JPH0741501B2 - Connection structure between table and drive - Google Patents

Description

TECHNICAL FIELD The present invention relates to a connection structure for a table and a drive unit.

[Problems to be Solved by Conventional Techniques and Inventions]

For machine tools and precision measuring instruments that are required to achieve processing accuracy and measurement accuracy on the order of nanometers, which is equipped with a table on which a workpiece is placed and a drive unit that moves the table, ultra-precision movement The following basic functions are required for the connection between the table and the drive unit in order to more efficiently transmit the motion of the table drive system (drive unit) to the table.

It must have sufficient rigidity in the driving direction so that stick-slip or the like due to the magnitude of the load on the table or insufficient guide rigidity does not occur.

Efficiently removes and absorbs motion errors caused by disturbances such as whirling of the drive unit, vertical movement, pitching, yawing, and rolling without depending on load fluctuations on the table or dynamic load fluctuations. It has a high motion error absorbing property in order to accurately transmit the driving force.

It has a high damping property because it does not transmit the vibration generated by the drive unit to the table side and conversely does not transmit the vibration on the table side caused by load fluctuation or instability phenomenon to the drive unit or the guide structure.

In order to suppress or minimize thermal deformation of the entire system, at least the heat flow from the drive unit to the table and conversely the heat flow from the table to the drive unit can be insulated and blocked, and the heat conduction from the heat generated by the drive unit affects the table. It should not be deformed by heat.

The structure is compact so that it can be easily installed in a very limited space where the drive unit and the table are connected.

However, the conventional connecting portion has a single function as a joint, such as bolt connection, and does not have the combined functions described in the above items 1 to 3.

An object of the present invention is to provide a connection structure between a table and a drive unit,
It is to satisfy the functionally contradictory requirements of "flexible structure" and "rigid structure" at the same time with a compact structure, and to provide a highly functional joint with multiple active functions. Especially.

[Means for Solving the Problems]

In order to solve the above-mentioned problems, a connection structure of a table and a drive unit according to the present invention connects a casing to a drive side, and a rod which is inserted into the casing in a loose fitting manner is provided outside the casing. At the driven side, and the rod is connected to a flat plate portion in the casing,
A connection structure of a table and a drive unit for transmitting power by sandwiching and holding the flat plate portion with a pair of first and second cushion members in the casing, wherein the casing includes a cylindrical body and both ends of the cylindrical body. The first and second walls for closing the respective opening portions of the first and second walls, and the first cushion material is provided in an elastically deformable drum-shaped bag member having a central hole for rod insertion through an air piping system. The second cushion material is formed by injecting air into an elastically deformable drum-shaped bag member by an air piping system, and the outer peripheral edge of the bag member in the axially outer direction is Abutting on inner corners between the first and second walls of the casing and the cylindrical body, and further abutting inner ends of the bag member on one surface and the other surface of the flat plate portion, respectively. It is a thing.

Further, another table-driving portion connection structure according to the present invention connects the casing to the driven side, and connects the rod inserted in the casing in a loose fit shape to the driving side outside the casing, Further, a connecting structure of a table and a drive unit in which a flat plate portion is continuously provided on the rod in the casing, and the flat plate portion is held and held by a pair of first and second cushion members in the casing to transmit power. The casing comprises a cylindrical body and first and second walls that close openings at both ends of the cylindrical body, respectively, and the first cushion material is an elastic member having a central hole for rod insertion. Air is injected into the deformable hourglass-shaped bag member by an air piping system, and the second cushion member is injected into the elastically deformable hourglass-shaped bag member by an air piping system. Axial direction of the bag member The outer peripheral edge on the outer side is brought into contact with the inner corner between the first and second walls of the casing and the cylindrical body, and the inner end surface of the bag member is connected to one surface of the flat plate portion and other surfaces. The surfaces are brought into contact with each other.

[Work]

Since the first and second cushion materials are each formed by injecting air into the bag member, not only the soft property of absorbing the vibration name (by controlling the increase / decrease of pressure) but also the high rigidity of the connecting portion can be obtained. it can. In addition, the minute movement error from the drive unit side can be removed and absorbed by the first and second cushion materials. Further, the cushion member can absorb the vibration from the drive unit or the vibration from the table side. In particular, the bag members of the first and second cushion materials are hourglass-shaped, and the outer peripheral edge of the first outer side in the axial direction is the first
Since the bag member abuts on the inner corner between the second wall and the cylindrical body, the bag member can be held in the casing so as not to be displaced, and the inner end portion of the bag member has a high degree of freedom of movement. It is possible to absorb directional motion error, vibration, and the like.
Moreover, it is possible to constantly supply the cushion member with air of the same temperature, and to keep the air temperature in the cushion member constant. Also, by finely adjusting the air pressure of the first and second cushion materials, the first and second cushion materials can be adjusted.
It is possible to subtly change the rigidity of the cushioning material and the damping capacity of vibration and the like.

〔Example〕

 Hereinafter, the present invention will be described in detail with reference to the drawings illustrating examples.

3 and 4 show a model of a machine tool in which the connection structure of the table and the drive unit according to the present invention is used. This model includes a table 1 on which a workpiece (not shown) is placed,
The table 1 is provided with a drive unit 2 which reciprocates along the longitudinal direction as indicated by arrows A and B.

Here, the drive unit 2 includes a ball screw 3, a nut member 4 that is screwed into the ball screw 3 so as to be able to move forward and backward, a motor 5 that rotates the ball screw 3 around an axis, and the like. Both sides of the ball screw 3 are rotatably supported by support members 6a and 6b, respectively, and the output shaft of the motor 5 is connected to one end of the ball screw 3 via a coupling 7. Therefore, if the motor 5 drives and the output shaft rotates,
The ball screw 3 rotates about the axis, and the nut member 4 shows an arrow.
Reciprocates like A and B.

By the way, as shown in FIG. 5, when the nut member 4 is advancing along the arrow X direction, the horizontal direction, that is, the arrow Y
Direction, vertical direction, that is, arrow Z direction, rotation around arrow X direction like arrow a (rolling), rotation around arrow Y direction like arrow b (pitching), arrow like arrow c A motion error such as rotation (yawing) around the Z direction occurs.

That is, in order to absorb the above-mentioned motion error, the table 1 and the drive unit 2 are connected by the connection structure according to the present invention.

Therefore, in the machine tool model shown in FIG. 3 and FIG. 4, the table 1 includes the guide bars 45a,
45b which reciprocate along the guide bar 45
Both ends of a and 45b are respectively held by holding bodies 46, and slide bodies 48 having bearings 47 such as linear ball bearings are externally fitted to the guide bars 45a and 45b, respectively.
The table 1 is placed and held on the table 48. The connection structure shown in FIG. 1 is interposed between the table 1 and the nut member 4.

That is, this connecting structure has a hollow casing 10 having first and second walls 8 and 9 arranged substantially in parallel at a predetermined interval.
And first and second cushion materials 11 and 12 interposed between the first wall 8 and the second wall 9, respectively.
A through hole 13 is provided in the wall 8 and a rod is provided in the through hole 13.
14 is inserted loosely. Further, a flat plate portion 15 arranged substantially in parallel between the first wall 8 and the second wall 9 is continuously provided at the base end of the rod 14, and the first wall 8 is provided at the tip of the rod 14.
A mounting plate portion 16 arranged substantially parallel to the above is continuously provided. The mounting plate portion 16 is attached to the driven side, that is, the table 1, and the casing 10 is attached to the driving side, that is, the nut member 4. The casing 10 includes a cylindrical body 17 and the cylindrical body.
It comprises first and second walls 8 and 9 for closing the openings at both ends of 17, respectively.

Here, the first cushion material 11 is formed by injecting air by an air piping system 50 into an elastically deformable drum-shaped bag member 18 having a central hole 43 for inserting the rod 14. The bag member 18 is made of polyurethane resin, rubber or the like, and is interposed between the first wall 8 of the casing 10 and the flat plate portion 15. Also, this bag member 18
Has an opening outward in the axial direction, and an air passage 20 provided in the first wall 8 communicates with the opening 19 of the opening, and the inner wall of the bag member 18
The inner end surface 21a of 21 abuts on one surface of the flat plate portion 15, and the outer end surface of the bag member 18 abuts on the first wall 8. Further, the outer peripheral edge 22 of the bag member 18 axially outward is brought into contact with the inner corner portion 60 between the first wall 8 of the casing 10 and the cylindrical body 17. Then, air is injected into the bag member 18 from the air flow path 20. As a result, the bag member 18 can be held in the casing 10 so as not to be displaced, the degree of freedom of movement of the inner end portion of the bag member 18 is increased, and motion errors and vibrations in all directions can be absorbed. it can.

The second cushion material 12 is formed by injecting air into the elastically deformable hourglass-shaped bag member 23 by the air piping system 51. The bag member 23 is made of polyurethane resin, rubber or the like, and is interposed between the second wall 9 of the casing 10 and the flat plate portion 15. The inner end surface 24a of the inner wall 24 of the bag member 23 contacts the other surface of the flat plate portion 15, and the outer end surface of the bag member 24 contacts the second wall 9. Further, the outer peripheral edge 25 of the bag member 23 in the axially outward direction is provided in the inner corner portion 61 between the second wall 9 of the casing 10 and the cylindrical body 17,
Abut. Then, the air flow path 26 provided in the second wall 9
Air is injected into the bag member 23 of the lower opening 27 via the. As a result, the bag member 23 can be held so as not to be displaced in the casing 10, and the degree of freedom of movement of the inner end portion of the bag member 23 is increased, so that motion errors and vibrations in all directions can be absorbed. You can

As shown in FIG. 2, the air flow passages 20 and 26 are connected to branch pipes 29 and 30 having pressure adjusting valves 28 and 28, respectively, and the branch pipes 29 and 30 are connected to each other. Air tank 32 through 31
The air tank 32 is connected to the compressor 34 via the connecting pipe 33. That is, the air piping systems 50 and 51 are provided in the first and second cushion materials 11 and 12.

Therefore, by adjusting the pressure adjusting valves 28, 28 of the individual piping systems 50, 51, the air pressure of the air injected into the bag members 18, 23 can be individually adjusted, and each cushion material can be adjusted.
The rigidity of 11 and 12 can be changed individually.

Then, the flat plate portion 15 is formed of, for example, a disc body, and
As shown in the drawing, a screw hole 35 is provided in the axial center portion thereof, and a screw portion 36 provided at the base end of the rod 14 is screwed into the screw hole 35 to be integrated with the rod 14. ing. Further, the mounting plate portion 16 is provided with a screw hole 37 in its axial center portion, and a bolt 39 screwed into a screw hole 38 provided in the tip surface of the rod 14 is screwed into the screw hole 37, It is integrated with the rod 14. The outer diameter of the rod 14 is smaller than the hole diameter of the through hole 13, and the outer peripheral surface 40 of the rod 14 and the inner peripheral surface of the through hole 13 are
A gap portion 42 is formed between it and 41. The rod 14 is inserted through the center hole 43 of the first cushion material 11. That is,
The rod 14 and the flat plate portion 15 are a pair of first and second cushion materials.
Held between 11 and 12.

Therefore, when the motor 5 is driven to rotate the ball screw 3, the nut member 4 reciprocates along the axial direction of the screw 3, and the casing 10 reciprocates along the axial direction. The table 1 mounted on the mounting plate portion 16 of the rod 14 reciprocates.

However, in this case, even when the mounting plate portion 16 is inclined with respect to the plane orthogonal to the axis O of the casing 10, the first and second cushion members 11 and 12 respectively
Since it is elastically deformable, the flat plate part due to the fluctuation of the rod 14
Fifteen fluctuations can be fully absorbed. That is, a large number of disturbances from the drive unit 2 such as pitching, yawing, rolling, whirling shown in FIG. 4 can be removed and absorbed by this connection structure. Further, it is possible to absorb the vibration from the drive unit 2 or the vibration from the table 1 side, and further, the damping ability thereof can be reduced by the first and second cushions.
It is also possible to adjust by adjusting the air pressure 11,12.
Further, since the air of each cushion member 11, 12 is maintained at a constant temperature, heat flow from the table 1 to the drive unit 2 and conversely from the drive unit 2 to the table 1 is eliminated. The flexibility of the first and second cushion members 11 and 12 allows the heat from the drive unit 2 or the heat from the table 1 side to be dissipated or blocked at the connection portion.
The table 1 will not be thermally deformed by the heat generated on the side of the drive unit 2. Further, since the first and second cushion members 11 and 12 are housed in the casing 10, the overall structure is compact.

It should be noted that the present invention is not limited to the above-described embodiments, and the design can be freely changed without departing from the gist of the present invention. For example, even if the rod 14 is directly connected to the driven side, that is, the table 1- Indirect connection through the mounting plate portion 16 or the block body or other various members as in the embodiment of
Be free. Further, when the casing 10 is connected to the drive unit side, parts other than the second wall 9-that is, the cylindrical body 10 and the first wall 8 are connected.
May be connected. Furthermore, the first and second walls 8,9
Can be attached to the table 1 side and the attachment plate portion 16 can be attached to the drive portion 2 side freely. That is, the casing 10 may be connected to the driven side and the rod 14 may be connected to the drive side outside the casing 10.

Therefore, the connection structure according to the present invention can be used not only for machine tools but also for various types of precision equipment, measuring equipment and the like.

〔The invention's effect〕

Since the present invention is configured as described above, it has the following remarkable effects, and is particularly suitable for a super-precision machine tool or a super-precision measuring instrument that requires machining accuracy and measurement accuracy on the order of nanometers. A highly functional joint between the table and the drive unit is realized.

The rigidity of the connecting portion between the drive system and the driven system can be increased, and sufficient static rigidity can be realized.

By subtly adjusting the air pressure inside the bag members 18 and 23,
-The rigidity of the second cushion materials 11 and 12 can be slightly changed.

It has a flexible property that absorbs and removes disturbances from the drive system such as pitching, yawing, rolling, whirling (by increasing or decreasing the air pressure), and a rigid property that connects the drive side and the driven side with sufficient rigidity. , Can be combined.

The properties of absorbing and removing disturbances from the drive system, the rigidity of the connection between the drive system and the driven system, and the property of absorbing the vibrations from the drive system and the driven system can be finely adjusted. The characteristics can be reasonably realized.

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part showing an embodiment of the present invention, FIG. 2 is an overall simplified view, FIG. 3 is a plan view of a machine tool, FIG. 4 is a side view of the same, and FIG. FIG. 10 ... Casing, 11 ... First cushion material, 12 ... Second cushion material, 14 ... Rod, 15 ... Flat plate part, 50, 51
...... Air piping system.

Claims (2)

[Claims] 1. A casing 10 is connected to a drive side, and
A rod 14 that is loosely inserted into the casing 10 is connected to the driven side outside the casing 10, and a flat plate portion 15 is connected to the rod 14 inside the casing 10. The flat plate portion 15 is provided with a pair of first
A connection structure of a table and a drive unit that holds the second cushion members 11 and 12 to transmit power, and the casing 10 closes a cylindrical body 17 and openings at both ends of the cylindrical body 17, respectively. The first cushion material 11 is composed of first and second walls 8 and 9, and the first cushion material 11 is provided in an elastically deformable bag-shaped bag member 18 having a central hole 43 for inserting the rod 14, and in the air piping system 50. The second cushion material 12 is formed by injecting air into the elastically deformable drum-shaped bag member 23 by the air piping system 51. Direction outer peripheral edge 2
2, 25 and the first and second walls 8 and 9 of the casing 10 and the cylindrical body 1
Abutting against inner corner portions 60 and 61 between the bag member 7 and
A connection structure for a table and a drive unit, wherein inner end surfaces 21a, 24a of 18, 23 are brought into contact with one surface and the other surface of the flat plate portion 15, respectively. 2. The casing 10 is connected to the driven side, and
A rod 14 that is loosely inserted into the casing 10 is connected to the drive side outside the casing 10, and a flat plate portion 15 is connected to the rod 14 inside the casing 10. The flat plate portion 15 is provided with a pair of first
A connection structure of a table and a drive unit that holds the second cushion members 11 and 12 to transmit power, and the casing 10 closes a cylindrical body 17 and openings at both ends of the cylindrical body 17, respectively. The first cushion material 11 is composed of first and second walls 8 and 9, and the first cushion material 11 is provided in an elastically deformable bag-shaped bag member 18 having a central hole 43 for inserting the rod 14, and in the air piping system 50. The second cushion material 12 is formed by injecting air into the elastically deformable drum-shaped bag member 23 by the air piping system 51. Direction outer peripheral edge 2
2,25, the first and second habits 8,9 of the casing 10 and the cylindrical body 1
Abutting against inner corner portions 60 and 61 between the bag member 7 and
A connection structure between a table and a drive unit, characterized in that inner end surfaces 21a, 24a of 18, 23 are brought into contact with one surface and the other surface of the flat plate portion 15, respectively.