JPH0760630A - Surface grinding machine - Google Patents
Surface grinding machineInfo
- Publication number
- JPH0760630A JPH0760630A JP5212499A JP21249993A JPH0760630A JP H0760630 A JPH0760630 A JP H0760630A JP 5212499 A JP5212499 A JP 5212499A JP 21249993 A JP21249993 A JP 21249993A JP H0760630 A JPH0760630 A JP H0760630A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- grinding
- curved surface
- medium sliding
- grindstone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気ヘッド等のR研削を
行う研磨装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing device for performing R grinding on a magnetic head or the like.
【0002】[0002]
【従来の技術】一般に磁気ヘッドの製造工程においては
特開昭60−141465号公報記載内容のいわゆる円
筒研削盤が知られている。磁気テープ等の磁気記録媒体
と接触する磁気ヘッドの媒体摺動面のR曲面形成機械加
工は図5の模式図に示すように磁気ヘッドの媒体摺動方
向と同軸方向に回転する砥石によりR曲面の形成を行う
研削加工が行われている。2. Description of the Related Art Generally, a so-called cylindrical grinder disclosed in JP-A-60-141465 is known in the manufacturing process of a magnetic head. As shown in the schematic diagram of FIG. 5, the machining of the R curved surface of the medium sliding surface of the magnetic head that comes into contact with the magnetic recording medium such as the magnetic tape is performed by the R curved surface by the grindstone rotating in the direction coaxial with the medium sliding direction of the magnetic head. The grinding process for forming the is performed.
【0003】ところで、研削盤における研削量の制御
は、研削砥石の摩耗による寸法変動、研削時の発熱によ
る被加工物の熱膨張等の不安定要素を除去する為、自動
定寸装置を付加したものや、CNC(コンピュータ数値
制御)化されたものが見られ、又、磁気ヘッドのギャッ
プ深さを所定の寸法まで研削加工あるいはラッピング加
工する為の寸法管理方法として、光学顕微鏡による視覚
認識法や磁気ヘッドのギャップ部に形成された抵抗体の
抵抗値の変化を検出する方法が知られている。By the way, in order to control the grinding amount in the grinder, an automatic sizing device is added in order to remove unstable factors such as dimensional fluctuation due to wear of the grinding wheel and thermal expansion of the work piece due to heat generated during grinding. Some of them and those of CNC (Computer Numerical Control) are seen, and as a dimension control method for grinding or lapping the gap depth of the magnetic head to a predetermined dimension, a visual recognition method using an optical microscope or There is known a method of detecting a change in resistance value of a resistor formed in a gap portion of a magnetic head.
【0004】[0004]
【発明が解決しようとする課題】従来の円筒研削盤によ
る研削加工は、(1)絶対加工量が多い、(2)研削加
工による加工面のチッピング、クラック、あるいは加工
変質層が発生しやすい、(3)加工面での研削による発
熱が生じやすい、(4)円筒研削盤はワークのローダ・
アンローダ等の点で自動化が難しい等の特徴が有り、被
加工物(磁気ヘッド)の研削加工条件は厳密に管理され
る必要があった。In the conventional grinding process using a cylindrical grinding machine, (1) the absolute processing amount is large, (2) chipping, cracks, or a work-affected layer on the work surface due to the grinding process is likely to occur. (3) Heat is easily generated by grinding on the machined surface. (4) Cylindrical grinder is a work loader
Since it is difficult to automate in terms of an unloader and the like, it was necessary to strictly control the grinding processing conditions for the workpiece (magnetic head).
【0005】研削盤における研削量の制御においては、
被加工物の研削面の表面粗度を向上させる為、研削砥石
にレジノイド系の結合剤を用いた弾性砥石を用いた場
合、その砥石の特性上、砥石の切込値と被加工物の研削
量とは必ずしも一致するものではなく、前述の自動定寸
装置やCNC装置を付加しても高精度に研削量を制御す
ることは困難であった。In controlling the grinding amount in the grinder,
In order to improve the surface roughness of the ground surface of the work piece, when an elastic grindstone using a resinoid binder is used as the grinding grindstone, the cutting value of the grindstone and the grinding of the work piece due to the characteristics of the grindstone. The amount does not always match, and it has been difficult to control the amount of grinding with high accuracy even if the above-mentioned automatic sizing device or CNC device is added.
【0006】中でも研削盤は磁気ヘッドのギャップ深さ
を所定の寸法まで研削加工する必要が有る為、高精度に
管理されることが必要となる。又、昨今、技術開発が著
しいデジタル方式の磁気記録再生装置に適用される磁気
ヘッドに比べ、トラック数が多く、高記録密度記録再生
が要求される為、各トラックのギャップ深さを高精度
で、尚かつ均一に形成する高精度の技術が必要とされて
いた。[0006] Above all, the grinder needs to grind the gap depth of the magnetic head to a predetermined size, and therefore must be managed with high accuracy. In addition, since the number of tracks is large and high recording density recording / reproducing is required as compared with a magnetic head applied to a digital type magnetic recording / reproducing apparatus whose technological development is remarkable these days, the gap depth of each track can be accurately adjusted. However, high-precision technology for uniform and uniform formation was required.
【0007】本発明は磁気ヘッドのR曲面の研削加工を
高精度に行う平面研削盤に関するものである。The present invention relates to a surface grinder that grinds an R curved surface of a magnetic head with high accuracy.
【0008】[0008]
【課題を解決するための手段】磁気ヘッドの媒体摺動面
のR曲面形成機械加工を行う平面研削盤であって、磁気
ヘッドの媒体摺動面のR曲面形成手段と、R曲面研削時
の磁気ヘッドにおける各トラック毎のギャップ深さのバ
ラツキ、すなわち両端トラックでの両ギャップ深さの差
を計測する計測手段と、該計測手段で計測された値を基
にR研削加工中にギャップ深さの差に相当する傾き角の
角度補正を行う角度補正テーブルとを有し、前記R曲面
形成手段は、研削対象とする磁気ヘッドと接触する面が
R曲面形状をした砥石を用い、該R形状砥石の設定位置
は磁気ヘッドの媒体摺動方向に垂直方向に位置すること
を特徴とする。A surface grinding machine for machining a curved surface of a medium sliding surface of a magnetic head, which comprises a curved surface forming means of a medium sliding surface of a magnetic head and a curved surface forming means for grinding the curved surface of the medium. Measuring means for measuring the variation of the gap depth for each track in the magnetic head, that is, the difference between the gap depths at both end tracks, and the gap depth during the R grinding process based on the value measured by the measuring means. Angle correction table for correcting the angle of inclination corresponding to the difference between the R shape and the R curved surface forming means using a whetstone having a curved surface in contact with the magnetic head to be ground. The setting position of the grindstone is characterized in that it is located in a direction perpendicular to the medium sliding direction of the magnetic head.
【0009】また、上記計測手段は、磁気ヘッドのギャ
ップ部に形成された抵抗体により計測することを特徴と
する。Further, the measuring means is characterized by measuring with a resistor formed in the gap portion of the magnetic head.
【0010】[0010]
【作用】上記構成を採用することにより、被加工物との
砥石の接触面をR曲面形状にしておくことにより、円筒
研削盤に較べてワークのローダ・アンローダ等において
自動化が容易に行えるようになる。また被加工物すなわ
ち磁気ヘッドに配設された抵抗体の抵抗値を基に磁気ヘ
ッドの加工の均一性を制御するため、研削砥石の摩耗に
よる寸法精度や研削時の発熱による被加工物の熱膨張に
よる被加工物の熱膨張による影響を受けず、極めて高精
度な磁気ヘッドの平面研削加工が可能となる。By adopting the above construction, the contact surface of the grindstone with the work piece is formed into the R curved surface shape, so that automation can be easily performed in the loader / unloader of the work as compared with the cylindrical grinder. Become. In addition, since the processing uniformity of the magnetic head is controlled on the basis of the resistance value of the resistor provided in the workpiece, that is, the magnetic head, the dimensional accuracy due to the abrasion of the grinding wheel and the heat of the workpiece due to the heat generated during the grinding are controlled. It is possible to perform extremely high-precision surface grinding of a magnetic head without being affected by thermal expansion of a workpiece due to expansion.
【0011】[0011]
【実施例】本発明の一実施例について図面を用いて説明
する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings.
【0012】図5は磁気ヘッド15の構成を示す。図5
に示すように磁気ヘッド15は抵抗体16、抵抗体導線
17、トラック18、保護板19、基板20からなる。
内部に研削量を計測するために抵抗体16が配置されて
おり、研削することにより抵抗体16が削られ、抵抗値
の測定により研削量を把握することができる。この抵抗
体16は抵抗体導線17により平面研削盤に接続されて
おり磁気ヘッド15の研削量および傾きなどを補正しな
がら加工できる構造になっている。FIG. 5 shows the structure of the magnetic head 15. Figure 5
As shown in FIG. 3, the magnetic head 15 comprises a resistor 16, a resistor conductor wire 17, a track 18, a protective plate 19, and a substrate 20.
The resistor 16 is arranged inside for measuring the amount of grinding, the resistor 16 is scraped by grinding, and the amount of grinding can be grasped by measuring the resistance value. The resistor 16 is connected to a surface grinder by a resistor conductor wire 17 and has a structure that can be processed while correcting the grinding amount and inclination of the magnetic head 15.
【0013】本発明の平面研削盤の動作を説明する模式
図を図1に示す。研削対象とする磁気ヘッド15と接触
する面がR曲面形状をした砥石8を用い、該R形状の砥
石8の設定位置は磁気ヘッド15の媒体摺動方向に垂直
方向に位置させ、回転する砥石8の研削面に磁気ヘッド
15の媒体慴動面(R曲面形成面)を接触させ研磨を行
う。FIG. 1 is a schematic view for explaining the operation of the surface grinder of the present invention. A whetstone 8 having a curved surface in contact with the magnetic head 15 to be ground is used, and the set position of the R-shaped whetstone 8 is positioned perpendicular to the medium sliding direction of the magnetic head 15 and rotates. The medium sliding surface (R curved surface forming surface) of the magnetic head 15 is brought into contact with the ground surface of 8 for polishing.
【0014】図2に本発明の実施例における平面研削盤
の側面図(a)、正面図(b)を示す。FIG. 2 shows a side view (a) and a front view (b) of the surface grinder in the embodiment of the present invention.
【0015】図2(a)において1はベッドで、モータ
4によりコラム3、砥石8などが前後に作動する。モー
タ7によりスピンドル6、砥石8が上下に作動して磁気
ヘッド15を加工する。モータ9により砥石8が回転す
る。砥石8は磁気ヘッド15をR形状に加工するため、
あらかじめR形状に整形されている。モータ5によりテ
ーブル2が左右に作動して磁気ヘッド15を加工する。In FIG. 2A, reference numeral 1 is a bed, and the column 4 and the grindstone 8 are moved forward and backward by the motor 4. The spindle 6 and the grindstone 8 are moved up and down by the motor 7 to process the magnetic head 15. The grindstone 8 is rotated by the motor 9. Since the grindstone 8 processes the magnetic head 15 into an R shape,
Pre-shaped into an R shape. The table 2 is moved left and right by the motor 5 to process the magnetic head 15.
【0016】図2(b)においてモータ11によりθ補
正テーブル10が支点14を中心にθ補正テーブル押し
機構12が上昇または下降して磁気ヘッド15のθ補正
を行う。引張バネ13により動作は安定する。In FIG. 2B, the θ correction table 10 is driven by the motor 11 to raise or lower the θ correction table pushing mechanism 12 around the fulcrum 14 to perform θ correction of the magnetic head 15. The tension spring 13 stabilizes the operation.
【0017】次に本発明の平面研削盤の動作を図3に示
すフローチャートに基づいて説明する。Next, the operation of the surface grinder of the present invention will be described with reference to the flow chart shown in FIG.
【0018】・動作1:モータ4が作動して砥石8が磁
気ヘッド15の前後方向に移動し、モータ7が作動して
砥石8が磁気ヘッド15の上下方向に移動し、モータ5
が作動して砥石8が磁気ヘッド15の左右方向に移動し
て、砥石8を磁気ヘッド15に接触させる。Operation 1: The motor 4 operates to move the grindstone 8 in the front-back direction of the magnetic head 15, and the motor 7 operates to move the grindstone 8 in the up-down direction of the magnetic head 15.
Is activated to move the grindstone 8 in the left-right direction of the magnetic head 15 to bring the grindstone 8 into contact with the magnetic head 15.
【0019】・動作2:モータ7が作動して砥石8が一
定量下降して、砥石8が磁気ヘッド15に一定量切込
む。Operation 2: The motor 7 operates and the grindstone 8 descends by a certain amount, and the grindstone 8 cuts into the magnetic head 15 by a certain amount.
【0020】・動作3:モータ5が作動して磁気ヘッド
15が左右に動作して、砥石8が磁気ヘッド15を水平
に加工する。Operation 3: The motor 5 operates to move the magnetic head 15 left and right, and the grindstone 8 processes the magnetic head 15 horizontally.
【0021】・動作4:磁気ヘッド15内の抵抗体16
の抵抗値を抵抗体導線17を通して制御盤内部で計測し
て左右の抵抗体16の値が等しいか(磁気ヘッド15が
正確に加工できているか)判定する。Operation 4: Resistor 16 in magnetic head 15
Is measured inside the control panel through the resistance conductor 17 to determine whether the values of the left and right resistors 16 are equal (whether the magnetic head 15 can be accurately processed).
【0022】・動作5:もし、動作4で磁気ヘッド15
内の左右の抵抗体16の値に差があれば、モータ11が
作動してθ補正テーブル10を動作して、磁気ヘッド1
5が左右均等に加工するように角度θを補正する。Operation 5: If in operation 4, the magnetic head 15
If there is a difference in the values of the left and right resistors 16 inside, the motor 11 operates to operate the θ correction table 10 and the magnetic head 1
The angle θ is corrected so that 5 is processed evenly on the left and right.
【0023】・動作6:磁気ヘッド15の抵抗体16の
抵抗値を抵抗体導線17を通して制御盤内部で計測して
左右の抵抗体16の値が規定の値になったか(磁気ヘッ
ド15が規定量に加工できたか)判定する。Operation 6: The resistance value of the resistor 16 of the magnetic head 15 is measured inside the control panel through the resistor conductor wire 17, and the values of the left and right resistors 16 have reached the prescribed values (the magnetic head 15 regulates). Judgment was made).
【0024】もし規定値でなければ動作2に戻る。If the value is not the specified value, the process returns to operation 2.
【0025】以上で動作を終了する。The operation is completed as described above.
【0026】[0026]
【発明の効果】以上説明した様に本発明は被加工物との
砥石の接触面をR曲面形状にしておくことにより、円筒
研削盤に較べてワークのローダ・アンローダ等において
自動化が容易に行えるようになる。また被加工物すなわ
ち磁気ヘッドに配設された抵抗体の抵抗値を基に磁気ヘ
ッドの加工の均一性を制御するため、研削砥石の摩耗に
よる寸法精度や研削時の発熱による被加工物の熱膨張に
よる被加工物の熱膨張による影響を受けず、極めて高精
度な磁気ヘッドの平面研削加工が可能となる。As described above, according to the present invention, by making the contact surface of the grindstone with the work piece into the R curved surface, automation can be easily performed in the loader / unloader of the work as compared with the cylindrical grinder. Like In addition, since the processing uniformity of the magnetic head is controlled on the basis of the resistance value of the resistor provided in the workpiece, that is, the magnetic head, the dimensional accuracy due to the abrasion of the grinding wheel and the heat of the workpiece due to the heat generated during the grinding are controlled. It is possible to perform extremely high-precision surface grinding of a magnetic head without being affected by thermal expansion of a workpiece due to expansion.
【図1】本発明の平面研削盤の動作の模式図を示す。FIG. 1 shows a schematic view of the operation of a surface grinder of the present invention.
【図2】本発明の平面研削盤の構成図の側面図(a),
正面図(b)を示す。FIG. 2 is a side view (a) of the configuration diagram of the surface grinder of the present invention,
The front view (b) is shown.
【図3】本発明の平面研削盤の動作フロー図を示す。FIG. 3 shows an operation flow chart of the surface grinder of the present invention.
【図4】磁気ヘッドの構成図を示す。FIG. 4 shows a configuration diagram of a magnetic head.
【図5】従来の円筒研削盤の動作の模式図を示す。FIG. 5 shows a schematic view of the operation of a conventional cylindrical grinding machine.
1 ベッド 2 テーブル 3 コラム 6 スピンドル 8 R形状砥石 12 θ補正テーブル押し機構 13 引張バネ 14 θ補正テーブル支点 15 磁気ヘッド 16 抵抗体 17 抵抗体導線 1 bed 2 table 3 column 6 spindle 8 R-shaped grindstone 12 θ compensation table pushing mechanism 13 tension spring 14 θ compensation table fulcrum 15 magnetic head 16 resistor 17 resistor conductor wire
Claims (2)
械加工を行う平面研削盤であって、 磁気ヘッドの媒体摺動面のR曲面形成手段と、 R曲面研削時の磁気ヘッドにおける各トラック毎のギャ
ップ深さのバラツキ、すなわち両端トラックでの両ギャ
ップ深さの差を計測する計測手段と、 該計測手段で計測された値を基にR研削加工中にギャッ
プ深さの差に相当する傾き角の角度補正を行う角度補正
テーブルとを有し、 前記R曲面形成手段は、研削対象とする磁気ヘッドと接
触する面がR曲面形状をした砥石を用い、該R形状砥石
の設定位置は磁気ヘッドの媒体摺動方向に垂直方向に位
置することを特徴とする平面研削盤。1. A surface grinder for forming a curved surface of a medium sliding surface of a magnetic head, comprising: a curved surface forming means for forming a medium sliding surface of the magnetic head; A variation in the gap depth between tracks, that is, a measuring means for measuring the difference between the two gap depths at both ends of the track, and a gap depth difference during R grinding based on the value measured by the measuring means. And an angle correction table for performing an angle correction of the tilt angle. The R curved surface forming means uses a grindstone having a curved surface in contact with the magnetic head to be ground, and the set position of the R shaped grindstone. Is a surface grinder characterized by being positioned in the direction perpendicular to the medium sliding direction of the magnetic head.
部に形成された抵抗体により計測することを特徴とする
請求項1記載の平面研削盤。2. The surface grinder according to claim 1, wherein the measuring means measures with a resistor formed in a gap portion of the magnetic head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5212499A JPH0760630A (en) | 1993-08-27 | 1993-08-27 | Surface grinding machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5212499A JPH0760630A (en) | 1993-08-27 | 1993-08-27 | Surface grinding machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0760630A true JPH0760630A (en) | 1995-03-07 |
Family
ID=16623680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5212499A Pending JPH0760630A (en) | 1993-08-27 | 1993-08-27 | Surface grinding machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0760630A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19815837B4 (en) * | 1997-08-06 | 2006-11-02 | Fujitsu Ltd., Kawasaki | Lapping fixture |
JP2007245260A (en) * | 2006-03-14 | 2007-09-27 | Disco Abrasive Syst Ltd | Forming device of chip |
JP6304614B1 (en) * | 2017-05-31 | 2018-04-04 | 株式会社日立プラントコンストラクション | Comb height grinding device for labyrinth packing |
JP2018202601A (en) * | 2017-11-30 | 2018-12-27 | 株式会社日立プラントコンストラクション | Grinder for height of comb-shaped lip of labyrinth packing |
-
1993
- 1993-08-27 JP JP5212499A patent/JPH0760630A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19815837B4 (en) * | 1997-08-06 | 2006-11-02 | Fujitsu Ltd., Kawasaki | Lapping fixture |
JP2007245260A (en) * | 2006-03-14 | 2007-09-27 | Disco Abrasive Syst Ltd | Forming device of chip |
JP6304614B1 (en) * | 2017-05-31 | 2018-04-04 | 株式会社日立プラントコンストラクション | Comb height grinding device for labyrinth packing |
JP2018202510A (en) * | 2017-05-31 | 2018-12-27 | 株式会社日立プラントコンストラクション | Grinder for height of comb-shaped lip of labyrinth packing |
JP2018202601A (en) * | 2017-11-30 | 2018-12-27 | 株式会社日立プラントコンストラクション | Grinder for height of comb-shaped lip of labyrinth packing |
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