JPH0786969B2 - Method of manufacturing magnetoresistive effect magnetic head - Google Patents
Method of manufacturing magnetoresistive effect magnetic headInfo
- Publication number
- JPH0786969B2 JPH0786969B2 JP59105139A JP10513984A JPH0786969B2 JP H0786969 B2 JPH0786969 B2 JP H0786969B2 JP 59105139 A JP59105139 A JP 59105139A JP 10513984 A JP10513984 A JP 10513984A JP H0786969 B2 JPH0786969 B2 JP H0786969B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- magnetoresistive effect
- magnetic head
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
- G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
- G11B5/3922—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
- G11B5/3925—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔発明の技術分野〕 この発明は磁気抵抗効果型磁気ヘツドの製造方法、特に
耐摩耗性が高く且つ製造工程中における磁気抵抗効果の
劣化を防止することができる磁気ヘツドの製造方法に関
するものである。Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a method for manufacturing a magnetoresistive effect magnetic head, in particular, a magnetic head having high wear resistance and capable of preventing deterioration of the magnetoresistive effect during the manufacturing process. The present invention relates to a manufacturing method of.
第１図は従来の磁気抵抗効果型磁気ヘツドを示す縦断面
図であり、図において、（１）はサフアイア、Al2O3−T
iC等でなる基板、（２）はパーマロイ、センダスト等の
金属磁性薄膜、（３）はパーマロイ等の磁気抵抗効果
（以下簡単のためMR効果と称す）を有するMR効果磁性薄
膜、（４）はエポキシ樹脂等の樹脂接着層、（５）は前
記基板（１）と同材料の保護板である。なお、第１図に
おいて符号（Ａ）で示した部分が磁気テープ等の磁気媒
体と摺接する摺接面である。FIG. 1 is a longitudinal sectional view showing a conventional magnetoresistive effect magnetic head. In the figure, (1) is a sapphire, Al 2 O 3 -T.
A substrate made of iC, etc., (2) a metal magnetic thin film such as permalloy or sendust, (3) an MR effect magnetic thin film having a magnetoresistive effect (hereinafter referred to as MR effect for simplicity) such as permalloy, (4) A resin adhesive layer such as an epoxy resin, and (5) are protective plates made of the same material as the substrate (1). In addition, a portion indicated by reference numeral (A) in FIG. 1 is a sliding contact surface which is in sliding contact with a magnetic medium such as a magnetic tape.
以上の構成を有する所謂磁束引込型のMR効果型磁気ヘツ
ドにおいては、摺接面（Ａ）に摺接する磁気媒体からの
磁束が金属磁性薄膜（２）内に導入され、その一部がMR
効果磁性薄膜（３）を横切ることになる。この磁束によ
つて、MR効果磁性薄膜（３）の電気抵抗が変化し、その
抵抗変化を検出することにより、磁気媒体に磁気記録さ
れた情報を再生することができる。In the so-called magnetic flux pull-in type MR effect type magnetic head having the above configuration, the magnetic flux from the magnetic medium slidingly contacting the sliding contact surface (A) is introduced into the metal magnetic thin film (2), and a part of the MR
The effect will cross the magnetic thin film (3). Due to this magnetic flux, the electric resistance of the MR effect magnetic thin film (3) changes, and by detecting the resistance change, the information magnetically recorded on the magnetic medium can be reproduced.
ところで、前記従来の磁気ヘツドを製造するには、基板
（１）上に磁気ヘツドを構成する薄膜材料を順次スパツ
タ、メツキ等で積層することによつて製造するようにし
ているので、最終的に保護板（５）をエポキシ樹脂等の
接着剤で接合する際に温度を上げると、MR効果磁性薄膜
（３）の特性が劣化する問題点があり、このため、低温
度で硬化するエポキシ樹脂等の接着剤のみしか使用でき
ず、磁気媒体と摺接する摺接面（Ａ）の耐摩耗性を向上
させることができない欠点があつた。また、同様の理由
でガラスを溶融させて融着するというガラスボンデイン
グプロセスも採用することができないものであつた。By the way, in order to manufacture the conventional magnetic head, the thin film material constituting the magnetic head is sequentially laminated on the substrate (1) by a spatula, a pad, etc., so that it is finally manufactured. If the temperature is increased when the protective plate (5) is bonded with an adhesive such as an epoxy resin, the MR effect magnetic thin film (3) has a problem of deteriorating the characteristics. However, there is a drawback in that it is not possible to improve the wear resistance of the sliding contact surface (A) which is in sliding contact with the magnetic medium, since only the adhesive of No. 1 can be used. Further, for the same reason, the glass bonding process of melting and fusing the glass cannot be adopted.
この発明は係る欠点を改善するためになされたもので、
予め磁気媒体と摺接してその磁束引込部となる金属磁性
薄膜を一対の非磁性の基板上に成膜し、これをガラスボ
ンディング、切断、研磨等を行うことによって磁束引込
コア部を内蔵する磁束引込コア内蔵基板を作製した後、
当該基板上に磁気抵抗効果を有する金属薄膜を成膜する
ことにより、磁気ヘツド製造工程中における磁気抵抗効
果の劣化を防止すると共に、高精度なトラック幅規制が
でき、且つ、耐摩耗性の優れた磁気ヘツドを得ることが
できる磁気抵抗効果型磁気ヘツドの製造方法を提案する
ものである。The present invention has been made to solve the above drawbacks.
A magnetic flux with a built-in magnetic flux attraction core portion is formed by previously forming a metal magnetic thin film, which becomes a magnetic flux attraction portion by sliding contact with a magnetic medium, on a pair of non-magnetic substrates and performing glass bonding, cutting, polishing, etc. After making the board with built-in retractable core,
By forming a metal thin film having a magnetoresistive effect on the substrate, deterioration of the magnetoresistive effect during the magnetic head manufacturing process can be prevented, highly accurate track width regulation can be performed, and abrasion resistance is excellent. The present invention proposes a method for manufacturing a magnetoresistive effect type magnetic head capable of obtaining a magnetic head.
第２図（イ）及び（ロ）は夫々この発明により製造した
磁気ヘツドの１実施例を示すものであり、（1a），（1
b）はサフアイア、Al2O3−TiC等でなる一対の非磁性基
板、（2a），（2b）は非磁性基板（1a），（1b）の対向
面に形成された磁束引込部となる金属磁性薄膜、（３）
は磁性薄膜（2a），（2b）の後端に連設されたパーマロ
イ等の磁気抵抗効果（MR効果）を有する磁性薄膜、
（４）は非磁性基板（1a），（1b）をその金属磁性薄膜
（2a），（2b）側で接合するガラス、（6a），（6b）は
アルミニウム等の金属導電体による磁性薄膜（３）のリ
ード線である。FIGS. 2 (a) and 2 (b) show one embodiment of the magnetic head manufactured by the present invention, respectively. (1a), (1)
b) is a pair of non-magnetic substrates made of sapphire, Al 2 O 3 —TiC, etc., and (2a) and (2b) are magnetic flux drawing parts formed on the facing surfaces of the non-magnetic substrates (1a) and (1b). Metal magnetic thin film, (3)
Is a magnetic thin film having a magnetoresistive effect (MR effect) such as permalloy, which is continuously provided at the rear ends of the magnetic thin films (2a) and (2b),
(4) is glass that joins the non-magnetic substrates (1a) and (1b) on the metal magnetic thin films (2a) and (2b) side, and (6a) and (6b) are magnetic thin films made of a metal conductor such as aluminum ( It is the lead wire of 3).
次に、以上の構成を有する磁気ヘツドを製造するための
この発明による製造方法を第３図乃至第７図について説
明する。Next, the manufacturing method according to the present invention for manufacturing the magnetic head having the above structure will be described with reference to FIGS.
まず、第３図（イ）及び（ロ）に示すように、長方形の
板状非磁性基板（1a）の上面にセンダスト等の耐熱性を
有する金属磁性薄膜（2a）をスパツタ等で形成し、次い
でスパツタエツチ等の写真製版技術を利用して所定の磁
気媒体のトラツク幅に応じた形にパターンニングする。First, as shown in FIGS. 3A and 3B, a metal magnetic thin film (2a) having heat resistance such as sendust is formed on the upper surface of a rectangular plate-shaped nonmagnetic substrate (1a) by a spatula or the like, Then, using a photolithography technique such as a spatula etch, patterning is performed in a shape corresponding to the track width of a predetermined magnetic medium.
また、他方の非磁性基板（1b）の上面に、第４図（イ）
及び（ロ）に示く如く所定間隔でＶ字状溝（７）を形成
し、これにセンダスト等の耐熱性を有する金属磁性薄膜
（2b）をスパツタ等で形成し、次いでスパツタエツチ等
の写真製版技術を利用して所定の形にパターンニングす
る。On the upper surface of the other non-magnetic substrate (1b), as shown in FIG.
As shown in (b) and (b), V-shaped grooves (7) are formed at predetermined intervals, and a metal magnetic thin film (2b) having heat resistance such as sendust is formed on this with a spatter, and then a photoengraving method such as a spatter etch. Using technology to pattern into a predetermined shape.
その後、両非磁性基板（1a），（1b）を、それらに形成
した金属磁性薄膜（2a），（2b）を対向させて配置し、
ガラスボンデイング等の接合手段で第５図に示すように
接合する。After that, both non-magnetic substrates (1a) and (1b) are placed with the metal magnetic thin films (2a) and (2b) formed thereon facing each other,
Bonding is carried out by a bonding means such as glass bonding as shown in FIG.
次いで、接合した基板（1a），（1b）を、第５図で１点
鎖線で示す位置で切断し、その端面を研摩して第６図に
示す磁束引込コア部内蔵基板（８）を得る。Next, the joined substrates (1a) and (1b) are cut at the position shown by the alternate long and short dash line in FIG. 5, and the end faces thereof are polished to obtain the substrate (8) with a built-in magnetic flux drawing core portion shown in FIG. .
次いで、磁束引込コア部内蔵基板（８）の裏面に、パー
マロイ等のMR効果を有する磁性薄膜（３）を蒸着等によ
り形成し、次いで磁性薄膜（３）にリード線（6a），
（6b）をボンデイングして第７図に示すように目的とす
る磁気ヘツドを製造する。Next, a magnetic thin film (3) having an MR effect, such as permalloy, is formed on the back surface of the substrate (8) with a built-in magnetic flux attraction core by vapor deposition or the like, and then the lead wire (6a),
Bonding (6b) produces the desired magnetic head as shown in FIG.
なお、上記実施例においては、２チヤンネルの磁気ヘツ
ドを製造する場合について説明したが、これに限定され
るものではなく、第３図及び第４図における金属磁性薄
膜（2a），（2b）の幅及び数を任意に選定することによ
り、１チヤンネル以上任意数チヤンネルの磁気ヘツドを
製造することができる。In addition, in the above-mentioned embodiment, the case of manufacturing the magnetic head of 2 channels has been described, but the present invention is not limited to this, and the magnetic magnetic thin films (2a) and (2b) in FIG. 3 and FIG. By arbitrarily selecting the width and the number, it is possible to manufacture a magnetic head having one channel or more and an arbitrary number of channels.
この発明は以上説明したとおり、予め一対の非磁性基板
上に耐熱性を有する金属磁性薄膜を成膜して成る磁束引
込コアを内蔵した磁束引込コア内蔵基板を作製した後、
この磁束引込コア内蔵基板上にパーマロイ等の耐熱性の
低い磁気抵抗効果を有する磁性薄膜を成膜するようにし
たので、磁気媒体と摺接する磁束引込コア部内蔵基板を
ガラスボンデイング等の加熱を必要とする接合によつて
形成することが可能となり、磁気媒体との摺接部の耐摩
耗性を確保することができ、しかも磁気抵抗効果を有す
る磁性薄膜の熱による劣化を確実に防止して高精度で耐
摩耗性の高い磁気ヘツドを製造することができるという
効果がある。As described above, after the magnetic flux pull-in core built-in substrate having the built-in magnetic flux pull-in core formed by depositing a heat-resistant metal magnetic thin film on a pair of non-magnetic substrates in advance, as described above,
Since a magnetic thin film having a low heat resistance, such as Permalloy, having a magnetoresistive effect is formed on the substrate with a built-in magnetic flux drawing core, it is necessary to heat the substrate with a built-in magnetic flux drawing core part that makes sliding contact with the magnetic medium, such as glass bonding. It is possible to secure the abrasion resistance of the sliding contact portion with the magnetic medium, and to reliably prevent the deterioration of the magnetic thin film having the magnetoresistive effect due to the heat, and to improve the abrasion resistance. There is an effect that a magnetic head with high accuracy and high wear resistance can be manufactured.
また、磁気媒体上の記録情報を再生するトラツク幅は、
磁束引込部となる磁性薄膜の幅で規制することができ、
これらは写真製版による高精度な加工を期待できるの
で、高精度の磁気ヘツドを製造することができる効果が
ある。The track width for reproducing the recorded information on the magnetic medium is
It can be regulated by the width of the magnetic thin film that becomes the magnetic flux drawing part,
Since these can be expected to be processed with high precision by photolithography, there is an effect that a magnetic head with high precision can be manufactured.
第１図は従来の磁気抵抗効果型磁気ヘツドを示す断面
図、第２図（イ）及び（ロ）は夫々この発明により製造
した磁気抵抗効果型磁気ヘツドを示す断面図及び平面
図、第３図（イ）及び（ロ）はこの発明による製造工程
の途中状態を示す側面図及び平面図、第４図（イ）及び
（ロ）は同様に製造工程の途中状態を示す側面図及び平
面図、第５図、第６図及び第７図も夫々この発明による
製造工程を示す側面図、斜視図及び最終段階の斜視図で
ある。 図において、（1a），（1b）は非磁性基板、（2a），
（2b）は金属磁性薄膜、（３）は磁気抵抗効果を有する
磁性薄膜、（４）は樹脂接着層、（6a），（6b）はリー
ド線、（８）は磁束引込コア部内蔵基板である。 なお、各図中同一符号は同一または相当部分を示すもの
とする。FIG. 1 is a sectional view showing a conventional magnetoresistive effect type magnetic head, and FIGS. 2 (a) and 2 (b) are sectional views and plan views showing a magnetoresistive effect type magnetic head manufactured by the present invention, respectively. FIGS. 4 (a) and 4 (b) are side views and plan views showing an intermediate state of a manufacturing process according to the present invention, and FIGS. 4 (a) and 4 (b) are side views and a plan view similarly showing an intermediate state of a manufacturing process. 5, 6, and 7 are respectively a side view, a perspective view and a final stage perspective view showing a manufacturing process according to the present invention. In the figure, (1a), (1b) are non-magnetic substrates, (2a),
(2b) is a metal magnetic thin film, (3) is a magnetic thin film having a magnetoresistive effect, (4) is a resin adhesive layer, (6a) and (6b) are lead wires, and (8) is a substrate with a built-in magnetic flux drawing core. is there. In the drawings, the same reference numerals indicate the same or corresponding parts.
Claims (1)
み接合してなる磁束引込コア部と、当該磁束引込コア部
上に設けられた磁気抵抗効果を有する金属磁性薄膜とか
ら成る磁気ヘッドの製造方法において、一対の非磁性基
板上に夫々耐熱性を有する金属磁性薄膜をスパッタ等で
成膜し、当該金属磁性薄膜を写真製版した後に両者の成
膜面を対向させてガラスボンディングを用いて接合して
から切断して磁束引込コア部内蔵基板を作製し、該磁束
引込コア部内蔵基板上に上記金属磁性薄膜に連設させて
磁気抵抗効果を有する金属磁性薄膜を成膜することを特
徴とする磁気抵抗効果型磁気ヘッドの製造方法。Claim: What is claimed is: 1. A magnetic device comprising a magnetic flux lead-in core part formed by sandwiching and joining a non-magnetic member between a pair of magnetic metal thin films, and a magnetic metal thin film having a magnetoresistive effect provided on the magnetic flux lead-in core part. In the head manufacturing method, a metal magnetic thin film having heat resistance is formed on each of a pair of nonmagnetic substrates by sputtering or the like, and the metal magnetic thin film is photoengraved, and then both film forming surfaces are opposed to each other to perform glass bonding. Bonding and then cutting to produce a substrate with a built-in magnetic flux attraction core portion, and forming a metallic magnetic thin film having a magnetoresistive effect on the substrate with a magnetic flux attraction core portion by connecting to the metallic magnetic thin film. And a method of manufacturing a magnetoresistive effect magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59105139A JPH0786969B2 (en) | 1984-05-24 | 1984-05-24 | Method of manufacturing magnetoresistive effect magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59105139A JPH0786969B2 (en) | 1984-05-24 | 1984-05-24 | Method of manufacturing magnetoresistive effect magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60247818A JPS60247818A (en) | 1985-12-07 |
| JPH0786969B2 true JPH0786969B2 (en) | 1995-09-20 |
Family
ID=14399416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59105139A Expired - Lifetime JPH0786969B2 (en) | 1984-05-24 | 1984-05-24 | Method of manufacturing magnetoresistive effect magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0786969B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133818A (en) * | 1974-04-09 | 1975-10-23 | ||
| JPS5758222A (en) * | 1980-09-25 | 1982-04-07 | Fujitsu Ltd | Magnetic head |
-
1984
- 1984-05-24 JP JP59105139A patent/JPH0786969B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60247818A (en) | 1985-12-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |