JPH08124112A - Magnetic head and its production - Google Patents

Abstract

PURPOSE: To obtain a magnetic head having excellent wear resistance and small coefft. of friction by forming a chromium boride film on a sliding surface of a magnetic head substrate with a magnetic recording medium. CONSTITUTION: The chromium boride film S1 having a film thickness of 300Å is formed on the outer side furthest from the substrate S and a layer mixture S2 composed of the substrate S and the film S1 is formed at the boundary between both according thereto. The ratio of the vapor deposition rate of Cr and B on the substrate S is so controlled as to attain Cr:B=1:2 to form the chromium boride film S1 as the film consisting of CrB2 . The ratio of the total sum of the quantity of irradiation with Ar ions and the vapor deposition, of the Cr and B is so controlled as to attain the quantity of irradiation with Ar ions: the vapor deposition quantity =1:2. The magnetic head having the surface for sliding with magnetic recording media which has excellent wear resistance, the small coefft. of friction and the excellent corrosion resistance even in diversified environments is thereby obtd.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head for storing, reproducing and erasing magnetic recording information by sliding on a magnetic recording medium such as a magnetic tape, a floppy disk, a hard disk and the like, and a method for manufacturing the same.

[0002]

2. Description of the Related Art A core portion which is a main part of a conventional magnetic head is shown in FIG. The core portion 1 of the magnetic head has a substantially U-shaped core 11 made of a magnetic material, and a write coil 12 and a read coil 13 are wound around both legs of the core 11, respectively. Also, in the air gap of the core 11,
A non-magnetic spacer 14 is provided. Further, usually, the core portions 1 of a plurality of magnetic heads are close to each other and housed in a shield case (not shown). Further, when the core portion 1 is housed in the shield case, the gap between the two is filled with a filler such as resin.

Such a magnetic head stores, reproduces, and erases magnetic recording information by sliding on a magnetic tape on a sliding surface extending over a core, a spacer, a shield case, a filler, and the like. Therefore, the sliding surface of the magnetic head with respect to the magnetic recording medium is required to have abrasion resistance and a low coefficient of friction sufficient to withstand sliding with the magnetic recording medium, and in a severe environment such as high temperature and high humidity. It is required to be chemically stable enough to exert its function without denaturing even under the temperature. However, conventionally, no treatment is performed on the sliding surface of the magnetic head with respect to the magnetic recording medium, and the magnetic core and other non-magnetic parts slide on the magnetic recording medium as they are. As a result, the sliding surface was easily worn or the magnetic core was modified so that the electromagnetic conversion characteristics were easily deteriorated.

Therefore, in order to improve the above-mentioned required characteristics, it has been proposed to coat the sliding surface of the magnetic head with the magnetic recording medium with a film made of a material having excellent sliding resistance and corrosion resistance. There is. For example, JP-A-62-275308
According to the publication, by forming a boron nitride film on the sliding surface of the magnetic head with respect to the magnetic recording medium, it is possible to reduce the wear coefficient between the magnetic head and the magnetic recording medium and at the same time to prevent moisture and the like. It is disclosed that the corrosion resistance of the magnetic material with respect to the environment can be improved.

Further, according to, for example, Japanese Patent Laid-Open No. 63-263618, boron, silicon, carbon tetraboride, silicon carbide, carbon, rhodium, platinum, and 2 oxide are formed on the sliding surface of the magnetic head with respect to the magnetic recording medium. Zirconium, alumina,
By forming a film made of at least one of substances made of silicon dioxide, boron nitride, titanium carbide, and tungsten carbide, the resistance of the magnetic head can be increased without increasing the space between the magnetic head and the magnetic recording medium. It is disclosed that slidability and corrosion resistance can be improved.

[0006]

However, in the magnetic head according to Japanese Patent Laid-Open No. 62-275308, since boron nitride is an insulating material, the boron nitride film formed on the surface of the magnetic head and the magnetic recording medium are separated from each other. Static electricity generated by sliding is accumulated on the film, which becomes noise when information is stored and reproduced.

Further, in the magnetic head according to Japanese Patent Laid-Open No. 63-263618, since the film made of zirconium dioxide, alumina, silicon dioxide, and boron nitride is an insulating film, the magnetic film covered with these films is used. The head has the same drawbacks as the magnetic head disclosed in JP-A-62-275308, and a film made of boron, silicon, or carbon is easily oxidized by frictional heat generated by sliding between the film and the magnetic recording tape. It deteriorates and cannot function sufficiently as a protective film for the magnetic head. In addition, since the film made of carbon tetraboride, silicon carbide, titanium carbide, and tungsten carbide is inferior in toughness, the film is likely to be cracked when sliding on the magnetic recording medium, and as a result, the corrosion resistance of the magnetic head is improved. Cannot be fully functioned as a protective film of. Further, since the film made of rhodium and platinum is relatively soft, the magnetic head covered with these films cannot obtain sufficient wear resistance.

Therefore, the present invention is to provide a magnetic head whose sliding surface with respect to a magnetic recording medium is excellent in wear resistance, has a small friction coefficient, and is excellent in corrosion resistance even under various environments, and a manufacturing method thereof. And

[0009]

In order to solve the above-mentioned problems, the present invention provides a magnetic head characterized in that a chromium boride film is formed on a sliding surface of a magnetic head substrate with a magnetic recording medium. provide. The magnetic head of the present invention is used as a component of a device such as a cassette tape recorder device, a VTR device, an FDD device, an HDD device, and a card reader, and its use is not particularly limited.

Further, the base body of the magnetic head of the present invention slides on the magnetic recording medium on the sliding surface including the magnetic core portion and the other non-magnetic portion. As the material of the body core portion, a metal such as ferrite, permalloy, sendust, or the like can be used, and as the material of the non-magnetic body portion, various resins or ceramics can be used.

It is considered that the thickness of the chromium boride film in the magnetic head of the present invention is about 30 to 50000Å. If it is less than 30Å, the function of the film as a protective film is not sufficient, and if it is more than 50000Å, the electromagnetic conversion characteristics of the magnetic head deteriorate. As chromium boride contained in the chromium boride film, 1 chromium boride (CrB), 1 chromium boride (CrB ₂ ), 2 chromium boride (Cr ₂ B), 4 boride Chrome (Cr ₃
B ₄ ), 3 borides of 2 chromium (Cr ₂ B ₃ ), 4 borides of 1
Chromium (CrB ₄ ), 3 chromium boride (Cr ₅ B ₃ )
And the like, and one or more of these are included.

Further, it is conceivable that the magnetic head of the present invention has a layer in which nitrogen ions are implanted in the interface portion with the chromium boride film of the magnetic head substrate. As a result, the wear resistance and corrosion resistance of the sliding surface of the magnetic head substrate itself on the recording medium can be further improved. Further, in order to solve the above-mentioned problems, the present invention provides vapor deposition of chromium and boron on a sliding surface of a magnetic head substrate with a magnetic recording medium, at the same time, alternately, or after the vapor deposition, by depositing an inert gas ion. Provided is a method of manufacturing a magnetic head, which comprises irradiating a surface to form a chromium boride film.

As described above, when the film-forming atoms of chromium (Cr) and boron (B) are vapor-deposited on the magnetic head substrate, at the same time, alternately, or after the vapor deposition, the substrate is irradiated with an inert gas ion. The irradiated ions collide with the chromium boride film-constituting atoms, the film-constituting atoms recoil and are pushed into the substrate, and the substrate-constituting atoms recoil and are repelled from the substrate. A mixed layer composed of the constituent atoms of the both is formed at the interface. Thereby, the adhesion of the chromium boride film becomes excellent.

In the method of manufacturing a magnetic head of the present invention, the vapor deposition of Cr or B on a substrate is performed by a vacuum vapor deposition method in which a Cr element-containing substance or a B element-containing substance is vapor-deposited by an electron beam, a laser, high frequency, or the like. It is carried out by a sputter deposition method in which the contained substance or the B element-containing substance is sputtered by an ion beam, a magnetron, a high frequency or the like. Examples of the chromium element-containing substance include Cr compounds, such as Cr compounds such as Cr nitrides and Cr borides, and one or more of these are used.

Examples of the B element-containing substance include B compounds, for example, B compounds such as boron oxide, boron nitride, boron carbide, boron sulfide, phosphorus boride, hydrogen boride, and various metal borides. , And one or more of these are used. Further, as the inert gas ions used in the method of manufacturing the magnetic head of the present invention,
Helium (He) gas ion, neon (Ne) gas ion, argon (Ar) gas ion, krypton (Kr)
Examples thereof include gas ions and xenon (Xe) gas ions, and one or more of them are used.

The ion acceleration energy during ion irradiation is
It is considered that the value is not less than 0.05 keV and not more than 20 keV. If it is less than 0.05 keV, the thickness of the mixed layer becomes small, and the adhesion of the formed chromium boride film to the magnetic head substrate is insufficient. If it is more than 20 keV, the heat damage to the substrate becomes excessive. . Further, in the method of manufacturing a magnetic head of the present invention, prior to the formation of the chromium boride film on the magnetic head substrate, the sliding surface of the substrate with the magnetic recording medium is irradiated with nitrogen ions, whereby It is conceivable to form a layer in which nitrogen ions are implanted at the interface with the chromium boride film.

In the above nitrogen ion irradiation, nitrogen (N ₂ ) gas, ammonia (NH ₃ ) gas, etc. can be considered as the source gas for generating nitrogen ions. The ion acceleration energy during nitrogen ion irradiation is 0.05 ke.
It is considered that the voltage is V or more and 20 keV or less. 0.0
If it is less than 5 keV, the thickness of the nitrogen ion-implanted layer becomes small, and a sufficient effect due to nitrogen ion implantation cannot be obtained.
If it is higher than 20 keV, the heat damage to the magnetic head substrate will be excessive.

The irradiation amount of nitrogen ions per unit area of the magnetic head substrate is 1 × 10 ¹⁴ pieces / cm ² or more and 1 × 1.
It is considered that the number is 0 ¹⁸ pieces / cm ² or less, and it is 1 × 10 ¹⁴
If the number is less than 1 / cm ² , the sufficient effect of nitrogen ion implantation cannot be obtained, and if it is greater than 1 × 10 ¹⁸ / cm ² ,
The thermal damage to the magnetic head substrate becomes excessive. The ion irradiation amount can be controlled by monitoring the ion irradiation amount on the substrate using an ion current measuring device such as a Faraday cup.

In the method of manufacturing a magnetic head of the present invention,
The control of the ratio of the number of Cr atoms and the number of B atoms of the chromium boride molecule in the formed film is controlled by the ratio of the number of Cr atoms and the number of B atoms reaching the substrate (Cr / B transport ratio) and the acceleration of irradiation ions. This is done by appropriately combining conditions such as energy. Cr
The / B transport ratio can be controlled by monitoring the vapor deposition amounts of chromium and boron on the substrate using a film thickness monitor such as a crystal oscillator film thickness monitor.

The ion incident angle on the magnetic head substrate during ion irradiation in forming the chromium boride film and forming the nitrogen ion-implanted layer is not particularly limited, and the film may be formed while rotating the substrate. The method of the ion source is not particularly limited, and for example, Kauffman type, bucket type, etc. are conceivable. Further, for a substrate for which thermal damage must be sufficiently avoided, it is preferable to cool the substrate by cooling the substrate holder to form the chromium boride film and the nitrogen ion implantation layer.

[0021]

According to the magnetic head of the present invention, the chromium boride film is formed on the sliding surface of the magnetic head substrate with respect to the magnetic recording medium. Chromium boride film has a small friction coefficient,
Sliding with the magnetic recording medium is performed smoothly, and excessive frictional heat is not generated to damage the sliding surfaces of the magnetic head and the recording medium. In addition, since chromium boride has high hardness and good toughness, cracks are less likely to occur in the film when sliding on a recording medium, which makes the surface of the magnetic head substrate on which the chromium boride film is formed resistant to wear. Excellent in. Further, since chromium boride has excellent chemical stability, the surface on which the chromium boride film is formed is not easily modified even under various environments, and has excellent corrosion resistance.

When the magnetic head substrate has a layer in which nitrogen ions are implanted at the interface with the chromium boride film, the substrate itself has excellent hardness and chemical stability. Since the chromium boride film having excellent wear resistance and corrosion resistance is formed on the surface, the wear resistance and the corrosion resistance are further improved as a whole. According to the method of manufacturing the magnetic head of the present invention, the chromium boride film is formed on the sliding surface of the magnetic head substrate with respect to the magnetic recording medium. As a result, the irradiated ions collide with the Cr atoms and B atoms that are the film-constituting atoms, the atoms recoil and are pushed into the substrate, and the substrate-constituting atoms are repelled from the substrate, and the film and the substrate. A mixed layer composed of the constituent atoms of the both is formed at the interface with. As a result, the adhesion of the chromium boride film having high hardness and excellent toughness and chemical stability to the substrate is improved, and the magnetic head covered with the film has excellent wear resistance, a small friction coefficient, and corrosion resistance. It will be excellent. Further, since the film formation can be performed at a relatively low temperature, the heat damage to the magnetic head substrate is small.

Prior to the formation of the chromium boride film,
When a layer in which nitrogen ions are implanted is formed in the interface portion of the substrate with the chromium boride film by irradiating the surface of the magnetic head substrate sliding with the recording medium with nitrogen ions, The hardness and chemical stability of the sliding surface of the substrate itself with respect to the recording medium are improved, and therefore the wear resistance and the corrosion resistance are further improved as a whole.

[0024]

Embodiments of the present invention will be described below with reference to the drawings. 1 is an enlarged sectional view of a part of an example of a first magnetic head of the present invention, and FIG. 2 is an enlarged sectional view of a part of an example of a second magnetic head of the present invention. FIG. 3 shows a schematic structure of a film forming apparatus used for manufacturing the magnetic head shown in FIGS.

The apparatus shown in FIG. 3 has a vacuum container 4, in which a holder 5 for supporting a substrate S of a magnetic head is installed, and a Cr element-containing substance is evaporated at a position facing the holder 5. An evaporation source 61 for evaporating, an evaporation source 62 for evaporating a B element-containing substance, and an ion source 7 are installed. Further, in the vicinity of the holder 5, a film thickness monitor 81 for measuring the number of B atoms deposited on the substrate S, and B deposited on the substrate S.
A film thickness monitor 82 for measuring the number of atoms and an ion current measuring device 9 for measuring the number of ions irradiated on the substrate S are installed. Further, the inside of the container 4 can be made to have a desired vacuum degree by the exhaust device 41. Film thickness monitor 81, 8
2 is a crystal oscillator type film thickness monitor here, and the ion current measuring device 9 is a Faraday cup here.

In producing the first magnetic head according to the present invention, first, the holder 5 is arranged so that the sliding surface of the substrate S with respect to the magnetic recording medium faces the evaporation sources 61, 62 and the ion source 7. Then, the inside of the vacuum container 4 is brought to a predetermined vacuum degree. Thereafter, the evaporation source 61 is used for the substrate S to vacuum-deposit or sputter-deposit the Cr element-containing substance 61a, and the evaporation source 62 is similarly used to similarly vacuum-deposit or sputter-deposit the B element-containing substance 62a.

Simultaneously with, or alternately with, or after the vacuum vapor deposition (or sputter vapor deposition) of the Cr element-containing substance 61a and the B element-containing substance 62a, the vapor deposition surface is irradiated with the inert gas ions 7a from the ion source 7. The ion acceleration energy during irradiation of the ions 7a is set to 0.05 keV or more and 20 keV or less. The ratio of the number of Cr atoms to the number of B atoms of the chromium boride molecules in the chromium boride film S1 is controlled by appropriately combining the conditions of Cr / B transport ratio and the acceleration energy of the ions 7a. The Cr / B transport ratio is controlled by monitoring the vapor deposition amounts of chromium 61a and boron 62b on the substrate S using the film thickness monitors 81 and 82.

By the film forming operation described above, as shown in FIG. 1, the chromium boride film S1 is formed on the outermost side from the magnetic head substrate S, and the substrate S and the chromium boride film S1 are formed.
The first aspect of the present invention in which the mixed layer S2 of the both is formed at the interface of
The magnetic head of In the first magnetic head of the present invention, the chromium boride film S1 has a low friction coefficient, high hardness, and excellent toughness and chemical stability. Further, since the mixed layer S2 composed of the constituent atoms of the two is formed at the interface between the substrate S and the chromium boride film S1, the adhesion of the film S1 to the substrate S becomes good. From these facts, the first magnetic head of the present invention has a low friction coefficient and is excellent in wear resistance and corrosion resistance. Further, according to the method described above, the film formation can be performed at a relatively low temperature, so that the heat damage to the substrate S can be reduced.

Further, in producing the second magnetic head of the present invention, first, the substrate S is supported by the holder 5, and then the inside of the vacuum container 4 is brought to a predetermined vacuum degree. Next, the substrate S is irradiated with nitrogen ions 7b from the ion source 7. In this way, the nitrogen ion-implanted layer S3 is formed on the surface portion of the substrate S as shown in FIG. After that, the evaporation source 61 is used for the substrate S, the Cr element-containing substance 61a is vacuum-deposited or sputter-deposited, and the evaporation source 62 is used in the same manner as when the first magnetic head of the present invention is formed. The B element-containing substance 62a is vacuum-deposited or sputter-deposited. Simultaneously with, or alternately with, or after vapor deposition of the Cr element-containing substance 61a and the B element-containing substance 62a, the vapor deposition surface is irradiated with the inert gas ions 7a from the ion source 7.
The ion acceleration energy during irradiation of nitrogen ions 7b is 0.05.
It is set to not less than keV and not more than 20 keV. Also nitrogen ion 7b
The irradiation dose is 1 × 10 ¹⁴ pieces / cm ² or more 1 × 10 ¹⁸ pieces / c
m ² or less. The control of the dose of ions 7b is performed by monitoring the dose of ions applied to the substrate S using the ion current measuring device 9.

By the film forming operation described above, as shown in FIG. 2, the nitrogen ion implantation layer S3 is formed on the surface portion of the magnetic head substrate S, and the chromium boride film S1 is formed on the outermost side from the substrate S. A second magnetic head according to the present invention is obtained in which a mixed layer S4 of the nitrogen ion-implanted layer S3 and the chromium boride film S1 is formed at the interface. In the second magnetic head of the present invention, since the nitrogen ion implantation layer S3 is formed on the surface portion of the substrate S, the hardness and chemical stability of the substrate S itself are improved, and the wear resistance of the entire magnetic head is improved. And the corrosion resistance is further improved.

Next, a specific example of manufacturing the magnetic head of the present invention by the apparatus shown in FIG. 3 and a magnetic head obtained thereby will be described. Experimental Example 1 Manganese (Mn) -zinc (Z
n) A magnetic head substrate S for a VTR in which a magnetic core portion made of ferrite and a non-magnetic material portion made of glass are exposed is placed on a substrate holder 5, and the inside of the vacuum container 1 is set to 5 × 10.
^The degree of vacuum was ⁻⁷ Torr. Then, for the substrate S, C
The r pellet 61a is vapor-deposited using the electron beam evaporation source 61, and the B pellet 62a is evaporated.
2 was used for vapor deposition. At the same time, Ar is applied to the ion source 7.
Gas is introduced until the inside of the container 4 reaches 5 × 10 ⁻⁵ Torr, ionized, and the Ar ions 7a are irradiated onto the substrate S at an angle of 0 ° with respect to the normal line to the substrate S at an acceleration energy of 0.5 keV. Then, a film thickness of 300 is formed on the outermost side from the substrate S.
A Å chromium boride film S1 is formed, and along with this, the substrate S
A mixed layer S2 of the two was formed at the interface between the film and the film S1.

The deposition amount of Cr and B on the substrate S
Control so that the ratio becomes Cr: B = 1: 2, and chromium boride is used.
Membrane S1 is CrB₂The film was made of. Also, Ar ion
The ratio of the irradiation amount to the total amount of Cr and B deposited is determined by ion irradiation.
Amount: evaporation amount = 1: 2 was controlled. Experimental Example 2 In Experimental Example 1, magnetic recording was performed as the magnetic head substrate S.
The magnetic core made of Permalloy and the sliding surface with the medium
And a magnetic head for audio with a non-magnetic part made of resin exposed
Other conditions are the same as in Experimental Example 1
CrB with a film thickness of 500Å on the outermost side from S₂Empty
A chromium boride film S1 is formed, and along with this, the substrate S and the film are formed.
A mixed layer S2 of the both was formed at the interface with S1. Experimental Example 3 A magnetic head substrate S for VTR similar to that in Experimental Example 1 was used as a substrate substrate.
Installed on the Ruda 5 and the inside of the container 1 is 5 × 10^-7True of Torr
It was vacant. Next, nitrogen (N₂) Gas
5 × 10 inside the container 4^-FiveIntroduce ion until it becomes Torr
The nitrogen ion 7b at an acceleration energy of 1 keV,
Irradiate the substrate S at an angle of 0 ° with respect to the normal line to the substrate S.
Was. In this way, the nitrogen ion-implanted layer is formed on the surface of the substrate S.
S3 was formed. In addition, nitrogen ions per unit area 7
The dose of b is 1 × 10¹⁶Pieces / cm ²And

Then, in the same manner as in Experimental Example 1, a chromium boride film S1 made of CrB ₂ having a film thickness of 300 Å is formed on the outermost side from the substrate S, and the interface between the nitrogen ion-implanted layer S3 and the film S1 is accordingly formed. Then, a mixed layer S4 of the both was formed. Next, using the magnetic head according to Experimental Example 1 and the magnetic head substrate S not coated with the chromium boride film, 500 tapes for VTR coated with a film made of an alloy of gamma iron oxide, cobalt iron oxide and chromium dioxide were used. I ran for hours. After that, when the amount of wear of the sliding surface between the both VTR tapes was measured, it was found that the magnetic head according to Experimental Example 1 was not substantially worn, whereas the magnetic head not coated with a chromium boride film was used. The substrate S was worn by a thickness of 15 μm. Further, the magnetic head according to Experimental Example 1 is a VTR.
No adhesion of the constituent materials of the tape was observed after running the tape. The tape was run in an environment of a temperature of 25 ° C. and a humidity of 60%.

Next, using the magnetic head according to Experimental Example 2 and the magnetic head substrate S not covered with the chromium boride film,
A cassette tape coated with a film made of gamma iron oxide was run for 500 hours. After that, when the amount of wear of the sliding surface between the both cassette tapes was measured, it was found that the magnetic head of Experimental Example 2 was not substantially worn.
The magnetic head substrate S not covered with the chromium boride film was worn by a thickness of 20 μm. Further, in the magnetic head according to Experimental Example 2, no adhesion of constituent materials of the tape was observed after running the cassette tape. The temperature of tape running is 2
It was performed in an environment of 5 ° C. and a humidity of 60%.

Next, using the magnetic heads of Experimental Examples 1 and 3, 100 VTR tapes coated with a film made of an alloy of gamma iron oxide, cobalt iron oxide and chromium dioxide were used.
I ran for 0 hours. After that, when the amount of friction of the sliding surface between the both tapes was measured, the magnetic head according to Experimental Example 1 was worn by a thickness of 150 Å (0.015 μm), whereas the magnetic head according to Experimental Example 3 was worn. Then 100Å
It was worn out by a thickness of (0.01 μm). Further, in the magnetic heads of Experimental Examples 1 and 3, no adhesion of the tape constituent substances was observed after running the VTR tape. The tape was run in an environment of a temperature of 25 ° C. and a humidity of 60%.

As a result of the above, in the first and second magnetic heads of the present invention, since the chromium boride film S1 having high hardness and excellent toughness is coated on the substrate S with good adhesion,
It can be seen that the wear resistance is improved as compared with. Also,
It can be seen that the surface of the chromium boride film S1 maintains the function as a protective film without denaturation even under an environment of relatively high humidity and is excellent in corrosion resistance. Further, no adhesion of the tape-constituting substance was observed on the surface of the chromium boride film S1 after running the tape, indicating that the friction coefficient was low.

The second magnetic head of the present invention has the nitrogen ion-implanted layer S3 formed on the sliding surface of the magnetic head substrate S itself with the tape, so that the second magnetic head has more wear resistance than the first magnetic head. You can see that it is improving.

[0038]

According to the present invention, there is provided a magnetic head whose sliding surface with respect to a magnetic recording medium has excellent wear resistance, a small friction coefficient, and excellent corrosion resistance even under various environments, and a method for manufacturing the same. You can

[Brief description of drawings]

FIG. 1 is an enlarged sectional view of a part of a magnetic head according to an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view of a part of a magnetic head according to another embodiment of the present invention.

FIG. 3 is a diagram showing a schematic configuration of a film forming apparatus used for manufacturing the magnetic head shown in FIGS.

FIG. 4 is a diagram showing an outline of a main part of a conventional magnetic head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Core part of magnetic head 11 Core 12 Writing coil 13 Reading coil 14 Nonmagnetic spacer 4 Vacuum container 41 Exhaust device 5 Substrate holder 61,62 Evaporation source 61a, 62a Evaporation substance 7 Ion source 7a, 7b Ion 8a, 8b Film thickness monitor 9 Ion current measuring device S Magnetic head substrate S1 Chromium boride film S2, S4 Mixed layer S3 Nitrogen ion implantation layer in magnetic head S

Claims (4)

[Claims] 1. A magnetic head comprising a chromium boride film formed on a sliding surface of a magnetic head substrate with respect to a magnetic recording medium. 2. The magnetic head according to claim 1, wherein a nitrogen ion-implanted layer is provided in an interface portion of the magnetic head substrate with the chromium boride film. 3. Chromium and boron are vapor-deposited on the sliding surface of the magnetic head substrate with respect to the magnetic recording medium, at the same time, alternately or after the vapor deposition, inert gas ions are irradiated onto the vapor-deposited surface to form boride. A method of manufacturing a magnetic head, which comprises forming a chromium film. 4. Prior to forming a chromium boride film on the magnetic head substrate, the surface of the substrate sliding with the magnetic recording medium is irradiated with nitrogen ions to form a chromium boride film on the substrate. 4. The method of manufacturing a magnetic head according to claim 3, wherein a layer in which nitrogen ions are implanted is formed at an interface portion of the magnetic head.