JPH0743459B2 - Reflective optics - Google Patents
Reflective opticsInfo
- Publication number
- JPH0743459B2 JPH0743459B2 JP3313043A JP31304391A JPH0743459B2 JP H0743459 B2 JPH0743459 B2 JP H0743459B2 JP 3313043 A JP3313043 A JP 3313043A JP 31304391 A JP31304391 A JP 31304391A JP H0743459 B2 JPH0743459 B2 JP H0743459B2
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- reflecting mirror
- optical system
- incident
- light
- convex
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Description
【0001】[0001]
【産業上の利用分野】本発明は、物体または天体から放
射される光線を集光して、物体または天体の視野測定を
行ない、物体または天体の投影を行なうための同軸型反
射集光光学系に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coaxial reflection condensing optical system for condensing light rays emitted from an object or celestial body to measure the visual field of the object or celestial body and to project the object or celestial body. Regarding
【0002】[0002]
【従来の技術】従来の同軸型反射集光光学系としては、
例えば、1964年、岩波書店発行、久保田広著、「光
学」(初版)の第231〜233頁に記載された光学系が
知られている。2. Description of the Related Art As a conventional coaxial reflection / focus optical system,
For example, there is known an optical system described on pages 231 to 233 of "Optics" (first edition) by Hiroshi Kubota, published by Iwanami Shoten, 1964.
【0003】この光学系は、同軸型カセグレイン反射光
学系として知られているもので、図3に示すように、透
孔41を有し、正のパワーを有する凹面反射鏡4と、負の
パワーを有する凸面反射鏡5とを備えており、物体また
は天体からの入射光線2は、凹面反射鏡4および凸面反
射鏡5により反射されて集光位置11に結像される。な
お、この光学系における入射光線2の入射瞳像20は、図
5に示すように、凸面反射鏡5によって入射光中心部が
遮蔽21された形状になる。This optical system is known as a coaxial Cassegrain reflection optical system. As shown in FIG. 3, a concave reflecting mirror 4 having a through hole 41 and having a positive power, and a negative power. And a convex reflecting mirror 5 having an incident light ray from an object or a celestial body are reflected by the concave reflecting mirror 4 and the convex reflecting mirror 5 to form an image at a condensing position 11. The incident pupil image 20 of the incident light ray 2 in this optical system has a shape in which the central portion of the incident light is shielded 21 by the convex reflecting mirror 5, as shown in FIG.
【0004】また、反射光学系に入射する光線の視野を
測定しながら、同軸型反射光学系により天体像を投影す
る光学系として、1989年、日本赤外線技術研究会発
行、「赤外線技術」第16号、第2〜18頁に記載され
た光学系が知られている。Further, as an optical system for projecting an astronomical image by a coaxial reflection optical system while measuring the visual field of a light ray incident on the reflection optical system, the "Infrared Technology" No. 16 published by the Japan Infrared Technology Research Group in 1989. The optical systems described in No. 1 and 2-18 are known.
【0005】この光学系は、図4に示すように、透孔41
を有する凹面反射鏡4と、凸面反射鏡5とよりなる第1
の投影用光学系の他に、集光レンズ12および位置測定機
能を有する受光素子13よりなる第2の測定用光学系を備
えている。This optical system, as shown in FIG.
A concave reflecting mirror 4 having a
In addition to the projection optical system, a second measurement optical system including a condenser lens 12 and a light receiving element 13 having a position measuring function is provided.
【0006】図4に示す第1の投影用光学系において
は、物体または天体からの入射光線2は、凹面反射鏡4
および凸面反射鏡5によって反射されて集光位置11に結
像され、この入射光線2の入射瞳像20は、図5に示すよ
うに、凸面反射鏡5によって入射光中心部が遮蔽21され
た形状になる。In the first projection optical system shown in FIG. 4, an incident ray 2 from an object or an celestial body is a concave reflecting mirror 4.
And, the incident pupil image 20 of the incident ray 2 is reflected by the convex reflecting mirror 5 and is focused on the condensing position 11. As shown in FIG. 5, the convex reflecting mirror 5 shields 21 the center of the incident light. It becomes a shape.
【0007】第2の測定用光学系は、第1の投影用光学
系に隣接して配置されており、第2の測定用光学系の集
光光学系光軸bは、第1の投影用光学系の反射光学系光
軸aと平行に配置されており、第2の測定用光学系に入
射する入射光線21は、集光光学系光軸bに垂直な受光素
子13の受光面に集光される。受光素子13の受光面は、位
置測定機能を有しているので、集光レンズ12の焦点距離
および入射光線21の入射角が算出される。The second measuring optical system is arranged adjacent to the first projecting optical system, and the converging optical system optical axis b of the second measuring optical system is the first projecting optical system. The incident light beam 21 that is arranged parallel to the reflection optical system optical axis a of the optical system and enters the second measurement optical system is collected on the light receiving surface of the light receiving element 13 that is perpendicular to the light collection optical system optical axis b. Be illuminated. Since the light receiving surface of the light receiving element 13 has a position measuring function, the focal length of the condenser lens 12 and the incident angle of the incident light ray 21 are calculated.
【0008】[0008]
【発明が解決しようとする課題】しかし、このような従
来の光学系において、物体または天体からの入射光線の
強度が著しく強い場合には、凸面反射鏡5の裏面で吸収
される入射光量が増大して、凸面反射鏡5の温度が上昇
し、凸面反射鏡5の熱による変形量が増加するという問
題があった。However, in such a conventional optical system, when the intensity of the incident light from the object or the celestial body is extremely strong, the amount of incident light absorbed by the back surface of the convex reflecting mirror 5 increases. Then, there is a problem that the temperature of the convex reflecting mirror 5 rises and the amount of deformation of the convex reflecting mirror 5 due to heat increases.
【0009】そこで、本発明は、物体または天体からの
入射光線の強度が著しく強い場合でも、凸面反射鏡5に
吸収される入射光量を少なくし、さらに、小さい口径で
入射光結像機能と入射光線の位置測定機能とを備えた反
射光学系を得ることを目的としている。Therefore, the present invention reduces the amount of incident light absorbed by the convex reflecting mirror 5 even when the intensity of the incident light from the object or the celestial body is extremely high, and further, the incident light image forming function and the incident light are made with a small aperture. The objective is to obtain a reflective optical system having a function of measuring the position of a light beam.
【0010】[0010]
【課題を解決するための手段】この目的を達成するため
に、本発明の反射光学系は、入射光線を反射する正のパ
ワーを有する凹面反射鏡と、この凹面反射鏡で反射され
た集束光を反射する負のパワーを有する凸面反射鏡と、
この凸面反射鏡に対して入射側に配置され、入射光線を
側方に反射する反射鏡と、この反射鏡によって反射した
光線を集光する集光光学系と、この集光光学系の集光位
置に配置され、集光スポットの位置を観測する機能を備
えた受光素子とにより構成される。In order to achieve this object, a reflection optical system of the present invention comprises a concave reflecting mirror having a positive power for reflecting an incident light beam, and a focused light reflected by the concave reflecting mirror. A convex mirror having negative power to reflect
A reflecting mirror that is arranged on the incident side with respect to this convex reflecting mirror and that reflects the incident light beam to the side, a condensing optical system that condenses the light beam reflected by this reflecting mirror, and a condensing optical system And a light receiving element having a function of observing the position of the focused spot.
【0011】また、本発明の反射光学系は、入射光線を
反射する正のパワーを有する第1の凹面反射鏡と、この
第1の凹面反射鏡で反射された集束光を反射する負のパ
ワーを有する凸面反射鏡と、この凸面反射鏡に対して入
射側に配置され、入射光線を側方に反射する正のパワー
を有する第2の凹面反射鏡と、この第2の凹面反射鏡の
集光位置に配置され、集光スポットの位置を観測する機
能を備えた受光素子とにより構成することもできる。Further, the catoptric system of the present invention comprises a first concave reflecting mirror having a positive power for reflecting an incident light beam, and a negative power reflecting a focused light reflected by the first concave reflecting mirror. And a second concave reflector having a positive power, which is arranged on the incident side with respect to the convex reflector and has a positive power to reflect the incident light beam to the side, and a collection of the second concave reflector. It can also be configured by a light receiving element arranged at the light position and having a function of observing the position of the focused spot.
【0012】[0012]
【作用】このように、凸面反射鏡に対して、入射側に反
射鏡を配置するという構成により、凸面反射鏡で吸収さ
れる光線を減らして、凸面反射鏡の熱による変形を防止
することができるとともに、凸面反射鏡で遮蔽されるべ
き入射光線が、側方に反射されて物体または天体位置計
測に利用できる。As described above, by arranging the reflecting mirror on the incident side with respect to the convex reflecting mirror, light rays absorbed by the convex reflecting mirror can be reduced and deformation of the convex reflecting mirror due to heat can be prevented. In addition, the incident light beam to be shielded by the convex reflecting mirror is reflected laterally and can be used for measuring the position of the object or the celestial body.
【0013】[0013]
(第1の実施例)図1の光路断面図に示すように、発光
物体1からの入射光線2の方向を変える駆動反射鏡3
と、透孔41を有する凹面反射鏡4と、凸面反射鏡5と、
入射側にスリットを配置した分光器を有する濃度検出用
の受光素子9とよりなる第1の投影用光学系を備え、さ
らに、一部の光線を横方向に反射する反射鏡6と、この
反射鏡6で反射された光線を集光する集光レンズ7と、
位置検出用の受光素子8とよりなる第2の測定用光学系
を備えている。なお、濃度検出用の受光素子9に配置さ
れたスリットの代わりに、所望の波長領域の濃度を検出
するためのバンドパス・フィルタを使用してもよい。(First Embodiment) As shown in the sectional view of the optical path in FIG. 1, a driving reflecting mirror 3 for changing the direction of an incident light beam 2 from a light emitting object 1.
A concave reflecting mirror 4 having a through hole 41, a convex reflecting mirror 5,
A first projection optical system including a light receiving element 9 for density detection having a spectroscope having a slit arranged on the incident side is provided, and further, a reflecting mirror 6 for reflecting a part of light rays in the lateral direction and the reflection mirror 6. A condenser lens 7 for condensing the light rays reflected by the mirror 6,
A second measuring optical system including a light receiving element 8 for position detection is provided. A bandpass filter for detecting the density in a desired wavelength region may be used instead of the slit arranged in the light receiving element 9 for density detection.
【0014】第1の投影用光学系によって、発光物体1
から入射した光線2は、駆動反射鏡3によって反射さ
れ、凹面反射鏡4および凸面反射鏡5により反射され、
透孔41を経て受光素子9上に結像される。同時に、第2
の測定用光学系によって、駆動反射鏡3で反射された一
部の入射光は、凸面反射鏡5の前方に配置された反射鏡
6により横方向に反射され、集光レンズ7により集光さ
れて位置検出用受光素子8上に結像される。By the first projection optical system, the light-emitting object 1
The light ray 2 incident from is reflected by the driving reflecting mirror 3, and is reflected by the concave reflecting mirror 4 and the convex reflecting mirror 5,
An image is formed on the light receiving element 9 through the through hole 41. At the same time, the second
Part of the incident light reflected by the driving reflecting mirror 3 by the measuring optical system of 1 is laterally reflected by the reflecting mirror 6 arranged in front of the convex reflecting mirror 5, and is condensed by the condenser lens 7. An image is formed on the position detecting light receiving element 8.
【0015】このとき、集光レンズ7の焦点距離および
位置検出用受光素子8上における集光スポットの重心位
置の移動量に基づいて、反射光学系に入射した光線2の
入射角が算出できる。また、濃度検出用の受光素子9の
出力信号から得られる濃度分布に基づいて、発光物体1
と駆動反射鏡3との間に存在する大気中の成分の濃度が
検出できる。At this time, the incident angle of the light beam 2 incident on the reflection optical system can be calculated based on the focal length of the condenser lens 7 and the amount of movement of the center of gravity of the condensed spot on the position detecting light receiving element 8. Further, based on the density distribution obtained from the output signal of the light receiving element 9 for density detection, the light emitting object 1
It is possible to detect the concentration of the component in the atmosphere existing between the driving reflection mirror 3 and the driving reflection mirror 3.
【0016】さらに、第1の投影用光学系における光軸
の中央部の光線が、第2の測定用光学系において使用さ
れているので、両光学系の光軸を一致させることができ
るから、発光物体1が、無限遠にあっても有限距離にあ
っても、第1の投影用光学系における入射角と第2の測
定用光学系における入射角とを等しいものとみなすこと
ができる。Furthermore, since the light beam at the center of the optical axis in the first projection optical system is used in the second measurement optical system, the optical axes of both optical systems can be made to coincide with each other. Whether the light emitting object 1 is at infinity or at a finite distance, the incident angle in the first projection optical system and the incident angle in the second measurement optical system can be regarded as equal.
【0017】したがって、位置検出用受光素子8上にお
ける集光スポットの重心位置から算出した入射光線2の
入射角は、第1の投影用光学系における入射角に対応し
ている。Therefore, the incident angle of the incident light beam 2 calculated from the position of the center of gravity of the focused spot on the position detecting light receiving element 8 corresponds to the incident angle in the first projection optical system.
【0018】また、凸面反射鏡5で遮蔽される入射光
が、凸面反射鏡5の前方において反射鏡6により第2の
測定用光学系に反射させられるので、凸面反射鏡5で吸
収される入射光量を減らすことができ、凸面反射鏡5の
熱による変形を防止できる。The incident light shielded by the convex reflecting mirror 5 is reflected by the reflecting mirror 6 to the second measuring optical system in front of the convex reflecting mirror 5, so that the incident light is absorbed by the convex reflecting mirror 5. It is possible to reduce the amount of light and prevent the convex reflecting mirror 5 from being deformed by heat.
【0019】(第2の実施例)図2の光路断面図に示す
ように、発光物体1からの入射光線2の方向を変える駆
動反射鏡3と、透孔41を有する凹面反射鏡4と、凸面反
射鏡5と、受光素子9とよりなる第1の投影用光学系を
備え、さらに、一部の光線を横方向に反射し、正のパワ
ーを有する凹面反射鏡10と、位置検出用の受光素子8と
よりなる第2の測定用光学系を備えている。(Second Embodiment) As shown in the sectional view of the optical path in FIG. 2, a driving reflecting mirror 3 for changing the direction of an incident ray 2 from a light emitting object 1, a concave reflecting mirror 4 having a through hole 41, The convex reflecting mirror 5 and the first projection optical system including the light receiving element 9 are provided, and further, a concave reflecting mirror 10 for reflecting a part of light rays in the lateral direction and having a positive power, and a position detecting mirror. A second measuring optical system including the light receiving element 8 is provided.
【0020】このように、正のパワーを有する凹面反射
鏡10を使用することにより、第1の実施例における集光
レンズ7を排除している。As described above, by using the concave reflecting mirror 10 having a positive power, the condenser lens 7 in the first embodiment is eliminated.
【0021】第1の投影用光学系によって、発光物体1
から入射した光線2は、第1の実施例と同様に、駆動反
射鏡3によって反射され、凹面反射鏡4および凸面反射
鏡5により反射され、透孔41を経て受光素子9上に結像
される。また、同時に、第2の測定用光学系によって、
駆動反射鏡3で反射された一部の入射光は、凸面反射鏡
5の前方に配置された正のパワーを有する凹面反射鏡10
により横方向に反射されて位置検出用受光素子8上に結
像される。By the first projection optical system, the light emitting object 1
Similarly to the first embodiment, the light ray 2 incident from the mirror is reflected by the driving reflecting mirror 3, is reflected by the concave reflecting mirror 4 and the convex reflecting mirror 5, and is imaged on the light receiving element 9 through the through hole 41. It At the same time, the second measurement optical system
A part of the incident light reflected by the driving reflecting mirror 3 is disposed in front of the convex reflecting mirror 5 and has a concave power reflecting mirror 10 having a positive power.
Then, the light is reflected in the lateral direction to form an image on the position detection light receiving element 8.
【0022】そして、凹面反射鏡10の焦点距離および位
置検出用受光素子8上における集光スポットの重心位置
の移動量に基づいて反射光学系に入射した光線2の入射
角が算出できる。Then, the incident angle of the light ray 2 incident on the reflection optical system can be calculated based on the focal length of the concave reflecting mirror 10 and the amount of movement of the center of gravity of the focused spot on the position detecting light receiving element 8.
【0023】なお、前記各実施例において、濃度検出用
の受光素子9を2次元のビデコン・カメラまたはCCD
等に置換することにより、発光物体1の追尾カメラとし
て使用することができる。In each of the above embodiments, the light receiving element 9 for density detection is a two-dimensional video camera or CCD.
It can be used as a tracking camera for the light-emitting object 1 by substituting the same.
【0024】[0024]
【発明の効果】以上の実施例に基づく説明から明らかな
ように、本発明の反射光学系によると、凸面反射鏡に対
して入射側に、反射鏡または凹面反射鏡を配置する構成
により、凸面反射鏡で吸収される光線を減らして、凸面
反射鏡の熱による変形を防止することができるととも
に、凸面反射鏡で遮蔽されるべき入射光線が、側方に反
射されて物体または天体位置計測に利用される。As is apparent from the description based on the above embodiments, according to the reflection optical system of the present invention, the convex surface is formed by arranging the reflecting mirror or the concave reflecting mirror on the incident side. The rays absorbed by the reflecting mirror can be reduced to prevent deformation of the convex reflecting mirror due to heat, and the incident rays that should be shielded by the convex reflecting mirror are reflected sideways to measure the object or astronomical position. Used.
【0025】さらに、投影用光学系における光軸の中央
部の光線が、測定用光学系において使用されているの
で、両光学系の光軸を一致させることができるから、発
光物体が無限遠にあっても有限距離にあっても、投影用
光学系における入射角と測定用光学系における入射角と
を等しいものとみなせる。Further, since the light beam at the center of the optical axis in the projection optical system is used in the measurement optical system, the optical axes of both optical systems can be made to coincide with each other, so that the light emitting object is placed at infinity. The incident angle in the projection optical system and the incident angle in the measurement optical system can be regarded as equal regardless of the existence or the finite distance.
【0026】したがって、位置検出用受光素子上におけ
る集光スポットの重心位置から算出した入射光線の入射
角は、投影用光学系における入射角に対応している。Therefore, the incident angle of the incident light beam calculated from the position of the center of gravity of the focused spot on the position detecting light receiving element corresponds to the incident angle in the projection optical system.
【図1】本発明の反射光学系の一実施例を示す光路断面
図、FIG. 1 is an optical path sectional view showing an embodiment of a reflective optical system of the present invention,
【図2】本発明の反射光学系の他の実施例を示す光路断
面図、FIG. 2 is an optical path sectional view showing another embodiment of the reflective optical system of the present invention,
【図3】従来の反射光学系の一例を示す光路断面図、FIG. 3 is a sectional view of an optical path showing an example of a conventional reflection optical system,
【図4】従来の反射光学系の他の例を示す光路断面図、FIG. 4 is an optical path sectional view showing another example of a conventional reflective optical system,
【図5】本発明および従来の反射光学系における入射瞳
像を示す図である。FIG. 5 is a diagram showing an entrance pupil image in the present invention and a conventional catoptric system.
1 発光物体 2、21 入射光線 3 駆動反射鏡 4 凹面反射鏡 41 透孔 5 凸面反射鏡 6 反射鏡 7 集光レンズ 8 位置検出用受光素子 9 受光素子 10 凹面反射鏡 1 Light-emitting object 2, 21 Incident light beam 3 Driving reflecting mirror 4 Concave reflecting mirror 41 Through hole 5 Convex reflecting mirror 6 Reflecting mirror 7 Condensing lens 8 Position detecting light receiving element 9 Light receiving element 10 Concave reflecting mirror
Claims (4)
凹面反射鏡と、該凹面反射鏡で反射された集束光を反射
する負のパワーを有する凸面反射鏡と、該凸面反射鏡に
対して入射側に配置され、入射光線を側方に反射する反
射鏡と、該反射鏡によって反射した光線を集光する集光
光学系と、該集光光学系の集光位置に配置され、集光ス
ポットの位置を観測する機能を備えた受光素子とを具備
することを特徴とする反射光学系。1. A concave reflecting mirror having a positive power for reflecting incident light rays, a convex reflecting mirror having a negative power for reflecting focused light reflected by the concave reflecting mirror, and the convex reflecting mirror. A reflecting mirror that is arranged on the incident side and that reflects the incident light beam to the side, a condensing optical system that condenses the light beam reflected by the reflecting mirror, and a condensing position of the condensing optical system A reflective optical system comprising: a light receiving element having a function of observing the position of a spot.
小さいことを特徴とする請求項1に記載の反射光学系。2. The catoptric system according to claim 1, wherein the diameter of the reflecting mirror is smaller than that of the concave reflecting mirror.
第1の凹面反射鏡と、該第1の凹面反射鏡で反射された
集束光を反射する負のパワーを有する凸面反射鏡と、該
凸面反射鏡に対して入射側に配置され、入射光線を側方
に反射する正のパワーを有する第2の凹面反射鏡と、該
第2の凹面反射鏡の集光位置に配置され、集光スポット
の位置を観測する機能を備えた受光素子とを具備するこ
とを特徴とする反射光学系。3. A first concave reflecting mirror having a positive power for reflecting an incident light beam, a convex reflecting mirror having a negative power for reflecting the focused light reflected by the first concave reflecting mirror, and A second concave reflecting mirror, which is arranged on the incident side with respect to the convex reflecting mirror and has a positive power to reflect the incident light beam to the side, and a light collecting position of the second concave reflecting mirror, A reflective optical system comprising: a light receiving element having a function of observing the position of a spot.
小さいことを特徴とする請求項3に記載の反射光学系。4. The catoptric system according to claim 3, wherein the diameter of the reflecting mirror is smaller than that of the concave reflecting mirror.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3313043A JPH0743459B2 (en) | 1991-11-02 | 1991-11-02 | Reflective optics |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3313043A JPH0743459B2 (en) | 1991-11-02 | 1991-11-02 | Reflective optics |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05127085A JPH05127085A (en) | 1993-05-25 |
JPH0743459B2 true JPH0743459B2 (en) | 1995-05-15 |
Family
ID=18036518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3313043A Expired - Lifetime JPH0743459B2 (en) | 1991-11-02 | 1991-11-02 | Reflective optics |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0743459B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3440458B2 (en) * | 1993-06-18 | 2003-08-25 | 株式会社ニコン | Illumination device, pattern projection method, and semiconductor element manufacturing method |
JP3752787B2 (en) * | 1997-07-04 | 2006-03-08 | 三菱電機株式会社 | Multispectral spectral reflection optics |
US7573654B2 (en) * | 2007-11-27 | 2009-08-11 | Eastman Kodak Company | Dual focal length lens system |
-
1991
- 1991-11-02 JP JP3313043A patent/JPH0743459B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH05127085A (en) | 1993-05-25 |
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