JPH08167110A - Magnetic head and its production - Google Patents

Abstract

PURPOSE: To easily produce a magnetic head essentially having such superior characteristics as high magnetic resistance of the magnetic gap part and large leakage magnetic flux at the gap part. CONSTITUTION: In this magnetic head, the saturation magnetic flux density of 1st soft magnetic layers G1, G2 is lower than that of 2nd soft magnetic layers 2, 2' and each of the 1st and 2nd soft magnetic layers has a compsn. represented by the formula Fea-m . Mm .Zb .Nc [where M is one or more among Co, Ru, Cr, V, Ni, Mn, Pd, Ir and Pt, Z is one or more among Zr, Hf, Ti, Nb, Ta, Mo and W, (a) is 69-93at.%, (b) is 2-15at.%, (c) is 5.5-15at.% and 0<=m/a<0.3]. This magnetic head has a larger gap length at the time of recording than that at the time of reproduction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to VTR, DAT, HD.
The present invention relates to a magnetic head for a magnetic recording / reproducing apparatus suitable for use in a D, FDD, data recorder, or the like.

[0002]

2. Description of the Related Art In magnetic recording, from the viewpoint of reproducing efficiency, the gap length of a magnetic reproducing head is set to 1/2 or less of the shortest recording wavelength, while the gap length of the recording head is reproduced in order to increase the leakage flux. It is better to set it wider than the head. However, in a general magnetic recording / reproducing apparatus, the same head is often used as the recording head and the reproducing head from the viewpoint of simple structure and cost reduction. Used for.

Further, a soft magnetic material having a saturation magnetic flux density Bs lower than that of the magnetic core is formed in the shape of a gap in the vicinity of the gap of the magnetic head, and this portion serves as a magnetic core during reproduction and is magnetically saturated during recording. There has been proposed a magnetic head having a double magnetic gap that acts as a magnetic gap and effectively widens the magnetic gap during recording to the magnetic gap during recording.
For example, the 9th Japan Society for Applied Magnetics Academic Lecture Summary (198
5.11), the magnetic heads described on pages 288 and 289,
The 3rd of the 11th Japan Society for Applied Magnetics Proceedings (1987.11)
There is a magnetic head described on page 17.

[0004]

However, in the narrow gap head that prioritizes the reproducing efficiency, the magnetic resistance of the magnetic gap portion is low and the leakage magnetic flux in the gap portion tends to be low. Therefore, the core structure is devised. Alternatively, there is a problem that it is necessary to increase the saturation magnetic flux density Bs of the core material.

A first object of the present invention is to provide a new magnetic head which solves the above problems.

On the other hand, the conventional magnetic head having a double magnetic gap has been proposed in order to solve the above problems of the conventional narrow gap head which is also a recording / reproducing head.

However, in the conventional magnetic head having the double magnetic gap, it is necessary to use at least two kinds of materials as the magnetic core material, and it is necessary to use different target materials in the film forming process by sputtering. However, there is a drawback in that the manufacturing apparatus becomes large, the manufacturing process becomes complicated and time is required, and the cost becomes high.

A second object of the present invention is to provide a method of manufacturing a magnetic head which eliminates the above drawbacks.

[0009]

According to the present invention, the following two
The above object can be achieved by a magnetic head having a heavy magnetic gap and a method of manufacturing the magnetic head.

A double magnetic gap layer formed by forming a first soft magnetic layer having a low saturation magnetic flux density on one side or both sides of a non-magnetic gap layer, and a saturation magnetic flux density formed on one side or both sides of the double magnetic gap layer. Is provided between the facing surfaces of the pair of magnetic head cores, the second soft magnetic layer being higher than the first soft magnetic layer, and the first soft magnetic layer and the second soft magnetic layer have the composition formula F
e _am · M _m · Z _b · N _c (where the units of a, b, c and m are atomic%, and M is Co, Ru, Cr,
At least one of V, Ni, Mn, Pd, Ir, and Pt is shown, and Z is Zr, Hf, Ti, Nb, Ta, Mo.
And at least one of W are shown. ) And the composition range is 0 ≦ m / a <0.3 69 ≦ a ≦ 93 2 ≦ b ≦ 15 5.5 ≦ c ≦ 15.

The composition formula Fe _am · M _m · is provided on at least one surface constituting the abutting surface of the pair of core blocks.
Z _b · N _c (where a, b, c and m are each atomic%, and M is Co, Ru, Cr, V, Ni, M
at least one of n, Pd, Ir and Pt,
Z represents at least one of Zr, Hf, Ti, Nb, Ta, Mo and W. ), And the composition range is 0 ≦ m / a <0.3 69 ≦ a ≦ 93 2 ≦ b ≦ 15 5.5 ≦ c ≦ 15 The soft magnetic layer with high saturation magnetic flux density is subjected to heat treatment. A first step of forming a obtainable first sputtering layer, and a surface of the first sputtering layer formed in the first step or a soft magnetic layer obtained by heat-treating this layer or an abutting surface of a core block On at least one of the surfaces having a saturation magnetic flux density smaller than the saturation magnetic flux density of the soft magnetic layer that can be obtained by heat-treating the first sputtering layer. A second step of forming a second sputtering layer capable of obtaining a magnetic layer by heat treatment, and a third step of heat-treating the sputtering layer to obtain a soft magnetic layer,
A method of manufacturing a magnetic head, comprising a fourth step of joining the pair of core blocks via a nonmagnetic layer such that the surfaces forming the abutting surfaces of the pair of core blocks face each other.

In the magnetic head of the present invention, the difference between the saturation magnetic flux densities of the first soft magnetic layer and the second soft magnetic layer is 0.1 T or more, and the saturation magnetic flux density of the first soft magnetic layer is 0.8-. 1.
2T, the saturation magnetic flux density of the second soft magnetic layer is 1.2
It is preferable that each is T or more.

In the method of manufacturing a magnetic head of the present invention,
Forming the second sputtering layer by increasing the nitrogen partial pressure of the atmospheric gas at the time of sputtering by at least 5 mol% or more than the value at the time of forming the first sputtering layer. It is preferable to form the second sputtering layer in an amount of mol% and form the first sputtering layer in an atmosphere gas having a nitrogen partial pressure of 2.5 to 7.5 mol% during sputtering.

[0014]

[Action]

(Magnetic Head) The non-magnetic gap layer acts as a magnetic gap during reproduction and recording of the magnetic head.

The first soft magnetic layer functions as a magnetic head core during reproduction and as a magnetic gap during recording.

The second soft magnetic layer acts as a magnetic head core during reproduction and recording.

Therefore, the thickness of the non-magnetic gap layer becomes the gap length during reproduction of the magnetic head. The sum of the thicknesses of the nonmagnetic gap layer and the first soft magnetic layer is the gap length during recording.

(Manufacturing Method of Magnetic Head) By heat-treating the first sputtering layer, a soft magnetic layer having a high saturation magnetic flux density can be obtained.

By heat-treating the second sputtering layer, a soft magnetic layer having a low saturation magnetic flux density can be obtained.

[0020]

Preferred Embodiment

(Magnetic head) The non-magnetic gap layer may be one that acts as a magnetic gap during reproduction and recording by the magnetic head, and for example, SiO ₂ , Al ₂ O ₃ , Ta ₂ O ₅ or the like can be used. Its thickness (gap length during playback)
Is preferably 1/2 or less of the shortest recording wavelength from the viewpoint of reproduction efficiency, and can be 0.3 μm or less, for example.

The first soft magnetic layer is formed on one side or both sides of the nonmagnetic gap layer.

The saturation magnetic flux density of the first soft magnetic layer is smaller than the saturation magnetic flux density of the second soft magnetic layer, and the difference is variously selected depending on the intended use. As an example, it is preferably 0.1T. Greater than that. The saturation magnetic flux density of the first soft magnetic layer is also selected according to the purpose, but as an example, it is preferably 0.8 to 1.2T.

The thickness of the first soft magnetic layer is preferably equal to or less than the thickness of the non-magnetic gap layer, for example, 0.3 μm.
It can be:

The first soft magnetic layer preferably has a high magnetic permeability, for example, a relative magnetic permeability of 1000 to 300 at a frequency of 5 MHz.
Set to 0.

The second soft magnetic layer functions as a magnetic head core during recording and reproduction of the magnetic head, and functions as a magnetic gap during recording of the magnetic head, that is, a nonmagnetic gap layer and one side of this layer. Or a layer composed of the first soft magnetic layer formed on both sides (double magnetic gap layer)
Is formed on one side or both sides.

The saturation magnetic flux density of the second soft magnetic layer is higher than that of the first soft magnetic layer, preferably 1.2T or more.

The thickness of the second soft magnetic layer is preferably 1 to 1.
The thickness is 0 μm, more preferably 5 to 10 μm.

The magnetic head core has a facing surface and a recess formed by receding from the facing surface. The core material may be one generally used as a core of a magnetic head, and various ferrites such as MnZn single crystal ferrite can be used.

The first soft magnetic layer and the second soft magnetic layer are represented by the above-mentioned specific composition formula Fe _{am.M m} .Z _b .N _c , and the composition range thereof is within the above-specified range. When m / a exceeds 0.3, the saturation magnetic flux density tends to be too low, and there is a tendency that it is not preferable to use it as the first soft magnetic layer.

(Manufacturing Method of Magnetic Head) The first step is a soft magnetic layer having a high saturation magnetic flux density represented by the above-mentioned specific composition formula and acting as a magnetic head core during recording and reproduction of the magnetic head. Forming a first sputtering layer for obtaining The soft magnetic layer having the specific high saturation magnetic flux density can be obtained by heat-treating the first sputtering layer.

The first sputtering layer is formed on at least one of the surfaces forming the abutting surfaces of the pair of core blocks.

Here, the core block means a half body of the magnetic head core or a precursor thereof, and one capable of forming at least one or more magnetic head core halves, for example, one or more magnetic head core halves can be obtained. Those formed on the substrate as described above, and those which can obtain the shape of the magnetic head core half by processing such as cutting are also included.

The surfaces forming the abutting surfaces do not necessarily require that the core blocks are abutted in the first and second steps, and include surfaces that are not abutted yet and are abutted later. This is because.

A diffusion prevention layer made of SiO ₂ may be provided at the interface between the core block and the first sputtering layer to prevent the formation of an interdiffusion layer during heat treatment. The diffusion prevention layer has a thickness that does not act as a magnetic gap, for example, about 50 to 200 angstrom.

The second step functions as a magnetic head core during reproduction of the magnetic head and as a magnetic gap during recording, and forms a soft magnetic layer having a low saturation magnetic flux density represented by the specific composition formula and having the specific composition range. A second sputtering layer for obtaining is formed. The soft magnetic layer having the specific low saturation magnetic flux density can be obtained by heat-treating the second sputtering layer.

The second sputtering layer is the first sputtering layer.
At least one surface of the surface of the first sputtering layer formed by the step, the surface of the soft magnetic layer having a high saturation magnetic flux density obtained by heat-treating the first sputtering layer, or the surface forming the abutting surface of the core block. To form.

The first and second sputtering layers can be formed by sputtering, respectively, and are for obtaining a soft magnetic layer having the above-mentioned specific composition formula and within the specific composition range. It can be formed using a target. As such a target, a target containing Fe and Z or a target containing Fe, M and Z (where M and Z are the same as M and Z shown in the above specific composition formula) is used. be able to. For example, there are targets of the composition Fe _85.5 -Cr _4.5 -Zr ₁₀ and targets of the composition Fe _85.5 -Ni _4.5 -Zr ₁₀ .

As described above, the first step is a step of forming a first sputtering layer for forming a soft magnetic layer having a high saturation magnetic flux density, whereas the second step is a step of forming a low saturation magnetic flux density. The two steps are different in that they are the steps of forming the second sputtering layer for forming the soft magnetic layer. The sputtering layer for forming such a soft magnetic layer having different saturation magnetic flux densities and overlapping composition ranges can be formed by changing the nitrogen partial pressure of the atmospheric gas at the time of sputtering.

The change of the nitrogen partial pressure depends on the composition of the target for forming the sputtering layer, but in general, the nitrogen partial pressure for forming the first sputtering layer is preferably 2.5. ˜7.5 mol%, and the nitrogen partial pressure for forming the second sputtering layer is preferably 10˜15 mol%. The nitrogen partial pressure difference for forming the first and second sputtering layers is preferably 5
-10 mol%. An inert gas such as Ar can be used as the other component of the atmospheric gas at the time of sputtering. The atmospheric gas pressure during sputtering is preferably 0.5 to 2 Pa.

The third step is a step of heat-treating the sputtering layer to obtain a soft magnetic layer. The heat treatment may be carried out under the heat treatment conditions capable of obtaining the intended soft magnetic layer, but the heat treatment temperature is preferably 250 ° C. or higher, more preferably 3
It is carried out at 50 to 550 ° C., and the heat treatment time is preferably 3
It may be about 0 minutes to 1 hour, but if necessary, it may be carried out for 1 hour to 9 hours or more.

The heat treatment process for obtaining the soft magnetic layer may be performed collectively after the first and second sputtering layers are formed on the core block, but after the first and second sputtering layers are formed, respectively. It is also possible to carry out once separately (twice in total). Alternatively, the pair of core blocks having the first and second sputtering layers may be bonded together via the nonmagnetic layer and then heat treated.

The fourth step is a step of joining a pair of core blocks having the aforesaid sputtering layer or soft magnetic layer to the abutting surfaces of the core blocks via a non-magnetic layer which acts as a magnetic gap during recording and reproduction. Is. When joining, the surfaces forming the abutting surfaces of the pair of core blocks are opposed to each other. As a material for joining, for example, glass is used, which is melted and used as a joining material.

[0043]

Embodiments of the magnetic head of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIG. 1 is an enlarged schematic perspective view of the tip of a magnetic head according to an embodiment of the present invention, and FIG. 2 shows a sliding surface (recording medium directing surface) S of the magnetic head. Figure 3
FIG. 3 is a sectional view taken along the line AA ′ of FIG.

The nonmagnetic gap layer G0 made of SiO _{2 and having a} thickness of 0.2 μm acts as a magnetic gap during reproduction and recording of the magnetic head. The effective gap length of this non-magnetic gap layer (length that is 0.89 times the dip point wavelength of the wavelength response of the reproduction output) is 0.17 μm.

With a thickness of 0.05 μm, a low saturation magnetic flux density (1.
08T) first soft magnetic layers G1 and G2 are formed on both sides of the non-magnetic gap layer G0, and together with the non-magnetic gap layer become a double magnetic gap layer, which acts as a magnetic gap during recording and acts as a magnetic gap during reproduction. Acts as a head core.

With a thickness of 7 μm, a high saturation magnetic flux density (1.43
The second soft magnetic layers 2 and 2'of T) are formed on both sides of the double magnetic gap layer so as to sandwich the first soft magnetic layers G1 and G2, respectively, and serve as a magnetic head core during reproduction and recording. To work.

The ferrite cores 1 and 1'include the front end facing surface 1
a, 1a 'and a recess 1 formed by receding from the facing surface
b, 1b ', and they are connected at a predetermined position (not shown). The non-magnetic gap layer and the first and second soft magnetic layers are provided between the surfaces of the pair of ferrite cores 1 and 1 ′ facing the tips.

Here, in order to prevent formation of an interdiffusion layer at the time of heat treatment, SiO ₂ is formed at the interface between each of the ferrite cores 1 and 1'and the second soft magnetic layers 2 and 2 '.
The angstrom diffusion preventing layers 3 and 3'are provided.

The glass-filled portions 5, 5'strongly adhere the pair of ferrite cores 1, 1 ', and M is a winding groove for winding the coil.

An example of a method of manufacturing the magnetic head will be described below. The SiO ₂ layer 3 which is a diffusion preventing layer is formed on the front end facing surface 1a of the half body of the ferrite core 1 which is the core block and the recess 1b formed by receding from the facing surface by a vapor deposition method such as a sputtering method. Was formed, a first sputtering layer for obtaining a soft magnetic layer having a high saturation magnetic flux density was formed on the surface, and a second sputtering layer for obtaining a soft magnetic layer having a low saturation magnetic flux density was formed on the surface.

The first sputtering layer has a composition of Fe.
_85.5 -Cr _4.5 using a target of -Zr _10, was formed under the conditions of the atmosphere gas during sputtering nitrogen partial pressure of 5 mol% of (pressure 0.6 Pa) in (balance argon).

The second sputtering layer was formed under the same conditions for forming the first sputtering layer except that the nitrogen partial pressure was 12.5 mol%.

Next, the ferrite core halves having the first and second sputtering layers formed thereon are heat-treated in a magnetic field in the track width direction (1.1 kOe) at 550 ° C. for 60 minutes.
Soft magnetic layers having different saturation magnetic flux densities of 1.43T and 1.08T were formed.

On the surface of the soft magnetic layer having a low saturation magnetic flux density obtained by the heat treatment, a SiO ₂ layer having a thickness (0.1 μm) which is half the thickness of the nonmagnetic gap layer G0 was formed.

In this way, a multi-layered magnetic head core half was obtained by forming the above-mentioned four kinds of layers on the ferrite core half. The other multi-layered magnetic head core half constituting the magnetic head together with this multi-layered magnetic head core half was formed in the same manner as described above.

The pair of multi-layered magnetic head core halves obtained as described above are butted against each other in a predetermined direction, the recessed portion is filled with molten glass and cooled to strongly bond the pair of core halves. Then, a magnetic head having a double magnetic gap was manufactured.

(Comparative Example) A magnetic head similar to that of Example 1 was manufactured in the same manner as in the manufacturing method except that the first soft magnetic layer having a low saturation magnetic flux density was not provided.

(Measurement of Reproduction Output) With each magnetic head of Example 1 and Comparative Example, relative speed was 3.8 m / s,
The reproduction output was measured under the conditions of the tape FUJISUPERDC used. The measurement results are shown in FIG. According to this figure
It can be seen that the magnetic head of the present invention has improved reproduction output as compared with the magnetic head of the conventional example (comparative example).

(Example 2) Soft magnetic layers having the above-mentioned specific composition formulas and having the above-mentioned specific composition ranges having high and low saturation magnetic flux densities were formed. This will be described below.

Fe _100-y Zr _y (y = 5.0, 10.0,
15.0 (at%)), an alloy target having a composition of 2.5 to 12.5 mol% and containing nitrogen in an argon gas atmosphere containing nitrogen at a gas pressure of 0.6 Pa,
High frequency sputtering was performed under conditions of an input power of 200 W to obtain amorphous alloy thin films having various compositions. Each of these thin films was heat-treated in a magnetic field to obtain a soft magnetic thin film, and their saturation magnetic flux density Bs and coercive force Hc were measured. AC BH tracer (applied magnetic field 50Hz, 25O
However, in the case of Hc> 25, 90 Oe) (the same applies hereinafter). The substrate is a crystallized glass substrate (PEG3130
C HOYA) was used. In addition, the film thickness is 0.6
It was about μm.

The results are shown in Table 1. Hc is shown as a value in the easy axis direction. Further, magnetostriction was measured for some soft magnetic thin films. As for magnetostriction, the sign of magnetostriction was determined from the change in BH characteristics when stress was applied to the film.
The results are also shown in Table 1.

[0063]

[Table 1]

[0064]

In the magnetic head of the present invention, the nonmagnetic gap layer acts as a magnetic gap during reproduction, and the nonmagnetic gap layer and the first soft magnetic layer having a low saturation magnetic flux density act as a magnetic gap during recording. The gap length during recording is longer than the gap length during playback. Therefore, the magnetic resistance of the magnetic gap portion is high, and the leakage magnetic flux in the gap portion is large.
It essentially has the excellent characteristics of

Moreover, in the magnetic head of the present invention, the same component as that of the second soft magnetic layer having a high saturation magnetic flux density is selected as the component of the first soft magnetic layer having a low saturation magnetic flux density which acts as a magnetic gap during recording. Therefore, it can be easily manufactured. That is, the soft magnetic layer of the compositional formula specified in the present invention can be formed by heat-treating the layer obtained by sputtering, and the saturation magnetic flux density of the saturated magnetic flux density can be changed only by changing the nitrogen partial pressure of the atmospheric gas during sputtering. Both a high soft magnetic layer and a low soft magnetic layer can be formed. Therefore, it is not necessary to switch the target to form the first soft magnetic layer having a low saturation magnetic flux density, and the saturation magnetic flux density can be increased by using the same target as in a normal magnetic head having no double magnetic gap. Two kinds of sputtering films capable of forming different soft magnetic layers by heat treatment can be continuously formed.

According to the method of manufacturing a magnetic head of the present invention,
A magnetic head having a double magnetic gap, which essentially has the excellent characteristic that the magnetic resistance of the magnetic gap portion is high and the leakage magnetic flux in the gap portion is large, can be easily manufactured as described below.

The first sputtering layer is for obtaining a soft magnetic layer having a high saturation magnetic flux density, which acts as a magnetic head core both during reproduction of the magnetic head and during recording, by heat treatment. The second sputtering layer is for obtaining by heat treatment a soft magnetic layer having a low saturation magnetic flux density, which acts as a magnetic head core during reproduction and acts as a magnetic gap during recording. In the manufacturing method of the present invention, as the second sputtering layer, a soft magnetic layer having a low saturation magnetic flux density, which is represented by the same composition formula as the soft magnetic layer having the high saturation magnetic flux density and has a similar composition range, is used. Was selected by heat treatment. Therefore, for the second sputtering layer, the target for forming the first sputtering layer is used as it is without changing the target, and the nitrogen partial pressure of the atmospheric gas at the time of sputtering is changed from the nitrogen partial pressure for forming the first sputtering layer. It can be easily manufactured.

Therefore, according to the manufacturing method of the present invention, the manufacturing apparatus is increased in size, the manufacturing process is complicated, and the manufacturing time is increased by using different target materials for forming the double magnetic gap layer. It is possible to solve problems such as a long time and a high cost.

[Brief description of drawings]

FIG. 1 is an enlarged schematic perspective view of a tip of a magnetic head according to an embodiment of the present invention.

FIG. 2 is a diagram showing a sliding surface of a magnetic head according to an embodiment of the present invention.

FIG. 3 is a sectional view taken along line AA ′ of FIG. 2;

FIG. 4 is a diagram showing frequency characteristics of reproduction output of a magnetic head of the present invention and a conventional magnetic head (comparative example).

Claims (8)

[Claims] 1. A double magnetic gap layer formed by forming a first soft magnetic layer having a low saturation magnetic flux density on one side or both sides of a non-magnetic gap layer, and a saturation formed on one side or both sides of the double magnetic gap layer. A second soft magnetic layer having a magnetic flux density higher than that of the first soft magnetic layer is provided between opposed surfaces of a pair of magnetic head cores, and the first soft magnetic layer and the second soft magnetic layer have a composition formula Fe _{am
· M m · Z b · N} c ( where, a, b, units of c and m are each atomic%, M is Co, Ru, Cr, V, N
At least one of i, Mn, Pd, Ir and Pt is shown, and Z is Zr, Hf, Ti, Nb, Ta, Mo and W.
Of at least one of ), And the composition range is 0 ≦ m / a <0.3 69 ≦ a ≦ 93 2 ≦ b ≦ 15 5.5 ≦ c ≦ 15. 2. The magnetic head according to claim 1, wherein the difference in saturation magnetic flux density between the first soft magnetic layer and the second soft magnetic layer is 0.1 T or more. 3. The saturation magnetic flux density of the first soft magnetic layer is 0.8.
3. The magnetic head according to claim 1, wherein the magnetic head has a thickness of 1.2T. 4. The saturation magnetic flux density of the second soft magnetic layer is 1.2.
The magnetic head according to claim 1, wherein the magnetic head is T or more. 5. A composition formula Fe _am · M _m · Z _b is formed on at least one of the surfaces constituting the abutting surfaces of a pair of core blocks.
_Nc (where a, b, c, and m are units of atomic%, M is Co, Ru, Cr, V, Ni, Mn,
At least one of Pd, Ir and Pt is shown, and Z is at least one of Zr, Hf, Ti, Nb, Ta, Mo and W. ), And the composition range is 0 ≦ m / a <0.3 69 ≦ a ≦ 93 2 ≦ b ≦ 15 5.5 ≦ c ≦ 15 The soft magnetic layer with high saturation magnetic flux density is subjected to heat treatment. A first step of forming a obtainable first sputtering layer, and a surface of the first sputtering layer formed in the first step or a soft magnetic layer obtained by heat-treating this layer or an abutting surface of a core block On at least one of the surfaces having a saturation magnetic flux density smaller than the saturation magnetic flux density of the soft magnetic layer that can be obtained by heat-treating the first sputtering layer. A second step of forming a second sputtering layer that can obtain a magnetic layer by heat treatment, and a third step of heat-treating the sputtering layer to obtain a soft magnetic layer
And a fourth step of joining the pair of core blocks through a non-magnetic layer so that the surfaces forming the abutting surfaces of the pair of core blocks face each other. Method. 6. The nitrogen partial pressure of the atmospheric gas at the time of sputtering is at least 5 more than the value at the time of forming the first sputtering layer.
6. The method of manufacturing a magnetic head according to claim 5, wherein the second sputtering layer is formed with a mole ratio of at least 100%. 7. The method of manufacturing a magnetic head according to claim 5, wherein the second sputtering layer is formed by adjusting the nitrogen partial pressure of the atmospheric gas during sputtering to 10 to 15 mol%. 8. The magnetic material according to claim 5, wherein the nitrogen partial pressure of the atmospheric gas at the time of sputtering is set to 2.5 to 7.5 mol% to form the first sputtering layer. Head manufacturing method.