JPH0826470B2 - Copper plating solution and method for producing electrolytic copper foil using the same - Google Patents
Copper plating solution and method for producing electrolytic copper foil using the sameInfo
- Publication number
- JPH0826470B2 JPH0826470B2 JP19922090A JP19922090A JPH0826470B2 JP H0826470 B2 JPH0826470 B2 JP H0826470B2 JP 19922090 A JP19922090 A JP 19922090A JP 19922090 A JP19922090 A JP 19922090A JP H0826470 B2 JPH0826470 B2 JP H0826470B2
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- Prior art keywords
- copper foil
- plating solution
- copper
- electrolytic
- copper plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Electroplating Methods And Accessories (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、銅メッキ液とこれを用いる電解銅箔の製造
方法に関し、更に詳述すれば、銅箔粗面側の表面粗さ及
び粗さを構成する連続する凹凸形態を小さくかつ均一に
改善することのできる特定添加物を含有する銅メッキ液
と、これを用いて好適に電解銅箔を製造することのでき
る電解銅箔の製造方法に関する。TECHNICAL FIELD The present invention relates to a copper plating solution and a method for producing an electrolytic copper foil using the same, and more specifically, the surface roughness and the roughness on the rough surface side of the copper foil. And a copper plating solution containing a specific additive capable of improving the continuous unevenness form which constitutes a small and uniform improvement, and a method for producing an electrolytic copper foil capable of suitably producing an electrolytic copper foil using the same Regarding
電解銅箔は主にプリント回路用銅箔として広く使用さ
れている。プリント回路用銅箔は樹脂基材と加熱加圧に
より積層され銅張積層板となり、更にエッチング手段に
より所望する回路網が形成された後、電気素子が搭載さ
れて、テレビ、電算機等のプリント回路となる。Electrolytic copper foil is widely used mainly as a copper foil for printed circuits. The printed circuit copper foil is laminated with a resin base material by heat and pressure to form a copper clad laminate, and after a desired circuit network is formed by etching means, an electric element is mounted and printed on a television, a computer or the like. It becomes a circuit.
この回路の高密度化と導体巾の狭小化傾向は著しく、
これに用いられる電解銅箔の品質要求も従来に増して厳
しくなっている。電解銅箔の物理的特性の中には抗張
力、伸び率、表面粗さ、硬さ等が挙げられる。とりわけ
銅箔粗面側、すなわち、後述する電解銅箔の製造方法の
中で陰極のドラム面上に銅を所望の厚みに達するまで電
析形成させたときの連続する凹凸を有する側の表面状態
は、例えば樹脂基材との剥離強度、エッチング精度、樹
脂基板との層間絶縁性等の電解銅箔の物理的特性に深く
関わるものである。特に、高周波回路に用いられる場
合、銅箔粗面側の表面粗さやその凹凸が大きかったり不
均一であったりすると、信号の位相のズレを生じて結果
的には波形が変形し、電解銅箔の回路導体としてのイン
ピーダンスが悪化することがある。したがって、特に微
細回路形成においては銅箔粗面側の表面粗さを小さくし
かも粗さを構成するそれぞれの凹凸形態を均一化させる
ことが回路の品質の信頼性を得る上で要望されている。There is a marked tendency for high density and narrow conductor width of this circuit,
The quality requirements of the electro-deposited copper foil used for this are becoming more stringent than ever before. Among the physical properties of the electrolytic copper foil are tensile strength, elongation, surface roughness, hardness and the like. In particular, the copper foil rough surface side, that is, the surface state of the side having continuous unevenness when copper is electrodeposited on the drum surface of the cathode to reach a desired thickness in the method for producing an electrolytic copper foil described later. Is deeply related to the physical properties of the electrolytic copper foil such as peel strength from a resin base material, etching accuracy, and interlayer insulation with a resin substrate. Especially when used in high-frequency circuits, if the surface roughness or unevenness of the rough surface of the copper foil is large or uneven, the phase shift of the signal will occur and the waveform will eventually be deformed, resulting in electrolytic copper foil. The impedance as the circuit conductor of may deteriorate. Therefore, especially in the formation of a fine circuit, it is required to reduce the surface roughness on the rough surface side of the copper foil and to make uniform the respective irregularities constituting the roughness in order to obtain the reliability of the circuit quality.
さて、電解銅箔の製造方法としては、主として、銅イ
オンを含む酸性銅メッキ液を用いて、回転ドラムを陰極
とし、陽極を該ドラムの下方半分に近接させて対向配置
し、その両極の間隙にメッキ液を注入し、限界電流密度
を超えない範囲の電流により電解処理し陰極のドラム面
上に銅を析出させ、この析出した銅の薄膜を剥離し連続
的に巻き取る連続電解処理の方法が採用されている。こ
のときの銅箔の厚みは、ドラムの回転数又は電流密度を
増減することにより、任意の厚みに調整することができ
る。したがって、上記薄膜すなわち銅箔自体のもつ上記
した特性は、主に用いられるメッキ液の濃度(銅濃度、
酸濃度)、液温、液流速、添加物の種類とその濃度及び
電流密度等に依存するところが大きく、これらの個別の
条件を確立し、これらをコントロールすることは電解銅
箔の連続生産においては重要なことである。特にメッキ
液中に添加される添加物は銅箔粗面側の特性に影響を与
える。Now, as a method for producing an electrolytic copper foil, mainly, an acidic copper plating solution containing copper ions is used, a rotating drum is used as a cathode, and an anode is disposed in close proximity to the lower half of the drum so as to face each other, and a gap between both electrodes is provided. A method of continuous electrolytic treatment in which a plating solution is injected into the electrode, electrolytic treatment is performed with a current in a range not exceeding the limiting current density to deposit copper on the drum surface of the cathode, and the deposited copper thin film is peeled off and continuously wound. Has been adopted. The thickness of the copper foil at this time can be adjusted to an arbitrary thickness by increasing or decreasing the number of rotations of the drum or the current density. Therefore, the above-mentioned characteristics of the thin film, that is, the copper foil itself are mainly due to the concentration (copper concentration,
Acid concentration), liquid temperature, liquid flow rate, type of additive and its concentration, and current density, etc., and it is important to establish these individual conditions and control them in continuous production of electrolytic copper foil. It's important. In particular, the additive added to the plating solution affects the characteristics of the rough surface of the copper foil.
従来、銅箔の粗面側に好ましい特性を与えるために、
メッキ液には何らかの特定な添加物を配合させることが
行われている。その添加物としては例えば、ゼラチン、
にかわ、チオ尿素、ポリエチレングリコール、ポリビニ
ルアルコール、でんぷん及び糖類等の有機質のもの、更
に、陰イオンや金属塩類などが知られている。メッキ液
にこれらの添加物の一種類を添加又は二種類以上を併用
添加することにより上記した銅箔の特性は微妙に変動す
るので、これらの添加物もほかの製造条件と同様にそれ
ぞれに管理されている。Conventionally, in order to give preferable characteristics to the rough surface side of the copper foil,
It is practiced to add some specific additive to the plating solution. Examples of the additive include gelatin,
Organic substances such as glue, thiourea, polyethylene glycol, polyvinyl alcohol, starch and saccharides, as well as anions and metal salts are known. Since the characteristics of the copper foil described above slightly change when one kind of these additives is added to the plating solution or two or more kinds of them are added in combination, these additives are controlled individually like other manufacturing conditions. Has been done.
従来、上記添加物を微量加えることにより銅箔粗面側
の表面粗さを小さくすることは達成されるものの、その
凹凸形態が均一性を欠いたり、銅の析出が樹枝状や銅粒
状となる異常析出を伴ったり、長期連続操業する場合、
安定した品質が保持されなかったりして、樹脂基材との
剥離強度や電気特性等の品質が損なわれたりする難点が
あった。Conventionally, it is possible to reduce the surface roughness of the copper foil rough surface side by adding a small amount of the above-mentioned additive, but the unevenness morphology lacks uniformity, or copper deposition becomes dendritic or copper granular. In case of abnormal precipitation or long-term continuous operation,
There is a problem in that stable quality is not maintained and the quality such as peel strength from the resin base material and electrical characteristics is impaired.
そこで本発明は、プリント配線板に使用したとき微細
回路形成に好適な品質を備えた電解銅箔、すなわち、銅
箔粗面側の表面粗さ及び粗さを構成する連続する凹凸形
態を小さくかつ均一に改善した電解銅箔を製造すること
のできる銅メッキ液を提供することを目的とする。Therefore, the present invention is an electrolytic copper foil having a quality suitable for forming a fine circuit when used for a printed wiring board, that is, a surface roughness on the rough surface side of the copper foil and a continuous unevenness form which constitutes roughness are small and An object of the present invention is to provide a copper plating solution capable of producing an electrolytic copper foil having an improved quality.
本発明はまた、この銅メッキ液を用いて上記の特性を
有する電解銅箔を好適に製造することのできる電解銅箔
の製造方法を提供することを目的とする。Another object of the present invention is to provide a method for producing an electro-deposited copper foil, which can suitably produce an electro-deposited copper foil having the above-mentioned characteristics using this copper plating solution.
本発明は、硫酸銅と硫酸を主成分とする酸性銅メッキ
液に酵素分解ゼラチンを5〜50ppm添加してなる銅メッ
キ液を提供するものである。The present invention provides a copper plating solution obtained by adding 5 to 50 ppm of enzyme-decomposed gelatin to an acidic copper plating solution containing copper sulfate and sulfuric acid as main components.
以下、本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail.
本発明の銅メッキ液は、硫酸銅と硫酸を主成分とする
銅メッキ液である。先ずこの主成分について説明する
と、硫酸銅(CuSO4・5H2O)の濃度は100〜400g/lの範囲
とすることが好ましい。濃度が100g/l未満の場合は、高
電流密度で銅箔の生産性を高める場合水素ガスを伴うい
わゆるヤケメッキとなり、銅箔自体の特性が改善され
ず、例えば、粗面側の表面粗さが小さくならず粗さを構
成する凹凸形態が粗雑となることがあり、また抗張力、
伸び率等の特性も損なわれることがある。また濃度が40
0g/lを超える場合は、タンク、配管等の電解装置や機器
類に硫酸銅が再結晶化しやすくなり作業上好ましくな
い。The copper plating solution of the present invention is a copper plating solution containing copper sulfate and sulfuric acid as main components. First, the main component will be described. It is preferable that the concentration of copper sulfate (CuSO 4 .5H 2 O) is in the range of 100 to 400 g / l. If the concentration is less than 100 g / l, so-called burn plating accompanied by hydrogen gas when increasing the productivity of the copper foil at high current density, the characteristics of the copper foil itself is not improved, for example, the surface roughness of the rough surface side Roughness that forms the roughness without becoming small may be rough, and tensile strength,
Properties such as elongation may also be impaired. Also, the concentration is 40
If it exceeds 0 g / l, copper sulfate is likely to be recrystallized in electrolytic devices and equipment such as tanks and pipes, which is not preferable in terms of work.
一方、硫酸(H2SO4)の濃度は、30〜150g/lの範囲と
することが好ましい。濃度が30g/l未満の場合は、浴電
圧の上昇を伴い銅箔の製造原価が増大する。また、濃度
が150g/lを超える場合は陽極及び陰極の損耗が顕著とな
りやすく不都合である。On the other hand, the concentration of sulfuric acid (H 2 SO 4 ) is preferably in the range of 30 to 150 g / l. If the concentration is less than 30 g / l, the manufacturing cost of the copper foil increases as the bath voltage increases. On the other hand, if the concentration exceeds 150 g / l, the wear of the anode and the cathode tends to be remarkable, which is inconvenient.
本発明の銅メッキ液は上記主要成分に酵素分解ゼラチ
ンが5〜50ppm添加されている。In the copper plating solution of the present invention, 5 to 50 ppm of enzyme-decomposed gelatin is added to the above main components.
この酵素分解ゼラチンについて説明すると、酵素分解
ゼラチンとは、牛皮、牛骨等を酸やアルカリで精製し、
これからコラーゲン又はゼラチンを抽出し、更にこれを
酵素、例えば、ペプシン、トリプシンなどで加水分解し
て得られるペプタイドである。通常のゼラチンの平均分
子量が60,000〜70,000であるのに対して、酵素分解ゼラ
チンは平均分子量が1,000〜20,000であり、低分子量の
ものである。また、その成分はアミノ酸組成を有し、グ
リシン、プロリン、アラニン、ハイドロキシプロリン、
アルギニン、グルタミン酸などからなっている。このよ
うな酵素分解ゼラチンは、更に脱色、脱臭精製やpH、濃
度調整等をされていてもよい。通常、市販されている液
状品、ペースト状品、スプレードライ粉末状品など、い
ずれも好適に使用できる。本発明の銅メッキ液に添加さ
れる酵素分解ゼラチンとしては、分子量が5,000〜20,00
0のものが特に好適である。Explaining this enzyme-decomposed gelatin, enzyme-decomposed gelatin is obtained by purifying cowhide, cow bone, etc. with acid or alkali,
It is a peptide obtained by extracting collagen or gelatin from this and further hydrolyzing it with an enzyme such as pepsin or trypsin. Conventional gelatin has an average molecular weight of 60,000 to 70,000, whereas enzyme-degraded gelatin has a low average molecular weight of 1,000 to 20,000. In addition, the component has an amino acid composition, glycine, proline, alanine, hydroxyproline,
Consists of arginine and glutamic acid. Such enzyme-decomposed gelatin may be further decolorized, deodorized and refined, and adjusted in pH and concentration. Usually, commercially available liquid products, paste products, spray-dried powder products and the like can all be suitably used. The enzyme-decomposed gelatin added to the copper plating solution of the present invention has a molecular weight of 5,000 to 20,00.
Those of 0 are particularly suitable.
銅メッキ液中の酵素分解ゼラチンの濃度は5〜50ppm
とする。濃度が5ppm未満の場合は、銅箔粗面側の凹凸形
態の均一性は得られるものの、表面粗さが大きくなる傾
向を示し、また、50ppmを超える場合は、凹凸形態が不
定形となり異常析出が発生しやすくなり、これが銅箔厚
み精度や電気特性、例えば、伝送損失を大きくさせてい
ずれも銅箔の品質を悪化させるという不都合がある。特
に好ましい範囲は5〜30ppmである。The concentration of enzyme-degraded gelatin in the copper plating solution is 5 to 50 ppm
And When the concentration is less than 5 ppm, the unevenness of the copper foil rough surface side can be obtained uniformly, but the surface roughness tends to increase, and when it exceeds 50 ppm, the unevenness of the uneven shape becomes irregular and abnormal precipitation occurs. Is liable to occur, which increases the accuracy of copper foil thickness and electrical characteristics, for example, increases transmission loss, and in any case deteriorates the quality of the copper foil. A particularly preferred range is 5 to 30 ppm.
この酵素分解ゼラチンを含む銅メッキ液を用いて適当
な条件の中で電解処理することにより、本発明の目的と
する電解銅箔、すなわち、銅箔粗面側の表面粗さが小さ
く、しかも粗さを構成する凹凸形態が均一である電解銅
箔を製造することができる。By electrolytically treating the copper plating solution containing the enzyme-decomposed gelatin under appropriate conditions, the electrolytic copper foil of the present invention, that is, the surface roughness on the rough side of the copper foil is small and It is possible to manufacture an electro-deposited copper foil having a uniform ruggedness that constitutes the ridge.
酵素分解ゼラチンは、メッキ液中の銅イオン、硫酸イ
オン及び液温又は電解処理等により経時的に異質の化学
成分に変質しやすい。この変質による成分は特に銅箔粗
面側の表面粗さやこれを構成する凹凸形態を悪化させる
変動要素として作用することがある。そこで、本発明の
銅メッキ液を使用する際には、この変質による有害成分
を取り除くことが好ましい。The enzyme-decomposed gelatin is likely to change into a different chemical component with time due to copper ions, sulfate ions in the plating solution and the solution temperature or electrolytic treatment. The component due to this alteration may act as a variable factor that deteriorates the surface roughness on the rough surface side of the copper foil and the irregular shape of the copper foil. Therefore, when using the copper plating solution of the present invention, it is preferable to remove harmful components due to this alteration.
変質による有害成分を取り除く方法としては、特に限
定はないが、例えば、活性炭を用いてこの有害成分を吸
着除去する方法が好適である。There is no particular limitation on the method of removing the harmful component due to the alteration, but for example, a method of adsorbing and removing the harmful component using activated carbon is suitable.
具体的には、前記銅メッキ液を用いて電解処理法によ
り電解銅箔を製造するに際し、電解処理中の該銅メッキ
液を1時間当たり0.1〜2.0g/lの活性炭で濾過すること
が好ましい。Specifically, when producing an electrolytic copper foil by an electrolytic treatment method using the copper plating solution, it is preferable to filter the copper plating solution during the electrolytic treatment with 0.1 to 2.0 g / l of activated carbon per hour. .
活性炭による濾過の効用は、メッキ液中の不純物を除
去するものであり、特に前記酵素分解ゼラチンの効果を
十分に発揮させるためのものである。特に、酵素分解ゼ
ラチンの変質により生じる有害成分を吸着除去すること
にあり、銅箔粗面側の表面粗さ及び粗さを構成する凹凸
形態を安定維持させることができる。The effect of filtration with activated carbon is to remove impurities in the plating solution, and in particular to sufficiently exert the effect of the enzyme-decomposed gelatin. In particular, the purpose is to adsorb and remove harmful components caused by the alteration of the enzymatically-degraded gelatin, so that it is possible to stably maintain the surface roughness on the rough surface side of the copper foil and the uneven shape that constitutes the roughness.
活性炭の好ましい使用範囲は、1時間当たり0.1〜2.0
g/lである。0.1g/l未満の場合は前記する効果が得られ
ないばかりか、銅メッキ液特性の経時的変化が現れ安定
した品質の銅箔が得られないことがある。また、2.0g/l
を超える場合は粗面側の表面粗さが大きくなる傾向にあ
り、しかも粗さを構成する凹凸形態に不揃いを与えると
ともに経済的面からも不利となる。特に好ましく使用さ
れる範囲は、1時間当たり0.3〜1.5g/lである。The preferred usage range of activated carbon is 0.1 to 2.0 per hour.
g / l. If the amount is less than 0.1 g / l, not only the above-mentioned effects cannot be obtained, but also the characteristics of the copper plating solution change with time, and a stable quality copper foil may not be obtained. Also 2.0g / l
If it exceeds, the surface roughness on the rough surface side tends to be large, and in addition, the unevenness of the roughness is not uniform, and it is disadvantageous from the economical point of view. A particularly preferably used range is 0.3 to 1.5 g / l per hour.
用いられる活性炭の種類としては、粒状又は粉末状な
どのいずれの活性炭でもよい。粉末状の活性炭を用いた
場合、活性炭の使用量は粒状のものを用いた場合の1/3
程度の少量で同様の効果が得られる。また、いずれの活
性炭を用いる場合にも活性炭中に含まれる塩素が可能な
限り除去されていることが好ましい。換言すればメッキ
液中に塩素イオンが含有されていないことは銅箔粗面側
の表面粗さを小さくするのに有効であり、具体的には、
厚み70μm以下の銅箔の場合、その粗さを中心線平均粗
さRaで0.5μm以下に保つ上で有効である。The type of activated carbon used may be any activated carbon such as granular or powder. When powdered activated carbon is used, the amount of activated carbon used is 1/3 of that when granular activated carbon is used.
A similar effect can be obtained with a small amount. In addition, when using any activated carbon, it is preferable that chlorine contained in the activated carbon is removed as much as possible. In other words, the fact that the plating solution does not contain chlorine ions is effective in reducing the surface roughness of the copper foil rough surface side, and specifically,
In the case of a copper foil having a thickness of 70 μm or less, it is effective in keeping the roughness of the center line average roughness Ra at 0.5 μm or less.
活性炭によるメッキ液の濾過の方法としては、例え
ば、複数の濾過装置に所定量の活性炭を充填し、一つの
濾過装置でメッキ液を活性炭中に一定時間通過させて濾
過したのち、順次新規な活性炭濾過装置と切替操作を行
い、連続して濾過する方法が挙げられる。このようにし
てメッキ液を連続的に濾過しながら濾過されたメッキ液
を電解装置に供給し、連続電解処理を行うことが好まし
い。As a method of filtering the plating solution with activated carbon, for example, a plurality of filtration devices are filled with a predetermined amount of activated carbon, and the plating solution is passed through the activated carbon for a certain period of time by one filtration device to be filtered, and then a new activated carbon is sequentially added. A method of performing continuous filtration by performing a switching operation with a filtration device can be mentioned. It is preferable to continuously filter the plating solution in this manner while supplying the filtered plating solution to the electrolysis device for continuous electrolysis.
本発明の目的を達成するためには、前記添加物の濃度
と活性炭濾過量は密接な関係にあり、通常は添加物濃度
を濃くしたときは活性炭濾過量も多くする必要がある。
しかし、電解処理条件、例えば、液温度、液流速等を適
宜に設定することにより、必ずしも添加濃度と活性炭濾
過量の比例関係が成立しない場合もある。In order to achieve the object of the present invention, there is a close relationship between the concentration of the additive and the filtration amount of activated carbon, and it is usually necessary to increase the filtration amount of activated carbon when the concentration of the additive is increased.
However, there are cases where the proportional relationship between the addition concentration and the activated carbon filtration amount is not always established by appropriately setting the electrolytic treatment conditions such as the liquid temperature and the liquid flow rate.
次に、本発明方法の電解処理条件について述べると、
好適な電流密度は限界電流密度以下の電流密度であっ
て、ほかの条件、例えばメッキ液の硫酸銅の濃度、硫酸
の濃度、液温度、液流速等又は生産速度によっても変動
する数値を示し一概には決められないが、通常10〜300A
/dm2の範囲から適宜選択されることが好ましい。Next, to describe the electrolytic treatment conditions of the method of the present invention,
A suitable current density is a current density less than or equal to the limiting current density, and shows a numerical value that fluctuates depending on other conditions, for example, the concentration of copper sulfate in the plating solution, the concentration of sulfuric acid, the solution temperature, the solution flow rate, or the production rate. Can not be decided, but usually 10 ~ 300A
It is preferable to be appropriately selected from the range of / dm 2 .
液温度については通常35〜80℃の範囲から、液流速に
ついては通常0.1〜2m/秒の範囲からいずれも適宜選択さ
れることが好ましい。It is preferable that the liquid temperature is usually selected from the range of 35 to 80 ° C., and the liquid flow rate is usually selected from the range of 0.1 to 2 m / sec.
このような電解処理条件において連続電解処理するこ
とにより所要厚みを有する銅箔膜が前記する陰極回転ド
ラム表面に電着され、これを剥離すれば、本発明の方法
による電解銅箔を製造することができる。A copper foil film having a required thickness is electrodeposited on the surface of the cathode rotating drum by continuous electrolytic treatment under such electrolytic treatment conditions, and if this is peeled off, an electrolytic copper foil is produced by the method of the present invention. You can
得られた電解銅箔は必要に応じて粗面化処理、更に防
錆処理を施して微細回路形成などに好適な品質を備えた
プリント配線板用の銅箔として用いることができる。The obtained electrolytic copper foil can be used as a copper foil for a printed wiring board having a quality suitable for forming a fine circuit by subjecting it to a surface roughening treatment and an anticorrosion treatment, if necessary.
以下、本発明を実施例に基づいて詳細に説明する。 Hereinafter, the present invention will be described in detail based on examples.
実施例1 硫酸銅300g/l、硫酸50g/lを含む酸性銅メッキ液に酵
素分解ゼラチン(商品名・ニッピペプタイドPBH、分子
量10,000、ニッピ(株)製)を30ppm添加してなる銅メ
ッキ液を10000リットル調製した。このメッキ液を、液
温45℃に保持し、試験用製箔装置(直径1,000mm、長さ
1,400mmのチタン製回転ドラムを陰極となし、該ドラム
の下方半分に近接させて半円型の鉛陽極を対向配置し、
この両極の間隙、すなわち極間距離を5mmとした。)を
用い、両極の間に上記メッキ液を液流速0.5m/秒で循環
させながら、濾過装置を用いてメッキ液を1時間当たり
1.0g/lの活性炭で濾過した。Example 1 A copper plating solution prepared by adding 30 ppm of enzyme-decomposed gelatin (trade name: Nippi Peptide PBH, molecular weight 10,000, manufactured by Nippi Corporation) to an acidic copper plating solution containing 300 g / l of copper sulfate and 50 g / l of sulfuric acid. 10000 liters were prepared. This plating solution is maintained at a liquid temperature of 45 ° C, and a foil-making device for testing (diameter 1,000 mm, length
A rotating drum made of titanium of 1,400 mm is used as a cathode, and a semicircular lead anode is arranged to face the lower half of the drum,
The gap between the two electrodes, that is, the distance between the electrodes was set to 5 mm. ), The plating solution is circulated between both electrodes at a liquid flow rate of 0.5 m / sec, and the plating solution is used per hour by using a filtration device.
It was filtered through 1.0 g / l activated carbon.
次に銅箔の厚みが30μmになるようにチタン製陰極回
転ドラムを回転させながら電流密度30A/dm2で連続電解
処理して該陰極上に銅を電解析出させ、これをはがし、
電解銅箔を製造した。Next, while continuously rotating the cathode rotating drum made of titanium so that the thickness of the copper foil is 30 μm, a continuous electrolytic treatment is performed at a current density of 30 A / dm 2 to electrolytically deposit copper on the cathode, and peel it off.
An electrolytic copper foil was manufactured.
この銅箔をサンプルとして、下記の特性について測定
した。その結果を一括して第1表に示した。The following characteristics were measured using this copper foil as a sample. The results are collectively shown in Table 1.
(1)銅箔粗面側表面粗さ〔Ra(μm)、Rmax(μ
m)〕 JIS B 0651(触針式表面粗さ測定器)に準拠して中心
線平均粗さRa(μm)、最大高さRmax(μm)を測定し
た。(1) Copper foil rough surface side surface roughness [Ra (μm), Rmax (μ
m)] The center line average roughness Ra (μm) and the maximum height Rmax (μm) were measured according to JIS B 0651 (a stylus type surface roughness measuring instrument).
(2)抗張力(kg/mm2)及び伸び率(%) JIS Z 2201(金属材料引張試験片)の5号試験片を作
製し、JIS Z 2241(金属材料引張試験方法)に準拠して
測定した。(2) Tensile strength (kg / mm 2 ) and elongation (%) A JIS Z 2201 (tensile test piece for metallic material) No. 5 test piece was prepared and measured according to JIS Z 2241 (tensile test method for metallic material). did.
(3)銅箔粗面側の凹凸の形態及び均一性 走査型電子顕微鏡を用い倍率1000倍により銅箔粗面側
の電析形態を観察した。表面の凹凸形態は円錐形のもの
及び不定形のものが観察された。この中で円錐形のもの
は樹脂基材との剥離強度が優れている。また、表中の均
一性の評価については、○は凹凸の形状が円錐形であっ
て、その底面の直径が2〜5μmのものが視野内の凹凸
のうちの60%以上を占めることを意味し、×は前記のよ
うな凹凸が40%未満であることを意味する。(3) Morphology and uniformity of irregularities on the rough surface of the copper foil The electrodeposited morphology on the rough surface of the copper foil was observed with a scanning electron microscope at a magnification of 1000 times. The concavo-convex shape and the irregular shape of the surface were observed. Among them, the conical one has excellent peeling strength from the resin substrate. Regarding the evaluation of uniformity in the table, ◯ means that the shape of the unevenness is conical and the diameter of the bottom surface is 2 to 5 μm occupies 60% or more of the unevenness in the visual field. However, x means that the above-mentioned unevenness is less than 40%.
実施例2〜7、比較例1〜7 添加物濃度及び活性炭濾過量を表示のように変化させ
たほかは、実施例1と同様の製造装置を用い、実施例1
と同様の条件で各種の銅箔を製造した。ただし、実施例
7及び比較例6では、銅箔の厚みを70μmとした。これ
らの銅箔につき実施例1と同様の仕様で各特性を測定し
た。その結果を一括して第1表に示した。Examples 2 to 7, Comparative Examples 1 to 7 Using the same manufacturing apparatus as in Example 1 except that the additive concentration and the activated carbon filtration amount were changed as shown in Example 1,
Various copper foils were manufactured under the same conditions as above. However, in Example 7 and Comparative Example 6, the thickness of the copper foil was 70 μm. The characteristics of these copper foils were measured with the same specifications as in Example 1. The results are collectively shown in Table 1.
酵素分解ゼラチンを添加してなる本発明の銅メッキ液
を用いて本発明の方法により製造された実施例の電解銅
箔を比較例の電解銅箔と対比すると、第1表の特性結果
から以下のことが明らかとなった。 When the electrolytic copper foil of the example produced by the method of the present invention using the copper plating solution of the present invention to which the enzyme-decomposed gelatin is added is compared with the electrolytic copper foil of the comparative example, the following results are shown in Table 1. It became clear.
本発明の電解銅箔は銅箔粗面側の表面粗さ及び粗さを
構成する凹凸形態において中心線平均粗さRaは0.5μm
以下、最大高さRmaxは5μm以下の小さい値を示した。
しかも凹凸形態も円錐形であって均一性を保持してい
た。このことから本発明の銅メッキ液に添加されている
酵素分解ゼラチンが効果的に作用していることが考えら
れ、この添加物を特定量含有させて特定量の活性炭によ
る濾過操作をしながら電解処理することにより、顕著に
優れた電解銅箔が得られることが明らかになった。In the electrolytic copper foil of the present invention, the center line average roughness Ra is 0.5 μm in the surface roughness on the rough surface side of the copper foil and the unevenness form of the roughness.
Hereinafter, the maximum height Rmax showed a small value of 5 μm or less.
Moreover, the concavo-convex shape was also conical and maintained uniformity. From this, it is considered that the enzyme-decomposed gelatin added to the copper plating solution of the present invention is effectively acting, and a specific amount of this additive is contained and electrolysis is performed while performing a filtering operation with a specific amount of activated carbon. It was clarified that a remarkably excellent electrolytic copper foil was obtained by the treatment.
一方、比較例1及び2は銅メッキ液中の酵素分解ゼラ
チンの分子量と添加濃度を実施例1又は2と同じにして
活性炭濾過量を本発明の方法の好適範囲から逸脱させた
例であり、このときの表面粗さ、形態及び均一性はいず
れも本発明の方法により製造された電解銅箔より劣るも
のであった。On the other hand, Comparative Examples 1 and 2 are examples in which the molecular weight and addition concentration of the enzyme-decomposed gelatin in the copper plating solution were the same as those in Example 1 or 2, and the activated carbon filtration amount was deviated from the preferable range of the method of the present invention. At this time, the surface roughness, morphology and uniformity were all inferior to those of the electrolytic copper foil produced by the method of the present invention.
また、酵素分解ゼラチンに代えて従来の高分子量のゼ
ラチンを用いた場合は、比較例4、5に示されているよ
うに、粗さを構成する凹凸の形態、均一性は良好である
のに対して、表面粗さを小さく改善することに難点があ
ることが明らかであった。When conventional high molecular weight gelatin was used in place of the enzyme-decomposed gelatin, as shown in Comparative Examples 4 and 5, the morphology and the uniformity of the unevenness constituting the roughness were good. On the other hand, it was clear that there is a difficulty in improving the surface roughness to be small.
更に、実施例1〜7で得られた本発明の銅箔の抗張
力、伸び率等の特性はいずれもプリント回路用銅箔とし
ての要求を十分満足するものであった。Furthermore, the properties such as tensile strength and elongation of the copper foils of the present invention obtained in Examples 1 to 7 all sufficiently satisfied the requirements as a copper foil for printed circuits.
〔発明の効果〕 本発明の銅メッキ液によると、粗面側の表面粗さが小
さく、粗さを構成する凹凸形態及びその均一性も優れて
おり、これを微細回路を形成するプリント配線板に使用
した場合、また高周波回路に使用した場合等にエッチン
グ精度や電気特性の好適な品質が十分発揮できる電解銅
箔を製造することができる。[Effects of the Invention] According to the copper plating solution of the present invention, the surface roughness on the rough surface side is small, and the irregularities forming the roughness and the uniformity thereof are also excellent, and this is a printed wiring board for forming a fine circuit. It is possible to produce an electro-deposited copper foil which can sufficiently exhibit suitable qualities of etching accuracy and electric characteristics when it is used for, or when it is used for a high frequency circuit.
また、本発明の電解銅箔の製造方法によると、この銅
メッキ液を用いて上記の特性を有する電解銅箔を好適に
製造することができる。Further, according to the method for producing an electrolytic copper foil of the present invention, an electrolytic copper foil having the above characteristics can be favorably produced using this copper plating solution.
Claims (2)
液に酵素分解ゼラチンを5〜50ppm添加してなる銅メッ
キ液。1. A copper plating solution obtained by adding 5 to 50 ppm of enzyme-decomposed gelatin to an acidic copper plating solution containing copper sulfate and sulfuric acid as main components.
理法により電解銅箔を製造するに際し、電解処理中の該
銅メッキ液を1時間当たり0.1〜2.0g/lの活性炭で濾過
することを特徴とする電解銅箔の製造方法。2. When producing an electrolytic copper foil by an electrolytic treatment method using the copper plating solution according to claim 1, the copper plating solution during the electrolytic treatment is filtered with 0.1 to 2.0 g / l of activated carbon per hour. A method for producing an electrolytic copper foil, comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19922090A JPH0826470B2 (en) | 1990-07-30 | 1990-07-30 | Copper plating solution and method for producing electrolytic copper foil using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19922090A JPH0826470B2 (en) | 1990-07-30 | 1990-07-30 | Copper plating solution and method for producing electrolytic copper foil using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0488185A JPH0488185A (en) | 1992-03-23 |
JPH0826470B2 true JPH0826470B2 (en) | 1996-03-13 |
Family
ID=16404141
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19922090A Expired - Fee Related JPH0826470B2 (en) | 1990-07-30 | 1990-07-30 | Copper plating solution and method for producing electrolytic copper foil using the same |
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JP (1) | JPH0826470B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11501268A (en) * | 1996-08-23 | 1999-02-02 | グールド エレクトロニクス インコーポレイテッド | High performance flexible laminate |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3250994B2 (en) * | 1999-12-28 | 2002-01-28 | 三井金属鉱業株式会社 | Electrolytic copper foil |
JP5116943B2 (en) * | 2003-02-04 | 2013-01-09 | 古河電気工業株式会社 | Copper foil for high frequency circuit and manufacturing method thereof |
JP2004269950A (en) * | 2003-03-07 | 2004-09-30 | Mitsui Mining & Smelting Co Ltd | Method of producing electrolytic copper foil |
JP2008285727A (en) * | 2007-05-18 | 2008-11-27 | Furukawa Circuit Foil Kk | Electrolytic copper foil with high tensile-strength, and manufacturing method therefor |
CN103748672A (en) * | 2011-05-27 | 2014-04-23 | 日立化成株式会社 | Substrate, method for producing same, heat-releasing substrate, and heat-releasing module |
JP5666384B2 (en) * | 2011-05-31 | 2015-02-12 | 日本電解株式会社 | Ultrathin copper foil with support and method for producing the same |
JP6067910B1 (en) * | 2015-11-04 | 2017-01-25 | 古河電気工業株式会社 | Electrolytic copper foil and lithium ion secondary battery using the electrolytic copper foil |
KR20220043617A (en) * | 2020-09-29 | 2022-04-05 | 에스케이넥실리스 주식회사 | Electrolytic Copper Foil of High Strength, Electrode Comprising The Same, Secondary Battery Comprising The Same, and Method for Manufacturing The Same |
-
1990
- 1990-07-30 JP JP19922090A patent/JPH0826470B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11501268A (en) * | 1996-08-23 | 1999-02-02 | グールド エレクトロニクス インコーポレイテッド | High performance flexible laminate |
Also Published As
Publication number | Publication date |
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JPH0488185A (en) | 1992-03-23 |
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