JPH07294546A - Acceleration sensor - Google Patents
Acceleration sensorInfo
- Publication number
- JPH07294546A JPH07294546A JP8481594A JP8481594A JPH07294546A JP H07294546 A JPH07294546 A JP H07294546A JP 8481594 A JP8481594 A JP 8481594A JP 8481594 A JP8481594 A JP 8481594A JP H07294546 A JPH07294546 A JP H07294546A
- Authority
- JP
- Japan
- Prior art keywords
- movable member
- permanent magnet
- curved surface
- hall
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 50
- 230000004907 flux Effects 0.000 claims abstract description 21
- 239000000696 magnetic material Substances 0.000 abstract description 4
- 230000005484 gravity Effects 0.000 description 17
- 238000001514 detection method Methods 0.000 description 15
- 235000014676 Phragmites communis Nutrition 0.000 description 11
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000011553 magnetic fluid Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Hall/Mr Elements (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、振動,衝撃,傾斜,転
倒等を検知する加速度センサに関し、より詳しくは永久
磁石が設けられた可動部材の自動復帰機構を備えた加速
度センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration sensor for detecting vibrations, impacts, tilts, falls, etc., and more particularly to an acceleration sensor having an automatic return mechanism for a movable member provided with a permanent magnet.
【0002】[0002]
【従来の技術】この種の加速度センサとしては、従来よ
りリードスイッチ,磁性流体応用スイッチ,水銀スイッ
チ等を用いた各種のセンサが知られている。2. Description of the Related Art As an acceleration sensor of this type, various sensors using a reed switch, a magnetic fluid application switch, a mercury switch, etc. have been known.
【0003】図15はそのリードスイッチを用いた従来
のセンサの一例を示す断面図である。このセンサ10
は、傾斜等によってセンサ10に変位が生じると(非定
常状態)、可動永久磁石11が磁性部材12により磁気
的に保持されている定常位置から移動し、センサ10が
元に戻ると(定常状態)、可動永久磁石11が定常位置
に復帰する自動復帰機構を備え、可動永久磁石11の移
動によって生ずる磁束の変化をリードスイッチ13によ
り検出して傾斜,転倒等を検知するものである(実開平
4−96003号公報)。FIG. 15 is a sectional view showing an example of a conventional sensor using the reed switch. This sensor 10
When the sensor 10 is displaced due to inclination or the like (unsteady state), the movable permanent magnet 11 moves from the steady position magnetically held by the magnetic member 12 and the sensor 10 returns to its original state (steady state). ), The movable permanent magnet 11 is provided with an automatic return mechanism for returning to a steady position, and changes in the magnetic flux caused by the movement of the movable permanent magnet 11 are detected by the reed switch 13 to detect tilting, overturning, etc. 4-96003).
【0004】なお、前記磁性流体応用スイッチは、非磁
性材料からなる容器内に磁性流体で包んだ永久磁石を配
置し、その容器の直下にリードスイッチを垂直に配置
し、その容器及びリードスイッチ全体が傾斜すると、永
久磁石がリードスイッチの軸上から外れた位置に移動す
ることで、リードスイッチの接点が開となり傾斜や振動
等を検知するものである。In the magnetic fluid application switch, a permanent magnet wrapped with a magnetic fluid is placed in a container made of a non-magnetic material, and a reed switch is placed vertically directly below the container, and the whole container and reed switch are placed. When is tilted, the permanent magnet moves to a position off the axis of the reed switch, so that the contact of the reed switch is opened, and tilting, vibration, etc. are detected.
【0005】また、前記水銀スイッチは、定常状態にお
いて一対の導体間に水銀を介在させて導通状態にしてお
き、振動,衝撃等による加速度が加わると水銀が動いて
一対の導体が非導通状態となることで、振動等を検知す
るものである。In the mercury switch, mercury is interposed between a pair of conductors in a steady state to make them conductive. When acceleration due to vibration, shock, etc. is applied, the mercury moves and the pair of conductors becomes non-conductive. As a result, vibration or the like is detected.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、図15
に示すセンサ10の自動復帰機構は、可動永久磁石11
を定常位置に磁気的に保持する磁性部材12を必要とす
るため、容器14側の構造が複雑となりセンサ10が大
型化するという問題があった。また、リードスイッチ1
3は、縦方向に長くなるように配置されているため、容
器14の高さを高くしなければならず、センサ10全体
が大型化するという問題があった。However, as shown in FIG.
The automatic return mechanism of the sensor 10 shown in FIG.
Since the magnetic member 12 for magnetically holding the sensor is required at a steady position, the structure of the container 14 side becomes complicated and the sensor 10 becomes large. Also, the reed switch 1
Since No. 3 is arranged so as to be long in the vertical direction, the height of the container 14 must be increased, and there is a problem that the entire sensor 10 becomes large.
【0007】また、磁性流体応用スイッチを用いた場合
は、不活性ガスによる封止が必要となるために構造が複
雑で磁性流体自体が高価であるため、スイッチのコスト
高を招くという問題がある。Further, when the magnetic fluid application switch is used, the structure is complicated because the sealing with an inert gas is required and the magnetic fluid itself is expensive, so that the cost of the switch is increased. .
【0008】また、水銀スイッチを用いた場合には、水
銀により地球の環境が汚染されるという問題がある。Further, when the mercury switch is used, there is a problem that the environment of the earth is polluted by mercury.
【0009】そこで、本発明は上記事情に鑑みてなされ
たものであり、永久磁石が設けられた可動部材の自動復
帰機構を備え、しかも小型化を図った加速度センサを提
供することを目的とする。Therefore, the present invention has been made in view of the above circumstances, and an object of the present invention is to provide an acceleration sensor which is provided with an automatic return mechanism for a movable member provided with a permanent magnet and which is downsized. .
【0010】[0010]
【課題を解決するための手段】請求項1記載の加速度セ
ンサは、少なくとも一部に永久磁石が設けられた可動部
材と、この可動部材を内部空間に移動可能に収容する非
磁性容器と、前記可動部材に対向配置されこの可動部材
の移動によって生ずる磁束の変化を検出するホールIC
と、定常状態から非定常状態に変わると前記可動部材は
定常位置から移動し、定常状態に戻るとその可動部材は
定常位置に復帰する自動復帰機構とを有する加速度セン
サであって、前記自動復帰機構を特定形状により構成し
たことを特徴とするものである。According to another aspect of the present invention, there is provided an acceleration sensor, wherein a movable member at least a part of which is provided with a permanent magnet, a non-magnetic container movably accommodating the movable member in an internal space, and Hall IC that is arranged to face a movable member and detects a change in magnetic flux caused by the movement of the movable member.
And the movable member moves from the steady position when the steady state changes to the unsteady state, and the movable member returns to the steady state when the steady state is restored. It is characterized in that the mechanism is constituted by a specific shape.
【0011】請求項2記載の加速度センサは、前記永久
磁石が設けられた可動部材は、前記容器の底部内面に接
触する保持部材と、この保持部材に保持された棒状の永
久磁石とによって構成されているものである。According to another aspect of the acceleration sensor of the present invention, the movable member provided with the permanent magnet is composed of a holding member that comes into contact with the inner surface of the bottom of the container, and a rod-shaped permanent magnet held by the holding member. It is what
【0012】請求項3記載の加速度センサは、前記特定
形状は、前記容器の底部内面に凹状の曲面を形成し、前
記可動部材を構成する保持部材の下面側に前記凹状の曲
面より曲率半径の小さい凸状の曲面を形成したものであ
る。According to another aspect of the acceleration sensor of the present invention, the specific shape is such that a concave curved surface is formed on the inner surface of the bottom of the container, and a radius of curvature is larger than that of the concave curved surface on the lower surface side of the holding member constituting the movable member. A small convex curved surface is formed.
【0013】請求項4記載の加速度センサは、前記特定
形状は、前記容器の底部内面に凹状球曲面を形成し、前
記可動部材を構成する保持部材の下面側に前記凹状球曲
面より曲率半径の小さい凸状球曲面を形成したものであ
る。According to another aspect of the acceleration sensor of the present invention, the specific shape is such that a concave spherical curved surface is formed on the inner surface of the bottom of the container, and a radius of curvature is larger than the concave spherical curved surface on the lower surface side of the holding member constituting the movable member. A small convex spherical curved surface is formed.
【0014】[0014]
【作用】請求項1記載の加速度センサによれば、定常状
態から非定常状態に変ると可動部材が定常位置から移動
し、再び定常状態に戻ると、可動部材が特定形状によっ
て定常位置に自動的に復帰する。ホールICは、永久磁
石が設けられた可動部材の移動によって生ずる磁束の変
化を検出する。According to the acceleration sensor of the first aspect, when the steady state changes to the unsteady state, the movable member moves from the steady position, and when it returns to the steady state again, the movable member automatically moves to the steady position according to the specific shape. Return to. The Hall IC detects a change in magnetic flux caused by the movement of a movable member provided with a permanent magnet.
【0015】請求項2記載の加速度センサによれば、保
持部材は、加速度に応じた磁束がホールICに供給され
るように永久磁石を保持する。According to the acceleration sensor of the second aspect, the holding member holds the permanent magnet so that the magnetic flux corresponding to the acceleration is supplied to the Hall IC.
【0016】請求項3記載の加速度センサによれば、定
常状態から非定常状態に変ると可動部材は底部内面の凹
状の曲面上を転動して定常位置から移動し、再び定常状
態に戻ると、可動部材は重力によって底部内面の凹状の
曲面上を転動して定常位置に自動的に復帰する。ホール
ICは、永久磁石が設けられた可動部材の移動によって
生ずる磁束の変化を検出する。According to the acceleration sensor of the third aspect, when the steady state is changed to the unsteady state, the movable member rolls on the concave curved surface of the inner surface of the bottom to move from the steady position, and then returns to the steady state. The movable member rolls on the concave curved surface of the inner surface of the bottom portion by gravity and automatically returns to the steady position. The Hall IC detects a change in magnetic flux caused by the movement of a movable member provided with a permanent magnet.
【0017】請求項4記載の加速度センサによれば、容
器に凹状球曲面、保持部材に凸状球曲面を特定形状とし
て形成することにより、水平方向における全方向の加速
度を検出可能となる。According to the acceleration sensor of the fourth aspect, by forming the concave spherical curved surface on the container and the convex spherical curved surface on the holding member as specific shapes, it is possible to detect acceleration in all directions in the horizontal direction.
【0018】[0018]
【実施例】以下、本発明の実施例を図面を参照して詳述
する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【0019】図1は本発明の加速度センサの一実施例を
示す断面図である。FIG. 1 is a sectional view showing an embodiment of the acceleration sensor of the present invention.
【0020】この加速度センサ1は、少なくとも一部に
永久磁石20が設けられた可動部材2Aと、この可動部
材2Aを内部空間に移動可能に収容する容器本体3A
と、この容器本体3Aの上部3a開口側に配置されたプ
リント基板4Aと、可動部材2Aに対向するようにプリ
ント基板4Aの下側に配置され、可動部材2Aの移動に
よって生ずる磁束の変化を検出する磁気検出手段として
のホールIC5と、可動部材2Aの自動復帰機構とを具
備したものである。The acceleration sensor 1 includes a movable member 2A having a permanent magnet 20 at least partially provided therein, and a container body 3A for movably accommodating the movable member 2A in an internal space.
And a printed circuit board 4A disposed on the opening side of the upper portion 3a of the container body 3A and a printed circuit board 4A disposed below the printed circuit board 4A so as to face the movable member 2A, and detect changes in magnetic flux caused by movement of the movable member 2A. The Hall IC 5 as a magnetic detecting means and a mechanism for automatically returning the movable member 2A are provided.
【0021】前記容器本体3Aは、非磁性材料からなる
有底箱状を有し、底部3bの内面に特定形状の凹状球曲
面3cを形成し、底部3bの周囲に、取付穴3dを備え
た鍔部3eを突設させ、上部3aにプリント基板4Aを
位置決めするための段部3fを設けている。この段部3
fにより、プリント基板4Aに配置されたホールIC5
を後述する基準軸(定常位置)6上に位置決めするのが
容易となる。The container body 3A has a bottomed box shape made of a non-magnetic material, a concave spherical curved surface 3c of a specific shape is formed on the inner surface of the bottom portion 3b, and a mounting hole 3d is provided around the bottom portion 3b. The flange portion 3e is provided so as to project, and a step portion 3f for positioning the printed circuit board 4A is provided on the upper portion 3a. This step 3
Hall IC 5 arranged on printed circuit board 4A by f
Can be easily positioned on a reference axis (steady position) 6 described later.
【0022】前記可動部材2Aは、図1及び図2の斜視
図に示すように、棒状の永久磁石20と、この永久磁石
20を保持する保持部材21とを備え、容器本体3Aの
底部3bの内面に接触して配置されている。可動部材2
Aを永久磁石20と保持部材21とから構成することに
より、加速度に応じた磁束がホールIC5に供給される
ように永久磁石20を保持することが容易となる。As shown in the perspective views of FIGS. 1 and 2, the movable member 2A comprises a rod-shaped permanent magnet 20 and a holding member 21 for holding the permanent magnet 20, and the bottom portion 3b of the container body 3A. It is placed in contact with the inner surface. Movable member 2
By configuring A by the permanent magnet 20 and the holding member 21, it becomes easy to hold the permanent magnet 20 so that the magnetic flux corresponding to the acceleration is supplied to the Hall IC 5.
【0023】永久磁石20は、等方性,異方性のいずれ
でもよく、フェライト系,ネオジウム系,希土類系,ア
ルニコ系等を含めて任意の材料を選定することができ
る。The permanent magnet 20 may be isotropic or anisotropic, and any material including ferrite type, neodymium type, rare earth type, alnico type and the like can be selected.
【0024】保持部材21は、真鍮,アルミニウム等の
非磁性金属やプラスチック等の非磁性材料からなり、特
定形状の凸状球曲面21aを備えた略半球形状を有し、
その凸状球曲面21aは、前記凹状球曲面3cより小さ
い曲率半径を有している。また、保持部材21は、後述
する定常状態において、磁極例えばS極がホールIC5
に向くように永久磁石20を保持している。なお、磁極
は、ホールIC5の作動磁極に合わせて、逆の磁極(N
極)にしてもよい。The holding member 21 is made of a non-magnetic metal such as brass or aluminum or a non-magnetic material such as plastic, and has a substantially hemispherical shape with a convex spherical curved surface 21a of a specific shape.
The convex spherical curved surface 21a has a radius of curvature smaller than that of the concave spherical curved surface 3c. Further, in the holding member 21, in the steady state described later, the magnetic pole, for example, the S pole, has the Hall IC 5
The permanent magnet 20 is held so as to face to. In addition, the magnetic pole is the opposite magnetic pole (N
It may be a pole.
【0025】次に、可動部材2Aの自動復帰機構につい
て説明する。Next, the automatic return mechanism of the movable member 2A will be described.
【0026】なお、本実施例において「自動復帰機構」
とは、定常状態においては可動部材2Aは基準軸(定常
位置)6上に位置し、非定常状態においては可動部材2
Aが基準軸6から移動し、再び定常状態に戻ると、可動
部材2Aが基準軸6に自動的に復帰する機構をいうもの
とする。また、「定常状態」とは、本センサ1に振動,
衝撃等による加速度が加わっていない状態又は本センサ
1に傾斜,転倒等による変位を生じていない状態をい
い、「非定常状態」とは、本センサ1に振動,衝撃等に
よる加速度が加わっている状態又は本センサ1に傾斜,
転倒等による変位を生じている状態をいうものとする。In this embodiment, the "automatic return mechanism" is used.
The movable member 2A is located on the reference axis (steady position) 6 in the steady state, and the movable member 2A is in the unsteady state.
When A moves from the reference shaft 6 and returns to the steady state again, the movable member 2A automatically returns to the reference shaft 6. In addition, “steady state” means that the sensor 1 vibrates,
A state in which acceleration due to impact or the like is not applied or a state in which the sensor 1 is not displaced due to tilting, falling, or the like is "non-steady state". Acceleration due to vibration or impact is applied to the sensor 1. Condition or inclination to this sensor 1,
It refers to the state of displacement caused by a fall or the like.
【0027】この自動復帰機構を実現するためには、定
常状態において、可動部材2A全体の重心が基準軸6上
にあることが必要である。また、ホールIC5により磁
束の変化を安定して検出するためには、定常状態におい
て、永久磁石20の重心が基準軸6上にあることが必要
である。このため、永久磁石20は、基準軸6に対し円
柱状,角柱状等の対称形状を有し、保持部材21も、基
準軸6に対し対称形状を有し、可動部材2A全体も、基
準軸6に対し完全又は略対称構造を有している。また、
凸状球曲面21aの曲率中心は、基準軸6に一致させて
いる。また、容器本体3Aの凹状球曲面3cは、基準軸
6に対し対称形状を有しており、その曲率中心は、基準
軸6に一致させている。In order to realize this automatic return mechanism, it is necessary that the center of gravity of the entire movable member 2A is on the reference axis 6 in the steady state. Further, in order to stably detect the change of the magnetic flux by the Hall IC 5, it is necessary that the center of gravity of the permanent magnet 20 is on the reference axis 6 in the steady state. Therefore, the permanent magnet 20 has a symmetrical shape such as a cylindrical shape or a prismatic shape with respect to the reference axis 6, the holding member 21 also has a symmetrical shape with respect to the reference axis 6, and the movable member 2A as a whole also has the reference axis. 6 has a completely or substantially symmetrical structure. Also,
The center of curvature of the convex spherical curved surface 21a is aligned with the reference axis 6. The concave spherical curved surface 3c of the container body 3A has a symmetrical shape with respect to the reference axis 6, and the center of curvature thereof coincides with the reference axis 6.
【0028】これにより、自動復帰機構を実現できるの
みならず、定常状態において、可動部材2Aが自重で傾
いたり転倒しなくなり、永久磁石20の磁極がホールI
C5に完全に向くようになり、また、図2に示すよう
に、水平方向Aにおける全方向の加速度を均等に検出す
ることができる。As a result, not only can the automatic return mechanism be realized, but in the steady state, the movable member 2A will not tilt or fall due to its own weight, and the magnetic poles of the permanent magnet 20 will be Hall I.
It becomes completely oriented to C5, and as shown in FIG. 2, the acceleration in all directions in the horizontal direction A can be detected uniformly.
【0029】前記プリント基板4Aは、ホールIC5へ
電源を供給するとともにホールIC5からの信号を出力
するために、端部にコネクタ7を備えたリード線8を導
出している。また、プリント基板4Aは、図6の想像線
で示すように、振動,傾斜等によって可動部材2Aが転
動して反転しないように規制するものであり、そのよう
な高さ位置に設定され、かつ、プリント基板4Aは、永
久磁石20がホールIC5に接触して可動部材2Aの転
動を妨げないような高さ位置に設定される。The printed circuit board 4A is provided with a lead wire 8 having a connector 7 at its end for supplying power to the Hall IC 5 and outputting a signal from the Hall IC 5. Further, the printed circuit board 4A regulates the movable member 2A from rolling and reversing due to vibration, inclination, etc., as shown by an imaginary line in FIG. 6, and is set at such a height position. Moreover, the printed circuit board 4A is set at a height position such that the permanent magnet 20 does not come into contact with the Hall IC 5 to prevent the movable member 2A from rolling.
【0030】前記ホールIC5は、図1及び図3の斜視
図に示すように、略矩形状を有するケース5aを有し、
このケース5aの内部に後述するホース素子50等を備
え、ケース5aの上面に磁気検出面5bを備えている。
また、ホールIC5は、可動部材2Aからの磁束の変化
を検出するものであり、ホールIC5の磁気検出面5b
の中心が基準軸6に一致するようにプリント基板4Aの
下面側に配置されている。As shown in the perspective views of FIGS. 1 and 3, the Hall IC 5 has a case 5a having a substantially rectangular shape,
A hose element 50 described later is provided inside the case 5a, and a magnetic detection surface 5b is provided on the upper surface of the case 5a.
The Hall IC 5 is for detecting a change in magnetic flux from the movable member 2A, and the Hall IC 5 has a magnetic detection surface 5b.
Is arranged on the lower surface side of the printed circuit board 4A so that the center of the is aligned with the reference axis 6.
【0031】このホールIC5は、図4のブロック図に
示すように、ホール素子50,増幅器51,シュミット
トリガ52,電源回路53,温度補償回路54,出力ト
ランジスタ55及び出力抵抗器56を具備している。こ
のホールIC5は、図5の出力特性図に示すように、磁
気検出面5bに向かうN極又はS極のいずれか一方の一
定以上の磁界の強さに対してスイッチング動作する一方
向磁界動作型のものである。前記永久磁石20は、定常
状態においては、前記自動復帰機構によりその一方の定
まった極性(S極又はN極)がホールIC5の磁気検出
面5bに向くようになるため、磁気検出手段としてこの
一方向磁界動作型のホールIC5を用いることが可能と
なる。そして、ホールIC5への磁界の強さが一定(B
2 )以上になると、出力トランジスタ55がオンとな
り、出力電圧はローレベルLとなる。一方、磁界の強さ
が一定(B1 )以下になると、出力トランジスタ55が
オフとなり、出力電圧はハイレベルHとなる。このよう
なホールIC5を用いることにより、入力電源を必要と
するが、出力信号がローレベル(オン)/ハイレベル
(オフ)で得られるので、取扱いが容易となり、リード
線,ピン端子等任意の方法で信号を取り出すことが可能
となる。なお、回路によっては、出力トランジスタ55
のオン/オフと出力電圧のL/Hの関係を逆にすること
もできる。As shown in the block diagram of FIG. 4, this Hall IC 5 comprises a Hall element 50, an amplifier 51, a Schmitt trigger 52, a power supply circuit 53, a temperature compensation circuit 54, an output transistor 55 and an output resistor 56. There is. As shown in the output characteristic diagram of FIG. 5, the Hall IC 5 is a one-way magnetic field operation type that performs a switching operation with respect to a magnetic field strength of a certain level or more of either the N pole or the S pole toward the magnetic detection surface 5b. belongs to. In the steady state, the permanent magnet 20 has one of the determined polarities (S pole or N pole) directed toward the magnetic detection surface 5b of the Hall IC 5 in the steady state, so that this permanent magnet 20 serves as a magnetic detection means. It is possible to use the directional magnetic field type Hall IC 5. Then, the strength of the magnetic field to the Hall IC 5 is constant (B
2 ) Above, the output transistor 55 is turned on and the output voltage becomes low level L. On the other hand, when the magnetic field strength becomes constant (B 1 ) or less, the output transistor 55 is turned off and the output voltage becomes the high level H. By using such a Hall IC 5, an input power supply is required, but since the output signal can be obtained at a low level (on) / high level (off), it is easy to handle and any lead wire, pin terminal, etc. can be used. It is possible to extract the signal by the method. Depending on the circuit, the output transistor 55
It is also possible to reverse the relationship between ON / OFF of L and H of output voltage.
【0032】次に、本実施例の動作を図6及び図7をも
参照して説明する。図6は非定常状態を示す断面図、図
7はホールIC5に供給される磁束B及びホールIC5
が出力する信号Sを示す図である。なお、非定常状態に
おいては本センサ1に水平方向における一方向Aの加速
度が加わる場合を説明する。Next, the operation of this embodiment will be described with reference to FIGS. 6 and 7. FIG. 6 is a sectional view showing an unsteady state, and FIG. 7 is a magnetic flux B supplied to the Hall IC 5 and the Hall IC 5.
It is a figure which shows the signal S which is output by. Note that, in the unsteady state, a case where acceleration in one direction A in the horizontal direction is applied to the sensor 1 will be described.
【0033】まず、本センサ1に加速度が加わっていな
い定常状態においては、可動部材2Aは、図1に示すよ
うに、自重により可動部材2Aの凸状球曲面21aが容
器本体3Aの凹状球曲面3cに接触して基準軸6にあ
り、永久磁石20の磁極例えばS極がホールIC5の磁
気検出面5bに向いており、ホールIC5に十分な磁束
を供給している。このため、ホールIC5は、その十分
な磁束により出力トランジスタ55がオンとなり、ロー
レベルLの電圧を出力している。First, in a steady state in which no acceleration is applied to the sensor 1, the movable member 2A has a convex spherical curved surface 21a of the movable member 2A due to its own weight as shown in FIG. 1 and a concave spherical curved surface of the container body 3A. 3c is in contact with the reference axis 6, and the magnetic pole of the permanent magnet 20, for example, the S pole, faces the magnetic detection surface 5b of the Hall IC 5, and supplies a sufficient magnetic flux to the Hall IC 5. Therefore, in the Hall IC 5, the output transistor 55 is turned on by the sufficient magnetic flux and outputs the low level L voltage.
【0034】ここで、本センサ1に、図6に示すよう
に、水平方向における一方向Aに一定以上の加速度が加
わると、可動部材2Aは、容器本体3Aの凹状球曲面3
c上を転動して基準軸6から移動する。この結果、永久
磁石20からホールIC5に磁束が供給されなくなり、
ホールIC5の出力トランジスタ55がオフとなり、出
力電圧がハイレベルHとなる。As shown in FIG. 6, when a certain acceleration or more is applied to the present sensor 1 in the horizontal direction A, the movable member 2A causes the concave spherical surface 3 of the container body 3A to move.
It rolls on c and moves from the reference axis 6. As a result, the magnetic flux is no longer supplied from the permanent magnet 20 to the Hall IC 5,
The output transistor 55 of the Hall IC 5 is turned off, and the output voltage becomes the high level H.
【0035】次に、加速度が加わらなくなって再び定常
状態に戻ると、可動部材2Aは、図1に示すように、重
力によって凹状球曲面3c上を転動して基準軸6に自動
的に復帰する。永久磁石20の磁極(S極)がホールI
C5の磁気検出面5bに再び向き、ホールIC5に十分
な磁束が供給され、ホールIC5は、その十分な磁束に
より出力トランジスタ55がオンとなり、ローレベルL
の電圧を出力する。Next, when the acceleration is not applied and the steady state is restored again, the movable member 2A rolls on the concave spherical curved surface 3c by gravity and automatically returns to the reference axis 6, as shown in FIG. To do. The magnetic pole (S pole) of the permanent magnet 20 is the hall I.
Again facing the magnetic detection surface 5b of C5, a sufficient magnetic flux is supplied to the Hall IC 5, and the Hall IC 5 turns on the output transistor 55 due to the sufficient magnetic flux, so that the low level L
Output the voltage.
【0036】このような基準軸6を中心とした可動部材
2Aの移動及び復帰によって、ホールIC5の磁気検出
面5bに供給される磁束は、図7に示すように正弦波の
ように振動に応じて変化し、ホールIC5からは、図7
に示すようなパルス波形信号Sが出力され加速度が検出
される。The magnetic flux supplied to the magnetic detection surface 5b of the Hall IC 5 by the movement and return of the movable member 2A about the reference axis 6 as described above depends on the vibration like a sine wave as shown in FIG. Change from Hall IC5 to Fig. 7
The pulse waveform signal S as shown in is output and the acceleration is detected.
【0037】次に、図1に示すセンサ1の変形例を図8
乃至図14を参照して説明する。Next, a modification of the sensor 1 shown in FIG. 1 is shown in FIG.
It will be described with reference to FIGS.
【0038】図8及び図9は容器本体3A及びプリント
基板4Aの変形例を示す断面図である。8 and 9 are sectional views showing modified examples of the container body 3A and the printed circuit board 4A.
【0039】容器本体3Bは、図8に示すように、凹状
球曲面3cを底部3bの内面全体に形成しなくても、可
動部材2Aの保持部材21が実際に接触する範囲に限定
して形成してもよい。これにより、容器本体3Bの製造
が容易となる。As shown in FIG. 8, the container body 3B is formed only within the range in which the holding member 21 of the movable member 2A actually contacts without forming the concave spherical curved surface 3c on the entire inner surface of the bottom portion 3b. You may. This facilitates the manufacture of the container body 3B.
【0040】また、プリント基板4Bは、図8及び図9
に示すように、リード線8の代りにリードピン8Bを用
いてもよい。このリードピン8Bにより基板4Bの固定
を兼ねることができるので、組立が容易となる。Further, the printed circuit board 4B is shown in FIGS.
As shown in, the lead pin 8B may be used instead of the lead wire 8. Since the lead pin 8B can also serve as the fixing of the substrate 4B, the assembly becomes easy.
【0041】また、容器本体3Cは、図1に示すように
凹状球曲面3c全体が同一の曲率半径を有していなくて
も、図9に示すように、基準軸6近傍を略平坦面3gと
し、その略平坦面3gの周囲全体に曲面3hを形成して
もよい。なお、この場合の曲面3hは、可動部材2Aの
凸状球曲面21aより曲率半径が小さくてもよい。図9
に示す構成とすることにより、容器本体3Cの製造が容
易となる。Further, as shown in FIG. 9, the container body 3C has a substantially flat surface 3g in the vicinity of the reference axis 6 as shown in FIG. 9, even if the entire concave spherical curved surface 3c does not have the same radius of curvature as shown in FIG. The curved surface 3h may be formed around the substantially flat surface 3g. The curved surface 3h in this case may have a smaller radius of curvature than the convex spherical curved surface 21a of the movable member 2A. Figure 9
With the configuration shown in (3), the container body 3C can be easily manufactured.
【0042】図10乃至図14は図1に示す可動部材2
Aの変形例を示す断面図である。10 to 14 show the movable member 2 shown in FIG.
It is sectional drawing which shows the modification of A.
【0043】図10に示す可動部材2Bのように、定常
状態において基準軸6と交差する保持部材21の凸状球
曲面21aの一部に平坦面21bを設けてもよい。これ
により、定常状態において、永久磁石20が確実に真上
に向くようになるとともに、検出する加速度の大きさを
大きくすることが容易となる。As in the movable member 2B shown in FIG. 10, a flat surface 21b may be provided on a part of the convex spherical curved surface 21a of the holding member 21 that intersects with the reference axis 6 in the steady state. As a result, in the steady state, the permanent magnet 20 surely faces upward, and it becomes easy to increase the magnitude of acceleration to be detected.
【0044】また、図11に示す可動部材2Cのよう
に、保持部材21の上部周縁に傾斜面21cを設けても
よい。これにより、転動の際に上部周縁が引っ掛かるの
を防止できる。Further, as in the movable member 2C shown in FIG. 11, an inclined surface 21c may be provided on the upper peripheral edge of the holding member 21. This can prevent the upper peripheral edge from being caught during rolling.
【0045】また、図12に示す可動部材2Dのよう
に、永久磁石20の上部周縁に傾斜面20aを設けても
よい。これにより、加速度により急激にホールIC5へ
の磁束が減るので、高速・高感度化を図ることができ
る。Further, as in the movable member 2D shown in FIG. 12, an inclined surface 20a may be provided on the upper peripheral edge of the permanent magnet 20. As a result, the magnetic flux to the Hall IC 5 is sharply reduced due to the acceleration, so that high speed and high sensitivity can be achieved.
【0046】また、図13に示す可動部材2Eのよう
に、永久磁石20を保持部材21に埋没させてもよい。
これにより、転動の際に永久磁石20がホールIC5や
容器本体2A等に当たって永久磁石20やホールIC5
の破損を防止できる。The permanent magnet 20 may be embedded in the holding member 21 as in the movable member 2E shown in FIG.
As a result, when rolling, the permanent magnet 20 hits the Hall IC 5 or the container body 2A, etc.
Can be prevented from being damaged.
【0047】また、図14に示す可動部材2Fのよう
に、重心位置を調整するための重心位置調整部材23を
付加してもよい。この重心位置調整部材23の配置する
位置やその比重,厚みを選択して重心位置を調整するこ
とにより、作動加速度を調整することができる。同図の
重心位置調整部材23は、永久磁石20の下に配置さ
れ、例えば比重が永久磁石20より大きいものを選択す
ることにより、重心位置を低くすることができ、比重が
永久磁石20より小さいものを選択することにより、重
心位置を高くすることができる。このように、永久磁石
20及び保持部材21を製造後、重心位置調整部材23
の比重や厚みを選択することにより、高さ方向の重心位
置を容易に調整することができる。この他に、重心位置
調整部材23を用いなくても、永久磁石20を収容する
穴の深さを変えて可動部材2全体の重心位置を移動させ
て作動加速度を調整することもできる。また、本実施例
のセンサ1が検出し得る加速度や変位の大きさは、保持
部材21の外径,永久磁石20の磁力,可動部材2全体
の重心位置,可動部材2の重量,凸状球曲面21a及び
凹状球曲面3cの曲率半径や永久磁石20とホールIC
5との間の距離等を変えることにより変更することがで
きる。Further, like the movable member 2F shown in FIG. 14, a center of gravity position adjusting member 23 for adjusting the center of gravity position may be added. The actuation acceleration can be adjusted by selecting the position where the center-of-gravity position adjusting member 23 is arranged, its specific gravity, and the thickness to adjust the position of the center of gravity. The center-of-gravity position adjusting member 23 in the figure is arranged below the permanent magnet 20, and by selecting, for example, one having a specific gravity larger than that of the permanent magnet 20, the position of the center of gravity can be lowered, and the specific gravity is smaller than that of the permanent magnet 20. By selecting one, the position of the center of gravity can be raised. In this way, after manufacturing the permanent magnet 20 and the holding member 21, the center of gravity position adjusting member 23
It is possible to easily adjust the position of the center of gravity in the height direction by selecting the specific gravity and thickness of the. In addition to this, without using the center-of-gravity position adjusting member 23, it is also possible to change the depth of the hole for housing the permanent magnet 20 to move the center-of-gravity position of the entire movable member 2 to adjust the operating acceleration. Further, the magnitudes of acceleration and displacement that can be detected by the sensor 1 of the present embodiment include the outer diameter of the holding member 21, the magnetic force of the permanent magnet 20, the position of the center of gravity of the movable member 2, the weight of the movable member 2, and the convex sphere. The radius of curvature of the curved surface 21a and the concave spherical curved surface 3c, the permanent magnet 20 and the Hall IC
It can be changed by changing the distance between the 5 and the like.
【0048】また、可動部材2Aは全部が永久磁石から
なるものでもよい。この場合、例えば、一体成形により
容易に製造することができる。The movable member 2A may be made of a permanent magnet. In this case, for example, it can be easily manufactured by integral molding.
【0049】このような本実施例によれば、以下の効果
が得られる。According to this embodiment, the following effects can be obtained.
【0050】(1) 凹状球曲面3c及び凸状球曲面21
aの特定形状により自動復帰機構を構成しているので、
可動部材2を磁気的に保持する磁性部材を容器本体3側
に設ける必要がなくなり、容器本体3の構造を簡素化す
ることができるので、センサ1の小型化を図ることがで
きる。(1) Concave spherical curved surface 3c and convex spherical curved surface 21
Since the automatic return mechanism is configured by the specific shape of a,
Since it is not necessary to provide a magnetic member for magnetically holding the movable member 2 on the container body 3 side, and the structure of the container body 3 can be simplified, the sensor 1 can be downsized.
【0051】(2) 可動部材2Aは、僅かの加速度によ
って転動するので、微振動の検知が可能であるので、感
震器として地震検知の安全装置に好適である。(2) Since the movable member 2A rolls with a slight acceleration, it is possible to detect a slight vibration, and therefore it is suitable as a seismic device for a safety device for earthquake detection.
【0052】(3) 検出する加速度,変位は、各部の寸
法,重量,重心位置,永久磁石20の特性等で決まるこ
とから、基本的には寸法精度で特性のばらつきを抑える
ことが可能で、再現性も良好であることから、ばらつき
の小さい製品を製造することができる。(3) Since the acceleration and displacement to be detected are determined by the size, weight, position of the center of gravity, the characteristics of the permanent magnet 20 and the like of each part, it is possible to suppress variations in characteristics basically with dimensional accuracy. Since the reproducibility is also good, it is possible to manufacture products with small variations.
【0053】(4) 磁気検出手段としてホールIC5を
用いているので、次のような効果が得られる。(4) Since the Hall IC 5 is used as the magnetic detection means, the following effects can be obtained.
【0054】(i) リードスイッチを用いた場合と比較
して容器本体3の高さを小さくできるので、センサ1の
小型化を図ることができる。(I) Since the height of the container body 3 can be reduced as compared with the case where a reed switch is used, the sensor 1 can be downsized.
【0055】(ii) リードスイッチのような接点の汚れ
等による接触不良もないため、高信頼性を得ることがで
きる。(Ii) High reliability can be obtained because there is no contact failure due to dirt on the contact such as a reed switch.
【0056】(iii) 水銀等の地球環境汚染有害物質を使
用せずに地震の微振動を検知することができる。(Iii) It is possible to detect a micro-vibration of an earthquake without using toxic substances polluting the environment such as mercury.
【0057】(iv) 高価な磁性流体応用スイッチを使用
していないため、構造が簡単でコスト低下を図ることが
できる。(Iv) Since an expensive magnetic fluid application switch is not used, the structure is simple and the cost can be reduced.
【0058】なお、本発明は上記実施例に限定されず、
その要旨を変更しない範囲内で種々に変形実施できる。
例えば、特定形状として、容器に凹状の半柱状曲面、可
動部材に凸状の半柱状曲面を形成してもよい。この場合
は、水平方向における1軸に沿う往復方向の加速度,変
位を検出することができる。また、本実施例では、加速
度の検出を主に説明したが、傾斜,転倒等による変位も
同様に検出できることはいうまでもない。The present invention is not limited to the above embodiment,
Various modifications can be made without changing the gist of the invention.
For example, as a specific shape, a concave semi-columnar curved surface may be formed on the container and a convex semi-columnar curved surface may be formed on the movable member. In this case, the reciprocal acceleration and displacement along one axis in the horizontal direction can be detected. Further, in the present embodiment, the detection of the acceleration is mainly described, but it goes without saying that the displacement due to the inclination, the fall, etc. can be detected in the same manner.
【0059】[0059]
【発明の効果】以上詳述した本発明によれば、以下の効
果を奏する。According to the present invention described in detail above, the following effects can be obtained.
【0060】請求項1記載の発明によれば、磁性部材等
を用いることなく特定形状によって可動部材を定常位置
に復帰するようにしているので、永久磁石が設けられた
可動部材の自動復帰機構を備え、しかも小型化を図った
加速度センサを提供することができる。また、磁気検出
手段としてホールICを用いることにより、地球環境を
汚染することなく、信頼性の高い検出信号が得られ、検
出特性のばらつきが小さく、容器の高さ方向の寸法を小
さくでき、構成を簡素化でき、小型化を図れる等の他の
磁気検出手段が持っていないホールICの優れた効果を
発揮することができる。According to the first aspect of the invention, since the movable member is returned to the steady position by the specific shape without using a magnetic member or the like, an automatic return mechanism for the movable member provided with a permanent magnet is provided. It is possible to provide an acceleration sensor that is equipped with and is downsized. Further, by using the Hall IC as the magnetic detection means, a highly reliable detection signal can be obtained without polluting the global environment, variation in detection characteristics is small, and the size of the container in the height direction can be reduced. It is possible to achieve the excellent effects of the Hall IC that other magnetic detection means do not have, such as simplification and miniaturization.
【0061】請求項2記載の発明によれば、保持部材に
より加速度に応じた磁束がホールICに供給されるよう
に永久磁石を保持することができる。According to the second aspect of the invention, the permanent magnet can be held by the holding member so that the magnetic flux corresponding to the acceleration is supplied to the Hall IC.
【0062】請求項3記載の発明によれば、可動部材を
構成する保持部材に凸状の曲面を設け、容器の底部内面
に凹状の曲面を設けることにより、永久磁石が設けられ
た可動部材の自動復帰機構を備え、しかも小型化を図っ
た加速度センサを提供することができる。According to the third aspect of the present invention, the holding member forming the movable member is provided with the convex curved surface, and the inner surface of the bottom of the container is provided with the concave curved surface. It is possible to provide an acceleration sensor that is equipped with an automatic return mechanism and is downsized.
【0063】請求項4記載の発明によれば、特定形状と
して凹状球曲面,凸状球曲面を形成しているので、水平
方向における全方向の加速度,変位を検出することがで
きる。According to the fourth aspect of the invention, since the concave spherical curved surface and the convex spherical curved surface are formed as the specific shapes, it is possible to detect acceleration and displacement in all directions in the horizontal direction.
【図1】本実施例の断面図FIG. 1 is a sectional view of the present embodiment.
【図2】可動部材の斜視図FIG. 2 is a perspective view of a movable member.
【図3】ホールICの斜視図FIG. 3 is a perspective view of a Hall IC
【図4】ホールICのブロック図[Figure 4] Hall IC block diagram
【図5】ホールICの出力特性図[Figure 5] Hall IC output characteristic diagram
【図6】本実施例の非定常状態を示す断面図FIG. 6 is a sectional view showing an unsteady state of the present embodiment.
【図7】ホールICに供給される磁束及びホールICが
出力する信号を示す図FIG. 7 is a diagram showing a magnetic flux supplied to the Hall IC and a signal output from the Hall IC.
【図8】容器本体及びプリント基板の変形例を示す断面
図FIG. 8 is a sectional view showing a modified example of the container body and the printed circuit board.
【図9】容器本体及びプリント基板の変形例を示す断面
図FIG. 9 is a sectional view showing a modified example of the container body and the printed circuit board.
【図10】可動部材の変形例を示す断面図FIG. 10 is a sectional view showing a modified example of the movable member.
【図11】可動部材の変形例を示す断面図FIG. 11 is a cross-sectional view showing a modified example of the movable member.
【図12】可動部材の変形例を示す断面図FIG. 12 is a sectional view showing a modified example of the movable member.
【図13】可動部材の変形例を示す断面図FIG. 13 is a sectional view showing a modified example of the movable member.
【図14】可動部材の変形例を示す断面図FIG. 14 is a cross-sectional view showing a modified example of the movable member.
【図15】リードスイッチを用いた従来のセンサの一例
を示す断面図FIG. 15 is a cross-sectional view showing an example of a conventional sensor using a reed switch.
1 加速度センサ 2A,2B,2C,2D,2E,2F, 可動部材 3A,3B,3C 容器本体 3b 容器の底部 3c 凹状球曲面(特定形状) 5 ホールIC 6 基準軸(定常位置) 20 永久磁石 21 保持部材 21a 凸状球曲面(特定形状) 1 Acceleration Sensor 2A, 2B, 2C, 2D, 2E, 2F, Movable Member 3A, 3B, 3C Container Body 3b Container Bottom 3c Concave Spherical Curved Surface (Specific Shape) 5 Hall IC 6 Reference Axis (Steady Position) 20 Permanent Magnet 21 Holding member 21a Convex spherical curved surface (specific shape)
Claims (4)
可動部材と、この可動部材を内部空間に移動可能に収容
する非磁性容器と、前記可動部材に対向配置されこの可
動部材の移動によって生ずる磁束の変化を検出するホー
ルICと、定常状態から非定常状態に変わると前記可動
部材は定常位置から移動し、定常状態に戻るとその可動
部材は定常位置に復帰する自動復帰機構とを有する加速
度センサであって、前記自動復帰機構を特定形状により
構成したことを特徴とする加速度センサ。1. A movable member, at least a part of which is provided with a permanent magnet, a non-magnetic container that movably accommodates the movable member in an internal space, and a movable member that is disposed so as to face the movable member and that moves. An acceleration having a Hall IC that detects a change in magnetic flux, and an automatic return mechanism that moves the movable member from a steady position when the steady state changes to a non-steady state and returns to the steady position when the movable member returns to the steady state. An acceleration sensor, wherein the automatic return mechanism has a specific shape.
前記容器の底部内面に接触する保持部材と、この保持部
材に保持された棒状の永久磁石とによって構成されてい
る請求項1記載の加速度センサ。2. The movable member provided with the permanent magnet,
The acceleration sensor according to claim 1, comprising a holding member that comes into contact with the inner surface of the bottom of the container, and a rod-shaped permanent magnet held by the holding member.
凹状の曲面を形成し、前記可動部材を構成する保持部材
の下面側に前記凹状の曲面より曲率半径の小さい凸状の
曲面を形成したものである請求項1又は2記載の加速度
センサ。3. The specific shape is such that a concave curved surface is formed on the inner surface of the bottom of the container, and a convex curved surface having a smaller radius of curvature than the concave curved surface is formed on the lower surface side of the holding member constituting the movable member. The acceleration sensor according to claim 1 or 2, which is obtained by
凹状球曲面を形成し、前記可動部材を構成する保持部材
の下面側に前記凹状球曲面より曲率半径の小さい凸状球
曲面を形成したものである請求項1乃至3のいずれかに
記載の加速度センサ。4. The specific shape is such that a concave spherical curved surface is formed on the inner surface of the bottom of the container, and a convex spherical curved surface having a smaller radius of curvature than the concave spherical curved surface is formed on the lower surface side of the holding member constituting the movable member. The acceleration sensor according to any one of claims 1 to 3, which is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8481594A JPH07294546A (en) | 1994-04-22 | 1994-04-22 | Acceleration sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8481594A JPH07294546A (en) | 1994-04-22 | 1994-04-22 | Acceleration sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07294546A true JPH07294546A (en) | 1995-11-10 |
Family
ID=13841242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8481594A Withdrawn JPH07294546A (en) | 1994-04-22 | 1994-04-22 | Acceleration sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07294546A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008282423A (en) * | 1998-04-10 | 2008-11-20 | Fujitsu Component Ltd | Acceleration-measuring apparatus |
CN102539828A (en) * | 2012-02-10 | 2012-07-04 | 柴源 | Resistive acceleration sensor with six degrees of freedom |
-
1994
- 1994-04-22 JP JP8481594A patent/JPH07294546A/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008282423A (en) * | 1998-04-10 | 2008-11-20 | Fujitsu Component Ltd | Acceleration-measuring apparatus |
CN102539828A (en) * | 2012-02-10 | 2012-07-04 | 柴源 | Resistive acceleration sensor with six degrees of freedom |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20010703 |