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JPH08115505A - Magnetic head - Google Patents

Magnetic head

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Publication number
JPH08115505A
JPH08115505A JP24900594A JP24900594A JPH08115505A JP H08115505 A JPH08115505 A JP H08115505A JP 24900594 A JP24900594 A JP 24900594A JP 24900594 A JP24900594 A JP 24900594A JP H08115505 A JPH08115505 A JP H08115505A
Authority
JP
Japan
Prior art keywords
magnetic
film
zro
laminated
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP24900594A
Other languages
Japanese (ja)
Inventor
Yukari Nihei
ゆかり 二瓶
Fusashige Tokutake
房重 徳竹
Takashi Tamura
孝 田村
Akira Urai
彰 浦井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP24900594A priority Critical patent/JPH08115505A/en
Publication of JPH08115505A publication Critical patent/JPH08115505A/en
Withdrawn legal-status Critical Current

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  • Inorganic Compounds Of Heavy Metals (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE: To improve the wear resistance of substrate on a medium-sliding surface by composing at least a part of the substrate of a CaTiO3 -ZrO2 -based oxide contg. a ZrO2 -based oxide at a specific ratio. CONSTITUTION: This laminated magnetic head is composed by butting a pair of magnetic core half bodies 1, 2 constituting a closed magnetic path against each other, joining and integrating these core half bodies and forming a magnetic gap G facing the magnetic recording medium-facing surface 3 between these butt surfaces 1a and 2a. The half bodies 1 are formed by sandwiching a laminated magnetic material film 4 which is metallic magnetic film, in the film thickness direction with a pair of the substrates 11, 11b which are nonmagnetic. The substrates 11, 12 constituting the magnetic core half bodies 1, 2 of such magnetic head are composed of the CaTiO3 -ZrO2 -based oxide contg. the ZrO2 -based oxide at the ratio of 20 to 80vol.%.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えばビデオテープレ
コーダー(以下、VTRとする。)、デジタルオーディ
オテープレコーダー(以下、DATとする。)、或いは
デジタルデータ記録装置等の磁気記録再生装置におい
て、音声信号や映像信号或いは情報信号等を、磁気テー
プ等の磁気記録媒体の記録トラック上に磁気信号として
高密度記録するために用いられる磁気ヘッドに関する。
The present invention relates to a magnetic recording / reproducing apparatus such as a video tape recorder (hereinafter referred to as VTR), a digital audio tape recorder (hereinafter referred to as DAT), or a digital data recording apparatus. The present invention relates to a magnetic head used for high-density recording of an audio signal, a video signal, an information signal, or the like as a magnetic signal on a recording track of a magnetic recording medium such as a magnetic tape.

【0002】[0002]

【従来の技術】従来、磁気テープ等を磁気記録媒体とし
て用いているVTR或いはDAT等の磁気記録再生装置
は、磁気テープに記録された情報信号の読み取りを行っ
たり、或いは磁気テープに記録を行うための記録及び/
又は再生用の磁気ヘッドを備えている。
2. Description of the Related Art Conventionally, a magnetic recording / reproducing apparatus such as a VTR or DAT which uses a magnetic tape or the like as a magnetic recording medium reads an information signal recorded on the magnetic tape or records on the magnetic tape. Records and /
Alternatively, a magnetic head for reproduction is provided.

【0003】近年、映像信号等の記録又は再生の高画質
化等を目的として、或いは記憶容量の大容量化を目的と
して、より多くの情報信号を記録又は再生するため、よ
り波長の短い信号を記録又は再生する方法がとられてい
る。このため、磁性層に用いられる磁性粉として強磁性
金属粉末を用い、これをベースフィルム上に塗布したメ
タルテープや、強磁性金属材料をベースフィルム上に直
接蒸着させた蒸着テープ等の高抗磁力磁気記録媒体が使
用されている。
In recent years, in order to record or reproduce a larger number of information signals for the purpose of improving the image quality of recording or reproducing video signals or for increasing the storage capacity, a signal having a shorter wavelength is used. The method of recording or reproducing is adopted. For this reason, a ferromagnetic metal powder is used as the magnetic powder used in the magnetic layer, and a high coercive force such as a metal tape obtained by coating this on the base film or a vapor deposition tape obtained by directly depositing a ferromagnetic metal material on the base film. Magnetic recording media are used.

【0004】そして、これらの高抗磁力磁気記録媒体に
記録又は再生することを可能とするために、磁気コア材
料として高透磁率かつ高飽和磁束密度を持つ金属系磁性
材料、例えば鉄系合金、鉄−ニッケル系合金、鉄−コバ
ルト系合金等を用いた、いわゆる積層型磁気ヘッド、或
いはMIG型磁気ヘッド等が提案されている。
In order to enable recording or reproduction on these high coercive force magnetic recording media, a metal magnetic material having a high magnetic permeability and a high saturation magnetic flux density, such as an iron alloy, is used as a magnetic core material. So-called laminated magnetic heads, MIG magnetic heads, and the like using iron-nickel alloys, iron-cobalt alloys, and the like have been proposed.

【0005】上記積層型磁気ヘッドは、金属磁性膜を非
磁性材料からなる一対の基板により膜厚方向から挟み込
んで一対の磁気コア半体を構成し、この磁気コア半体同
士を突き合わせてガラス融着等により接合一体化して構
成した磁気ヘッドである。
In the laminated magnetic head described above, a pair of magnetic core halves are formed by sandwiching a metal magnetic film between a pair of substrates made of a non-magnetic material in the film thickness direction. It is a magnetic head configured by joining and integrating by wearing or the like.

【0006】[0006]

【発明が解決しようとする課題】ところで、上記積層型
磁気ヘッドにおいては、基板の熱膨張係数が金属磁性膜
の熱膨張係数に近いこと、且つ該基板が各種高抗磁力磁
気記録媒体に対して優れた耐摩耗性を有すること等が要
求されている。
In the above laminated magnetic head, the thermal expansion coefficient of the substrate is close to the thermal expansion coefficient of the metal magnetic film, and the substrate is suitable for various high coercive force magnetic recording media. It is required to have excellent wear resistance and the like.

【0007】上記積層型磁気ヘッドにおいて、基板の熱
膨張係数が金属磁性膜の熱膨張係数と大きく異なると、
基板に成膜した金属磁性膜が剥離したり、基板が割れる
といった問題が生ずる。さらに、金属磁性膜の優れた磁
気特性を十分に引き出すことが出来ないといった問題も
生じ、ヘッド効率の低下を招く。そのため、基板として
は、100×10-7/℃以上の熱膨脹係数を有すること
が望ましいとされている。
In the above laminated magnetic head, when the coefficient of thermal expansion of the substrate is significantly different from that of the metal magnetic film,
There is a problem that the metal magnetic film formed on the substrate is peeled off or the substrate is cracked. Further, there arises a problem that the excellent magnetic characteristics of the metal magnetic film cannot be sufficiently brought out, and the head efficiency is lowered. Therefore, it is said that the substrate preferably has a coefficient of thermal expansion of 100 × 10 −7 / ° C. or more.

【0008】また、上記積層型磁気ヘッドにおいては、
基板の磁気テープ等の高抗磁力磁気記録媒体に対する摩
耗量が大きいとその寿命が短くなってしまう。
Further, in the above laminated magnetic head,
If the amount of abrasion of the magnetic tape of the substrate against the high coercive force magnetic recording medium is large, the life of the medium is shortened.

【0009】そこで本発明は従来の実情に鑑みて提案さ
れたものであり、基板の熱膨張率及び耐摩耗性が制御さ
れ、ヘッド効率が高く、且つ磁気ヘッドとしての寿命も
十分な磁気ヘッドを提案することを目的とする。
Therefore, the present invention has been proposed in view of the conventional circumstances, and a magnetic head in which the coefficient of thermal expansion and wear resistance of the substrate are controlled, the head efficiency is high, and the life as a magnetic head is sufficient is provided. The purpose is to propose.

【0010】[0010]

【課題を解決するための手段】上述の目的を達成するた
めに本発明は、金属磁性膜を一対の基板により膜厚方向
から挟み込んでなる一対の磁気コア半体同士を、上記金
属磁性膜の端面同士が対向するように突き合わせて接合
一体化し、その突き合わせ面間に磁気ギャップが構成さ
れてなる磁気ヘッドにおいて、上記基板の少なくとも一
部が、ZrO2系酸化物を20〜80容量%の割合で含
有するCaTiO3 −ZrO2 系酸化物からなることを
特徴とするものである。
In order to achieve the above-mentioned object, the present invention provides a pair of magnetic core halves formed by sandwiching a metal magnetic film between a pair of substrates in the thickness direction of the metal magnetic film. In a magnetic head in which end faces face each other and are joined and integrated so that a magnetic gap is formed between the butted faces, at least a part of the substrate has a ZrO 2 -based oxide content of 20 to 80% by volume. It is characterized by comprising the CaTiO 3 —ZrO 2 based oxide contained in 1.

【0011】このとき、上記CaTiO3 −ZrO2
酸化物中のZrO2 系酸化物の割合が20容量%未満で
あると、該CaTiO3 −ZrO2 系酸化物に十分な耐
摩耗性を付与することができず、磁気ヘッドの耐摩耗性
が十分でなくなる。一方、ZrO2 系酸化物の割合が8
0容量%よりも多いと、該CaTiO3 −ZrO2 系酸
化物の熱膨張係数が小さくなり過ぎて、磁気ヘッドのヘ
ッド効率の低下を招く。
[0011] At this time, when the ratio of the CaTiO 3 -ZrO 2 system ZrO 2 based oxides in the oxide is less than 20 volume%, giving sufficient wear resistance to the CaTiO 3 -ZrO 2 based oxide Cannot be achieved, and the wear resistance of the magnetic head becomes insufficient. On the other hand, the proportion of ZrO 2 -based oxide is 8
If it is more than 0% by volume, the coefficient of thermal expansion of the CaTiO 3 —ZrO 2 based oxide becomes too small, leading to a reduction in the head efficiency of the magnetic head.

【0012】また、本発明の磁気ヘッドにおいては、基
板の少なくとも磁気記録媒体との摺動面の一部が、Zr
2 系酸化物を20〜80容量%の割合で含有するCa
TiO3 −ZrO2 系酸化物からなることが好ましい。
Further, in the magnetic head of the present invention, at least a part of the sliding surface of the substrate with respect to the magnetic recording medium is Zr.
Ca containing 20 to 80% by volume of O 2 -based oxide
It is preferably made of a TiO 3 —ZrO 2 based oxide.

【0013】さらに、本発明の磁気ヘッドにおいては、
上記CaTiO3 −ZrO2 系酸化物中のZrO2 系酸
化物中に、Y23 ,CeO2 のうち少なくとも一種類
が55モル%以下の割合で含有されている、或いはCa
O,MgOのうち少なくとも一種類が30モル%以下の
割合で含有されていることが好ましい。
Further, in the magnetic head of the present invention,
At least one kind of Y 2 O 3 and CeO 2 is contained in the ZrO 2 -based oxide in the CaTiO 3 —ZrO 2 -based oxide at a ratio of 55 mol% or less, or Ca
It is preferable that at least one of O and MgO is contained at a ratio of 30 mol% or less.

【0014】このとき、Y23 ,CeO2 のうち少な
くとも一種類が55モル%よりも多く含有されている、
或いはCaO,MgOのうち少なくとも一種類が30モ
ル%よりも多く含有されていると、CaTiO3 −Zr
2 系酸化物の強度が劣化してしまい、好ましくない。
At this time, at least one of Y 2 O 3 and CeO 2 is contained in an amount of more than 55 mol%,
Alternatively, when at least one of CaO and MgO is contained in an amount of more than 30 mol%, CaTiO 3 —Zr
This is not preferable because the strength of the O 2 type oxide is deteriorated.

【0015】また、本発明の磁気ヘッドのヘッド効率を
更に向上させるには、上記金属磁性膜を、単位積層磁性
体膜を絶縁体膜を介して複数積層した積層磁性体膜と
し、上記単位積層磁性体膜を磁性体膜を非磁性体膜を介
して複数積層し、且つ積層された磁性体膜同士が端部で
相互に静磁的に結合しているものとすることが好まし
い。
In order to further improve the head efficiency of the magnetic head of the present invention, the metal magnetic film is a laminated magnetic film formed by laminating a plurality of unit laminated magnetic films with an insulator film interposed therebetween, and the unit laminated structure is formed. It is preferable that a plurality of magnetic material films are laminated via a non-magnetic material film, and the laminated magnetic material films are magnetostatically coupled to each other at their ends.

【0016】なお、本発明者等は、先に、特願平6−1
6047号明細書に示すように、上記のような積層型磁
気ヘッドにおいて、磁気コア半体を形成する金属磁性膜
を、単位積層磁性体膜を絶縁体膜を介して複数積層した
積層磁性体膜とし、上記単位積層磁性体膜を磁性体膜を
非磁性体膜を介して複数積層し、且つ積層された磁性体
膜同士が端部で相互に静磁的に結合しているものとすれ
ば、ヘッド効率を向上、特に高周波領域において大幅に
向上させることができることを提案している。
The inventors of the present invention have previously proposed Japanese Patent Application No. 6-1
As disclosed in Japanese Patent No. 6047, in a laminated magnetic head as described above, a laminated magnetic film in which a plurality of unit magnetic layers forming a magnetic core half body are laminated with an insulating film interposed therebetween. If the unit laminated magnetic film is formed by laminating a plurality of magnetic films through a non-magnetic film, and the laminated magnetic films are magnetostatically coupled to each other at the ends. It is proposed that the head efficiency can be improved, especially in a high frequency region.

【0017】そして、このとき、上記磁性体膜がCoを
主成分とし、Zr、Mo、Nb、Ta、Ti、Hf、P
dの中から選ばれた少なくとも一種類の元素を含むこと
が好ましい。
At this time, the magnetic film contains Co as a main component, and Zr, Mo, Nb, Ta, Ti, Hf, and P are used.
It is preferable to contain at least one element selected from d.

【0018】[0018]

【作用】本発明の磁気ヘッドにおいては、金属磁性膜を
膜厚方向から挟み込む基板の少なくとも一部を、ZrO
2 系酸化物を20〜80容量%の割合で含有するCaT
iO3 −ZrO2 系酸化物により構成していることか
ら、上記基板の熱膨張係数が金属磁性膜の熱膨張係数と
近く、ヘッド効率が良好なものとなる。
In the magnetic head of the present invention, at least a part of the substrate sandwiching the metal magnetic film from the film thickness direction is made of ZrO 2.
CaT containing 2 to 80% by volume oxide
Since it is composed of an iO 3 -ZrO 2 -based oxide, the coefficient of thermal expansion of the substrate is close to the coefficient of thermal expansion of the metal magnetic film, and the head efficiency is good.

【0019】また、本発明の磁気ヘッドにおいて、基板
の少なくとも磁気記録媒体との摺動面の一部を、ZrO
2 系酸化物を20〜80容量%の割合で含有するCaT
iO3 −ZrO2 系酸化物により構成すれば、媒体摺動
面における基板の耐摩耗性が良好であることから、磁気
ヘッドの製品寿命も長くなる。
In the magnetic head of the present invention, at least a part of the sliding surface of the substrate on the magnetic recording medium is ZrO 2.
CaT containing 2 to 80% by volume oxide
With the iO 3 -ZrO 2 -based oxide, the wear resistance of the substrate on the sliding surface of the medium is good, so that the product life of the magnetic head is extended.

【0020】[0020]

【実施例】以下、本発明を適用した具体的な実施例につ
いて図面を参照しながら詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings.

【0021】本実施例の磁気ヘッドは、積層型磁気ヘッ
ドであり、図1に示すように、閉磁路を構成する一対の
磁気コア半体1,2が突き合わされて接合一体化され、
その突き合わせ面1a,2a間に磁気記録媒体摺動面3
に臨む磁気ギャップGを構成してなるものである。
The magnetic head of this embodiment is a laminated magnetic head, and as shown in FIG. 1, a pair of magnetic core halves 1 and 2 forming a closed magnetic path are butted and joined together to form a magnetic head.
A magnetic recording medium sliding surface 3 is provided between the abutting surfaces 1a and 2a.
The magnetic gap G facing the above is formed.

【0022】上記磁気コア半体1は、金属磁性膜である
積層磁性体膜4が非磁性である一対の基板11a,11
bにより膜厚方向から挟み込まれたものであり、磁気コ
ア半体2は金属磁性膜である積層磁性膜5が非磁性であ
る一対の基板12a,12bにより膜厚方向から挟み込
まれたものである。
The magnetic core half body 1 has a pair of substrates 11a, 11 having a non-magnetic laminated magnetic film 4 which is a metal magnetic film.
The magnetic core half body 2 is sandwiched between the pair of substrates 12a and 12b, which are nonmagnetic, in the magnetic core half body 2, and the magnetic core half body 2 is sandwiched between the pair of substrates 12a and 12b. .

【0023】そして、磁気コア半体1,2の突き合わせ
面1a,2a間の積層磁性体膜4,5の端面4a,5a
同士の間に磁気ギャップGが構成されている。
Then, the end faces 4a, 5a of the laminated magnetic film 4, 5 between the abutting faces 1a, 2a of the magnetic core halves 1, 2.
A magnetic gap G is formed between them.

【0024】なお、上記磁気ギャップGの図中Twで示
すトラック幅は、上記基板11,12が非磁性体である
ことから、上記積層磁性体膜4,5の膜厚によって規制
される。
The track width of the magnetic gap G indicated by Tw in the figure is restricted by the film thickness of the laminated magnetic films 4, 5 since the substrates 11, 12 are non-magnetic.

【0025】また、上記磁気コア半体1の突き合わせ面
1a側には、上記磁気ギャップGの図中Dpで示すデプ
スを規制するとともに図示しないコイルを巻くための巻
線窓6が形成されている。
A winding window 6 is formed on the side of the abutting surface 1a of the magnetic core half 1 for regulating the depth of the magnetic gap G indicated by Dp in the drawing and winding a coil (not shown). .

【0026】そして、本実施例の磁気ヘッドにおいて
は、磁気コア半体1,2を構成する基板11,12が、
ZrO2 系酸化物を20〜80容量%の割合で含有する
CaTiO3 −ZrO2 系酸化物により構成されてい
る。
In the magnetic head of this embodiment, the substrates 11 and 12 forming the magnetic core halves 1 and 2 are
It is constituted by CaTiO 3 -ZrO 2 system oxide containing ZrO 2 based oxide in a proportion of 20 to 80 volume%.

【0027】また、本実施例の磁気ヘッドにおいては、
上記積層磁性体膜4,5をヘッド効率を向上させる目的
で、図2に示すように(図2中には積層磁性体膜4のみ
を示すが、積層磁性体膜5においても同様である。)、
単位積層磁性体膜33を絶縁体膜34を介して複数積層
した積層磁性体膜としており、上記単位積層磁性体膜3
3を磁性体膜31を非磁性体膜32を介して複数積層
し、且つ積層される磁性体膜31同士が端部で静磁的に
結合しているものとしている。
Further, in the magnetic head of this embodiment,
For the purpose of improving the head efficiency of the laminated magnetic films 4 and 5, as shown in FIG. 2 (only the laminated magnetic film 4 is shown in FIG. 2, but the laminated magnetic film 5 is also the same. ),
The unit laminated magnetic film 33 is formed by laminating a plurality of unit laminated magnetic films 33 with an insulator film 34 interposed therebetween.
3, a plurality of magnetic material films 31 are laminated via a non-magnetic material film 32, and the laminated magnetic material films 31 are magnetostatically coupled at their ends.

【0028】続いて、上記本実施例の磁気ヘッドの基板
を構成するCaTiO3 −ZrO2系酸化物中のZrO2
系酸化物含有量と上記CaTiO3 −ZrO2 系酸化
物の熱膨張係数及び磁気ヘッドの耐摩耗特性の関係につ
いて調査した。
Subsequently, ZrO 2 in the CaTiO 3 --ZrO 2 system oxide forming the substrate of the magnetic head of the above-mentioned embodiment is used.
The relationship between the content of the system oxide, the coefficient of thermal expansion of the CaTiO 3 —ZrO 2 system oxide, and the wear resistance of the magnetic head was investigated.

【0029】すなわち、Y23 を8モル%の割合で含
有するZrO2 系酸化物を含むCaTiO3 −ZrO2
系酸化物中の上記ZrO2 系酸化物の含有量を20〜8
0容量%まで変化させた基板を用意し、これを用いて上
記構造の本実施例の磁気ヘッドを製造し、基板の熱膨張
係数及び磁気ヘッドの耐摩耗特性を調査した。
That is, CaTiO 3 --ZrO 2 containing a ZrO 2 type oxide containing Y 2 O 3 at a ratio of 8 mol%.
The content of the ZrO 2 type oxide in the type oxide is 20 to 8
A substrate with the content changed to 0% by volume was prepared, and the magnetic head of this example having the above structure was manufactured by using the substrate, and the thermal expansion coefficient of the substrate and the wear resistance of the magnetic head were investigated.

【0030】また、比較のために、Y23 を8モル%
の割合で含有するZrO2 系酸化物を含むCaTiO3
−ZrO2 系酸化物中の上記ZrO2 系酸化物の含有量
を0〜20容量%或いは80〜100容量%までで変化
させた基板を用意し、これを用いて上記構造の本実施例
の磁気ヘッドと同様の磁気ヘッドを製造し、基板の熱膨
張係数及び磁気ヘッドの耐摩耗特性を調査した。
For comparison, Y 2 O 3 was added in an amount of 8 mol%.
CaTiO 3 containing ZrO 2 -based oxide
The content of -ZrO 2 based oxide the ZrO 2 based oxide in preparing the substrate was changed up to 0-20% by volume, or 80 to 100% by volume, of the present embodiment having the above structure with reference to this A magnetic head similar to the magnetic head was manufactured, and the coefficient of thermal expansion of the substrate and the wear resistance of the magnetic head were investigated.

【0031】なお、上記磁気ヘッドにおいては、2mm
(幅)×2mm(高さ)×0.2mm(厚さ)の大きさ
とし、トラック幅を19.6μm、当り幅を70μm、
磁気記録媒体摺動面を曲率半径が8mmの曲面とした。
In the above magnetic head, 2 mm
(Width) × 2 mm (height) × 0.2 mm (thickness), the track width is 19.6 μm, the contact width is 70 μm,
The sliding surface of the magnetic recording medium was a curved surface with a radius of curvature of 8 mm.

【0032】そして上記磁気ヘッドにおいては、積層磁
性体膜4,5を9層の単位積層磁性体膜33を絶縁体膜
34を介して総厚19.6μmで積層したものとし、上
記単位積層磁性体膜33を磁性体膜31を非磁性体膜3
2を介して8層積層したものとした。なお、上記磁性体
膜31を膜厚241nmのCo−Zr−Nb−Taアモ
ルファス膜とし、非磁性体膜32を膜厚10nmのSi
2 膜とし、絶縁体膜34を膜厚200nmのSiO2
膜とした。
In the above magnetic head, the laminated magnetic films 4 and 5 are formed by laminating nine unit laminated magnetic films 33 with the total thickness of 19.6 μm with the insulating film 34 interposed therebetween. The body film 33, the magnetic body film 31, and the non-magnetic body film 3
It was assumed that 8 layers were laminated with 2 in between. The magnetic film 31 is a Co-Zr-Nb-Ta amorphous film having a film thickness of 241 nm, and the non-magnetic film 32 is a Si film having a film thickness of 10 nm.
And O 2 film, an insulator film 34 of SiO with a thickness of 200 nm 2
It was a film.

【0033】上記磁性体膜31は、DCマグネトロンス
パッタ装置により、Co81Zr4 Nb12Ta3 (添字は
原子%を示す。)の組成のターゲットを用い、電力密度
を5.0W/cm2 、アルゴンガス圧を0.4Pa、電
極間距離を100mmとして成膜した。
The magnetic film 31 is formed by a DC magnetron sputtering apparatus using a target having a composition of Co 81 Zr 4 Nb 12 Ta 3 (subscripts represent atomic%) and a power density of 5.0 W / cm 2 . The film was formed with an argon gas pressure of 0.4 Pa and an interelectrode distance of 100 mm.

【0034】また、非磁性体膜32及び絶縁体膜34の
SiO2 膜は、高周波スパッタ装置により、電力密度を
1.0W/cm2 、アルゴンガス圧を0.4Pa、電極
間距離を100mmとして成膜した。
Further, the SiO 2 films of the non-magnetic film 32 and the insulating film 34 are formed by a high frequency sputtering device with a power density of 1.0 W / cm 2 , an argon gas pressure of 0.4 Pa and an electrode distance of 100 mm. A film was formed.

【0035】上記磁気ヘッドの耐摩耗特性は、以下のよ
うにして調査した。すなわち、各磁気ヘッドのドラムか
らの突き出しを30μmとし、ソニー社製VTR(商品
名:BVW− 50)に搭載して、これに対し、ソニー
社製ビデオテープ(商品名:BCT−90ML及びBC
T−90MLA、以下それぞれテープA及びテープBと
称する。)を30℃,80%(RH)の条件下で100
時間で走行させ、このときの磁気ヘッドの摩耗量(突き
出し変化量)を調査した。
The wear resistance of the above magnetic head was investigated as follows. That is, the protrusion of each magnetic head from the drum is set to 30 μm, and the magnetic head is mounted on a Sony VTR (trade name: BVW-50). On the other hand, a Sony video tape (trade name: BCT-90ML and BC) is used.
T-90MLA, hereinafter referred to as Tape A and Tape B, respectively. 100) under the conditions of 30 ° C. and 80% (RH).
After traveling for a time, the amount of wear of the magnetic head (change in protrusion) at this time was investigated.

【0036】表1に基板中のZrO2 系酸化物の含有
量、該基板を用いた磁気ヘッドのテープA及びテープB
に対する摩耗量及び該基板の熱膨張係数α、これらの結
果から判断した総合評価を併せて示す。
Table 1 shows the content of the ZrO 2 type oxide in the substrate, the tape A and the tape B of the magnetic head using the substrate.
The amount of wear, the coefficient of thermal expansion α of the substrate, and the comprehensive evaluation determined from these results are also shown.

【0037】[0037]

【表1】 [Table 1]

【0038】前述のように、積層型磁気ヘッドにおいて
は、テープに対する摩耗量が大きいとヘッド寿命が短く
なる為、耐摩耗性は高い程良く、また、基板の熱膨張係
数は金属磁性膜とのバランスを考慮して100℃×10
-7/℃以上が望ましい。
As described above, in the multi-layer magnetic head, the wear resistance is better as the wear amount on the tape is large and the head life is shortened, and the thermal expansion coefficient of the substrate is the same as that of the metal magnetic film. 100 ° C x 10 in consideration of balance
-7 / ° C or higher is desirable.

【0039】従って、表1の結果から、基板を構成する
CaTiO3 −ZrO2 系酸化物中のZrO2 系酸化物
の含有量が20〜80容量%であるときに、摩耗量と熱
膨張係数のバランスのとれた良好な結果が得られること
が確認された。
Therefore, from the results of Table 1, when the content of the ZrO 2 -based oxide in the CaTiO 3 -ZrO 2 -based oxide constituting the substrate is 20 to 80% by volume, the wear amount and the thermal expansion coefficient are set. It was confirmed that a well-balanced and good result was obtained.

【0040】以上より、本実施例の磁気ヘッドのように
基板が、ZrO2 系酸化物を20〜80容量%の割合で
含有するCaTiO3 −ZrO2 系酸化物により構成さ
れる磁気ヘッドにおいては、上記基板の熱膨張係数が金
属磁性膜の熱膨張係数と近く、ヘッド効率が良好なもの
となる。また、本実施例の磁気ヘッドにおいては、媒体
摺動面も上記CaTiO3 −ZrO2 系酸化物により構
成されることとなるため、耐摩耗性が良好となり、磁気
ヘッドの製品寿命も長くなる。
As described above, in the magnetic head in which the substrate is made of CaTiO 3 --ZrO 2 -based oxide containing 20 to 80% by volume of ZrO 2 -based oxide as in the magnetic head of this embodiment. The coefficient of thermal expansion of the substrate is close to the coefficient of thermal expansion of the metal magnetic film, and the head efficiency is good. Further, in the magnetic head of this embodiment, the medium sliding surface is also made of the CaTiO 3 --ZrO 2 -based oxide, so that the wear resistance is good and the product life of the magnetic head is long.

【0041】なお、上記実施例においては、ZrO2
酸化物としてY23 を8モル%含有するものを使用し
たが、この他にもY23 ,CeO2 のうち少なくとも
一種類を55モル%以下、或いはCaO,MgOのうち
少なくとも一種類を30モル%以下の割合で含有するZ
rO2 系酸化物を使用しても同様の効果が得られた。
In the above examples, the ZrO 2 type oxide containing 8 mol% of Y 2 O 3 was used, but in addition to this, at least one of Y 2 O 3 and CeO 2 is used. Z containing 55 mol% or less, or at least one of CaO and MgO in a ratio of 30 mol% or less
The same effect was obtained by using the rO 2 -based oxide.

【0042】また、上記実施例においては、磁性体膜3
1をCo81Zr4 Nb12Ta3 (添字は原子%を示
す。)の組成を有するCo−Zr−Nb−Taアモルフ
ァス膜により構成するものとしたが、上記磁性体膜31
を構成する膜として、成膜した膜が、 Coa Zrb
c Tad 〔ただし、添字のa、b、c、dは各元素の
割合(原子%)を表す。〕なる組成式で表され、その組
成範囲が、79≦a≦83,2≦b≦6,10≦c≦1
4,1≦d≦5であるものを用いても上述の実施例と同
様の効果を得ることができた。
In the above embodiment, the magnetic film 3 is used.
1 was composed of a Co—Zr—Nb—Ta amorphous film having a composition of Co 81 Zr 4 Nb 12 Ta 3 (subscript indicates atomic%).
The film that has been formed as the film that constitutes Co a Zr b N
b c Ta d [where subscripts a, b, c, and d represent the proportion (atomic%) of each element. ] The composition range is 79 ≦ a ≦ 83, 2 ≦ b ≦ 6, 10 ≦ c ≦ 1
Even if 4,1 ≦ d ≦ 5 is used, the same effect as that of the above-described embodiment can be obtained.

【0043】さらに、上記実施例においては、基板1
1,12が、ZrO2 系酸化物を20〜80容量%の割
合で含有するCaTiO3 −ZrO2 系酸化物により構
成される例について述べたが、基板を上記CaTiO3
−ZrO2 系酸化物と磁性フェライト等との接合材によ
り構成しても良い。
Further, in the above embodiment, the substrate 1
1,12 is has been described consisting example by CaTiO 3 -ZrO 2 system oxide containing ZrO 2 based oxide in a proportion of 20 to 80 volume%, the CaTiO 3 substrate
It may be constituted by a bonding material between -ZrO 2 based oxide and the magnetic ferrites.

【0044】上記接合材を用いた磁気ヘッドとしては、
図3に示すようなものが挙げられる。すなわち、先に図
1に示した磁気ヘッドと略同様の構成を有し、積層磁性
体膜44が一対の基板51a,51bにより挟み込まれ
てなる磁気コア半体41と積層磁性体膜45が一対の基
板52a,52bにより挟み込まれてなる磁気コア半体
42をその突き合わせ面間に媒体摺動面43に臨む磁気
ギャップGを形成して接合一体化したものである。
A magnetic head using the above bonding material is
An example is shown in FIG. That is, the magnetic core half body 41 and the laminated magnetic film 45, which have substantially the same structure as the magnetic head shown in FIG. 1 and in which the laminated magnetic film 44 is sandwiched between the pair of substrates 51a and 51b, form a pair. The magnetic core half 42 sandwiched between the substrates 52a and 52b is joined and integrated by forming a magnetic gap G facing the medium sliding surface 43 between the abutting surfaces.

【0045】そして、上記基板51aの媒体摺動面側部
分46が上述のCaTiO3 −ZrO2 系酸化物により
構成され、残りのバックギャップ側部分47が磁性フェ
ライトにより構成され、他の基板51b,52a,52
bも同様の構成とされるものが挙げられる。このような
磁気ヘッドにおいても、先に述べた磁気ヘッドと同様
に、ヘッド効率が良好となり、製品寿命も長くなる。
The medium sliding surface side portion 46 of the substrate 51a is made of the above CaTiO 3 --ZrO 2 system oxide, the remaining back gap side portion 47 is made of magnetic ferrite, and the other substrate 51b, 52a, 52
Examples of b have the same configuration. Also in such a magnetic head, the head efficiency is improved and the product life is extended, as in the magnetic head described above.

【0046】また、本発明は、図5に示すように、先に
図1に示した磁気ヘッドと略同様の構成を有し、積層磁
性体膜64が一対の基板71a,71bにより挟み込ま
れてなる磁気コア半体61と積層磁性体膜65が一対の
基板72a,72bにより挟み込まれてなる磁気コア半
体62をその突き合わせ面間に媒体摺動面63に臨む磁
気ギャップGを形成して接合一体化したものであり、積
層磁性体膜64,65が磁気ギャップGに対して斜交し
て直線状に連なるような磁気ヘッドにも適用可能であ
る。
Further, as shown in FIG. 5, the present invention has substantially the same structure as the magnetic head shown in FIG. 1, and the laminated magnetic film 64 is sandwiched between the pair of substrates 71a and 71b. The magnetic core half body 61 and the laminated magnetic film 65 are sandwiched by the pair of substrates 72a and 72b, and the magnetic core half body 62 is joined between the abutting surfaces to form a magnetic gap G facing the medium sliding surface 63. The magnetic heads are integrated and can be applied to a magnetic head in which the laminated magnetic films 64 and 65 are obliquely crossed with respect to the magnetic gap G and are linearly connected.

【0047】上述の実施例においては、積層磁性体膜中
の磁性体膜として、Co−Zr−Nb−Taアモルファ
ス膜を使用したが、この他にも高飽和磁束密度を有し、
かつ軟磁気特性に優れた強磁性合金材料膜であれば使用
可能であり、かかる強磁性合金材料としては従来より公
知の物がいずれも使用でき、結晶質、非晶質であっても
良い。
In the above-mentioned embodiments, the Co--Zr--Nb--Ta amorphous film is used as the magnetic material film in the laminated magnetic material film, but in addition to this, it has a high saturation magnetic flux density,
Any ferromagnetic alloy material film having excellent soft magnetic properties can be used. As the ferromagnetic alloy material, any conventionally known material can be used, and it may be crystalline or amorphous.

【0048】例示するならば、Fe−Al−Si系合
金,Fe−Si−Co系合金,Fe−Ni系合金,Fe
−Al−Ge系合金,Fe−Ga−Ge系合金,Fe−
Si−Ge系合金,Fe−Si−Ga系合金,Fe−S
i−Ga−Ru系合金,Fe−Co−Si−Al系合金
等が挙げられる。さらには、耐蝕性や耐摩耗性等の一層
の向上を図るために、上記合金に、Ti,Cr,Mn,
Zr,Nb,Mo,Ta,W,Ru,Os,Rh,I
r,Re,Ni,Pd,Pt,Hf,V等の金属を少な
くとも一種類添加したものであってもよい。
For example, Fe-Al-Si alloy, Fe-Si-Co alloy, Fe-Ni alloy, Fe
-Al-Ge-based alloy, Fe-Ga-Ge-based alloy, Fe-
Si-Ge based alloy, Fe-Si-Ga based alloy, Fe-S
Examples thereof include i-Ga-Ru alloys and Fe-Co-Si-Al alloys. Furthermore, in order to further improve the corrosion resistance and wear resistance, the above alloys may be added with Ti, Cr, Mn,
Zr, Nb, Mo, Ta, W, Ru, Os, Rh, I
At least one metal such as r, Re, Ni, Pd, Pt, Hf, and V may be added.

【0049】また、強磁性非晶質金属合金、いわゆるア
モルファス合金(例えば、Fe,Ni,Coの1つ以上
の元素とP,C,B,Siの1つ以上の元素とからなる
合金、またはこれらを主成分としてAl,Ge,Be,
Sn,In,Mo,W,Ti、Mn,Cr,Zr,H
f,Nb等を含んだ合金等のメタル−メタロイド系アモ
ルファス合金、或いはCo,Hf,Zr等の遷移元素や
希土類元素等を主成分とするメタル−メタル系アモルフ
ァス合金)等も挙げられる。
A ferromagnetic amorphous metal alloy, a so-called amorphous alloy (for example, an alloy composed of one or more elements of Fe, Ni, Co and one or more elements of P, C, B, Si, or With these as the main components, Al, Ge, Be,
Sn, In, Mo, W, Ti, Mn, Cr, Zr, H
Metal-metalloid type amorphous alloys such as alloys containing f, Nb, etc., or metal-metal type amorphous alloys containing transition elements such as Co, Hf, Zr etc., rare earth elements, etc. as the main components).

【0050】また、上述の実施例においては、積層磁性
体膜をDCマグネットスパッタ装置及び高周波スパッタ
装置により成膜するものとしたが、膜厚制御性に優れる
他の装置によるスパッタリング法、或いは真空蒸着法、
イオンプレーティング法、イオンビーム法等に代表され
る真空薄膜形成技術により成膜しても良い。
Further, in the above-mentioned embodiments, the laminated magnetic film is formed by the DC magnet sputtering device and the high frequency sputtering device, but the sputtering method by another device excellent in the film thickness controllability or the vacuum deposition. Law,
The film may be formed by a vacuum thin film forming technique typified by an ion plating method and an ion beam method.

【0051】[0051]

【発明の効果】以上の説明からも明らかなように、本発
明は、金属磁性膜を一対の基板により膜厚方向から挟み
込んでなる一対の磁気コア半体同士を、上記金属磁性膜
の端面同士が対向するように突き合わせて接合一体化
し、その突き合わせ面間に磁気ギャップが構成されてな
る磁気ヘッドにおいて、上記基板の少なくとも一部が、
ZrO2 系酸化物を20〜80容量%の割合で含有する
CaTiO3 −ZrO2 系酸化物からなるようにしてい
るため、上記基板の熱膨張係数が金属磁性膜の熱膨張係
数と近く、ヘッド効率が良好なものとなる。
As is apparent from the above description, according to the present invention, a pair of magnetic core halves formed by sandwiching a metal magnetic film between a pair of substrates in the film thickness direction are provided so that end faces of the metal magnetic film are In a magnetic head formed by butting and joining so as to face each other and forming a magnetic gap between the butting surfaces, at least a part of the substrate is
Since it is made of CaTiO 3 —ZrO 2 -based oxide containing a ZrO 2 -based oxide in a proportion of 20 to 80% by volume, the thermal expansion coefficient of the substrate is close to the thermal expansion coefficient of the metal magnetic film, and the head The efficiency is good.

【0052】また、本発明の磁気ヘッドにおいて、基板
の少なくとも磁気記録媒体との摺動面の一部を、ZrO
2 系酸化物を20〜80容量%の割合で含有するCaT
iO3 −ZrO2 系酸化物により構成すれば、媒体摺動
面における基板の耐摩耗性が良好であることから、磁気
ヘッドの製品寿命も長くなる。
In the magnetic head of the present invention, at least a part of the sliding surface of the substrate with respect to the magnetic recording medium is made of ZrO 2.
CaT containing 2 to 80% by volume oxide
With the iO 3 -ZrO 2 -based oxide, the wear resistance of the substrate on the sliding surface of the medium is good, so that the product life of the magnetic head is extended.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明を適用した磁気ヘッドの一例を示す斜視
図である。
FIG. 1 is a perspective view showing an example of a magnetic head to which the present invention is applied.

【図2】本発明を適用した磁気ヘッドの一例の積層磁性
体膜を模式的に示す平面図である。
FIG. 2 is a plan view schematically showing a laminated magnetic film of an example of a magnetic head to which the present invention is applied.

【図3】本発明を適用した磁気ヘッドの他の例を示す斜
視図である。
FIG. 3 is a perspective view showing another example of a magnetic head to which the present invention is applied.

【図4】本発明を適用した磁気ヘッドのさらに他の例を
示す斜視図である。
FIG. 4 is a perspective view showing still another example of a magnetic head to which the present invention is applied.

【符号の説明】[Explanation of symbols]

1,2,41,42,61,62 磁気コア半体 1a,2a 突き合わせ面 3,43,63 媒体摺動面 4,5,44,45,64,65 積層磁性体膜 4a,5a 端面 11,12,51,52,71,72 基板 31 磁性体膜 32 非磁性体膜 33 単位積層磁性体膜 34 絶縁体膜 46 媒体摺動面側部分 47 バックギャップ側部分 G 磁気ギャップ 1, 2, 41, 42, 61, 62 Magnetic core halves 1a, 2a Butting surface 3, 43, 63 Medium sliding surface 4, 5, 44, 45, 64, 65 Laminated magnetic film 4a, 5a End surface 11, 12, 51, 52, 71, 72 Substrate 31 Magnetic film 32 Non-magnetic film 33 Unit laminated magnetic film 34 Insulator film 46 Medium sliding surface side part 47 Back gap side part G Magnetic gap

───────────────────────────────────────────────────── フロントページの続き (72)発明者 浦井 彰 東京都品川区北品川6丁目7番35号 ソニ ー株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Akira Urai 6-735 Kita-Shinagawa, Shinagawa-ku, Tokyo Sony Corporation

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 金属磁性膜を一対の基板により膜厚方向
から挟み込んでなる一対の磁気コア半体同士を、上記金
属磁性膜の端面同士が対向するように突き合わせて接合
一体化し、その突き合わせ面間に磁気ギャップが構成さ
れてなる磁気ヘッドにおいて、 上記基板の少なくとも一部が、ZrO2 系酸化物を20
〜80容量%の割合で含有するCaTiO3 −ZrO2
系酸化物からなることを特徴とする磁気ヘッド。
1. A pair of magnetic core halves sandwiching a metal magnetic film between a pair of substrates in the film thickness direction are butted and joined together so that the end faces of the metal magnetic film face each other, and the butted surfaces are joined together. In a magnetic head having a magnetic gap formed between them, at least a part of the substrate is made of a ZrO 2 -based oxide.
CaTiO 3 —ZrO 2 contained in a proportion of ˜80% by volume
A magnetic head characterized by comprising a system oxide.
【請求項2】 基板の少なくとも磁気記録媒体との摺動
面の一部が、ZrO2系酸化物を20〜80容量%の割
合で含有するCaTiO3 −ZrO2 系酸化物からなる
ことを特徴とする請求項1記載の磁気ヘッド。
2. A substrate, at least a part of a sliding surface of which is in contact with a magnetic recording medium, is made of CaTiO 3 --ZrO 2 -based oxide containing 20 to 80% by volume of ZrO 2 -based oxide. The magnetic head according to claim 1.
【請求項3】 CaTiO3 −ZrO2 系酸化物中のZ
rO2 系酸化物中に、Y23 ,CeO2 のうち少なく
とも一種類が55モル%以下の割合で含有されている、
或いはCaO,MgOのうち少なくとも一種類が30モ
ル%以下の割合で含有されていることを特徴とする請求
項1又は2記載の磁気ヘッド。
3. Z in a CaTiO 3 —ZrO 2 -based oxide
In the rO 2 -based oxide, at least one of Y 2 O 3 and CeO 2 is contained in a proportion of 55 mol% or less.
Alternatively, at least one of CaO and MgO is contained at a ratio of 30 mol% or less, and the magnetic head according to claim 1 or 2.
【請求項4】 金属磁性膜が、単位積層磁性体膜を絶縁
体膜を介して複数積層した積層磁性体膜であり、上記単
位積層磁性体膜が、磁性体膜を非磁性体膜を介して複数
積層し、且つ積層された磁性体膜同士が端部で相互に静
磁的に結合しているものであることを特徴とする請求項
1記載の磁気ヘッド。
4. The metal magnetic film is a laminated magnetic film in which a plurality of unit laminated magnetic films are laminated with an insulator film interposed therebetween, and the unit laminated magnetic film comprises a magnetic film with a non-magnetic film interposed therebetween. 2. The magnetic head according to claim 1, wherein a plurality of the magnetic films are laminated, and the laminated magnetic films are magnetostatically coupled to each other at their ends.
【請求項5】 磁性体膜がCoを主成分とし、Zr、M
o、Nb、Ta、Ti、Hf、Pdの中から選ばれた少
なくとも一種類の元素を含むことを特徴とする請求項4
記載の磁気ヘッド。
5. The magnetic film mainly contains Co, and Zr, M
5. At least one element selected from o, Nb, Ta, Ti, Hf, and Pd is contained.
The magnetic head described.
JP24900594A 1994-10-14 1994-10-14 Magnetic head Withdrawn JPH08115505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24900594A JPH08115505A (en) 1994-10-14 1994-10-14 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24900594A JPH08115505A (en) 1994-10-14 1994-10-14 Magnetic head

Publications (1)

Publication Number Publication Date
JPH08115505A true JPH08115505A (en) 1996-05-07

Family

ID=17186598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24900594A Withdrawn JPH08115505A (en) 1994-10-14 1994-10-14 Magnetic head

Country Status (1)

Country Link
JP (1) JPH08115505A (en)

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