JPH08155794A - Device for measuring inner diameter in noncontact manner - Google Patents

Abstract

PURPOSE: To provide a measuring instrument to correctly measure a work which is small in diameter and provided with a long small hole. CONSTITUTION: An inner diameter non-contact measuring instrument 1 is provided with a base 15 to be mounted on a frame 10 and a column 20 to be erected on the base 15. A table 50 is mounted on the base, and moved by a servo motor in X-axis and Y-axis directions to be positioned. The table 50 is provided with a fitting device 520 of a work. The column 20 is provided with three sets of measuring stations 31, 32, 33 having a measuring head to be moved in Z-axis direction. The first measuring station 31 is provided with an endoscope to inspect the inner wall surface of a hole, and the surface roughness is measured by displaying the inner wall surface on a monitor 60. The second and third measuring stations 32, 33 are provided with an air micrometer or an electrostatic voltmeter to measure the inner diameter and the straightness of the hole. The table 50 and the respective measuring stations are operated by an operation lever 710 provided on a control panel 71.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inner diameter non-contact measuring device for machine parts, especially machine parts having fine holes which require high dimensional accuracy.

[0002]

2. Description of the Related Art As a device for measuring the inner diameter of a mechanical part, various microgauges and three-dimensional measuring devices are used, and the inner diameter dimension can be directly measured. However, in the case of a small hole, there is no space for inserting a sillus or the like, and comparative measurement using an air micrometer and a master ring is performed.

[0003]

For example, in a device for controlling the flow rate of a fluid, it is necessary to precisely machine a fine hole. In this type of precision equipment, it is necessary to accurately measure the processing accuracy of the processed fine holes. The present invention provides an apparatus for efficiently measuring the inner diameter of a precision instrument of this type.

[0004]

The inner diameter non-contact measuring device of the present invention comprises, as a basic means, a frame, a base mounted on the frame via a vibration isolator, and a base disposed on the base. A table including a work mounting device that mounts a hole of a work whose inner diameter is measured in a vertical direction, a table driving device that moves the table along two axes orthogonal to each other in the horizontal direction, and a vertical direction with respect to a moving axis of the table. And a measuring station mounted on the column. The measuring station has a first measuring station for measuring the surface roughness of the inner wall surface of the hole and a second measuring station for measuring the inner diameter dimension of the hole. Measurement station and a third station for measuring the straightness of the hole.

[0005]

The work having fine holes to be measured is sent to three measuring stations, and the surface roughness of the inner wall, the inner diameter, and the straightness of the holes are sequentially measured.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a perspective view showing an outline of the whole apparatus of the present invention, FIG. 2 is a front view of a measuring section, and FIG. 3 is a right side view. An inner diameter non-contact measuring device indicated by reference numeral 1 is a frame 10
And a base 15 placed on the frame 10 via a vibration-proof rubber 12 and a measurement column 20 standing on the base 15.
A measuring unit having a table 50 on which a work is placed, and a monitor device 60 arranged adjacent to the measuring unit,
The controller 70 is provided. A measurement station 30 is provided on the front surface of the measurement column 20.
Is equipped with three measuring stations 31, 32, 33.

A first linear guide 51 is provided on a base 15 which is placed on the frame 10 via a vibration-proof rubber 12, and a sliding member 52 is attached thereto. Sliding member 5
2 is moved and positioned in the X-axis direction by the pulse motor 510. The second linear guide 5 is provided on the sliding member 52.
3 is provided, and the table 50 is slidably attached. The table 50 is moved and positioned in the Y-axis direction by the pulse motor 512 provided on the sliding member 52. The measurement station 30 includes a linear guide rail 310 mounted on the front surface of the measurement column 20, and a slide head 320 slidably supported by the guide rail.
Have. The slide head 320 is a servo motor 330
It moves in the Z-axis direction by the ball screw 332 driven by.

The monitor 60 and the control device 70 can be arranged separately from the measuring section. The control device 70 includes, for example, an amplifier 72, a video printer 73, a printer 74 for printing, a digital display unit 730 showing the inner diameter measurement result, a digital display unit 740 showing the roundness measurement result, and the like. On the control panel 71, together with various operation buttons and dials, a so-called joystick-shaped operation lever 710 is provided.
Is equipped with. The operation lever 710 controls the movement of the table 50 in the X axis and the Y axis. Further, it may be provided with a function that enables operation in the Z-axis direction.

FIG. 4 is a detailed view showing the relationship between the work on the table and the measuring head in the measuring station.
An air cylinder 520 is placed on the table 50, and a work mounting head 530 is provided at the tip of a piston 522 of the air cylinder 520. The work indicated by reference numeral 80 as a whole is
The work 80 has the first hole 81 and the second hole 84, and is attached by fitting the first hole 81 into the boss 532 of the attachment head 530 of the work. The second hole 84 to be measured is a fine hole and is provided inside the inner diameter portion 85. Since the second hole 84 has a small inner diameter and a long shaft, it is difficult to process. It is difficult to machine such a small hole, but it is also extremely difficult to measure whether or not the processed small hole satisfies the design specifications.

The measuring device of the present invention measures this kind of fine hole 84 with high accuracy and efficiency. Work 8
When 0 is attached to the mounting head 530, the air cylinder 520 can be operated to position the work by pressing the upper part of the work against the work retainer 22. In the case of the present invention, a nut-shaped measuring jig 90 is attached using the screw portion 86 provided on the upper portion of the work 80, and the jig 90 is brought into contact with the work retainer 22 to improve the accuracy of the work. Achieve the positioning of. Measuring head 35
0 slides in the Z-axis direction integrally with the cylinder 340, and various probes 360 according to the purpose of measurement are attached to the tip thereof.

FIG. 5 shows the configuration of the first measuring station 31. The first measurement station 31 includes a measurement head 350 equipped with an endoscope 361 using a fiberscope. The endoscope 361 is equipped with a fiberscope and a lens inside the tube, and the wall surface of the inner diameter portion can be visually recognized by irradiating the light from the light source from the tip. The work 80 attached to the work mounting head 530 is set in the state shown in FIG.
By inserting 1 into the fourth hole 84, the inner wall surface of the hole 84 is displayed on the monitor 60 via the amplifier 62.
By comparing this display image with a reference image prepared in advance, the processing roughness of the inner wall surface of the hole can be inspected. The inspection of the display image can be visually recognized by an operator or can be automated by image processing and output to the video printer 73.

6 and 7 show the second measuring station 32.
Shows the configuration of. The second station 32 is equipped with an air micrometer 362 or an electrostatic voltmeter on the measuring head. The slide head 320 moves in the Z-axis direction according to the amount of rotation of the ball screw 332 driven by the servo motor 330. The air micrometer 362 inserted in the hole 84 of the work blows air from the nozzle into the hole 84 in the direction of arrow P. This air flow rate and micrometer 36
By inserting 2 into the master gauge and comparing the flow rate when air is blown out, it is possible to inspect whether the inner diameter of the hole 84 is within a predetermined size range.
The signal from the air micrometer 362 is sent to the determination device 90 in the control device 70 via the amplifier, and the pass / fail is determined. The measurement result is also output to the printer 74 as needed.

FIGS. 8, 9 and 10 show the configuration of the third measuring station 33. The measuring head 350 mounted on the slider head 320 is connected to the servo motor 370 via a speed reducer 372, and the driving of the servo motor 370 causes the measuring head 350 to rotate about its axis. Air micrometer 36 attached to measuring head 350
3 or the static voltmeter rotates while being inserted in the hole 84 of the work. In the meantime, the air micrometer 363 measures the circularity of the inner diameter of the hole 84 by blowing air from the nozzle at four points P ₁ , P ₂ , P ₃ , P ₄ or inserting a static voltmeter. . This signal is sent to the determination device via the amplifier 92 and compared with the roundness data obtained by the master gauge. The determination result is displayed on the lamp of the determination device 90 in the control device 70. The measurement result can be output to the printer 74.

FIG. 11 is a flow chart showing the procedure of automatic measurement by the inner diameter non-contact measuring device of the present invention. When the work is fixed on the table and the fully automatic start button is pressed, the position of the work is confirmed by the camera, and the inner diameter and straightness are automatically measured. The result is output to the printer. After that, the roughness of the inner surface of the hole is inspected using a miniborescope. The minibore scope is operated in the Z-axis direction by operating the joystick. The reason why the surface roughness is finally inspected is that the inner wall surface of the hole may be scratched by an air micrometer or the like in the previous process, and the presence or absence of this scratch is also inspected.

FIG. 12 shows a flow for individually executing each measurement item. FIG. 13 shows a flow of operations of the table and the measuring head. As described above, according to the present invention, the work set on the work mounting table 50 can be sequentially moved to the three measuring stations to efficiently measure the machining accuracy of the fine holes.

[0016]

As described above, the present invention is a measuring device for a work having fine holes that have been subjected to precision processing, and is provided with a table to which the work is attached and a plurality of measuring stations in charge of each measurement. The workpieces are sequentially sent to the measuring station to perform measurement. The measuring station is in charge of the surface roughness of the inner wall surface, the inner diameter of the hole, and the straightness of the hole. Since the surface roughness is magnified by the endoscope and displayed on the monitor, it can be easily compared with a standard image to determine the quality. For the inner diameter of the hole and straightness, use an air micrometer or static voltmeter,
The result is automatically measured, and the quality is automatically judged. Therefore, the measurement efficiency is high and the measurement accuracy is high.

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall configuration of an inner diameter non-contact measuring device of the present invention.

FIG. 2 is a front view of an inner diameter non-contact measuring device of the present invention.

FIG. 3 is a right side view of the inner diameter non-contact measuring device of the present invention.

FIG. 4 is an explanatory view showing details of a work attachment device.

FIG. 5 is an explanatory diagram showing a first measurement station.

FIG. 6 is an explanatory diagram showing a second measurement station.

FIG. 7 is an explanatory diagram showing measurement points of inner diameters of holes.

FIG. 8 is an explanatory diagram showing a third measurement station.

FIG. 9 is an explanatory view showing measurement points of straightness of holes.

FIG. 10 is an explanatory diagram showing measurement points of straightness of holes.

FIG. 11 is a flowchart showing a measurement procedure.

FIG. 12 is a flowchart showing a measurement procedure.

FIG. 13 is a flowchart of the operation.

[Explanation of symbols]

 1 inner diameter non-contact measuring device 10 frame 15 base 20 measuring column 30 measuring station 50 work table 60 monitor 70 controller 80 work

Claims (5)

[Claims] 1. A frame, a base mounted on the frame via a vibration isolator, and a work mounting device mounted on the base for vertically mounting a hole of a work whose inner diameter is to be measured. A table, a table driving device for moving the table along two axes that are orthogonal to each other in the horizontal direction, a column arranged in a direction perpendicular to the moving axis of the table, and a measuring station mounted on the column, The measuring station has a first measuring station for measuring the surface roughness of the inner wall surface of the hole and a second measuring station for measuring the inner diameter dimension of the hole.
Inner diameter non-contact measuring device comprising a measuring station of No. 3 and a third station for measuring the straightness of the hole. 2. The inner diameter non-contact measuring device according to claim 1, further comprising a work retainer arranged on the column, and an actuator mounted on the work attaching device to push up the work to the work retainer. 3. The inner diameter non-contact measuring device according to claim 1, wherein the means for measuring the surface roughness of the inner wall surface of the hole is a means for measuring with an endoscope or a laser beam. 4. The inner diameter non-contact measuring device according to claim 1, wherein the means for measuring the inner diameter dimension and straightness of the hole is an air micrometer or a measuring means using an electrostatic voltage method. 5. The inner diameter non-contact measuring device according to claim 1, wherein each measuring station comprises means for moving the measuring means in a vertical direction.