JPH08235526A - Magnetic head device and its production - Google Patents
Magnetic head device and its productionInfo
- Publication number
- JPH08235526A JPH08235526A JP3810595A JP3810595A JPH08235526A JP H08235526 A JPH08235526 A JP H08235526A JP 3810595 A JP3810595 A JP 3810595A JP 3810595 A JP3810595 A JP 3810595A JP H08235526 A JPH08235526 A JP H08235526A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- magnetic
- hole
- head
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気ヘッド装置及びそ
の製造方法に係り、特に磁気記録装置の記録情報の読み
取り，書き込みを行う磁気ヘッド装置及びその製造方法
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head device and a method for manufacturing the same, and more particularly to a magnetic head device for reading and writing recorded information in a magnetic recording device and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】従来の磁気ヘッド装置としては、例え
ば、カズヒコ・ヤマダ他，ジャーナル・オブ・アプライ
ド・フィジクス誌，第５５巻，６号，１９８４年，２２
３５ページに開示されているものがある。これによる
と、この従来の磁気ヘッド装置は、セラミック基板上に
ヘッド本体５２を構成する下部磁性体パターン，絶縁
膜，薄膜導体コイルパターン，絶縁膜，上部磁性体パタ
ーン，及び保護膜が順に積層されて形成される。2. Description of the Related Art As a conventional magnetic head device, for example, Kazuhiko Yamada et al., Journal of Applied Physics, Vol. 55, No. 6, 1984, 22.
Some are disclosed on page 35. According to this, in this conventional magnetic head device, the lower magnetic material pattern, the insulating film, the thin film conductor coil pattern, the insulating film, the upper magnetic material pattern, and the protective film, which form the head body 52, are sequentially stacked on the ceramic substrate. Formed.
【０００３】上述した磁気ヘッド装置は、このヘッド本
体５２が形成された後にセラミック基板がスライダー５
９の形状に加工され、該スライダー５９に適度の剛性を
有するサスペンション５６が付設されて成る構成となっ
ている。この従来の磁気ヘッド装置は、磁気記録媒体５
７から所定間隔浮上した状態で読みだし又は書き込みが
行われる。In the magnetic head device described above, the ceramic substrate is provided with the slider 5 after the head body 52 is formed.
The slider 59 is processed into a shape of 9, and a suspension 56 having an appropriate rigidity is attached to the slider 59. This conventional magnetic head device includes a magnetic recording medium 5
Reading or writing is performed in a state of being levitated at a predetermined interval from 7.
【０００４】さらに、磁気記録媒体に接触して用いられ
る磁気ヘッド装置が、特開昭５７−１３３５１２号公報
に開示されている。この磁気ヘッド装置は、フェライト
等の硬度の高い材料をスライダーの基板としており、上
述の各磁気ヘッド装置と同様に、基板にサスペンション
が付設される構成となっている。記録情報の読み出し，
書き込みは、このサスペンションを介して回転する磁気
記録媒体７上を移動して行われる。Further, a magnetic head device used in contact with a magnetic recording medium is disclosed in Japanese Patent Application Laid-Open No. 57-133512. In this magnetic head device, a material having a high hardness such as ferrite is used as a substrate of the slider, and a suspension is attached to the substrate like the magnetic head devices described above. Read recorded information,
Writing is performed by moving on the rotating magnetic recording medium 7 via this suspension.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記の
各実施例の内、磁気記録媒体からスライダーが浮上した
状態で読み出し，書き込みを行う磁気ヘッド装置につい
ては、セラミックス製のスライダーが、不用意な外部か
らの衝撃或いはスライダーと磁気記録媒体の吸着などに
より、該スライダーと該磁気記録媒体が衝突し、それに
より、磁気記録媒体が損傷すると共に記録情報が失われ
る恐れがあった。かかる不都合は、記録密度向上のため
にスライダーと磁気記録媒体との間隔が縮減される程、
増加する傾向にある。However, in the above-mentioned respective embodiments, in the magnetic head device for reading and writing in the state where the slider floats above the magnetic recording medium, the slider made of the ceramic is not careless. There is a possibility that the slider and the magnetic recording medium may collide with each other due to the impact from the above or the slider and the magnetic recording medium may be attracted, thereby damaging the magnetic recording medium and losing the recorded information. The disadvantage is that as the distance between the slider and the magnetic recording medium is reduced to improve the recording density,
It tends to increase.
【０００６】さらに、特開昭５７−１３３５１２号公報
に開示されている磁気ヘッド装置の場合には、記録情報
の読み取り，書き込みが、ヘッド本体が磁気記録媒体に
接触した状態で行われている。しかしながら、該ヘッド
本体を搭載したスライダーを構成する材料の硬度が高い
ため、不用意な衝撃によりこのスライダーと磁気記録媒
体とが衝突を起こし易く、同様に磁気記録媒体が損傷す
る恐れがあった。Further, in the case of the magnetic head device disclosed in Japanese Patent Laid-Open No. 57-133512, reading and writing of recorded information is performed in a state where the head body is in contact with the magnetic recording medium. However, since the hardness of the material forming the slider on which the head body is mounted is high, the slider and the magnetic recording medium are likely to collide with each other due to an inadvertent impact, and the magnetic recording medium may be damaged.
【０００７】また、ヘッド本体が磁気記録媒体と接触状
態にあり、これらの間に生じる吸着が浮上状態にあるよ
りも起こりやすくなるという不都合を有しており、これ
については、特開昭６２−１５９３２９号公報に開示さ
れているようにスライダーに対する微細加工が提案され
ている。Further, there is a disadvantage that the head body is in contact with the magnetic recording medium, and the attraction between them is more likely to occur than in the floating state. As disclosed in Japanese Patent No. 159329, fine processing for a slider has been proposed.
【０００８】しかしながら、その微細加工については、
実際上、加工精度を上げることが困難であり、微細加工
部分による磁気記録媒体の損傷を誘発する可能性を有す
るという不都合が生じていた。However, regarding the fine processing,
In practice, it is difficult to increase the processing accuracy, and there is a disadvantage that it may induce damage to the magnetic recording medium due to the finely processed portion.
【０００９】[0009]
【発明の目的】本発明は、かかる従来例の有する不都合
を改善し、特に、磁気記録媒体の損傷を防止する磁気ヘ
ッド装置及びその製造方法を提供することを目的とす
る。SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic head device and a method of manufacturing the magnetic head device, in which the disadvantages of the conventional example are improved and, in particular, the magnetic recording medium is prevented from being damaged.
【００１０】[0010]
【課題を解決するための手段】本発明では、適度な強度
を有する薄膜有機膜と、この薄膜有機膜上に絶縁膜を介
して順次積層された下コイル部，ヘッド用磁極部，およ
び上コイル部と、この上コイル部および下コイル部を連
結する導電材が充填されたコンタクトホールとを備え、
ヘッド用磁極部の一端部に、薄膜有機膜を貫通する磁極
用貫通穴を設けると共に、この磁極用貫通穴にヘッド用
磁極部と一体化され磁極部材を充填する構成となってい
る。According to the present invention, a thin film organic film having an appropriate strength, a lower coil part, a head magnetic pole part, and an upper coil which are sequentially laminated on the thin film organic film via an insulating film. And a contact hole filled with a conductive material connecting the upper coil portion and the lower coil portion,
A magnetic pole through hole that penetrates the thin film organic film is provided at one end of the magnetic pole portion for the head, and the magnetic pole through hole is integrated with the magnetic pole portion for the head and is filled with a magnetic pole member.
【００１１】さらに、薄膜有機膜は、その磁極用貫通穴
部分の所定領域が、記録媒体に向けて幾分突設された形
状に形成されていても良い。Further, the thin film organic film may be formed in a shape in which a predetermined region of the through hole for the magnetic pole is provided so as to project somewhat toward the recording medium.
【００１２】また、上述した磁気ヘッド装置の製造方法
は、導電性支持基板上に薄膜有機膜を着脱自在に貼付す
る第１の工程と、薄膜有機膜上に下コイル部を成す下コ
イルパターンを成膜する第２の工程と、下コイル部の一
端の近部に磁極用貫通穴を設けると共にこの磁極用貫通
穴部分を含んで下コイル部の中央軸部分に絶縁膜を介し
てヘッド用磁極パターンを積層し且つ磁極用貫通穴に磁
極部材を充填する第３の工程と、ヘッド用磁極パターン
上に上コイル部を成す上コイルパターンを絶縁膜を介し
て成膜すると共に，当該上コイルパターンの成膜に先だ
って絶縁膜に，該上コイル部と下コイル部の各単位コイ
ルの両端を連結するコンタクトホールを設ける第４の工
程とを備える構成となっている。In the method of manufacturing the magnetic head device described above, the first step of removably attaching the thin film organic film on the conductive support substrate and the lower coil pattern forming the lower coil portion on the thin film organic film. The second step of forming a film, and forming a through hole for a magnetic pole near one end of the lower coil portion, and including the through hole portion for the magnetic pole, a magnetic pole for a head through an insulating film in the central shaft portion of the lower coil portion. A third step of stacking the patterns and filling the through hole for the magnetic pole with the magnetic pole member; forming an upper coil pattern forming an upper coil portion on the magnetic pole pattern for the head through an insulating film; Prior to the film formation, the fourth step is provided in the insulating film to provide contact holes for connecting both ends of each unit coil of the upper coil portion and the lower coil portion.
【００１３】本発明では、これらの手段により前述した
目的を達成しようとするものである。The present invention aims to achieve the above-mentioned object by these means.
【００１４】[0014]
【作用】本発明では、磁気ヘッド装置が適度な強度を有
する薄膜有機膜を有しており、この薄膜有機膜を介して
磁気ヘッド装置全体の移動動作が行われる。つまり回転
を行う磁気記録媒体上の所定箇所に、磁気ヘッド装置が
移動され、薄膜有機膜上に設けられたヘッド用磁極部の
一端部に貫通した磁極用貫通穴の周囲が磁気記録媒体に
接触した状態で、記録情報の読み出し，書き込みが行わ
れる。In the present invention, the magnetic head device has a thin film organic film having an appropriate strength, and the moving operation of the entire magnetic head device is performed through this thin film organic film. That is, the magnetic head device is moved to a predetermined position on the rotating magnetic recording medium, and the periphery of the magnetic pole through hole penetrating one end of the magnetic pole portion for the head provided on the thin film organic film contacts the magnetic recording medium. In this state, the recording information is read and written.
【００１５】[0015]
【実施例】本発明の一実施例を、図１及び図２に基づい
て説明する。ここで、図１は本実施例の一部省略した平
面図であり、図２は本実施例の概略断面図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to FIGS. Here, FIG. 1 is a partially omitted plan view of this embodiment, and FIG. 2 is a schematic cross-sectional view of this embodiment.
【００１６】本実施例は、適度な強度を有する薄膜有機
膜１と、この薄膜有機膜１上に図示しない絶縁膜を介し
て順次積層された下コイル部２Ａ，ヘッド用磁極部４，
および上コイル部２Ｂと、この上コイル部２Ｂおよび下
コイル部２Ａを連結する導電材が充填された図示しない
コンタクトホールとを備え、さらに、ヘッド用磁極部４
の一端部に、薄膜有機膜１を貫通する磁極用貫通穴３を
設けると共に、この磁極用貫通穴３にヘッド用磁極部４
と一体化された磁極部材を充填した構造となっている。In this embodiment, a thin film organic film 1 having an appropriate strength, a lower coil portion 2A, a head magnetic pole portion 4, which are sequentially laminated on the thin film organic film 1 with an insulating film (not shown) interposed therebetween.
And an upper coil portion 2B, and a contact hole (not shown) filled with a conductive material connecting the upper coil portion 2B and the lower coil portion 2A, and further, the head magnetic pole portion 4
A magnetic pole through hole 3 penetrating the thin film organic film 1 is provided at one end of the magnetic pole through hole 3, and the magnetic pole through hole 3 is provided in the magnetic pole through hole 3.
It has a structure in which a magnetic pole member integrated with is filled.
【００１７】これを詳述すると、薄膜有機膜１は厚さ３
００［μｍ］のポリイミド膜を使用した膜状の部材であ
り、この薄膜有機膜１が磁気記録媒体７に対向して配設
されると共に磁気記録媒体７との接触領域をこの磁気記
録媒体７側に緩やかに突設させた形状をしている。この
薄膜有機膜１の突設部の裏側の面上には、突設部に近接
してコイル２，ヘッド用磁極部４等が設けられている。More specifically, the thin organic film 1 has a thickness of 3
This is a film-shaped member using a polyimide film of 00 [μm], and this thin film organic film 1 is disposed so as to face the magnetic recording medium 7, and a contact area with the magnetic recording medium 7 is formed in the magnetic recording medium 7. It has a shape that gently protrudes to the side. On the surface of the thin organic film 1 on the back side of the protruding portion, the coil 2, the magnetic pole portion 4 for the head and the like are provided close to the protruding portion.
【００１８】コイル２は、ヘッド用磁極部４を中心軸と
して螺旋状に形成されたＣｕから成る部材であり、この
螺旋状のコイル２をヘッド用磁極部４を含む平面で上下
方向に分割して成る下コイル部２Ａと上コイル部２Ｂと
から構成されている。これらの下コイル部２Ａと上コイ
ル部２Ｂが、磁気ヘッド装置の形成過程において一体的
に形成され、さらに導電材が充填されたコンタクトホー
ルにより電気的にも連結されることにより、通常のコイ
ルとして機能する。The coil 2 is a member made of Cu spirally formed around the magnetic pole portion 4 for head as a central axis, and the spiral coil 2 is divided in the vertical direction on a plane including the magnetic pole portion 4 for head. It is composed of a lower coil portion 2A and an upper coil portion 2B. The lower coil portion 2A and the upper coil portion 2B are integrally formed in the process of forming the magnetic head device, and are electrically connected by a contact hole filled with a conductive material to form a normal coil. Function.
【００１９】ヘッド用磁極部４は、前述したように螺旋
状のコイル２の中心軸位置に配設されており、その先端
部分は薄膜有機膜１の突設部における磁気記録媒体７と
対向する位置に貫通している磁極用貫通穴３に連結され
ている。この磁極用貫通穴３には、磁極部材としてのパ
ーマロイ材が充填されている。The magnetic pole portion 4 for the head is arranged at the central axis position of the spiral coil 2 as described above, and the tip end portion thereof faces the magnetic recording medium 7 in the protruding portion of the thin film organic film 1. It is connected to the magnetic pole through hole 3 which penetrates to the position. The magnetic pole through hole 3 is filled with a permalloy material as a magnetic pole member.
【００２０】以上の構成からなる本実施例の製造方法を
説明する。本実施例の製造方法は、導電性支持基板上に
薄膜有機膜１を着脱自在に貼付する第１の工程と、薄膜
有機膜１上に下コイル部２Ａを成す下コイルパターンを
成膜する第２の工程と、下コイル部２Ａの一端の近部に
磁極用貫通穴３を設けると共にこの磁極用貫通穴３部分
を含んで下コイル部２Ａの中央軸部分に絶縁膜を介して
ヘッド用磁極パターンを積層し且つ磁極用貫通穴３に磁
極部材を充填する第３の工程と、ヘッド用磁極パターン
上に上コイル部２Ｂを成す上コイルパターンを絶縁膜を
介して成膜すると共に，当該上コイルパターンの成膜に
先だって絶縁膜に，該上コイル部２Ｂと下コイル部２Ａ
の各単位コイルの両端を連結するコンタクトホールを設
ける第４の工程とを備えている。以下、これを図１に基
づいて詳述する。A manufacturing method of this embodiment having the above-mentioned structure will be described. The manufacturing method of the present embodiment includes a first step of detachably attaching the thin film organic film 1 on the conductive support substrate and a step of forming a lower coil pattern forming the lower coil portion 2A on the thin film organic film 1. Step 2, and the magnetic pole through hole 3 is provided near one end of the lower coil portion 2A, and the magnetic pole through hole 3 including the magnetic pole through hole 3 is formed in the central shaft portion of the lower coil portion 2A via an insulating film. The third step of stacking the patterns and filling the magnetic pole through hole 3 with the magnetic pole member, and forming the upper coil pattern forming the upper coil portion 2B on the magnetic pole pattern for the head through the insulating film, and Prior to forming the coil pattern, the upper coil portion 2B and the lower coil portion 2A are formed on the insulating film.
And a fourth step of providing a contact hole connecting both ends of each unit coil. Hereinafter, this will be described in detail with reference to FIG.
【００２１】（第１の工程）：まず、導電性支持基板上
に後刻取り外せる状態で薄膜有機膜１を伸張貼付する。(First step): First, the thin-film organic film 1 is stretch-attached on the conductive supporting substrate in a state where it can be removed later.
【００２２】（第２の工程）：薄膜有機膜１上に、磁気
ヘッド装置のヘッド用磁極部４に誘導磁場を発生するコ
イル２の下コイル部２Ａと，コイル２に連結される電極
用のパッドパターンとを形成する。(Second step): on the thin organic film 1, a lower coil portion 2A of the coil 2 for generating an induced magnetic field in the head magnetic pole portion 4 of the magnetic head device, and an electrode connected to the coil 2 are formed. Forming a pad pattern.
【００２３】薄膜有機膜１は、前述したように３００
［μｍ］厚のポリイミド膜を用い、コイル２の製造方法
としては、薄膜有機膜１上にまずコイル２の下コイル部
２Ａの型をフォトレジストパターンを通常の紫外線露光
を用いて形成する。これは紫外線に対して感光性を有す
るフォトレジストを薄膜有機膜１に塗布し、これを所望
の薄膜導体パターン状にパターニングするものである。
本実施例では、シップレイ社製のＡＺ１３５０Ｊを用い
てラインアンドスペースパターンを形成している。The thin organic film 1 has a thickness of 300 as described above.
As a method of manufacturing the coil 2, using a polyimide film having a thickness of [μm], first, a mold of the lower coil portion 2A of the coil 2 is formed on the thin film organic film 1 with a photoresist pattern using a normal ultraviolet exposure. In this method, a photoresist sensitive to ultraviolet rays is applied to the thin film organic film 1 and patterned into a desired thin film conductor pattern.
In this embodiment, the line and space pattern is formed using AZ1350J manufactured by Shipley.
【００２４】このフォトレジストの膜厚は２［μｍ］、
パターン幅は０．５［μｍ］である。この上から蒸着法
を用いて銅（Ｃｕ）を厚み１［μｍ］で成膜した。その
後レジストパターンをリムーバで除去して、リフトオフ
法によりコイル２の下コイル部２Ａのパターンを薄膜有
機膜１上に残存させた。The thickness of this photoresist is 2 [μm],
The pattern width is 0.5 [μm]. A film of copper (Cu) having a thickness of 1 [μm] was formed thereon by using a vapor deposition method. After that, the resist pattern was removed by a remover, and the pattern of the lower coil portion 2A of the coil 2 was left on the thin film organic film 1 by the lift-off method.
【００２５】ここで、Ｃｕの成膜方法としては、薄膜有
機膜１を損傷しない方法であれば、有機金属気相分解成
長法、電解或いは無電解めっき法、スパッタリング法な
ど、どのような方法を用いても良い。Here, as a Cu film forming method, any method such as a metal organic chemical vapor deposition method, an electrolytic or electroless plating method, a sputtering method, etc. may be used as long as it does not damage the thin film organic film 1. You may use.
【００２６】（第３の工程）：次にコイル２の下半分の
Ｃｕパターンを絶縁性の材料で被覆する。そして、塗布
型のイミド樹脂を厚み１．５［μｍ］塗布し、ベークす
ることで完全に架橋させポリイミド化した。この結果、
下コイル部２Ａのパターン上部は同時に平坦化される。(Third step): Next, the Cu pattern in the lower half of the coil 2 is covered with an insulating material. Then, a coating type imide resin was applied at a thickness of 1.5 [μm] and baked to completely crosslink and form a polyimide. As a result,
The upper portion of the pattern of the lower coil portion 2A is flattened at the same time.
【００２７】そして、このポリイミド膜と薄膜有機膜１
とに磁極用貫通穴３をフォーカスドイオンビーム（ＦＩ
ビーム）法により設け、薄膜有機膜１が貼付されている
導電性支持基板を電極にして磁極部材であるパーマロイ
材を電解めっきし磁極用貫通穴３を充填した。この磁極
用貫通穴３に充填されたパーマロイ材は、この後の工程
で形成されるヘッド用磁極部４と当接，一体化する。Then, the polyimide film and the thin film organic film 1
In addition, the through hole 3 for the magnetic pole is formed into a focused ion beam (FI
Beam) method, and the conductive support substrate having the thin film organic film 1 attached thereto is used as an electrode to electrolytically plate a permalloy material, which is a magnetic pole member, to fill the through hole 3 for the magnetic pole. The permalloy material filled in the through hole 3 for the magnetic pole comes into contact with and is integrated with the magnetic pole portion 4 for the head which will be formed in the subsequent step.
【００２８】ここで、磁極用貫通穴３の形成にＦＩビー
ム法を用いたが、フォトレジスト塗布、紫外線露光、現
像、Ｏ2ドライエッチング法を用いても良い。これらの
方法は、一般的であり、この磁気ヘッド装置の形成設備
と重複して行えるので、より生産に好適である。Although the FI beam method is used to form the through hole 3 for the magnetic pole, photoresist coating, ultraviolet exposure, development, or O 2 dry etching may be used. These methods are common and can be carried out redundantly with the forming equipment of this magnetic head device, and are therefore more suitable for production.
【００２９】また、磁極用貫通穴３の直径は、磁気記録
時のトラック幅になるため、この直径を調節することに
より、所定のトラック幅で磁気記録が行うことが可能と
なる。本実施例では、この直径を２［μｍ］とした。Further, since the diameter of the through hole 3 for the magnetic pole corresponds to the track width at the time of magnetic recording, by adjusting this diameter, magnetic recording can be performed with a predetermined track width. In this embodiment, this diameter is set to 2 [μm].
【００３０】（第４の工程）：次に、ヘッド用磁極部パ
ターンを、既に形成された下コイル部２Ａの中心軸位置
に形成する。このヘッド用磁極部４のパターンの先端部
には、前述の磁極用貫通穴３が位置している。図１に示
すように、ここでは、下コイル部２Ａの場合と同じフォ
トレジストプロセスを経て、さらに磁極用貫通穴３と同
様にしてパーマロイ材の蒸着法を行った。膜厚は１［μ
ｍ］、パターン幅は３［μｍ］である。これにより、パ
ーマロイ材からなるヘッド用磁極部４は、磁極用貫通穴
３に充填されたパーマロイ材と一体化している。(Fourth step): Next, the head magnetic pole portion pattern is formed at the central axis position of the already formed lower coil portion 2A. The magnetic pole through hole 3 is located at the tip of the pattern of the magnetic pole portion 4 for head. As shown in FIG. 1, here, the same photoresist process as in the case of the lower coil portion 2A was used, and then the permalloy material was vapor-deposited in the same manner as in the magnetic pole through hole 3. The film thickness is 1 [μ
m] and the pattern width is 3 [μm]. As a result, the head magnetic pole portion 4 made of the permalloy material is integrated with the permalloy material filled in the magnetic pole through hole 3.
【００３１】さらに、ヘッド用磁極部４のパターン上に
再度イミド樹脂を塗布し平坦化を行った後に、焼成ポリ
イミド化した。そして、下コイル部２Ａのパターンと上
コイル部２Ｂとの電気的な接点としてのコンタクトホー
ルを予め形成しておく。コンタクトホールはコイル２と
同じ材質であるＣｕ製のものを使用し、これにより、パ
ッド部分を電極として、Ｃｕをイオンとして含む溶液に
よる電解めっき法を用いることができる。Further, imide resin was applied again on the pattern of the magnetic pole portion 4 for the head to flatten it, and then it was baked into polyimide. Then, a contact hole is formed in advance as an electrical contact point between the pattern of the lower coil portion 2A and the upper coil portion 2B. A contact hole made of Cu, which is the same material as the coil 2, is used, whereby an electrolytic plating method using a solution containing Cu as ions can be used with the pad portion as an electrode.
【００３２】そして、上コイル部２Ｂのコイルパターン
及び電極用パッドを下コイル部２Ａと同様の手法で絶縁
性の材料を介して被覆することにより、ヘッド用磁極部
４を中心にしてその周りに誘導磁場発生用のコイル２が
螺旋状に巻回した状態を実現した。Then, by covering the coil pattern and the electrode pads of the upper coil portion 2B with an insulating material in the same manner as the lower coil portion 2A, the magnetic pole portion 4 for the head is centered around it. A state in which the coil 2 for generating the induction magnetic field is spirally wound is realized.
【００３３】これらコイル２，ヘッド用磁極部４は、保
護層としてのイミド樹脂５で被覆される。The coil 2 and the head magnetic pole portion 4 are covered with an imide resin 5 as a protective layer.
【００３４】そして、最後に導電性支持基板と薄膜有機
膜１を剥離させ、個々の磁気ヘッド装置として切り分け
る。このようにして、最終的には電極用のパッド部分が
ヘッド用磁極部４等から離れた位置に形成され、また、
ヘッド用磁極部４と一体化し且つ磁極用貫通穴３に充填
されたパーマロイが露出した構造の磁気ヘッド装置とな
る。この磁気ヘッド装置は、使用に際しては、薄膜有機
膜１を磁極用貫通穴３の周辺領域で記録媒体７側に突設
するように加圧した状態で固定する。Then, finally, the conductive support substrate and the thin film organic film 1 are peeled off to be cut into individual magnetic head devices. In this way, the pad portion for the electrode is finally formed at a position distant from the magnetic pole portion 4 for the head, and
The magnetic head device has a structure in which the permalloy that is integrated with the magnetic pole portion 4 for the head and is filled in the through hole 3 for the magnetic pole is exposed. When this magnetic head device is used, the thin film organic film 1 is fixed in a pressurized state so as to project toward the recording medium 7 side in the peripheral region of the magnetic pole through hole 3.
【００３５】上述の方法により、形成された磁気ヘッド
装置は、磁気記録媒体７に対して突設部が対向するよう
に配設され、読み出し，書き込みを行う際には、磁気ヘ
ッド装置全体が、磁気記録媒体７上を移動して所定のト
ラック位置を検索する。そして、該トラック位置で、薄
膜有機膜１の磁極用貫通穴３周辺の領域を磁気記録媒体
７に当接させた状態で記録情報の読みだし，書き込み動
作が行われる。The magnetic head device formed by the above-described method is arranged so that the projecting portions face the magnetic recording medium 7, and when reading and writing, the entire magnetic head device is It moves on the magnetic recording medium 7 to search for a predetermined track position. Then, at the track position, the recording information is read and the writing operation is performed while the region around the magnetic pole through hole 3 of the thin film organic film 1 is in contact with the magnetic recording medium 7.
【００３６】ここで、発明者は、上述した本実施例を従
来例（図２参照）に示したサスペンション５６に貼付固
定し、本実施例の磁極用貫通穴３を磁気記録媒体７に接
触させた状態で記録情報８の読み出し，書き込みを実験
的に行った。ここで使用した磁気記録媒体７は、フォン
ブリン系潤滑剤，スパッタリングカーボン保護膜，Ｃｏ
−Ｃｒ系磁気記録材料，強化ガラス基板から成るものを
用いた。Here, the inventor stuck and fixed this embodiment to the suspension 56 shown in the conventional example (see FIG. 2) and brought the magnetic pole through hole 3 of this embodiment into contact with the magnetic recording medium 7. The recorded information 8 was read and written experimentally in this state. The magnetic recording medium 7 used here is a fomblin lubricant, a sputtered carbon protective film, Co
A Cr-based magnetic recording material and a tempered glass substrate were used.
【００３７】上述の読み出し，書き込みの実験は、除振
台等の防振構造を有さない環境で、激しい振動が加えら
れて行われたが、本発明の磁気ヘッド装置と磁気記録媒
体７が衝突として媒体表面が傷つくことはなかった。The above-mentioned reading and writing experiments were conducted under violent vibration in an environment having no vibration isolation structure such as a vibration isolation table. However, the magnetic head device of the present invention and the magnetic recording medium 7 were The medium surface was not damaged by the collision.
【００３８】さらに、本発明者が評価系全体を人為的に
揺らせて見たところ、記録トラックを跳躍，移動するこ
とはあっても、磁気ヘッド部品と媒体が衝突及びそれに
よる損傷が生じることはなかった。Further, when the present inventor artificially shakes the entire evaluation system and sees it, the recording track may jump and move, but the magnetic head component and the medium may collide with each other and damage due to the collision may occur. There wasn't.
【００３９】また、本実施例の実験的な記録密度は、従
来の浮上タイプの磁気ヘッド部品を有する記録装置を大
きく上回る値である１０［Ｇｂ／ｉｎ2］が得られた。Further, the experimental recording density of this embodiment was 10 [Gb / in 2 ] which was much higher than that of the recording apparatus having the conventional flying type magnetic head component.
【００４０】ここで、以上の磁気ヘッド装置の製造方法
で用いた工程はここで記載されたものに限定されず、同
様の構造を実現することのできるあらゆる工程を用いて
良い。さらに、材料についても、本実施例で用いたポリ
イミド、パーマロイ、Ｃｕ等の材料に限定されるもので
はなく、本発明の磁気ヘッド部品の基本構成を実現でき
るものであれば、他の材料を使用しても良い。Here, the steps used in the method of manufacturing the magnetic head device described above are not limited to those described here, and any step that can realize a similar structure may be used. Further, the material is not limited to the materials such as polyimide, permalloy and Cu used in this embodiment, and other materials can be used as long as they can realize the basic structure of the magnetic head component of the present invention. You may.
【００４１】また、薄膜有機膜上に、複数のコイル，ヘ
ッド用磁極部，磁極用貫通穴等からなる複数のヘッド本
体を搭載したマルチ磁気ヘッド装置とする構成としても
良い。これにより、磁気記録媒体上での検索移動動作量
を小さくすることができるため該磁気ヘッド装置の長期
信頼性を向上させ、かつ記録情報へのアクセス時間を短
縮できる。特に、記録密度に応じた個数だけ並列して磁
気ヘッドを形成し、有機膜への磁極用貫通穴をそれに合
わせて形成した場合には、シーク動作が不要になるた
め、記録情報へのアクセス時間を大幅に減少することが
できる。Also, a multi-magnetic head device may be constructed in which a plurality of head bodies each having a plurality of coils, a magnetic pole portion for a head, a through hole for a magnetic pole, etc. are mounted on a thin organic film. As a result, the amount of search movement on the magnetic recording medium can be reduced, so that the long-term reliability of the magnetic head device can be improved and the access time to the recorded information can be shortened. Especially, when the magnetic heads are formed in parallel according to the recording density and the through holes for the magnetic poles are formed in the organic film in accordance with the magnetic heads, the seek operation becomes unnecessary, so that the access time to the recorded information is increased. Can be significantly reduced.
【００４２】また、ここで薄膜有機膜は、磁気記録媒体
側に突設部を設ける代わりに、磁気記録媒体側に弓なり
に弛ませる形状としても良い。Further, here, the thin film organic film may have a shape which is loosened in a bow shape on the magnetic recording medium side, instead of providing the protruding portion on the magnetic recording medium side.
【００４３】[0043]
【発明の効果】以上のように、本発明の磁気ヘッド装置
は、基本的には磁気記録媒体に対して接触状態で用いる
ことから、磁気記録媒体との間隔が減少するため、記録
密度は浮上状態で用いる従来の磁気ヘッド装置より向上
させることが可能である。As described above, since the magnetic head device of the present invention is basically used in contact with the magnetic recording medium, the distance between the magnetic recording medium and the magnetic recording medium is reduced, so that the recording density is increased. It is possible to improve the conventional magnetic head device used in the state.
【００４４】また、本発明は、薄膜有機膜上で記録情報
の読み取り，書き込みを行うため、スライダーを設ける
必要がなく、これにより、従来例の有するスライダーの
角部分等による破損を有効に防止するとともに、該磁気
記録媒体及びこの媒体上の潤滑材の損耗を縮減すること
ができる。Further, according to the present invention, since the recorded information is read and written on the thin film organic film, it is not necessary to provide a slider, which effectively prevents breakage due to a corner portion of the conventional slider. At the same time, the wear of the magnetic recording medium and the lubricant on this medium can be reduced.
【００４５】さらに、薄膜有機膜に突設部分を設け、こ
の突設部分で記録情報の読み取り，書き込みを行う構成
とした場合には、磁気記録媒体と突設部の緩やかな斜面
で当接し、これにより、従来例の有するスライダーの角
部分による破損等をより有効に防止するとともに、該磁
気記録媒体及びこの媒体上の潤滑材の損耗がより小さく
することができる。Further, when a protruding portion is provided on the thin film organic film and the recording information is read and written at this protruding portion, the magnetic recording medium and the protruding portion are brought into contact with each other on a gentle slope, This makes it possible to more effectively prevent damage to the slider due to the corners of the conventional example, and to further reduce the wear of the magnetic recording medium and the lubricant on the medium.
【００４６】またさらに、この突設部分により、不用意
な衝撃等の外的要因により磁気記録媒体と磁気ヘッド装
置とが衝突を生じた場合にも、薄膜有機膜の突設部分が
その弾性によりたわみが発生して、その衝撃を吸収する
ことが可能なため、磁気記録媒体との衝突による損傷は
有効に排除される。Furthermore, even when the magnetic recording medium and the magnetic head device collide with each other due to an external factor such as an inadvertent impact, the projecting portion of the thin film organic film is elastic due to its elasticity. Since the flexure is generated and the shock can be absorbed, the damage due to the collision with the magnetic recording medium is effectively eliminated.
【００４７】さらに有機膜上に形成した磁気ヘッド部品
を機械加工なく使用するため、部品製造、磁気記録装置
製造のスループットが非常に高いものが得られる。Further, since the magnetic head component formed on the organic film is used without machining, it is possible to obtain a very high throughput of component manufacturing and magnetic recording device manufacturing.
【００４８】さらに本発明では従来の磁気ヘッド部品製
造時に用いるようなスライダー材料の切削加工等の工程
が含まれないため、製造装置を単純化でき、かつ工程を
簡略化でき、さらに、スライダーの製造コストを削減す
ることができる。Further, since the present invention does not include the steps such as the cutting process of the slider material which is used in the conventional magnetic head part manufacturing, the manufacturing apparatus can be simplified and the steps can be simplified. The cost can be reduced.
【００４９】本発明により、上述した各効果を有する従
来にない優れた磁気ヘッド装置を提供することができ
る。According to the present invention, it is possible to provide an unprecedented excellent magnetic head device having the above-mentioned effects.
【図１】本発明の一実施例の一部省略した平面図であ
る。FIG. 1 is a partially omitted plan view of an embodiment of the present invention.
【図２】本発明の一実施例の一部省略した断面図であ
る。FIG. 2 is a partially omitted sectional view of an embodiment of the present invention.
【図３】従来例の斜視図である。FIG. 3 is a perspective view of a conventional example.
１ 薄膜有機膜 ２ コイル ２Ａ 下コイル部 ２Ｂ 上コイル部 ３ 磁極用貫通穴 ４ ヘッド用磁極部 ５ 保護膜 ７ 磁気記録媒体 ８ 記録情報 DESCRIPTION OF SYMBOLS 1 thin film organic film 2 coil 2A lower coil part 2B upper coil part 3 through hole for magnetic pole 4 magnetic pole part for head 5 protective film 7 magnetic recording medium 8 recording information
Claims (3)
薄膜有機膜上に絶縁膜を介して順次積層された下コイル
部，ヘッド用磁極部，および上コイル部と、この上コイ
ル部および前記下コイル部を連結する導電材が充填され
たコンタクトホールとを備え、 前記ヘッド用磁極部の一端部に、前記薄膜有機膜を貫通
する磁極用貫通穴を設けると共に、この磁極用貫通穴に
前記ヘッド用磁極部と一体化された磁極部材を充填した
ことを特徴とする磁気ヘッド装置。1. A thin film organic film having appropriate strength, a lower coil part, a head magnetic pole part, and an upper coil part, which are sequentially stacked on the thin film organic film with an insulating film interposed therebetween, and the upper coil part and A contact hole filled with a conductive material that connects the lower coil portion, and a magnetic pole through hole that penetrates the thin film organic film is provided at one end of the head magnetic pole portion, and the magnetic pole through hole is formed. A magnetic head device comprising a magnetic pole member integrated with the magnetic pole part for a head.
分の所定領域が、記録媒体に向けて幾分突設された形状
であることを特徴とした請求項１記載の磁気ヘッド装
置。2. The magnetic head device according to claim 1, wherein the thin film organic film has a shape in which a predetermined region of a through hole portion for a magnetic pole is provided so as to slightly project toward a recording medium.
在に貼付する第１の工程と、前記薄膜有機膜上に下コイ
ル部を成す下コイルパターンを成膜する第２の工程と、
前記下コイル部の一端部の近部に磁極用貫通穴を設ける
と共にこの磁極用貫通穴部分を含んで前記下コイル部の
中央軸部分に絶縁膜を介してヘッド用磁極パターンを積
層し且つ前記磁極用貫通穴に磁極部材を充填する第３の
工程と、前記ヘッド用磁極パターン上に上コイル部を成
す上コイルパターンを絶縁膜を介して成膜すると共に，
当該上コイルパターンの成膜に先だって前記絶縁膜に，
前記上コイル部と前記下コイル部の各単位コイルの両端
を連結するコンタクトホールを設ける第４の工程とを備
えていることを特徴とする磁気ヘッド装置の製造方法。3. A first step of removably attaching a thin film organic film on a conductive support substrate, and a second step of forming a lower coil pattern forming a lower coil portion on the thin film organic film.
A magnetic pole through hole is provided near one end of the lower coil portion, and a magnetic pole pattern for a head is laminated on the central shaft portion of the lower coil portion including the magnetic pole through hole via an insulating film. A third step of filling the magnetic pole through hole with a magnetic pole member, and forming an upper coil pattern forming an upper coil portion on the head magnetic pole pattern via an insulating film,
Prior to the formation of the upper coil pattern, on the insulating film,
A fourth step of providing a contact hole for connecting both ends of each unit coil of the upper coil section and the lower coil section, the manufacturing method of the magnetic head device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7038105A JP2865012B2 (en) | 1995-02-27 | 1995-02-27 | Magnetic head device and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7038105A JP2865012B2 (en) | 1995-02-27 | 1995-02-27 | Magnetic head device and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08235526A true JPH08235526A (en) | 1996-09-13 |
| JP2865012B2 JP2865012B2 (en) | 1999-03-08 |
Family
ID=12516199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7038105A Expired - Lifetime JP2865012B2 (en) | 1995-02-27 | 1995-02-27 | Magnetic head device and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2865012B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1087381A2 (en) * | 1999-09-24 | 2001-03-28 | Kabushiki Kaisha Toshiba | Magnetic head, fabrication method therefor and perpendicular magnetic storage device |
| EP1143419A2 (en) * | 2000-03-30 | 2001-10-10 | Kabushiki Kaisha Toshiba | Magnetic head, method for producing same, and magnetic recording and/or reproducing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03178017A (en) * | 1989-11-27 | 1991-08-02 | Censtor Corp | Integrated magnetic lead/light head/flexible body/conducting structural body |
| JPH0413211A (en) * | 1990-04-28 | 1992-01-17 | Tdk Corp | Thin-film magnetic head and magnetic head device |
-
1995
- 1995-02-27 JP JP7038105A patent/JP2865012B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03178017A (en) * | 1989-11-27 | 1991-08-02 | Censtor Corp | Integrated magnetic lead/light head/flexible body/conducting structural body |
| JPH0413211A (en) * | 1990-04-28 | 1992-01-17 | Tdk Corp | Thin-film magnetic head and magnetic head device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1087381A2 (en) * | 1999-09-24 | 2001-03-28 | Kabushiki Kaisha Toshiba | Magnetic head, fabrication method therefor and perpendicular magnetic storage device |
| EP1087381A3 (en) * | 1999-09-24 | 2003-11-05 | Kabushiki Kaisha Toshiba | Magnetic head, fabrication method therefor and perpendicular magnetic storage device |
| EP1143419A2 (en) * | 2000-03-30 | 2001-10-10 | Kabushiki Kaisha Toshiba | Magnetic head, method for producing same, and magnetic recording and/or reproducing system |
| EP1143419A3 (en) * | 2000-03-30 | 2004-05-06 | Kabushiki Kaisha Toshiba | Magnetic head, method for producing same, and magnetic recording and/or reproducing system |
| US7100267B2 (en) | 2000-03-30 | 2006-09-05 | Kabushiki Kaisha Toshiba | Magnetic head, method for producing same, and magnetic recording and/or reproducing system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2865012B2 (en) | 1999-03-08 |
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