[go: up one dir, main page]

JPH0822019A - Liquid crystal light valve - Google Patents

Liquid crystal light valve

Info

Publication number
JPH0822019A
JPH0822019A JP15619094A JP15619094A JPH0822019A JP H0822019 A JPH0822019 A JP H0822019A JP 15619094 A JP15619094 A JP 15619094A JP 15619094 A JP15619094 A JP 15619094A JP H0822019 A JPH0822019 A JP H0822019A
Authority
JP
Japan
Prior art keywords
liquid crystal
transparent electrode
light valve
film
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15619094A
Other languages
Japanese (ja)
Inventor
Naoki Kato
直樹 加藤
Rieko Sekura
利江子 瀬倉
Katsuki Matsushita
克樹 松下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15619094A priority Critical patent/JPH0822019A/en
Publication of JPH0822019A publication Critical patent/JPH0822019A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)

Abstract

PURPOSE:To provide a liquid crystal light valve having high reliability which shows no change in characteristics even when high intensity readout light is used. CONSTITUTION:A reflecting film for IR rays or a reflecting film for UV rays, or a reflecting films 17 for IR rays and UV rays are formed on the surface of a glass substrate 11b having neither photoconductive layer 15 nor mirror layer 16 on a transparent electrode. The reflection film is formed on the surface of the substrate where a transparent electrode 12b is not formed or the film is formed between the transparent electrode and the glass substrate or on the transparent electrode. By this method, even when readout light of high intensity is used, little changes in the characteristics due to the temp. increase of the element by IR rays or little deterioration due to decomposition or the like of the liquid crystal by UV rays is caused, and thereby, the obtd. liquid crystal light valve has as high reliability.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、画像投影装置、ビデオ
プロジェクター等に用いられる液晶ライトバルブに関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal light valve used for an image projection device, a video projector and the like.

【0002】[0002]

【従来の技術】液晶ライトバルブは、米国特許3592
527等に開示されているように、典型的に光導電層、
光反射層、液晶層を組み合わせた形態のデバイスであ
る。近年、液晶ライトバルブを光増幅のために用いた高
輝度画像投影装置が製品化されている。
2. Description of the Related Art A liquid crystal light valve is disclosed in US Pat.
527, etc., typically a photoconductive layer,
The device is a combination of a light reflection layer and a liquid crystal layer. In recent years, a high-brightness image projection device using a liquid crystal light valve for light amplification has been commercialized.

【0003】[0003]

【発明が解決しようとする課題】液晶ライトバルブを高
輝度画像投影装置へ応用する場合等に於いては、強力な
読み出し光を液晶ライトバルブに照射する必要がある。
そのため、用いられる光源は、メタルハライドランプや
キセノンランプ等、赤外光や紫外光を多く含むものであ
ることが多い。強い赤外光が液晶ライトバルブに入射し
た場合、素子内で吸収によって温度上昇が生じ、特性が
変化する。また、紫外光が入射すると、液晶分子の分解
等の問題が発生して、信頼性を損ねるといった問題があ
った。
In the case where the liquid crystal light valve is applied to a high-luminance image projector, it is necessary to irradiate the liquid crystal light valve with strong read light.
Therefore, the light source used is often a metal halide lamp, a xenon lamp, or the like that contains a large amount of infrared light or ultraviolet light. When strong infrared light is incident on the liquid crystal light valve, the temperature rises due to absorption in the element and the characteristics change. Further, when ultraviolet light is incident, problems such as decomposition of liquid crystal molecules occur and reliability is impaired.

【0004】[0004]

【課題を解決するための手段】そこで、この発明は、透
明電極上に光導電層及びミラー層が形成されないガラス
基板の透明電極の形成されていない面、透明電極とガラ
ス基板の間または透明電極上に赤外線反射膜または紫外
線反射膜、あるいは赤外線反射膜及び紫外線反射膜を形
成した。
Therefore, the present invention is directed to a surface of a glass substrate on which a photoconductive layer and a mirror layer are not formed, on which the transparent electrode is not formed, between the transparent electrode and the glass substrate, or between the transparent electrodes. An infrared reflective film or an ultraviolet reflective film, or an infrared reflective film and an ultraviolet reflective film were formed on the top.

【0005】[0005]

【作用】上記の方法を用いることにより、可視域外の光
量を格段に減少せしめることができ、その結果強力な読
み出し光を用いても、赤外線による素子の温度上昇によ
る特性変化や、紫外線による液晶の分解等による劣化が
少なく、信頼性の高い液晶ライトバルブが提供される。
By using the above method, the amount of light outside the visible range can be markedly reduced. As a result, even if a strong reading light is used, the characteristics change due to the temperature rise of the element due to infrared rays and the liquid crystal due to ultraviolet rays Provided is a liquid crystal light valve that is highly reliable and has little deterioration due to decomposition or the like.

【0006】また、反射膜が素子内に存在する場合は、
素子作製工程中に膜が損傷することがなく、歩留まりも
向上する。
When the reflective film is present in the element,
The film is not damaged during the device manufacturing process, and the yield is improved.

【0007】[0007]

【実施例】以下に図面を用いて本発明を詳細に説明す
る。 (実施例1)図1は、本発明に係る液晶ライトバルブの
構造を示す模式図である。
The present invention will be described in detail below with reference to the drawings. (Embodiment 1) FIG. 1 is a schematic view showing the structure of a liquid crystal light valve according to the present invention.

【0008】液晶分子を挟持するための基板11a、1
1bとして、両面をHe−Neレーザー波長に於いて平
行平面度λ/5以下に研磨した厚さ5mmの透明ガラス
基板を用いた。両基板の表面にはITO透明電極層12
a、12bを設けた。光による書き込み側の透明電極層
12a上には3.0μmの厚さの水素化アモルファスシ
リコン(a−Si:H)光導電層15を形成した。光導
電層上には、ミラー層として誘電体多層膜ミラー16を
形成した。ただし、ミラー層は互いに絶縁された金属膜
が配列された構造等であっても問題ない。
Substrates 11a, 1 for sandwiching liquid crystal molecules
As 1b, a transparent glass substrate having a thickness of 5 mm was used, both surfaces of which were polished to a parallel flatness of λ / 5 or less at a He-Ne laser wavelength. The ITO transparent electrode layer 12 is formed on the surface of both substrates.
a and 12b are provided. A hydrogenated amorphous silicon (a-Si: H) photoconductive layer 15 having a thickness of 3.0 μm was formed on the transparent electrode layer 12a on the light writing side. A dielectric multilayer mirror 16 was formed as a mirror layer on the photoconductive layer. However, there is no problem even if the mirror layer has a structure in which mutually insulated metal films are arranged.

【0009】さらに、透明電極上に光導電層及びミラー
層が形成されないガラス基板の透明電極の形成されてい
ない面上に、赤外及び紫外光反射膜17として、誘電体
多層膜を形成した。前記誘電体多層膜はTiO2 とSi
2 の交互積層膜を用いた。なお、反射波長帯域は、主
に近赤外に設定し、700nmから1500nmに対し
て透過率を1%以下とした。紫外光に対しては、近紫外
を反射するようにしたが、TiO2層は紫外光に対して
吸収が大きいため、赤外に対してよりも層数は少なく設
定してある。
Further, a dielectric multilayer film was formed as the infrared and ultraviolet light reflecting film 17 on the surface of the glass substrate on which the photoconductive layer and the mirror layer were not formed on the transparent electrode, on which the transparent electrode was not formed. The dielectric multilayer film is made of TiO 2 and Si.
An alternating laminated film of O 2 was used. The reflection wavelength band was mainly set to near infrared, and the transmittance was set to 1% or less from 700 nm to 1500 nm. Although near-ultraviolet rays are reflected with respect to ultraviolet rays, since the TiO 2 layer has a large absorption for ultraviolet rays, the number of layers is set smaller than that for infrared rays.

【0010】これらの基板は、透明電極12a上及びミ
ラー層16上に配向膜13a、13bを形成した後、ス
ペーサーを介して貼り合わせ、間隙に液晶層14を挟持
した。上記したように、本発明に係る液晶ライトバルブ
に於いては、反射膜17の存在によって、赤外線による
素子の温度上昇による特性変化や、紫外線による液晶の
分解等による劣化が少なく、信頼性の高い液晶ライトバ
ルブが提供された。
These substrates were formed by forming alignment films 13a and 13b on the transparent electrode 12a and the mirror layer 16 and then pasting them through a spacer to sandwich the liquid crystal layer 14 in the gap. As described above, in the liquid crystal light valve according to the present invention, due to the presence of the reflection film 17, the characteristic change due to the temperature rise of the element due to infrared rays and the deterioration due to the decomposition of liquid crystal due to ultraviolet rays are small, and the reliability is high. A liquid crystal light valve was provided.

【0011】(実施例2)図2は、本発明に係る液晶ラ
イトバルブの構造を示す模式図である。液晶分子を挟持
するための基板11a、11bとして、両面をHe−N
eレーザー波長に於いて平行平面度λ/5以下に研磨し
た厚さ5mmの透明ガラス基板を用いた。両基板の表面
にはITO透明電極層12a、12bを設けた。光によ
る書き込み側の透明電極層12a上には3.0μmの厚
さの水素化アモルファスシリコン(a−Si:H)光導
電層15を形成した。光導電層上には、ミラー層として
誘電体多層膜ミラー16を形成した。ただし、ミラー層
は互いに絶縁された金属膜が配列された構造等であって
も問題ない。
(Embodiment 2) FIG. 2 is a schematic view showing the structure of a liquid crystal light valve according to the present invention. He-N on both sides is used as substrates 11a and 11b for holding liquid crystal molecules.
e A transparent glass substrate having a thickness of 5 mm and polished to have a parallel flatness of λ / 5 or less at a laser wavelength was used. ITO transparent electrode layers 12a and 12b were provided on the surfaces of both substrates. A hydrogenated amorphous silicon (a-Si: H) photoconductive layer 15 having a thickness of 3.0 μm was formed on the transparent electrode layer 12a on the light writing side. A dielectric multilayer mirror 16 was formed as a mirror layer on the photoconductive layer. However, there is no problem even if the mirror layer has a structure in which mutually insulated metal films are arranged.

【0012】さらに、透明電極上に光導電層及びミラー
層が形成されないガラス基板の透明電極とガラス基板の
間に、赤外及び紫外光反射膜17として、誘電体多層膜
を形成した。前記誘電体多層膜はTiO2 とSiO2
交互積層膜を用いた。なお、反射波長帯域は、主に近赤
外に設定し、700nmから1500nmに対して透過
率を1%以下とした。紫外光に対しては、近紫外を反射
するようにしたが、TiO2層は紫外光に対して吸収が
大きいため、赤外に対してよりも層数は少なく設定して
ある。
Further, a dielectric multilayer film was formed as an infrared and ultraviolet light reflection film 17 between the transparent electrode of the glass substrate on which the photoconductive layer and the mirror layer are not formed on the transparent electrode and the glass substrate. As the dielectric multilayer film, an alternating laminated film of TiO 2 and SiO 2 was used. The reflection wavelength band was mainly set to near infrared, and the transmittance was set to 1% or less from 700 nm to 1500 nm. Although near-ultraviolet rays are reflected with respect to ultraviolet rays, since the TiO 2 layer has a large absorption for ultraviolet rays, the number of layers is set smaller than that for infrared rays.

【0013】これらの基板は、透明電極12a上及びミ
ラー層16上に配向膜13a、13bを形成した後、ス
ペーサーを介して貼り合わせ、間隙に液晶層14を挟持
した。上記したように、本発明に係る液晶ライトバルブ
に於いては、反射膜17の存在によって、赤外線による
素子の温度上昇による特性変化や、紫外線による液晶の
分解等による劣化が少なく、信頼性の高い液晶ライトバ
ルブが提供された。
These substrates were formed by forming alignment films 13a and 13b on the transparent electrode 12a and the mirror layer 16 and then pasting them through a spacer to sandwich the liquid crystal layer 14 in the gap. As described above, in the liquid crystal light valve according to the present invention, due to the presence of the reflection film 17, the characteristic change due to the temperature rise of the element due to infrared rays and the deterioration due to the decomposition of liquid crystal due to ultraviolet rays are small, and the reliability is high. A liquid crystal light valve was provided.

【0014】また、反射膜が素子内に存在するため、素
子作製工程中に膜が損傷することがなく、歩留まりも向
上した。 (実施例3)図3は、本発明に係る液晶ライトバルブの
構造を示す模式図である。
Since the reflective film is present in the device, the film is not damaged during the device manufacturing process, and the yield is improved. (Embodiment 3) FIG. 3 is a schematic view showing the structure of a liquid crystal light valve according to the present invention.

【0015】液晶分子を挟持するための基板11a、1
1bとして、両面をHe−Neレーザー波長に於いて平
行平面度λ/5以下に研磨した厚さ5mmの透明ガラス
基板を用いた。両基板の表面にはITO透明電極層12
a、12bを設けた。光による書き込み側の透明電極層
12a上には3.0μmの厚さの水素化アモルファスシ
リコン(a−Si:H)光導電層15を形成した。光導
電層上には、ミラー層として誘電体多層膜ミラー16を
形成した。ただし、ミラー層は互いに絶縁された金属膜
が配列された構造等であっても問題ない。
Substrates 11a, 1 for sandwiching liquid crystal molecules
As 1b, a transparent glass substrate having a thickness of 5 mm was used, both surfaces of which were polished to a parallel flatness of λ / 5 or less at a He-Ne laser wavelength. The ITO transparent electrode layer 12 is formed on the surface of both substrates.
a and 12b are provided. A hydrogenated amorphous silicon (a-Si: H) photoconductive layer 15 having a thickness of 3.0 μm was formed on the transparent electrode layer 12a on the light writing side. A dielectric multilayer mirror 16 was formed as a mirror layer on the photoconductive layer. However, there is no problem even if the mirror layer has a structure in which mutually insulated metal films are arranged.

【0016】さらに、透明電極上に光導電層及びミラー
層が形成されないガラス基板の透明電極上に、赤外及び
紫外光反射膜17として、誘電体多層膜を形成した。こ
れらの基板は、透明電極12a上及びミラー層16上に
配向膜13a、13bを形成した後、スペーサーを介し
て貼り合わせ、間隙に液晶層14を挟持した。
Further, a dielectric multilayer film was formed as the infrared and ultraviolet light reflecting film 17 on the transparent electrode of the glass substrate on which the photoconductive layer and the mirror layer were not formed on the transparent electrode. These substrates were formed by forming the alignment films 13a and 13b on the transparent electrode 12a and the mirror layer 16 and then bonding them via a spacer to sandwich the liquid crystal layer 14 in the gap.

【0017】前記誘電体多層膜はTiO2 とSiO2
交互積層膜を用いた。なお、反射波長帯域は、主に近赤
外に設定し、700nmから1500nmに対して透過
率を1%以下とした。紫外光に対しては、近紫外を反射
するようにしたが、TiO2層は紫外光に対して吸収が
大きいため、赤外に対してよりも層数は少なく設定して
ある。
As the dielectric multilayer film, an alternating laminated film of TiO 2 and SiO 2 is used. The reflection wavelength band was mainly set to near infrared, and the transmittance was set to 1% or less from 700 nm to 1500 nm. Although near-ultraviolet rays are reflected with respect to ultraviolet rays, since the TiO 2 layer has a large absorption for ultraviolet rays, the number of layers is set smaller than that for infrared rays.

【0018】上記したように、本発明に係る液晶ライト
バルブに於いては、反射膜17の存在によって、赤外線
による素子の温度上昇による特性変化や、紫外線による
液晶の分解等による劣化が少なく、信頼性の高い液晶ラ
イトバルブが提供された。また、反射膜が素子内に存在
するため、素子作製工程中に膜が損傷することがなく、
歩留まりも向上した。
As described above, in the liquid crystal light valve according to the present invention, due to the presence of the reflection film 17, the characteristic change due to the temperature rise of the element due to infrared rays and the deterioration due to the decomposition of the liquid crystal due to ultraviolet rays are small, and the reliability is high. The liquid crystal light valve with high performance was provided. Further, since the reflective film is present in the element, the film is not damaged during the element manufacturing process,
Yield has also improved.

【0019】[0019]

【発明の効果】本発明を用いることにより、液晶ライト
バルブの高輝度画像投影装置への応用範囲を増大させる
ことができる。
By using the present invention, the range of application of the liquid crystal light valve to the high-brightness image projection device can be increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る液晶ライトバルブの構造を示す模
式図である。
FIG. 1 is a schematic view showing a structure of a liquid crystal light valve according to the present invention.

【図2】本発明に係る液晶ライトバルブの構造を示す模
式図である。
FIG. 2 is a schematic view showing a structure of a liquid crystal light valve according to the present invention.

【図3】本発明に係る液晶ライトバルブの構造を示す模
式図である。
FIG. 3 is a schematic view showing a structure of a liquid crystal light valve according to the present invention.

【符号の説明】[Explanation of symbols]

11a、11b 透明基板 12a、12b 透明電極 13a、13b 配向膜層 14 液晶層 15 光導電層 16 ミラー層 17 赤外線及び/または紫外線反射膜 11a, 11b Transparent substrate 12a, 12b Transparent electrode 13a, 13b Alignment film layer 14 Liquid crystal layer 15 Photoconductive layer 16 Mirror layer 17 Infrared and / or ultraviolet reflection film

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 光による書き込み手段、光による読み出
し手段及び電圧印加手段を具備し、透明電極上に光導電
層及びミラー層が形成されたガラス基板と、透明電極の
形成されたガラス基板のそれぞれの対向する表面に液晶
配向膜が形成された一組のガラス基板が対向配置され、
その間隙に液晶組成物が封入されてなる液晶ライトバル
ブに於いて、該透明電極上に光導電層及びミラー層が形
成されないガラス基板の透明電極の形成されていない
面、透明電極とガラス基板の間または透明電極上に赤外
線反射膜または紫外線反射膜、あるいは赤外線反射膜及
び紫外線反射膜が形成されてなることを特徴とする液晶
ライトバルブ。
1. A glass substrate having a writing means by light, a reading means by light and a voltage applying means, on which a photoconductive layer and a mirror layer are formed on a transparent electrode, and a glass substrate on which a transparent electrode is formed, respectively. A pair of glass substrates each having a liquid crystal alignment film formed on opposite surfaces of
In a liquid crystal light valve having a liquid crystal composition sealed in the gap, a surface of a glass substrate on which a photoconductive layer and a mirror layer are not formed, on which the transparent electrode is not formed, a transparent electrode and a glass substrate. A liquid crystal light valve comprising an infrared reflection film or an ultraviolet reflection film, or an infrared reflection film and an ultraviolet reflection film formed between or on a transparent electrode.
【請求項2】 該反射膜は、誘電体多層膜であることを
特徴とする請求項1記載の液晶ライトバルブ。
2. The liquid crystal light valve according to claim 1, wherein the reflective film is a dielectric multilayer film.
JP15619094A 1994-07-07 1994-07-07 Liquid crystal light valve Pending JPH0822019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15619094A JPH0822019A (en) 1994-07-07 1994-07-07 Liquid crystal light valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15619094A JPH0822019A (en) 1994-07-07 1994-07-07 Liquid crystal light valve

Publications (1)

Publication Number Publication Date
JPH0822019A true JPH0822019A (en) 1996-01-23

Family

ID=15622343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15619094A Pending JPH0822019A (en) 1994-07-07 1994-07-07 Liquid crystal light valve

Country Status (1)

Country Link
JP (1) JPH0822019A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005208216A (en) * 2004-01-21 2005-08-04 Seiko Epson Corp Color filter substrate and method for manufacturing the same, liquid crystal device, and projection display device
KR100912121B1 (en) * 2007-09-05 2009-08-13 (주)댐코 Reflective liquid crystal display device
CN104035251A (en) * 2014-05-21 2014-09-10 京东方科技集团股份有限公司 Array substrate, display device, display equipment and manufacturing method of array substrate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005208216A (en) * 2004-01-21 2005-08-04 Seiko Epson Corp Color filter substrate and method for manufacturing the same, liquid crystal device, and projection display device
JP4626150B2 (en) * 2004-01-21 2011-02-02 セイコーエプソン株式会社 Color filter substrate and method for manufacturing the same, liquid crystal device, and projection display device
KR100912121B1 (en) * 2007-09-05 2009-08-13 (주)댐코 Reflective liquid crystal display device
CN104035251A (en) * 2014-05-21 2014-09-10 京东方科技集团股份有限公司 Array substrate, display device, display equipment and manufacturing method of array substrate
CN104035251B (en) * 2014-05-21 2017-10-27 京东方科技集团股份有限公司 Array base palte, display device, the preparation method of display device and array base palte

Similar Documents

Publication Publication Date Title
JPH08502833A (en) Liquid crystal light valve with minimal double reflection
JP3153334B2 (en) Multilayer filter for ultraviolet irradiation equipment
JPH0822019A (en) Liquid crystal light valve
JPH06230410A (en) Spatial optical modulation element
JPH11174427A (en) Liquid crystal display device and liquid crystal projector
JP3261409B2 (en) Reflective polarizer and method of manufacturing the same
JPS63253924A (en) Light valve and its manufacturing method
KR0161371B1 (en) Liquid crystal light valve and its manufacturing method
JP2000056297A (en) Liquid crystal display device
JP2848741B2 (en) Liquid crystal spatial light modulator
JPH0822020A (en) Liquid crystal light valve
JPH03217825A (en) Space optical modulating element
JP2005140836A5 (en)
JPH086061A (en) Liquid crystal light valve
JPS60203916A (en) Curved liquid crystal cell and antidazzle type reflection mirror using said cell
JPH03107824A (en) Optical writing type liquid crystal light valve
JPH04119330A (en) Photoconductive liquid crystal light valve
JP3643658B2 (en) Optical writing reflective spatial light modulator
JPH1090716A (en) Liquid crystal display device
JP2605658B2 (en) Projection display device
KR0150945B1 (en) LCD Light Valve
JPH0422484B2 (en)
KR940009156B1 (en) Lcd light valve
JPH05196814A (en) Polarizing beam splitter
JPH0713186A (en) Spatial optical modulation element