JPH08102280A - Ion scattering analyzer - Google Patents

Abstract

PURPOSE: To eliminate the interruption of a measurement for confirming the data so as to improve the working efficiency of analysis by simultaneously displaying an energy spectrum and a change curve per each time of changing the measurement parameter. CONSTITUTION: When the measuring and displaying operation is started, CAISS measurement 1 is performed in the condition that the incident angle α is set at 30 deg. as the initial value of the measurement range by the control of a goniostage 11. This operation is repeated in order, and the energy spectrum is displayed in a display area W1 of a display 3 per each time of setting the incident angle α, and the signal intensity is plotted in a display area W2 at the same time. These measuring and displaying operation are performed at each measurement point of a measurement area (incident angle α=30 deg.-120 deg.), and finished at the time when pick-up of the data is concluded at all positions. In the case where the measurement is normally performed, measurement is not interrupted and continued to the finish, and in the case where the data as a target can not be obtained, the measurement is interrupted for waiting input.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to an ion scattering analyzer.

[0002]

CAI is one of the ion scattering analyzers.
CISS (Coaxial Impact CollisionIon Scattering Sp
ectroscopy). This CAICISS detects ions backscattered from the sample by ion irradiation with a detector arranged coaxially with the ion source, and detects the element species present on the sample surface from the energy spectrum (TOF spectrum) of the scattered ions. This is an analysis type device.

In CAICISS, the surface structure of a crystalline substance is analyzed by performing the following measurements. (a) Measurement of angle dependence of signal intensity: An energy spectrum is measured by changing the incident angle of the ion beam with respect to the sample, and the angle dependence of each signal intensity is plotted [Fig. 3].

(B) Measurement of changes in signal intensity over time; for example, the sample temperature is gradually changed, the energy spectrum thereof is measured at fixed time intervals, and the changes over time of the respective signal intensities are plotted [Fig. 4 (A)]. , (B)] Then, these measurements are conventionally performed by the procedure shown in FIG.

(1) Determination of integral range of signal intensity; energy spectrum measurement is performed at several points under appropriate measurement parameters related to sample state such as ion beam incident direction or sample temperature, and then peak is determined Then, the integration range (ROI range) of the signal strength is determined.

(2) Range setting of measurement parameters; when measuring the angle dependence of signal intensity, for example, the incident angle α = 30 °
Set conditions such as measuring in the range of 120 ° in 2 ° steps, and when measuring the change over time of the signal intensity, for example, measure 100 points at a time interval of 60 seconds. Set.

(3) Measurement execution: The measurement parameters are sequentially changed, and the measurement of the energy spectrum under the conditions is executed. (4) Display of measurement parameter dependency of signal strength (hereinafter referred to as change curve); after all measurements in (1) to (3) above are completed or after measurement is interrupted, another screen is called to change Display a curve.

[0008]

By the way, in the above-mentioned conventional measurement procedure, as shown in (3) and (4), the measurement of the energy spectrum and the display of the change curve are performed at completely different times and timings. It is being appreciated. That is, conventionally, the change curve is displayed after interrupting or ending the measurement. Further, since the energy spectrum and the change curve are not displayed at the same time, such as the front screen and the back screen, the current situation is to switch the screen and check the data each time.

Therefore, there have been problems that the measurement is frequently interrupted, it takes more time than necessary, and the screen switching is troublesome. Further, if the measurement is interrupted at the time of change measurement, the state of the sample may change during the interruption.

The present invention has been made in view of such circumstances, and it is possible to observe both the energy spectrum and the change curve without switching the screen, and thus the ion scattering which can improve the work efficiency of the analysis. The purpose is to provide an analyzer (CAICISS).

[0011]

A structure for achieving the above object will be described with reference to FIG. 1 corresponding to an embodiment. According to the present invention, a sample S is irradiated with ions from an ion source, A measuring device (CAICISS device) 1 for detecting the intensity of ions scattered backward from the irradiation position by a detector arranged coaxially with the ion source and outputting the detected value as energy spectrum information; A parameter setting unit 2a for setting a measurement parameter in either a mode in which the angle of incidence α of ions on S is changed in a predetermined step or a mode in which measurement is performed at a predetermined time interval, and a parameter setting unit 2a based on the set parameter Based on the measurement execution unit 2b that operates the measuring apparatus 1 by using the measurement value and the detection value output by the measuring apparatus 1 for each execution of the measurement with each parameter. A data processing operation unit 2c that performs an operation for creating the signal strength over data, a display control unit 2d,
The display control unit 2d sets two individual display areas W1 and W2 on the screen 3a of the display device 3, displays the energy spectrum based on the above display data in one display area W1 and the other display area W1. It is characterized in that points corresponding to the calculated values of the signal intensity are plotted on the screen of the display area W2 in synchronization with the spectrum display.

[0012]

In the measurement procedure, the measurement parameters are sequentially changed in the same manner as in the conventional method, and the measurement under each condition is sequentially executed. However, in the present invention, the measurement under one condition is performed. Each time, the display data of the energy spectrum is created based on the detection value of the scattering intensity obtained by the measuring device 1, and the signal intensity is calculated (ROI range integration).
Then, the energy spectrum is displayed in the display area W1 on the screen 3a of the display 3, and at the same time, the calculated value of the signal intensity is plotted in the other display area W2.

[0013]

1 is a block diagram showing the configuration of an embodiment of the present invention. First, the CAICISS apparatus 1 irradiates the sample S with ions from the ion source, and detects the intensity of the ions backscattered from the sample S by the ion irradiation with a detector (MCP) arranged coaxially with the ion source. Then, the intensity detection value of the scattered ions is output as energy spectrum information.

An analysis vacuum chamber 10 is connected to the CAICISS device 1. A gonio stage 11 is arranged in the analysis vacuum chamber 10, and by rotating the gonio stage 11, the incident angle α of the CAICISS beam with respect to the sample S can be arbitrarily set.

On the other hand, the arithmetic processing means 2 is, for example, a computer, and has a parameter setting section 2a and a measurement execution section 2
b, the respective functional units of the data processing unit 2c and the display control unit 2d are provided.

The parameter setting unit 2a is a functional unit that sets the measurement parameters in the measurement execution unit 2b based on the range of the measurement parameters input by operating a keyboard (not shown) or the like. The range of the measurement parameter is the range of changing the incident angle α and the width (step) of the angle change when measuring the angle dependence of the signal strength, and the time change of the signal strength when measuring. Is the time interval of measurement execution and the number of measurement points.

The measurement execution unit 2b controls the measurement operation of the CAICISS device 1 based on the set values of the measurement parameters. In the case of measuring the angle dependence of the signal strength, the measurement execution unit 2b controls the goniometer stage 11 to First, the incident angle α is set to the initial value of the measurement range, then the incident angle α is sequentially changed in each setting step, and the CA is set for each angle setting.
Control is performed to supply a start command signal to the ICISS device 1, and when measuring the change over time of the signal intensity, the incident angle α is fixed (for example, α = 90 °) for a certain period of time. Control such as supplying a start command signal to the CAICISS device 1 is performed at intervals.

The data processing operation unit 2c is operated by CAICISS.
Each time the measurement by the device 1 is performed, its CAICI
The output of the SS device 1 is sampled, and the collected value, that is, the detected value of the scattering intensity is used to create the display data of the energy spectrum, and the signal intensity is obtained by integrating the ROI range. And the calculated value of are output to the display control unit 2d as a pair of data.

The display control unit 2d sets two individual display areas (windows) W1 and W2 on the screen 3a of the display unit 3, and one of the display areas W1 is created by the data processing operation unit 2c. The energy spectrum is displayed based on the displayed data, and on the screen of the other display area W2,
The point corresponding to the calculated value of the signal strength is plotted in synchronization with the display of the spectrum.

Next, the measurement / display operation of the embodiment of the present invention will be described. 3 is a flowchart showing the contents of the operation of FIG. First, the procedure of determining the integration range of the signal intensity and setting the range of the measurement parameter is performed in the same manner as the conventional method. In this example, the mode is set to measure the angle dependence of the signal intensity, and the range of the measurement parameter is, for example, the incident angle α = 30 ° to
The steps are 120 ° and 2 °.

When the measurement / display operation is started, CAICISS measurement is performed with the incidence angle α set to 30 ° which is the initial value of the measurement range by the control of the gonio stage 11, and then the incidence angle α is 32 °. And the same measurement is repeated, and the energy spectrum is displayed on the display unit 3 for each setting of the incident angle α.
Is displayed in the display area W1 and the signal intensity is plotted in the display area W2 at the same time.

The above measurement / display operation is performed for each measurement point in the measurement range (incident angle α = 30 ° to 120 °), and ends when data collection for all of these points is completed. Here, if the measurement is proceeding smoothly,
The measurement continues to the end without interruption, but if the desired data is not obtained for some reason, the measurement is interrupted and waits for input.

The display system of the display unit 3 is not limited to the window system as shown in FIG. 1, but is also used for energy spectrum display, for example, by dividing the screen 3a of the display unit 3 into two vertically or horizontally. Alternatively, a method of providing two separate display areas for plotting the signal strength may be adopted.

The apparatus of the present invention can also be applied to the analysis of changes over time in the thin film growth process. In this case, CAICIS
By mounting the S device in the film forming vacuum chamber for thin film growth, real-time analysis is also possible.

[0025]

As described above, according to the ion scattering analyzer of the present invention, the energy spectrum and the change curve are simultaneously displayed each time the measurement parameter is changed, so that the measurement interruption for confirming the data can be performed. It becomes unnecessary. This is particularly effective when measuring the change in signal intensity over time. Also, since there is no need to switch screens,
Analytical work efficiency is significantly improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention.

FIG. 2 is a flowchart showing the contents of the measurement / display operation of the embodiment.

FIG. 3 is a diagram showing an example of an energy spectrum and a change curve obtained by measuring the angle dependence of signal strength together.

FIG. 4 (a) is a diagram showing an example of an energy spectrum obtained by measuring a change in signal intensity over time, and FIG. 4 (b) is a diagram showing an example of a change curve similarly obtained by measuring a change over time.

FIG. 5 is a flowchart showing an example of a conventional measurement procedure in CAICISS measurement.

[Explanation of symbols]

 1 CAICISS device 10 analysis vacuum chamber 11 gonio stage 2 arithmetic processing means 2a parameter setting unit 2b measurement execution unit 2c data processing arithmetic unit 2d display control unit 3 indicator 3a screen W1, W2 display area S sample

Claims (1)

[Claims] 1. Irradiating a sample with ions from an ion source,
The intensity of the ions scattered backward from the irradiation position is detected by a detector arranged coaxially with the ion source, and the measurement device that outputs the detected value as energy spectrum information, and the incidence of the ions on the sample A parameter setting unit that sets a measurement parameter in either a mode in which the angle is changed in a predetermined step to perform measurement or a mode in which the measurement is performed at predetermined time intervals, and a measurement that operates the measurement device based on the set parameter An execution unit, a data processing operation unit that creates display data of the energy spectrum and calculates the signal intensity based on the detection value output by the measurement device for each measurement execution with each parameter, and a display control unit. , The display control unit sets two separate display areas on the screen of the display, and the energy based on the display data is set in one of the display areas. Display spectrum, and the other on the screen of the display area that corresponds to the calculated value of the signal intensity, the spectral display in synchronism with the ion scattering spectrometer comprising configured to plot.