JPH0814611B2 - Inspection method and inspection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Industrial field of application) The present invention uses, for example, an electronic circuit board assembled by mounting various electronic components on a circuit board as an object to be measured. The present invention relates to an inspection method and an inspection device for functionally inspecting a body for a plurality of items.

(Prior Art) In this type of inspection apparatus, a member called a test fixture is arranged between the circuit board and the tester, and the pattern surface of the circuit board and the output terminal of the tester are connected to each other, so that the circuit It is designed to perform a functional test of the board.

Here, the conventional test fixture has a probe base 1 and an interface base 2 as shown in FIG.
Two bases 1 and 2 referred to as are fixed to a support base 3 so as to face each other.

The probe base 1 is arranged so as to face the pattern of the circuit board, has one end 5a in contact with the pattern surface, and array-supports the probe pins 5 to which the wire 4 is connected on the other end 5b side, The interface base 2 is
The wire rod 4 is connected to one end 6a facing the probe pin 5, and the other end 6b is arranged and supported by an interface pin 6 that contacts an output terminal of the tester.

Then, one end 5a of all the probe pins 5 is brought into contact with the pattern surface of the circuit board at a time by the relative vertical movement of the circuit board or the probe base, a signal is sent from the tester side, and this output is detected by the tester. By doing so, a functional test was being performed.

(Problems to be Solved by the Invention) In the inspection device having the above-described configuration, all the probe pins 5 on the probe base 1 come into contact with the pattern surface at one time, and therefore, depending on a certain inspection item, even an unnecessary pattern is conducted. In particular, in the case of high frequency measurement, an accurate high frequency measurement cannot be performed due to stray capacitance caused by contact with an unnecessary pattern.

Therefore, if you want to perform an inspection according to the measurement item in the conventional device described above, it is necessary to prepare a plurality of probe bases according to the measurement item and replace the probe base every time the item changes, This increases the manufacturing cost of the probe base, and requires wiring connection at the time of replacement, so that the inspection time becomes long and efficient measurement cannot be performed.

Alternatively, it is conceivable to perform the inspection with a different inspection device for each measurement item, but the problem that the probe base is required for each measurement item cannot be solved, and there is the trouble of attaching and detaching the circuit board to the inspection device, which is more expensive. Since a plurality of inspection devices are prepared, cost increase cannot be avoided.

If the inspection according to the measurement items is to be performed using the all-pin contact type probe base, it is necessary to perform switching control of the relay etc. on the tester side, and even with this method, the cost increase of the device is inevitable, There is a problem that the device also becomes large.

In addition, the probe pins of about 2 to 4 pins are arranged on the XY table, and the probe pins are moved to 2 by the table drive.
An inspection device that moves on a dimensional plane and contacts the pattern surface according to the item has been put into practical use, but this cannot be applied to an inspection device that uses multiple pins, and the XY table is expensive. There was also the problem of being there.

Therefore, an object of the present invention is to solve the above-mentioned problems of the related art, and to perform an accurate measurement of a plurality of items for one inspection object quickly while using one type of probe base. A method and an inspection apparatus are provided.

[Structure of the Invention] (Means for Solving Problems) According to the method of the present invention, an object to be measured having a large number of measuring ends is placed on a guide base, and the holes formed in the guide base and the measuring ends. And a guide base having the first and second probe pins having different upper end heights and the guide base are set to a first distance, and A step of bringing the highest first probe pin into contact with the measurement end through the hole; and maintaining a contact state of the first probe pin to supply a signal to the object to be measured to perform the first measurement. Measuring the item, and setting the distance between the guide base and the probe base facing each other to a second distance narrower than the first distance, while maintaining the contact state of the first probe pin, The second probe A step of bringing the pin into contact with another measuring end through the hole; and maintaining a contact state of the first and second probe pins to supply a signal to the object to be measured so that a second measurement item is set. And a measuring step.

In the first measurement item, it is preferable to supply a high frequency signal to the object to be measured via the first probe pin to perform high frequency measurement.

The device of the present invention includes a guide base on which an object to be measured having a large number of measurement ends is placed, and a probe having a spring pin structure which is arranged in parallel with the guide base and is biased upward so as to contact the measurement end. A probe base in which pins are arrayed and supported on a two-dimensional surface; and a driving unit that varies a facing distance between the guide base and the probe base. The guide base has positions of all measurement ends. A hole is formed at a position corresponding to, the probe base is the probe pin whose one end is arranged to face the hole, and the other end side is connected to the tester side, and the probe pin is connected according to the type of measurement item. The first and second probe pins having different heights at one end are arrayed and supported, and the drive means sets the facing distance between the guide base and the guide base to the first distance, and the first upper end has the highest height. While contacting the measuring end through the hole with the measuring end and setting the facing distance to a second distance narrower than the first distance while maintaining the contact state of the first probe pin. , The second probe pin is brought into contact with another measuring end through the hole, and the facing distance is set to a third distance wider than the first distance. Both of the pins are brought into non-contact with the measuring end.

(Operation) In the method of the present invention, the facing distance between the guide base on which the object to be measured is placed and the probe base having the first and second probe pins having different upper end heights varies depending on the driving means. By setting the distance, it is possible to selectively contact only the probe pins according to the measurement item to the measuring end without contacting all the probe pins to the measuring end at one time. However, since multiple types of measurement items can be inspected and unnecessary measurement ends do not come into contact, measurement can be performed without the need for switching control by a relay on the tester side, even in the case of high frequency measurement. Since the stray capacitance is reduced, it is possible to always carry out an accurate inspection.

In the device of the present invention, the probe base is set by changing the height of the probe pin stepwise, so that the facing distance between the probe base and the guide base is variably driven stepwise according to the step height. By doing so, the inspection according to the measurement item becomes possible.

(Example) Hereinafter, one example in which the present invention is applied to a circuit board inspection apparatus will be specifically described with reference to the drawings.

First, a general outline of the embodiment apparatus will be described with reference to FIG.

The apparatus of this embodiment is roughly classified into a circuit board 10 on which an electronic component, which is an object to be inspected, is mounted, a tester 20 for performing a functional test of the circuit board 10, and the circuit board 10 fixedly mounted. In addition, the test fixture 30 is configured to connect the pattern surface of the circuit board 10 and the output terminal of the tester 20.

The tester 20 includes a lifter 21 that supports the test fixture 30 so that the test fixture 30 can move up and down, and a locating pin 22 that is an example of a guide member that positions and guides an interface base 50, which will be described later, of the test fixture 30.
A vacuum port 23 for vacuuming the interface base 50, and the test fixture 30.
A contact probe 24 with a spring, which is an output terminal of the tester 20, is provided on the surface facing the.

Next, the test fixture 30 which is a characteristic configuration of the apparatus of this embodiment will be described with reference to FIG.

The test fixture 30 has a guide base 35, a probe base 40 and an interface base 50,
The probe base 40 and the interface base 50 are fixed in parallel by a column 31. Further, the guide base 35 is movably supported by arranging the compression coil spring 37 between the guide base 35 and the probe base 40 so that the facing distance between the guide base 35 and the probe base 40 is variable.

Then, the probe base 40 and the interface base 50 are provided with vacuum holes 43 and 52, respectively, and by connecting the vacuum tube 32 between them to evacuate, the guide base 35 can be sucked to the probe base 40 side, When is released, it can be returned to the initial position by the biasing force of the compression coil spring 37, and the guide base 35 can be moved up and down by the above mechanism. It should be noted that since the guide base 35 and the probe base 40 are evacuated, a sealed structure is provided to prevent air leakage during this time.

 Next, the probe base 40 will be described.

The probe base 40 is a base that supports a probe pin that contacts the measurement end 12 on the side opposite to the component mounting surface of the circuit board 10.

Further, in this embodiment, two types of probe pins 41 and 42 are used.
It is configured to have.

As shown in detail in FIG. 1, the probe pins 41, 42 have connection pieces 41a, 41b or 42 electrically connected to both ends thereof.
The upper connecting pieces 41a, 42a having a and 42b have a spring pin structure so as to be urged to project toward one end side in the axial direction which is the arrow direction in the figure.

The probe pins 41, 42 are inserted into the insertion holes 40a formed in the probe base 40 and supported and fixed.

The difference between the two types of probe pins 41 and 42 is that the upper terminals 41a and 42a are different in height, and the terminal 41a is located above the terminal 42a.

The guide plate 35 arranged above the probe base 40 has guide holes 35a corresponding to the arrangement positions of the probe pins 41, 42, and stoppers also serving as movement guide pins on both sides thereof. Pins 36, 36 are provided, and the stopper pins 36, 36 are inserted into the guide holes 44, 44 formed in the probe base 40 and are formed to extend therebelow.

Guide pins 38 for the circuit board 10 are vertically provided on the upper surface of the guide base 35 so that the board 10 can be accurately positioned on the pin guide base 35.

Next, the interface base 50 will be described.

The interface base 50 is a base that comes into contact with the spring-loaded contact probe 24 of the tester 20 and has a function as an interface, and the base 50 has various positions facing the spring-loaded contact probe 24 of the tester 20. The interface pin 51 is supported by the. This interface pin 51
Has connection pieces 51a, 51b electrically connected to both ends thereof.

In addition, the interface base 50 is formed with a guide hole (not shown) that is a guided member to be inserted into the locating pin 22 of the tester 20, so that accurate positioning with the tester side can be performed. It has become.

As will be described later, the interface base 50 is vacuum-sucked to the tester 20 side, and thus has a structure that prevents air from flowing into the tester 20 side.

Further, the connection piece 41b of the probe pin 41 fixed to the probe base 40, and the connection piece 51a of the interface pin 51 supported by the interface base 50,
It is designed to be connected by a wire rod 70.

A cam 60 having a first surface 60a and a second surface 60b having different heights is slidably arranged on the interface base 50, and is movable by an air cylinder 61.

 Next, the operation will be described.

The interface port 50, which is the base of the test fixture 30, is sucked toward the tester 20 by the vacuum port 23 of the tester 20, and the connection piece 51b of the interface pin 51 supported by the interface base 50 is connected to the tester 20. Contact the spring contact probe 24.

After setting such a state, with the cam 60 set to the position shown in FIG. 1, a vacuum is drawn between the guide plate 35 and the probe base 40 via the vacuum holes 52, 43 and the vacuum tube 32. The guide base 35 is lowered toward the probe base 40. This downward movement is performed by the guide base 35
The stopper pin 36 extending downward is the first of the cam 60.
It is executed until it contacts the surface 60a. When the stopper pin 36 abuts the first surface 60a in this way, the connecting end 41a of the probe pin 41 is reliably brought into contact with the measuring end 12 of the circuit board 10 by its spring function.

Here, if the probe pin 41 to be contacted first corresponds to the measurement item to be performed first, by energizing the circuit board 10 by the tester 20, the measurement end corresponding to the first measurement item. It becomes possible to energize 12 and perform the functional test.

Therefore, unlike the conventional case, it does not come into contact with the measurement end that is not related to the measurement item, so that the stray capacitance is reduced even in the case of high frequency measurement, so that accurate inspection can be performed. As described above, when performing an inspection according to a measurement item, there is no need to replace the probe base or change the inspection device, and it is not necessary to perform switching operation on the tester side. The inspection can be performed with an improved and cheaper device than before.

After the end of this first measurement item, the air cylinder 61 is driven so as to move the cam 60 to the right side in FIG. 1, and
The vacuum evacuation operation described above is continued.

Then, the guide base 35 further descends so as to approach the probe base 40, and this descending movement is continued until the stopper pin 36 contacts the second surface 60b of the cam 60. The stopper pin 36 comes into contact with the second surface 60b, so that the probe pin 41 contacted first as well as the probe pin positioned below the probe pin 41 are contacted.
42 also comes into contact with the measuring end 12. At this time,
The probe pin 41 contracts due to its spring function, so that contact with the measuring end 12 can be ensured.

Then, by energizing the tester 20 with the two types of probe pins 41, 42 in contact with each other in this manner, it is possible to perform a functional test corresponding to the second measurement item.

The present invention is not limited to the above embodiment,
Various modifications can be made within the scope of the present invention.

For example, when the probe pins are configured with different heights as described above, the height setting is not limited to two types, but can be set in multiple stages according to the measurement item. In the case of such a configuration, it is not limited to the one in which the circuit board 10 is moved stepwise as in the above embodiment,
Even if the probe base 40 is moved up and down, the same effect can be obtained.

Further, as the vertical movement mechanism, in addition to the one adopting the vacuum system as in the above-mentioned embodiment, a mechanical mechanism for pushing up and down may be used. In this case, it is not necessary to use a stopper such as a cam for ensuring the gradual stop as in the above-mentioned embodiment, and it can be achieved by the moving stroke.

In the above-described embodiment, if one probe base is prepared as the probe base regardless of the number of measurement items, it is possible to execute many circuit boards of one type without replacing the probe base. However, it is possible to further proceed to adopt a configuration in which one probe base can be used for all regardless of the type of the circuit board and the measurement item.

For this purpose, each probe pin may be configured to be independently movable up and down on the probe base. With this configuration, only a desired probe pin can be selectively moved according to the measurement item and brought into contact with the measurement end, and the vertical movement of the probe pin can be selected regardless of the type of the circuit board and the measurement item. As a result, the probe pin can be moved and brought into contact with the required measurement position.

Further, although the circuit board inspecting apparatus has been described in the above-mentioned embodiments, the same effect can be obtained by applying the circuit board inspecting apparatus to a drive circuit of a matrix liquid crystal display device.

[Effects of the Invention] As described above, according to the present invention, by using only one type of probe base, by ensuring contact with only the measurement end according to the measurement item, it is possible to achieve stepwise adjustment according to the measurement item. It is possible to provide an inexpensive inspection method and inspection device capable of accurately executing inspection, and in particular, it is possible to always perform accurate functional inspection even if the detection signal is a high frequency signal, and also to provide a guide base and a probe base. Since the inspection according to the measurement item can be performed by the stepwise variable drive of the facing distance between the two, there is an effect that the inspection throughput is significantly improved as compared with the conventional case.

[Brief description of drawings]

FIG. 1 is a sectional view showing a sectional structure of a test fixture in a circuit board device which is an embodiment of the present invention, and FIG. 2 is a schematic explanation showing an entire configuration of an inspection device using the test fixture shown in FIG. FIG. 3 is a schematic explanatory view of a conventional inspection device. 10 …… Circuit board, 20 …… Tester, 30 …… Test fixture, 35 …… Guide base, 40 …… Probe base, 41,42 …… Probe pin,

Claims (3)

[Claims] 1. A step of placing an object to be measured having a large number of measuring ends on a guide base, and causing a hole formed in the guide base and the measuring end to face each other; The facing distance between the probe base having the second probe pin and the guide base is set to a first distance, and the first probe pin having the highest height at the upper end is measured through the hole. Contacting the end, and maintaining the contact state of the first probe pin,
Supplying a signal to the object to be measured to measure a first measurement item, and setting a facing distance between the guide base and the probe base to a second distance narrower than the first distance, While maintaining the contact state of the first probe pin,
Contacting the second probe pin with another measuring end through the hole; maintaining the contact state of the first and second probe pins to supply a signal to the measured object; An inspection method comprising: a step of measuring two measurement items. 2. The inspection method according to claim 1, wherein in the first measurement item, a high frequency signal is supplied to the object to be measured via the first probe pin to perform high frequency measurement. . 3. A guide base on which an object to be measured having a large number of measurement ends is placed, and a probe having a spring pin structure which is arranged in parallel with the guide base and is biased upward so as to contact the measurement ends. A probe base in which pins are arrayed and supported on a two-dimensional surface; and a driving unit that varies a facing distance between the guide base and the probe base. The guide base has positions of all measurement ends. A hole is formed at a position corresponding to, the probe base is the probe pin whose one end is arranged to face the hole, and the other end side is connected to the tester side, and the probe pin is connected according to the type of measurement item. The first and second probe pins having different heights at one end are arrayed and supported, and the drive means sets the facing distance between the guide base and the guide base to the first distance, and the first upper end has the highest height. 1 A probe pin is brought into contact with the measurement end through the hole, the facing distance is set to a second distance shorter than the first distance, and the contact state of the first probe pin is maintained, The second probe pin is brought into contact with another measuring end through the hole, the facing distance is set to a third distance wider than the first distance, and the first and second probe pins are set. The inspection device is characterized in that both are brought into non-contact state with the measuring end.