JPH0755727A - X-ray device with direct beam stopper - Google Patents

Abstract

PURPOSE:To enable the image sensing of a Laue SPOT in a low angular region related to the angle of diffraction 2theta, and to prevent the generation of a dead angle resulting from a support member supporting a direct beam stopper. CONSTITUTION:A sample 3 is irradiated with X-rays, and an X-ray film 4 is irradiated with X-rays diffracted by the sample 3 while incident on the X-ray film 4 of direct beams transmitted through the sample 3 is interrupted by a direct beam stopper 5 in a Laue camera. Two stopper support members 16 supporting the direct beam stopper 5 is formed of a material difficult to be deformed, and the stopper support members 16 are rotated centering around an optical axis L1 by a motor 15, a worm 14 and a gear 12. The generation of a dead angle is prevented by tuning the stopper support members 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray apparatus having a direct beam stopper such as a Laue camera.

[0002]

2. Description of the Related Art Regarding a sample to be measured, it is judged whether it is a single crystal, a polycrystal, an amorphous, etc., that is, the crystalline state is judged, or the orientation of the single crystal sample is There is known an X-ray measurement method for observing Laue spots on a Laue pattern photographed by a Laue camera or observing a Debye ring on a Laue pattern in order to determine whether or not there is any.

As such a Laue camera, a Laue camera having a structure shown in FIG. 3 is conventionally known. In this Laue camera, the X-rays emitted from the X-ray source 1 (usually continuous X-rays)
The collimator 2 narrows the beam width and irradiates the sample 3 with the beam, and the diffracted X-rays diffracted by the sample 3 are X-ray sensitive member 4,
For example, an X-ray film is irradiated and a Laue figure is imaged on the X-ray sensitive member 4. At this time, a direct beam stopper 5 is arranged in front of the X-ray sensitive member 4, and the direct beam stopper 5 prevents the direct beam passing through the sample 3 from entering the X-ray sensitive member 4. . Direct beam stopper 5
Is fixed to the lower end of a stopper support member 7 that is supported by the upper edge of the frame 6 and hangs down, and is located at the center of the front surface of the X-ray sensitive member 4.

Conventionally, a Laue camera having a structure as shown in FIG. 4 is also known. In this Laue camera,
A polymer film 8 that easily transmits X-rays is arranged in front of the X-ray sensitive member 4, and a direct beam stopper 5 is fixed to the center of the polymer film 8.

[0005]

However, in the conventional Laue camera (FIG. 3) in which the direct beam stopper 5 is supported by using the stopper support member 7, the diffracted X-rays from the sample 3 are generated by the stopper support member 7. There is a problem in that the X-ray sensitive member 4 cannot be made to enter the X-ray sensitive member 4 by being blocked by it, so that a Laue pattern corresponding to that portion cannot be obtained, that is, a dead angle occurs.

Further, in the Laue camera (FIG. 4) in which the direct beam stopper 5 is supported by the polymer film 8, when the diffracted X-rays from the sample 3 enter the polymer film 8, scattered X-rays are generated. It occurs and it is X
There is a problem that the Laue pattern becomes unclear as a result of being incident on the line sensitive member 4.

Further, in the conventional apparatus of FIG. 4, since the rigidity of the polymer film 8 is relatively low, the central axis of the direct beam stopper 5 cannot be accurately aligned with the optical axis of the diffracted X-ray, and it is inevitable. There is a problem that the direct beam stopper 5 tilts with respect to the optical axis of the diffracted X-ray. When this problem occurs, the intended purpose of blocking the direct beam may not be achieved. In order to avoid this, in the apparatus shown in FIG. 4, the outer diameter of the direct beam stopper 5 is usually made large so that the direct beam is reliably shielded. However, if such a structure is adopted, there arises a problem that a diffracted X-ray image cannot be obtained in a low angle region with respect to the diffraction angle 2θ.

The present invention has been made in order to solve the above-mentioned problems, and makes it possible to capture an X-ray image in a low angle region with respect to the diffraction angle 2θ, and further, the dead angle and the scattering X The purpose is to eliminate deterioration of an X-ray figure due to lines.

[0009]

In order to solve the above-mentioned problems, an X-ray apparatus according to the present invention mainly comprises a stopper support member which is made of a material which is difficult to deform and which supports a direct beam stopper, and a direct beam stopper. And a supporting member rotating means for rotating the stopper supporting member.

It is desirable that the rotation speed of the stopper support member is set to a speed at which the stopper support member rotates an integral number within the time when the diffracted X-rays are applied to the X-ray sensitive member. Further, the shape of the stopper support member is not necessarily limited to a specific shape, but it is desirable to set it as a so-called fan shape, which is a shape that opens outward with respect to the direct beam stopper.

[0011]

[Function] Since the direct beam stopper is supported by the stopper support member formed of a material that is difficult to deform, the direct beam stopper is stabilized with the center axis of the direct beam stopper accurately aligned with the X-ray optical axis. And can support. As a result, the direct beam can be reliably shielded even if the outer diameter of the direct beam stopper is reduced. By reducing the outer diameter of the direct beam stopper, it is possible to obtain an X-ray image in a low angle region regarding the diffraction angle 2θ.

Further, since the stopper support member is rotated during the X-ray diffraction measurement, a dead angle due to the stopper support member does not occur on the X-ray sensitive member.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a Laue camera which is an embodiment of the X-ray apparatus according to the present invention. This Laue camera
An X-ray source 1 for generating continuous X-rays, a collimator 2 having a circular pinhole inside, and a sample 3 fixed on a cross goniometer 9 capable of parallel movement and arc movement.
And an X-ray sensitive member 4 such as an X-ray film. A direct beam stopper unit 10 is arranged between the sample 3 and the X-ray sensitive member 4.

Direct beam stopper unit 10
As shown in FIG. 2, the support frame 11 has a rectangular outer shape and has a circular hole therein, and the gear 1 is fitted into the inner circular hole of the support frame 11 and has an outer circumference.
The rotary disk 13 has a rotary disk 13 on which the two are formed, a worm 14 that meshes with a gear 12 of the rotary disk 13, and a motor 15 that rotationally drives the worm 14.

The turntable 13 is rotatably fitted to the support frame 11. As shown in FIG.
Is formed in a circular ring shape, the inside thereof is almost a space, and two stopper support members 16 extend inward in the radial direction from the ring-shaped frame portion. These supporting members 16 are made of a material having a relatively high rigidity and being hard to be deformed, and the direct beam stopper 5 is fixed and supported at their tips. The X-ray sensitive member 4 is arranged behind the space inside the turntable 13.

In this embodiment, the stopper support member 16
2 in a symmetrical position with respect to the direct beam stopper 5
Each of the stopper supporting members 16 is formed in a so-called fan shape, which has a shape that expands outward from the direct beam stopper 5 as a center.

Since the Laue camera according to the present invention is configured as described above, when the measurement is started, in FIG. 1, the X-rays emitted from the X-ray source 1 are collimated by the collimator 2, that is, the beam width. And the sample 3 is irradiated. At this time, the X-rays incident on the sample 3 and the sample 3
X-ray diffraction occurs when the well-known Bragg condition is satisfied with respect to the crystal lattice plane of. The diffracted X-rays pass through the space in the direct beam stopper unit 10 and are incident on the X-ray sensitive member 4 to form an X-ray image, that is, a Laue pattern.

The direct beam passing through the sample 3 is blocked by the direct beam stopper 5 and does not enter the X-ray sensitive member 4. Since the stopper support member 16 that supports the direct beam stopper 5 is formed of a material that is not easily deformed, the central axis of the direct beam stopper 5 is stably supported in a state where it accurately coincides with the X-ray optical axis L1. Therefore, in this embodiment, even if the outer diameter of the direct beam stopper 5 is set to be small, the direct beam blocking process can be executed with sufficient certainty. Then, by forming the outer diameter of the direct beam stopper 5 so small, it becomes possible to guide the diffracted X-rays to the X-ray sensitive member 4 in the low angle region with respect to the diffraction angle 2θ, so that the X-rays in the low angle region can be guided. It is possible to obtain a line image, that is, a Laue pattern.

The X-ray irradiation from the X-ray source 1 to the sample 3, that is, the irradiation of the diffracted X-rays from the sample 3 to the X-ray sensitive member 4 is continuously executed for a predetermined measurement time, for example, 1000 seconds. During this measurement time, the turntable 13 in the direct beam stopper unit 10 is driven by the worm 14 which is driven by the motor 15 to rotate and rotates about the optical axis L1 of the diffracted X-ray. Therefore, since the stopper support member 16 does not stand still at a specific angular position, all the diffracted X-rays are guided to the X-ray sensitive member 4, and as a result, a dead angle, that is, a missing portion of the X-ray image does not occur. It is possible to obtain a highly accurate Laue pattern by setting each stopper support member 16 to rotate an integral number during the measurement time of the X-ray diffraction measurement. This is because the position of the stopper support member 16 at the start of the X-ray diffraction measurement and the position of the stopper support member 16 at the end of the X-ray diffraction measurement are always aligned at the same position to suppress the variation in the measurement. .

Although the present invention has been described with reference to one embodiment, the present invention is not limited to the embodiment.
Various modifications can be made within the technical scope described in the claims.

For example, the X-ray apparatus to which the present invention can be applied is not limited to the Laue camera, but can be applied to any X-ray apparatus in which the direct beam is blocked by the direct beam stopper. Further, the number of stopper support members 16 may be one or three or more. Further, the shape of the stopper support member 16 may be linear as shown by reference numeral 7 in FIG.

[0022]

According to the present invention, since the direct beam stopper is supported by the stopper supporting member formed of a material which is difficult to deform, the direct beam stopper can be stably supported, and accordingly, the direct beam stopper The outer diameter can be formed small. As a result, an X-ray image in a low angle region with respect to the diffraction angle 2θ can be obtained.

Since the stopper support member is rotated during the X-ray diffraction measurement, a dead angle, that is, a missing portion does not occur in the X-ray image.

According to the X-ray apparatus of the second aspect, the position of the stopper support member at the start of the X-ray diffraction measurement and the position of the stopper support member at the end of the X-ray diffraction measurement are always aligned at the same position. Therefore, it is possible to suppress variations in measurement.

According to the X-ray apparatus of the third aspect, since the area of the diffracted X-rays shielded by the stopper supporting member becomes uniform in the radial direction centering on the direct beam stopper, the X-ray apparatus with higher reliability can be obtained. Line diffraction measurements can be performed.

[0026]

[Brief description of drawings]

FIG. 1 is a front sectional view showing a Laue camera which is an embodiment of an X-ray apparatus according to the present invention.

FIG. 2 is a front view taken along the line II-II in FIG.

FIG. 3 is a perspective view showing an example of a conventional Laue camera.

FIG. 4 is a perspective view showing another example of a conventional Laue camera.

[Explanation of symbols]

 3 sample 4 X-ray sensitive member 5 direct beam stopper 10 direct beam stopper unit 12 gear 13 turntable 14 worm 15 motor 16 stopper support member

Claims (3)

[Claims] 1. A direct beam that irradiates a sample with X-rays, irradiates the X-ray sensitive member with diffracted X-rays diffracted by the sample, and directs a direct beam passing through the sample to enter the X-ray sensitive member. In an X-ray device that is blocked by a stopper, a stopper support member that is made of a material that is difficult to deform and that supports the direct beam stopper, and a support member rotating means that rotates the stopper support member around the direct beam stopper. An X-ray apparatus equipped with a direct beam stopper, characterized in that 2. The X with a direct beam stopper according to claim 1, wherein the stopper support member rotates an integral number within a time period during which the X-ray sensitive member is irradiated with the diffracted X-rays.
Line device. 3. The X-ray apparatus having a direct beam stopper according to claim 1, wherein the stopper supporting member is formed in a fan shape centering on the direct beam stopper.