JPH0798419A - Integrated optical waveguide circuit - Google Patents

Abstract

PURPOSE:To provide the above circuit with a wavelength multiplexing/demultiplexing function and a light power splitter function by integrating array waveguide diffraction gratings and star coupler type power splitters by allowing both to commonly possess mutual slab optical waveguides and input/output optical waveguides. CONSTITUTION:This integrated optical waveguide circuit is constituted by integrating the array waveguide diffraction gratings and the optical power splitters commonly possessing the slab optical waveguides 402 and output optical waveguides 303 on the output side thereof. Light of a wavelength lambdak entering from the input optical waveguides 304 of the optical power splitters is distributed at a specified ratio or adequate power ratio to the respective output optical waveguides. On the other hand, the array waveguides 302 of the array waveguide diffraction gratings are inclined in the wave front of the light by a difference in the lengths of the respective optical waveguides and are coupled to another output waveguides 303 different from the input optical waveguides 301. The inclination of the wave front changes with the wavelength of the light and, therefore, the light is eventually outputted to the different output optical waveguides among the output optical waveguides 303 if the wavelength of the light is changed. The array waveguide diffraction gratings, thus, function as the optical wavelengtht multiplexer/demultiplexer.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated optical waveguide circuit used for optical components for optical communication and optical information processing, and more specifically to an optical power splitter and an arrayed waveguide diffraction grating type optical wavelength multiplexer / demultiplexer. The present invention relates to an integrated optical waveguide circuit in which the above are integrated.

[0002]

2. Description of the Related Art In recent years, various optical waveguide circuit components have been researched and developed in order to cope with the sophistication of optical communication systems or to expand the application range of optical communication systems. In particular, a planar lightwave circuit (Planar Lightwave C) constructed by forming a glass waveguide on a silicon substrate.
ircuits) are attracting attention as practical optical components because of their small optical loss. Typical circuits include an arrayed waveguide diffraction grating type optical wavelength multiplexer / demultiplexer and an N × M star coupler type optical power splitter using a slab waveguide expansion unit. A. R. Vellekoo
p and M.P. K. Smit, "Four-Chan"
nel Integrated-Optic Wave
length Demultiplexer with
Weak Polarization Depende
nce ", J. Lightwave Technology.
vol. 9 pp310-314 (1991), and C.I. Dragone et al. "Effici
ent Multichannel Integrat
ed Optics Star Coupler
Silicon ”, IEEE Photonic Te
ch. Lett. vol. 1 pp. 241-243
(1989).

FIG. 15 shows the structure of an arrayed waveguide diffraction grating type multiplexer / demultiplexer. The arrayed-waveguide diffraction grating type optical wavelength multiplexer / demultiplexer has a plurality of input optical waveguides 301 and a slab optical waveguide 401 for expansion for branching the light into a plurality of waveguides.
It is composed of a plurality of arrayed waveguides 302 having different lengths arranged in the subsequent stage, a slab optical waveguide 402 and a plurality of output optical waveguides 308 for making light emitted from the arrayed waveguides 302 interfere with each other. . Its function is to demultiplex light input from a certain optical waveguide according to the wavelength of the light and output it to each output optical waveguide. It is also possible to combine lights of different wavelengths by using the input side and the output side in reverse. Such an optical wavelength multiplexing / demultiplexing function is very effective when performing wavelength multiplexing or routing using optical wavelengths in an optical communication system.

On the other hand, FIG. 16 shows the configuration of an N × M star coupler type optical power splitter. In the N × M star coupler type optical power splitter, the incident light with respect to the light incident from any of the N input optical waveguides 304 is distributed to each of the M output optical waveguides 309 without depending on its wavelength. . Therefore, it is important in a system that requires a large number of light demultiplexers. The structure is composed of a plurality of input optical waveguides 304, a slab optical waveguide 406 for expanding the light confined in the channel waveguides, and an output optical waveguide 309 for receiving and outputting the expanded light. Composed.

In summary, in the arrayed waveguide diffraction grating, the output optical waveguide is selected according to the wavelength of the input light. On the other hand, the star coupler type power splitter distributes the light input to each output optical waveguide without depending on the wavelength of the light.

[0006]

As described above, the wavelength multiplexer / demultiplexer in which the output optical waveguide is selected depending on the wavelength of the input light and all the output optical waveguides independent of the wavelength of the input light are used. There was an optical power splitter for distribution, but an optical integrated circuit having both functions was not known so far.

Therefore, an object of the present invention is to provide an integrated optical waveguide circuit having two functions, that is, light incident from an arbitrary input port is distributed to each output optical waveguide without depending on wavelength, and another An object of the present invention is to provide an integrated optical waveguide circuit having a new function that light incident from an input port is output from a specific output optical waveguide depending on the wavelength.

[0008]

In order to achieve such an object, the first aspect of the integrated optical waveguide circuit of the present invention is one or a plurality of input optical waveguides arranged in parallel.
A slab optical waveguide, a plurality of arrayed optical waveguides arranged in parallel with different lengths, a second slab optical waveguide, and a plurality of output optical waveguides arranged in parallel are connected in series. A wavelength multiplexer / demultiplexer and an optical power splitter configured by connecting in series one or a plurality of input optical waveguides arranged in parallel, a slab optical waveguide, and a plurality of output optical waveguides arranged in parallel. Are formed on the same two-dimensional plane, and at least one of the first and second slab optical waveguides of the optical wavelength multiplexer / demultiplexer and the slab optical waveguide of the optical power splitter are shared, and At least one of the input optical waveguide and the output optical waveguide of the optical wavelength multiplexer / demultiplexer and the output optical waveguide of the optical power splitter are shared. That is an integrated optical waveguide circuit.

According to a second aspect of the present invention, a plurality of input / output optical waveguides arranged in parallel, a slab optical waveguide, a plurality of array optical waveguides arranged in parallel with different lengths, and light of a specific wavelength are provided. Optical wavelength multiplexer / demultiplexer composed of reflecting mirrors, and one or more input optical waveguides arranged in parallel, slab optical waveguides, and multiple output optical waveguides arranged in parallel are connected in cascade. The optical power splitter configured by is formed on the same two-dimensional plane, and the arrayed waveguide of the optical wavelength multiplexer / demultiplexer and the input optical waveguide of the optical power splitter are shared, The slab optical waveguide of the optical wavelength multiplexer / demultiplexer and the slab optical waveguide of the optical power splitter are shared,
Further, the integrated optical waveguide circuit is characterized in that the input / output optical waveguide of the optical wavelength multiplexer / demultiplexer and the output optical waveguide of the optical power splitter are shared.

[0010]

[Operation] By integrating the arrayed waveguide diffraction grating and the star coupler type optical power splitter by sharing the slab optical waveguide and the input / output optical waveguide with each other, it is possible to depend on the optical wavelength which has been impossible in the past. The wavelength multiplexing / demultiplexing function in which the output optical waveguide is selected and the function of the optical power splitter that distributes light at a constant ratio without depending on the optical wavelength can be realized by the same optical integrated circuit.

[0011]

Embodiments of the present invention will now be described in detail with reference to the drawings.

Embodiment 1 FIG. 1 shows a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a first embodiment of the present invention.

FIG. 2 shows the integrated optical waveguide circuit A shown in FIG.
FIG. 3 is an enlarged sectional view taken along line A ′, and FIG. 3 is an enlarged sectional view taken along line BB ′ of the integrated optical waveguide circuit shown in FIG. 1.

Here, 1 is a substrate, 2 is a clad layer, 3 is a core portion of an input optical waveguide, 301 is an input optical waveguide of an arrayed waveguide diffraction grating, and 302 is an arrayed optical waveguide of an arrayed waveguide diffraction grating. A plurality of optical waveguides having different wavelengths are arranged in parallel. Reference numeral 303 is an output waveguide of the arrayed waveguide diffraction grating and the optical power splitter, 304 is an input waveguide of the optical power splitter, and 401 and 402 are slab waveguides, respectively.

The structure is such that the arrayed-waveguide diffraction grating, and the slab optical waveguide 402 and the output optical waveguide 30 on the output side thereof.
The optical power splitter sharing 3 is integrated. Input optical waveguide 304 of optical power splitter
The light of wavelength λ _k that is incident from is distributed to each output optical waveguide at a constant ratio or an appropriate power ratio. On the other hand, in the arrayed waveguide 302 of the arrayed waveguide diffraction grating, since the length of each optical waveguide is different, the wavefront of light is inclined, and the input optical waveguide 30
Coupled to another output waveguide 303 different from 1. Here, since the inclination of the wavefront changes depending on the light wavelength, when the light wavelength is changed, light is output to a different output optical waveguide in the output optical waveguide 303. Thus, the arrayed waveguide diffraction grating functions as an optical wavelength multiplexer / demultiplexer. That is, the input optical waveguide 301 having the arrayed waveguide diffraction grating
, For example, when lights of wavelengths λ _-j , ..., λ _j are multiplexed and incident, the arrayed waveguide diffraction grating has a multiplexing / demultiplexing function, so that the lights of the respective wavelengths are demultiplexed into the output optical waveguide 303. Is output.

An optical waveguide is manufactured on a silicon substrate and the structure shown in FIG.
The circuit shown in was produced. Regarding the fabrication method, Masao Kawauchi “Applications to silica-based optical waveguides and integrated optical components” (Optics, No. 1
8, Vol. 12, No. 1989).
That is, a glass layer was formed on a silicon substrate by a flame deposition method, and this was processed into an arbitrary pattern by a photolithography technique and a reactive ion etching method, whereby the circuit shown in FIG. 1 was produced. However, the output optical waveguide 303
The number of was eight. At this time, the optical waveguide was designed so that the optical insertion loss of the optical power splitter was the smallest and the distribution ratio to the output optical waveguide was constant. That is, the light incident on the slab optical waveguide 402 from the input optical waveguide 304 of the optical power splitter spreads according to the Gaussian distribution. In order to collect and distribute this light to the output optical waveguide 303, the inlet of the output optical waveguide 303 on the slab optical waveguide 402 side is made into a trumpet shape as shown in FIG. 4 so that the width is narrow in the central portion and wide in the peripheral portion. . Fig. 5 is a characteristic diagram of the insertion loss of the optical power splitter, and Fig. 5 is a characteristic diagram showing the insertion loss with respect to the wavelength when the light is incident from the input optical waveguide in the center of the arrayed waveguide diffraction grating. Is shown in FIG.
Since the principle distribution loss of the optical power splitter is 9 dB, it can be seen from FIG. 5 that the excess loss is 1 to 2 dB. This value was almost constant for the wavelength of light of 1.3 to 1.55 μm. From FIG. 6, the insertion loss at the maximum transmission wavelength of each output optical waveguide of the arrayed waveguide grating is 5
It turns out that it is about dB.

Embodiment 2 FIG. 7 shows another embodiment of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter. Here, 305 is an input optical waveguide of the arrayed waveguide diffraction grating and an output optical waveguide of the optical power splitter.

This structure is almost the same as that of the integrated optical waveguide circuit of the first embodiment, but in the integrated optical waveguide circuit of the present embodiment, the slab optical waveguide 401 on the input side of the arrayed waveguide diffraction grating is the same as the output side. An optical power splitter was manufactured. As a result, the light having a wavelength lambda _m the input optical waveguide 304A of the optical power splitter, it has become possible to output light of wavelengths of lambda _m the input optical waveguide 305 of the arrayed waveguide grating.

Embodiment 3 FIG. 8 shows another embodiment of the integrated optical waveguide circuit of the optical wavelength multiplexer / demultiplexer and the optical power splitter. FIG. 9 is an enlarged perspective view showing a part of the connection between the optical fiber for inputting the optical power splitter and the slab optical waveguide.

Here, 4 is a core layer, which corresponds to a part of the slab optical waveguide 401 in FIG. However, the cladding surrounding it is not shown. Reference numeral 5 is an optical fiber for inputting an optical power splitter, and 6 is a fiber insertion groove for inputting an optical power splitter.

This structure is also almost the same as the integrated optical waveguide circuit of the first embodiment, but in the integrated optical waveguide circuit of the present embodiment, an optical fiber is used as an input of the optical power splitter instead of the optical waveguide. The feature of this configuration is that the insertion loss of the optical power splitter can be minimized without increasing the insertion loss of the arrayed waveguide grating.

The integrated optical waveguide circuit was manufactured by the method shown in the first embodiment. The fiber insertion groove 6 for inputting the optical power splitter was prepared by the photolithography technique and the reactive ion etching method, and the optical fiber was fixed by using an ultraviolet curable resin having the same refractive index as the core.

The insertion loss of the optical power splitter was about 12 dB, which was slightly larger than the insertion loss shown in FIG. It is considered that this is because the connection loss between the input optical fiber and the slab optical waveguide is about 2 dB. The insertion loss of the arrayed waveguide diffraction grating was about 3 dB at the maximum transmission wavelength of each output optical waveguide, which was a better value than the insertion loss of the integrated optical waveguide circuit of Example 1. because,
This is because, in the present embodiment, since the input of the optical power splitter is performed by the optical fiber, the shape of the arrayed waveguide diffraction grating can be optimized regardless of the shape of the optical power splitter.

Embodiment 4 FIG. 10 shows an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter as a fourth embodiment of the present invention.

Reference numeral 404 is a slab optical waveguide in which the wavelength filter 7 is inserted. FIG. 11 is an enlarged perspective view of the insertion portion of the wavelength filter 7. Here, the wavelength filter 7 is made of, for example, SiO 2 on the surface of a polymer thin film made of polyimide resin.
It is made by depositing ₂ and TiO ₂ in multiple layers. Reference numeral 8 is a groove into which the wavelength filter 7 is inserted.
In the present embodiment, the wavelength filter 7 used is one that reflects light in the 1.3 μm band and transmits light in the 1.55 μm band. The groove for insertion of the wavelength filter 7 was made by photolithography and reactive ion etching, and the wavelength filter 7 was fixed by filling the groove 8 with an ultraviolet curable resin 12 having the same refractive index as the core. .

The present embodiment differs from the integrated optical waveguide circuit of the first embodiment in that the wavelength filter 7 is inserted in the output side slab optical waveguide 404 of the arrayed waveguide diffraction grating. This feature is, for example, 1.3 μm in the thin film wavelength filter 7.
By providing the function of separating the m band light and the 1.55 μm band light, it is possible to simultaneously realize the wavelength demultiplexing and the wavelength independent power splitter. Further, since the thin film wavelength filter 7 is inserted in the slab optical waveguide, the light reflected by the wavelength filter 7 is also efficiently coupled to the output optical waveguide as compared with the case where it is inserted in the middle of the channel optical waveguide. be able to.

Specific functions will be described. First, as shown in FIG. 10, the input optical waveguide 3 for the optical power splitter is used.
The light in the 1.3 μm band as λ _k through 04, and λ _m
As a result, light in the 1.55 μm band is made incident. The light in the 1.3 μm band is reflected by the thin film wavelength filter 7 in the slab optical waveguide 404 on the output side of the arrayed waveguide diffraction grating, and the light in the 1.55 μm band is transmitted to be separated. As a result, λ _k is distributed to each output optical waveguide 303A on the first output side. Similarly, 1.55μ
The light in the m band is distributed to each output optical waveguide 303B on the second output side. On the other hand, from the arbitrary input optical waveguide 301 of the arrayed waveguide diffraction grating, for example, λ ′ _{j in the} 1.3 μm band
When light of several wavelengths arranged at intervals of 00 GHz and light of several wavelengths in the 1.55 μm band as λ _j are multiplexed and incident, the output side slab optical waveguide 404 is output as in the case of the optical power splitter. With the thin film filter 7 inside, 1.
The light in the 3 μm band and the light in the 1.55 μm band are separated. Further, light of some wavelengths in the 1.3 μm band is distributed to each output optical waveguide 303B on the second output side depending on the wavelength.
Similarly, light in the 1.55 μm band is output to each output optical waveguide 303A on the first output side depending on the wavelength.

Embodiment 5 FIG. 12 shows another embodiment of the integrated optical waveguide circuit of the optical wavelength multiplexer / demultiplexer and the optical power splitter.

Here, 9 is a thermo-optical phase shifter using a thin film heater, and 10 is 2 for input light to the arrayed waveguide diffraction grating.
It is a Y branch for separating into two.

This configuration differs from the first embodiment in that
In order to reduce the insertion loss of the arrayed waveguide diffraction grating while keeping the insertion loss of the optical power splitter at a minimum, the input optical waveguide 304 of the optical power splitter is set to the arrayed waveguide 3
It is located at the center of 02. Therefore, the slab optical waveguide on the input side of the arrayed waveguide diffraction grating is divided into two on the left and right, and light is distributed to the arrayed waveguide by each of the slab optical waveguides 401, 401. The thermo-optic phase shifter 9 is provided for adjusting the input lights to the two separated arrayed waveguide diffraction gratings so that they meet certain relative phase conditions.

Embodiment 6 FIG. 13 shows another embodiment of the integrated optical waveguide circuit of the optical wavelength multiplexer / demultiplexer and the optical power splitter. Here, 306 is an input optical waveguide to the arrayed waveguide diffraction grating and the optical power splitter, and 11 is a wavelength multiplexer / demultiplexer using an asymmetric Mach-Zehnder interferometer.

This structure is different from the integrated optical waveguide circuit of the fifth embodiment in that the input light to the arrayed waveguide diffraction grating and the input light to the optical splitter can be made to enter from the same input optical waveguide 306. 9 is that a wavelength multiplexer / demultiplexer using an asymmetric Mach-Zehnder interferometer 11 is inserted before 9. The wavelength multiplexer / distributor including the asymmetric Mach-Zehnder interferometer 11 has a function of separating light in the 1.3 μm band and light in the 1.55 μm band, for example.

Embodiment 7 FIG. 14 shows an integrated optical waveguide circuit as another embodiment of the optical wavelength multiplexer / demultiplexer and the optical power splitter.

In this optical waveguide circuit, the circuit is cut at the central portion of the arrayed waveguide diffraction grating and, for example, SiO ₂ and TiO ₂ are cut there.
_A reflection type optical wavelength multiplexer / demultiplexer is configured by forming a dielectric multilayer film reflection filter 501 composed of two. Here, the input optical waveguide 3 of the arrayed waveguide diffraction grating
The light incident on 01 is diffracted by the slab optical waveguide 405 and distributed to the plurality of array optical waveguides 307. After that, these lights are reflected by the dielectric multilayer film filter 501 and emitted again to the slab optical waveguide 405. At this time, since the lengths of the arrayed optical waveguides are different, the wavefront of light is inclined,
Another output optical waveguide 303 different from the input optical waveguide 301
Bind to. Here, since the inclination of the wavefront changes depending on the light wavelength, when the light wavelength is changed, light is output to a different output optical waveguide in the output optical waveguide 303. Thus, the optical waveguide circuit functions as a reflection type optical wavelength multiplexer / demultiplexer. Here, the dielectric multilayer filter 501 was formed by vacuum deposition after mirror polishing the end face of the substrate 1. In this embodiment, the dielectric multilayer film filter is 1.3
It was designed such that light in the μm band was transmitted and light in the 1.55 μm band was reflected. Therefore, this arrayed waveguide diffraction grating is 1.
It functions as a reflection-type optical wavelength multiplexer / demultiplexer for 55 μm band light.

On the other hand, light of the 1.3 μm band (λ _k ) which the dielectric multilayer filter 501 functions as transmission is directly coupled (butt joint) from the end face of the waveguide near the center of the array optical waveguide 307 using an optical fiber. Incident on the output optical waveguide 3 is diffracted by the slab optical waveguide 405.
It is distributed to 03. Therefore, this optical waveguide circuit also functions as an optical power splitter. At this time, the light distributed to the input optical waveguide 301 of the arrayed waveguide diffraction grating may adversely affect the returned light. This can be prevented by inserting a 1.3 μm band cut filter in the middle of the input optical waveguide 301 or the optical fiber incident on this.

In each of the embodiments of the present invention, an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter is realized by using a glass waveguide on a silicon substrate, but this circuit is another optical waveguide circuit component. However, it can be realized similarly.

[0037]

As described above, according to the present invention,
It is possible to realize the function of having both the function of an optical power splitter in which light is distributed to each output optical waveguide without depending on the wavelength and the function of a wavelength multiplexer / demultiplexer in which the output optical waveguide is selected depending on the wavelength. .

[Brief description of drawings]

FIG. 1 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a first embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view taken along the line AA ′ of FIG.

FIG. 3 is an enlarged sectional view taken along line BB ′ of FIG.

FIG. 4 is an enlarged view of an interface between an output optical waveguide and a slab optical waveguide of the arrayed waveguide diffraction grating in FIG.

FIG. 5 is a characteristic diagram showing insertion loss of the optical power splitter according to the first embodiment of the present invention.

FIG. 6 is a characteristic diagram of insertion loss of the arrayed waveguide diffraction grating according to the first embodiment of the present invention.

FIG. 7 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a second embodiment of the present invention.

FIG. 8 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a third embodiment of the present invention.

FIG. 9 is an enlarged perspective view of a connecting portion between an optical fiber for inputting an optical power splitter and a slab waveguide.

FIG. 10 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a fourth embodiment of the present invention.

11 is an enlarged perspective view of an insertion portion of the wavelength filter shown in FIG.

FIG. 12 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a fifth embodiment of the present invention.

FIG. 13 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a sixth embodiment of the present invention.

FIG. 14 is a plan view of an integrated optical waveguide circuit of an optical wavelength multiplexer / demultiplexer and an optical power splitter according to a seventh embodiment of the present invention.

FIG. 15 is a plan view of a conventional arrayed waveguide diffraction grating type optical wavelength multiplexer / demultiplexer.

FIG. 16 is a plan view of a conventional N × M star coupler type optical power splitter.

[Explanation of symbols]

1 substrate 2 clad layer 3 core portion 5 optical fiber for optical power splitter input 6 optical fiber insertion groove for optical power splitter 7 multilayer film wavelength filter 8 multilayer film wavelength filter insertion groove 9 thermo-optical phase shifter 10 Y branch 11 Mach-Zehnder interference Meter type wavelength multiplexer / demultiplexer 12 UV curable resin 301 Input optical waveguide to array waveguide diffraction grating 302 Array optical waveguide of array waveguide diffraction grating 303 Output optical waveguide of array waveguide diffraction grating and optical power splitter 304 Optical power splitter Input optical waveguide 305 Input optical waveguide to array waveguide diffraction grating and output optical waveguide of optical power splitter 306 Array optical waveguide Input waveguide to diffraction grating and input optical waveguide to optical power splitter 307 Array optical waveguide 308 Array guide Waveguide Grating Output Waveguide 309 Output optical waveguide of optical power splitter 401, 402, 403, 404, 405, 406 Slab optical waveguide 501 Dielectric multilayer filter

Claims (2)

[Claims] 1. A single or a plurality of input optical waveguides arranged in parallel, a first slab optical waveguide, a plurality of array optical waveguides arranged in parallel and having different lengths, a second slab optical waveguide, and An optical wavelength multiplexer / demultiplexer configured by connecting a plurality of output optical waveguides arranged in parallel in cascade, and one or a plurality of input optical waveguides arranged in parallel, a slab optical waveguide, and An optical power splitter configured by connecting a plurality of arranged output optical waveguides in cascade is formed on the same two-dimensional plane, and the first and second optical wavelength division multiplexers are provided. At least one of the slab optical waveguide and the slab optical waveguide of the optical power splitter are shared, and at least one of the input optical waveguide and the output optical waveguide of the optical wavelength multiplexer / demultiplexer and the An integrated optical waveguide circuit, wherein the output optical waveguide of the optical power splitter is shared. 2. A plurality of input / output optical waveguides arranged in parallel, a slab optical waveguide, a plurality of array optical waveguides arranged in parallel with different lengths, and a mirror for reflecting light of a specific wavelength. The optical wavelength multiplexer / demultiplexer, and one or more input optical waveguides arranged in parallel, a slab optical waveguide, and a plurality of output optical waveguides arranged in parallel are connected in series. An optical power splitter is formed on the same two-dimensional plane, and the arrayed waveguide of the optical wavelength multiplexer / demultiplexer and the input optical waveguide of the optical power splitter are shared, and the optical wavelength multiplexer / demultiplexer is used. The slab optical waveguide and the slab optical waveguide of the optical power splitter are shared, and further, the input / output optical waveguide of the optical wavelength multiplexer / demultiplexer and the output optical waveguide of the optical power splitter are shared. An integrated optical waveguide circuit characterized by being shared with a path.