JPH0747958B2 - Eyebrow type 2-axis multi-stage vacuum pump with internal cleaning - Google Patents
Eyebrow type 2-axis multi-stage vacuum pump with internal cleaningInfo
- Publication number
- JPH0747958B2 JPH0747958B2 JP15932890A JP15932890A JPH0747958B2 JP H0747958 B2 JPH0747958 B2 JP H0747958B2 JP 15932890 A JP15932890 A JP 15932890A JP 15932890 A JP15932890 A JP 15932890A JP H0747958 B2 JPH0747958 B2 JP H0747958B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- communication passage
- seal
- housing
- seal box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims description 19
- 210000004709 eyebrow Anatomy 0.000 title claims description 10
- 239000007788 liquid Substances 0.000 claims description 39
- 230000006835 compression Effects 0.000 claims description 29
- 238000007906 compression Methods 0.000 claims description 29
- 238000004891 communication Methods 0.000 claims description 21
- 238000001816 cooling Methods 0.000 claims description 9
- 238000005406 washing Methods 0.000 claims description 4
- 239000003595 mist Substances 0.000 description 11
- 239000003921 oil Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 235000013305 food Nutrition 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000009461 vacuum packaging Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012208 gear oil Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000011345 viscous material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明はボライ式真空ポンプとして食品の真空パックや
化学ガス中のベイパー回収用に使用する3葉2軸多段真
空ポンプに関するものである。Description: TECHNICAL FIELD The present invention relates to a three-leaf two-axis multi-stage vacuum pump used as a volley type vacuum pump for vacuum packing foods and recovering vapor in chemical gas.
(従来の技術と問題点) 食品の真空パックや化学ガス中のベイパー回収用には油
潤滑式真空ポンプが多用されている。この真空ポンプは
オイル混入を必要とする型式であるから、オイルミスト
の飛散が公害となる。また、ガス中に混入する粘質性物
質が、真空度、温度等により液化したミスト状となり、
オイルの循環使用によりオイル劣化が甚だしい欠陥があ
る。このためドライ式のまゆ型2軸多段真空ポンプが使
用されることも多い。しかしこの真空ポンプは食品、化
学ガスなどから吸引するミストがドライ式であるためロ
ーターとかケーシング内面に付着してポンプシャフトを
回転不能にするトラブルを生じることがあるため、前記
吸込みミスト中に洗浄液を混入吸引して液体洗浄する機
種があり、その洗浄液が一対のローターの凹と凸の対応
面で衝撃されてとじ込み現象を生じ、洗浄液が高圧液と
なつてハウジング側のシールボック内に突入し、シール
を消耗したり、ベアリング、タイミングギヤーにまで侵
入してベアリンググリースとかタイミングギヤーオイル
を白濁劣化させる等の予期しないトラブルさえ発生して
る。(Prior art and problems) Oil-lubricated vacuum pumps are often used for vacuum packing of food and recovery of vapor in chemical gas. Since this vacuum pump is a type that requires oil mixing, the scattering of oil mist is a pollution. Also, the viscous substance mixed in the gas becomes a mist that is liquefied due to the degree of vacuum, temperature, etc.
There is a serious defect that oil deterioration is caused by the circulating use of oil. For this reason, a dry type eyebrow type two-axis multi-stage vacuum pump is often used. However, since this vacuum pump is a dry type mist sucked from food, chemical gas, etc., it may adhere to the inner surface of the rotor or the casing to cause a problem that the pump shaft cannot rotate. There is a model that mixes and sucks to wash the liquid, and the washing liquid is impacted by the concave and convex corresponding surfaces of the pair of rotors to cause a binding phenomenon, the washing liquid becomes a high pressure liquid and plunges into the seal box on the housing side, There are even unexpected troubles such as exhaustion of seals, penetration of bearings and timing gears, and deterioration of bearing grease and timing gear oil by cloudiness.
この欠陥を防止するため吸込口にスクリーンを設けて吸
込みミストの回収を行つているが、大量のミストが混入
している場合には大きな抵抗となるから大まかなミスト
回収を行つているのが現状である。In order to prevent this defect, a screen is provided at the suction port to collect the suction mist, but if a large amount of mist is mixed, it will be a great resistance, so the rough mist collection is currently done. Is.
しかし、微少なスラッジや化学ガスから分離されてドラ
イ式真空ポンプ内面に付着した物質は洗浄以外に除去す
る方法がない。However, there is no method other than cleaning to remove substances that are separated from minute sludge and chemical gas and adhered to the inner surface of the dry vacuum pump.
(発明が解決しようとする問題点) 本発明はポンプ軸を伝つて圧力差により両側のハウジン
グに滲み出るとじ込み液の全部を最終段側ハウジングと
初段側ハウジングの各シールボックス内でポンプシャフ
トの回転と共に振り切る構成にすること、及び圧縮損を
生じないようにすることを解決することを考案の目的と
するものである。(Problems to be Solved by the Invention) In the present invention, when the pump liquid is transmitted through the pump shaft and oozes into the housings on both sides due to the pressure difference, all of the entrained liquid is rotated in the respective seal boxes of the final stage housing and the initial stage housing. It is an object of the present invention to solve the problem that the structure is shaken off together with it and that the compression loss is not generated.
(問題点を解決するための手段) 本発明の内部洗浄可能なまゆ型2軸多段真空ポンプは前
記した目的に合致させたもので、各段間の圧縮ガス移動
路が内蔵又は外装型である3葉まゆ型2軸多段真空ポン
プにおいて、 最終段側ハウジング(L)の第1シールボックスに吐出
側冷却連通路又は大気連通路を接続し、その連通路を前
記第1シールボックから最終段圧縮室のガス圧縮域に開
口させると共に、該シールボックのネック部を通るポン
プシャフトに洗浄液とじ込み防止の第1圧力液振切り環
を設け、第1段側のハウジング(R)の第2シールボッ
クに第2段の吸込側(冷気)を連通する連通路を連通
し、さらにその連通路を第2シールボックから第1段の
ガス圧縮域に開口させると共に、第2シールボックスの
ネック部を通るポンプシャフトに、洗浄液とじ込み防止
の第2圧力液振切り環を設けたことを特徴とする内部洗
浄可能なまゆ型2軸多段真空ポンプに関するものであ
る。(Means for Solving Problems) The eyebrow type two-axis multistage vacuum pump capable of cleaning the inside of the present invention meets the above-mentioned object, and the compressed gas moving path between each stage is an internal or external type. In a 3-leaf Mayu type two-shaft multi-stage vacuum pump, a discharge side cooling communication passage or an atmosphere communication passage is connected to the first seal box of the final stage housing (L), and the communication passage is compressed from the first seal box to the final stage. A first pressure liquid cut-off ring for preventing inclusion of cleaning liquid is provided on the pump shaft passing through the neck portion of the seal box while opening in the gas compression region of the chamber, and the second seal box of the housing (R) on the first stage side is provided. A pump passage that communicates with a communication passage that communicates with the suction side (cool air) of the second stage, opens the communication passage from the second seal box to the gas compression region of the first stage, and passes through the neck portion of the second seal box. Doo relates inner washable cocoon-screw multistage vacuum pump, characterized in that a ring shaking-off second pressure fluid cleaning solution bind-prevention.
第1段の吸込みは上方から行ない、最終段の吐出は下向
きとしてとじ込み液量を重力により少なくし、かつ洗浄
液排除の落下スピードを早めた方が有利であることが実
験的に確かめられた。尚、洗浄液のとじ込み液高圧力
は、約2〜3kg/cm2と推定される。It was experimentally confirmed that it is advantageous that the suction of the first stage is performed from above, the discharge of the final stage is downward, the amount of the binding liquid is reduced by gravity, and the falling speed of the cleaning liquid removal is accelerated. Incidentally, the high liquid pressure of the binding liquid of the cleaning liquid is estimated to be about 2 to 3 kg / cm 2 .
(実施例) 第1図は本発明真空ポンプの縦断面図、第2図は第1図
のハウジングLの拡大縦断側面図、第3図は第1図A−
A線切断の状態のフローシートである。(ガス質などに
より段数は変更できる。) 図中2は3葉式3段まゆ型真空ポンプ1のケーシング、
3は最終段(第3段)側ハウジング(L)、4は第1段
側ハウジング(R)である。) 3段まゆ型真空ポンプ1は第1段I、第2段II、第3段
IIIの圧縮室を備えてなり、各室に一対の3葉式ロータ
5、5を嵌め、各ロータ共通のポンプシャフト6、6を
通す各段間の仕切壁7a、8a内に前室の吐出口と後室の吸
込口とを連通する圧縮ガス移動路7、8を設けてなる。
9は第1段Iの圧縮室の吸込口で内部に洗浄液供給口を
設ける。10は第3段IIIの圧縮室の吐出口、11は第1段
I圧縮室の吐出口と圧縮ガス移動路7とを連通する部分
の外壁を構成する熱交換板、12は第2段IIの圧縮室の吐
出口と圧縮ガス圧縮移動路8を連通する部分の外壁を構
成する熱交換板、13は圧縮ガス移動路8と第3段IIIの
圧縮室の吸込口とを連通する部分の外壁を構成する熱交
換板、14は熱交換板11の外側の冷却器、15は熱交換板12
の外側の冷却器、16は熱交換板13の外側の冷却器であ
る。(Embodiment) FIG. 1 is a vertical sectional view of a vacuum pump of the present invention, FIG. 2 is an enlarged vertical side view of a housing L of FIG. 1, and FIG.
It is a flow sheet of the A line cutting state. (The number of stages can be changed depending on the gas quality, etc.) In the figure, 2 is the casing of the 3-leaf 3-stage eyebrows vacuum pump 1,
Reference numeral 3 denotes a final stage (third stage) housing (L), and 4 denotes a first stage housing (R). ) Three-stage eyebrow type vacuum pump 1 has first stage I, second stage II, third stage
A compression chamber of III is provided, and a pair of three-leaf type rotors 5 and 5 are fitted in each chamber, and the front chamber discharges into partition walls 7a and 8a between stages through which pump shafts 6 and 6 common to each rotor are passed. The compressed gas moving paths 7 and 8 are provided to connect the outlet and the suction port of the rear chamber.
Reference numeral 9 is a suction port of the compression chamber of the first stage I, and a cleaning liquid supply port is provided inside. Reference numeral 10 is a discharge port of the compression chamber of the third stage III, 11 is a heat exchange plate constituting an outer wall of a portion which communicates the discharge port of the compression chamber of the first stage I and the compressed gas moving path 7, and 12 is a second stage II. Is a heat exchange plate forming an outer wall of a portion that communicates the discharge port of the compression chamber with the compressed gas compression moving passage 8, and 13 is a portion of the portion that communicates the compressed gas moving passage 8 with the suction port of the compression chamber of the third stage III. The heat exchange plate constituting the outer wall, 14 is a cooler outside the heat exchange plate 11, 15 is the heat exchange plate 12
The outer cooler 16 is a cooler outside the heat exchange plate 13.
本実施例は圧縮ガス移送路7、8をケーシングと一体成
形した型式のものを示したが、ケーシング2の外部から
圧縮移送路パイプを挿入する外装型であつてもよい。In the present embodiment, the compressed gas transfer passages 7 and 8 are integrally molded with the casing. However, the compression transfer passage pipes may be inserted from the outside of the casing 2.
第3段の圧縮室IIIの吐出口10にはインタークーラー23
を介挿した吐出側冷却連通路22(または吐出10に連通し
ない大気連通路22a)をハウジング(L)3に設けた第
1シールボックス17に通ずるハウジング接続口18に接続
する。前記の第1シールボックス17はポンプシャフト
6、6の数と同数を設け、ここをネック部Nとし、該ネ
ック部Nを前記接続口18に連通させネック部Nを通るポ
ンプシャフト6に洗浄液とじ込み防止の第1圧力液振切
り環19を嵌めて固定し、それに続けてシールリング20を
設け、ネック部Nの外部にベアリング21を取付け、さら
に第1シールボックス17の外周に開口した短パイプ部分
24を第3段IIIの圧縮室の側板に形成した開口部25(第
3図参照)に連通する。シールリング20により回収した
洗浄液はドレン孔から排除する。開口部25は最終段(第
3段)IIIの圧縮室のガス圧縮域III aに設けるものであ
る。シールボックス17、17′は2個が第3図のように設
けられ、接続孔17aにより連通する。An intercooler 23 is installed at the discharge port 10 of the third-stage compression chamber III.
The discharge side cooling communication passage 22 (or the atmosphere communication passage 22a that does not communicate with the discharge 10) is connected to the housing connection port 18 that communicates with the first seal box 17 provided in the housing (L) 3. The first seal box 17 is provided with the same number as the pump shafts 6, 6, and this is the neck portion N. The neck portion N is communicated with the connection port 18 and the cleaning liquid is mixed into the pump shaft 6 passing through the neck portion N. The first pressure liquid shake-off ring 19 for prevention is fitted and fixed, the seal ring 20 is provided subsequently thereto, the bearing 21 is attached to the outside of the neck portion N, and the short pipe portion opened to the outer periphery of the first seal box 17 is further provided.
24 is communicated with an opening 25 (see FIG. 3) formed in the side plate of the compression chamber of the third stage III. The cleaning liquid collected by the seal ring 20 is removed from the drain hole. The opening 25 is provided in the gas compression region IIIa of the compression chamber of the final stage (third stage) III. Two seal boxes 17 and 17 'are provided as shown in FIG. 3 and communicate with each other through a connection hole 17a.
ハウジング(R)4にはハウジング接続口18′、ネック
部N′をもつ第2シールリング20′ハウジング接続口1
8′、ポンプシャフト6に嵌めた第2圧力液振切り1
9′、シールリング20′、ベアリング21′をハウジング
(L)と同じに設け、ハウジング接続口18′には第2段
IIの圧縮室の吸込口又は該口に近接する圧縮ガス移動路
7に連通すると共に、インタークーラー27を介挿した冷
却連通路26を接続し、第2シールボックス17′の外周に
開口した短パイプ部分24′を第1段I圧縮室の側板に形
成した開口部25′に連通する。開口部25′は第1段圧縮
室の側板に設けるものであるが、第3図の開口部25と同
じ位置である。The housing (R) 4 has a housing connection port 18 'and a second seal ring 20' having a neck portion N '.
8 ', 2nd pressure liquid shaker 1 fitted on pump shaft 6
9 ', a seal ring 20', and a bearing 21 'are provided in the same manner as the housing (L), and the housing connection port 18' has a second stage.
A short pipe that communicates with the suction port of the compression chamber of II or the compressed gas moving path 7 adjacent to the port and also connects with the cooling communication path 26 through which the intercooler 27 is inserted, and opens to the outer periphery of the second seal box 17 '. Portion 24 'communicates with opening 25' formed in the side plate of the first stage I compression chamber. The opening 25 'is provided on the side plate of the first-stage compression chamber, but is at the same position as the opening 25 in FIG.
前記のシールリング20、20′は公知のメカニカルシール
とか、オイルシールを使用しても、シール効果は同じで
ある。33は一方のポンプシャフトに固定したプーリ、35
は第1段側ハウジング(R)4の外側のタイミングギヤ
ーカバーである。The seal rings 20 and 20 'described above have the same sealing effect even if a known mechanical seal or an oil seal is used. 33 is a pulley fixed to one pump shaft, 35
Is a timing gear cover outside the first stage housing (R) 4.
本実施例において、多段式である3葉式3段まゆ型真空
ポンプ1は、吸込口9の真空度1Torr前後であるから、
該口9に供給される洗浄液は、即座にミスト化され、第
3段III、第2段II、第1段Iの各段の圧縮室において
順次に圧縮され、かつ冷却器14〜16又はこれに代わる冷
却装置により冷却されて圧縮による温度上昇を抑制され
る。しかして第3段IIIの圧縮室で圧縮され、吐出口10
から外気中に排除される圧縮ガスは最も高い温度である
が、その一部が吐出側冷却連通路22においてインターク
ーラー23により冷却されてハウジング接続口18に供給さ
れ、若しくは大気連通路22aから前記接続口18に供給さ
れる冷却気が、ネツク部Nをなすハウジング(L)3の
第1シールボツクス17を冷却し、ポンプシャフト6伝い
に第1シールボツクス17に噴出する洗浄液ミストがあつ
ても第1圧力液振切り環19により振り切り、その振切り
液が混合されてガスを短パイプ部分24から第3段III
(最終段)の圧縮室の開口部25に送つて再び吐出口10か
ら排出するから、第1シールボツクス17にあるシールリ
ング20等の軸封のためのシール材、ベアリング21等の、
洗浄液ミストによる損耗劣化を防ぐことができる。また
前記した第1段側ハウジング(R)4においても前記し
た最終段ハウジング(L)3と同様に作用させ、殊に冷
気連通路26によつて第2段室IIの圧縮ガス移動路7から
ガスを採取し、インタークーラー27により冷却してハウ
ジング接続口18′接続するものであるから、ポンプシヤ
フト6伝いに第2シールボツクス17′に噴出する洗浄液
ミストを第2圧力液振切り環19′により振り切つて短パ
イプ部分24′から、該圧縮室Iの圧縮側の開口部25′に
最終段側ハウジング(L)4と同じに送るもので、外気
を採取してハウジング接続口18′に送るものでないか
ら、圧力損はない。In the present embodiment, since the three-leaf type three-stage eyebrows type vacuum pump 1 which is a multi-stage type has a vacuum degree of the suction port 9 of about 1 Torr,
The cleaning liquid supplied to the port 9 is immediately misted and sequentially compressed in the compression chambers of the third stage III, the second stage II, and the first stage I, and the coolers 14 to 16 or Is cooled by a cooling device in place of the above, and temperature rise due to compression is suppressed. Then, it is compressed in the compression chamber of the third stage III, and the discharge port 10
Although the compressed gas that is discharged from the outside to the outside air has the highest temperature, a part of the compressed gas is cooled by the intercooler 23 in the discharge side cooling communication passage 22 and supplied to the housing connection port 18, or the above-mentioned connection from the atmosphere communication passage 22a. The cooling air supplied to the port 18 cools the first seal box 17 of the housing (L) 3 forming the neck portion N, and even if there is a cleaning liquid mist ejected to the first seal box 17 along the pump shaft 6, (1) The liquid is shaken off by the pressure liquid shaking ring 19, and the shaking liquid is mixed to move the gas from the short pipe portion 24 to the third stage III.
Since it is sent to the opening 25 of the compression chamber of the (final stage) and discharged from the discharge port 10 again, the seal material for the shaft seal such as the seal ring 20 in the first seal box 17, the bearing 21, etc.
It is possible to prevent wear and deterioration due to the cleaning liquid mist. The first-stage housing (R) 4 is also operated in the same manner as the last-stage housing (L) 3, and in particular, the cold gas communication passage 26 allows the compressed gas moving path 7 of the second-stage chamber II to move. Since the gas is sampled, cooled by the intercooler 27 and connected to the housing connection port 18 ', the cleaning liquid mist ejected along the pump shaft 6 to the second seal box 17' is discharged by the second pressure liquid shaking ring 19 '. It is sent out from the short pipe portion 24 'to the opening 25' on the compression side of the compression chamber I in the same manner as the final stage housing (L) 4, and the outside air is collected and sent to the housing connection port 18 '. Since it is not a thing, there is no pressure loss.
(作用及び効果) 多段真空ポンプが真空度1Torr付近で作動中に水等の洗
浄液を注ぐと、すぐにミスト化(蒸気化の真空度は50To
rr程度)するから、作業終了時に行つた方が理想である
が、作業中に注ぐこともあり、その場合に注入配管のよ
どみとか真空度によつて各段の圧縮室に大量の洗浄液ミ
ストが流れ込むことがあり、少量であつても液体は圧縮
不能であるからローター5、5の凹部と凸部の間で第3
図のように逃げ場を失つた洗浄液がとじ込められて連続
した爆発音を伴ういわゆるとじ込み現象が起こり、その
時高圧力液体がポンプシャフト伝いにハウジング(L)
(R)の第1、第2シールボックスに突出し、それが繰
り返されてシールリング20、20′などのシール材を損傷
したりベアリング21、21′の潤滑オイル成分を白濁劣化
するものであるが、本発明は、とじ込み現象が起きて第
1、第2シールボックス17、17′に突出しても、該ボッ
クス17、17′には吐出側冷却連通路22若しくは大気連通
路22a、又は冷気連通路26を連通させてあるから、とじ
込み現象から前記第1、第2シールボックス17、17′に
突出したミスト状の洗浄液が速やかにかつ充分冷却さ
れ、第1、第2圧力液振切り環19、19′により振り切ら
れて短パイプ部分等から開口部25、25′に送られて霧散
し、シールリング20、20′などのシール材の損傷、ベア
リング21、21′の劣化などを防ぎ、多段まゆ型真空ポン
プ1の性能保持に効果がある。(Operation and effect) When a multi-stage vacuum pump is operated at a vacuum degree of about 1 Torr and a cleaning liquid such as water is poured, it immediately becomes a mist (the vaporization vacuum degree is 50 Torr).
Therefore, it is ideal to carry out at the end of the work, but it may be poured during the work, in which case a large amount of mist of cleaning liquid will be in the compression chamber of each stage due to the stagnation of the injection pipe or the degree of vacuum. Since the liquid may flow in and the liquid is incompressible even in a small amount, it is possible to make a third gap between the concave and convex portions of the rotors 5, 5.
As shown in the figure, the cleaning liquid that has lost the escape area is confined and a so-called confinement phenomenon occurs with a continuous explosion sound. At that time, the high pressure liquid is transmitted along the pump shaft to the housing (L).
(R) is projected into the first and second seal boxes and repeated to damage the seal materials such as the seal rings 20 and 20 'and to cause the lubricating oil component of the bearings 21 and 21' to be clouded and deteriorated. According to the present invention, even if a binding phenomenon occurs and the first and second seal boxes 17 and 17 'are projected, the discharge side cooling communication passage 22 or the atmosphere communication passage 22a or the cool air communication passage is provided in the boxes 17 and 17'. Since the 26 are communicated with each other, the mist-like cleaning liquid protruding into the first and second seal boxes 17 and 17 'is quickly and sufficiently cooled due to the binding phenomenon, and the first and second pressure liquid shaking rings 19, It is shaken off by 19 'and sent from the short pipe part etc. to the openings 25, 25' and atomized to prevent damage to the sealing materials such as the seal rings 20 and 20 'and deterioration of the bearings 21 and 21', and to prevent the multistage eyebrows. This is effective in maintaining the performance of the mold vacuum pump 1.
第1図は本発明真空ポンプの縦断面図、第2図は第1図
のハウジングLの拡大縦断側面図、第3図は第1図A−
A線切断の状態のフローシートである。 I……第1段、II……第2段 III……第3段、III a……圧縮域 1……3葉式3段まゆ型真空ポンプ 2……ケーシング、3……最終段側ハウジング(L) 4……第1段段側ハウジング(R) 5……3葉式ロータ、6……ポンプシャフト 7、8……圧縮ガス移動路、9……吸込口 10……吐出口、11、12、13……熱交換板 14、15、16……冷却器 17、17′……第1、第2シールボックス 18、18′……ハウジング接続口 N、N′……ネック部 19、19′……第1、第2圧力液振切り環 20、20′……シールリング 21、21′……ベアリング 22……吐出側冷却連通路、22a……大気連通路 23……インタークーラー 24、24′……短パイプ部分 26……冷気連通路、27……インタークーラー1 is a vertical sectional view of the vacuum pump of the present invention, FIG. 2 is an enlarged vertical side view of the housing L of FIG. 1, and FIG. 3 is FIG.
It is a flow sheet of the A line cutting state. I ... First stage, II ... Second stage III ... Third stage, IIIa ... Compression region 1 ... 3-leaf type 3-stage eyebrow vacuum pump 2 ... Casing, 3 ... Final stage housing (L) 4 ... 1st stage housing (R) 5 ... 3-leaf rotor, 6 ... Pump shaft 7, 8 ... Compressed gas moving path, 9 ... Suction port 10 ... Discharge port, 11, 12, 13 ...... Heat exchange plates 14, 15, 16 ...... Coolers 17, 17 '...... First and second seal boxes 18, 18' ...... Housing connection port N, N '...... Neck part 19, 19 '…… 1st and 2nd pressure liquid shaking ring 20, 20' …… Seal ring 21, 21 ′ …… Bearing 22 …… Discharge side cooling communication passage, 22a …… Atmosphere communication passage 23 …… Intercooler 24, 24 ′ …… Short pipe part 26 …… Cold air passage, 27 …… Intercooler
Claims (1)
である3葉まゆ型2軸多段真空ポンプにおいて、 最終段側ハウジング(L)の第1シールボックスに吐出
側冷却連通路又は大気連通路を接続し、その連通路を前
記第1シールボックから最終段圧縮室のガス圧縮域に開
口させると共に、該シールボックのネック部を通るポン
プシャフトに洗浄液とじ込み防止の第1圧力液振切り環
を設け、第1段側のハウジング(R)の第2シールボッ
クに第2段の吸込側(冷気)を連通する連通路を連通
し、さらにその連通路を第2シールボックから第1段の
ガス圧縮域に開口させると共に、第2シールボックスの
ネック部を通るポンプシャフトに、洗浄液とじ込み防止
の第2圧力液振切り環を設けたことを特徴とする内部洗
浄可能なまゆ型2軸多段真空ポンプ。1. In a three-leaf eyebrow type two-axis multi-stage vacuum pump in which a compressed gas moving path between each stage is built-in or an exterior type, a discharge side cooling communication passage or a first seal box of a final stage side housing (L) is provided. An atmosphere communication passage is connected, the communication passage is opened from the first seal box to the gas compression region of the final stage compression chamber, and the first pressure liquid vibration for preventing the inclusion of the cleaning liquid on the pump shaft passing through the neck portion of the seal box. A cut ring is provided, and a communication passage that communicates the suction side (cool air) of the second stage is communicated with the second seal bock of the housing (R) on the first stage side, and the communication passage is further extended from the second seal bock to the first side. A two-way eyebrow type with internal washing capable of opening to the gas compression region of the stage and having a second pressure liquid shaking ring for preventing the inclusion of the washing liquid on the pump shaft passing through the neck portion of the second seal box. Multi-stage true Empty pump.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15932890A JPH0747958B2 (en) | 1990-06-18 | 1990-06-18 | Eyebrow type 2-axis multi-stage vacuum pump with internal cleaning |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15932890A JPH0747958B2 (en) | 1990-06-18 | 1990-06-18 | Eyebrow type 2-axis multi-stage vacuum pump with internal cleaning |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0450492A JPH0450492A (en) | 1992-02-19 |
JPH0747958B2 true JPH0747958B2 (en) | 1995-05-24 |
Family
ID=15691415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15932890A Expired - Fee Related JPH0747958B2 (en) | 1990-06-18 | 1990-06-18 | Eyebrow type 2-axis multi-stage vacuum pump with internal cleaning |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0747958B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0310615D0 (en) * | 2003-05-08 | 2003-06-11 | Boc Group Plc | Improvements in seal assemblies |
JP4911790B2 (en) * | 2009-03-06 | 2012-04-04 | 株式会社アンレット | Roots type vacuum pump |
CN113604889B (en) * | 2021-07-06 | 2022-08-19 | 福建省永泰县安利席业有限公司 | Intelligent weaving-based water-proof and dirt-resistant silk mattress processing equipment |
-
1990
- 1990-06-18 JP JP15932890A patent/JPH0747958B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0450492A (en) | 1992-02-19 |
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