment on the liquid supply port 2a side, and the second through hole is formed. It corresponds to a carrier jet printer apparatus in which a box-shaped diluent reservoir 15 filled with the diluent 5 is arranged on the side of the liquid supply port 1a of No. 1. The heating element 3 is disposed on the bottom surface 15a of the diluting liquid reservoir 15,
The heating element 4 is arranged on the bottom surface 16 a of the ink reservoir 16.

Therefore, when printing is performed by the printing head, first, as shown in FIG. 3, the ink 6 filled in the ink reservoir 16 is filled in the first through hole 2 by a capillary phenomenon. Then, the first meniscus M ₂ is formed, and the diluting liquid 5 filled in the diluting liquid reservoir 15 is filled in the second through hole 1 by the capillary phenomenon to form the second meniscus M ₁ .

Next, as shown in FIG. 4, the ink reservoir 1
A voltage pulse is applied to the heat generating element 4 disposed on the bottom surface 16a of the nozzle 6 to heat the ink 6 inside the ink pool 16 to generate bubbles B ₂ at a position corresponding to the heat generating element 4.

Then, as shown in FIG. 4, the pressure inside the ink reservoir 16 increases, and the pressure inside the first through hole 2 increases accordingly, and the ink 6 inside the through hole 2 is discharged from the liquid ejection port. It is extruded from 2b and adheres in drops on the main surface 11b of the orifice plate 11. At this time, the amount of the ink 6 pushed out is controlled by the voltage value or pulse width of the voltage pulse supplied to the heating element 4.

Subsequently, as shown in FIG. 5, a voltage pulse is applied to the heating element 3 arranged on the bottom surface 15 a of the diluting liquid reservoir 15 to heat the diluting liquid 5 in the diluting liquid reservoir 15 to cause the heating element 3 to heat. Bubbles B ₁ are generated at the corresponding positions.

Then, as shown in FIG. 5, the pressure inside the diluting liquid reservoir 15 increases, and the pressure inside the second through hole 1 also increases accordingly, and the diluting liquid 5 inside the through hole 1 becomes liquid. A droplet-shaped ink solution 7 is formed by being extruded from the ejection port 1b and integrated with the ink 6 that is attached in a droplet shape on the main surface 11b of the orifice plate 11.

At this time or before the supply of the voltage pulse to the heating element 4 is stopped, the bubble B ₂
Disappears rapidly, and the ink reservoir 16 and the first through hole 2
The internal pressure inside drops. As a result, as shown in FIG. 6, the ink solution 7 and the ink 6 are torn off, the ink 6 is drawn into the first through hole 2, and the meniscus M ₂ is formed again. The ink solution 7 grows in a columnar shape.

Next, the supply of the voltage pulse to the heating element 3 is stopped. Then, as shown in FIG. 7, the bubble B ₁ rapidly disappears, the internal pressure in the diluting liquid reservoir 15 and the second through hole 1 is reduced, and the diluting liquid 5 is in the second through hole 1. Since the ink solution 7 is drawn in, a constriction 7a occurs on the liquid ejection port 1b side.

As the bubble B ₁ is further reduced, FIG.
As shown in FIG. 9, the ink solution 7 starts to fly, and as shown in FIG. 9, the ink solution 7 jumps out into the air. And
The ink solution 7 adheres to the recording medium and is printed.

At this time, the concentration of the ink solution 7 which is a mixture of the ink and the diluent is determined by the amount of the ink 6 pushed out from the first through hole 2, and the amplitude and pulse width of the voltage pulse applied to the heating element 4. The amount of ink 6 is quantified and controlled by. When the amplitude or pulse width is increased, the amount of ink 6 increases, and when the amplitude or pulse width is decreased, the amount of ink 6 decreases, the concentration of ink solution 7 changes, and the concentration of dots formed changes. The amplitude of the voltage pulse and the variable range of the pulse width may be experimentally set to optimum values.

The above-described series of operations in the printing head is an example, and the timing and state of each operation, for example, the shape of the ink solution, the filling operation, etc., are structural elements such as the size of the liquid ejection port, the ink, and the like. It changes depending on physical factors such as the viscosity and surface tension of the diluent, and operating conditions such as the discharge frequency.

In the above embodiment, the example of the printing head using the heating element is shown, but the orifice plate of this embodiment can also be used in the printing head using the piezo element.

As such a printing head, for example, as shown in FIG. 10, the ink 6 is filled inside the first through hole 2 of the orifice plate 11 of this embodiment on the liquid supply port 2a side. A box-shaped ink reservoir 26 is provided, and a box-shaped diluent reservoir 25 filled with the diluent 5 is disposed on the liquid supply port 1a side of the second through hole 1. Then, the piezo element 23 is arranged on the side surface 25a of the diluent pool 25, and the ink pool 26 is formed.
The piezo element 24 is disposed on the side surface 26a of the.

Printing is performed also in the above printing head in the same manner as the above printing head. However, in the printing head, the extrusion of the diluting liquid 5 and the ink 6 supplies a voltage pulse to the piezo elements 23 and 24 to deform the piezo elements 23 and 24, whereby the ink reservoir 2
6. Pressure is applied to the diluent pool 25, and the diluent 5 and the ink 6 pushed out form an ink solution 7.

Further, in the above embodiment, the first through hole formed obliquely with respect to the thickness direction of the orifice plate is used as an ink nozzle, and is formed parallel to the thickness direction of the orifice plate. The example of the orifice plate used in the carrier jet printer device in which the second through hole is the nozzle for the diluting liquid has been described, but the present invention uses the first through hole as the nozzle for the diluting liquid, and the second through hole is used. It is also applicable to an orifice plate used in an ink jet printer device in which a through hole is used as an ink nozzle. In this case, the gradation is expressed by changing the amount of the diluent.

Further, in the above embodiment, one of the pair of through holes of the orifice plate is formed obliquely with respect to the thickness direction of the orifice plate, and the other is formed parallel with the thickness direction of the orifice plate. However, the same effect can be obtained by forming both the pair of through holes obliquely with respect to the thickness direction of the orifice plate.

Next, some examples of the method of manufacturing the orifice plate of this embodiment will be described. In the first manufacturing method, first, as shown in FIG. 11, the plate 3 is formed from the one main surface 31a side of the plate 31 constituting the orifice plate.
An energy beam such as a laser shown by an arrow M ₁ in the drawing is irradiated in the thickness direction of ₁ . Examples of the laser include an excimer laser, a carbon dioxide gas laser, a YAG laser and the like.

Then, as shown in FIG. 12, the plate 3
In the thickness direction of 1, the main surface 31 opposite to the one main surface 31a side
A second through hole 32 is formed which penetrates to the b side and has an opening 32a on the one main surface 31a side as a liquid supply port and an opening 32b on the opposite main surface 31b side as a liquid discharge port.

[0068] At this time, in the second through-holes 32, from being formed by irradiation of laser or the like, towards the cross-sectional area S32 _a in the one main surface 31a on the side where the energy beam is incident opposed greater than the cross-sectional area S32 _b along the principal face 31b, holds the relationship S32 _b <S32 _a.

Next, as shown in FIG. 12, the plate 31
An energy beam such as a laser shown by an arrow M ₂ in the drawing is irradiated from the one main surface 31a side in a direction oblique to the thickness direction of the plate 31. At this time, the irradiation direction of the energy beam is set to be inclined by 5 ° or more with respect to the thickness direction of the plate 31, and the irradiation direction of the energy beam is changed from the one main surface 31a side to the main surface 31b side by the second direction. The direction of approaching the opening 32b which is the liquid discharge port of the through hole 32 of FIG. Examples of the laser include excimer laser, carbon dioxide gas laser, YAG laser and the like.

Then, as shown in FIG. 13, the plate 3
In the thickness direction of 1, the main surface 31 opposite to the one main surface 31a side
The first through hole 33 is formed so that the opening 33a on the one main surface 31a side serves as a liquid supply port and the opening 33b on the opposite main surface 31b side serves as a liquid discharge port. Is completed.

At this time, since the first through hole 33 is formed by irradiation with a laser or the like, the cross-sectional area S33 _a in the one main surface 31a on the side where the energy beam is incident is opposed to each other. It becomes larger than the cross-sectional area S33 _b on the main surface 31b, and the relationship of S33 _b <S33 _a is established. Further, the first through hole 33 is formed as a through hole that approaches the opening 32b, which is the liquid ejection port, of the second through hole 33, as it approaches the opening 33b, which is the liquid ejection port.

In the second manufacturing method, after the second through hole is formed as in the first manufacturing method, the plate 31 is tilted at a predetermined angle as shown in FIG.
2 is irradiated with the energy beam shown by an arrow M ₃ in the same direction as the energy beam irradiated to form 2. Since the plate 31 is tilted as described above, the energy beam is emitted from the one main surface 31a side in an oblique direction with respect to the thickness direction of the plate 31.

At this time, the plate 31 is tilted so that the irradiation direction of the energy beam is inclined 5 ° or more with respect to the thickness direction of the plate 31, and the irradiation direction of the energy beam is from the main surface 31a side to the main surface 31a. The direction toward the 31 b side is closer to the opening 32 b which is the liquid ejection port of the second through hole 32. As a result, the first through hole is formed similarly to the first manufacturing method, and the orifice plate is completed.

Further, in the third manufacturing method, as shown in FIG.
As shown in FIG.
The energy beam used in the manufacturing method is irradiated in the directions indicated by arrows M ₁ and M ₂ . As a result, the first
Two through holes are simultaneously formed, and the orifice plate is completed.

As described above, the orifice plate of this embodiment is easily formed by irradiating the plate with a laser or the like, and does not require expensive equipment such as sputtering and vapor deposition equipment as in the conventional case. The manufacturing cost can be reduced, the time required for manufacturing can be shortened, and the productivity can be improved.

Further, since the orifice plate of this embodiment is manufactured only by laser irradiation, it is not necessary to align the holes as in the conventional case, and the through holes can be formed with good precision. In the orifice plate of this embodiment, the liquid discharge amount becomes uniform, and the printing accuracy becomes good.

Furthermore, in the orifice plate of this embodiment, since the ink and the diluting liquid are mixed to change the concentration of the ink solution to express the halftone, the resolution is also improved.

Example 2 In this example, an example of a multi-type orifice plate will be described. As shown in FIG. 16, the orifice plate of the present embodiment is provided so as to penetrate from one surface of the orifice plate 51 to the other surface, and the opening presented on one surface serves as the liquid supply port and the other surface. A pair of through holes 41, 42 similar to the pair of through holes described in the first embodiment in which the opening shown in FIG. 2 is a liquid ejection port are regularly arranged in a predetermined arrangement direction shown by an arrow P in the figure. It is a thing.

Then, the orifice plate 5 of this embodiment
Also in the first embodiment, one through hole 42 is formed obliquely with an inclination of 5 ° or more with respect to the thickness direction of the orifice plate 51, and the other through hole 41 is formed in the orifice plate 51.
Is formed parallel to the thickness direction of the. In addition, hereinafter, the one through hole 42 is referred to as a first through hole 42, and the other through hole 41 is referred to as a second through hole 41.

Further, as the first through hole 42 approaches the liquid ejection port, it approaches the liquid ejection port of the second through hole 41. Furthermore, in the orifice plate of this embodiment, the first and second through holes 42,
The cross-sectional area and spacing of 41, the thickness of the orifice plate, etc. are the same as those of the orifice plate of the first embodiment.

Also in the orifice plate of this embodiment, the first through hole 42 is used as an ink nozzle, and the second through hole 41 is used as a diluent liquid nozzle.

In the orifice plate of this embodiment, the first through holes 42 and the second through holes 41 are arranged so as to be adjacent to each other in the predetermined arrangement direction shown by the arrow P in the drawing. In addition, the first through holes 42 and the second through holes 41 are connected to each other on the liquid supply port side by a connecting portion 43 shown by a broken line in the drawing.

At this time, in the present embodiment, the first and second
The shortest distance D ₁ between the through holes 42, 41 is smaller than the distance D ₂ between the first through hole 42 and another first through hole 42 adjacent thereto in the predetermined direction, for example. There is.

Further, in the orifice plate of this embodiment, the through hole row 44 in which the pair of first and second through holes 42, 41 are regularly arranged in the predetermined direction is indicated by the arrow m in the figure.
A plurality of rows are arranged in the print head traveling direction indicated by.

In the orifice plate of this embodiment, the arrangement positions of the plurality of through hole rows 44 in the print head traveling direction m are slightly shifted, that is, the second row is different from the first through hole row 44, for example. The resolution may be improved by shifting the array position by shifting the eye through-hole array 44 downward in the drawing.

The orifice plate of this embodiment can be incorporated in the printing head similarly to the orifice plate of the first embodiment.

Also, in the above embodiment, an example of the orifice plate used in the carrier jet printer device has been described, but in the present invention, the diluent is placed on the fixed amount side,
It is also applicable to an orifice plate used in a so-called inkjet printer device in which ink is arranged on the ejection side and an ink solution which is a mixed liquid of these is ejected toward recording paper. In this case, the gradation is expressed by quantitatively changing the amount of the diluent.

Further, also in the above embodiment, one of the pair of through holes of the orifice plate is formed obliquely with respect to the thickness direction of the orifice plate, and the other is formed parallel with the thickness direction of the orifice plate. However, the same effect can be obtained by forming both the pair of through holes obliquely with respect to the thickness direction of the orifice plate.

When the orifice plate of this embodiment is manufactured, it may be manufactured in accordance with the method of manufacturing the orifice plate of Embodiment 1, and a plurality of pairs of through holes may be formed.

At this time, a through hole array is formed by preparing a mask having holes corresponding to the above through hole array, arranging the mask on a plate and irradiating it with laser light. A plurality of through holes can be formed at once.
Further, by preparing a mask in which holes corresponding to a plurality of through hole rows are prepared and arranging this on a plate to irradiate laser light, a plurality of through hole rows can be formed at one time. It is possible.

When a mask having a predetermined hole portion is used as described above, it is possible to form a plurality of through holes at one time. Therefore, when forming a plurality of through holes one by one. It is possible to significantly reduce the manufacturing time as compared with, and it is possible to significantly improve the productivity.

Further, since a plurality of through holes are formed at one time, it is possible to suppress the positional deviation between the through holes, and the plurality of through holes can be formed with good positional accuracy.

Therefore, also in the orifice plate of this embodiment, the plate can be easily formed by irradiating the plate with a laser or the like, and a costly device such as a sputtering or vapor deposition device as in the prior art is not required and the manufacturing cost can be reduced. Can be made inexpensive, the time required for production can be shortened,
Productivity becomes good. In particular, in the multi-type orifice plate as in the present embodiment, the manufacturing cost and the time required for manufacturing are important problems, but the present invention solves these problems and its industrial value is very high.

Further, since the orifice plate of this embodiment is manufactured only by laser irradiation, it is not necessary to align the holes as in the conventional case, and the through holes can be formed with good precision. In the orifice plate of this embodiment, the liquid discharge amount becomes uniform, and the printing accuracy becomes good.

Furthermore, in the orifice plate of this embodiment, since the ink and the diluting liquid are mixed to change the concentration of the ink solution to express the halftone, the resolution is also improved.

[0096]

As is apparent from the above description, in the orifice plate of the present invention, the liquid supply port is formed by penetrating from one surface of the plate to the other surface. And at least one through hole of the pair of through holes in which the opening presented on the other surface is the liquid discharge port is formed obliquely with respect to the thickness direction of the orifice plate. It is formed by irradiation with a laser or the like.

Therefore, the orifice plate can be easily manufactured, the manufacturing cost can be reduced, the time required for manufacturing can be shortened, and the productivity can be improved.

When the present invention is applied to a multi-type orifice plate, its manufacturing cost can be greatly reduced and the time required for its production can be greatly shortened, and its industrial value is extremely high. Very expensive.

Furthermore, since the through holes are formed by irradiation with a laser or the like, it is not necessary to align each layer as in the conventional case, and the through holes can be formed with good accuracy, so that the amount of liquid discharged from the orifice plate is uniform. Therefore, the printing accuracy becomes good.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of an orifice plate to which the present invention is applied.

FIG. 2 is a plan view showing an embodiment of an orifice plate to which the present invention is applied.

FIG. 3 is a schematic view sequentially showing an operation of an example of a printing head using an orifice plate to which the present invention is applied, showing a state in which a meniscus is formed on the orifice plate.

FIG. 4 is a schematic view showing, in sequence, the operation of an example of a printing head using an orifice plate to which the present invention has been applied, showing a state in which ink in a through hole is pushed out.

FIG. 5 is a schematic view showing in sequence the operation of an example of a printing head using an orifice plate to which the present invention is applied, showing a state in which a diluent in a through hole is extruded to form an ink solution.

FIG. 6 is a schematic view showing, in sequence, the operation of an example of a printing head using an orifice plate to which the present invention has been applied, and showing a state in which an ink solution has grown in a columnar shape.

FIG. 7 is a schematic view showing in sequence the operation of an example of a printing head using an orifice plate to which the present invention is applied, and showing a state in which a columnar ink solution is constricted.

FIG. 8 is a schematic view showing in sequence the operation of an example of a printing head using an orifice plate to which the present invention has been applied, showing a state in which the ink solution has started to fly.

FIG. 9 is a schematic view showing in sequence the operation of an example of a printing head using an orifice plate to which the present invention has been applied, and is a schematic view showing a state in which an ink solution has jumped out into the air.

FIG. 10 is a schematic view showing another example of a printing head using an orifice plate to which the present invention is applied.

FIG. 11 is a schematic view showing an example of a manufacturing method for manufacturing an orifice plate to which the present invention is applied, in the order of steps, showing a state in which the plate is irradiated with an energy beam to form a second through hole. Is.

FIG. 12 is a schematic view showing an example of a manufacturing method for manufacturing an orifice plate to which the present invention is applied, in the order of steps, showing a state in which an energy beam is irradiated to form a first through hole in the plate. Is.

FIG. 13 shows an example of a manufacturing method for manufacturing an orifice plate to which the present invention is applied, in the order of steps, and is a schematic view showing a state in which first and second through holes are formed in the plate.

FIG. 14 is a schematic view showing another example of the manufacturing method for manufacturing an orifice plate to which the present invention is applied, showing a state in which an energy beam is irradiated to form a first through hole in the plate. Is.

FIG. 15 shows still another example of the manufacturing method for manufacturing the orifice plate to which the present invention is applied, showing a state in which the plate is irradiated with an energy beam to form the first and second through holes. It is a schematic diagram which shows.

FIG. 16 is a plan view schematically showing another embodiment of the orifice plate to which the present invention is applied.

FIG. 17 is a sectional view showing a conventional orifice plate.

FIG. 18 is a cross-sectional view showing a method of manufacturing a conventional orifice plate in the order of steps and showing steps of forming a resist pattern on a base material.

FIG. 19 is a cross-sectional view showing a method of manufacturing a conventional orifice plate in the order of steps and showing steps of forming a nickel film on a base material.

FIG. 20 is a cross-sectional view showing a method of manufacturing a conventional orifice plate in the order of steps and showing steps of forming a resist pattern on a nickel film.

FIG. 21 is a cross-sectional view showing a conventional method of manufacturing an orifice plate in the order of steps, showing steps of forming a nickel film on a nickel film.

FIG. 22 is a cross-sectional view showing a method of manufacturing a conventional orifice plate in the order of steps and showing steps of forming a resist pattern on a resist pattern.

FIG. 23 is a cross-sectional view showing a method of manufacturing a conventional orifice plate in the order of steps, showing a step of forming a nickel thin film on a nickel film.

FIG. 24 is a cross-sectional view showing a method of manufacturing a conventional orifice plate in the order of steps and showing steps of forming a nickel film on a nickel thin film.

[Explanation of symbols]

1,41 Second through hole 1a, 2a Liquid supply port 1b, 2b Liquid discharge port 2,42 First through hole 11,51 Orifice plate 11a One surface 11b Other surface D, D ₁ Shortest distance D ₂ interval

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takaaki Murakami 6-735 Kita-Shinagawa, Shinagawa-ku, Tokyo Sony Corporation

Claims (21)

[Claims] 1. A plate having a pair of through-holes penetrating from one surface of the plate to the other surface, the opening present on one surface of the through-hole being a liquid supply port, and the other surface. In the orifice plate in which the opening shown in FIG. 3 is a liquid discharge port, at least one through hole is formed obliquely with respect to the thickness direction of the orifice plate. 2. The orifice plate according to claim 1, wherein the oblique through-hole is inclined by 5 ° or more with respect to the thickness direction of the orifice plate. 3. One of the through holes is formed as a first through hole that is formed obliquely with respect to the thickness direction of the orifice plate, and the other through hole is formed parallel to the thickness direction of the orifice plate. The orifice plate according to claim 1, wherein the orifice plate is formed as a second through hole that is formed. 4. The orifice plate according to claim 1, wherein both of the pair of through holes are formed obliquely with respect to the thickness direction of the orifice plate. 5. The orifice plate according to claim 1, wherein a cross-sectional area of the pair of through holes is reduced from the liquid supply port side toward the liquid discharge port side. 6. The orifice plate according to claim 1, wherein one of the pair of through holes is a nozzle for ink and the other through hole is a nozzle for diluting liquid. 7. The orifice plate according to claim 3, wherein the first through hole approaches the liquid discharge port of the second through hole as the first through hole approaches the liquid discharge port. 8. The orifice plate according to claim 4, wherein the pair of through holes approach each other as they approach the liquid ejection port. 9. The orifice plate according to claim 1, wherein the pair of through holes are formed by laser processing. 10. The orifice plate according to claim 1, wherein the plate is made of one of an organic material, an inorganic material and a metal material. 11. A plate which is provided so as to penetrate from one surface of a plate to the other surface thereof, the opening provided on one surface of which is a liquid supply port, and the opening presented on the other surface of which is a liquid ejection port. In an orifice plate in which a pair of through holes consisting of a first through hole and a second through hole are regularly arranged in a predetermined arrangement direction, at least one through hole of the pair of through holes has a thickness of the orifice plate. It is formed diagonally to the direction,
And in the predetermined arrangement direction, the first through holes, the second through holes,
The orifice plate is characterized in that the through holes of are arranged adjacent to each other. 12. The orifice plate according to claim 11, wherein the inclined through hole is inclined by 5 ° or more with respect to the thickness direction of the orifice plate. 13. One of the through holes is formed as a first through hole that is formed obliquely with respect to the thickness direction of the orifice plate, and the other through hole is formed parallel to the thickness direction of the orifice plate. The orifice plate according to claim 11, wherein the orifice plate is formed as a second through hole that is formed. 14. The orifice plate according to claim 11, wherein both of the pair of through holes are formed obliquely with respect to the thickness direction of the orifice plate. 15. The orifice plate according to claim 11, wherein a cross-sectional area of the pair of through holes decreases from the liquid supply port side toward the liquid discharge port side. 16. The orifice plate according to claim 11, wherein one of the pair of through holes is a nozzle for ink and the other through hole is a nozzle for diluting liquid. 17. The shortest distance between the pair of through holes is smaller than the distance between one of the pair of through holes and one of the other pair of through holes adjacent thereto in the predetermined direction. Item 11. The orifice plate according to item 11. 18. The orifice plate according to claim 13, wherein the orifice plate approaches the liquid discharge port of the second through hole as the first through hole approaches the liquid discharge port. 19. The pair of through holes approach each other as they approach the liquid ejection port.
Orifice plate described. 20. The orifice plate according to claim 11, wherein the pair of through holes are formed by laser processing. 21. The plate is made of one of an organic material, an inorganic material, and a metallic material.
Orifice plate described.