JPH0796892B2 - Displacement generation linear motion guide device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motion guide device that is widely used in, for example, semiconductor manufacturing equipment, machine tools, various inspection devices, and the like, and more particularly to a linear motion guide device that generates displacement.

[0002]

2. Description of the Related Art In recent years, there has been an increasing demand for higher precision in fine processing as represented by semiconductor technology. Since NC (Numerical Control) was developed, position control has dramatically improved the machining accuracy. In order to make such position control highly accurate, a rolling contact type linear motion guide device is widely used for the linear guide portion.

This linear motion guide device is composed of a track rail and a slide base slidably provided on the track rail via rolling elements in order to achieve high precision position control. In particular, efforts have been made to increase the rigidity of the linear motion guide device.

[0004]

However, there is a limit to increasing the rigidity of the apparatus, and the influence of thermal expansion due to environmental temperature changes and sliding frictional heat during operation is unavoidable, and is required for fine processing. It is becoming difficult to obtain the required processing accuracy.

The present invention has been made to solve the above-mentioned problems of the prior art. The object of the present invention is to provide a rolling contact type linear motion widely used for a linear guide portion of a semiconductor manufacturing apparatus or a machine tool. It is an object of the present invention to provide a guide device for displacement generating linear motion that enables positioning with higher accuracy and higher resolution by providing a displacement generating section in the guide device for travel.

[0006]

In order to achieve the above object, the present invention comprises a track rail and a slide base slidably provided on the track rail via rolling elements. A linear motion guide device, the guided part of the slide base
It is characterized in that a displacement generating portion for generating displacement is provided so as to change the position of the material mounting portion .

The displacement generating section is characterized by comprising an elastic member that is deformable in the direction in which the displacement is generated and is rigid in other directions, and a displacement means for expanding and contracting the elastic member. .

Further, the invention is characterized in that a displacement detecting means for detecting the displacement amount in the displacement generating portion is provided.

A force detecting means for detecting the force acting on the displacement generating portion is provided.

It is characterized in that the displacement amount of the displacement means is adjusted based on the detection value of the displacement detection means.

Further, the displacement amount of the displacement means is adjusted based on the detection value of the force detection means.

The displacing means is a means for displacing a command value in proportion to the command value. For example, the displacing means is a piezoelectric element or an electrostrictive element, an actuator that expands and contracts by utilizing fluid pressure or thermal expansion, and a voice coil. Various actuators using magnetostrictive elements can be used.

The displacement generation direction of the displacement generating portion is perpendicular to the pseudo slide surfaces of the raceway and the slide, the length direction of the raceway, and orthogonal to the pseudo slide and to the pseudo slide surface. On the contrary, at least one of the three parallel directions is preferable.

[0014]

In the linear motion guide device having the above structure, the position of the guided member attached to the slide base is controlled by displacing the slide base by the displacement generating section.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to illustrated embodiments.

1 (a) to 1 (c) show the conceptual construction of a guide device for displacement-generating linear motion according to the present invention. This guide device for displacement-generating linear movement is composed of a track rail 1 that extends linearly, and a slide base 3 that is mounted on the track rail 1 via a large number of balls 2 as rolling elements. Further, the slide base 3 is provided with a displacement generation part 4, and the position of a guided member 5 such as a movable table guided by the slide base 3 can be controlled by generating a displacement by the displacement generation part 4. I am trying.

As for the displacement generation direction, as shown in FIG. 1 (d), the direction in which the slide base 3 moves along the track rail 1 is the Y-axis, which is orthogonal to the track rail 1 and which is the slide base 3. When the X-axis is parallel to the pseudo-sliding surface and the Z-axis is the vertical direction orthogonal to the pseudo-sliding surface S of the slide base 3, in FIG. In FIG. 1B, the displacement is generated in the X-axis direction, and in FIG. 1C, the displacement is generated in the Y-axis direction.

FIG. 2A shows an example in which a displacement detecting means 8 for detecting the amount of displacement of the displacement generating section 4 is provided. By providing the displacement detecting means 8 in this way, the actual amount of displacement can be monitored, and if the operation of the displacement generating part 4 is controlled based on this displacement information, the position of the guided member 5 can be more accurately determined. It becomes possible to control. Also, FIG. 2 (b)
Is provided with force detecting means 9 for detecting the force acting on the slide base 3, and the displacement generating section 4 can be controlled based on the information on the acting force.

As the displacement detecting means 8, for example, FIG.
A resistance type sensor 8a such as a strain gauge as shown in (a), a sensor 8b that detects displacement as a voltage change using a piezoelectric element as shown in (b) of the figure, and an operation as shown in (c) of the figure. Electromagnetic induction type sensor 8c such as transformer or eddy current sensor, capacitance type sensor 8d as shown in FIG.
Various sensors capable of detecting a minute displacement can be used, such as a light interference type sensor 8e using a light fiber as shown in FIG. 3 (f) and 3 (g) show an example of force detecting means. That is, what is shown in FIG. 3 (f) is composed of an elastic member 9b that elastically deforms in the load acting direction according to a load, and a strain gauge 9a for detecting the amount of strain of this elastic member 9b. , Elastic member 9b
The force to be applied is detected from the detected value of the strain amount.

The example shown in FIG. 3 (g) is for detecting the force acting from the detected value of the amount of strain of the elastic member 9b and the piezoelectric element 9c arranged side by side on the elastic member 9b.

Of course, as the force detecting means, various detecting means other than the illustrated example can be used.

FIG. 4 shows various basic structural examples of the displacement generator 4.

That is, FIG. 4 (a) shows a displacement in the Z-axis direction, FIG. 4 (b) shows a displacement in the X-axis direction, and FIG. 4 (c) shows a displacement in the Y-axis direction. It is a configuration example in the case of making it. Although not shown, displacements can be generated in two directions of the XY axes by combining the configurations of FIGS. 3 (b) and 3 (c), and the configurations of FIGS. 3 (a) and 3 (b). By combining the above, the displacements can be generated in the two directions of the XZ axis and by combining the configurations of FIGS. 3A and 3C, the two directions of the YZ axis. Furthermore, FIG. 3 (a)-(c)
Displacement can be generated in the three directions of the XYZ axes by combining the above three configurations. Furthermore, the displacement can be generated in any direction, not limited to the XYZ axis directions.

In each of the examples, as the structure of the displacement generator,
The elastic member 6 includes an elastic member 6 that is elastically deformable in the displacement direction and is rigid in a direction other than the displacement direction, and a displacement means 7 such as a piezoelectric element or an electrostrictive element that can expand and contract in the displacement direction. And the displacing means 7 are provided side by side between the facing surfaces of the sliding table body 31 and the mounting portion 32 on which the table or the like is mounted.

The example shown in FIG. 4 (d) uses a displacement transmitting member 33. That is, only the elastic member 6 is provided between the facing surfaces of the slide base main body 31 having a ball rolling portion and the mounting portion 32, and one end 33a of the displacement generation transmission member is attached to the slide base main body 31. One of the parts 32 is fixed to the mounting part 32 in the illustrated example, and the free end 33b of the displacement transmitting member 33, the slide base body part 31, and the other member of the mounting part 32, in this embodiment, sliding. The displacement means 7 is interposed between the base body 31 and the base body 31.

As the displacement means 6, in addition to a piezoelectric element and an electrostrictive element, a thermal actuator that expands and contracts by utilizing thermal expansion of an object, or a fluid pressure as shown in FIGS. 4 (e) and 4 (f) is used. Various actuators that expand and contract in proportion to the command value based on the command value, such as the expanding and contracting actuator 7a and other voice coils and magnetostrictive elements, can be applied.

FIG. 5 shows various structural examples when the elastic member 6 has a thin leaf spring structure in the basic structure of the displacement generating portion shown in FIG.

FIG. 5A shows the basic structure of the elastic member when the displacement is generated in the Z-axis direction shown in FIG. 4A. That is, the elastic member 6A has a thin-walled structure that is elastically deformable in the displacement generation direction and rigid in the other directions, and has one end fixed to the mounting portion 32 and the other end fixed to the slide base body 31. It is fixed.

FIG. 5 (b) shows a specific example of the displacement generating section using the displacement transmitting member shown in FIG. 4 (d).

FIG. 5 (c) shows an example in which a thin annular flat plate structure is used as the elastic member 6B. Figure 5 (d)
(f) shows the planar shape of this elastic member 6B.
It may have a simple annular flat plate shape as shown in (d), or may have a suitable hole 6C as shown in (e) and (f) of FIG.

FIGS. 5 (g) to 5 (i) show examples of arrangement of the displacement means 7 and the elastic member 6B.

FIG. 5 (g) shows an example in which both the elastic member 6B and the displacement means 7 are formed in a ring shape and are arranged concentrically.

FIG. 5 (h) shows an example in which the rod-shaped displacement means 7 and the ring-shaped elastic member 6B are used, and the rod-shaped displacement means 7 is arranged at three positions. ) Is a configuration in which the rod-shaped displacement means 7 is used and the elastic member 6B is divided in the circumferential direction so as to avoid the rod-shaped displacement means 7.

FIG. 6 shows an example of the basic structure of the elastic member when the displacement is generated in the X-axis and Y-axis directions shown in FIGS. 4 (b) and 4 (c).

FIG. 6A shows an example in which the elastic member 6D has a parallel plate structure composed of thin portions arranged in parallel with each other, and can be elastically deformed only in one direction of the X axis or the Y axis. It has a structure.

FIG. 6 (b) shows a thin-walled cylindrical shape as the structure of the elastic member 6E. If you do this, X
It can be elastically deformed in both the axis and Y-axis directions,
The direction of elastic deformation is not limited to one direction.

Next, more specific examples of the present invention will be described. Hereinafter, the first to eighth examples are Z
It is an axial displacement type embodiment, the ninth embodiment is an X axis displacement type embodiment, and the tenth embodiment is a Y axis displacement type embodiment.
One embodiment is an XY-axis bidirectional displacement type embodiment, and a twelfth embodiment
The embodiment is a modification of the X-axis Y-axis displacement type.

[First Embodiment] FIGS. 7 and 8 show a first embodiment. This first embodiment embodies the model configuration of FIG. 4 (a) for generating displacement in the Z-axis direction, FIG. 7 shows a schematic configuration, and FIG. 8 shows a more specific configuration example. ing.

First, the schematic structure will be described with reference to FIG.
Next, a more detailed part will be described based on FIG.

In the example of FIG. 7, the elastic member 6B is shown in FIG.
This is an example in which the thin annular flat plate structure shown in is applied.
That is, the slide base 3 includes a slide base body 31 having a portion where the balls 2 roll, a mounting portion 32 to which the guided member 5 is mounted, and a space between the slide base body 31 and the mounting portion 32. And a displacement generator 4 interposed therebetween.

The displacement generating section 4 is made of a leaf spring elastic member 6B.
And a displacement means 7 for varying the distance between the mounting portion 31 and the slide portion 32. The elastic member 6B has a thin annular flat plate shape, the outer end of which is fixed to the inner end of the annular mounting portion 32, and the inner end of which is fixed to the slide base main body 31.
It is configured to be elastically deformable in the axial direction.

By forming the elastic member 6B into an annular flat plate structure, the elastic member 6B is elastically deformable in the Z-axis direction and rigid in the X- and Y-axis directions other than the Z-axis.
The rigidity in the axial and Y-axis directions can be kept high.

A resistance type sensor 8a is attached to the surface of the elastic member 6B as a detecting means for detecting a displacement amount corresponding to elastic deformation of the elastic member 6B. As shown in FIG. 7 (b), the resistance type sensor 8a has its sensitivity enhanced by being attached to the base of the elastic member 6B with the largest strain.

Next, with respect to the example of FIG. 8, differences from FIG. 7 and more specific points will be described.

In this illustrated example, the mounting portion 32, the elastic member 6B, and the sliding base main body 31 are integrally formed by processing a rectangular block body forming the sliding base 3. That is, slits 34 are formed around the front, rear, left and right sides of the slide base 3, while a circular recess 35 is formed in the center of the upper surface of the slide base 3, and a thin wall is provided between the bottom surface of the recess 35 and the slit 34. To form the elastic member 6B. The opening of the recess 35 of the slide base 3 is closed by a lid 36.

As the resistance type sensor 8a, the elastic member 6B is used.
4 are equally arranged on the outer diameter end and the inner diameter end, and the phases of the resistance type sensors 8a on the inner diameter end side and the outer diameter end side are shifted by 45 degrees. Further, the resistance type sensor 8a is attached to the surface of the elastic member 6B on the concave portion 34 side, and the signal line from the resistance type sensor 8a is taken out through the connection terminal 9 fixed to the attachment portion 31.

FIG. 9 shows a control block diagram of such a guide device for displacement generating linear motion.

That is, in order to operate the displacement means 7 such as a piezoelectric element, a D / A for converting the command value into an analog signal.
The converter 100, the drive amplifier 101 that amplifies this signal, and the resistance type sensor 8 attached to the elastic member 6B.
a strain amplifier 102 for reading the resistance value of a, an A / D converter 103 for converting an analog detection value output from the stray amplifier 102 into a digital signal,
And an arithmetic circuit 104 for processing and controlling it. Then, the displacement information detected by the resistance type sensor 8a is constantly monitored and fed back to the arithmetic circuit 104, and the displacement means 7 such as a piezoelectric element is controlled so as to generate an appropriate displacement so that the displacement is sequentially adjusted. It That is, the position of the guided member such as the table attached to the slide table 3 is controlled.

As a control configuration, as shown by a dotted line in the drawing, the analog information from the resistance type sensor may be directly compared with the analog signal of the command value for control without being converted into digital information. .

[Second Embodiment] FIG. 10 shows a second embodiment. In this embodiment, a displacement transmitting member 33 as shown in FIG. . The displacement is generated in the Z-axis direction, and the resistance type sensor 8a is attached to the elastic member 6 as the displacement detecting means.

[Third Embodiment] FIG. 11 shows a third embodiment, and this embodiment also shows the structure of the displacement generator 4 as shown in FIG.
The elastic member 6B having the annular thin plate structure shown in (c) is applied, and is a type that causes displacement in the Z-axis direction. Then, instead of detecting the displacement, a force detecting means 9 is provided to detect the force.

The force detecting means 9 is for detecting the strain of the elastic member which is deformed in response to the force as shown in FIGS. 3 (f) and 3 (g) by converting it into an electric signal by the resistance type sensor 9a. is there. As the elastic member 9b, like the elastic member 6B applied to the displacement generating section 4, a thin-walled annular flat plate spring that is elastically deformable in the force acting direction and rigid in the other direction is used. It has an integral structure with the gantry body 31, the mounting portion 32, and the displacement generator 4. Then, when the displacement generating section 4 is extended by a predetermined amount, the force increases by that amount, and the elastic member 6b of the force detecting means 9 bends in accordance with the increase in the force,
The amount of deflection is detected by the resistance sensor 9a as a change in electrical resistance.

[Fourth Embodiment] FIG. 12 shows a fourth embodiment of the present invention. In this embodiment, a force detecting means 9 similar to that of the third embodiment is applied to the type using the displacement transmitting member 33 as in the second embodiment of FIG. 10, instead of the displacement detecting means.

[Fifth Embodiment] FIGS. 13 and 14 show a fifth embodiment of the present invention. Of these, FIG. 13 shows a schematic configuration, and FIG. 14 shows a more specific configuration example.

That is, in the example shown in FIG. 13, the displacement generating portion 4 of the first embodiment shown in FIG. 7 is separated from the sliding base body portion 31 to be a separate structure.

The concrete example shown in FIG. 14 (a) is a separate structure in which the displacement generating section 4 of the concrete example shown in FIG. 8 is separated from the slide base main body 31.

If the displacement generating section 4 is separated in this way, it can be attached to an existing product as a displacement generating attachment.

14 (b) and 14 (c) show a modification of the displacement generator 4.

FIG. 14B shows a parallel plate structure in which elastic members 6B having a thin annular plate structure are combined in parallel with each other.

FIG. 14C shows an elastic member 6B having a thin annular flat plate structure in which a cylindrical body with flanges is cut at both ends to form an elastic member 6B having a thin annular flat plate structure. A more simplified configuration example in which the displacement means 7 such as the above is interposed is shown.

[Sixth Embodiment] FIG. 15 shows a sixth embodiment of the present invention. In this embodiment, the displacement generating portion 4 of the second embodiment shown in FIG. 10 is separated from the sliding base body portion 31 and has a separate structure.

[Seventh Embodiment] FIG. 16 shows a seventh embodiment of the present invention. In this embodiment, the displacement generating section 4 of the third embodiment shown in FIG. 11 is separated from the sliding base main body 31 and has a separate structure.

[Eighth Embodiment] FIG. 17 shows an eighth embodiment of the present invention. In this embodiment, the displacement generating section 4 of the fourth embodiment shown in FIG. 12 is configured separately from the slide base main body 31.

[Ninth Embodiment] FIG. 18 shows a ninth embodiment of the present invention. This embodiment is a displacement type in the X-axis direction.
6 (a) is applied as the structure of the displacement generating section of the basic configuration of (b).

In FIG. 18 (a), the displacement generating section 4 and the slide base 3 are integrated, and in FIG. 18 (b), the displacement generating section 4 is separated from the slide base main body 31 to form a separate structure. It is what

[Tenth Embodiment] FIG. 19 shows a tenth embodiment of the present invention.
An example is shown. This embodiment is a Y-axis direction displacement type,
Fig. 6 (a) shows the structure of the displacement generator of the basic configuration of Fig. 4 (c).
Is applied.

In FIG. 19 (a), the displacement generating part and the slide base 3 are integrated, and in FIG. 19 (b), the displacement generating part 4 is separated from the slide base body 31 to form a separate structure. It was done.

[Eleventh Embodiment] FIGS. 20 (a) and 20 (b) show an eleventh embodiment of the present invention. In this embodiment, X axis, Y
A displacement is generated in both axial directions of the shaft, which is a combination of the ninth embodiment shown in FIG. 18 and the tenth embodiment shown in FIG.

FIG. 20 (c) shows a structure in which the displacement generating section 4 is separated from the sliding base body section 31 to be a separate structure.

[Twelfth Embodiment] FIGS. 21 and 22 show a twelfth embodiment of the present invention. In order to generate displacement in the X-axis direction and the Y-axis direction, a common structure as shown in FIG. 6 (b) is used. The thin cylindrical elastic member is applied.

FIG. 21 (a) shows a structure in which the displacement means 7 is provided along the X axis to generate displacement in the X axis direction.
(b) is a configuration in which the displacement means 7 is provided along the Y-axis direction to generate displacement in the Y-axis direction.

Further, FIG. 21 (c) shows an example in which the displacement generating section 4 is separated from the sliding base body section 31 to be a separate structure.

FIG. 22 shows a more specific configuration example of the configuration of FIG. 21 (a), which is a more specific configuration example of the type using the thin-walled cylindrical elastic member 6D of the twelfth embodiment. .

That is, the arm portion 37 is provided at a predetermined distance from one end of the sliding base body portion 31 to the side surface of the mounting portion 32, and the displacement means 7 is provided between the arm portion 37 and the mounting portion 32. The interposition is provided, and the position of the guided member attached to the attachment portion 31 is controlled by expanding and contracting the minute displacement means 7.

[0075]

EFFECTS OF THE INVENTION The present invention has the above-described configuration and operation. By providing the displacement generating portion, the slide base can be displaced and the position of the guided member attached to the slide base can be controlled.

[Brief description of drawings]

1 (a) to 1 (c) are views showing a conceptual configuration of a guide device for displacement generating linear motion of the present invention, and FIG. 1 (d) is a perspective view.

2 (a) is a diagram showing a conceptual configuration in the case where displacement detecting means is provided in the configuration of FIG. 1, and FIG. 2 (b) is a conceptual configuration in which force detecting means is provided in the configuration of FIG. FIG.

FIGS. 3 (a) to 3 (e) are configuration diagrams in the vicinity of a displacement generation unit when displacement detection means are used, and FIGS. 3 (f) and 3 (g) are displacement generations when force detection means is used. It is a block diagram of a part vicinity.

4 (a) to 4 (c) are diagrams schematically showing a basic configuration example of a displacement generating section, and FIG. 4 (d) is a diagram schematically showing a configuration example using a displacement transmitting member. , (E) and (f) are schematic views showing an example in which a fluid pressure cylinder is used as the displacement means.

5 (a) is a cross-sectional view of a main part when the elastic member of the displacement generating part shown in FIG. 4 is constituted by a leaf spring, and FIG. 5 (b) is the displacement generating part shown in FIG. 4 (d). A cross-sectional view of a main part when the elastic member is configured by a leaf spring, FIG. 6C is a cross-sectional view illustrating an example in which the elastic member is configured by a leaf spring having a thin annular flat plate structure, and FIGS. FIG. 6C is a plan view showing various modes of the elastic member of FIG. 7C, and FIGS. 9G to 9I are diagrams showing various arrangement configurations of the elastic member and the displacement means.

FIG. 6 (a) is a schematic view of a case where a displacement generating portion for generating a lateral displacement is configured by using a plate spring having a parallel plate structure, and FIG. 6 (b) is a thin-walled cylinder of an elastic member. It is a typical block diagram at the time of forming in a shape.

FIG. 7 shows a linear motion guide device according to a first embodiment of the present invention, wherein FIG. 7 (a) is a schematic configuration diagram and FIG. 7 (b).
FIG. 4 is a cross-sectional view of a main part in a state where displacement is generated.

FIG. 8 shows a linear motion guide device in which the configuration of FIG. 7 is further embodied. FIG. 8 (a) is a schematic configuration diagram and FIG.
(b) is a plan view, and (c) and (d) are cross-sectional views of relevant parts for explaining the operating state.

FIG. 9 is a control block diagram of the apparatus of FIG. 7.

FIG. 10 is a schematic configuration diagram showing a linear motion guide device according to a second embodiment of the present invention.

FIG. 11 shows a linear motion guide device according to a third embodiment of the present invention, in which FIG. 11 (a) is a schematic configuration diagram and FIG.
(b) is a sectional view of a main part for explaining an operating state.

FIG. 12 is a schematic configuration diagram showing a linear motion guide device according to a fourth embodiment of the present invention.

FIG. 13 is a schematic configuration diagram showing a linear motion guide device according to a fifth embodiment of the present invention.

14 (a) is a basic configuration diagram showing an example in which the displacement generating unit of FIG. 13 of the present invention is divided, and FIGS. 14 (b) and (c) are other configuration examples of the displacement generating unit. FIG.

FIG. 15 is a schematic configuration diagram showing a linear motion guide device according to a sixth embodiment of the present invention.

FIG. 16 is a schematic configuration diagram showing a linear motion guide device according to a seventh embodiment of the present invention.

FIG. 17 is a schematic configuration diagram showing a linear motion guide device according to an eighth embodiment of the present invention.

FIG. 18 (a) is a schematic configuration diagram showing a linear movement guide device according to a ninth embodiment of the present invention, and FIG. 18 (b) is the same diagram (a).
FIG. 3 is a schematic configuration diagram in which the displacement generation unit of FIG.

FIG. 19 (a) is a schematic configuration diagram showing a linear movement guide device according to a tenth embodiment of the present invention, and FIG. 19 (b) is the same diagram.
It is a schematic block diagram which separated the displacement generation part of (a).

20 (a) is a schematic configuration diagram showing a linear motion guide device according to an eleventh embodiment of the present invention, and FIG. 20 (b) is the same diagram.
(a) is a side view, and (c) is a schematic configuration diagram in which the displacement generating part of (a) is separated.

FIG. 21 shows a linear motion guide device according to a twelfth embodiment of the present invention. FIG. 21 (a) is a schematic configuration diagram of an X-axis displacement type, and FIG. 21 (b) is a Y-axis displacement type. Schematic configuration diagram of the mold, the same figure
(c) is a schematic configuration diagram in which the displacement generating portion of (a) is separated.

22 shows a linear motion guide device in which the configuration of FIG. 21 (a) is further embodied. FIG. 22 (a) is a schematic configuration diagram and FIG. 22 (b) is a plan view.

[Explanation of symbols]

 1 track rail 2 ball (rolling element) 3 sliding base 31 sliding base main body 32 mounting part 4 displacement generation part 5 guided member 6, 6A, 6B, 6D elastic member 7 micro displacement means 8 displacement detection means

Claims (13)

[Claims] 1. A linear motion guide device comprising a track rail and a slide base slidably provided on the track rail via rolling elements, wherein a guide member mounting portion of the slide base is provided. Can change position
Displacement generating linear motion guide device having a displacement generating section for generating displacement as described above . 2. The displacement generating section comprises an elastic member that is deformable in a direction in which displacement is generated and is rigid in other directions, and a displacement means for expanding and contracting the elastic member. A guide device for displacement-generating linear movement as described in [4]. 3. The displacement generation linear motion guide device according to claim 1, further comprising displacement detection means for detecting the amount of displacement in the displacement generation section. 4. The guide device for displacement generating linear motion according to claim 1, further comprising a force detecting means for detecting a force acting on the displacement generating portion. 5. The displacement generating linear motion guide device according to claim 3, wherein the displacement amount of the displacement means is adjusted based on the detection value of the displacement detection means. 6. The guide device for displacement generating linear motion according to claim 4, wherein the displacement amount of the displacement means is adjusted based on the detection value of the force detection means. 7. The displacement generation linear motion guide device according to claim 2, 3, 4, 5 or 6, wherein the displacing means is a means for displacing in proportion to the command value when the command value is given. 8. The guide device for displacement generating linear motion according to claim 5, wherein the displacement means is composed of a piezoelectric element or an electrostrictive element. 9. The displacement generating linear motion guide device according to claim 7, wherein the displacement means is an actuator that expands and contracts by utilizing fluid pressure. 10. The guide device for displacement-generating linear movement according to claim 7, wherein the displacement means is an actuator that expands and contracts by utilizing thermal expansion. 11. The displacement generating linear motion guide device according to claim 7, wherein the displacement means is an actuator using a voice coil. 12. The guide device for displacement generating linear motion according to claim 7, wherein the displacement means is an actuator using a magnetostrictive element. 13. The displacement generation direction of the displacement generation part is a direction orthogonal to the pseudo slide surface of the raceway and the slide base, a length direction of the raceway and a pseudo slide relative to the raceway. The displacement-generating linear movement guide device according to any one of claims 1 to 12, wherein the guide device is at least one of three directions parallel to the plane.