JPH0752258B2 - Optical fiber phase modulator - Google Patents
Optical fiber phase modulatorInfo
- Publication number
- JPH0752258B2 JPH0752258B2 JP63166230A JP16623088A JPH0752258B2 JP H0752258 B2 JPH0752258 B2 JP H0752258B2 JP 63166230 A JP63166230 A JP 63166230A JP 16623088 A JP16623088 A JP 16623088A JP H0752258 B2 JPH0752258 B2 JP H0752258B2
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- piezoelectric vibrator
- phase modulator
- grooves
- laminated piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Mechanical Light Control Or Optical Switches (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は光ファイバの途中に圧電振動子を装着した光フ
ァイバ位相変調器の改良に関するものである。TECHNICAL FIELD The present invention relates to an improvement of an optical fiber phase modulator in which a piezoelectric vibrator is mounted in the middle of an optical fiber.
(従来の技術) 第2図は従来のこの種の光ファイバ位相変調器の一例を
示すもので、円筒形の圧電振動子1の外周面に光ファイ
バ2を複数回巻き付け、接着剤等により固定してなって
おり、駆動信号源3より前記圧電振動子1に供給される
電圧によって該圧電振動子1が半径方向に振動し、これ
によって前記光ファイバ2が伸縮し、その際、光ファイ
バ2に発生する光路長及び屈折率の変化に基づいて光フ
ァイバ2の一端より入射した光が位相変調され、他端よ
り射出される如くなっていた。(Prior Art) FIG. 2 shows an example of a conventional optical fiber phase modulator of this type. An optical fiber 2 is wound around an outer peripheral surface of a cylindrical piezoelectric vibrator 1 a plurality of times and fixed by an adhesive or the like. The piezoelectric vibrator 1 vibrates in the radial direction by the voltage supplied from the drive signal source 3 to the piezoelectric vibrator 1, whereby the optical fiber 2 expands and contracts. The light incident from one end of the optical fiber 2 is phase-modulated based on the change in the optical path length and the refractive index that occur at 1 and is emitted from the other end.
(発明が解決しようとする課題) しかしながら、前記装置では圧電振動子1に光ファイバ
2を巻き付ける場合、光ファイバ2に張力を与えながら
行なわなければならず、また、偏波保持光ファイバを用
いた時には複屈折の主軸を考慮しないで圧電振動子1に
巻き付けるとクロストークが劣化するため、複屈折の主
軸を圧電振動子1の中心軸と平行あるいは直角にしなけ
ればならず、その作業に手間がかかるという問題があ
り、また、圧電振動子1は形状的にその変位が小さいた
め、位相変調量を大きくするには駆動信号源3の電圧を
大きくするか又は光ファイバの巻き付け量を多くするか
あるいは圧電振動子自体に大形のものを用いなければな
らず、駆動信号源の負担が増したり装置が大形化する等
の問題点があった。(Problems to be Solved by the Invention) However, in the above device, when the optical fiber 2 is wound around the piezoelectric vibrator 1, it must be performed while applying tension to the optical fiber 2, and a polarization-maintaining optical fiber is used. Sometimes, when the piezoelectric vibrator 1 is wound without considering the birefringent main axis, the crosstalk is deteriorated. Therefore, the birefringent main axis must be parallel or perpendicular to the central axis of the piezoelectric vibrator 1, which is troublesome. There is such a problem, and the displacement of the piezoelectric vibrator 1 is small in terms of shape. Therefore, in order to increase the amount of phase modulation, the voltage of the drive signal source 3 is increased or the winding amount of the optical fiber is increased. Alternatively, it is necessary to use a large-sized piezoelectric vibrator itself, which causes problems such as an increase in load on the drive signal source and an increase in size of the device.
本発明は前記問題点を解決し、製造が容易で且つ低電源
駆動が可能であり、しかも小型の光ファイバ位相変調器
を提供することを目的とする。It is an object of the present invention to solve the above problems, to provide an optical fiber phase modulator which is easy to manufacture, can be driven by a low power supply, and is small.
(課題を解決するための手段) 本発明では前記目的を達成するため、積層型圧電振動子
の側面に振動方向に沿って光ファイバの外径とほぼ同等
の幅を有する複数の溝を形成し、該各溝に一本の光ファ
イバを折り返して挿入・固定した光ファイバ位相変調器
を提案する。(Means for Solving the Problem) In the present invention, in order to achieve the above object, a plurality of grooves having a width substantially equal to the outer diameter of the optical fiber are formed on the side surface of the laminated piezoelectric vibrator along the vibration direction. We propose an optical fiber phase modulator in which one optical fiber is folded back into each groove and inserted / fixed.
(作用) 本発明によれば、積層型圧電振動子に駆動電圧が供給さ
れると、その振動方向、即ち側面に形成した溝に沿って
振動し、これによって複数の溝内に挿入・固定された一
本の光ファイバが該複数の全ての溝内においてその長手
方向に伸縮され、その光路長及び屈折率の変化により光
ファイバ内を通過する光の位相が大きく変調される。(Operation) According to the present invention, when a driving voltage is supplied to the laminated piezoelectric vibrator, the laminated piezoelectric vibrator vibrates in the vibration direction, that is, along the groove formed on the side surface, whereby the piezoelectric vibrator is inserted and fixed in the plurality of grooves. Another optical fiber is expanded and contracted in the longitudinal direction in all of the plurality of grooves, and the phase of the light passing through the optical fiber is largely modulated by the change in the optical path length and the refractive index.
(実施例) 第1図は本発明の光ファイバ位相変調器の原理を説明す
るための構成例を示すもので、図中、11は積層型圧電振
動子、12は光ファイバ、13,14はダミーブロック、15は
駆動信号源である。(Example) FIG. 1 shows a structural example for explaining the principle of the optical fiber phase modulator of the present invention. In the figure, 11 is a laminated piezoelectric vibrator, 12 is an optical fiber, and 13 and 14 are The dummy block, 15 is a drive signal source.
積層型圧電振動子11は板状の圧電素子を複数、ここでは
6枚、その間に電極を挟んで積層し互いに固定したもの
で、ここでは端面の大きさが8mm×8mmで長さが全体で9m
mのものを用いている。ダミーブロック13,14はエポキシ
系の合成樹脂よりなり、前記積層型圧電振動子11の端面
11a,11bと同一形状の端面13a,14aとともに、光ファイバ
12の外径よりやや大きい段差部13b,14bを備えている。The laminated piezoelectric vibrator 11 is composed of a plurality of plate-shaped piezoelectric elements, six in this case, laminated with electrodes sandwiched therebetween, and fixed to each other. Here, the end face has a size of 8 mm × 8 mm and the entire length. 9m
I am using m. The dummy blocks 13 and 14 are made of an epoxy-based synthetic resin, and have an end surface of the laminated piezoelectric vibrator 11.
Along with the end faces 13a and 14a of the same shape as 11a and 11b, the optical fiber
It has step portions 13b and 14b which are slightly larger than the outer diameter of 12.
前記圧電振動子11とダミーブロック13,14とはその端面1
1a及び13a並びに11b及び14bにおいて接着・固定され、
さらに段差部13b,14bを含む一側面においてその振動方
向(ここでは電圧印加方向と同一)に沿って光ファイバ
12の素線部の外径とほぼ同等の幅及び光ファイバ12の外
径の半分程度の深さ、ここでは幅0.2mm、深さ1mmを有す
る溝16がダイシングによって形成される。The piezoelectric vibrator 11 and the dummy blocks 13 and 14 have their end faces 1
Adhered and fixed at 1a and 13a and 11b and 14b,
Furthermore, on one side surface including the step portions 13b and 14b, the optical fiber is aligned along the vibration direction (here, the same as the voltage application direction).
A groove 16 having a width approximately equal to the outer diameter of the element wire portion 12 and a depth of about half the outer diameter of the optical fiber 12, here, a width of 0.2 mm and a depth of 1 mm is formed by dicing.
また、光ファイバ12はカットオフ波長1.12μmの単一モ
ード光ファイバであり、その被覆は前記溝16と同じ長さ
だけ除去され、この際、表出した素線部12aが前記溝16
内に挿入され、被覆を備えた部分とともに圧電振動子11
及びダミーブロック13,14にエポキシ系の接着剤(図示
せず)にて接着・固定されている。Further, the optical fiber 12 is a single-mode optical fiber having a cutoff wavelength of 1.12 μm, and its coating is removed by the same length as the groove 16, and at this time, the exposed wire portion 12a has the groove 16
Piezoelectric resonator 11
Also, they are adhered and fixed to the dummy blocks 13 and 14 with an epoxy adhesive (not shown).
前述した圧電振動子11の各電極と駆動信号源15とを交互
に逆極性に接続し、駆動電圧を供給すると、該圧電振動
子11がその積層方向、即ち溝16に沿って振動し、これに
よって該溝16内の光ファイバ12の素線部12aが伸縮し、
その光路長及び屈折率の変化により光ファイバ12内に入
射する光の位相が変調される。When the respective electrodes of the piezoelectric vibrator 11 and the drive signal source 15 are alternately connected in opposite polarities and a drive voltage is supplied, the piezoelectric vibrator 11 vibrates in the stacking direction, that is, along the groove 16, By this, the wire portion 12a of the optical fiber 12 in the groove 16 expands and contracts,
The change of the optical path length and the refractive index modulates the phase of the light entering the optical fiber 12.
前記位相変調器を2つの3dB光ファイバカップラからな
るマッハツェンダ干渉計の中に入れて変調特性を測定し
た結果、光の波長1.30μmにおいて1波長の位相ずれが
得られる駆動電圧は直流で約3[V]であった。また、
変調周波数としては多少、変調(駆動)電圧を高くしな
ければならないが、10kHZまで作用可能であった。ま
た、変調周波数をさらに高くするにはダミーブロック1
3,14を装着せず、光ファイバ12の被覆を除去しないでそ
のまま積層型圧電振動子11の溝に挿入し、接着・固定す
れば良い。なお、この場合、溝16の幅は光ファイバ12の
被覆が付いた状態の外径とほぼ同程度とする。The phase modulator was placed in a Mach-Zehnder interferometer consisting of two 3 dB optical fiber couplers, and the modulation characteristics were measured. As a result, a drive voltage that gives a phase shift of one wavelength at a wavelength of 1.30 μm is about 3 [DC]. V]. Also,
Somewhat as the modulation frequency must be high modulation (driving) voltage but was operable up 10KH Z. To increase the modulation frequency even further, dummy block 1
It suffices to insert 3 and 14 into the groove of the laminated piezoelectric vibrator 11 without adhering the coating of the optical fiber 12 without removing the coating, and adhere and fix the same. In this case, the width of the groove 16 is set to be approximately the same as the outer diameter of the optical fiber 12 with the coating.
また、前述したように光ファイバ12として単一モード光
ファイバを用いた場合、積層型圧電振動子11に挿入・固
定する際の側圧の影響により複屈折を生じたりして、本
質的に偏波を保持できないため、光ファイバジャイロ等
の光ファイバセンサには適用が困難となるが、この場合
は光ファイバ12として光ファイバ内部に予め大きな複屈
折を有する偏波保持光ファイバを用いれば良く、入射光
に直線偏波を用い、該偏波保持光ファイバの偏波の主軸
に平行に入射して前記同様な試験を行なったところ、単
一モード光ファイバを用いた場合と同様な特性が得られ
た。In addition, as described above, when a single-mode optical fiber is used as the optical fiber 12, birefringence may occur due to the influence of lateral pressure when inserting / fixing the laminated piezoelectric vibrator 11, and the polarization is essentially polarized. However, it is difficult to apply to an optical fiber sensor such as an optical fiber gyro.However, in this case, a polarization maintaining optical fiber having a large birefringence in advance inside the optical fiber may be used as the optical fiber 12. When a linearly polarized light was used for the light, and it was incident parallel to the main axis of the polarization of the polarization-maintaining optical fiber and the same test was performed, the same characteristics as when using a single-mode optical fiber were obtained. It was
第3図は本発明の光ファイバ位相変調器の原理を説明す
るための他の構成例を示すもので、ここでは光ファイバ
を複数本となした例を示す。即ち、21は積層型圧電振動
子、22,23,24,25,26は光ファイバ、27,28はダミーブロ
ックであり、積層型圧電振動子21の両端面にはダミーブ
ロック27,28が接着・固定され、その一側面には振動方
向に沿って複数、ここでは5つの溝29,30,31,32,33がダ
イシングによって設けられ、さらに該各溝29〜33内に光
ファイバ22〜26の被覆を除去した部分がそれぞれ挿入さ
れ、被覆を備えた部分とともに圧電振動子21及びダミー
ブロック27,28にエポキシ系の接着剤(図示せず)にて
接着・固定されている。FIG. 3 shows another structural example for explaining the principle of the optical fiber phase modulator of the present invention. Here, an example in which a plurality of optical fibers are used is shown. That is, 21 is a laminated piezoelectric vibrator, 22, 23, 24, 25 and 26 are optical fibers, 27 and 28 are dummy blocks, and dummy blocks 27 and 28 are bonded to both end surfaces of the laminated piezoelectric vibrator 21. -Fixed, a plurality of, here five grooves 29, 30, 31, 32, 33 are provided on one side surface along the vibration direction by dicing, and the optical fibers 22 to 26 are further provided in the respective grooves 29 to 33. The portions from which the coating is removed are inserted, and the portions having the coating are adhered and fixed to the piezoelectric vibrator 21 and the dummy blocks 27 and 28 with an epoxy adhesive (not shown).
なお、積層型圧電振動子21としては第1図の構成例と同
様、端面の大きさが8mm×8mmで長さが9mmのものを用い
ており、また、光ファイバ22〜26としてはカットオフ波
長1.2μmの5芯テープ型の単一モード光ファイバを用
いており、また、溝29〜33は幅0.15mm、深さ1mmを有
し、0.5mmの間隔で互いに平行に設けられる。As the laminated piezoelectric vibrator 21, as in the configuration example of FIG. 1, an end face having a size of 8 mm × 8 mm and a length of 9 mm is used, and the optical fibers 22 to 26 are cut off. A 5-core tape type single mode optical fiber having a wavelength of 1.2 μm is used, and the grooves 29 to 33 have a width of 0.15 mm and a depth of 1 mm and are provided in parallel with each other at intervals of 0.5 mm.
前述した圧電振動子21の各電極と駆動信号源15とを交互
に逆極性に接続し駆動電圧を供給すると、該圧電振動子
21がその溝29〜33に沿って振動し、これによって光ファ
イバ22〜26が伸縮し、その光路長及び屈折率の変化によ
り各光ファイバ22〜26内に入射する光の位相が同様に変
調される。When the drive voltage is supplied by alternately connecting the electrodes of the piezoelectric vibrator 21 and the drive signal source 15 described above, the piezoelectric vibrator
21 vibrates along the grooves 29 to 33, which causes the optical fibers 22 to 26 to expand and contract, and the phase of the light entering each of the optical fibers 22 to 26 is similarly modulated by the change in the optical path length and the refractive index. To be done.
前記位相変調器の光ファイバ22〜26をそれぞれ第1図の
構成例と同様にマッハツェンダ干渉計の中に入れて変調
特性を測定した結果、波長1.30μmにおいて1波長の位
相ずれが得られる駆動電圧は直流で約3±0.3[V]で
あった。また、この構成例においてもダミーブロック2
7,28を装着せず、光ファイバ22〜26の被覆を除去しない
でそのまま積層型圧電振動子の各溝に挿入し接着・固定
すれば、変調周波数を高めることが可能となる。なお、
その他の構成・作用は第1図の構成例と同様である。Each of the optical fibers 22 to 26 of the phase modulator was put into a Mach-Zehnder interferometer in the same manner as in the configuration example of FIG. 1 and the modulation characteristics were measured. As a result, a driving voltage that gives a phase shift of one wavelength at a wavelength of 1.30 μm is obtained. Was about 3 ± 0.3 [V] at DC. Also in this configuration example, the dummy block 2
The modulation frequency can be increased by not inserting the 7,28 and by directly inserting the optical fibers 22 to 26 into the grooves of the laminated piezoelectric vibrator without removing the coatings and adhering and fixing them. In addition,
Other configurations and operations are similar to those of the configuration example of FIG.
第4図は本発明の光ファイバ位相変調器の一実施例を示
すもので、一本の光ファイバを複数の溝に折り返して挿
入・固定することにより駆動電圧を低減させたことを特
徴とする。即ち、図中、41は積層型圧電振動子、42は光
ファイバ、43,44はダミーブロックであり、積層型圧電
振動子41の両端面にはダミーブロック43,44が接着・固
定され、その一側面には振動方向に沿って複数、ここで
は4つの溝45,46,47,48がダイシングによって設けら
れ、さらに該各溝45〜48内に光ファイバ42が被覆された
まま折り返して挿入され、圧電振動子41及びダミーブロ
ック43,44にエポキシ系の接着剤(図示せず)にて接着
・固定されている。FIG. 4 shows an embodiment of the optical fiber phase modulator of the present invention, which is characterized in that a driving voltage is reduced by folding one optical fiber into a plurality of grooves and inserting / fixing the optical fiber. . That is, in the drawing, 41 is a laminated piezoelectric vibrator, 42 is an optical fiber, 43 and 44 are dummy blocks, and dummy blocks 43 and 44 are adhered and fixed to both end faces of the laminated piezoelectric vibrator 41. A plurality of, in this case, four grooves 45, 46, 47, 48 are provided on one side along the vibration direction by dicing, and the optical fiber 42 is folded back and inserted into each of the grooves 45 to 48 while being covered. , Is bonded and fixed to the piezoelectric vibrator 41 and the dummy blocks 43 and 44 with an epoxy adhesive (not shown).
なお、積層型圧電振動子41としては第1図の構成例と同
様、端面の大きさが8mm×8mmで長さが9mmのものを用い
ており、また、光ファイバ42としてはカットオフ波長1.
2μmの単一モード光ファイバを用いており、また、溝4
5〜48は幅0.3mm、深さ1mmを有し、1mmの間隔で互いに平
行に設けられる。なお、光ファイバ42の折り返しの半径
は余長部を長くとることにより充分大きくすることが可
能である。As the laminated piezoelectric vibrator 41, as in the configuration example of FIG. 1, an end face having a size of 8 mm × 8 mm and a length of 9 mm is used, and the optical fiber 42 has a cutoff wavelength of 1 mm. .
2 μm single mode optical fiber is used, and groove 4
5 to 48 have a width of 0.3 mm and a depth of 1 mm, and are provided in parallel with each other at an interval of 1 mm. The turning radius of the optical fiber 42 can be made sufficiently large by making the extra length portion long.
前述した圧電振動子41の各電極と駆動信号源15とを交互
に逆極性に接続し駆動電圧を供給すると、該圧電振動子
41がその溝45〜48に沿って振動し、これによって光ファ
イバ42が伸縮し、その光路長及び屈折率の変化により光
ファイバ42内に入射する光の位相が変調されるが、この
時、1本の光ファイバ42の4つの部分において変調がな
されることになり、4倍の変調度が得られる(いいかえ
れば駆動電圧を1/4にすることができる)ことになる。When the drive voltage is supplied by alternately connecting the electrodes of the piezoelectric vibrator 41 and the drive signal source 15 described above to each other, the piezoelectric vibrator
41 vibrates along the grooves 45 to 48, whereby the optical fiber 42 expands and contracts, and the phase of the light entering the optical fiber 42 is modulated by the change in the optical path length and the refractive index thereof. Modulation is performed in the four parts of one optical fiber 42, and a modulation factor of 4 is obtained (in other words, the drive voltage can be reduced to 1/4).
前記位相変調器を第1図の構成例と同様にマッハツェン
ダ干渉計の中に入れて変調特性を測定した結果、波長1.
30μmにおいて1波長の位相ずれが得られる駆動電圧は
直流で約0.7[V]であり、第1の構成例の場合の約1/4
と大幅に低減された。なお、その他の構成・作用は第1
図の構成例と同様である。The phase modulator was put in a Mach-Zehnder interferometer in the same manner as in the configuration example of FIG.
The drive voltage at which a phase shift of one wavelength is obtained at 30 μm is about 0.7 [V] at DC, which is about 1/4 that of the first configuration example.
And was greatly reduced. The other configurations and operations are the first
This is similar to the configuration example in the figure.
(発明の効果) 以上説明したように本発明によれば、積層型圧電振動子
に形成した複数の溝内に1本の光ファイバを折り返して
挿入し固定するのみで構成されるため、従来のように光
ファイバに張力を与えながら円筒状の圧電振動子に巻き
付ける必要がなく、また、変位量の大きい積層型圧電振
動子を用いるとともに1本の光ファイバの複数の部分に
おいて位相変調が行なわれるため、低電圧駆動が可能と
なり、装置全体を小形にすることができる等の利点があ
る。(Effects of the Invention) As described above, according to the present invention, since it is configured by simply folding and inserting and fixing one optical fiber in the plurality of grooves formed in the laminated piezoelectric vibrator, As described above, it is not necessary to wind the optical fiber around a cylindrical piezoelectric vibrator while applying tension to the optical fiber, and a laminated piezoelectric vibrator having a large displacement is used and phase modulation is performed in a plurality of portions of one optical fiber. Therefore, there is an advantage that it can be driven at a low voltage, and the entire device can be downsized.
第1図は本発明の光ファイバ位相変調器の原理を説明す
るための構成例を示す図、第2図は従来の光ファイバ位
相変調器の一例を示す構成図、第3図は本発明の光ファ
イバ位相変調器の原理を説明するための他の構成例を示
す図、第4図は本発明の光ファイバ位相変調器の一実施
例を示す構成図である。 11,21,41……積層型圧電振動子、12,22〜26,42……光フ
ァイバ、16,29〜33,45〜48……溝。FIG. 1 is a diagram showing a configuration example for explaining the principle of the optical fiber phase modulator of the present invention, FIG. 2 is a configuration diagram showing an example of a conventional optical fiber phase modulator, and FIG. 3 is a diagram of the present invention. FIG. 4 is a diagram showing another configuration example for explaining the principle of the optical fiber phase modulator, and FIG. 4 is a configuration diagram showing an embodiment of the optical fiber phase modulator of the present invention. 11,21,41 …… Multilayer piezoelectric vibrator, 12,22 ~ 26,42 …… Optical fiber, 16,29 ~ 33,45 ~ 48 …… Groove.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 渡辺 純二 東京都千代田区内幸町1丁目1番6号 日 本電信電話株式会社内 (72)発明者 斎藤 忠男 東京都千代田区内幸町1丁目1番6号 日 本電信電話株式会社内 (72)発明者 松井 伸介 東京都千代田区内幸町1丁目1番6号 日 本電信電話株式会社内 (56)参考文献 特開 昭63−180929(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Junji Watanabe 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corporation (72) Tadao Saito 1-16-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corp. (72) Inventor Shinsuke Matsui 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corp. (56) Reference JP-A-63-180929 (JP, A)
Claims (1)
て光ファイバの外径とほぼ同等の幅を有する複数の溝を
形成し、 該各溝に一本の光ファイバを折り返して挿入・固定した ことを特徴とする光ファイバ位相変調器。1. A plurality of grooves having a width substantially equal to the outer diameter of the optical fiber are formed on the side surface of the laminated piezoelectric vibrator along the vibration direction, and one optical fiber is folded back and inserted into each groove.・ An optical fiber phase modulator characterized by being fixed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63166230A JPH0752258B2 (en) | 1988-07-04 | 1988-07-04 | Optical fiber phase modulator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63166230A JPH0752258B2 (en) | 1988-07-04 | 1988-07-04 | Optical fiber phase modulator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0215229A JPH0215229A (en) | 1990-01-18 |
JPH0752258B2 true JPH0752258B2 (en) | 1995-06-05 |
Family
ID=15827524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63166230A Expired - Fee Related JPH0752258B2 (en) | 1988-07-04 | 1988-07-04 | Optical fiber phase modulator |
Country Status (1)
Country | Link |
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JP (1) | JPH0752258B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7319229B2 (en) * | 2003-12-29 | 2008-01-15 | Kla-Tencor Technologies Corporation | Illumination apparatus and methods |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63180929A (en) * | 1987-01-22 | 1988-07-26 | Nec Corp | Optical phase controller |
-
1988
- 1988-07-04 JP JP63166230A patent/JPH0752258B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0215229A (en) | 1990-01-18 |
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