JPH0817015A - Thin film laminated magnetic head - Google Patents

Abstract

(57) [Abstract] [Purpose] A Hall element can be manufactured without degrading its performance, and a magnetic flux can be evenly applied to the Hall element to increase the reproduction output and the S / N ratio. Provided is a thin film layered magnetic head capable of recording and reproducing high frequency signals recorded at high density. A thin film laminated magnetic head 1 is composed of a thin film laminated structure in which magnetic films 4 are laminated, and core members 6A, 8 having a magnetic sensing gap 10 formed on the side facing a recording medium.
A, and the core member 20 including the thin film Hall element 20 and provided with the magnetic films 4a and 4b in such a manner that both surfaces of the thin film Hall element 20 are sandwiched by the insulating films 22 and 24. Each of the core members 6A, 8A, 30 includes a magnetic film 4 and a magnetic film 4.
a and 4b are orthogonal to each other, and the thin film Hall element 20
Are joined together so as not to be sandwiched in the joint portion to form a magnetic circuit, and the magnetic flux passing through this magnetic circuit passes vertically through the thin film surface of the Hall element 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to a thin film magnetic head, and more particularly to a thin film laminated magnetic head having a Hall element capable of recording and reproducing high frequency signals recorded at high density on a recording medium. is there.

[0002]

2. Description of the Related Art As a high-density recording head for high frequencies which requires a high S / N ratio, for example, Fe-Si-Al is used.
A laminated magnetic head using a magnetic thin film having a high saturation magnetic flux density such as an alloy magnetic film (sendust) is known, and is preferably used as, for example, a video head or a computer head.

However, the combination of such a thin film layered magnetic head and a wound coil has a limit in its reproducing ability in the future.

Therefore, recently, as a reproducing magnetic head particularly effective for reproducing a high frequency signal, a magnetic head utilizing a magnetoresistive (MR) effect or a Hall effect has been attracting attention. Although a magnetic head utilizing the MR effect is exclusively used for reproduction, various magnetic heads utilizing the Hall effect have been proposed, such as a combination of a thin film magnetic head with a Hall element for both reproduction and recording. (Japanese Patent Publication No. 63-9283, Japanese Patent Publication No. 4-5968)
4, JP-A-63-257911, JP-A-6-
See JP-A-3-261511 and JP-A-4-356706).

Therefore, the present inventors have studied a method of increasing the reproducing ability of the laminated magnetic head by combining an MR element or a Hall element with a thin film laminated magnetic head having an excellent recording ability.

As a result, the MR element has an axis of easy magnetization in the plane of the thin film, and therefore, it is necessary to arrange the thin film surface of the element in parallel with the magnetic flux so that the magnetic flux can effectively pass through the plane. Yes, so the MR element has a magnetic sensing gap,
That is, the structure is such that it is sandwiched between the front gap facing the recording medium of the magnetic head, and is damaged by friction with the recording medium or by static electricity generated during assembly, and further, the element is easily corroded from the exposed portion on the front side. However, it was found to be unfavorable.

On the other hand, since the Hall element gives the maximum Hall output when the magnetic flux is perpendicular to the element thin film surface, the structure can be sandwiched between the so-called rear gaps of the magnetic head. It was found that the problem as in the case of combination did not occur.

Therefore, the present inventors have decided to further improve a thin film laminated magnetic head using a Hall element, which is particularly effective for reproducing high frequency signals.

FIG. 2 shows an example of a conventional thin film laminated magnetic head using a Hall element. According to this example, the thin-film laminated magnetic head 1 is formed by depositing the Fe—Si—Al alloy magnetic film 4 on one ceramic substrate 2a and sandwiching the magnetic film 4 with another ceramic substrate 2b. A pair of magnetic core halves made from the formed thin film laminated structure, that is, for example, an I core 6 and a C core 8,
The abutting surfaces of the I core 6 and the C core 8 are gap portions, that is, one front gap (magnetic sensing gap) 10 and the other rear gap 18 facing the recording medium.
Are integrally joined via. At this time, in general, in order to concentrate the magnetic flux in the front gap 10,
The chamfered part is machined adjacent to the gap part, that is,
In order to form the apex portion 14 and further increase the bonding strength, the apex glass 16 is filled in this portion. Further, the processing is performed according to the application such as computer and video.

The Hall element 20 includes a front gap 10
However, it is generally located in the rear gap 18 as shown.

The thin film laminated magnetic head 1 is shown in FIG.
It is also possible to form a magnetic head for both recording and reproduction by winding a wire on the portion of the C core 8 on the left side.

[0012]

In the process of studying the magnetic head having the above-described structure, the present inventors have made the Hall element 20.
Whichever the rear gap 18 or the front gap 10, the Hall element 20 is arranged in the gap portion, the element design is restricted by the size, the assembly process, and the like. It was found that the Hall element 20 is unfavorably subjected to high temperature and high pressure when the gap is formed by welding with glass or the like and the characteristics are deteriorated.

Furthermore, in the laminated magnetic head having such a structure, the track width of the magnetic head, that is, the thickness (t) of the magnetic film 4 is about 6 μm, whereas the size of the Hall element 20 is large. The film area is at least 100 μm ×
It is required to have a thickness of about 100 μm, which is extremely larger than the thickness (t) of the magnetic film 4. Therefore, the magnetic flux is generated by the Hall element 20.
It was found that there was a problem in that the reproduction output and the S / N ratio were low, because it passed through a part of the non-uniformly.

In order to solve this problem, the Hall element 2
It is conceivable to reduce the size of the film surface of 0 to an extent corresponding to the magnetic film thickness, but with this method, the reproduction output is further reduced, the current density is increased, heat is generated, The design becomes difficult, which naturally limits the size of the Hall element.

Therefore, an object of the present invention is to make the Hall element of the core independent by making the portion forming the front gap (magnetic sensing gap) facing the recording medium and the portion forming the Hall element independent. It is possible to prevent the Hall element performance from deteriorating due to high temperature and high pressure due to glass welding during core joining without being sandwiched between the joints, and to apply uniform magnetic flux to the Hall element without restricting the design regarding the shape of the Hall element. It is possible to improve the reproduction output and the S / N ratio, and particularly to provide a thin-film laminated magnetic head capable of recording and reproducing a high-frequency signal recorded at a high density on a recording medium.

[0016]

The above object is achieved by a thin film laminated magnetic head having a Hall element according to the present invention. In summary, the present invention comprises a thin film laminated structure having a magnetic film having a track width of a film thickness, a gap side core member having a magnetic sensing gap formed on a side facing a recording medium, and a thin film Hall element. And a Hall element side core member provided with a magnetic film in such a manner that both surfaces of the thin film Hall element are sandwiched via an insulating film, and each core member is a direction in which the respective magnetic films are orthogonal, In addition, the thin film Hall element is integrally joined so as not to be sandwiched between the joint portions to form a magnetic circuit, and the magnetic flux passing through this magnetic circuit passes vertically through the thin film surface of the Hall element. It is a thin film laminated magnetic head.

Preferably, the gap-side core member in which the magnetic sensing gap is formed is formed by abutting paired core members and joining the abutting surfaces so as to form the magnetic sensing gap. The magnetic film is Fe-Si.
-Al alloy, amorphous magnetic material or iron nitride magnetic material.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A thin film laminated magnetic head having a Hall element according to the present invention will be described below in more detail with reference to the drawings.

FIG. 1 shows an embodiment of a thin film laminated magnetic head provided with the Hall element of the present invention. In the present embodiment, the thin-film laminated magnetic head 1A has two core portions on the left and right, that is, an I core 6A and an L core 8A in this embodiment, and a connecting core 30 having a thin film Hall element 20 as a magnetic flux detecting element. It is composed of three members.

The I-core 6A and the L-core 8A are, for example, Fe-Si on one ceramic substrate 2a as in the conventional case.
A magnetic core made of a thin film laminated structure formed by depositing an Al alloy magnetic film 4 and further sandwiching the magnetic film 4 with another ceramic substrate 2b. They are integrally joined via the facing front gaps (magnetic sensing gaps). At this time, generally, in the front gap, in order to concentrate the magnetic flux, the apex portion 14 is formed adjacent to the gap portion by machining, and in order to further increase the bonding strength, the apex glass 16 is filled in this portion. To be done.
Further, the processing is performed according to the application such as computer and video.

The connecting core 30 having the Hall element 20 is
Basically, the magnetic core is made of a thin film laminated structure formed by depositing the Fe—Si—Al alloy magnetic film 4 on a ceramic substrate 2c similar to the ceramic substrates 2a and 2b. , The magnetic film 4 is interrupted at its intermediate portion, the Hall element 20 is laminated on one magnetic film 4a via the insulating film 22, and the other magnetic film 4b.
Is partially laminated on the other side surface of the Hall element 20 with the insulating film 24 interposed therebetween. That is, the Hall element 20 is provided on the substrate 2c so as to be sandwiched by the magnetic films from above and below.
The space defined by the substrate 2c, the Hall element 20 and the magnetic film 4b is filled with a bonding glass 26 or the like in order to improve the bonding strength between the thin film and the substrate.

The connecting core 30 having such a structure is integrally joined to both ends of the I core 6A and the L core 8A by using, for example, the joining glass 32 at both ends thereof.

Further, in the magnetic head 1A of the present invention, the Hall element 20 is further provided with electrodes for the Hall bias current terminal and the Hall output voltage terminal, but they are omitted in FIG. 2 for simplification of the drawing. Has been done.

The thin film laminated magnetic head 1A of this embodiment is used.
It is also possible to form a magnetic head for both recording and reproduction by winding the part of the L core 8A on the left side in FIG.

The Hall element 20 is a semiconductor well known to those skilled in the art, for example, a semiconductor such as GaAs or InSb, or Gd.
A magnetic material such as Fe or CdCo can be preferably used, and the dimension thereof can be set arbitrarily, but the thickness is usually 1 μm.
m, the film area is required to be at least about 100 μm × 100 μm. As the insulating films 22 and 24, for example, SiO ₂
Are preferably used.

As can be understood from the above description, according to the magnetic head 1A of the present invention having the above structure, the I core 6A and the L core 8A forming the front gap 10 and the Hall element 20 are formed. A closed magnetic circuit is formed by integrally joining with the connecting core 30, so that the magnetization signal (magnetic flux) of the recording medium received in the front gap 10 is laminated on both surfaces of the thin film Hall element 20. The magnetic films 4a and 4b allow the Hall element thin film surface to pass perpendicularly and uniformly.

Further, according to the present invention, the connecting core 30 provided with the Hall element 20 may be magnetically connected to other core members such as the I core 6A and the L core 8A. The shape of can be designed arbitrarily and is not restricted by design.

Further, the Hall element 20 portion is a glass welding portion of each core in the assembly process, that is, the front gap portion 10, the I core 6A, the L core 8A and the connecting core 30.
It can be placed away from the joint with the like, and performance deterioration due to high temperature and high pressure due to glass welding can be avoided.

In the above embodiment, the magnetic head 1A of the present invention is used.
The magnetic film 4 of No. 1 has been described with reference to the Fe-Si-Al alloy magnetic film (sendust), but an amorphous magnetic material, an iron nitride magnetic material, or the like can be used as well. or,
The core member forming the front gap 10 is the I core 6
Although it has been described that the A and L cores 8A are formed of asymmetrical core members, the present invention is not limited to this, and core members of the same shape may be used. A core member can be used.

[0030]

As described above, the thin film layered magnetic head according to the present invention is composed of a thin film layered structure in which magnetic films are layered, and the magnetic sensing gap is formed on the side facing the recording medium. Side core member, and a Hall element side core member provided with a thin film Hall element, the magnetic film is provided in such a manner that both sides of the thin film Hall element are sandwiched via insulating films, each core member The magnetic films are joined together in a direction orthogonal to each other so that the thin film Hall element is not sandwiched between the joints to form a magnetic circuit, and the magnetic flux passing through this magnetic circuit passes vertically through the thin film surface of the Hall element. With this structure, the portion forming the front gap (magnetic sensing gap) facing the recording medium and the portion forming the hall element are independent from each other, and the hall element is connected to the core. It is possible to prevent Hall element performance deterioration due to high temperature and high pressure due to glass welding during core joining without being sandwiched between the parts, and there is no restriction on the design of the Hall element shape, etc. You can
As a result, the reproduction output and the S / N ratio can be increased, and in particular, recording and reproduction of high frequency signals recorded at high density on the recording medium can be dealt with.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of an embodiment of a thin film layered magnetic head according to the present invention.

FIG. 2 is a perspective view of a conventional thin film laminated magnetic head in which a Hall element is sandwiched in a rear gap.

[Explanation of symbols]

2 (2a, 2b, 2c) Ceramics substrate 4 (4a, 4b) Magnetic film 6A, 8A Core member 10 Front gap (magnetic sensing gap) 20 Thin film Hall element 22, 24 Insulating film 30 Connection core member

[Procedure amendment]

[Submission date] May 26, 1995

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

FIG.

Claims (3)

[Claims] 1. A thin film laminated structure having a magnetic film having a track width of a film thickness, comprising a gap side core member having a magnetic sensing gap formed on a side facing a recording medium, and a thin film Hall element, And a Hall element side core member provided with a magnetic film in such a manner that both surfaces of the thin film Hall element are sandwiched by insulating films, each core member being in a direction in which the respective magnetic films are orthogonal to each other, and the thin film A thin film laminated type characterized in that a Hall element is integrally joined so as not to be sandwiched between joint portions to form a magnetic circuit, and a magnetic flux passing through this magnetic circuit passes vertically through the thin film surface of the Hall element. Magnetic head. 2. The thin-film laminated magnetic head according to claim 1, wherein the core member on the gap side is formed by abutting core members forming a pair and joining the abutting surfaces so as to form a magnetic sensing gap. 3. The magnetic film is a Fe—Si—Al alloy,
An amorphous magnetic material or an iron nitride magnetic material.
Alternatively, the thin-film laminated magnetic head of 2.