JPH08227746A - Airtight terminal and airtight package - Google Patents

Abstract

PURPOSE: To provide a highly airtight and highly reliable airtight terminal and airtight package in which a cover can be inexpensively and efficiently sealed to the airtight terminal. CONSTITUTION: In this airtight terminal, a lead terminal insert part 9 is provided on the bottom part of a box metal base 8, a lead terminal 4 is extended through the lead terminal insert part, the whole bottom part of the base is covered with an insulating agent 2, and the lead terminal extended through the box metal base is sealed. A flange 81 extended outward is provided on the outer circumferential part of the upper end surface of the box metal base. Since the flange extended outward is provided on the upper end outer circumference of the metal base, a resistance welding can be performed. Therefore, a highly airtight and highly reliable airtight package can be efficiently and inexpensively manufactured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtight terminal and an airtight package, and more particularly to a surface-mountable airtight terminal and an airtight package capable of resistance welding with good cover sealing efficiency.

[0002]

2. Description of the Related Art As shown in FIG. 14, a conventional air-tight terminal for surface mounting has a frame-shaped metal ring 1 provided with a base 2 made of an insulating agent such as a glass or ceramic in a box-like shape. A lead terminal 4 is sealed in an airtight space 3 formed by a ring 1 and a base 2 so as to penetrate the inside and outside. And the lead terminal 4
Is an upright portion 41 penetrating the airtight space 3 and the insulating base 2
And a parallel portion 42 extending outward from the bottom of the.

The base 1 of the airtight terminal having such a structure
A circuit board, a semiconductor element, a piezoelectric element (not shown), etc. are mounted on the circuit board, and, for example, an Au wire is connected to the circuit board and the lead terminal 4 by wire bonding, a cover 5 is covered, and the circuit board is hermetically sealed. The package is an airtight package.

When the cover 5 is bonded to the metal ring 1, since the base 2 is an insulating material, the roller electrode 6 is used to perform parallel seal welding and sealing, or as shown in FIG. In addition, the method of sealing with a low melting point brazing agent or low melting point glass 7 had to be adopted.

[0005]

When the cover 5 as described above is sealed, parallel seal welding has high airtightness and reliability, and is a value-added product for a relatively large package such as a hybrid IC or MCM. It can be said that this is the most suitable sealing method for expensive and expensive materials.

However, there is a drawback in that the sealing efficiency, that is, the outer periphery of the cover 5 and the metal ring 1 is welded while the roller electrode 6 is being rolled, so that the welding sealing time is long and the mass production effect is poor. In order to eliminate such defects, a device that fully automates the supply, welding, discharge, etc. of the work has been devised, but the type is limited because the entire device is expensive and not versatile. The current situation.

On the other hand, low melting point brazing agents (Au--Sn type, Au
-Ge-based, Au-In-based) or low-melting-point glass 7 or the like entails high temperature heat being applied to the entire package, and the influence on internal circuit boards, elements, etc. must be considered. However, there is a drawback in that a package with high airtightness and high reliability cannot be obtained due to the limit of heat resistance.

The present invention has been made in view of the above problems, and provides an airtight terminal which has high airtightness, high reliability, and is capable of efficiently and inexpensively sealing the cover with the airtight terminal. The purpose is to do.

[0009]

In order to solve the above problems, an airtight terminal according to the present invention is provided with a lead terminal insertion portion at the bottom of a box-shaped metal base, and a lead terminal is provided at the lead terminal insertion portion. In an airtight terminal that penetrates and covers the entire bottom of the metal base with an insulating material, and seals lead terminals that penetrate the inside and outside of the box-shaped metal base, the outer direction of the outer periphery of the upper end surface of the box-shaped metal base. It is characterized in that a flange extending to is provided.

Further, according to the airtight package of the present invention, the lead terminal insertion portion is provided in the bottom portion of the box-shaped metal base, the lead terminal is penetrated through the lead terminal insertion portion, and at least a part of the bottom portion of the metal base is provided. An airtight terminal in which a lead terminal penetrating in and out of a box-shaped metal base is sealed with an insulating agent, and a flange extending outward is provided on the outer peripheral portion of the upper end surface of the box-shaped metal base. It is characterized in that it is covered with a cover and resistance welded by the flange.

According to the airtight terminal of the present invention, since the flange extending outward is formed on the outer peripheral portion of the upper end surface of the metal base, the cover can be joined at this flange. Therefore, there is an advantage that the cover can be sealed by resistance welding, and a highly airtight and highly reliable airtight package can be easily and efficiently manufactured.

[0012]

1 is a sectional view of an embodiment of the airtight terminal of the present invention, and FIG. 2 is a rear perspective view of the airtight terminal. As is apparent from these figures, the airtight terminal of the present invention is A lead terminal insertion hole 9 is provided in the bottom of the box-shaped metal base 8, and the lead terminal 4 is inserted into the lead terminal insertion hole 9 so as to penetrate the airtight space 3 formed inside the metal base 8. The entire base of the metal base 8 is covered with the insulating agent 2. And the lead terminal 4
Is composed of an upright portion 41 that penetrates the metal base 8 and the insulating material 2 into and out of the airtight space 3, and a parallel portion 42 that is joined to the upright portion 41 by welding or the like and extends in the outward direction of the airtight terminal.

The airtight terminal of this embodiment is the ground terminal 1.
Has 0. That is, the ground terminal 10 penetrates the bottom of the metal base 1 and is joined to the upright portion 101 electrically connected to the metal base 1 and the upright portion 101 by welding or the like, and a parallel portion extending outward of the airtight terminal. It has 102 and is used as a ground.

A frame-shaped flange 81 is provided on the upper end surface of the metal base 8. The flange 81 is formed so as to extend outward from the outer periphery of the metal base 8. In this embodiment, the box-shaped metal base 8 is joined to the upper end surface by brazing or the like. ing.

In order to manufacture such an airtight terminal, the process shown in FIG.
As shown in FIG. 4, the parallel portion 42 is welded to the upright portion 41, and the upright portion 41 is inserted into the hole 111 of the flat plate-shaped insulating material block 11 for covering the bottom portion of the metal base 8, and further the ring-shaped insulation is formed. Insert into the agent block 12. After that, the lead terminal insertion hole 9 provided in the metal base 8 is inserted together with the insulating material block 12. On the other hand, the ground terminal 10 includes the upright portion 101 and the parallel portion 10
After joining the two, the holes 111 of the plate-shaped insulating material block 11
Similarly, it is inserted into the ground terminal mounting hole 82 of the metal base 8 as it is, and the upright portion 101 is fixed to the metal base 8 by means such as welding or brazing.

Next, the brazing agent preform 13 is laminated on the upper end surface of the metal base 8 and the frame-shaped flange 8 is formed.
1 is laminated and heated to produce the insulating block 1
The ground terminal 10, the lead terminal 4, and the flange 81 are adhered to each other by the first and the second 12, and the brazing agent preform 13.

When the cover 5 is covered and welded to such an airtight terminal, the cover 5 is covered as shown in FIG. 4, the flange 81 is installed so as to be sandwiched between the upper and lower resistance electrodes 14, and pressure is applied. A large current (several hundred A / mm) is applied to instantly join (several tens of msec).

FIG. 5 is a sectional view showing another embodiment of the present invention. As is clear from this figure, the flange 81 is formed integrally with the metal base 8. In this case, since the integrated metal base 8 and the flange 81 are manufactured, there is an advantage that the manufacturing process is simplified. However,
On the other hand, if the metal base 8 and the flange 81 are formed separately as in the first embodiment, it is possible to easily form a structure that reduces the mechanical stress and heat adaptation force generated during resistance welding, and to integrally process the same. It is possible to easily form shapes and dimensions that are difficult or impossible with. That is, the degree of freedom in designing the airtight terminal is increased.

6 and 7 are a cross-sectional view and a back view of the case where the lead terminal 4 is integrally manufactured in a hook shape. The structure is such that the central portion of the metal base 8 penetrates the insulating agent 2 and the bottom portion is exposed. It has become. That is, the central portion constitutes the ground terminal 10, and the back surface of the other portion is covered with the insulating agent 2.

FIG. 8 is a partial cross-sectional view when the flange 81 is provided with a convex shape 811. By providing such a convex shape 811 for welding, there is an advantage that welding can be performed efficiently.

FIG. 9 is a partial sectional view of the case where the convex portion 51 for welding is provided on the cover 5, which has the same effect as the case of FIG.

10 and 11 relate to the shape of the end portion of the cover 5, and any shape has an advantage that the mechanical stress at the time of welding can be relaxed.

FIG. 12 shows a structure in which the flange 81 is formed in a hook shape in section and is joined to the inner wall of the metal base 8 by a hook-shaped hanging portion 812. In this case, there is an advantage that the mechanical stress at the time of welding can be relaxed.

Similarly, FIG. 13 shows a flange 81 having a structure bent into a convex shape 813 in cross section in order to relieve mechanical stress during welding.

[0025]

As described above, according to the airtight terminal and airtight package of the present invention, since the flange extending outward is provided around the outer periphery of the upper end of the metal base, resistance welding can be performed. Therefore, there is an advantage that an airtight package having high airtightness and high reliability can be efficiently manufactured at low cost.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of an airtight terminal according to the present invention.

FIG. 2 is a rear perspective view of the embodiment of the airtight terminal according to the present invention.

FIG. 3 is an exploded perspective view of an airtight terminal according to the present invention.

FIG. 4 is a cross-sectional view when joining the airtight terminal and the cover according to the present invention.

FIG. 5 is a sectional view of another embodiment of the airtight terminal according to the present invention.

FIG. 6 is a cross-sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 7 is a back view of the above embodiment of the hermetic terminal according to the present invention.

FIG. 8 is a sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 9 is a sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 10 is a sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 11 is a cross-sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 12 is a cross-sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 13 is a sectional view of another embodiment of the hermetic terminal according to the present invention.

FIG. 14 is a sectional view of a conventional airtight terminal.

FIG. 15 is a sectional view of a conventional airtight terminal.

[Explanation of symbols]

 1 Metal ring 2 Insulating agent 3 Airtight space 4 Lead terminal 5 Cover 8 Metal base 81 Flange 9 Lead terminal insertion hole

Claims (3)

[Claims] 1. A box-shaped metal base is provided with a lead terminal insertion portion at a bottom portion thereof, the lead terminal is penetrated through the lead terminal insertion portion, and at least a part of a bottom portion of the metal base is covered with an insulating agent. A hermetic terminal in which a lead terminal penetrating inside and outside of a metal base is sealed, wherein a flange extending outward is provided on an outer peripheral portion of an upper end surface of the box-shaped metal base. 2. The metal base and the flange are formed as separate members and are joined to each other.
Airtight terminal described. 3. A box-shaped metal base is provided with a lead terminal insertion portion at a bottom portion thereof, the lead terminal is penetrated through the lead terminal insertion portion, and at least a part of a bottom portion of the metal base is covered with an insulating agent. In a hermetic terminal in which lead terminals penetrating in and out of a metal base are sealed, a cover is provided on the hermetic terminal provided with a flange extending outward in an outer peripheral portion of an upper end surface of the box-shaped metal base, and the flange is formed. Airtight package characterized by resistance welding at.