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JPH0738721A - Solid-state image pickup device - Google Patents

Solid-state image pickup device

Info

Publication number
JPH0738721A
JPH0738721A JP5175760A JP17576093A JPH0738721A JP H0738721 A JPH0738721 A JP H0738721A JP 5175760 A JP5175760 A JP 5175760A JP 17576093 A JP17576093 A JP 17576093A JP H0738721 A JPH0738721 A JP H0738721A
Authority
JP
Japan
Prior art keywords
solid
light transmitting
ccd
optical
transmitting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5175760A
Other languages
Japanese (ja)
Inventor
Koichi Takada
浩一 高田
Hisato Wake
久人 和気
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tochigi Nikon Corp
Nikon Corp
Original Assignee
Tochigi Nikon Corp
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tochigi Nikon Corp, Nikon Corp filed Critical Tochigi Nikon Corp
Priority to JP5175760A priority Critical patent/JPH0738721A/en
Publication of JPH0738721A publication Critical patent/JPH0738721A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To improve resolution with high accuracy by separating an optical path from an original into two paths and fixing the moving mechanism of an optical axis for obtaining two kids of data. CONSTITUTION:This device is provided with a CCD 8, optical transmission panel 2 forming two mirror faces, mirrors 5 and 6 forming two optical paths 7, 10, motor 4 for rotationally driving the optical transmission panel 2, parallel plan board 9 inserted to the optical path 7 so as to shift the optical axis, and control part 12 for synchronizing the CCD 8 and the motor 4. Each time the optical transmission panel 2 is once rotated, sub scanning is performed by the CCD 8 while synchronizing the motor 4 and the CCD 8 each time the optical transmission panel 2 is falf rotated. Namely, the same line of the original is respectively once photographed by the two optical paths 7 and 10 and data are alternately extracted from the two pairs of provided data trains so that the duplex resolution can be provided. Further, since the mirrors 4 and 6, parallel plane board 9 and CCD 8 as the moving mechanisms of the optical axis are respectively fixed, there is not any change with the passage of time in the optical paths 7 and 10 at all.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、1次元固体撮像素子
(以下、CCD)を使用した固体撮像装置に係り、特
に、高精度に高解像度を図ることのできる固体撮像装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image pickup device using a one-dimensional solid-state image pickup device (hereinafter, CCD), and more particularly to a solid-state image pickup device capable of achieving high resolution with high accuracy.

【0002】[0002]

【従来の技術】従来から、画素がライン状に配列された
CCDを用いたイメージスキャナでは、原稿あるいは撮
像装置を副走査方向にシフトしながら、何度も撮像する
ことによって二次元の画像を得ている。即ち、副走査方
向の解像度は、機械的な送り幅により決定されるもの
で、容易に変更可能なものである。
2. Description of the Related Art Conventionally, in an image scanner using a CCD in which pixels are arranged in a line, a two-dimensional image is obtained by repeatedly capturing an image of a document or an image pickup device while shifting it in the sub-scanning direction. ing. That is, the resolution in the sub-scanning direction is determined by the mechanical feed width and can be easily changed.

【0003】一方、主走査方向の解像度は、CCDの画
素数によって決定されてしまうので、解像度を上げるに
は、画素数の多いCCDを用いることになるが、一般
に、画素数の多いCCDは高価である。そこで、使用す
るCCDの画素数以上の解像度を安価に得るために様々
な手段が考案されてきた。
On the other hand, since the resolution in the main scanning direction is determined by the number of pixels of the CCD, a CCD with a large number of pixels is used to increase the resolution. Generally, a CCD with a large number of pixels is expensive. Is. Therefore, various means have been devised in order to inexpensively obtain a resolution equal to or larger than the number of pixels of the CCD used.

【0004】光軸上に軸で支持した平行平板ガラスやミ
ラーなどを挿入し、それを振動させ、光軸をずらした
り、CCDを振動させる手法もその1つである。画素間
の不感領域を補間して高解像度を図るために、画素ピッ
チの1/n(nは2以上の自然数、以下同様)だけシフ
トさせながら、CCDによりn回読み取り、合成させれ
ば、より高解像度化が図れる。
One of such methods is to insert a parallel flat plate glass or a mirror supported by an axis on the optical axis and vibrate it to shift the optical axis or vibrate the CCD. In order to interpolate a dead area between pixels to achieve high resolution, if the CCD is read n times and synthesized while shifting by 1 / n of the pixel pitch (n is a natural number of 2 or more, the same applies below), Higher resolution can be achieved.

【0005】[0005]

【発明が解決しようとする課題】上記のガラスやミラー
を挿入して解像度を高める方法は、光軸を画素ピッチの
1/nだけずらせば高解像度化を図れる。しかし、振動
させるために使用する圧電アクチュエータには、ヒステ
リシス特性があるために、また、光軸をずらすためのガ
ラスやミラーを軸で支持して振動させるものは、軸の耐
久性やガタの点から、再現性に課題を残すものと思われ
る。二次元CCDを使用する装置と比較して、一次元C
CDを用いたイメージスキャナでは、再現性の低い機構
は副走査読み取りの点で不向きである。
In the method of increasing the resolution by inserting the above glass or mirror, the resolution can be increased by shifting the optical axis by 1 / n of the pixel pitch. However, because the piezoelectric actuator used to vibrate has hysteresis characteristics, and the one that vibrates by supporting the glass or mirror for shifting the optical axis with the axis, the durability of the axis and play Therefore, it seems that there is a problem in reproducibility. One-dimensional C compared to a device using a two-dimensional CCD
In an image scanner using a CD, a mechanism with low reproducibility is unsuitable for sub-scanning reading.

【0006】本発明はこのような状況に鑑みてなされた
ものであり、高精度に高解像度化を図ることのできる固
体撮像装置を提供することを目的とする。
The present invention has been made in view of such a situation, and an object thereof is to provide a solid-state image pickup device capable of achieving high resolution with high accuracy.

【0007】[0007]

【課題を解決するための手段】請求項1に記載の固体撮
像装置は、CCD8と、一部に鏡面2a,2dが形成さ
れた光透過板2と、光透過板2の両面にそれぞれ対向し
て配置され、光透過板2とともに2つの光路7,10を
構成する1対のミラー5,6と、光透過板2を回転駆動
するモータ4と、2つの光路7,10のうちの一方の光
路7に挿入され、光軸をずらすための透光性の平行平板
9と、CCD8とモータ4とを同期させるための制御部
12とを備えることを特徴とする。
A solid-state image pickup device according to a first aspect of the present invention includes a CCD 8, a light transmitting plate 2 having mirror surfaces 2a and 2d partially formed thereon, and a light transmitting plate 2 facing each other. Of the pair of mirrors 5 and 6 that are arranged together to form two optical paths 7 and 10 together with the light transmitting plate 2, a motor 4 that rotationally drives the light transmitting plate 2, and one of the two optical paths 7 and 10. It is characterized by including a transparent parallel plate 9 inserted in the optical path 7 for shifting the optical axis, and a control unit 12 for synchronizing the CCD 8 and the motor 4.

【0008】請求項2に記載の固体撮像装置は、平行平
板9を1対のミラー5,6のうちの一方のミラー5と光
透過板2との間の光路7中に傾けて配置したことを特徴
とする。
In the solid-state image pickup device according to a second aspect of the present invention, the parallel plate 9 is tilted in the optical path 7 between the light transmitting plate 2 and one of the pair of mirrors 5 and 6. Is characterized by.

【0009】請求項3に記載の固体撮像装置は、CCD
8の読み出しタイミングを光透過板2の回転位相を検出
する検出素子に同期させたことを特徴とする。
A solid-state image pickup device according to a third aspect is a CCD.
The read timing of 8 is synchronized with the detection element for detecting the rotational phase of the light transmitting plate 2.

【0010】請求項4に記載の固体撮像装置は、検出素
子として、フォトカプラ11を用いることを特徴とす
る。
A solid-state image pickup device according to a fourth aspect is characterized in that a photocoupler 11 is used as a detection element.

【0011】請求項5に記載の固体撮像装置は、光透過
板2の両面の異なる位置に鏡面2a,2dを形成したこ
とを特徴とする。
The solid-state image pickup device according to a fifth aspect is characterized in that the mirror surfaces 2a and 2d are formed at different positions on both surfaces of the light transmitting plate 2.

【0012】請求項6に記載の固体撮像装置は、光透過
板2を透過する光路1,7が鏡面部分と透光部分との境
界線を離脱したときに、CCD8による画像の読み取り
を開始することを特徴とする。
In the solid-state image pickup device according to the sixth aspect, when the optical paths 1 and 7 that pass through the light transmitting plate 2 leave the boundary line between the mirror surface portion and the light transmitting portion, the CCD 8 starts reading an image. It is characterized by

【0013】[0013]

【作用】請求項1乃至4に記載の固体撮像装置において
は、モータ4とCCD8とを同期させることにより、光
透過板2の半回転ごとにCCD8による撮像を行い、光
透過板2の1回転ごとに副走査方向の走査を行う。即
ち、原稿の同一ラインを2つの光路7,10によりそれ
ぞれ1回ずつ撮像し、このとき得られた2組のデータ列
からデータを交互に取り出すことによって、2倍の解像
度をもった画像情報を得ることができる。また、光軸の
移動機構である1対のミラー5,6及び平行平板9とC
CD8とが、それぞれ固定されているため、光路7,1
0の経時変化が皆無となり、高精度に解像度を2倍にす
ることができる。
In the solid-state image pickup device according to any one of claims 1 to 4, by synchronizing the motor 4 and the CCD 8, an image is picked up by the CCD 8 every half rotation of the light transmitting plate 2 and one rotation of the light transmitting plate 2. The scanning in the sub-scanning direction is performed for each. That is, the same line of the original is imaged once by each of the two optical paths 7 and 10, and the data is alternately taken out from the two sets of data sequences obtained at this time, whereby the image information having the double resolution is obtained. Obtainable. In addition, a pair of mirrors 5 and 6 and a parallel plate 9 and C, which are moving mechanisms of the optical axis,
Since the CD8 and the CD8 are fixed respectively, the optical paths 7 and 1
Since there is no change with time of 0, the resolution can be doubled with high accuracy.

【0014】請求項6に記載の固体撮像装置において
は、光路7,10が光透過板2の鏡面部分と透光部分と
の境界線を離脱したときにのみ、CCD8で画像の読み
取りを行うことができ、光束が鏡面部分にけられること
がなく、光束の正確な読み取りを行うことができる。
In the solid-state image pickup device according to the sixth aspect, the CCD 8 reads an image only when the optical paths 7 and 10 leave the boundary between the mirror surface portion and the light transmitting portion of the light transmitting plate 2. Therefore, the light flux can be accurately read without being eclipsed by the mirror surface portion.

【0015】[0015]

【実施例】以下、本発明の固体撮像装置の一実施例を図
面を参照して説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the solid-state image pickup device of the present invention will be described below with reference to the drawings.

【0016】図1及び図2に、本発明の一実施例の構成
を示す。図1において、図示しない原稿からの入射光の
光路1に対して45度の角度で光透過板2が配置されて
おり、光透過板2は、その中心に取り付けられた駆動軸
3を介してモータ4により回転駆動される。光透過板2
の中心に対して一方の側の両面に対向して、光透過板2
に平行に1対のミラー5,6が固定されており、光透過
板2のS点において、後述する鏡面2aがあるときに
は、光路1を通って入射した光束が第1のミラー5側に
反射する。この反射光は第1のミラー5によりさらに反
射し、光路1に平行な光路7を通り、光透過板2のt点
にある透光部2bを通ってCCD8へ入射する。そして
光路7には、透光性の平行平板9が光路7に対して傾斜
して設けられている。
1 and 2 show the configuration of an embodiment of the present invention. In FIG. 1, a light transmission plate 2 is arranged at an angle of 45 degrees with respect to an optical path 1 of incident light from an original not shown, and the light transmission plate 2 is provided with a drive shaft 3 attached at the center thereof. It is rotationally driven by the motor 4. Light transmission plate 2
The light transmitting plate 2 faces the both sides on one side with respect to the center of
A pair of mirrors 5 and 6 are fixed in parallel with, and when there is a mirror surface 2a to be described later at point S of the light transmitting plate 2, the light beam incident through the optical path 1 is reflected to the first mirror 5 side. To do. The reflected light is further reflected by the first mirror 5, passes through the optical path 7 parallel to the optical path 1, passes through the light transmitting portion 2b at the point t of the light transmitting plate 2, and enters the CCD 8. A light-transmissive parallel plate 9 is provided in the optical path 7 so as to be inclined with respect to the optical path 7.

【0017】一方、光透過板2のS点において、後述す
る透光部2cがあるときには、光路1を通って入射した
光束が光透過板2を透過し、第2のミラー6側に入射す
る。この入射光は、第2のミラー6により直角方向の光
路10に沿って反射し、光透過板2のt点にある鏡面2
dにより光路7に沿ってさらに反射し、CCD8に入射
する。
On the other hand, at the point S of the light transmitting plate 2, when there is a light transmitting portion 2c which will be described later, the light beam incident through the optical path 1 passes through the light transmitting plate 2 and is incident on the second mirror 6 side. . The incident light is reflected by the second mirror 6 along the optical path 10 in the direction perpendicular to the mirror surface 2 at the point t of the light transmitting plate 2.
It is further reflected along the optical path 7 by d and enters the CCD 8.

【0018】また、光透過板2の外周の所定の位置に
は、光透過板2の回転位置を検出するフォトカプラ11
が設けられている。そして、モータ4、CCD8及びフ
ォトカプラ11は、装置全体を制御する制御部12に電
気的に接続されている。
Further, at a predetermined position on the outer circumference of the light transmitting plate 2, a photo coupler 11 for detecting the rotational position of the light transmitting plate 2.
Is provided. The motor 4, CCD 8 and photocoupler 11 are electrically connected to a control unit 12 that controls the entire device.

【0019】光透過板2の表面の内周側には半円状の鏡
面2aが形成されており、その外側は半扇形状の透光部
2bとなっている。また、光透過板2の裏面の外周側に
は、透光部2bに対称の位置に半扇形状の鏡面2dが形
成されており、その内側は半円状の透光部2cとなって
いる。
A semi-circular mirror surface 2a is formed on the inner peripheral side of the surface of the light transmitting plate 2, and a semi-fan-shaped light transmitting portion 2b is formed on the outer side thereof. A semi-fan-shaped mirror surface 2d is formed on the outer peripheral side of the back surface of the light transmitting plate 2 at a position symmetrical to the light transmitting portion 2b, and a semi-circular light transmitting portion 2c is formed inside thereof. .

【0020】次に、本実施例の作用を図3及び図4を参
照して説明する。ここで、CCD8の画素数を8として
説明する。図3において、光透過板2が回転してSの位
置に鏡面2aの部分が移動してきたとき、原稿からの光
は、光路1を通って鏡面2aで反射して第1のミラー5
側へ向う。第1のミラー5により反射された光は、光路
7に沿って進み、平行平板9で光軸をずらして光路7a
に沿って進み、光透過板2のtの位置へ到達する。この
とき、tの位置には、光透過板2の透光部2bがあるの
で、光は透光部2bを透過してCCD8へ到達する。こ
の状態で、CCD8により原稿の1ライン分の画像を1
度撮像し、図4に示す1組目のデータAを得る。
Next, the operation of this embodiment will be described with reference to FIGS. Here, description will be made assuming that the number of pixels of the CCD 8 is eight. In FIG. 3, when the light transmitting plate 2 rotates and the portion of the mirror surface 2a moves to the position of S, the light from the document passes through the optical path 1 and is reflected by the mirror surface 2a and reflected by the first mirror 5a.
Turn to the side. The light reflected by the first mirror 5 travels along the optical path 7 and shifts its optical axis by the parallel plate 9 to form the optical path 7a.
And reaches the position of t of the light transmitting plate 2. At this time, since the light transmitting portion 2b of the light transmitting plate 2 is at the position of t, the light passes through the light transmitting portion 2b and reaches the CCD 8. In this state, the image of one line of the original is
The second set of data A shown in FIG. 4 is obtained.

【0021】次に、光透過板2がさらに回転して、Sの
位置に透光部2cが移動してくると、光は透光部2cを
透過して、光路1の延長上を進み、第2のミラー6へ向
う。第2のミラー6により反射された光は、光路10に
沿って進み、光透過板2のtの位置へ到達する。このと
きtの位置には鏡面2dがあるので、再び鏡面2dで反
射されて、光路7の延長上を進み、CCD8へ到達す
る。この状態で、CCD8により原稿の前記1ライン分
の画像を再度撮像し、図4に示す2組目のデータBを得
る。
Next, when the light transmitting plate 2 further rotates and the light transmitting portion 2c moves to the position S, light passes through the light transmitting portion 2c and travels on the extension of the optical path 1, Go to the second mirror 6. The light reflected by the second mirror 6 travels along the optical path 10 and reaches the position t of the light transmitting plate 2. At this time, since there is the mirror surface 2d at the position of t, it is reflected by the mirror surface 2d again, travels along the extension of the optical path 7, and reaches the CCD 8. In this state, the image of the one line of the original is picked up again by the CCD 8 to obtain the second set of data B shown in FIG.

【0022】このようにして得られたデータA,Bを、
図4に示すように合成して、2倍の解像度をもった画像
データを得ることができる。その後、副走査方向に原稿
を変位させて同様の操作を繰り返し、2次元の画像を撮
像する。
The data A and B thus obtained are
Image data having double the resolution can be obtained by combining as shown in FIG. After that, the document is displaced in the sub-scanning direction and the same operation is repeated to capture a two-dimensional image.

【0023】このとき、フォトカプラ11により光透過
板2の回転位置を検出し、光路1,7または7aが、鏡
面2aと透光部2cまたは鏡面2dと透光部2bのそれ
ぞれの境界線から離脱したときにCCD8の読み出しを
開始するように、制御部12により制御を行う。このよ
うにして光束が境界線によってけられることを防止し、
正確な読み取りを行うことができる。
At this time, the rotational position of the light transmitting plate 2 is detected by the photocoupler 11, and the optical path 1, 7 or 7a is separated from the boundary line between the mirror surface 2a and the light transmitting portion 2c or the mirror surface 2d and the light transmitting portion 2b. The control unit 12 controls so that the reading of the CCD 8 is started when it is detached. In this way, the light flux is prevented from being eclipsed by the boundary line,
Accurate reading can be performed.

【0024】本実施例によれば、光軸の移動機構である
1対のミラー5,6、平行平板9及びCCD8を固定し
ているため、光軸の移動量の経時変化が皆無となり、高
精度に解像度を2倍とすることができる。また、本実施
例による光軸の移動機構をユニット化することも容易と
なり、組立作業性が向上する。
According to this embodiment, since the pair of mirrors 5 and 6, the parallel plate 9 and the CCD 8 which are the moving mechanism of the optical axis are fixed, there is no time-dependent change in the moving amount of the optical axis, which is high. The resolution can be doubled in accuracy. Further, it becomes easy to unitize the optical axis moving mechanism according to the present embodiment, and the assembling workability is improved.

【0025】[0025]

【発明の効果】以上説明したように、本発明の固体撮像
装置によれば、原稿からの光の光路を2つに分離して2
つのデータを得るための光軸の移動機構を固定したの
で、光軸の経時変化を皆無とすることができ、高精度に
解像度を2倍にすることができる。
As described above, according to the solid-state image pickup device of the present invention, the optical path of the light from the original is divided into two and divided into two.
Since the moving mechanism of the optical axis for obtaining one data is fixed, there is no change in the optical axis with time, and the resolution can be doubled with high accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の固体撮像装置の一実施例の構成を示す
模式図である。
FIG. 1 is a schematic diagram showing a configuration of an embodiment of a solid-state imaging device of the present invention.

【図2】図1の光透過板の構成を示す正面図である。FIG. 2 is a front view showing the configuration of the light transmitting plate of FIG.

【図3】図1に示す光透過板によって分離される2つの
光路の構成を示す説明図である。
FIG. 3 is an explanatory diagram showing a configuration of two optical paths separated by the light transmitting plate shown in FIG.

【図4】本実施例による2つのデータの合成方法を示す
説明図である。
FIG. 4 is an explanatory diagram showing a method for combining two data according to the present embodiment.

【符号の説明】[Explanation of symbols]

1,7,7a,10 光路 2 光透過板 2a,2d 鏡面 4 モータ 5,6 ミラー 8 CCD(固体撮像素子) 9 平行平板 11 フォトカプラ 12 制御部 1,7,7a, 10 Optical path 2 Light transmission plate 2a, 2d Mirror surface 4 Motor 5,6 Mirror 8 CCD (solid-state image sensor) 9 Parallel plate 11 Photocoupler 12 Controller

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 固体撮像素子と、 一部に鏡面が形成された光透過板と、 前記光透過板の両面にそれぞれ対向して配置され、前記
光透過板とともに2つの光路を構成する1対のミラー
と、 前記光透過板を回転駆動するモータと、 前記2つの光路のうちの一方に挿入され、光軸をずらす
ための透光性の平行平板と、 前記固体撮像素子と前記モータとを同期させるための制
御部とを備えることを特徴とする固体撮像装置。
1. A pair of a solid-state image sensor, a light-transmitting plate having a mirror surface formed on a part thereof, and a pair of light-transmitting plates, which are arranged to face each other and face each other, and form two optical paths together with the light-transmitting plate. A mirror, a motor that rotationally drives the light transmitting plate, a translucent parallel plate that is inserted into one of the two optical paths and that shifts the optical axis, the solid-state imaging device, and the motor. A solid-state imaging device comprising: a control unit for synchronizing.
【請求項2】 前記平行平板を前記1対のミラーのうち
の一方と前記光透過板との間の光路中に傾けて配置した
ことを特徴とする請求項1記載の固体撮像装置。
2. The solid-state image pickup device according to claim 1, wherein the parallel flat plate is arranged so as to be inclined in an optical path between one of the pair of mirrors and the light transmitting plate.
【請求項3】 前記固体撮像素子の読み出しタイミング
を前記光透過板の回転位相を検出する検出素子に同期さ
せたことを特徴とする請求項1記載の固体撮像装置。
3. The solid-state image pickup device according to claim 1, wherein the read-out timing of the solid-state image pickup device is synchronized with a detection element for detecting a rotation phase of the light transmitting plate.
【請求項4】 前記検出素子は、フォトカプラであるこ
とを特徴とする請求項3記載の固体撮像装置。
4. The solid-state imaging device according to claim 3, wherein the detection element is a photocoupler.
【請求項5】 前記光透過板の両面の異なる位置に前記
鏡面を形成したことを特徴とする請求項1記載の固体撮
像装置。
5. The solid-state imaging device according to claim 1, wherein the mirror surface is formed at different positions on both surfaces of the light transmitting plate.
【請求項6】 前記光透過板を透過する光路が前記鏡面
部分と透光部分との境界線を離脱したときに、前記固体
撮像素子による画像の読み取りを開始することを特徴と
する請求項1または5記載の固体撮像装置。
6. The image reading by the solid-state imaging device is started when an optical path passing through the light transmitting plate leaves a boundary line between the mirror surface portion and the light transmitting portion. Alternatively, the solid-state imaging device according to item 5.
JP5175760A 1993-07-16 1993-07-16 Solid-state image pickup device Withdrawn JPH0738721A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5175760A JPH0738721A (en) 1993-07-16 1993-07-16 Solid-state image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5175760A JPH0738721A (en) 1993-07-16 1993-07-16 Solid-state image pickup device

Publications (1)

Publication Number Publication Date
JPH0738721A true JPH0738721A (en) 1995-02-07

Family

ID=16001778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5175760A Withdrawn JPH0738721A (en) 1993-07-16 1993-07-16 Solid-state image pickup device

Country Status (1)

Country Link
JP (1) JPH0738721A (en)

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