JPH08265897A - Piezoelectric transducer - Google Patents
Piezoelectric transducerInfo
- Publication number
- JPH08265897A JPH08265897A JP8079575A JP7957596A JPH08265897A JP H08265897 A JPH08265897 A JP H08265897A JP 8079575 A JP8079575 A JP 8079575A JP 7957596 A JP7957596 A JP 7957596A JP H08265897 A JPH08265897 A JP H08265897A
- Authority
- JP
- Japan
- Prior art keywords
- transducer
- ppf
- piezoelectric
- film
- piezoelectric transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002390 adhesive tape Substances 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000005096 rolling process Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明はトランスデューサ
(変換器)、特にポリマフィルム状圧電材料を使用する
音響波(アコースティック)圧電型トランスデューサに
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transducer (transducer), and more particularly, to an acoustic wave (acoustic) piezoelectric transducer using a polymer film piezoelectric material.
【0002】[0002]
【従来の技術とその課題】圧電ポリマフィルム(PP
F)は音響波又は超音波信号を空中へ又は空中から送信
及び受信する伝送媒体としても使用可能であることが知
られている。多くの場合、PPFは薄膜状であり、被膜
電極に印加する電圧を変化すると長さ方向の寸法変化を
生じる(ラウドスピーカーと類似のトランスミッタ、即
ち送信機となる)。これにより実質的に曲率半径が変化
して弾性波エネルギーを空中に放射する。また、これと
は逆に(マイクロホンとしては)、音圧を変化すると薄
膜の曲率半径が変化して、対応する電圧変化を出力す
る。2. Description of the Related Art Piezoelectric polymer film (PP
It is known that F) can also be used as a transmission medium for transmitting and receiving acoustic or ultrasonic signals to and from the air. In many cases, the PPF is in the form of a thin film, and changes in the voltage applied to the coated electrodes cause a dimensional change in the length direction (a transmitter similar to a loudspeaker). This substantially changes the radius of curvature and radiates elastic wave energy into the air. In contrast to this (as a microphone), when the sound pressure changes, the radius of curvature of the thin film changes, and a corresponding voltage change is output.
【0003】従来のデバイスも仲々良好な動作をする
が、従来のデバイスの動作に制約があった。特に、筒状
空洞又はダクト内で使用可能な改良されたデバイスを提
供することを目的とする。Although the conventional device also works well, the operation of the conventional device is limited. In particular, it is an object to provide an improved device that can be used in a tubular cavity or duct.
【0004】[0004]
【課題解決の為の手段】本発明の音響(アコースティッ
ク)デバイス(即ち圧電型トランスデューサ)は単軸方
向(ユニアクシャル オリエント)PPFの筒状体であ
って、その加工軸(マシンアクシス)は筒状体の円周方
向と略一致する。これにより、その送信(トランスミッ
ション)モードにおいては、電気信号を電極に印加する
と、筒状体の一端から音響信号を発生する。他方、受信
(レセプション)モードにおいては、筒状体の一端に到
達する入射音響信号は被膜電極間に対応する電気応答
(レスポンス)を生じる。An acoustic (acoustic) device (that is, a piezoelectric transducer) of the present invention is a uniaxially oriented (uniaxial orientation) PPF tubular body, and its processing axis (machine axis) is tubular. Substantially coincides with the circumferential direction of the body. Thus, in the transmission mode, when an electric signal is applied to the electrodes, an acoustic signal is generated from one end of the tubular body. On the other hand, in the reception mode, the incident acoustic signal reaching one end of the tubular body produces a corresponding electrical response between the coated electrodes.
【0005】本発明の音響デバイスはコンプライアント
(弾性)材料の筒状体の外周にPPFをうず巻き状に巻
回し、その主圧電感度を外周方向と略一致させることに
より形成される。これにより、印加電圧の変化は筒状体
の外径寸法の変化を生じる。自由空間中に支持すると、
この寸法変化は筒状体から外方へ音響波を放射すること
となる。しかし、好ましくは、このトランスデューサは
筒状空洞又はダクト内に取付けられ、筒状の放射波は抑
圧され主放射方向は筒又はダクトの軸方向と一致する。
筒状の場合と同様に、この場合にもある程度の共振現象
が観測される。The acoustic device of the present invention is formed by winding a PPF in a spiral shape on the outer periphery of a cylindrical body made of a compliant (elastic) material and making the main piezoelectric sensitivity thereof substantially coincide with the outer peripheral direction. As a result, a change in applied voltage causes a change in the outer diameter of the cylindrical body. If you support it in free space,
This dimensional change radiates an acoustic wave outward from the tubular body. However, preferably, the transducer is mounted in a cylindrical cavity or duct, the cylindrical radiating wave is suppressed and the main radiation direction coincides with the axial direction of the cylinder or duct.
Similar to the cylindrical case, some resonance phenomenon is observed in this case as well.
【0006】好適実施例にあっては、筒状組立体を組立
前にPPFの一側全面に接着テープで所定位置に取付け
られる。この接着テープは典型的にはポリエステル系フ
ィルムであり、一側にアクリル系接着剤が塗布されたも
のである。PPF及び接着テープの機械的特性により、
組立体のコンプライアンスは高く、組立体内の機械的共
振の周波数特性はシャープでない。このことは、特定単
一周波数に限定されず広周波数帯域での動作を可能にす
ることを意味する。In the preferred embodiment, the tubular assembly is mounted in place on one side of the PPF with adhesive tape before assembly. This adhesive tape is typically a polyester film, one side of which is coated with an acrylic adhesive. Due to the mechanical properties of PPF and adhesive tape,
The assembly is highly compliant and the mechanical resonance frequency characteristics in the assembly are not sharp. This means that it is possible to operate in a wide frequency band without being limited to a specific single frequency.
【0007】本発明のデバイスは膜厚約28μm且つ大
きさ約15mm×40mmのPPFを使用するのが好ま
しい。そのPPFの一面に両面接着テープを取付け、P
PFを4mmの芯(マンドレル)の外周に巻回すると、
その最終外径は4.7mmオーダーであり、長さは15
mmである。PPF上に電極パターンを被着形成してい
る。これは例えば適当な導電性インクを用いてスクリー
ン印刷技法により形成し、これにより好ましくは圧着
(かしめ)コネクタの為のコンタクトとする。この薄膜
を介して短絡を生じることなく斯るコネクタを取付け可
能にする為に、上下リード取付けパッドを変位させた電
極パターンを設計する必要がある。The device of the present invention preferably uses PPF having a film thickness of about 28 μm and a size of about 15 mm × 40 mm. Attach a double-sided adhesive tape to one side of the PPF, and
When the PF is wound around the outer circumference of the 4 mm core (mandrel),
Its final outer diameter is on the order of 4.7 mm and its length is 15
mm. An electrode pattern is deposited on the PPF. This is formed, for example, by a screen-printing technique using a suitable conductive ink, which is preferably a contact for a crimp connector. In order to be able to attach such a connector through this thin film without causing a short circuit, it is necessary to design an electrode pattern in which the upper and lower lead attachment pads are displaced.
【0008】本発明のデバイスにおいては、斯るパッド
は筒状体の後方から、その軸に平行に突出させて、トラ
ンスデューサと直線状に金属コンタクトピンを固定可能
にする。他の実施例においては、パターン状フィルム電
極パッドを筒状体から一方向に突出させるか、直角に曲
げて、例えば金属はと目又はリベットによりプリント基
板に直接成端することを可能にする。勿論他の接続技法
を排除するものではない。In the device of the present invention, such a pad is projected from the rear of the cylindrical body in parallel with its axis so that the metal contact pin can be fixed linearly with the transducer. In other embodiments, the patterned film electrode pads may be projected in one direction from the barrel or bent at right angles to allow metal to be directly terminated to the printed circuit board, for example by eyelets or rivets. Of course, other connection techniques are not excluded.
【0009】[0009]
【発明の実施の形態】以下、本発明の圧電型(音響波)
トランスデューサ(以下単にトランスデューサという)
の好適具体例を添付図を参照して詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION The piezoelectric type (acoustic wave) of the present invention is described below.
Transducer (hereinafter simply referred to as transducer)
A specific example of the above will be described in detail with reference to the accompanying drawings.
【0010】図1は本発明のトランスデューサの展開図
であり、両面に電極12、14がメタライズされた一体
のPPF10を用いる。この電極12、14はトランス
デューサの一側に形成されたコネクタ部12a、14a
を有する。PPF10は図2によく示す如く、両面に接
着層18、20が塗布されたキャリアテープ16を積層
形成する。FIG. 1 is a development view of the transducer of the present invention, which uses an integral PPF 10 in which electrodes 12 and 14 are metallized on both sides. The electrodes 12 and 14 are connector portions 12a and 14a formed on one side of the transducer.
Have. As shown in FIG. 2, the PPF 10 is formed by laminating a carrier tape 16 having adhesive layers 18 and 20 applied on both sides.
【0011】次に、図3及び図4を参照して説明する。
コンタクトピン22が上述したPPF10と両面接着テ
ープ16、18、20の積層体に取付けられ、スクロー
ル状(うず巻き状)にマンドレル24の外周に巻回され
て本発明のトランスデューサを形成する。このPPF1
0は単軸フィルムであって、その主又は機械軸は矢印A
方向にアライメント(整合)される。その結果、図4の
トランスデューサの機械軸は筒状体の外周(又は円周)
方向となる。Next, description will be made with reference to FIGS. 3 and 4.
The contact pins 22 are attached to the above-mentioned laminated body of the PPF 10 and the double-sided adhesive tapes 16, 18, and 20, and are wound around the mandrel 24 in a scroll shape (spiral shape) to form the transducer of the present invention. This PPF1
0 is a uniaxial film, the main or mechanical axis of which is arrow A
It is aligned in the direction. As a result, the mechanical axis of the transducer of Figure 4 is the outer circumference (or circumference) of the tubular body.
Direction.
【0012】図5に断面で示す如く、トランスデューサ
にはプラグ(栓)又はベース26が設けられ、音響波反
射体として作用する。このプラグ又はベース26は放射
又は受信効率を高め、トランスデューサの端部を閉じる
ことにより、開放端の場合に低周波数で生じる定在波に
よる周波数応答特性を変化させる。As shown in cross section in FIG. 5, the transducer is provided with a plug or base 26 which acts as an acoustic wave reflector. The plug or base 26 enhances the radiation or reception efficiency, and by closing the end of the transducer, the frequency response characteristic due to the standing wave generated at a low frequency in the case of the open end is changed.
【0013】更に、必要に応じてこのトランスデューサ
にはノズル30を形成して、音響波がすぐ直前から送信
又は受信されるトランスデューサの直径を徐々に小さく
して、放射又は受信効率を更に高めることも可能であ
る。Further, if necessary, a nozzle 30 may be formed in this transducer to gradually reduce the diameter of the transducer from which the acoustic wave is transmitted or received immediately before, thereby further increasing the radiation or reception efficiency. It is possible.
【0014】図6はカートリッジ32の一部として取付
けられた本発明のトランスデューサの部分断面した斜視
図である。このカートリッジ32は筒状体34に沿って
べース26及び細くなったノズル30を含んでいる。FIG. 6 is a partial cross-sectional perspective view of the transducer of the present invention mounted as part of cartridge 32. The cartridge 32 includes a base 26 and a tapered nozzle 30 along a tubular body 34.
【0015】図7はダクト36内で音(音響波)を伝播
又は検出する為に使用する本発明のトランスデューサを
示す。FIG. 7 illustrates a transducer of the present invention used to propagate or detect sound (acoustic waves) in duct 36.
【0016】音響波を生じるダクト36の材料が導電性
又は半導電性(例えば炭素封入ゴム)であって、音響信
号に関係のない電気信号がトランスデューサにより発生
され又は検出される場合には、この外部シェルに独立し
た電気的接続を設けて不要な電気信号を接地するのが好
ましい。その場合には、外側の被膜電極とダクト36の
内壁間に絶縁体を付加する。例えば図6に示すシェル3
4を使用してもよい。この場合には、内側の圧電フィル
ム電極12、又は14(巻回のし方による)を接地電極
として、トランスデューサの信号電極(12又は14)
の周囲、即ち両側に内外両接地筒状体が形成されるよう
にする。If the material of the duct 36 that produces the acoustic wave is conductive or semi-conductive (eg, carbon-encapsulated rubber), and if an electrical signal unrelated to the acoustic signal is generated or detected by the transducer, then this It is preferable to provide independent electrical connections to the outer shell to ground unwanted electrical signals. In that case, an insulator is added between the outer coated electrode and the inner wall of the duct 36. For example, the shell 3 shown in FIG.
4 may be used. In this case, the inner piezoelectric film electrode 12 or 14 (depending on the winding method) is used as the ground electrode, and the signal electrode (12 or 14) of the transducer is used.
Both the inside and outside grounded cylindrical bodies are formed around, that is, on both sides.
【0017】本発明のトランスデューサを音響信号の送
信に使用することを考えている場合には、単方向性PV
DF(塩化ポリビニリデン)の如きPPF材料は厚さ1
μm当り約30Vの電界強度に耐えるので、好適である
点に留意されたい。好適実施例では厚さ28μmのPV
DFフィルムを使用しているので、駆動印加電圧は84
0V未満でなくてはならない。この駆動電圧レベルの場
合、直径5mmのダクトを1m離れて伝播された後でも
112dB以上の音圧レベルが検知できる。受信モード
の場合には、同様構成のトランスデューサを用いて−8
0dBの感度が得られる。In the case of considering the use of the transducer of the invention for the transmission of acoustic signals, a unidirectional PV
PPF materials such as DF (polyvinylidene chloride) have a thickness of 1
It should be noted that it is suitable because it withstands an electric field strength of about 30 V per μm. In the preferred embodiment, a PV having a thickness of 28 μm
Since the DF film is used, the drive applied voltage is 84
Must be less than 0V. With this drive voltage level, a sound pressure level of 112 dB or more can be detected even after propagating 1 m away from a duct having a diameter of 5 mm. In the receive mode, use a transducer with the same configuration
A sensitivity of 0 dB is obtained.
【0018】上述した例にあっては機械軸がフィルムの
周面方向である。これに代って、機械軸を周面方向から
少しずらせて、主方向成分を周面方向とし、PPFを軸
に対して鋭角のら旋状に巻回してもよい。In the above-mentioned example, the machine axis is in the circumferential direction of the film. Alternatively, the machine axis may be slightly shifted from the circumferential direction, the main direction component may be the circumferential direction, and the PPF may be spirally wound at an acute angle with respect to the axis.
【0019】本発明のトランスデューサは自由空間の短
距離でテストした結果、ある周波数帯、特に2KHZ 乃
至25KHZ で十分良好に動作することが判明してい
る。音は周波数が高くなるにつれて減衰が増加するの
で、高周波の場合には空中をある距離伝播すると受信信
号はこれに応じて減衰することとなる。その為に、斯る
デバイスはできる限り低周波、即ち上記の例にあっては
2KHZ 乃至3KHZ で動作させるのが好ましいことが
理解されよう。The transducer of the present invention is a result of the test at a short distance of free space, it has been found to work well enough in some frequency bands, in particular 2KH Z to 25KH Z. Attenuation of sound increases as the frequency increases, so that in the case of a high frequency, when propagating a certain distance in the air, the received signal will be attenuated accordingly. Therefore,斯Ru device low frequency as possible, ie In the above example it will be appreciated that preferred to operate at 2KH Z to 3KH Z.
【0020】[0020]
【発明の効果】上述の説明から理解される如く、本発明
の圧電トランスデューサは十分広い周波数帯域で良好な
応答をする。従って、連続した正弦波信号でも、周波数
変調波、振幅変調波又はパルス波であっても送信可能で
ある。また、本発明の圧電型トランスデューサは音響波
をダクト内で送信可能であるので、本発明の圧電型トラ
ンスデューサをダクトの両端に配置して、夫々送信機及
び受信機とし、その間に信号の送受信を行うことが可能
になる。筒状体の一端に反射体を設け、1つのデバイス
を送信モードと受信モードで切換え使用が可能である。As can be understood from the above description, the piezoelectric transducer of the present invention has a good response in a sufficiently wide frequency band. Therefore, a continuous sine wave signal, a frequency modulation wave, an amplitude modulation wave, or a pulse wave can be transmitted. Further, since the piezoelectric transducer of the present invention can transmit acoustic waves in the duct, the piezoelectric transducers of the present invention are arranged at both ends of the duct to serve as a transmitter and a receiver, respectively, and transmit and receive signals between them. It will be possible to do. By providing a reflector at one end of the tubular body, one device can be used by switching between the transmission mode and the reception mode.
【図1】本発明の圧電型トランスデューサに使用するP
PFの展開図。FIG. 1 shows a P used in the piezoelectric transducer of the present invention.
Development view of PF.
【図2】本発明の圧電型トランスデューサに使用する合
成フィルム状体の断面図。FIG. 2 is a cross-sectional view of a synthetic film body used in the piezoelectric transducer of the present invention.
【図3】本発明の圧電型トランスデューサの製造工程説
明用斜視図。FIG. 3 is a perspective view for explaining the manufacturing process of the piezoelectric transducer of the present invention.
【図4】本発明の圧電型トランスデューサの斜視図。FIG. 4 is a perspective view of a piezoelectric transducer of the present invention.
【図5】図4の圧電型トランスデューサの縦断面図。5 is a vertical cross-sectional view of the piezoelectric transducer of FIG.
【図6】本発明の圧電型トランスデューサの他の例の一
部断面した斜視図。FIG. 6 is a partially sectional perspective view of another example of the piezoelectric transducer of the present invention.
【図7】図4の圧電型トランスデューサをダクト内に使
用した応用例を示す断面斜視図。7 is a cross-sectional perspective view showing an application example in which the piezoelectric transducer of FIG. 4 is used in a duct.
10 可撓性フィルム(PPF) 12、14 電極パターン 16、18、20 両面接着テープ 22 コンタクトピン 26 ベース(プラグ) 10 Flexible film (PPF) 12, 14 Electrode pattern 16, 18, 20 Double-sided adhesive tape 22 Contact pin 26 Base (plug)
Claims (3)
ンを形成して成る圧電型トランスデューサにおいて、 前記可撓性圧電フィルムをうず巻き状に巻回して筒状体
に形成し、該筒状体の一端から前記電極パターンに接続
されたコンタクトピンを延出させることを特徴とする圧
電型トランスデューサ。1. A piezoelectric transducer in which electrode patterns are formed on both sides of a flexible piezoelectric film, wherein the flexible piezoelectric film is wound into a spiral shape to form a cylindrical body. A piezoelectric transducer, wherein a contact pin connected to the electrode pattern is extended from one end.
ムの一面に両面接着テープを積層した積層体をうず巻き
状に巻回して前記筒状体を形成することを特徴とする請
求項1の圧電型トランスデューサ。2. The piezoelectric body according to claim 1, wherein a laminate in which a double-sided adhesive tape is laminated on one surface of the flexible piezoelectric film with an electrode pattern is wound in a spiral shape to form the tubular body. Transducer.
ンを形成して成る圧電型トランスデューサにおいて、 前記可撓性圧電フィルムをうず巻き状に巻回して筒状体
を形成し、 該筒状体の一端をベースにより閉鎖して音響波を反射す
ることを特徴とする圧電型トランスデューサ。3. A piezoelectric transducer formed by forming electrode patterns on both sides of a flexible piezoelectric film, wherein the flexible piezoelectric film is wound in a spiral shape to form a tubular body, and the tubular body is formed. A piezoelectric transducer characterized in that one end is closed by a base to reflect an acoustic wave.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9505003.5 | 1995-03-11 | ||
GBGB9505003.5A GB9505003D0 (en) | 1995-03-11 | 1995-03-11 | "Acoustic transducer" |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08265897A true JPH08265897A (en) | 1996-10-11 |
JP3930580B2 JP3930580B2 (en) | 2007-06-13 |
Family
ID=10771102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP07957596A Expired - Fee Related JP3930580B2 (en) | 1995-03-11 | 1996-03-07 | Piezoelectric transducer |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0732864A2 (en) |
JP (1) | JP3930580B2 (en) |
GB (1) | GB9505003D0 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013027696A1 (en) * | 2011-08-24 | 2013-02-28 | 株式会社村田製作所 | Actuator device and method for producing actuator device |
WO2019103017A1 (en) * | 2017-11-21 | 2019-05-31 | 日東電工株式会社 | Active noise control system |
WO2019103015A1 (en) * | 2017-11-21 | 2019-05-31 | 日東電工株式会社 | Laminate body for forming piezoelectric speaker |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6441540B1 (en) * | 1999-11-05 | 2002-08-27 | Toray Techno Co., Ltd. | Cylindrical piezoelectric transducer and cylindrical piezoelectric vibrating element |
US7043035B2 (en) * | 1999-12-09 | 2006-05-09 | Sonionmicrotronic Nederland B.V. | Miniature microphone |
EP3384685B1 (en) * | 2015-12-04 | 2019-09-11 | Harman Becker Automotive Systems GmbH | Electro-active loudspeaker |
GB2579672B (en) * | 2018-12-12 | 2021-01-06 | Thales Holdings Uk Plc | A piezo-resistive hydrophone |
-
1995
- 1995-03-11 GB GBGB9505003.5A patent/GB9505003D0/en active Pending
-
1996
- 1996-02-29 EP EP96103044A patent/EP0732864A2/en not_active Withdrawn
- 1996-03-07 JP JP07957596A patent/JP3930580B2/en not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013027696A1 (en) * | 2011-08-24 | 2013-02-28 | 株式会社村田製作所 | Actuator device and method for producing actuator device |
JPWO2013027696A1 (en) * | 2011-08-24 | 2015-03-19 | 株式会社村田製作所 | Actuator element and method of manufacturing the actuator element |
US9543498B2 (en) | 2011-08-24 | 2017-01-10 | Murata Manufacturing Co., Ltd. | Actuator device and method for manufacturing the actuator device |
WO2019103017A1 (en) * | 2017-11-21 | 2019-05-31 | 日東電工株式会社 | Active noise control system |
WO2019103015A1 (en) * | 2017-11-21 | 2019-05-31 | 日東電工株式会社 | Laminate body for forming piezoelectric speaker |
CN111373472A (en) * | 2017-11-21 | 2020-07-03 | 日东电工株式会社 | Silencing system |
JPWO2019103017A1 (en) * | 2017-11-21 | 2020-12-03 | 日東電工株式会社 | Mute system |
JPWO2019103015A1 (en) * | 2017-11-21 | 2020-12-17 | 日東電工株式会社 | Laminate for forming piezoelectric speakers |
US11252510B2 (en) | 2017-11-21 | 2022-02-15 | Nitto Denko Corporation | Piezoelectric speaker-forming laminate |
US12071761B2 (en) | 2017-11-21 | 2024-08-27 | Nitto Denko Corporation | Sound reducing system |
Also Published As
Publication number | Publication date |
---|---|
JP3930580B2 (en) | 2007-06-13 |
EP0732864A2 (en) | 1996-09-18 |
GB9505003D0 (en) | 1995-04-26 |
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