JPH076939A - production management system - Google Patents

Abstract

(57) [Summary] (Correction) [Constitution] Connection between multiple processing equipment and transfer handling equipment and utilities in the microfabrication processing process that requires cleanliness, such as semiconductor production, and computer, and connection In the information system that manages the operation of the various equipment groups by the computer, the management control information of the production line is instructed and displayed to the equipment and utilities for each site office, work area, maintenance area where the areas are separated by cleanliness. do. [Effect] The information handling operation required for the production line management control is facilitated, and the real-time property and the response performance can be secured, so that it is possible to quickly respond to changes in the production line. As a result, not only can productivity and quality be improved, but the range of applications of this information system can be extended to production management control of multiple products.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production control system suitable for a semiconductor production system which is a representative of a microfabrication workplace, for example.

[0002]

2. Description of the Related Art Regarding the conventional FA technology for semiconductors, JMA Production Management July 1990 issue (refer to MITSUBISHI ELECTRIC TECHNIQUE, Vol.63, No.11, 1999, entitled "Semiconductor FA Technology") JMA PRODUCTION MANA
Published in GEMENT JULY 1990) entitled "FA for Semiconductor Factories with Complex Manufacturing Processes and Many Changes", Japanese Patent Publication No. 64-6
540, JP-A-63-57158 and JP-A-2-117512
An automated line and its management control system as described in Japanese Patent Laid-Open Publication No. 2003-242242 are known.

[0003]

Although the above-mentioned prior art discloses the contents related to the production line, in the management of a factory or a production line consisting of a plurality of areas having different cleanliness, an atmosphere having different cleanliness (example -Transportation between areas with atmosphere etc. has problems in terms of workability, initial cost of clean room construction and its operating cost, and quality.

The present invention maintains a different cleanliness atmosphere (eg, the atmosphere of cleanliness graph 1) near the boundary surface of the regions having different cleanliness required as the worker or product moves between the regions. Therefore, the complexity of preparatory work can be reduced, and the management and control system necessary for product progress control and instructions regarding the operation and maintenance of processing equipment can be operated easily and quickly as needed, contributing to improved production efficiency. It is an object of the present invention to provide a production management system necessary for management control of a production line including a plurality of areas having different cleanliness levels.

[0005]

In order to achieve the above-mentioned object, the present invention provides a product line in which a material is loaded from the outside and processed in the cleaning area to produce a product, and the product is processed according to the degree of cleanliness. First to process the material that separates the area
Area, a second area for maintaining the material processing equipment, a third area for managing and controlling the processing status of the equipment and the material, and a fourth area for managing the production of the material up to the product. Focusing on different management purposes for each area, the first area is provided with means for displaying work instructions to the material processing equipment, and the second area is provided with maintenance and inspection instructions for the material processing equipment. Display means, work instructions and display means for a series of material processing equipment groups in the third area, and production control such as work-in-process status yield to product or yield in the fourth area. Equipped with instructions and display means.

[0006]

According to the present invention, a work area, a maintenance area, a site office, and a factory management office, which are separated from each other by cleanliness, are required to grasp necessary conditions and perform work according to the management purpose in each area. Since instructions can be given, in addition to improving production efficiency due to unsuitable and quick work instructions within an area, the number of movements of workers or products (or materials) between areas can be reduced.

As a result, it is possible to reduce the preparatory work by the air shower required for the movement between areas, and to reduce the entrance / exit facility and its operating cost, which are required accordingly. or,
According to the management purpose for each area, a system with independent and distributed management / control system functions facilitates system construction and achieves reliability and expandability.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an outline of the overall layout of a production site (or line) for semiconductors, for example. Generally, in the production of semiconductors, a material (wafer) is put into a line, and a circuit product and a film forming process are repeated to make a finished product on the wafer. Then, a non-defective product (finished product) is cut out from the chip by a product characteristic determination test, a product test is performed after sealing and assembling, and the finished product is selected and shipped.

Usually, the whole surface wafer, which is a material, is put in a carrying cassette and carried from the manufacturer to the factory by a truck, and after cleaning to remove foreign matters attached to the portion exposed to the outside air, for example, 2 Ground floor office 14
Storage / stocker 13 near the office
The entire front surface wafer, which is the material, is moved to. The moved mirror-finished wafer is automatically transferred from the loading / unloading stocker 13 to the line loading / unloading stocker 12 via the elevating device 6 and temporarily stored. Then, according to the production plan, the lot (product) that is the transport, storage, and treatment unit after the surface oxidation treatment in the first process is a management unit.
Then, a lot having a predetermined daily input amount is generated, placed in a wafer case, and re-stocked.

Many semiconductor production lines adopt a job shop production mode in which a group of facilities having the same type of processing function are collected, and for example, a stocker 1 such as a work area 11 where high cleanliness is required, The in-area robot 9 and a plurality of in-area facilities 8 form one shop.
Then, a work area 11 'having other process processing functions is installed as necessary, and according to regulations such as the Fire Service Act,
For example, a line in which a fire wall 10 as shown in the figure is provided in a unit of a designated area such as 1500 m ² , 2000 m ² , 3000 m ² is constructed. Since this fire wall must completely isolate the work area in the event of a fire, etc., it is for laminar flow parts that maintain the cleanliness of the air above and below the floor, the inter-process transport rail 2 and workers. The passage can be shut off immediately. Between the work areas 11 and 11 ', a closed-loop traveling path is constituted by the inter-process transportation rail 2 and the turning device 5, and the transportation vehicle 3 runs on the closed transportation path to automatically transport the product. When the product is transported, the transport control device 7 performs efficient transport control in response to the transport request, and the transport vehicle 3 that has arrived at the transport destination is
The shifter 4 moves to the doorway of the stocker 1 to move the product to the stocker.

The product stored in the stocker 1 is transported to a required in-area processing facility 8 via an in-area transfer system which is an in-area robot 9 in response to a processing request. Then, when the processing in this equipment is completed, it can be stored again in the stocker 1 via the intra-area transport system, and further can be delivered via the intra-passage transport system or directly to the adjacent work area in the stocker. The stocker 15 conveys the product to the stocker in the work area of the next process. Then, the work procedure for performing the next process is repeated through the intra-area transport system to transport the product to the stocker which is the final process. Also in this final step, the product is processed through the in-area transfer system, then returns to the stocker again, leaves the closed loop transfer system, and is transferred to the line loading / unloading stocker 12 to the work office 14 via the lifting device 6. It is stored in a certain office loading / unloading stocker 13 and is appropriately carried out for inspection of non-defective products.

In this way, the transport system in the area is dispersed,
By installing them individually, automation can be built sequentially for each work area, and automation can be developed as needed.

As a result, in the work areas 11 and 11 ', automation and manual work can be mixed.

FIG. 2 is a diagram showing an example of arrangement of transport systems between different clean rooms which are spatially separated. For example, the clean room (1) 1 is composed of a job shop type equipment layout as shown in FIG. 1 and a work area 7 having a high degree of cleanliness with respect to the central passage and a maintenance area 8 for equipment maintenance. In this clean room (1) 1,
In addition to the clean staircase 14 that communicates with the downstairs, a work office 9 that manages the work area 7, a material warehouse 11 that stores materials and jigs, and an air shower room 1 for entering and leaving workers
0, central entrance / exit 16 for loading / unloading materials / jigs and finished products
There is. The clean room (2) 2 also has a work area 7 '.
Besides, an air shower room 10 'and a work room 9'are arranged, and a passage 12, a break room 15 and a utility 13 for the entire building are provided between the two different clean rooms.

Further, there are a stocker (1) 3 in the clean room (1) 1 and a stocker (2) 4 in the clean room (2) 2, and the space between them is connected by an overhead traveling type inter-clean room transfer system 5. An example is shown. As in the case of FIG. 1, the transfer system 5 between clean rooms stores, for example, the products completed in the clean room (1) 1 in the stocker (1).
When the product is stored in the wafer case and then sent to the next clean room (2) 2 step as needed, the product is stored in a wafer case and then mounted on the transfer vehicle 6, and transferred via the inter-clean room transfer system 5 to the stocker ( 2) Transport to 4. And it can be used for product recycling work and empty case return as well.

FIG. 3 is a view showing an arrangement example of the inter-clean room transfer system which is separated in the vertical direction. This is a clean room (1F) 9 and a clean room (2
(F) The lifting device 2 is installed between 7 and the clean room (1
F) 9 stocker (3) 3 and clean room (2F) 7
This is an example in which the stocker (1) 1 is installed. For example, the product that has been processed in the work area of the clean room (2F) 7 is transported by the transport vehicle 5 via the inter-process transport rail (1) 4 and sent to the stocker (1) 1 by the shifter 6 for storage. . And, if necessary, a carrier 5 carrying the product.
Is sent to the clean room (1F) 9 by the shifter 6 and automatically transferred as it is via the inter-process transfer rail (2) 8. With such a transfer facility, not only the first and second floors but also the clean rooms on the upper and lower floors can be efficiently transferred. This transport system not only reduces the preparation time and the number of man-hours and personnel required for a worker to pass through the air shower room twice between work areas that require high cleanliness, but also shortens the transportation time. When the equipment capacity shortage occurs due to equipment failure, production that effectively uses the capacity of the processing equipment of other lines and the flow between two clean rooms as a pseudo work process like one work area Can be realized. As a result, the waiting time can be reduced and the production period can be greatly shortened as compared with the conventional method.

FIG. 4 is a view conceptually showing a part of a building divided into regions having different cleanliness, regarding the relationship between the overall processing flow and the buffer function. Processes such as semiconductors where the processing time differs greatly, for example, one work area for film formation, photolithography, etching, and implantation
The buffer function is effective when -1, 1-2, 1-3, 1-4 are repeatedly produced as shown by solid arrows. Then, the stockers 2-1 and 2 provided in each process
When the stock capacity exceeds 2-2, 2-3, 2-4, the production is managed and controlled while the capacity of the entire line is adjusted while temporarily retracting it in the central buffer stocker 3 as indicated by the dashed arrow. To do. Further, there is a case where a work cannot be performed due to equipment trouble or insufficient capacity, or a production request is made on another line 4 due to the load on the building structure and restrictions on the atmosphere of cleanliness due to the weight of the equipment. After the process processing is completed, the products are sent to the assembly process 5, which is the final process such as the test process, and the products are selected by the characteristic evaluation of the finished products. Stockers 2-1, 2-3, 2-4
Adjusts the processing time between processes with different processing times to perform leveled production to eliminate the dango state, adjusts the capacity of equipment, stockers, and transfer systems, and adjusts the cyst difference and capacity between lines with different cleanliness areas. Used for adjustment. In addition, by changing the starting order of products to recover troubles such as equipment failure and production delays due to poor quality, we can comply with the customer delivery date and the buffer stocker replenishes the physically limited stocker capacity. It is also used as a means of. As a result, it is possible to make a multi-product product simultaneous production line. Further, by optimizing the buffer capacity, it is possible to reduce the number of work in process and shorten the production period. In addition, it is possible to reduce the variation in the production period due to thorough first-in first-out management.

FIG. 5 shows the overall configuration of the information system. This information system includes a line controller 9, a process management controller 10, an equipment management controller 11, a shop controller 12, a line status monitoring controller 13, and a work area necessary for managing a production site including a site office 1 and a production line 2. 3 within the maintenance area and utility 4 within process equipment 5.5 '.
5 ″ ... an area stocker 6, an inter-area transfer system 7, and an in-area robot 8 are connected to each other, and a production management network 15 and an announcement network 1 are provided for giving instructions necessary for production.
6, utility management network 17, area controller 22, in-area facility network 20, in-area utility net 21, work instruction / result input terminal 23, maintenance instruction / result input terminal 24, utility monitoring / result input terminal 25, inter-area It comprises a transport controller 26, a large-scale dynamic display device 27 capable of collectively grasping the status of products in the line, and an announcement equipment 28.

Further, there is an integrated management controller 18 for integrated management of the production line group including the other work offices 1 '. The integrated management controller 18 performs efficient management by using, for example, an off-site network 19 for grasping and reporting the status of a physically distant production site, etc. in addition to the receipt and delivery of order information and the completion record for each product. .

This production site manages the production line 2,
For example, a semiconductor line work room 2 is composed of a highly controlled work area 3, a maintenance area for supporting the work, and a utility 4.

Specifically, the equipment required for production is provided in the production line 2, for example, in the area equipment group 5.5 '. 5 ″ ... Equipments having the same kind of processing function are gathered and arranged to provide a work area 3 capable of maintaining high cleanliness only in the product processing area, and the products are manufactured while repeating the processing sequentially according to the processing order of the products. For loading and unloading finished products, the field office 1
There are also things to do through.

Then, like the equipment group 5'in the area,
In the area automated by the in-area robot 8, the products transferred by the inter-area transfer system 7 and stored in the area stocker 6 are automatically unloaded, and are automatically transferred by the in-area robot 8 to the in-area equipment 5 ′, for example. And after the processing is completed,
Return to the in-area stocker 6 and the area stocker 6 in the next process
Transport to.

Further, in an area centered on manual work such as the facility 5 side in the area, an operator selects from a plurality of products stored in the area stocker 6 a work instruction / actual result input terminal 2
An issue instruction is issued from 3, and after the processing is completed, the work record is again stored in the work instruction / record input terminal 23 and stored in the stocker. Then, the finished product is conveyed to the area stocker 6 in the next process.

In this case, all the areas may be automated, or conversely, only manual work may be performed, or both areas may be mixed. Also, when the area stocker 6 and the inter-area transfer system 7 are provided, conversely, a combination of only manual transfer or only the area stocker 6 may be considered.

Here, the in-area equipment group 5 ', the area stocker 6, and the in-area robot 8 are connected to the area controller 22 via the in-area equipment network 20, and the area controller 22 selects and ships products. Instructions, in-area transportation, work condition instructions, processing instructions, collection of collection results, warehousing, and unloading instructions from the area stocker 6 are given. For example, as shown in the transportation route example 29, while the equipment can be automatically transported, the in-area facility group 5 in an area that is not automated selects and transports a product via an operator,
Input work conditions, instruct processing, collect, record results, and store. With the work instruction / actual result input terminal 23 in the automation area, for example, when manual work occurs in an emergency such as a failure of equipment or transportation / hunting, it is possible to input a work instruction or result.

The maintenance instruction / actual result input terminal 24 provided in the maintenance area and the utility 4 is mainly used for instruction of equipment maintenance and actual result of maintenance work.

On the other hand, the shop controller 12 which has received from the area controller 22 the information on the products which have been processed in the area through the production management network 15.
In addition to the latest work rules, condition management and product process tracking, the next process area is determined according to the operating status of the product area equipment group 5.5 '... Send to the controller 26. Upon receiving the transfer request, the inter-area transfer controller 26 determines the operation in consideration of transfer efficiency and the in-process status of the area stocker 6, and sequentially issues a transfer instruction to the products with each transfer request, between the inter-area transfer systems 7. And send it to.

At the same time, the production management network 1
Line controller 9, process management controller 10, equipment management controller 1 that received the product completion report in 5.
First, in addition to the progress status of the product, the line status such as the operating status of the equipment, stocker, robot, etc., and the material consumption status are constantly grasped, and management is performed so as not to cause a serious trouble.

The line controller 9 manages all information (for example, product name, process sequence, operating equipment, work record, equipment history, etc.) related to products and equipment on the production site, and further, the in-process status of the product. And the result is constantly displayed on the large-scale dynamic display device 27. Then, the manager of the field office 1 and the person in charge of the production line 2 are provided with the information necessary for considering the daily production strategy. Since the large-scale dynamic display device 27 can display the work in progress of the entire line in real time, it may be installed in the work area 3. However, in this case, the purpose of use is different from the case of the field office 1, and the work to be performed next is determined and confirmed. The process management controller 10 manages the working conditions necessary for the product, and also performs a condition search, an experimental plan, and a condition instruction resulting from the result in order to optimize the conditions.

The equipment management controller 11 calculates the equipment capacity required for production progress control from work results, work conditions, etc., calculates a management standard for maintaining the maximum performance of the equipment, and gives an appropriate instruction such as maintenance.・ Provide countermeasure instructions.

The line status monitoring controller 13 constantly grasps the progress status of products and the operating status of equipment, and issues an alarm and gives a quick countermeasure instruction when an abnormality such as yield maintenance or equipment trouble occurs. Specifically, an appropriate instruction to the equipment maintenance department and an alarm to the production line can be notified via the announcement network 28 through the announcement network 16.

The integrated management controller 18 manages the production performance up to the present, which is managed by the line controller 9 of each production site, for example, the work in progress and the output, and future prediction data, via the production management network 15. In addition to obtaining and managing the situation of the entire factory, integrated management of future plans and countermeasures will be performed. In addition, when an emergency is required to take measures to spread the occurrence of an abnormality at another production site to the entire factory, the announcement network 16
It is also possible to ensure safety by making an emergency announcement or the like to the production site via the.

Maintenance and management of utilities such as chemicals, gas, and pure water necessary for maintaining the facility group 5 in the area are important from the viewpoint of safety. Therefore, utility management equipped with sensors that can detect the impact on the work environment
A performance input terminal 25 is installed in each area to keep track of the current situation, and a dedicated utility management network 17
To the utility management controller 14 via. For example, when an abnormality is sensed, an alarm is issued from the utility management / actual result input terminal 25 arranged in each area, and a speaker or an announcement device 28 installed in each area of the line is passed through the announcement network 16 Abnormalities can be transmitted to workers and managers, and blame instructions and countermeasure instructions can be promptly issued.

In this way, the field office 1 and the production line 2
And, each controller can be distributed and arranged other than the production site, and the input / output terminals required for each controller can be provided. Also, an area facility network 20, an area utility network 21, a utility management network 17, and an announcement network 1
6. By hierarchizing the production management network 15 and the off-premise network 19, the system can be expanded not only to other production sites but also to automated construction at the production sites one after another, so that the system is highly expandable. Also, the production management network 15, the announcement network 16, and the utility management network 17 are provided according to the application, and the decentralization of each controller makes it possible to suppress the responsiveness within a certain time, and the CI with high reliability is provided.
It becomes possible to construct M.

Table 1 concretely shows display contents and announcement contents according to the management level. This is classified into other than the production site shown in FIG. 5, a site office 1, a production line 2, a work area 3, a maintenance area, and a utility 4. In semiconductor production, the degree of cleanliness varies depending on the above area, and the contents of display / announcement correspond to the management purpose.

[0036]

[Table 1]

As a result, the display method and terminal suitable for the management purpose can be selected, and safe work instructions with few mistakes can be given, so that the work morale is improved. As a result, productivity is improved and management effects such as shortening the production period are also improved.

FIG. 6 is one of display examples when a daily production strategy is planned in the field office 1 which controls and controls the production line. When it comes to volume, in-process management, and delivery date management, a macro display of actual results for each shop and the total number of lots with late delivery dates is used to grasp the problem as a whole. Specifically, the neck process is extracted to perform capability measures and priority management, or the delayed lot is extracted and changed to an express work instruction (express lot) to give a measure instruction that can achieve the production target. This allows
The manufacturing period can be shortened and the variation can be reduced for management.

FIG. 7 is one of the display examples for inputting the production target decided in FIG. As a result, the daily production target can be surely transmitted as an instruction to the worker, so that the budget can be achieved and the over-production can be prevented.

FIG. 8 is one example of a display regarding a construction start instruction at the facility. This is especially effective when the equipment used in the neck process, which is the priority management target, is effectively used. This makes it possible to maximize the performance of the neck process, improve productivity, and shorten the manufacturing period. The symbol X is an alphanumeric character, and the symbol 99 is a symbol indicating a number.

FIG. 9 is one of the display examples when the worker performs the work. Since the starting order of the lots to be started is shown for each equipment number, reliable work can be performed both manually and automatically.

FIG. 10 shows the flow of air in the production line. This figure shows a cross-section parallel to the central aisle, which is a workplace with similar collection of processing equipment. The bay 1 is provided with a HEPA filter 2 on the ceiling, a grating 3 is provided on a part of the floor, and a fan 4 blows air to create a uniform flow of clean air from the ceiling to the floor.

The periphery of the bay 1 is surrounded by a partition 5, the processing devices 7 are arranged in the processing regions 6 on both sides, and the part for loading and unloading the products to the processing device 7 is directed to the central working region 8. In the central work area 8, an automated guided vehicle or a worker carries the product between the processing devices 7. The dust generated during the product conveyance by the automatic conveyance is immediately removed to the bottom of the floor through the grating 3 and the contamination of the product processing area can be prevented. Perform maintenance work between bay 1 and the adjacent bay. Establish a conservation area 9. Conservation area 9
Then, the person in charge of maintenance carries out maintenance such as supply of materials, periodical inspection and replacement, and repair to the processing device 7.

In the maintenance area 9, the clean air flowing under the floor in the adjacent bay 1 flows back toward the suction port of the fan 4, and the clean air flows from the floor to the ceiling. In the conservation area, dust generated in bay 1 passes through and dust is generated during maintenance work as well, so the degree of cleanliness is lower than in bay 1, but
There is no problem because it is isolated from the product.

Since the bay 1 and the maintenance area are alternately arranged adjacent to each other, the path through which clean air circulates is shortened, and the power of the fan 4 can be reduced. Further, in order to supplement the circulating clean air, the air in which the outside air is conditioned is supplied from the outside of the clean room by the duct 10.

[0046]

According to the present invention, the function of management control of the production line is decentralized, and a distributed system is provided in which necessary information can be instructed and transmitted at any time according to the management of the area isolated by cleanliness. As a result, it becomes easy to secure real-time performance and response performance, and it becomes possible to respond to changes in the production line in addition to securing work safety. as a result,
Not only can productivity and quality be improved, but the range of applications can also be expanded to production management control of multi-product products.

Further, according to the present invention, it is possible to realize a production management system for controlling the production line consisting of a plurality of areas having different cleanliness extremely efficiently.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a production line in an embodiment of a production management system of the present invention.

FIG. 2 is a horizontal plan view of an inter-line transfer system in one embodiment of the production management system of the present invention.

FIG. 3 is a vertical perspective view of an inter-line transfer system in an embodiment of the production management system of the present invention.

FIG. 4 is a diagram showing an overall processing flow in one embodiment of the production management system of the present invention.

FIG. 5 is a perspective view of an embodiment of the production management system of the present invention.

FIG. 6 is a diagram showing a display example of a display device used in the present invention.

FIG. 7 is a diagram showing a display example of a display device used in the present invention.

FIG. 8 is a diagram showing a display example of a display device used in the present invention.

FIG. 9 is a diagram showing a display example of a display device used in the present invention.

FIG. 10 is a cross-sectional view showing the flow of air in a clean room in an example of the production management system of the present invention.

[Explanation of symbols]

1] Stocker 2 ... Inter-process transport rail 3 ... Transport vehicle 4 ... Shifter 5 ... Swing device 6 ... Lifting device 7 ... Transport control device 8 ... In-area equipment 9 ... In-area robot 10 ... Firewall 11 … Work area 12… Line entry / exit stocker 13… Office entry / exit stocker 14… Work office

[Fig. 2] 1 ... Clean room (1) 2 ... Clean room (2) 3 ... Stocker (1), 4 ... Stocker (2) 5 ... Clean room transfer system 6 ... Vehicle 7 ... Work area, 8 ... Maintenance area, 9 ... Work office 10 ... Air shower room, 11 ... Material warehouse 12 ... Aisle, 13 ... Utility, 14 ... Cleaning stairs, 15 ... Break room 16 ... Center Doorway

[FIG. 3] 1 ... Stocker (1) 2 ... Lifting device 3 ... Stocker (3) 4 ... Inter-process transport rail (1) 5 ... Transport vehicle 6 ... Shifter 7 ... Clean room (2F) 8 ... Inter-process transport rail (2) 9 ... Clean room (1F)

4 is a film-forming process, 1-2 is a photolithography process, 1-3 is an etching process, 1-4 is an implantation process, 2-1, 2-2, 2-3, 2-4 ... is a stocker. 3 ... Buffer stocker 4 ... Other line 5 ... Assembly process E

[Fig. 5] 1 ... Field office 2 ... Production line 3 ... Work area 4 ... Maintenance area and utility 5 ... Process equipment 6 ... Area stocker 7 ... Inter-area transfer system 8 ... Area robot 9 ... Line controller 10 ... Process management Controller 11 ... Facility management controller 12 ... Shop controller 13 ... Line status monitoring controller 14 ... Utility management controller 15 ... Production management network 16 ... Announcement network 17 ... Utility management network 18 ... Integrated management controller 19 ... External network 20 ... Area Internal equipment network 21 ... In-area utility network 22 ... Area controller 23 ... Work instruction / result input terminal 24 ... Maintenance instruction / result input terminal 25 ... Utility monitoring Record input terminal 26 ... area between the transport controller 27 ... large dynamic display device 28 ... announcement equipment 29 ... carriage route example

[FIG. 10] 1 ... Bay (unit of workplace where similar processing equipment is collected) 2 ... HEPA filter 3 ... Grating (floor) 4 ... Fan 5 ... Partition 6 ... Processing area 7 ... Processing device 8 ... Working area 9 ... Maintenance area 10 ... Duct

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Sadao Sadao 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa, Ltd., Institute of Industrial Science, Hitachi, Ltd. 20-1 Stock Hitachi Ltd. Semiconductor Division (72) Inventor Koichi Kubo 5-20-1, Kamisuihonmachi, Kodaira-shi, Tokyo Stock Hitachi Ltd Semiconductor Division (72) Inventor Yugen Matsuo Kameda, Hokkaido One day at 145 Nakajima, Nanae, Gunma-cho, Northeast Semiconductor Co., Ltd. (72) Inventor Yoshiaki Nakamura One day at 145 Nakajima, Nanae, Kameda-gun, Hokkaido

Claims (4)

[Claims] 1. In a production line in which a material is brought in from the outside and the material is processed in a clean area having a high degree of cleanliness to produce a product, a first area for processing the material and a material processing facility or Supply air, certain liquid, pure water, waste gas, waste liquid, etc.
The first area comprises a second area for maintaining the equipment to be recovered, a third area for managing and controlling the processing status of the equipment and materials, and a fourth area for managing the production of materials up to products. The area is provided with a means for giving a work instruction and display to the material processing equipment, the second area is provided with a means for giving a maintenance inspection instruction and a display of the material processing equipment, and the third area is provided. Is equipped with a means capable of giving work instructions and indications to a line consisting of a series of material processing equipment groups, and in the fourth area, material input is production management such as work-in-progress of the products, yield, yield, etc. A production management system, which is equipped with means for displaying, indicating and displaying. 2. The production according to claim 1, wherein the fourth and third regions according to claim 1, the second region, and the first region are set in order of an environment or atmosphere having a high degree of cleanliness. Management system. 3. Each display means arranged in each area is connected to each control means, and each control means is also arranged in each area corresponding to each connected display means. The production management system according to claim 1 or 2, which is characterized. 4. The production management system according to claim 1, 2 or 3, wherein a voice generating means is provided in each area.