JPH08258261A - Ink jet device - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide an ink ejecting apparatus which is excellent in mass productivity and reliability and which can be easily electrically connected. [Structure] An actuator 101 made of a piezoelectric ceramic material is manufactured by an injection molding method or the like, and has a plurality of first groove portions 102 opening upward in the drawing and a plurality of second groove portions 103 opening downward in the drawing. They are alternately formed in a line on the reinforcing portion 109. The actuator 101 is
It is polarized in the direction of arrow 120. A first electrode having a first electrode pattern 143 formed at the same pitch as the first groove 102.
The FPC board 141 is joined to the actuator 101 by soldering the first electrode pattern 143 and the first electrode 121 on the second inclined portion 106, and similarly the second groove portion 1 is formed.
No. 03, the second FPC board 142 having the second electrode pattern 144 formed at the same pitch as the second electrode pattern 1
44 and the second electrode 122 on the fourth inclined portion 107 are soldered to be joined to the actuator 101.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink ejecting apparatus for ejecting ink from an ink chamber by deforming an actuator member by generating an electric field.

[0002]

2. Description of the Related Art Among the non-impact type printers, which have been expanding the market to replace the impact type printers used up to now, the principle is the simplest, and multi-gradation and colorization are possible. Inkjet type printers are mentioned as being easy to use. Above all, a drop that ejects only the ink drops used for printing
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Of these, the former is difficult to miniaturize, and the latter requires a high heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A method proposed to solve the above defects at the same time is disclosed in Japanese Patent Laid-Open No. 63-247051.
It is a shear mode type using the piezoelectric ceramic disclosed in Japanese Patent Publication No.

As shown in FIG. 13, the shear mode type ink jet device 600 comprises a bottom wall 601, a top wall 602 and a shear mode actuator wall 603 therebetween. The actuator wall 603 is bonded to the bottom wall 601 and is polarized in the direction of arrow 611.
And an upper wall 605 bonded to the ceiling wall 602 and polarized in the direction of arrow 609. The actuator walls 603 are paired to form an ink flow path 613 therebetween, and a space 615 narrower than the ink flow path 613 is formed between the next pair of actuator walls 603.

The nozzle 6 is provided at one end of each ink flow path 613.
A nozzle plate 617 having 18 is fixed, and electrodes 619 and 621 are provided as metallized layers on both side surfaces of each actuator wall 603. Each electrode 619, 621
Is covered with an insulating layer (not shown) for insulating the ink. The electrodes 619, 621 facing the electrode 615 facing the space 615 are connected to the ground 623, and the electrodes 619, 621 provided in the ink flow path 613.
621 is a silicon-providing actuator drive circuit
It is connected to the chip 625.

Next, a method for manufacturing the ink jet device 600 will be described. First, the piezoelectric ceramic layer polarized in the arrow 611 is bonded to the bottom wall 601, and the piezoelectric ceramic layer polarized in the arrow 609 is bonded to the ceiling wall 602. The thickness of each piezoelectric ceramic layer is as follows.
Equal to 5 height. Next, parallel grooves are formed in the piezoelectric ceramics layer by rotating a diamond cutting disk or the like to form a lower wall 607 and an upper wall 605. Then, the electrode 61 is formed on the side surface of the lower wall 607 by vacuum deposition.
9 is formed, and the insulating layer is provided on the electrode 619.
Similarly, the electrode 621 and the insulating layer are provided on the side surface of the upper wall 605.

The zenith of the upper wall 605 and the zenith of the lower wall 607 are adhered to each other to form an ink flow path 613 and a space 615. Next, a nozzle plate 617 on which the nozzles 618 are formed is adhered to one end of the ink flow passage 613 and the space 615 so that the nozzles 618 correspond to the ink flow passages 613, and the ink flow passages 613 and the space 615 are connected. The other end is connected to silicon chip 625 and ground 623.

Then, the electrode 61 of each ink flow path 613
When the silicon chip 625 applies a voltage to 9,621, each actuator wall 603 undergoes piezoelectric thickness slip deformation in a direction of increasing the volume of the ink flow path 613, and after a predetermined time, the voltage application is stopped and the ink flow is stopped. Road 613
Of the ink flow path 61 from the increased state to the natural state.
Pressure is applied to the ink in the nozzle 3, and ink drops are generated in the nozzle 61.
It is injected from 8.

[0010]

However, in the ink ejecting apparatus 600 having the above-described structure, the electrodes 619 and 621 facing the space 615 are connected to the ground 623,
Electrodes 619 and 62 provided in the ink flow path 613
1 is connected to a silicon chip 625, which provides the actuator drive circuit, but the specific configuration and method of its electrical connection are not disclosed. Therefore, for example, if there are 50 ink flow paths 613, 51 air chambers 615 are required, and the electrical connections of the electrodes 619 and 621 are 101 places, and the 101 places have a narrow pitch. There is a problem that connection is difficult, the process for that is time-consuming, and mass productivity is poor.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an ink ejecting apparatus which is excellent in mass productivity and can be easily electrically connected.

[0012]

In order to achieve this object, an ink ejecting apparatus according to the present invention comprises an actuator having a plurality of ink liquid chambers for ejecting ink and at least a part of polarized piezoelectric ceramics. A member and an electrode for generating a driving electric field in the piezoelectric ceramics, the actuator member is deformed by the generation of an electric field from the electrode, and ink is ejected from the ink liquid chamber; The actuator member is a first
A groove and both sides of the first groove, and the first groove
The groove is opened in a direction opposite to the opening direction and has a second groove whose longitudinal direction is the same as the longitudinal direction of the first groove, and the electrode is formed on at least a side surface inside the first groove. And a second electrode formed on at least a side surface inside the second groove portion, and at least one of the first groove portion and the second groove portion constitutes the ink liquid chamber. At the same time, the polarization direction of the piezoelectric ceramics in the actuator member is parallel to the longitudinal direction of each groove, and at least one of the first and second electrodes is formed on the side surface inside each groove at one end of the groove. Is formed over the middle portion in the longitudinal direction, so that the driving electric field can be applied substantially perpendicular to the polarization direction of the piezoelectric ceramic.

In the actuator member, the second groove portion formed in the actuator member constitutes an ink liquid chamber, the first groove portion constitutes a non-ink liquid chamber, and the electrode is the first ink chamber. Either one of the first electrode and the second electrode may be configured as an electrode common to the corresponding groove portions.

In the above-mentioned electrode, the first electrode is formed as a drive electrode corresponding to each ink liquid chamber and formed on the outer peripheral surface of the actuator member constituting each ink liquid chamber. Alternatively, the second electrode may be configured as an electrode common to all the corresponding second groove portions.

At least one of the first and second electrodes may be formed on a side surface inside each groove so as to cover approximately half of the groove from one end of the groove in the longitudinal direction.

The first and second electrodes are vapor-deposited in two directions having a predetermined angle in the direction in which the grooves are arranged, from the end surface side of the actuator member, which is open at the end of the ink liquid chamber. It may be formed by that.

The actuator member may be inclined so that the upper and lower end surfaces thereof face the vapor deposition direction.

It should be noted that ink ejection nozzles may be formed corresponding to each of the ink liquid chambers on the end face side of the actuator member in which the tip of the ink liquid chamber is opened.

The actuator member may be manufactured by injection molding using a material having a piezoelectric effect.

[0020]

In the ink ejecting apparatus according to the first aspect of the present invention having the above structure, the actuator member is formed such that the first groove portions and the second groove portions are alternately arranged and the opening directions thereof are opposite to each other. . An electrode is provided in each groove. Each electrode can be taken out from two directions from the upper surface and the lower surface of the actuator member, and the electrode pitch is doubled as compared with the conventional one, so that electrical connection is easily performed. Furthermore, in the ink ejecting apparatus of the present invention, when a driving electric field is applied between the first electrode and the second electrode, the piezoelectric ceramics portion of the actuator member causes piezoelectric force in the longitudinal direction of the ink chamber. The thickness slips and deforms, the volume of the groove portion that comes into contact with the actuator member is surely changed, and the ink is ejected accurately.

In the ink ejecting apparatus according to the second aspect, since the ink liquid chambers and the non-ink liquid chambers are alternately arranged, there is no influence of driving of the ink chambers in the vicinity, that is, so-called crosstalk. Further, since the electrode is configured by using one of the first electrode and the second electrode as an electrode common to the corresponding groove portions,
The number of electrodes is reduced, and electrical connection with a control circuit that controls driving of the actuator member is facilitated.

In the ink ejecting apparatus according to the third aspect, since the second electrode formed on the ink liquid chamber side is the common electrode, a short circuit does not occur between the ink liquid chambers via the ink, and the electrode is There is no need to provide an insulating layer. First
The electrodes are drive electrodes formed respectively on the outer peripheral surface of the actuator member that constitutes each ink liquid chamber, corresponding to each ink liquid chamber, and a voltage is selectively applied to this first electrode. By doing so, ink is ejected from an arbitrary ink liquid chamber.

In the ink ejecting apparatus according to the fourth aspect, the volume change of the ink liquid chamber due to the application of the driving electric field can be made large, and the ink can be ejected more efficiently.

In the ink ejecting apparatus according to the fifth aspect, the first and second electrodes have a predetermined angle in the direction in which the grooves are arranged from the end face side of the actuator member where the end of the ink liquid chamber is open. It is formed by vapor deposition from two different directions. Therefore, it is possible to form the first and second electrodes on the side surface inside each groove portion from one end portion of the groove portion to an intermediate portion in the longitudinal direction without performing complicated processing such as masking or cutting. It is possible and has excellent mass productivity.

In the ink ejecting apparatus according to the sixth aspect, each of the first groove portions is dealt with by the vapor deposition processing,
And a second electrode formed over the outer peripheral surface of the actuator member forming each first groove portion, and an outer peripheral surface of the actuator member corresponding to each second groove portion and forming each second groove portion. A first electrode formed over each is formed.

In the ink ejecting apparatus according to the seventh aspect, by effectively utilizing the propagation of the pressure fluctuation in the ink liquid chamber due to the piezoelectric thickness sliding deformation of the actuator member,
Ink is ejected from the nozzle.

In the ink jet device according to the eighth aspect, the actuator member can be easily formed without performing grooving processing by being manufactured by injection molding using a material having a piezoelectric action, and mass production is possible. Excellent in.

[0028]

An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, an ink ejecting apparatus 100 according to an embodiment of the present invention has a first groove portion 102 forming a non-ink liquid chamber and a second groove 103 forming an ink liquid chamber.
An actuator 101 in which the ink is formed, a nozzle plate 131 in which an ink ejection nozzle 132 (see FIGS. 6 to 7) is formed, and a cover plate 133 that seals the end of each groove.
A manifold cover plate 134 having an ink supply port 135 on the release surface of the second groove portion; and a first FPC board 141 electrically connected to the first electrode 121 provided in the first groove portion 102, The second FPC board 142 is electrically connected to the second electrode 122 provided in the second groove 103.

The actuator 101 is made of a lead zirconate titanate (PZT) piezoelectric ceramic material, and in particular, the actuator 1 according to the present embodiment.
01 is manufactured by an injection molding method or the like. As shown in FIG. 2, the actuator 101 has, for example, a depth of 400 μm.
m, a width of 80 μm, extending in the ZZ ′ line direction, and having a plurality of first groove portions 102 having openings that open upward in the figure, and having a depth of 400 μm and a width of 80 μm extending in the ZZ ′ line direction, A plurality of second groove portions 103 having openings that open downward in the figure are alternately arranged and formed in a line.
Further, the side wall 108 extending between the first groove portion 102 and the second groove portion 103 has a thickness of, for example, 80 μm.

Further, the first groove portion 102 and the second groove portion 1
The opening 03 is formed from one end of each groove to approximately half in the longitudinal direction. The first half portion of the actuator 101 having the opening is the driving portion 11 in the figure.
5. Actuator 10 in which the opening is not formed
The latter half of the figure in FIG. 1 constitutes the reinforcing portion 109. The reinforcing portion 109 ensures the rigidity of the actuator 101,
Actuator 10 even if it is subjected to printing drive or unexpected impact
I try not to damage 1.

The actuator 101 is provided with a first inclined portion 104 in which the opening of the first groove portion 102 expands from the groove width to, for example, 160 μm in order to improve the mold releasability from the mold during the injection molding. In addition, the first groove 102
On the upper surface in the drawing of the drive unit 115 where the ridge is not formed, the second inclined from the boundary with the reinforcing portion 109 toward the front surface in the drawing.
An inclined portion 106 is provided. Similarly, the second groove portion 10
The third opening extends from the groove width to, for example, 160 μm
The reinforcing portion 1 is provided on the lower surface in the figure of the driving portion 115 which is provided with the inclined portion 105 and in which the second groove portion 103 is not formed.
A fourth inclined portion 107 that inclines from the boundary with 09 toward the front surface in the drawing is provided.

As shown in FIG. 3, the actuator 101 formed as described above by injection molding is sandwiched between electrodes for polarization 156 and 157, and is placed in insulating oil at 80 to 130 ° C. for 2 to 4 kV / mm. An electric field is applied. This allows
The actuator 101 is polarized parallel to the longitudinal direction of the groove portions 102 and 103, as shown by the arrow 120 in FIG. The polarization method is not limited to the above-mentioned method, and a method such as corona discharge may be used.

Next, the first side surface 1 inside the first groove 102 is formed by a dry method such as a sputtering method or a vapor deposition method.
11, on the surfaces of the first inclined portion 104 and the second inclined portion 106,
A first electrode 121 made of metal is formed. Also, the second
The second side surface 112 and the third inclined portion 105 inside the groove 103.
And the second bottom surface 1 inside the fourth inclined portion 107 and the second groove portion 103.
A second electrode 122 made of metal is formed on the surface of 14. At this time, as shown in FIGS. 4 to 5, the metal electrode is formed only in the portion corresponding to the driving portion 115 of the actuator 101, and the metal electrode is not formed in the portion corresponding to the reinforcing portion 109. In addition, the first bottom surface 11 inside the first groove portion 102
3 and the inner surface of the through hole 110 of the reinforcing portion 109 is not formed with a metal electrode.

In the conventional example shown in FIG. 13, the polarization direction coincides with the height direction of the actuator wall 603. Therefore, in order to deform the entire surface of the actuator wall 603 by the thickness sliding deformation, the actuator wall 603 has a longitudinal direction. Although it was necessary to form the electrode 621 over the entire length, in the actuator 101 of the present embodiment, since the polarization direction 120 coincides with the length direction of the first groove portion 102, the front surface of the side wall 108 is deformed by thickness slippage. It is not necessary to form the electrodes 121 and 122 over the entire length of the side wall 108 in the vertical direction. Therefore, the electrodes 121 and 122 may be formed only on the surface of the side wall 108 that separates the first groove 102 and the second groove 103 of the driving unit 115, and the electrodes 121 and 122 are formed in the reinforcing portion 110 where it is difficult to form the electrodes. It is not necessary to form a metal electrode on the inner surface of each groove. In the present invention, the lengths of the electrodes 121 and 122 to be formed are not limited, but in the present embodiment, in consideration of the ease of electrode formation and the displacement amount of the actuator 101 during driving, the groove portions 102, It is formed up to a position corresponding to substantially the center of 103.

Here, a method by vapor deposition will be illustrated as a method for forming the metal electrode. As shown in FIG. 2, in the actuator 101 that has been polarized, a masking material is applied to the end face (front face in the figure) on the drive unit 115 side where the ends of the groove portions 102 and 103 are open. From the end face (front face in the drawing) on the side of the drive unit 115, the actuator 101 subjected to the masking process is formed into the groove portions 102, 1
Direction 123, 12 having a predetermined angle in the arrangement direction of 03
Deposition is performed from 4. At this time, as shown in FIG. 4 which is a cross-sectional view taken along the YZ plane in FIG. 2, the angle θ is set so that the electrodes 121 and 122 are formed only in the driving unit 115 by utilizing the shielding effect of the side wall 108. Set and deposit. Further, in the present embodiment, the vapor deposition directions 123 and 124 also have an angle with the vertical direction of the actuator 101, and the vapor deposition directions 123 and 124 are formed so that the metal electrodes are formed on the second bottom surface 114 of the second groove portion 103. Is slightly angled so as to face diagonally upward in the figure. The vapor deposition direction 123 and the vapor deposition direction 124 are symmetric on a vertical plane parallel to the longitudinal direction of each groove.

The actuator 101 includes the second inclined portion 10
The sixth and fourth inclined portions 107 are inclined so as to face the vapor deposition directions 123 and 124. Therefore, these two directions 123,
Only by vapor deposition from 124, the second groove portions 103 (= ink liquid chambers) are individually formed on the outer peripheral surface of the side wall 108 constituting each second groove portion 103 as shown in FIG. Formed first electrode 121 and all corresponding second groove portions 1
And the second electrode 122 common to 03. That is, in the present embodiment, the first and second electrodes 121, 1 can be formed without complicated processing such as masking and cutting.
22 can be formed on the side surface inside each groove 123, 124 from the end of the groove to a substantially central portion in the longitudinal direction. Therefore, the number of steps involved in electrode formation can be reduced,
Excellent productivity.

Next, as shown in FIG. 6, a nozzle plate 131 having a nozzle 132 at a position corresponding to the second groove portion 103 (= ink liquid chamber) is provided on one end surface of the actuator 101 on the side of the reinforcing portion 109. Bonding is performed with an epoxy adhesive (not shown). The nozzle plate 131 is formed of a plastic such as polyalkylene (for example, ethylene) terephthalate, polyimide, polyetherimide, polyetherketone, polyethersulfone, polycarbonate, cellulose acetate or the like.

A cover plate 133 is bonded to an end surface of the actuator 101 opposite to the end surface to which the nozzle plate 131 is bonded (on the side of the driving portion 115) with an epoxy adhesive (not shown).

First groove formed at the same pitch as the first groove portion 102
The first FPC board 141 having the electrode pattern 143,
The first electrode pattern 143 and the first electrode 121 on the second inclined portion 106 are joined to the actuator 101 by soldering, and similarly, the second electrode pattern formed at the same pitch as the second groove portion 103. Second FP with 144
The C substrate 142 is provided with a second electrode pattern 144 and a fourth electrode pattern 144.
The actuator 101 is joined by soldering the second electrode 122 on the inclined portion 107. Since the second electrode 122 is a common electrode, the second electrode pattern 1 to be joined is formed.
44 may be a single electrode.

A manifold cover plate 134 having an ink supply port 135 on the open surface of the second groove 103 is also provided.
As shown in FIG. 7, the cover plate 133 and the second
It is joined to the FPC board 142 with an epoxy adhesive (not shown). As shown in FIG. 1, the third inclined portion 105 and the fourth inclined portion 105
A space surrounded by the inclined portion 107, the cover plate 133, and the manifold cover plate 134 is a manifold 136.
Becomes Both ends of the manifold 136 are sealed by lids (not shown).

As a result, the second groove portion 1 which is the ink liquid chamber
03, a side wall 108 of which at least a part is made of piezoelectric ceramics, and a plurality of electrodes 121 and 122 are produced.

Next, a control circuit for controlling the drive of the ink jet device 100 will be described. As shown in FIG. 8, the first electrode pattern 14 on the first FPC board 141 is formed.
3 and the second electrode pattern 144 on the second FPC board 142 are individually connected to the LSI chip 151,
The clock line 152, the data line 153, the voltage line 154, and the ground line 155 are also the LSI chip 151.
It is connected to the. The LSI chip 151 determines which nozzle 132 should eject an ink droplet from the data appearing on the data line 153 based on the continuous clock pulses supplied from the clock line 152. The LSI chip 151 is driven by the second
The voltage V of the voltage line 154 is applied to the first electrode pattern 143 which is electrically connected to the first electrode 121 corresponding to the groove 103, and is electrically connected to the first electrode 121 corresponding to the second groove 103 other than the second groove 103. First electrode pattern 143
Then, the earth line 155 is connected to the second electrodes 122 in all the second groove portions 103 to be grounded.

Next, the ink ejecting apparatus 10 according to the present embodiment.
The operation of 0 will be described with reference to FIGS. 9 to 12. 9 and 11 are horizontal cross-sectional views of the ink ejecting apparatus 100, and FIGS. 10 and 12 are vertical cross-sectional views taken along the XX 'plane.

In order to eject ink droplets from the second groove portion 103b of FIG. 9, a first portion corresponding to the second groove portion 103b is ejected.
A voltage pulse is applied to the electrode 121b (where applying a voltage to a certain first electrode 121 means
It means applying a voltage pulse to the electrode 121 and grounding the first electrode 121 which is not instructed). The second electrodes 122 are all grounded. Then, as shown in FIGS.
An electric field in the direction of arrow 145 is generated in the side wall 108c, and an electric field in the direction of arrow 146 is generated in the side wall 108d.
The volume of 3b moves in an increasing direction. Then, the nozzle 13
The pressure in the second groove portion 103b including the vicinity of 2b is reduced.
As a result, the second groove portion 103b is supplied from an ink supply source (not shown) via the ink supply port 135 and the manifold 136.
Ink is supplied to.

The displacement of the actuator 101 does not occur at the joint between the actuator 101 and the manifold cover plate 134, and the adjacent ink liquid chamber is affected by the driving of the ink liquid chamber in the vicinity. There is no. That is, it does not suffer from so-called crosstalk. Further, in this embodiment, the side walls 108c and 108d are displaced so as to bend in the longitudinal direction due to the piezoelectric thickness sliding effect. Therefore, the joint surface between the actuator 101 and the nozzle plate 131 or the cover plate 133 is not subjected to an unreasonable stress, and the durability is good. At the same time, the displacement of the volume of the ink liquid chamber can be increased as compared with the conventional one.

Next, when the voltage pulse applied to the first electrode 121b is stopped and the first electrode 121b is grounded, the volume of the second groove portion 103b decreases from the increased state to the natural state, The volume of the second groove portion 103b decreases,
The ink in the second groove portion 103b becomes an ink droplet,
It is ejected from the nozzle 132b.

Further, in the above embodiment, first, the driving voltage is applied so that the volume of the second groove portion 103b is increased, the ink is supplied to the second groove portion 103b, and the application of the driving voltage is stopped so that the second voltage is applied. Although the volume of the groove portion 103b is reduced from the increased state to the natural state and the ink in the second groove portion 103b is ejected as ink droplets, on the contrary, the second groove portion 1
The drive voltage is applied in the direction of decreasing the volume of 03b to eject ink droplets, and then the application of the drive voltage is stopped, and the second groove portion 1
Ink may be supplied to the second groove 103 by increasing the volume of 03 in a natural state.

As described above, in the ink ejecting apparatus 100 of this embodiment, the first sidewalls 108 are formed on both side surfaces of the first sidewall 108.
The groove portions 102 and the second groove portions 103 are formed alternately and the opening directions thereof are opposite to each other. Then, in each of the groove portions 102 and 103, the first electrode 121 and the second electrode 12 are formed.
2 are provided, each of which is a different FPC board 141, 14
2 from the upper surface and the lower surface of the actuator 101
Since they are electrically connected from the direction, they can be formed with a pitch twice as wide as the conventional one. Therefore, electrical connection with the first electrode pattern 143 formed on the first FPC board 141 and electrical connection with the second electrode pattern 144 formed on the second FPC board 142 can be easily and reliably performed.

Further, in this embodiment, since the second electrode 122 formed on the side surface on the ink liquid chamber side is formed as the common electrode, an electric field due to a short circuit between the second electrodes 122 is generated between the ink liquid chambers. Never be generated. Therefore, the deterioration of the ink in the ink liquid chamber due to the electrical effect and the second electrode 12
2 does not cause deterioration. Therefore, it is not necessary to form an insulating layer on the second electrode 122 as in the conventional case. Further, by using the common electrode, the total number of electrodes can be reduced, and the electrical connection with the control circuit that performs drive control becomes easy.

Further, the actuator 101 of this embodiment is integrally formed by injection molding, and the actuator 101 can be easily formed without grooving, which is excellent in mass productivity.

It should be noted that the present invention is not limited to the above-mentioned embodiment, and can be modified within the scope of the invention. For example, in the above embodiment, the actuator 1
01 is entirely made of a PZT piezoelectric ceramic material, but only the drive portion 115 of the actuator 101 is made of PZ.
Alternatively, the actuator 101 may be formed by forming the piezoelectric ceramic material of ZT and forming the reinforcing portion 109 of alumina or the like, and then bonding the two together.

In the above embodiment, the actuator 10
Although 1 is integrally formed by injection molding, it may be formed by processing a piezoelectric ceramic plate by dicing or the like.

In the above embodiment, the second electrode 12
2 is always grounded, all the first electrodes 121 are grounded in a normal state, and the corresponding first electrodes 12 are ejected when ejecting ink.
Although the ink ejection is controlled by applying a voltage to No. 1, on the contrary, the voltage V is always applied to the second electrode 122, and all the first electrodes 121 are kept in a high impedance state in normal times. Every time, the first corresponding when ejecting ink
The ejection of ink may be controlled by grounding the electrode 121 and setting the other first electrodes 121 in a high impedance state. Even by this control, an electric field is not generated between the ink liquid chambers, so that the deterioration of the ink in the ink liquid chambers due to an electrical effect or the second electrode 1 is caused.
22 does not cause deterioration.

Further, in the above embodiment, the ink is supplied only to the second groove portion 103 to eject the ink, but the ink is also supplied to the first groove portion 102 to eject the ink at a double density. You may In this case, a manifold cover plate (not shown) needs to be joined to the open portion of the first groove portion 102, and the second electrodes 122 also need to be individually provided instead of being a common electrode. As a driving method, the ink ejection from the ink liquid chamber of the first groove portion 102 and the ink ejection from the ink liquid chamber of the second groove portion 103 are temporally shifted, and each ink ejection is performed with the same voltage as in the above embodiment. It is conceivable that the control is performed.

[0056]

As described above, in the ink ejecting apparatus according to this embodiment, the first electrode and the second electrode formed on both side surfaces of one side wall are electrically connected to each other on different surfaces. Therefore, the pitch of the electrode pattern is wider than in the conventional case, the electric connection between the drive electrode and the control circuit for performing drive control is easy, and mass productivity and reliability are improved.

Further, in the ink ejecting apparatus of the present invention, when a driving electric field is applied between the first electrode and the second electrode, the piezoelectric ceramics portion of the actuator member causes the longitudinal direction of the ink chamber. Piezoelectric thickness slips and deforms in the direction, and the volume of the groove portion that abuts the actuator member is greatly changed, and ink is ejected accurately. Further, this displacement does not give a great stress to the ink ejecting apparatus, and it is possible to provide an ink ejecting apparatus having excellent durability.

[Brief description of drawings]

FIG. 1 is a perspective view showing an ink ejecting apparatus of an embodiment of the invention.

FIG. 2 is a perspective view showing a manufacturing process of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 3 is a perspective view showing a manufacturing process of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 4 is a cross-sectional view showing a manufacturing process of the ink ejecting apparatus of the embodiment of the invention.

FIG. 5 is a perspective view showing a manufacturing process of the ink ejecting apparatus of the embodiment of the invention.

FIG. 6 is a perspective view showing a manufacturing process of the ink ejecting apparatus of the embodiment of the invention.

FIG. 7 is a transverse cross-sectional view showing the manufacturing process of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 8 is a block diagram showing a control circuit of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 9 is an explanatory diagram showing an operation of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 10 is an explanatory diagram showing an operation of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 11 is an explanatory diagram showing an operation of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 12 is an explanatory diagram showing the operation of the ink ejecting apparatus of the embodiment of the invention.

FIG. 13 is a diagram showing a conventional ink ejecting apparatus.

[Explanation of symbols]

 100 Ink Ejector 102 First Groove 103 Second Groove 108 Side Wall 120 Polarization Direction 121 First Electrode 122 Second Electrode

Claims (8)

[Claims] 1. A plurality of ink liquid chambers for ejecting ink, an actuator member at least a part of which is formed by polarized piezoelectric ceramics, and electrodes for generating a driving electric field in the piezoelectric ceramics. In an ink ejecting apparatus that ejects ink from the ink liquid chamber by deforming the actuator member by generation of an electric field from the electrode, the actuator member is provided on a first groove portion and both sides of the first groove portion, And the opening direction of the said 1st groove part is opened in the opposite direction, and the longitudinal direction has a 2nd groove part of the same direction as the longitudinal direction of the said 1st groove part, The said electrode is at least inside the said 1st groove part. A first electrode formed on a side surface and a second electrode formed on at least a side surface inside the second groove portion, and at least the first groove portion and the second groove portion. The other one constitutes the ink liquid chamber, and the polarization direction of the piezoelectric ceramics in the actuator member is parallel to the longitudinal direction of each groove portion, and at least one of the first and second electrodes has each groove portion. The ink is formed on the inner side surface from one end of the groove to an intermediate portion in the longitudinal direction, whereby a driving electric field can be applied substantially perpendicularly to the polarization direction of the piezoelectric ceramics. Injection device. 2. In the actuator member, the second groove portion formed in the actuator member constitutes an ink liquid chamber, the first groove portion constitutes a non-ink liquid chamber, and the electrode comprises the The ink ejecting apparatus according to claim 1, wherein one of the first electrode and the second electrode is configured as an electrode common to the corresponding groove portions. 3. The electrode comprises the first electrode as a drive electrode formed over the outer peripheral surface of an actuator member forming each ink liquid chamber, corresponding to each ink liquid chamber. , Said second electrode with all its corresponding second electrodes
The ink ejecting apparatus according to claim 2, wherein the ink ejecting apparatus is configured as a common electrode in the groove portion. 4. At least one of the first and second electrodes is formed on a side surface inside each groove portion so as to cover approximately half in the longitudinal direction from one end portion of the groove portion. The ink ejecting apparatus according to claim 1. 5. The first and second electrodes are vapor-deposited from two directions having a predetermined angle in the direction in which each groove is arranged, from the end surface side of the actuator member where the end of the ink liquid chamber is open. The ink ejecting apparatus according to claim 1, wherein the ink ejecting apparatus is formed by the above. 6. The ink ejecting apparatus according to claim 5, wherein the actuator member is inclined such that upper and lower end surfaces thereof face the vapor deposition direction. 7. The ink ejecting nozzle is formed corresponding to each of the ink liquid chambers on the end face side of the actuator member in which the tip of the ink liquid chamber is opened. The ink jetting device according to any one of 1. 8. The ink ejecting apparatus according to claim 1, wherein the actuator member is manufactured by injection molding using a material having a piezoelectric effect.