JPH08127425A - Transferring device - Google Patents

Abstract

PURPOSE: To load equipment on an equipment loading means together with cords, and move it between two sealed vessels through a valve mechanism by a guide by providing a guide means for guiding the cords to the vessel while holding the sealed state of the vessel. CONSTITUTION: A rubber member 12 mounted on the lower end of a shutter member 10 is highly flexible, so that cords 3 can be sealed in the space with an opening part even when they are present within the opening part. The cords 3 can be sealed between the opening part and the shutter member 10 only by pulling up the shutter member 10 to open the opening part 9, and closing the shutter member 10 after moving an equipment 1 from one vessel to the other vessel together with the cords 3. Thus, the vessel in which the equipment 1 and the following cords 3 are carried can be kept in the sealed state.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrying device for carrying a device equipped with cords between two closed containers for use.

[0002]

2. Description of the Related Art Conventionally, in the manufacture of microfabricated parts such as semiconductor parts and medical parts, various kinds of processing, assembling, analysis, inspection, etc. are carried out in an atmosphere having different gas pressures and gas species. Therefore, it is necessary to put the micro sample in and out of a plurality of closed containers having different atmospheres. However, in order to put in and take out the micro sample without greatly changing the atmosphere in the closed container, as shown in FIG. A container (load lock chamber) 42 is prepared separately from the closed container 41.
The gate valve 43 can be used to shut off the load lock chamber 42 from the load lock chamber 42. First, the minute sample 45 is installed in the carrier 44 of the load lock chamber 42 in the atmospheric state. Next, the load lock chamber 42 is evacuated to, for example, a vacuum state so that the pressure in the closed container 41 is substantially the same as the degree of vacuum. After that, the gate valve 4
3, the carrier 44 is loaded into the closed container 41, and the micro sample 42 is set in the holder 46 in the closed container.
The transporter 44 is returned to the load lock 42 chamber, the gate valve 43 is closed, and the hermetically sealed container 41 is hermetically sealed. Then, predetermined processing such as etching is performed in the hermetically sealed container 41.

Further, not only the load lock chamber but also the gas pressure,
A micro sample is carried in and out between a plurality of containers different in gas type and the like, and in this case also, a sample is delivered between the plurality of containers and an atmosphere is maintained by blocking valves.

[0004]

However, in the conventional device described above, only the sample is conveyed between the closed containers, and the translation stage or the rotation stage that holds the sample and moves the sample in the fine movement position is used. It was difficult to move a sample along with a guide along with a slider, along with a sample moving device and a moving device such as a manipulator equipped with a stage and a moving device for analysis and processing on the stage. .

This is because these moving devices and operating devices, as well as sliders, are driving and controlling cords, wires, wire bundles,
Equipped with cables, etc. (hereinafter referred to as cords), these moving equipment and operating equipment are transported together with the sample to a closed container, and when the valve is closed, the cords obstruct and maintain a closed atmosphere. This is because it cannot be done.

Therefore, for example, three-dimensional processing of a sample or 3
To perform dimensional analysis etc. in containers with different atmospheres, install the same translation / rotation stage and mobile equipment or operating equipment such as analysis probe in each container, and transfer the sample between these mobile equipment and operating equipment. Needed a mechanism to do this. This not only complicates the mechanism and operation, but especially the relocation property of the sample (that is, the property that it can be reproducibly set to the same position in each closed container with respect to the mobile device or the operating device). As a result, it becomes difficult to process or analyze the same place, and high-precision processing cannot be performed.

Therefore, the present invention has been made to eliminate the above-mentioned conventional drawbacks, and even when an apparatus equipped with drive / control cords is used while being moved between closed containers having different atmospheres. An object of the present invention is to provide a carrying device capable of maintaining the sealed state of the container.

[0008]

Therefore, firstly, according to the present invention, when a device provided with cords is carried between two hermetically sealed containers for use, a communication part is provided between the two hermetically sealed containers. And a device for mounting the device equipped with the cords to move between containers, a guide for guiding the movement of the device mounting means, and a container for the container. The above object is achieved by providing a carrying device provided with an introducing means for introducing the cords into the container while maintaining the sealed state.

Secondly, the valve mechanism includes an opening portion provided in the communication portion and a shutter member for closing the opening portion, and the introducing means is attached to a peripheral portion of the shutter member to attach the cords. The above object is achieved by providing a carrying device including an elastic member which is hermetically held between the opening and a fixed wall.

Thirdly, the valve mechanism includes an opening provided in the communicating portion and a shutter member for closing the opening, and the introducing means is in a hermetically sealed state communicating with the communicating portion through an elastic slit. The above object is achieved by providing a transporting device that includes a channel, and the channel can selectively introduce the cords from the outside of the channel into the two containers through the elastic slit. .

Fourthly, according to the present invention, the valve mechanism includes an opening provided in a communication portion and a shutter member for closing the opening, and the introducing means is one of the openings on which the shutter member is seated. A head which forms a portion and is capable of projecting and rotating in the opening, and the head is adapted to introduce the cords from the outside of the connecting portion through the head into the communicating portion in a sealed state. The above object is achieved by providing a carrying device.

Fifth, the valve mechanism comprises an opening formed in a partition wall for partitioning the two containers, and a shutter member for closing the opening, and the shutter members are nested with each other. A main member and an auxiliary member, the main member is guided forward and backward to the opening position, the auxiliary member is forward and backward guided to the opening position, and is rotatable in a plane orthogonal to the forward and backward direction, The auxiliary member is configured to introduce the cords from the outside of the container through the auxiliary member in a sealed manner and to introduce the cords into the container, and the auxiliary member provides a carrying device that constitutes the introducing means, thereby achieving the above object. .

Sixthly, the valve mechanism includes a pair of shutter members which are spaced apart from each other in the communicating portion, and the cords are sealed between the pair of shutter members and outside the communicating portion. To provide a carrying device in which the pair of shutter members are introduced so as to close the shutter member on the side opposite to the container in which the device including the cords is sealed, and the pair of shutter members constitutes the introducing means. The above object is achieved by.

Seventhly, the valve mechanism includes an opening provided in the communicating portion and a shutter member for closing the opening, and the introducing means is in a hermetically sealed state communicating with the communicating portion through an elastic slit. A cylinder, the cylinder including the cords from outside the cylinder through the elastic slit 2
The above object is achieved by providing a transfer device that includes a moving member that selectively guides one container, and the moving member cooperates with a shutter member and that includes a blocking portion that seals the slit.

Eighth, according to the present invention, when a device provided with cords is used by carrying it between two hermetically sealed containers, the two hermetically sealed containers are connected by a communication part and the communication part is valved. A device mounting means for shutting off with a mechanism and mounting the device to move between containers and a guide for guiding the movement of the device mounting means are provided, and the cords are installed in each of the containers, and the cords are installed. The above-described object is achieved by providing a carrying device capable of detachably connecting a class to the device.

[0016]

In the first to seventh inventions, the device is mounted on the device mounting means together with the cords, and is moved between the two closed containers via the valve mechanism by the guide. The cords attached to the equipment are introduced in a sealed state into the container into which the equipment is carried by the introduction means of the cords provided in the valve mechanism or the introduction means of the cords formed bypassing the valve mechanism. .

In the second aspect of the invention, in the second invention, the device is moved between the two closed containers together with the cords through the opening of the communication part, and after the device is carried into one of the closed containers,
When the shutter member is closed, the elastic member attached to the peripheral portion of the shutter member hermetically holds the cords and the like with the fixed wall of the opening.

According to the third aspect of the invention, the device is moved between the two containers together with the cords through the opening of the communication part. At this time, the cords are introduced into the communicating portion in a sealed state from the channel adjacent to the communicating portion through the elastic slit, and the cords move along the elastic slit as the device moves. The elastic slit allows the cords to be hermetically introduced into the container from outside the channel while the cords are moved with the device. After loading the device into one of the closed containers, the shutter member is seated on the elastic slit.

In the fourth aspect of the invention, the device is moved between the closed containers together with the cords through the opening of the communication part. At this time, the head for introducing the cords from the outside of the communicating portion through the head into the communicating portion in a sealed state is projected into the opening portion, and the head is arranged so that the cords are directed to the side where the device is carried in. Is rotated. Thereafter, the head is returned to the original position so as to form a part of the opening, the shutter member is seated in the opening, and the container is sealed.

In the fifth invention, the device is moved together with the cords between the closed containers via the opening in the partition wall. At this time, first, the main member and the auxiliary member of the shutter member are respectively retracted from the opening so as to be separated from each other, and then the device together with the cords is carried into one of the closed containers through the opening. It Next, an auxiliary member for sealingly introducing the cords from the outside of the container to the inside of the container through the auxiliary member is advanced to the opening position so that the cords are directed to the closed container in which the device is carried. Is rotated. Then, the main member and the auxiliary member are combined again so as to close the opening.

According to the sixth aspect of the invention, the device is moved together with the cords between the closed containers via the communicating portion. After the device has been moved, by closing the shutter member on the opposite side of the sealed container in which the device is carried into the pair of shutter members, the device and its associated cords are hermetically introduced into the container. can do.

In the seventh invention, the device is moved between the two containers together with the cords through the opening of the communication part. Simultaneously with or after the movement of the device, the cords are moved along the elastic slit by the moving member that moves in the cylinder, and the cords are sealed from the cylinder adjacent to the communication portion via the elastic slit. Introduced in the communication section,
Further, it is introduced into the container. The cylinder introduces the cords in a sealed state from the outside of the cylinder into the inside of the cylinder. After the equipment and the cords have been carried into one of the closed containers, the shutter member is seated on the elastic slit, where the shutter member cooperates with the blocking portion of the moving member to seal the elastic slit.

In the eighth invention, the cords are detachably connected to the device, and only the device is moved when the device is moved. Cords are installed in each closed container so that the device can be easily connected to the cords when the device is carried into the closed container. Therefore,
The cords do not hinder the valve mechanism.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 shows an embodiment of the present invention.
In the embodiment, a micromachined component is mounted on a slider 2 of a device 1 including its moving device and operating device, and these are placed under two different atmospheres along with a guide 4 together with their operation / control codes 3 and the like. It is designed such that it can be moved between the closed containers 5 and 6 to be opened. The two closed containers 5, 6 are connected to each other by a communication part 7, and an intermediate part of the communication part can be airtightly shut off by a valve mechanism 8. The device 1 equipped with the cords 3 slides along a guide 4. 2 is moved via the communication part 7.

The guide 4 is cut at the position of the valve mechanism 8, and the cutting distance is considerably shorter than the length in the moving direction of the slider 2. Therefore, the slider 2 moves over the valve mechanism 8 and moves smoothly along the guide 4. can do.

As shown in FIGS. 2 and 3, the valve mechanism 8 has an opening 9 provided in the communicating portion 7, and a shutter member 10 that moves up and down so as to airtightly block the opening.
With. The opening 9 is made of a rubber material and has peripheral walls 9a, 9b, 9c.
The shutter member 1 is formed (both sides and bottom).
Rubber material 1 attached to the upper and lower ends of the main body 10a of 0
In cooperation with 1 and 12, the opening can be airtightly blocked. The rubber material 12 attached to the lower end of the shutter member 10 has high flexibility, and even when the cords 3 are inside the opening, the cords can be sealed between the cords and the opening. Further, a shutter guide 7 for maintaining airtightness in the communication portion 7 and for loosening the vertical movement of the shutter member 10
a is provided.

In the embodiment, the shutter member 10 is pulled up, the opening 9 is opened, the device 1 is moved together with the cords 3 from one container to the other container, and then the shutter member is simply closed. Since the cords 3 can be sealed between the opening and the shutter member, the container carrying the device and the cords accompanying it can be kept in a sealed state.

4 and 5 show another embodiment of the present invention, in which the sealed channel 13 is adjacent to the lower sides of the two containers 5 and 6 and the communicating portion 7. Is provided
The channel 13 bypasses the valve mechanism 8 so that the cords 3 can be introduced into the containers 5 and 6 in a sealed state. That is, in the channel 13, the cords 3 are introduced into the channel in a sealed state from the outside of the channel,
The elastic slit 14 made of a flexible rubber material can be introduced into the communicating portion 7 and the containers 5 and 6 in a sealed state from the inside of the channel. The elastic slit 14 enables the cords to slide along the elastic slit and maintain a sealed state when the device 1 is moved between the containers together with the cords 3. Further, the shutter member 10 is directly seated on the elastic slit 14 of the channel 13.

In the embodiment, the shutter member 10 is opened and the device 1 is connected to the cords 3 through the opening of the communication portion 7.
At the same time, when moving from one container to the other container, the cords 3 moved together with the device slide along the elastic slits 14, and the device 1 and the cords 3 are carried into the container. After that, the shutter member 10 is closed.
Since the gap between the cords 3 and the elastic slit 14 is extremely small, the sealed state of the container can be maintained. But if
If it is necessary to maintain the closed container in a high vacuum state, the channel 13 itself can be independently evacuated.

6 and 7 show still another embodiment of the present invention, in which the valve mechanism 8 is provided in the communicating portion 7 as in the embodiment of FIGS. Opening 9;
And a shutter member 10 for closing the opening,
The means for sealing and introducing the cords 3 into the container forms a part of the bottom wall 9c of the opening in which the shutter member is seated,
In addition, a head 16 that can project and rotate is included in the opening 9. The head 16 is preferably made of rubber material,
The cords 3 can be introduced from the outside of the communication section 7 through the head 16 into the communication section in a sealed state. The head 16 includes a shaft portion 16a rotatably and vertically movably supported in the opening 7b of the communication portion 7, and when the shutter member 10 is closed, the head 16 is engaged with the entrance of the opening 7b to seal the opening. Stop.

In this embodiment, first, the shutter member 10 is pulled up to open the opening 9, and the device 1 together with the cords 3 is moved from one container to the other container through the opening 9 of the communicating portion by the slider. Move to. Subsequently, the head 16 for holding the cords is projected into the opening 9 as shown by a broken line in the drawing, and the head is rotated so that the cords 3 are directed to the container side into which the equipment is carried. After that, head 16
Is returned to the original position so as to form a part of the bottom wall 9c of the opening as shown by the solid line in the figure, and the shutter member 10 is further seated in the opening including the head, whereby the device 1 and the cords 3 It is possible to close the container into which the container has been loaded.

8 and 9 show still another embodiment of the present invention, which is the same as the valve mechanism 8 described above.
Has an opening 19 formed in a partition wall 18 for partitioning the two containers 5 and 6, and a shutter member 20 for closing the opening.
The shutter member 20 is composed of a main member 21 and an auxiliary member 22 which are hermetically combined with each other in a nested manner. The main member 21 is guided forwards and backwards to the position of the opening 19 by a guide (not shown), while the auxiliary member 22
The guide 23 is guided forward and backward to the position of the opening 19 by the guide 23 and is rotated in a plane orthogonal to the forward and backward directions. The auxiliary member 22 is configured to introduce the cords from the outside of the containers 5, 6 through the auxiliary member 22 into the container in an airtight manner.

Ring-shaped sealing materials 23a and 23b are provided on both side surfaces of the main member 21 and the auxiliary member 22 so that the opening 19 can be hermetically sealed when both members are combined. The cords 3 are introduced from the auxiliary member 22 into the containers 5 and 6 through the inside of the ring-shaped seal 23. The main member 21 and the auxiliary member 22 are separated from each other by the pressing means (not shown).
Is pressed against.

In this embodiment, first, the main member 21 and the auxiliary member 22 of the shutter member 20 are retracted from the openings 19 so as to be separated from each other, and then the device 1 and the cords 3 mounted on the slider are removed. The one container is carried into the other container through the opening 19. Next, the auxiliary member 22 for holding the cords 3 is advanced to the position of the opening 19, and the auxiliary member 22 is rotated so that the cords are directed to the container side into which the device is carried. After that, the main member 21 and the auxiliary member 22 are again combined at the position of the opening portion 19 and the opening portion is closed, so that the container can be closed.

FIG. 10 shows still another embodiment of the present invention. In this embodiment, a pair of valve mechanisms 8a and 8b are provided separately from the communicating portion 7, and the cords 3 are attached. A sealing means 25 is introduced from the outside of the communication section 7 to the inside between the pair of valve mechanisms 8a and 8b. The pair of valve mechanisms 8a and 8b are capable of airtightly blocking the opening of the communication portion 7.

In this embodiment, both valve mechanisms 8a and 8a
After opening b, the device 1 is moved together with the cords 3 from the one container to the other container through the communication part 7, and then, in the pair of shutter members 8a and 8b, the closed container into which the device is carried By closing the valve mechanism on the opposite side, the container into which the device 1 has been loaded can be sealed.

11 to 13 show another embodiment of the present invention, in which the cords 3 are introduced into the closed containers 5 and 6 by bypassing the valve mechanism 8. The cylinder 27 is provided adjacent to the two closed containers 5 and 6 and below the communication part 7. An elastic slit 28 made of a soft rubber material is provided between the cylinder 27 and the communication portion 7, and the cords 3 are introduced from the cylinder 27 into the communication portion 7 in a sealed state through the elastic slit 28. Has become. A hollow rod 29 is movably provided in the cylinder 27, the cords 3 are hermetically sealed in the rod 29, and a pair of ring-shaped rubber seals 30 and 31 that slide in the cylinder are provided. As a result, the cords 3 are provided with a pair of rubber seals 3 from the outside of the cylinder 27.
It is introduced airtight between 0 and 31. The pair of rubber seals 30 and 31 cooperate with the shutter member to hermetically seal the elastic slit 28 when the rubber seals 30 and 31 are moved below the shutter member 10. Therefore, it is preferable to cover the surface of the shutter member with the rubber material 10b.

In this embodiment, the shutter member 10 is pulled up to open the opening of the communication part 7, and the device 1 is connected to the cords 3 and the like.
With one container through the opening of the communication part to the other container. Simultaneously with or after the movement of the device 1, the rod 29 is moved in the movement direction of the device,
Thereby, the cords 3 are moved along the elastic slit 28, and one of the rubber seals 30 and 31 is moved to the shutter member 1.
Move it to just below 0. Then, the shutter member 10 is seated on the elastic slit 28. At this time, the shutter member 10 cooperates with one of the rubber seals 30 and 31 on the rod to seal the elastic slit. As a result, the cords 3 are introduced from the cylinder 27 through the elastic slits 28 into the communicating portion 7 in a substantially sealed state, and are further introduced into the container into which the device 1 is carried. Although the elastic slit 28 is exaggerated in the drawing, it is actually in a substantially sealed state. If it is necessary to maintain a high degree of vacuum inside the closed container, the inside of the cylinder can be evacuated.

FIG. 14 shows still another embodiment of the present invention. In this embodiment, as in the previous embodiment, the device 1 provided with the cords 3 is provided with two hermetically sealed containers 5, 5. When moving between 6, the two closed containers are connected by a communication part 7 and the communication part is blocked by a valve mechanism 8, and the device 1 is moved between the containers along a guide 4 by a slider 2.

However, in this embodiment, the cords 3 are installed in each closed container, and the cords 3 are attached to the adapter 33.
It can be easily and detachably connected to the device 1 via the.

When the device is moved, the cords 3 are removed from the device 1 and only the device is moved. When the device is carried into another closed container, the device is installed in another closed container. Class 3 is connected. Therefore, the cords 3 do not hinder the opening and closing of the valve mechanism 8 at all, and can hold the container carrying the device 1 in a sealed state.

[0043]

As described above, according to the present invention, it is possible to maintain the hermetically sealed state of a device equipped with drive / control cords even when the device is used by moving between hermetically sealed containers having different atmospheres. A delivery device can be provided. This allows
Mobile devices and operating devices can be easily moved between airtight containers with different atmospheres, and the same mobile device or operating device can be installed in each container as before, or between these mobile devices and operating devices. Since it is not necessary to transfer the sample, not only the mechanism and operation can be simplified, but also the mobile device and the operating device can be easily positioned with respect to the sample, which enables highly accurate processing and analysis.

[Brief description of drawings]

FIG. 1 is a schematic side sectional view showing an embodiment of the present invention.

FIG. 2 is an enlarged front sectional view showing the valve mechanism of the embodiment of FIG.

3 is a cross-sectional view taken along the line AA of FIG.

FIG. 4 is a schematic side sectional view showing another embodiment of the present invention.

5 is an enlarged perspective view showing a relationship between channels and shutter members in the embodiment of FIG. 4 with a communication part omitted.

FIG. 6 is a front sectional view showing a relationship between a shutter member and a head according to still another embodiment of the present invention.

7 is a side sectional view showing the relationship between the shutter member and the head of FIG.

FIG. 8 is a perspective view of a shutter member showing still another embodiment of the present invention.

9 is a side sectional view of a main part of the embodiment of FIG.

FIG. 10 is a schematic side sectional view showing still another embodiment of the present invention.

FIG. 11 is a schematic side sectional view showing still another embodiment of the present invention.

FIG. 12 is an enlarged perspective view showing the relationship between the shutter member and the elastic slit in the embodiment of FIG. 11 with the communication part omitted.

FIG. 13 is an enlarged perspective view showing the cylinder of FIG. 11.

FIG. 14 is a schematic side sectional view showing still another embodiment of the present invention.

FIG. 15 is a schematic side sectional view showing an example of a conventional transfer device.

[Explanation of symbols]

 1 ------------- Device 2 ------- Slider 3 --------- Cords 4 --------- Guide 5,6 -------- Airtight container 7- ----- Communication part 8, 8a, 8b -------- Valve mechanism 9 ------- Opening part 10,20 -------- Shutter member 12 -------- Rubber material 13 ----- Channel 14, 28 ----- Elastic slit 16 ----- Head 21 ----- Main member 22 ----- Auxiliary member 27 ----- Cylinder 29- ----- Rod 33 ----- Adapter

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Chusuke Obata 4-2-1 Motofujisawa, Fujisawa City, Kanagawa Prefecture EBARA Research Institute Ltd. (72) Inventor Masaaki Kajiyama 11-1 Haneda-cho, Ota-ku, Tokyo No. 11 EBARA CORPORATION (72) Inventor Takashi Tsuzuki 11-11 Haneda Asahi-cho, Ota-ku, Tokyo Inside EBARA CORPORATION (72) Masayuki Nakao 11-11 Haneda-Asahi-cho, Ota-ku, Tokyo EBARA CORPORATION In-house (72) Inventor Yotaro Hatamura 2-12-11 Kohinata, Bunkyo-ku, Tokyo

Claims (11)

[Claims] 1. When carrying a device equipped with cords between two hermetically-sealed containers for use, the two hermetically-sealed containers are connected by a communication section, and the communication section is shut off by a valve mechanism. A device mounting means that mounts a device equipped with cords and moves between containers via the communication part, a guide that guides the movement of the device mounting means, and a sealed state of the cords in a selected container. A transporting device, comprising: a cord introducing means that can be switched and introduced by. 2. The valve mechanism includes an opening portion provided in a communication portion and a shutter member that closes the opening portion, and the cords introducing means is attached to a peripheral portion of the shutter member to attach the cords. The transfer device according to claim 1, comprising an elastic member that is hermetically held between the opening and the peripheral wall. 3. The valve mechanism includes an opening provided in the communication section, and a shutter member closing the opening, and the cords introducing means is provided adjacent to the communication section and in the communication section. 2. The transfer device according to claim 1, further comprising a closed channel communicating with each other through an elastic slit, wherein the channel can introduce the cords from the outside of the channel into the communication section and the container through the elastic slit. . 4. The valve mechanism comprises an opening provided in the communication part and a shutter member closing the opening.
The cords introducing means includes a head which forms a part of a peripheral wall of the opening on which the shutter member is seated, and which is capable of projecting and rotating in the opening, the head including the cords from the outside of the communicating portion. The delivery device according to claim 1, wherein the delivery device is configured to be introduced into the communication section and the container in a hermetically sealed state through the passage. 5. The valve mechanism comprises an opening formed in a partition wall for partitioning between two containers and a shutter member closing the opening, and the shutter member is a main member that is nested in each other. And an auxiliary member,
The main member is guided forwards and backwards to the opening position, the auxiliary member is forwards and backwards guided to the opening position, and is rotatable in a plane orthogonal to the forward and backward directions, and the auxiliary member holds the cords from the outside of the container. The transfer device according to claim 1, wherein the auxiliary member is configured to be introduced into the container in a sealed manner through the auxiliary member, and the auxiliary member constitutes the cords introducing means. 6. The main member and the auxiliary member include a ring-shaped sealing member that hermetically seals around the opening when they are combined in a nested manner, and further divides the main member and the auxiliary member by the partition. The delivery device according to claim 5, further comprising means for pressing against the wall. 7. The valve mechanism is provided in a pair so as to be spaced apart from each other in a communicating portion, each valve mechanism includes an opening provided in the communicating portion and a shutter member, and the cords are provided between the pair of valve mechanisms. The pair of valve mechanisms are introduced in a sealed state from the outside of the communication part, and the pair of valve mechanisms closes the shutter member of the valve mechanism on the opposite side to the container into which the device equipped with the cords is loaded, thereby closing the container into which the device is loaded. The transfer device according to claim 1, wherein the transfer device is hermetically sealed, and the pair of valve mechanisms constitutes the cords introducing means. 8. The valve mechanism includes an opening provided in the communication section and a shutter member for closing the opening, and the cords introducing means is provided adjacent to the communication section and in the communication section. It includes a closed cylinder communicating through an elastic slit, and the cylinder includes a moving member for sealingly introducing the cords from the outside of the cylinder to the inside and moving the cords along the elastic slit, 2. The transfer device according to claim 1, wherein the moving member includes a blocking unit that cooperates with a shutter member to seal the slit. 9. The moving member comprises a hollow rod,
9. The transfer device according to claim 8, wherein the cords are introduced into the cylinder from the outside of the cylinder through the inside of the rod in a sealed manner. 10. The transfer device according to claim 8, wherein the blocking portion is a pair of elastic rings provided on the rod and spaced from each other. 11. When carrying a device equipped with cords between two hermetically-sealed containers for use, the two hermetically-sealed containers are connected by a communication section and the communication section is shut off by a valve mechanism,
A device mounting means for mounting the device and moving between the containers via a communication part, and a guide for guiding the movement of the device mounting means are provided, and the cords are installed in each of the containers, and the cords are installed. A transporting device, which is configured to be detachably connectable to the device.